CN111413846A - Mask plate, display panel and preparation method of display panel - Google Patents
Mask plate, display panel and preparation method of display panel Download PDFInfo
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- CN111413846A CN111413846A CN202010319152.3A CN202010319152A CN111413846A CN 111413846 A CN111413846 A CN 111413846A CN 202010319152 A CN202010319152 A CN 202010319152A CN 111413846 A CN111413846 A CN 111413846A
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- corner
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
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Abstract
The invention provides a mask plate, a display panel and a preparation method thereof, wherein the mask plate in the embodiment of the invention comprises a transverse light shading strip and a longitudinal light shading strip crossed with the transverse light shading strip, at least one hollowed area is arranged at the corner of the transverse light shading strip and the longitudinal light shading strip of the mask plate, and a metal corner which is closer to 90 degrees is prepared by using the MPC compensation principle, so that the state that metal in a display area is not vertical or parallel to a polaroid is improved, the metal light leakage is reduced under the condition of not losing the aperture opening ratio, the dark state brightness is reduced, and the contrast of the display image of the display panel is improved.
Description
Technical Field
The invention relates to the field of display, in particular to a mask plate, a display panel and a preparation method of the display panel.
Background
In the field of liquid Crystal Display panels (L liquid Crystal Display, L CD), contrast is an important indicator of the ratio of the brightest luminance to the darkest luminance in an image.
The liquid crystal display panel on the market at present comprises a Color Filter Substrate (CFSubstrate) and a Thin Film Transistor array Substrate (Thin Film Transistor Substrate, TFTSubstrate), wherein transparent electrodes are arranged on the opposite inner sides of the substrates, a layer of liquid crystal molecules (L iquidCrystal, L C) is sandwiched between the two substrates, the liquid crystal display controls the orientation of the liquid crystal molecules through an electric field, the polarization state of light is changed, and the penetration and the blocking of a light path are realized through a polarizing plate, so that the purpose of displaying is realized.
The metal light leakage refers to the phenomenon that when metal on the TFT substrate is not perpendicular to or parallel to the polarizer, the electric field excites the dissipated electrons to change the polarization state, so that light leakage is generated. In the display area, the metal is designed to be parallel or vertical to the polaroid; due to the limitation of the manufacturing process, even if the mask is designed to be a right angle at the corner, the actually produced metal wires inevitably form an arc-shaped corner, as shown in fig. 1 and 2, thereby causing a metal light leakage phenomenon and affecting the contrast of the panel. For the liquid crystal display panel, unnecessary light leakage in a dark state can be reduced by reducing metal light leakage and the like, and the contrast is further improved.
At present, the attention on metal light leakage is not high, and one method for improving the metal light leakage is to shield the metal light leakage through a Black Matrix (BM), but considering the shift amount between the TFT substrate and the CF substrate, the area of the BM has to be increased, so that a certain aperture ratio of the pixel is sacrificed. However, for high resolution products, such sacrifice is to be avoided as much as possible.
Disclosure of Invention
The embodiment of the invention provides a mask plate, a display panel and a preparation method thereof, and aims to provide a method for improving metal light leakage and further improving contrast ratio under the condition of not losing an aperture opening ratio.
In order to solve the above problem, in a first aspect, the present application provides a mask plate, including the crossing vertical light-shielding strip of horizontal light-shielding strip and horizontal light-shielding strip, there is at least one region of digging in the mask plate in the corner of horizontal light-shielding strip and vertical light-shielding strip.
Further, the hollowed-out area is one of a circle, a diamond, a square, a triangle, or an irregular shape.
Further, the center point of the hollowed area is on the central axis of the corner.
Furthermore, the transverse light-shielding strips and the longitudinal light-shielding strips comprise target crossing areas, a first corner and a second corner which are opposite to each other are formed at the target crossing areas, and the first corner and the second corner are respectively provided with a hollow area.
Further, the hollowed area of the first corner and the hollowed area of the second corner are the same in shape.
In a second aspect, the present application provides a display panel, which includes at least one metal line, wherein the metal line is made of any one of the above masks.
In a third aspect, the present application provides a method for manufacturing a display panel, where a mask plate used in a mask design stage includes a horizontal light-shielding bar and a vertical light-shielding bar in which the horizontal light-shielding bar and the vertical light-shielding bar are crossed, and a hollow is formed at a corner of the horizontal light-shielding bar and the vertical light-shielding bar to obtain at least one hollow region.
Further, the hollowed-out area is one of a circle, a diamond, a square, a triangle, or an irregular shape.
Further, the center point of the hollowed area is on the central axis of the corner.
Furthermore, the transverse light-shielding strips and the longitudinal light-shielding strips comprise target crossing areas, a first corner and a second corner which are opposite to each other are formed at the target crossing areas, and the first corner and the second corner are respectively provided with a hollow area.
Further, the hollowed area of the first corner and the hollowed area of the second corner are the same in shape.
Has the advantages that: the embodiment of the invention provides a mask plate, which comprises a transverse light shading strip and a longitudinal light shading strip, wherein the transverse light shading strip and the longitudinal light shading strip are crossed, and parts of the mask plate at corners of the transverse light shading strip and the longitudinal light shading strip are hollowed. The embodiment of the invention utilizes the MPC (Metal peak compensation) compensation principle, namely, light shadow in the photoetching process is compensated through the design of digging holes in the mask plate, and arc-shaped Metal residues in a Metal wire prepared by the mask plate are reduced, so that the state that Metal and a polaroid in a display area are not vertical or parallel is improved, the Metal light leakage is reduced under the condition of not losing the aperture opening ratio, the dark state brightness is reduced, and the contrast of the display image of the display panel is improved.
The embodiment of the invention provides a display panel, wherein a metal wire in the display panel manufactured by utilizing an MPC compensation principle has a metal corner which is closer to 90 degrees, and the metal wire can improve the non-vertical or parallel state of metal and a polaroid in a display area, so that the metal light leakage can be reduced under the condition of not losing the aperture opening ratio, the dark state brightness is reduced, and the contrast of a display image of the display panel is improved.
The embodiment of the invention provides a preparation method of a display panel, which can improve the contrast of an image displayed by the display panel.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a mask in the prior art;
FIG. 2 is a schematic diagram of a metal line fabricated by a prior art process;
fig. 3 is a schematic diagram of an embodiment of a mask according to an embodiment of the present invention;
fig. 4 is a schematic view of another embodiment of a mask according to an embodiment of the present invention;
fig. 5 is a schematic diagram of another embodiment of a mask according to an embodiment of the present invention.
Wherein the reference numbers indicate:
10-transverse shading strip; 20-longitudinal shading strip; 30-hollowed out area.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the liquid crystal display technology, metal light leakage of pixels increases the brightness of the panel in a dark state, thereby affecting the contrast. Metal light leakage generally occurs at the metal corners in the pixel display area, and when there is no MPC compensation at the corners, due to the limitation of the process, even if the mask of the metal layer is designed to be right-angled at the corners, the actually produced pattern inevitably forms arc-shaped corners. If the metal light leakage is reduced by means of BM shielding, the aperture ratio of a part of the pixels is inevitably lost, and for high-resolution products, the loss of the aperture ratio is reduced as much as possible, so we need to find a method for improving the metal light leakage under the condition of not losing the aperture ratio.
Since the metal etching generally employs a wet etching process, the wet etching process has an isotropic etching characteristic. When the etching-down reaches the end point in the wet etching process, the lateral metal etching is continuously performed at the same etching rate, so that the pattern with the obvious broken line design is formed, the angle edges are smooth, the metal and the polarizer are in a non-vertical or parallel state, and the metal light leakage generally occurs at the metal corner in the pixel display area.
Accordingly, embodiments of the present invention provide a mask, a display panel and a method for manufacturing the same, which are described in detail below.
Firstly, the embodiment of the invention provides a mask plate, which comprises a transverse shading strip 10 and a longitudinal shading strip 20 crossed with the transverse shading strip, wherein at least one hollowed area 30 is arranged at the corner of the transverse shading strip and the longitudinal shading strip.
In one embodiment, the hollowed area 30 may be one of a circle, a diamond, a square, a triangle, or an irregular shape, and referring to fig. 3 to 5, it is understood that in other embodiments of the present invention, the solution mentioned in this patent is provided as long as a right angle of approximately 90 ° can be obtained by means of MPC compensation.
Specifically, before the corner is excavated, the distance from the original vertex, i.e., the original vertex, to any point of the excavated region 30 is in the range of 0.2 to 1 μm, preferably, the distances are 0.2 μm, 0.8 μm, and 1 μm, and the metal line manufactured at this distance is closer to an angle of 90 °.
Specifically, when the hollowed-out region is a square, the side length of the square is 1.3 to 2.1 μm, preferably, the side length is 1.3 μm, 1.5 μm, or 2.1 μm, and the metal wire manufactured at this side length is closer to an angle of 90 °.
Specifically, the center point of the hollowed area 30 is on the central axis of the corner, so that the hollowed areas 30 are more uniform around the two sides of the central axis, and the effect of reducing metal arc-shaped residues is better.
Specifically, the transverse light-shielding strip 10 and the longitudinal light-shielding strip 20 include target intersection regions, where a first corner and a second corner are formed, and the first corner and the second corner are provided with a hollow region 30 respectively.
Specifically, the hollowed out area 30 of the first corner is the same shape as the hollowed out area 30 of the second corner.
Specifically, the size of the hollow area 30 may be determined according to the designed line width of the metal line, for example, the area size of the hollow area is proportional to the line width of the metal line, where a is K × B, K is a predetermined coefficient, a is the area value of the hollow area, and B is the line width of the metal line.
The embodiment of the invention provides a mask plate, which comprises a transverse light shielding strip 10 and a longitudinal light shielding strip 20, wherein the transverse light shielding strip and the longitudinal light shielding strip are crossed, and parts of the mask plate at corners of the transverse light shielding strip 10 and the longitudinal light shielding strip 20 are hollowed. In the embodiment, a metal corner close to 90 degrees is prepared by using the MPC compensation principle, that is, the light shadow in the photolithography process is compensated by the design of digging a hole in the mask plate, so that the non-vertical or parallel state of the metal and the polarizer in the display area is improved, the metal light leakage is reduced under the condition of not losing the aperture opening ratio, the dark state brightness is reduced, and the contrast of the display image of the display panel is improved.
On the basis of the above embodiments, an embodiment of the present invention further provides a display panel, including at least one metal line, where the metal line is made of any one of the mask plates.
In the embodiment of the invention, the metal wire in the display panel manufactured by using the MPC compensation principle is closer to the metal corner of 90 degrees, and the metal can improve the non-vertical or parallel state of the metal and the polaroid in the display area, so that the metal light leakage can be reduced under the condition of not losing the aperture opening ratio, the dark state brightness is reduced, and the contrast of the display image of the display panel is improved.
The embodiment of the invention also provides a preparation method of the display panel, which comprises the following steps:
(1) forming a metal film on a substrate;
a mask is provided comprising a transverse shade bar 10 and a longitudinal shade bar 20 intersecting the transverse shade bar, there being at least one hollowed-out area 30 at the corners of the transverse shade bar and the longitudinal shade bar.
Specifically, the hollowed area 30 is one of a circle, a diamond, a square, a triangle, or an irregular shape.
Specifically, the center point of the hollowed area 30 is on the central axis of the corner.
Specifically, the transverse light-shielding strip 10 and the longitudinal light-shielding strip 20 include target intersection regions, where a first corner and a second corner are formed, and the first corner and the second corner are provided with a hollow region 30 respectively.
Specifically, the hollowed out area 30 of the first corner is the same shape as the hollowed out area 30 of the second corner.
Specifically, the size of the hollow area 30 may be determined according to the designed line width of the metal line, for example, the area size of the hollow area is proportional to the line width of the metal line, where a is K × B, K is a predetermined coefficient, a is the area value of the hollow area, and B is the line width of the metal line.
(2) Coating a photoresist on the metal film, exposing and developing the photoresist through a mask plate, removing the photoresist except for the metal wire to be formed, then carrying out wet etching on the metal film by taking the residual photoresist as a shielding part to obtain the metal wire, and finally removing the residual photoresist to obtain a TFT substrate;
(3) and (3) attaching the TFT substrate and the CF substrate, and adding liquid crystal between the TFT substrate and the CF substrate to obtain the display panel.
Specifically, the metal wire is the public electrode wire of liquid crystal display panel, and at this moment, for the quantity matching of horizontal light shading strip 10 and vertical light shading strip 20 on the mask plate the quantity setting of liquid crystal display panel's public electrode wire, the position at each light shading strip turning all can be equipped with the region of digging out 30 to reduce or avoid the circular-arc corner that each turning position appears, effectively avoid the diffraction light leak, promote display effect.
Specifically, the mask plate further includes a gate and a scan line formed simultaneously with the metal line, and light-shielding patterns of the gate and the scan line are correspondingly formed at positions on the mask plate corresponding to the gate and the scan line for forming the gate and the scan line.
Specifically, a gate insulating layer, a semiconductor layer, a source/drain metal layer, a passivation layer and a pixel electrode layer are sequentially stacked above the gate, the scan line and the metal line. The source electrode layer comprises a pixel electrode, a grid electrode is electrically connected with the scanning line, the source electrode is electrically connected with the data line, and the drain electrode is electrically connected with the pixel electrode.
Further, the liquid crystal display panel may also be a liquid crystal display panel that adopts a technology that no black matrix is disposed above the data line, and at this time, the pixel electrode layer further includes a light shielding electrode that shields the data line, and the light shielding electrode and the common electrode line are both loaded with a common voltage, so that liquid crystals corresponding to the light shielding electrode are not deflected, and a light shielding effect is achieved. Further, the liquid crystal display panel without the black matrix technology above the data lines may be a curved liquid crystal display panel. The liquid crystal display panel adopting the technology of the black matrix-free upper part of the data line can reduce the dark state brightness and further improve the contrast of the display image of the display panel by the display panel manufactured by the preparation method of the display panel.
In the preparation method, the mask plate used in the mask design stage comprises a transverse light-shielding strip 10 and a longitudinal light-shielding strip 20 crossed with the transverse light-shielding strip, and at least one hollowed area 30 is arranged at the corner of the transverse light-shielding strip and the longitudinal light-shielding strip.
In one embodiment, the cored-out area 30 is one of a circle, a diamond, a square, a triangle, or an irregular shape.
Specifically, the center point of the hollowed area 30 is on the central axis of the corner.
Specifically, the transverse light-shielding strip 10 and the longitudinal light-shielding strip 20 include target intersection regions, where a first corner and a second corner are formed, and the first corner and the second corner are provided with a hollow region 30 respectively.
Specifically, the hollowed out area 30 of the first corner is the same shape as the hollowed out area 30 of the second corner.
Specifically, the size of the hollow area 30 may be determined according to the designed line width of the metal line, for example, the area size of the hollow area 30 is proportional to the line width of the metal line, where a is K × B, K is a predetermined coefficient, a is the area value of the hollow area 30, and B is the line width of the metal line.
The embodiment of the invention provides a preparation method of a display panel, which utilizes the principle of MPC (Metal peak compensation) compensation, namely, light shadow in a photoetching process is compensated through the design of digging a hole in a mask plate to prepare a Metal corner close to 90 degrees, so that the state that Metal in a display area is not vertical or parallel to a polaroid is improved, and thus, the Metal light leakage is reduced, the dark state brightness is reduced and the contrast of a display image of the display panel is improved under the condition of not losing the aperture opening ratio.
The mask plate, the display panel and the preparation method thereof provided by the embodiment of the invention are described in detail, a specific example is applied in the description to explain the principle and the embodiment of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for those skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (10)
1. A mask plate is characterized by comprising a transverse shading strip and a longitudinal shading strip crossed by the transverse shading strip, wherein at least one hollowed area is arranged at the corner of the transverse shading strip and the longitudinal shading strip.
2. A mask according to claim 1, wherein the hollowed-out area is one of a circle, a diamond, a square, a triangle, or an irregular shape.
3. A mask according to claim 1, wherein the center point of the hollowed area is on the central axis of the corner.
4. A mask plate according to claim 1, wherein the transverse light-shielding strips and the longitudinal light-shielding strips comprise target crossing regions, the target crossing regions form first and second opposite corners, and the first and second corners are respectively provided with hollowed regions.
5. A mask according to claim 4, wherein the hollowed-out region of the first corner and the hollowed-out region of the second corner are the same in shape.
6. A display panel, characterized in that the display panel comprises at least one metal line, the metal line is made of any one of the masks of claims 1-5.
7. The preparation method of the display panel is characterized in that in the preparation method, a mask plate used in a mask design stage comprises a transverse light-shielding strip and a longitudinal light-shielding strip crossed with the transverse light-shielding strip, and hollowing is carried out at corners of the transverse light-shielding strip and the longitudinal light-shielding strip so as to obtain at least one hollowed area.
8. The method of claim 7, wherein the hollowed area is one of a circle, a diamond, a square, a triangle, or an irregular shape.
9. The method of claim 7, wherein a center point of the hollowed area is on a central axis of the corner.
10. The method for manufacturing a display panel according to claim 7, wherein the transverse light-shielding bars and the longitudinal light-shielding bars include target intersection regions where first corners and second corners are formed, and the first corners and the second corners are respectively provided with hollowed-out regions.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010319152.3A CN111413846A (en) | 2020-04-21 | 2020-04-21 | Mask plate, display panel and preparation method of display panel |
| PCT/CN2020/089411 WO2021212557A1 (en) | 2020-04-21 | 2020-05-09 | Mask plate, and display panel and manufacturing method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010319152.3A CN111413846A (en) | 2020-04-21 | 2020-04-21 | Mask plate, display panel and preparation method of display panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111413846A true CN111413846A (en) | 2020-07-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010319152.3A Pending CN111413846A (en) | 2020-04-21 | 2020-04-21 | Mask plate, display panel and preparation method of display panel |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN111413846A (en) |
| WO (1) | WO2021212557A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112882338A (en) * | 2021-01-25 | 2021-06-01 | 深圳市志凌伟业光电有限公司 | Film, metal grid preparation method and metal grid |
| CN113035445A (en) * | 2021-03-04 | 2021-06-25 | 上海超导科技股份有限公司 | Patterned plate for plating superconducting strip, preparation method, equipment and use method |
| WO2022267053A1 (en) * | 2021-06-25 | 2022-12-29 | 京东方科技集团股份有限公司 | Metal mesh, thin film sensor and mask |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2021212557A1 (en) | 2021-10-28 |
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Application publication date: 20200714 |