CN111427233A - Manufacturing method of imprinting mold - Google Patents
Manufacturing method of imprinting mold Download PDFInfo
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- CN111427233A CN111427233A CN201910018231.8A CN201910018231A CN111427233A CN 111427233 A CN111427233 A CN 111427233A CN 201910018231 A CN201910018231 A CN 201910018231A CN 111427233 A CN111427233 A CN 111427233A
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- master
- material layer
- substrate
- imprinting
- flexible material
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0017—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor for the production of embossing, cutting or similar devices; for the production of casting means
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Abstract
The invention provides a manufacturing method of an imprinting mold, which comprises the following steps: 1) manufacturing a master plate structure, wherein a plurality of first groove structures are formed on the surface of the master plate structure; 2) manufacturing a transfer printing template based on the master mask structure, wherein a plurality of convex structures are formed on the surface of the transfer printing template; 3) providing an imprinting mold substrate; 4) forming an imprinting mould flexible material layer on the surface of the imprinting mould substrate; 5) forming a plurality of second groove structures on the surface of the flexible material layer of the imprinting mold by adopting an imprinting process based on the transfer printing template; 6) solidifying the flexible material layer of the stamping mould; 7) and stripping the transfer printing template. The manufacturing method of the stamping die can improve the utilization rate of the master structure, has simple preparation process, has small stress in the stamping die, and does not have the risk of bursting.
Description
Technical Field
The invention belongs to the technical field of an embossing process, and particularly relates to a manufacturing method of an embossing mold.
Background
In the prior art, Hard mask (Hard mold) is generally used for imprinting, and the imprinting mold is generally a metal mold, such as a typical nickel (Ni) mold. However, the metal mold has the following problems: firstly, metal molds have service lives and must be scrapped after defects exist, and an imprinted product which can be prepared by one metal mold is limited and has low utilization rate; secondly, the preparation process of the metal mold is complex, the cost is high, and the metal mold is not beneficial to batch production; thirdly, the metal molds are generally required to be coated on the roller for imprinting operation, a plurality of metal molds are required to be spliced on the periphery of the roller, so that a splicing seam exists between the adjacent metal molds, and the splicing seam is made of metal on two sides, so that when the metal molds on two sides of the splicing seam are bonded by using an adhesive tape, the stress is very large, and the metal molds are easy to burst in the subsequent imprinting operation process, thereby causing the metal molds to be scrapped.
Disclosure of Invention
In view of the above disadvantages of the prior art, an object of the present invention is to provide a method for manufacturing an imprint mold, which is used to solve the problems in the prior art that a metal mold has limited products that can be manufactured by one metal mold, and the utilization rate is low; the preparation process of the metal mold is complex, the cost is high, and the mass production is not facilitated; the metal mold generally needs to be coated on the roller for imprinting operation, a plurality of metal molds need to be spliced on the periphery of the roller, so that splicing seams exist between adjacent metal molds, the splicing seams are made of metal on two sides, when the metal molds on two sides of the splicing seams are bonded by using the adhesive tape, the stress is very large, and the metal molds are easy to crack in the subsequent imprinting operation process, so that the metal molds are scrapped and the like.
In order to achieve the above and other related objects, the present invention provides a method for manufacturing an imprint mold, including:
1) Manufacturing a master plate structure, wherein a plurality of first groove structures are formed on the surface of the master plate structure;
2) Manufacturing a transfer printing template based on the master mask structure, wherein a plurality of protruding structures which correspond to the first groove structures one by one are formed on the surface of the transfer printing template;
3) Providing an imprinting mold substrate;
4) Forming an imprinting mold flexible material layer on the surface of the imprinting mold substrate;
5) Forming a plurality of second groove structures on the surface of the flexible material layer of the imprinting mold by adopting an imprinting process based on the transfer printing template, wherein the second groove structures are the same as the first groove structures;
6) Solidifying the flexible material layer of the stamping mould;
7) And stripping the transfer printing template to obtain the imprinting mold with the same groove structure as the master mask structure.
Optionally, step 1) comprises the steps of:
1-1) providing a master substrate;
1-2) forming a master flexible material layer on the surface of the master substrate;
1-3) forming a plurality of first groove structures on the surface of the master flexible material layer by adopting a photoetching process or a machining process.
Optionally, step 2) comprises the steps of:
2-1) providing a transfer substrate;
2-2) forming a transfer printing flexible material layer on the surface of the transfer printing substrate;
2-3) forming a plurality of convex structures on the surface of the transfer printing flexible material layer by adopting an imprinting process based on the master plate structure;
2-4) curing the transfer flexible material layer;
2-5) peeling off the master structure to obtain the transfer printing template.
Optionally, step 2) comprises the steps of:
2-1) preparing an intermediate transfer printing template with a convex structure by adopting an imprinting process based on the master mask structure;
2-2) preparing an intermediate transfer printing template with a groove structure by adopting an imprinting process based on the intermediate transfer printing template with the convex structure;
2-3) preparing the transfer printing template by adopting an imprinting process based on the intermediate transfer printing substrate with the groove structure obtained in the previous step.
Optionally, the following steps are further included between step 2-2) and step 2-3):
2-2') preparing another intermediate transfer template with a convex structure by an imprinting process based on the intermediate transfer template with the groove structure obtained in the previous step;
2-2 ") preparing another intermediate transfer template having a groove structure by an imprinting process based on the intermediate transfer template having the protrusion structure obtained in the previous step.
Optionally, step 2-2 ") further comprises the step of repeating steps 2-2') to 2-2") at least once between step 2-3).
Optionally, a plurality of the first groove structures are distributed independently or a plurality of the first groove structures are distributed in a grid-shaped interconnection manner; the second groove structures are independently distributed or are in grid-shaped interconnection distribution.
Optionally, a width of the first groove structure comprises 2 μm to 50 μm, and a depth of the first groove structure comprises 2 μm to 50 μm; the width of the protruding structure is 2-50 μm, and the height of the protruding structure is 2-50 μm; the width of the second groove structure comprises 2-50 μm, and the depth of the second groove structure comprises 2-50 μm.
Optionally, the imprint mold substrate comprises a flexible substrate.
Optionally, forming a plurality of the transfer templates based on the master structure; a plurality of the imprint molds are formed on the basis of the respective transfer templates.
As described above, the method for manufacturing an imprint mold according to the present invention has the following advantageous effects:
According to the manufacturing method of the imprinting mold, after the master plate structure is manufactured, the transfer printing template is manufactured firstly based on the master plate structure, then the imprinting mold with the same groove structure as the master plate structure is manufactured based on the transfer printing template, one master plate structure can be used for manufacturing a plurality of transfer printing templates, one transfer printing template can be used for manufacturing a plurality of imprinting molds, and thousands of or even more imprinting molds can be obtained based on one master plate structure, so that more imprinting products can be prepared, and the utilization rate of the master plate structure is improved; meanwhile, the second groove structure of the imprinting mold is formed in the flexible material layer, so that the preparation process is simple; when the impression mould substrate of the impression mould is a flexible substrate, the impression mould can be directly wound on the surface of the roller without splicing, the stress in the impression mould is small, and the risk of bursting can not exist.
Drawings
Fig. 1 is a flowchart illustrating a method for manufacturing an imprint mold according to the present invention.
Fig. 2 to 26 are schematic partial sectional structures of structures obtained in steps of the method for manufacturing an imprint mold according to the present invention.
Description of the element reference numerals
10 mother set structure
101 master substrate
102 master flexible material layer
103 first groove structure
11 transfer printing template
111 transfer substrate
112 transfer of a layer of flexible material
113. 1143, 1163 bump structure
114. 116 intermediate transfer template with raised structures
1141. 1151, 1161, 1171 intermediate transfer substrate
1142. 1152, 1162, 1172 intermediate transfer of a layer of flexible material
115. 117 intermediate transfer template having a grooved structure
1153. 1173 groove structure
12 stamping die
121 imprint mold substrate
122 flexible material layer of impression mould
123 second groove structure
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
Please refer to fig. 1 to 26. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.
Referring to fig. 1, the present invention provides a method for manufacturing an imprint mold, which includes the following steps:
1) Manufacturing a master plate structure, wherein a plurality of first groove structures are formed on the surface of the master plate structure;
2) Manufacturing a transfer printing template based on the master mask structure, wherein a plurality of protruding structures which correspond to the first groove structures one by one are formed on the surface of the transfer printing template;
3) Providing an imprinting mold substrate;
4) Forming an imprinting mold flexible material layer on the surface of the imprinting mold substrate;
5) Forming a plurality of second groove structures on the surface of the flexible material layer of the imprinting mold by adopting an imprinting process based on the transfer printing template, wherein the second groove structures are the same as the first groove structures;
6) Solidifying the flexible material layer of the stamping mould;
7) And stripping the transfer printing template to obtain the imprinting mold with the same groove structure as the master mask structure.
In step 1), please refer to step S1 in fig. 1 and fig. 2 to 4, a master structure 10 is manufactured, and a plurality of first groove structures 103 are formed on a surface of the master structure 10.
As an example, making the master structure 10 may comprise the steps of:
1-1) providing a master substrate 101, as shown in fig. 2;
1-2) forming a master flexible material layer 102 on a surface of the master substrate 101, as shown in fig. 3;
1-3) forming a plurality of first groove structures 103 on the surface of the master flexible material layer 102 by using a photolithography process or a machining process, as shown in fig. 4.
By way of example, the master substrate 101 may be a rigid substrate, which may include but is not limited to a glass substrate, or a flexible substrate, which includes but is not limited to a polyethylene terephthalate (PET) substrate, a Polyimide (PI) substrate, a Polycarbonate (PC) substrate, or a Polymethylmethacrylate (PMMA) substrate. The thickness of the master substrate 101 may be set according to actual needs, and is not limited herein.
By way of example, the master compliant material layer 102 may comprise a photoresist layer or a UV (ultraviolet) resin layer. The UV resin layer is also referred to as a photosensitive resin layer and an ultraviolet-curable resin layer, and can be used as a sizing material for paint, coating, ink, and the like. UV is an abbreviation for Ultraviolet Rays, English, i.e., Ultraviolet light. The ultraviolet ray is invisible to naked eyes, is a section of electromagnetic radiation except visible light, and has the wavelength ranging from 10nm to 400 nm. The curing principle of the UV resin layer is that a photoinitiator (or photosensitizer) in the UV resin generates active free radicals or cations after absorbing ultraviolet light under the irradiation of ultraviolet rays, and the polymerization, crosslinking and grafting chemical reactions of monomers are initiated, so that the UV resin layer is converted from a liquid state to a solid state within a few seconds.
As an example, the master flexible material layer 102 can be formed on the surface of the master substrate 101 using a spin-on process or a doctor-blade process.
As an example, the step 1-3) of curing the master compliant material layer 102 is further included after forming a plurality of the first groove structures 103 on the surface of the master compliant material layer 102. In particular, the master compliant material layer 102 may be continuously irradiated with a strong light (e.g., a strong ultraviolet light) to cure the master compliant material layer 102, thereby ensuring that the master compliant material layer 102 is not deformed in the subsequent process steps, and thus ensuring the accuracy of the pattern to be transferred (i.e., the first groove structure 103).
As an example, the plurality of first groove structures 103 may be distributed independently, or the plurality of first groove structures 103 may be distributed in a grid-like interconnected manner, that is, the plurality of first groove structures 103 may also be interconnected in a grid-like manner.
As an example, the width and the depth of the first groove structure 103 may be set according to actual needs, and preferably, in this embodiment, the width of the first groove structure 103 may include 2 μm to 50 μm, and the depth of the first groove structure 103 may include 2 μm to 50 μm.
In step 2), please refer to step S2 in fig. 1 and fig. 5 to 24, a transfer template 11 is manufactured based on the master structure 10, and a plurality of protruding structures 113 corresponding to the first groove structures 103 are formed on the surface of the transfer template 11.
In one example, step 2) may include the steps of:
2-1) providing a transfer substrate 111, as shown in FIG. 5;
2-2) forming a transfer flexible material layer 112 on the surface of the transfer substrate 111, as shown in fig. 6;
2-3) forming a plurality of the convex structures 113 on the surface of the transfer flexible material layer 112 by using an imprinting process based on the master structure 10, as shown in fig. 6;
2-4) curing the transfer flexible material layer 112, as shown in FIG. 6;
2-5) peeling off the master structure 10 to obtain the transfer template 11, as shown in fig. 7.
As an example, the transfer substrate 111 may be a rigid substrate, which may include, but is not limited to, a glass substrate, or a flexible substrate, which includes, but is not limited to, a polyethylene terephthalate (PET) substrate, a Polyimide (PI) substrate, a Polycarbonate (PC) substrate, or a Polymethylmethacrylate (PMMA) substrate. The thickness of the transfer substrate 111 may be set according to actual needs, and is not limited herein.
As an example, the transfer flexible material layer 112 may include a UV (ultraviolet light) resin layer.
As an example, the transfer flexible material layer 112 may be formed on the surface of the transfer substrate 111 by a spin coating process or a doctor blade process.
As an example, in step 2-3), the transfer flexible material layer 112 may be pressed on the surface of the master structure 10 on which the first groove structures 103 are formed (of course, the master structure 10 may also be pressed on the surface of the transfer flexible material layer 112, and the surface of the master structure 10 on which the first groove structures 103 are formed is in contact with the transfer flexible material layer 112), and at this time, a part of the transfer flexible material layer 112 is filled in the first groove structures 103 to form the protrusion structures 113 corresponding to the first groove structures 103 one by one. Note that, in this step, the transfer flexible material layer 112 is still in a deformable liquid or semisolid state.
As an example, in step 2-4), when the transfer flexible material layer 112 is a UV resin layer, ultraviolet light (UV) may be used to irradiate the transfer flexible material layer 112 to cure the transfer flexible material layer 112.
It should be noted that the shape formed by the plurality of protrusion structures 113 is the same as the shape formed by the plurality of first groove structures 103, that is, the plurality of protrusion structures 113 may be distributed independently, or the plurality of protrusion structures 113 may be distributed in a grid-like interconnected manner, that is, the plurality of protrusion structures 113 may also be interconnected in a grid-like interconnected manner.
As an example, the width and the depth of the protruding structure 113 may be set according to actual needs, and preferably, in this embodiment, the width of the protruding structure 113 may include 2 μm to 50 μm, and the depth of the protruding structure 113 may include 2 μm to 50 μm.
As an example, in this step, a plurality of transfer templates 11 are formed based on one master structure 10, and the specific number of the formed transfer templates 11 can be set according to actual needs, and is not limited herein.
In another example, step 2) may further include the steps of:
2-1) preparing an intermediate transfer template 114 with a convex structure by adopting an imprinting process based on the master structure 10;
2-2) preparing an intermediate transfer template 115 with a groove structure by adopting an imprinting process based on the intermediate transfer template 114 with the convex structure;
2-3) preparing the transfer template 11 by adopting an imprinting process based on the intermediate transfer substrate 115 with the groove structure obtained in the previous step.
As an example, step 2-1) includes the steps of:
2-1-1) providing an intermediate transfer substrate 1141, as shown in fig. 8;
2-1-2) forming an intermediate transfer flexible material layer 1142 on the surface of the intermediate transfer substrate 1141, as shown in fig. 9;
2-1-3) forming a plurality of the bump structures 1143 on the surface of the intermediate transfer flexible material layer 1142 by an imprint process based on the master structure 10, as shown in fig. 9 and 10;
2-1-4) curing the intermediate transfer material layer 1142, as shown in fig. 9;
2-1-5) to peel off the master structure 10 to obtain the intermediate transfer stamp 114 having the relief structure, as shown in fig. 10.
As an example, step 2-2) includes the steps of:
2-2-1) providing another intermediate transfer substrate 1151, as shown in fig. 11;
2-2-2) forming another intermediate transfer flexible material layer 1152 on the surface of the intermediate transfer substrate 1151, as shown in fig. 12;
2-2-3) forming a plurality of groove structures 1153 on the surface of the intermediate transfer flexible material layer 1152 by using an imprinting process based on the intermediate transfer template 114 having the convex structures, as shown in fig. 12 and 13; the groove structure 1153 has the same structure and shape as the first groove structure 103;
2-2-4) curing the intermediate transfer material layer 1152, as shown in fig. 12;
2-2-5) to peel off the intermediate transfer mold 114 having the convex structure to obtain the intermediate transfer mold 115 having the concave structure, as shown in fig. 13.
As an example, step 2-3) comprises the steps of:
2-3-1) providing a transfer substrate 111, as shown in fig. 14;
2-3-2) forming a transfer flexible material layer 112 on the surface of the transfer substrate 111, as shown in fig. 15;
2-3-3) forming a plurality of the protrusion structures 113 on the surface of the transfer flexible material layer 112 by using an imprinting process based on the intermediate transfer substrate 115 with the groove structure obtained in the previous step (which may also be the intermediate transfer substrate 117 with the groove structure described in the subsequent step and fig. 22), as shown in fig. 15;
2-3-4) curing the transfer flexible material layer 112, as shown in fig. 15;
2-3-5) peeling off the intermediate transfer template 115 having the groove structure to obtain the transfer template 11, as shown in fig. 16.
In still another example, the following steps may be further included between step 2-2) and step 2-3):
2-2') preparing another intermediate transfer template 116 having a protrusion structure using an imprinting process based on the intermediate transfer template 115 having a groove structure obtained in the previous step;
2-2 ") preparing another intermediate transfer template 117 having a groove structure using an imprinting process based on the intermediate transfer template 116 having a convex structure obtained in the previous step.
As an example, step 2-2') may include the steps of:
2-2' -1) providing an intermediate transfer substrate 1161, as shown in fig. 17;
2-2' -2) forming an intermediate transfer flexible material layer 1162 on the surface of the intermediate transfer substrate 1161, as shown in fig. 18;
2-2' -3) forming a plurality of the protrusion structures 1163 on the surface of the intermediate transfer flexible material layer 1162 by an imprinting process based on the intermediate transfer template 115 having the groove structures, as shown in fig. 18 and 19;
2-2' -4) curing the intermediate transfer material layer 1162, as shown in fig. 18;
2-2' -5) to peel off the intermediate transfer template 115 having the groove structure to obtain the intermediate transfer template 116 having the projection structure, as shown in fig. 19.
As an example, step 2-2 ") may comprise the steps of:
2-2 "-1) providing another intermediate transfer substrate 1171, as shown in fig. 20;
2-2 "-2) forming another intermediate transfer compliant material layer 1172 on the surface of said intermediate transfer substrate 1171, as shown in fig. 21;
2-2 "2-3) forming a plurality of groove structures 1173 on the surface of the intermediate transfer flexible material layer 1172 by an imprinting process based on the intermediate transfer template 116 having the convex structures, as shown in fig. 21 and 22; the groove structure 1143 has the same structure and shape as the first groove structure 103;
2-2 "-4) curing the intermediate transfer material layer 1172, as shown in fig. 21;
2-2 "-5) to peel off the intermediate transfer mold plate 116 having the convex structure to obtain the intermediate transfer mold plate 117 having the concave structure, as shown in fig. 22.
In yet another example, step 2-2 ") may further include the step of repeating steps 2-2') through 2-2") at least once between steps 2-3).
As an example, the intermediate transfer substrates 1141, 1151, 1161, and 1171 may be rigid substrates, which may include but are not limited to glass substrates, or flexible substrates, which include but are not limited to polyethylene terephthalate (PET) substrates, Polyimide (PI) substrates, Polycarbonate (PC) substrates, or polymethyl methacrylate (PMMA) substrates. The thickness of the transfer substrate 111 may be set according to actual needs, and is not limited herein.
As an example, the intermediate transfer flexible material layers 1142, 1152, 1162, and 1172 may include a UV (ultraviolet) resin layer.
As an example, when the intermediate transfer flexible material layers 1142, 1152, 1162, and 1172 are UV resin layers, ultraviolet light (UV) may be irradiated to the intermediate transfer flexible material layers 1142, 1152, 1162, and 1172 to cure the intermediate transfer flexible material layers 1142, 1152, 1162, and 1172.
In step 3), referring to step S3 in fig. 1 and fig. 23, the imprint mold substrate 121 is provided.
As an example, the imprint mold substrate 121 may be a rigid substrate or a flexible substrate, and preferably, in the present embodiment, the imprint mold substrate 121 is a flexible substrate; the rigid substrate may include, but is not limited to, a glass substrate, and the flexible substrate may include, but is not limited to, a polyethylene terephthalate (PET) substrate, a Polyimide (PI) substrate, a Polycarbonate (PC) substrate, or a Polymethylmethacrylate (PMMA) substrate. The thickness of the imprint mold substrate 121 may be set according to actual needs, and is not limited herein.
In step 4), referring to step S4 in fig. 1 and fig. 24, an imprint mold flexible material layer 122 is formed on the surface of the imprint mold substrate 121.
As an example, the imprinting mold flexible material layer 122 may include a UV (ultraviolet) resin layer.
As an example, the imprinting mold flexible material layer 122 may be formed on the surface of the imprinting mold substrate 121 by using a spin coating process or a doctor blade process.
In step 5), referring to step S5 in fig. 1 and fig. 25, a plurality of second groove structures 123 are formed on the surface of the flexible material layer 122 of the imprint mold by an imprint process based on the transfer template 11, where the second groove structures 123 are the same as the first groove structures 103.
As an example, the transfer template 11 may be pressed on the surface of the flexible material layer 122 of the imprint mold, the surface of the transfer template 11 on which the protruding structures 113 are formed is in contact with the flexible material layer 122 of the imprint mold, at this time, the protruding structures 113 are sunk into the flexible material layer 122 of the imprint mold, and a portion of the flexible material layer 122 of the imprint mold is filled between the protruding structures 113 to form the second groove structures 123. Note that, in this step, the flexible material layer 122 of the imprint mold is still in a deformable liquid or semi-solid state.
As an example, the plurality of second groove structures 123 may be distributed independently, or the plurality of second groove structures 123 may also be distributed in a grid-like interconnected manner, that is, the plurality of second groove structures 123 may also be interconnected in a grid-like manner.
As an example, the width and the depth of the second groove structure 123 may be set according to actual needs, and preferably, in this embodiment, the width of the second groove structure 123 may include 2 μm to 50 μm, and the depth of the second groove structure 123 may include 2 μm to 50 μm.
In step 6), referring to step S6 in fig. 1, the imprinting mold flexible material layer 122 is cured.
As an example, when the imprint mold flexible material layer 122 is a UV resin layer, ultraviolet light (UV) may be used to irradiate the imprint mold flexible material layer 122 to cure the imprint mold flexible material layer 122.
In step 7), please refer to step S7 in fig. 1 and fig. 26, the transfer template 11 is peeled off to obtain the imprint mold 12 having the same groove structure as the master structure 10.
As an example, the second groove structure 123 formed in the flexible material layer 122 of the imprint mold 12 is the same as the first groove structure 103 in the master structure 10, that is, step 7) results in the imprint mold 12 that is completely the same as the master structure 10, which is equivalent to completely duplicating the master structure 10.
In this step, a plurality of imprint molds 12 are formed by an imprint process based on each transfer template 11, that is, one transfer template 11 is imprinted to form a plurality of imprint molds 12; the specific number of the imprint molds 12 formed by the imprint process based on each of the transfer templates 11 may be set according to actual needs, and will not be described in detail herein.
According to the manufacturing method of the imprint mold, after the master plate structure 10 is manufactured, the transfer template 11 is manufactured firstly based on the master plate structure 10, then the imprint mold 12 with the same groove structure as the master plate structure 10 is manufactured based on the transfer template 11, one master plate structure 10 can be used for manufacturing a plurality of transfer templates 11, one transfer template 11 can be used for manufacturing a plurality of imprint molds 12, and thousands or even more imprint molds 12 can be obtained based on one master plate structure 10, so that more imprint products can be prepared, and the utilization rate of the master plate structure 10 is improved; meanwhile, the second groove structure 123 of the imprinting mold 12 is formed in the flexible material layer 12 of the imprinting mold, so that the preparation process is simple; when the imprint mold substrate 121 of the imprint mold 12 is a flexible substrate, the imprint mold 12 may be directly wound around the surface of the drum without splicing, and the stress in the imprint mold 12 is small, so that there is no risk of bursting.
In summary, the present invention provides a method for manufacturing an imprint mold, which includes the following steps: 1) manufacturing a master plate structure, wherein a plurality of first groove structures are formed on the surface of the master plate structure; 2) manufacturing a transfer printing template based on the master mask structure, wherein a plurality of protruding structures which correspond to the first groove structures one by one are formed on the surface of the transfer printing template; 3) providing an imprinting mold substrate; 4) forming an imprinting mold flexible material layer on the surface of the imprinting mold substrate; 5) forming a plurality of second groove structures on the surface of the flexible material layer of the imprinting mold by adopting an imprinting process based on the transfer printing template, wherein the second groove structures are the same as the first groove structures; 6) solidifying the flexible material layer of the stamping mould; 7) and stripping the transfer printing template to obtain the imprinting mold with the same groove structure as the master mask structure. According to the manufacturing method of the imprinting mold, after the master plate structure is manufactured, the transfer printing template is manufactured firstly based on the master plate structure, then the imprinting mold with the same groove structure as the master plate structure is manufactured based on the transfer printing template, one master plate structure can be used for manufacturing a plurality of transfer printing templates, one transfer printing template can be used for manufacturing a plurality of imprinting molds, and thousands of or even more imprinting molds can be obtained based on one master plate structure, so that more imprinting products can be prepared, and the utilization rate of the master plate structure is improved; meanwhile, the second groove structure of the imprinting mold is formed in the flexible material layer, so that the preparation process is simple; when the impression mould substrate of the impression mould is a flexible substrate, the impression mould can be directly wound on the surface of the roller without splicing, the stress in the impression mould is small, and the risk of bursting can not exist.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A manufacturing method of an imprint mold is characterized by comprising the following steps:
1) Manufacturing a master plate structure, wherein a plurality of first groove structures are formed on the surface of the master plate structure;
2) Manufacturing a transfer printing template based on the master mask structure, wherein a plurality of protruding structures which correspond to the first groove structures one by one are formed on the surface of the transfer printing template;
3) Providing an imprinting mold substrate;
4) Forming an imprinting mold flexible material layer on the surface of the imprinting mold substrate;
5) Forming a plurality of second groove structures on the surface of the flexible material layer of the imprinting mold by adopting an imprinting process based on the transfer printing template, wherein the second groove structures are the same as the first groove structures;
6) Solidifying the flexible material layer of the stamping mould;
7) And stripping the transfer printing template to obtain the imprinting mold with the same groove structure as the master mask structure.
2. The method of manufacturing an imprint mold according to claim 1, wherein the step 1) includes the steps of:
1-1) providing a master substrate;
1-2) forming a master flexible material layer on the surface of the master substrate;
1-3) forming a plurality of first groove structures on the surface of the master flexible material layer by adopting a photoetching process or a machining process.
3. The method of manufacturing an imprint mold according to claim 1, wherein the step 2) includes the steps of:
2-1) providing a transfer substrate;
2-2) forming a transfer printing flexible material layer on the surface of the transfer printing substrate;
2-3) forming a plurality of convex structures on the surface of the transfer printing flexible material layer by adopting an imprinting process based on the master plate structure;
2-4) curing the transfer flexible material layer;
2-5) peeling off the master structure to obtain the transfer printing template.
4. The method of manufacturing an imprint mold according to claim 1, wherein the step 2) includes the steps of:
2-1) preparing an intermediate transfer printing template with a convex structure by adopting an imprinting process based on the master mask structure;
2-2) preparing an intermediate transfer printing template with a groove structure by adopting an imprinting process based on the intermediate transfer printing template with the convex structure;
2-3) preparing the transfer printing template by adopting an imprinting process based on the intermediate transfer printing substrate with the groove structure obtained in the previous step.
5. The method for manufacturing an imprint mold according to claim 4, further comprising the following steps between the step 2-2) and the step 2-3):
2-2') preparing another intermediate transfer template with a convex structure by an imprinting process based on the intermediate transfer template with the groove structure obtained in the previous step;
2-2 ") preparing another intermediate transfer template having a groove structure by an imprinting process based on the intermediate transfer template having the protrusion structure obtained in the previous step.
6. The method of claim 5, further comprising the step of repeating steps 2-2') to 2-2 ") at least once between step 2-2") and step 3).
7. The method for manufacturing an imprint mold according to claim 1, wherein a plurality of the first groove structures are independently distributed or are interconnected in a grid shape; the second groove structures are independently distributed or are in grid-shaped interconnection distribution.
8. The method of claim 1, wherein the width of the first groove structure comprises 2 μm to 50 μm, and the depth of the first groove structure comprises 2 μm to 50 μm; the width of the protruding structure is 2-50 μm, and the height of the protruding structure is 2-50 μm; the width of the second groove structure comprises 2-50 μm, and the depth of the second groove structure comprises 2-50 μm.
9. The method of claim 1, wherein the imprint mold substrate comprises a flexible substrate.
10. The method of fabricating an imprint mold according to any one of claims 1 to 9, wherein a plurality of the transfer templates are formed based on the master structure; a plurality of the imprint molds are formed on the basis of the respective transfer templates.
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| CN201910018231.8A CN111427233A (en) | 2019-01-09 | 2019-01-09 | Manufacturing method of imprinting mold |
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| CN201910018231.8A CN111427233A (en) | 2019-01-09 | 2019-01-09 | Manufacturing method of imprinting mold |
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| CN112599714A (en) * | 2021-01-07 | 2021-04-02 | 福州大学 | Method for preparing nano LED by transfer printing patterned quantum dots |
| CN113211935A (en) * | 2021-05-20 | 2021-08-06 | 汕头市辰安新材料科技有限公司 | Plate making method of mould pressing plate |
| CN115542664A (en) * | 2022-09-07 | 2022-12-30 | 浙江优众新材料科技有限公司 | Method for copying Si microstructure |
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