CN111427176A - Panel detection system and detection method - Google Patents

Panel detection system and detection method Download PDF

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Publication number
CN111427176A
CN111427176A CN202010346722.8A CN202010346722A CN111427176A CN 111427176 A CN111427176 A CN 111427176A CN 202010346722 A CN202010346722 A CN 202010346722A CN 111427176 A CN111427176 A CN 111427176A
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panel
detection
data set
array
inspection
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CN111427176B (en
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王定力
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The application discloses a panel detection system. The panel detection system comprises an array detection data module configured to detect the panel and provide an array detection data set; a boxed detection data module configured to detect the panel and provide a boxed detection data set; and a data integration module configured to receive the array detection data set and the box-forming detection data set, analyze at least one of the array detection data set and the box-forming detection data set to provide a panel identity file, and indicate the box-forming detection data module to detect the panel according to the panel identity file.

Description

Panel detection system and detection method
Technical Field
The application relates to the technical field of display, in particular to a detection system and a detection method for a panel.
Background
The liquid Crystal Display panel (L acquired Crystal Display, L CD) has the advantages of high picture quality, small volume, light weight and the like, is widely applied to products such as mobile phones, notebook computers, televisions and displays, and the like, a Thin Film Transistor (TFT) -L CD is one type, and the manufacturing process of the TFT-L CD generally sequentially comprises an array process, a box forming process and a module process and then is submitted to a client.
Disclosure of Invention
The embodiment of the application provides a panel detection system and a panel detection method, which aim at analyzing detection data of each detection station in an array process, enhance blocking detection, guess and evaluate the problems of loss, missing and process in the process, and realize good yield or improve the yield.
The embodiment of the application provides a panel detection system, which is used for detecting a panel and comprises an array detection data module, a data processing module and a data processing module, wherein the array detection data module is configured to detect the panel and provide an array detection data set; a boxed detection data module configured to detect the panel and provide a boxed detection data set; and a data integration module configured to receive the array detection data set and the box-forming detection data set, analyze at least one of the array detection data set and the box-forming detection data set to provide a panel identity file, and indicate the box-forming detection data module to detect the panel according to the panel identity file.
In some embodiments, the panel identity file includes at least one of a defect level, a defect code, defect coordinates, and site coordinates of the panel.
In some embodiments, the boxed detection data module includes a boxed detection unit configured to receive an indication of the data integration module to perform at least one of a checkstop of the panel, a panel rotation, and the like, and a panel lock, and the like.
In some embodiments, the data integration module is configured to instruct the array inspection data module to inspect the panel according to the panel identity file, and the array inspection data module includes an array inspection unit configured to receive the instruction of the data integration module to perform the checkup or the patching.
The embodiment of the application provides a panel detection method, which is used for detecting a panel and comprises a detection panel, a detection data acquisition module and a data acquisition module, wherein the detection panel is used for providing an array detection data set and a box detection data set; analyzing at least one of the array test data set and the boxed test data set to provide a panel identity file; and carrying out box forming detection on the panel according to the panel identity file.
In some embodiments, the panel identity file includes at least one of a defect level, a defect code, defect coordinates, and site coordinates of the panel.
In some embodiments, the panel inspection method further comprises analyzing the boxed inspection data set with the panel identity file to provide a boxed inspected data set; and performing box forming detection according to the data group to be detected in box forming.
In some embodiments, the boxed test includes performing at least one of a checkstop panel, a panel rotation, and the like, and a panel lock, and the like.
In some embodiments, the boxed detection includes performing a panel coordinate transformation.
In some embodiments, the panel inspection method further comprises analyzing the boxed inspection data set and the panel identity file to provide an array of suspect data sets; and carrying out array detection according to the array data group to be detected.
According to the detection system and the detection method for the panel, detection data of each detection station in an array process are analyzed, shipment is prepared in a box forming process, and the detection data of each detection station is sorted and evaluated before power-on test. The data integration module integrates the detection data of the array detection data module and the box detection data module, enhances the blocking detection of the box forming process section, matches the array detection data, conjectures and evaluates the problems of missing, missing and process in the array process, realizes good yield or improves the yield, and obtains the achievable technical scheme according to the evaluation.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a panel detection system according to an embodiment of the present application.
Fig. 2 is a schematic structural diagram of an array detection unit according to an embodiment of the present application.
Fig. 3 is a schematic structural diagram of a boxed detection unit provided in the embodiment of the present application.
Fig. 4 is a flowchart of a panel detection method according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the device or component in question must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and therefore should not be considered as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; the two components can be directly connected or indirectly connected through an intermediate medium, and the two components can be communicated with each other or mutually interacted. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
Specifically, please refer to fig. 1, in which fig. 1 is a schematic structural diagram of a panel detection system according to an embodiment of the present disclosure. An embodiment of the present application provides a panel inspection system 1 for inspecting a panel during a manufacturing process of a display panel, wherein the panel inspection system 1 includes an array inspection data module 10, a cassette inspection data module 11, and a data integration module 12. The array inspection data module 10 is configured to inspect the panel and provide an array inspection data set, and the cassette-in-inspection data system 11 is configured to inspect the panel and provide a cassette-in-inspection data set. The data integration module 12 is configured to receive the array inspection data set and the box-forming inspection data set, analyze at least one of the array inspection data set and the box-forming inspection data set to provide a panel identity file, and instruct the box-forming inspection data module 11 to inspect the panel according to the panel identity file. The panel identity file includes at least one of a defect level, a defect code, defect coordinates, and site coordinates of the panel.
In some embodiments, the data integration module 12 further instructs the array inspection data module 10 to inspect the panel according to the panel identification file.
In some embodiments, the data integration module 12 further sends a notification according to the panel identity file to a responsible person, such as an engineer or an inspector, corresponding to the array inspection data module 10 or the box inspection data module 11, wherein the notification may be sent by mail, text message or through social software. .
The array detection data module 10 includes an array detection unit 101 and an array data unit 102. The array detection unit 101 is configured to detect panels and provide a plurality of array detection data and receive an indication of the data integration module to perform a check-in panel or a patch, and the array data unit 102 is configured to receive and analyze the plurality of array detection data and provide an array detection data set to the data integration module 12.
Referring to fig. 2, fig. 2 is a schematic structural diagram of an array detection unit according to an embodiment of the present disclosure. The array inspection unit 101 may include a plurality of inspection stations. For example, at the first station 20, there is no problem with the panel being inspected, but the array inspection tool reports an abnormality and the array inspection tool is adjusted. Due to the fact that the number of the panels is too large, one panel can be selected for verification, and after the verification is confirmed to be passed, the panels are unfolded to other panels in parallel. If the line type is abnormal, the panel continues to move forward to the next process after detection, the proportion is about 0.5%, and part of the panel carries the coordinates of the first station and then moves to the next station. At the second station 21, according to whether the repair point of the panel is good or not, the good panel carries the second station coordinate, the second station grade and the second station code, and the bad panel carries the second station coordinate, the second station grade and the second station bad code, and goes to the next station. At the third station 22, according to whether the long line of the panel is good or not, a good panel carries the coordinates of the third station, the grade of the third station and the codes of the third station, and a bad panel carries the coordinates of the third station, the grade of the third station and the codes of the bad station and goes to the next station. In addition, the device can also carry the position coordinates of the long line and the coordinates of the repairing point. In the fourth station 23, it is detected whether the panel is to be subjected to defect repair in the second station and the third station, and the panel carries the coordinates of the fourth station, the unrepaired level of the fourth station, and the code of the fourth station, and proceeds to the next station. At the fifth station 24, the brightness non-uniformity of the panel is detected, and the defective panel carries the fifth station coordinates, the fifth station grade and the fifth station defective code to go to the next station.
Referring to fig. 1, the data module 11 includes a data unit 111 and a data unit 112. The box detection unit 111 is configured to detect the panel, provide a plurality of box detection data, and receive an instruction of the data integration module to check the panel, rotate the panel, and lock the panel; the boxed data unit 112 is configured to receive and analyze the plurality of boxed test data and provide a boxed test data set to the data integration module 12. Wherein, panel conversion and the like are to convert the grade of the panel, such as reducing the grade or increasing the grade; panel locks, etc. lock the class of panels, which may be good, fair, or inferior. In some embodiments, an anomaly of the panel is detected, giving the panel a rank of one. After the repair, the abnormality of the panel is improved, and the panel is shifted from the next level to a possible level.
Referring to fig. 3, fig. 3 is a schematic structural diagram of a box-forming detection unit according to an embodiment of the present application. The boxed detection unit 111 may include a plurality of detection stations. As an example, at the sixth station 30, the panels are automatically optically detected under the activation of high voltage to determine whether the matching is abnormal, a good panel carries the coordinates of the sixth station, the grade of the sixth station and the code of the sixth station, and a bad panel carries the bad coordinates of the sixth station, the grade of the sixth station and the code of the sixth station to go to the next station. At the seventh station 31, the panel is detected whether the Polyimide (PI) film has defects such as foreign matters, good panels carry the coordinates of the seventh station, the grade of the seventh station and the codes of the seventh station, and bad panels carry the coordinates of the seventh station, the grade of the seventh station and the bad codes of the seventh station, and the panel goes to the next station. In addition, feasibility was confirmed with the responsible personnel of PI. In the eighth station 32, the frame glue of the ODF is checked for the presence of a foreign object, and the good panel carries the coordinates of the eighth station, the eighth station level and the eighth station code, and the bad panel carries the coordinates of the eighth station, the eighth station level and the eighth station bad code, and moves to the next station. In addition, feasibility was confirmed with the responsible personnel of the ODF. And in the ninth station 33, automatically and optically detecting whether foreign matters exist on the polarizer of the panel, wherein the good panel carries the coordinates of the ninth station, the grade of the ninth station and the code of the ninth station, enters lighting detection, sets a prompt message according to the coordinates, and prompts personnel to confirm. And directly putting the poor panel into the clamp for repairing.
Referring to fig. 1, the cassette-forming detection unit 111 further includes an automatic glass inspection machine, which includes an adjustment component (not shown) configured to read a document, perform coordinate transformation, perform transformation, and the like. The adjustment component can read each column of the panel identity document through the box data unit 112, as described above, the column of the panel identity document includes at least one of different columns of the panel, such as defect grade, defect code, defect coordinate, or site coordinate, and the column of the panel can be set according to different process times of different panels, and can select whether to start the function of the tight inspection in different machines according to the type of the panel. The adjustment assembly may perform a panel coordinate transformation. The panel coordinate conversion comprises the step of converting the coordinates of the thin film transistor/color film large panel into the coordinates of the small panel, and the converted logic can be maintained in a path corresponding to the automatic glass inspection machine according to panel identity files of different panel types. The adjusting component can be set in a transferring mode, a new transferring program is developed, the transferring condition comprises data brought by each detection station, and self-definition is achieved by transferring equal priority and existing columns of the panel identity file. The automatic glass inspection machine can increase the concentration of the specific panel defect code, and monitor the abnormal feedback of the array manufacturing process according to the concentration of the specific panel defect code, so as to enhance the interception and the improvement.
Referring to fig. 1, the data integration module 12 analyzes the array inspection data set or the box inspection data set to provide a panel identification file, wherein the panel identification file includes different fields of the panel, such as defect grade, defect code, defect coordinates, and site coordinates. The data integration module 12 can analyze the array inspection data set and the panel identification file to provide a box-forming inspection data set, and perform box-forming inspection on the panel according to the box-forming inspection data set. The detection data of the automatic glass inspection machine is analyzed according to the data set to be detected, the codes and the coordinates of array detection are matched, automatic real-time monitoring is carried out, and a notification is sent to corresponding responsible personnel, such as engineers or inspectors, when the abnormal conditions occur, wherein the notification can be carried out by mails, short messages or social software. In some embodiments, the data integration module 12 can analyze the boxed inspection data set and the panel identification file to provide an array inspection data set, and perform an array inspection on the next panel according to the array inspection data set. In some embodiments, the data integration module 12 may analyze the boxed inspection data set and the panel identification file to provide a boxed inspection data set, upon which a next panel is boxed for inspection.
Referring to fig. 4, an embodiment of the present application provides a panel inspection method for inspecting a panel, including:
step S41, detecting the panel to provide array detection data set and box detection data set;
step S42, analyzing at least one of the array detection data set and the box detection data set to provide a panel identity file, wherein the panel identity file comprises at least one of a defect grade, a defect code, a defect coordinate and a site coordinate of the panel; and
and step S43, performing box detection on the panel according to the panel identity file, wherein the box detection comprises the steps of blocking the panel, rotating the panel and the like or locking the panel and the like.
In some embodiments, the panel detection method further comprises: and sending out a notice according to the panel identity file to notify responsible personnel to check the panel or tighten the detection. In some embodiments, the field of the panel identity document can be set according to different processing times of different panels, and whether to start the tightening detection function on the panel can be selected in different machines according to the type of the panel or the panel identity document.
In some embodiments, the box-forming detection includes instructing to perform panel coordinate conversion, where the panel coordinate conversion refers to converting coordinates of a thin film transistor/color film large panel into coordinates of a small panel, and the logic of the panel coordinate conversion may be maintained in a path corresponding to the automatic glass inspection machine according to panel identity files of different panel types.
In some embodiments, panel rotation, etc. is the conversion of the level of the panel, such as down-scaling or up-scaling; panel locks, etc. lock the class of panels, which may be good, fair, or inferior. The panel conversion and the like also comprise a new panel conversion and the like program, the panel conversion and the like conditions comprise data brought under each detection station, and the panel conversion and the like priority and the existing column of the panel identity file are customized.
In some embodiments, the panel inspection method further comprises:
step S44, analyzing the box-forming detection data set and the panel identity file to provide a box-forming to-be-detected data set; and
and step S45, performing box detection on the next panel according to the box detection data group. In some embodiments, the boxed suspect data set may include instructions for performing a panel coordinate transformation. The panel coordinate conversion comprises the step of converting the coordinates of the thin film transistor/color film large panel into the coordinates of the small panel, and the logic of the panel coordinate conversion can be maintained in a path corresponding to the automatic glass inspection machine according to panel identity files of different panel types. The boxed data group to be detected can also comprise instructions for setting panel conversion and the like, new panel conversion and other programs are developed, the panel conversion and other conditions comprise data brought under each detection station, and the panel conversion and other priorities and the existing columns of the panel identity files are customized. In some embodiments, the boxed data set to be inspected can be added with the concentration of the specific panel defect code, and the abnormal feedback of the array manufacturing process is monitored according to the concentration of the specific panel defect code, so that the inspection stopping panel is enhanced and improved. In some embodiments, a notice is sent according to the data set to be checked in a box, and a responsible person is notified to carry out a check-in panel or a tightening detection.
In some embodiments, the panel inspection method further comprises:
step S46, analyzing the box detection data set and the panel identity file to provide an array data set to be detected, wherein the array data set to be detected can add the concentration of the specific panel defect code, and monitor the abnormal feedback of the array process according to the concentration of the specific panel defect code to strengthen the interception panel and improve; and
and step S47, performing array detection on the next panel according to the array data group to be detected, wherein the array detection comprises the step of blocking the panel or repairing the panel.
In some embodiments, the panel inspection method further comprises: and sending out a notice according to the array data group to be detected, and informing a responsible person to carry out blocking detection panel or tightening detection. The detection data of each detection station are connected in series, the advantages and the disadvantages are complementary, the detection capability is exerted to the maximum, the automatic notification of the abnormity is realized, the abnormity of the processing machine is found in time, the optimization is carried out under the existing equipment and system mechanisms, and the probability of leakage is reduced to the minimum.
In some embodiments, each notice of process anomaly loss is fed back in time, and the benefit of the timely notice can reach 632 RMB/year. The corresponding time interval of the module is 16.5 hours at the fastest speed, the yield is fed back in time, the productivity is improved for 16.5 hours, the equivalent rate is increased by 0.38 percent, the equivalent price is reduced by 145 Yuanren RMB/piece, and the frequency of the module feedback is 8 times/month. By the formula: the equivalent ratio of time/total time/day Capa valence difference decreases 8 times/month 12 months/year 16.5/24 times 72000 times 350 times 0.38 times 8 times 12, and 632 thousands of renminbi/year can be obtained. The leakage rate is reduced by 0.38 percent, and the leakage benefit can reach 875 ten thousand RMB/year. The finished box capacity is 160 thousand pieces/month, the leakage rate is reduced by 0.38%, the maintenance unit price is 80 RMB/piece for the small panel, and the maintenance unit price is 140 RMB/piece for the large panel, and the formula is as follows: the yield (year) of the single piece RMA cost Capa (per panel size: small: 60% large: 40%) 80 160 0.6 18 1000 0.38% 12+140 160 0.4 6 0.38% 12, and 875 ten thousand minbi/year can be obtained.
The embodiments of the present invention can be applied to monitoring and improving yield in manufacturing processes of various Display panels, reducing loss of abnormal notification, and can also be applied to the information series connection of a plurality of processes and detection sites in other industries to realize accurate detection, for example, a liquid Crystal Display panel (L acquired Crystal Display, L CD), a light Emitting Diode (L0 light Emitting Diode, L1 ED) Display panel, or an Organic light Emitting Diode (Organic L2 light Emitting Diode, O L ED) Display panel, an Organic light Emitting Diode (O L ED) Display panel can be divided into two major categories, namely, a Passive Matrix O L ED (Passive Matrix O L ED, PMO L ED) and an Active Matrix O L ED (Active Matrix O L, AMO L ED) Display panel according to a driving method, namely, a direct addressing and a Thin Film Transistor (TFT) Matrix addressing device, wherein the Active Matrix addressing device is an Organic light Emitting Diode (TFT) Matrix addressing device with high Display efficiency, and is a large-size Display device.
According to the detection system and the detection method for the panel, detection data of all detection stations in an array process are analyzed, shipment is prepared in a box forming process, and the detection data of all the detection stations are sorted and evaluated before power-on test. The data integration module 12 integrates the detection data of the array detection data module 10 and the box detection data module 11, enhances the blocking detection of the box forming process, matches the array detection data, speculates and evaluates the problems of missing, missing and process in the array process, finally realizes good yield or improves the yield, and obtains the achievable technical scheme according to the evaluation.
The above detailed description is given to a system and a method for detecting a panel provided in the embodiments of the present application, and a specific example is applied in the present application to explain the principle and the implementation of the present application, and the description of the above embodiments is only used to help understand the technical solution and the core idea of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.

Claims (10)

1. A panel inspection system for inspecting a panel, comprising:
an array inspection data module configured to inspect the panel and provide an array inspection data set;
a cassette detection data module configured to detect the panel and provide a cassette detection data set;
and
a data integration module configured to receive the array test data set and the cassette test data set, analyze at least one of the array test data set and the cassette test data set to provide a panel identity file, and instruct the cassette test data module to test the panel according to the panel identity file.
2. The panel inspection system of claim 1, wherein the panel identity file includes at least one of a defect level, a defect code, defect coordinates, and site coordinates of the panel.
3. The panel detection system of claim 1, wherein the boxed detection data module comprises a boxed detection unit configured to receive an indication of the data integration module to perform at least one of a checkstop panel, a panel turn, and the like, and a panel lock, and the like.
4. The panel inspection system of claim 1, wherein the data integration module is further configured to instruct the array inspection data module to inspect the panel according to the panel identification file, and the array inspection data module includes an array inspection unit configured to receive an instruction from the data integration module to perform a blackout or patching.
5. A panel detection method is used for detecting a panel, and is characterized by comprising the following steps:
inspecting the panel to provide an array inspection data set and a cassette inspection data set;
analyzing at least one of the array test data set and the boxed test data set to provide a panel identity file; and
and carrying out box forming detection on the panel according to the panel identity file.
6. The panel inspection method of claim 5, wherein the panel identity file includes at least one of a defect level, a defect code, defect coordinates, and site coordinates of the panel.
7. The panel inspection method of claim 5, further comprising:
analyzing the box-forming detection data set and the panel identity file to provide a box-forming to-be-detected data set; and
and performing box forming detection according to the data group to be detected in box forming.
8. The panel inspection method of claim 5, wherein performing the boxed inspection includes performing at least one of a checkstop panel, a panel rotation, and a panel lock.
9. The panel inspection method of claim 5, wherein said performing boxed inspection includes performing panel coordinate conversion.
10. The panel inspection method of claim 5, further comprising:
analyzing the boxed detection data set and the panel identity file to provide an array to-be-detected data set; and
and carrying out array detection according to the array data group to be detected.
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