CN111426310A - Gyro sensor module and detection method thereof - Google Patents
Gyro sensor module and detection method thereof Download PDFInfo
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- CN111426310A CN111426310A CN202010271393.5A CN202010271393A CN111426310A CN 111426310 A CN111426310 A CN 111426310A CN 202010271393 A CN202010271393 A CN 202010271393A CN 111426310 A CN111426310 A CN 111426310A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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Abstract
The invention provides a gyro sensor module and a detection method thereof, wherein the gyro sensor module comprises a gyro sensor, a driving circuit and an induction circuit; the driving circuit is used for driving the gyro sensor: generating a feedback circuit inside to make the mass body of the gyro sensor resonate at a specified resonance frequency; the induction circuit is used for detecting the movement displacement and the capacitance of the mass body and determining the angular speed; the driving circuit applies power to the gyro sensor module through the driving electrode and the driving induction electrode; the sensing circuit and the driving circuit both comprise at least one capacitance detection circuit, a gyro sensor module which can measure the movement detection value of the device can be used for the output value of the gyro sensor without using a signal amplifier which changes the noise characteristic, and the gyro sensor module comprises a full differential current converter on the capacitance detection circuit and can work under low current and high frequency, so that the sensing efficiency and the accuracy can be improved.
Description
Technical Field
The invention relates to the field of gyro sensors, in particular to a gyro sensor module and a detection method thereof.
Background
In recent years, mobile communication devices have been developed which are equipped with various sensors capable of measuring movement, and in this case, a gyro sensor measures information on rotational force applied to an object, and is a sensor for measuring angular velocity. At present, a great deal of research is carried out on the micro-change of the gyro sensor during movement, and the method for detecting the accurate movement of the device through the output value is adopted. Patent document US2007-0163815 provides a common mode control circuit 32, which is a differential capacitive sensor interface circuit having an input common mode control circuit, and is characterized in that a first and a second detection inputs 7a, 7b are connected to an interface circuit input of a detection circuit, a detection amplifier 12 and a first and a second detection inputs 7a, 7b which provide an output signal (Vo) in relation to a capacitance imbalance (Δ Cs) of a drive capacitive sensor-1 are connected, and common mode electric power on the first and second detection inputs 7a, 7b is controlled, so that the amplifier amplifies a value of a gyro sensor, thereby facilitating movement of a detection device, but after the signal is amplified, noise characteristics are deteriorated, and thus a precision device for improving noise quality is required.
Disclosure of Invention
In order to solve the technical problem, the invention provides a gyro sensor module, which comprises a gyro sensor, a driving circuit and an induction circuit;
the driving circuit is used for driving the gyro sensor: generating a feedback circuit inside to make the mass body of the gyro sensor resonate at a specified resonance frequency;
the induction circuit is used for detecting the movement displacement and the capacitance of the mass body and determining the angular speed;
the driving circuit applies power to the gyro sensor module through the driving electrode and the driving induction electrode; the induction circuit measures angular velocity through an induction electrode and the gyro sensor module;
both the sensing circuit and the driving circuit comprise at least one capacitance detection circuit.
Preferably, the capacitance detection circuit comprises a charge-to-voltage conversion circuit or/and a band-pass filter.
Preferably, the charge-voltage conversion circuit comprises a current converter or/and a modulator or/and an integrator.
Preferably, the current converter is a fully differential current converter.
Preferably, the driving circuit further comprises a comparator and a phase-locked loop connected to the charge-to-voltage conversion circuit, the phase-locked loop being capable of compensating for an ac signal generated at the phase-locked loop.
A measuring method of a gyro sensor module circuit, a driving circuit generates a feedback loop inside, and causes a mass body of a gyro sensor to resonate at a specified resonance frequency based on applied power, an induction circuit detects a movement displacement of the mass body through a capacitance detecting circuit, detects a capacitance, and determines an angular velocity;
the capacitance detection circuit detects the sine wave signal through the current converter and outputs a sine wave current signal corresponding to capacitance change;
the modulator modulates the sine wave signal output by the current converter, and the modulated sine wave signal is subjected to integral operation through the integrator to generate a sine voltage signal;
the integrator integrates the input sine and current signals, so as to increase the output voltage, and the sine wave voltage signal output by the integrator is in a state of eliminating noise or white signals through integration;
the band pass filter controls the compensation of the sinusoidal voltage signal output by the integrator.
Preferably, the resonance of the mass body in the gyro sensor is generated by a predetermined period of cosine wave transmitted from the drive circuit, and when a rotational force is applied to the mass body, the displacement of the resonance frequency and the change in capacitance are detected in such a manner that the cosine wave is received by the rotational force, and at this time, the magnitude of the cosine wave is expressed as the magnitude of the rotational force.
Preferably, the drive circuit processes the output signal frequency component by using a constant phase-locked loop through the charge-voltage conversion circuit and/or the comparator, and can apply a positive feedback signal based on the phase-locked loop to the mass body to perform resonance.
Preferably, the capacitance detection circuit of the sensing circuit detects the capacitance and/or the change in capacitance of the cosine wave generated in the mass body by the driving circuit, and the capacitance detection circuit of the sensing circuit synchronizes the detection value of the driving circuit.
Preferably, the phase lock loop (33) can compensate for the resonance frequency change detected on the mass body at a certain temperature and time and the phase delay generated on the gyro sensor module circuit, and provide the clock required at a certain resonance frequency on the circuit. .
The gyro sensor module provided by the invention has the following beneficial effects: the gyro sensor module can measure the detected value of the movement of the device without using a signal amplifier for changing the noise characteristic for the output value of the gyro sensor. The operation of eliminating the input capacitance at the output end of the gyro sensor is the same or similar, but since the gain is not large, an undistorted current signal can be detected even if the capacitance is not eliminated. In addition, the gyro sensor module includes a full differential current converter on the capacitance detection circuit, and can work at a low current and a high frequency, so that the sensing efficiency and the accuracy can be improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below.
FIG. 1 is a schematic block diagram of the present invention;
FIG. 2 is a block diagram of the components of the present invention;
FIG. 3 is a graph of the output of the biased charge-voltage variation circuit of the present invention;
FIG. 4 is a block diagram of the detailed structure elements of the capacitance detection circuit of the present invention;
FIG. 5 is a graph of the integrator output before the integrator bias is removed in the capacitance detection circuit of the present invention;
FIG. 6 is a graph showing the output of the common mode feedback loop integrator in the capacitance detection circuit of the present invention
100, a gyro sensor module; 10. a gyro sensor; 101. a capacitance detection circuit; 30. a drive circuit; 50. a sensing circuit; 201. a charge-to-voltage conversion circuit; 203. a band-pass filter; 31. a comparator; 33. a phase fixing ring; 301. a current converter; 303. a modulator; 305. an integrator.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 3, a gyro sensor module includes a gyro sensor 10, a driving circuit 30, and a sensing circuit 50; the coriolis effect is based on the coriolis force generated by the mass, velocity, and acceleration of an object. The gyro sensor module 100 includes a driving circuit 30 for driving the gyro sensor module 100 in order to generate a coriolis force and a sensing circuit 50 for measuring an angular velocity outputted in the gyro sensor 10, each circuit including at least one electrode for performing an electric function, the driving circuit including driving electrodes (DRV _ P, DRV _ N) for applying an electric power to the gyro sensor 10 and driving sensing electrodes (DRVs _ P, DRVs _ N) for a resonance displacement and a measurement frequency, and the sensing circuit including sensing electrodes (SEN _ P, SEN _ N) dl for measuring an angular velocity by the gyro sensor 10); the sensing circuit 50 measures an angular velocity with the gyro sensor module 100 through a sensing electrode. The driving circuit 30 is configured to drive the gyro sensor 10: a feedback circuit is internally generated to cause the mass body of the gyro sensor 10 to resonate at a predetermined resonance frequency;
preferably, the capacitance detection circuit 101 includes a charge-voltage conversion circuit 201 or/and a band-pass filter 203, the charge-voltage conversion circuit 201 includes a current converter 301 or/and a modulator 303 or/and an integrator 305, and/or means at least one of them, and the current converter 301 is a fully differential current converter 301. The driving circuit 30 further comprises a comparator and a phase locked loop connected to the charge-to-voltage conversion circuit 201, which phase locked loop can compensate for the ac signal generated at it proper.
The capacitance detection circuit 101 determines the detection value using the amount of current corresponding to the amount of change in capacitance, and therefore, a large voltage difference does not occur, and thus, the signal value can be increased by increasing the frequency. The capacitance detection circuit 101 provides a voltage signal of the detected value of the movement of the mass body based on the current signal, and has less influence on noise than the sensing operation of the detected voltage value, thereby improving the signal processing efficiency. The common mode feedback loop for inputting the output value of the band-pass filter 203 to the integrator 305 is generated in the capacitance detection circuit 101, so that the compensation generated in the integrator 305 can be eliminated, the output range of the integrator 305 can be set to be wider, and the sensing circuit 50 has the same or similar structure as the capacitance detection circuit 101 and can output a sine wave voltage signal with the compensation eliminated.
The gyroscopic sensor module 100 and its components comprise electronics connected to at least one processor. In this case, the functions and/or actions are performed by at least one processor included in the electronic device.
Specifically, the measuring method comprises the following steps:
the driving circuit 30 generates a feedback loop inside and causes the mass body of the gyro sensor 10 to resonate at a specified resonance frequency based on the applied power, and the induction circuit 50 detects the moving displacement of the mass body by the capacitance detection circuit 101, detects the capacitance, and determines the angular velocity;
the capacitance detection circuit 101 detects a sine wave signal through the current converter 301, and outputs a sine wave current signal corresponding to capacitance change; the resonance of the mass body in the gyro sensor 10 is generated by a predetermined periodic cosine wave transmitted from the drive circuit 30, and when a rotational force is applied to the mass body, the displacement of the resonance frequency and the change in capacitance are detected in such a manner that the cosine wave is received by the rotational force, and at this time, the magnitude of the cosine wave is represented by the magnitude of the rotational force. Wherein the resonance is achieved by: the drive circuit 30 processes the output signal frequency component by using a phase-locked loop through the charge-voltage conversion circuit 201 and/or the comparator, and can apply a positive feedback signal based on the phase-locked loop to the mass body to perform resonance. The phase-locked loop can compensate for the change of the resonant frequency detected by the gyro sensor module 100 at a certain temperature and time on the mass body and the phase delay generated on the circuit of the gyro sensor module 100, and provide the clock required at a certain provided resonant frequency on the circuit.
The capacitance detection circuit 101 detects the capacitance and/or the change in capacitance of the cosine wave generated on the mass body by the drive circuit 30, the capacitance detection circuit 101 of the sense circuit 50 detects the change in capacitance of the mass body in synchronization with the detection value of the drive circuit 30, and at least one charge-voltage conversion circuit 201 may be used for the drive circuit 30 or the sense circuit 50. In this case, the capacitance change by the mass body is very small, and a gain can be amplified to obtain a signal in a detectable range.
The modulator 303 modulates the sine wave signal output by the current converter, and the integrator 305 integrates the modulated sine wave signal to generate a sine voltage signal;
the integrator 305 integrates the input sine and current signals cumulatively to raise the output voltage, and the sine wave voltage signal output at the integrator 305 is in a state of noise or white signal elimination by cumulatively integrating;
the band pass filter 203 controls the compensation of the sine wave voltage signal output by the integrator 305. Specifically, as shown in fig. 5, before controlling the compensation of the integrator 305, the sine wave voltage signal output from the integrator 305 outputs a voltage signal in which a part of the peak value is eliminated from the sine wave voltage signal. For example, the integrator 305 outputs the highest value of the positive voltage signal, for example, the positive voltage signal and the negative voltage signal that are greater than the value (1-1,1-3) of the drain Voltage (VDD) and the lowest value of the positive voltage signal, for example, the positive voltage signal and the negative voltage signal that are less than the value (3-1,3-3) of the source Voltage (VSS) are eliminated, and the band-pass filter 203 outputs the Alternating Current (AC) signal of the integrator 305 power, that is, the sine wave voltage signal with distorted output power.
In contrast, the capacitance detection circuit 101 controls distortion of the output value of the integrator 305 using the output value of the band-pass filter 203. The band pass filter 203 passes a bandwidth of 10kHz to 60kHz and has a resonance frequency of 30kHz bandwidth.
As shown in fig. 4, the capacitance detection circuit 101 feeds back the voltage signal output at the band-pass filter 203 to the integrator 305.
The output of the bandpass filter 203 is then input to an integrator 305, creating a common mode feedback loop. At this time, although the output of the integrator 305 of the capacitance detection circuit 101 may be largely distorted by compensation of the input current at the time of the first operation, the bandpass filter 203 may operate the output of the integrator 305 in a Direct Current (DC) range within VDD/2 and output an Alternating Current (AC) signal of the integrator 305.
That is, after the first operation, the output of the band-pass filter 203 is fed back in the reverse direction to the input value of the integrator 305, and the output signal of the integrator 305 is operated in the VDD/2 range, as shown in fig. 6.
In order to improve the sensitivity of the gyro sensor 10, the capacitance detection circuit 101 detects both a positive current output on the positive edge (positive edge) of the output terminal and a negative current output on the negative edge (negative edge) by the output of the chopping circuit, and therefore, noise having a 1/f pattern (pattern) can be eliminated.
The gyro sensor module 100 outputs integrator 305 power (sinusoidal voltage signal) with compensation removed at the integrator 305 through the band pass filter 203.
As described above, the capacitance detection circuit 101 of the gyro sensor module 100 employs the current converter 301 at the output terminal of the gyro sensor 10.
The capacitance detection circuit 101 has the same or similar operation to cancel the input capacitance at the output terminal of the gyro sensor 10 as a circuit using a charge amplifier, but can detect an undistorted current signal even if the capacitance is not canceled because the gain is not large. In addition, according to various embodiments, the gyro sensor module 100 includes the full differential current converter 301 on the capacitance detection circuit 101, and can operate at a low current and a high frequency, and thus, the sensing efficiency and accuracy can be improved.
Various modifications to the embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A gyro sensor module is characterized by comprising a gyro sensor, a driving circuit and an induction circuit;
the driving circuit is used for driving the gyro sensor: generating a feedback circuit inside to make the mass body of the gyro sensor resonate at a specified resonance frequency;
the induction circuit is used for detecting the movement displacement and the capacitance of the mass body and determining the angular speed;
the driving circuit applies power to the gyro sensor module through the driving electrode and the driving induction electrode; the induction circuit measures angular velocity through an induction electrode and the gyro sensor module;
both the sensing circuit and the driving circuit comprise at least one capacitance detection circuit.
2. The gyrosensor module of claim 1, wherein the capacitance detection circuit comprises a charge-to-voltage conversion circuit or/and a band-pass filter.
3. The gyrosensor module of claim 2, wherein the charge-to-voltage conversion circuitry comprises a current converter or/and a modulator or/and an integrator.
4. The gyrosensor module of claim 3, wherein the current converter is a fully differential current converter.
5. The gyrosensor module circuit of claim 1, wherein the driver circuit further comprises a comparator and a phase-locked loop coupled to the charge-to-voltage conversion circuit, the phase-locked loop being capable of compensating for an ac signal being properly generated thereon.
6. A measuring method of a gyro sensor module circuit is characterized in that a driving circuit internally generates a feedback loop and causes a mass body of a gyro sensor to resonate at a specified resonance frequency based on applied power, and an induction circuit detects a moving displacement of the mass body through a capacitance detecting circuit, detects a capacitance, and determines an angular velocity;
the capacitance detection circuit detects the sine wave signal through the current converter and outputs a sine wave current signal corresponding to capacitance change;
the modulator modulates the sine wave signal output by the current converter, and the modulated sine wave signal is subjected to integral operation through the integrator to generate a sine voltage signal;
the integrator integrates the input sine and current signals, so as to increase the output voltage, and the sine wave voltage signal output by the integrator is in a state of eliminating noise or white signals through integration;
the band pass filter controls the compensation of the sinusoidal voltage signal output by the integrator.
7. The gyro sensor module circuit according to claim 6, wherein the resonance of the mass body on the gyro sensor is generated by a predetermined period of cosine wave transmitted from the drive circuit, and in the case where a rotational force is applied to the mass body, the displacement of the resonance frequency and the change in capacitance are detected in such a manner that the cosine wave is supported by the rotational force, and at this time, the magnitude of the cosine wave is represented by the magnitude of the rotational force.
8. The gyro sensor module circuit according to claim 6, wherein the driving circuit processes the output signal frequency component by using a phase-locked loop through the charge-voltage conversion circuit or/and the comparator, and can apply a positive feedback signal based on the phase-locked loop to the mass body for resonance.
9. The gyro sensor module circuit according to claim 6, wherein the capacitance and/or the change in capacitance of the cosine wave generated on the mass body by the driving circuit is detected by a capacitance detecting circuit, and the capacitance detecting circuit of the sensing circuit synchronizes the detected value of the driving circuit.
10. The gyro sensor module circuit according to claim 8, characterized in that the phase locked loop (33) can compensate for changes in resonance frequency detected at the mass at a certain temperature, time and phase delay occurring at the gyro sensor module circuit for the gyro sensor module, providing a clock required at a certain provided resonance frequency at the circuit.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596496A (en) * | 2015-01-26 | 2015-05-06 | 上海应用技术学院 | Self-adapted time lag feedback control micromechanical gyroscope system |
| KR101869924B1 (en) * | 2017-01-31 | 2018-06-21 | 다믈멀티미디어주식회사 | Gyrosensor module |
| CN110631570A (en) * | 2019-10-17 | 2019-12-31 | 东南大学 | System and method for improving temperature stability of silicon micro gyroscope scale factor |
| CN212133679U (en) * | 2020-04-09 | 2020-12-11 | 南京市谭慕半导体技术有限公司 | Gyro sensor module |
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- 2020-04-09 CN CN202010271393.5A patent/CN111426310A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596496A (en) * | 2015-01-26 | 2015-05-06 | 上海应用技术学院 | Self-adapted time lag feedback control micromechanical gyroscope system |
| KR101869924B1 (en) * | 2017-01-31 | 2018-06-21 | 다믈멀티미디어주식회사 | Gyrosensor module |
| CN110631570A (en) * | 2019-10-17 | 2019-12-31 | 东南大学 | System and method for improving temperature stability of silicon micro gyroscope scale factor |
| CN212133679U (en) * | 2020-04-09 | 2020-12-11 | 南京市谭慕半导体技术有限公司 | Gyro sensor module |
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