CN111413753A - Method for preparing micro-lens array - Google Patents

Method for preparing micro-lens array Download PDF

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Publication number
CN111413753A
CN111413753A CN201910011368.0A CN201910011368A CN111413753A CN 111413753 A CN111413753 A CN 111413753A CN 201910011368 A CN201910011368 A CN 201910011368A CN 111413753 A CN111413753 A CN 111413753A
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China
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micro
lens array
ink
solvent
polydimethylsiloxane
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Pending
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CN201910011368.0A
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Chinese (zh)
Inventor
王莉
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Xian Jiaotong University
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Xian Jiaotong University
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Priority to CN201910011368.0A priority Critical patent/CN111413753A/en
Publication of CN111413753A publication Critical patent/CN111413753A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/041Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • G02B3/0031Replication or moulding, e.g. hot embossing, UV-casting, injection moulding

Abstract

The application belongs to the technical field of optical detection, and particularly relates to a method for preparing a micro-lens array. The traditional ink-jet printing method for preparing the micro-lens array has a complex process and cannot prepare the micro-lens array with high duty ratio. The application provides a method for preparing a micro-lens array, which utilizes a polymer material which is very soluble and a solvent material which is corresponding to the polymer material and has strong volatility. When the solvent drops are jet-printed on the surface of the soluble polymer by using ink-jet printing, the drops can partially dissolve the surface of the polymer to form solution drops, the soluble polymer flows outwards from the center inside the solution drops along with the evaporation of the solvent, when the solvent is completely evaporated, a volcano-mouth-shaped structure is formed, and the upper half ridge part of the volcano-mouth-shaped structure is eliminated by accurately controlling the space between the ink-jet printing drops and the printing pattern to form the micro-lens array. The method has the advantages of simple process, extremely low cost and extremely high duty ratio, and is suitable for large-area industrial batch preparation.

Description

Method for preparing micro-lens array
Technical Field
The application belongs to the technical field of optical detection, and particularly relates to a method for preparing a micro-lens array.
Background
The micro lens array is an array formed by arranging a series of micro lenses with the aperture of several microns to several hundred microns according to a certain arrangement, has the advantages of good optical performance, extremely large visual angle, small aberration distortion and the like, is widely applied to the fields of beam shaping, three-dimensional imaging, bionic compound eye, L ED, O L ED light extraction and the like, and the method for manufacturing the micro lens array at present mainly comprises a hot melting reflux method, an ink-jet printing method, a hot stamping method, an ultra-precision processing method and the like.
The traditional ink-jet printing method for preparing the micro-lens array generally sprays ink such as ultraviolet curing glue and the like, deposits on the surface of glass or other substrates, forms a spherical micro-lens structure under the action of surface tension, and then is exposed and cured under ultraviolet light to form the micro-lens array.
Disclosure of Invention
1. Technical problem to be solved
The method for preparing the micro-lens array based on the traditional ink-jet printing method generally comprises the steps of spraying ink such as ultraviolet curing glue and the like, depositing the ink on the surface of glass or other substrates, forming a spherical micro-lens structure under the action of surface tension, and then exposing and curing the ink under ultraviolet light to form the micro-lens array.
2. Technical scheme
In order to achieve the above object, the present application provides a method for manufacturing a microlens array, the method comprising the steps of:
1) injecting a solvent into an ink cartridge of an ink jet printer;
2) placing a substrate covered with a soluble polymer on the inkjet printer stage;
3) drawing the arrangement mode of the ink-jet printing solvent droplets;
4) controlling the volume of the ink-jet printing solvent droplets, adjusting the droplet spacing under the specific droplet volume, and printing to obtain a concave micro-lens array;
5) putting the substrates into a culture dish together by taking the concave micro-lens array as a mould;
6) pouring polydimethylsiloxane into the culture dish; vacuumizing the culture dish to enable the polydimethylsiloxane to be completely attached to the concave micro-lens array;
7) and thermally curing the polydimethylsiloxane film, and then uncovering the polydimethylsiloxane film to separate the polydimethylsiloxane film from the concave micro-lens array, so as to obtain the convex polydimethylsiloxane micro-lens array.
Optionally, the substrate is a rigid substrate such as glass, metal sheet, or PET plastic or polyimide.
Optionally, the soluble polymer comprises fibroin, gelatin, sodium hyaluronate, or polystyrene.
Optionally, the inkjet printing solvent comprises water, a mixture of water and formic acid, toluene or xylene.
Optionally, the substrate covered with the soluble polymer in step 2) is prepared by air-drying or spin-coating a polymer film on the substrate, and the thickness of the polymer film is greater than the depth of the microlens.
Optionally, the arrangement in step 3) is drawn by using drawing software, and the arrangement includes a hexagonal arrangement.
Optionally, the vacuum pumping time in the step 6) is 10min, so that no gap or air bubble exists between the polydimethylsiloxane film and the concave micro-lens array.
Optionally, the temperature of the thermal curing in the step 7) is 25 ℃ to 100 ℃, and the thermal curing time is 4 hours.
3. Advantageous effects
Compared with the prior art, the preparation method of the micro-lens array has the beneficial effects that:
the microlens array preparation method provided by the application utilizes very soluble polymer materials, such as fibroin, gelatin, sodium hyaluronate, polystyrene and the like, and corresponding solvent materials with strong volatility, such as water, a mixture of water and formic acid, toluene or xylene and the like. When the solvent drops are sprayed and printed on the surface of the soluble polymer by ink-jet printing, the drops can partially dissolve the surface of the polymer to form solution small drops, because the volume of the solution drops is extremely small, the soluble polymer flows outwards from the center inside the solution drops under the action of the coffee ring effect along with the evaporation of the solvent, when the solvent is completely evaporated, a volcano-mouth-shaped structure with a low center and high periphery is formed, and the upper half ridge part of the volcano-mouth-shaped structure is eliminated by accurately controlling the space between the ink-jet printing drops and the printing pattern, so that a continuous uninterrupted tightly-arranged microlens array on the whole surface of the polymer is formed. The preparation method has the advantages of simple process, extremely low cost, capability of effectively producing the micro-lens array with various curvatures and extremely high duty ratio by controlling the quantity and the volume of liquid drops, and suitability for large-area industrial batch preparation.
Drawings
FIG. 1 is a schematic illustration of the effect of the microlens array drop pitch placement on the lens structure of the present application;
FIG. 2 is a schematic diagram of a process for forming individual hexagons of a microlens array in a hexagonal arrangement according to the present application;
FIG. 3 is a top view of a hexagonal arrangement of fibroin microlens array real objects of the present application;
FIG. 4 is a laser confocal profile of a fibroin microlens array in a hexagonal arrangement according to the present application;
fig. 5 is a schematic representation of a fibroin air-drying membrane of the present application;
FIG. 6 is a schematic view of the present application of an inkjet printing of a fibroin microlens array;
FIG. 7 is a schematic view of a silk fibroin microlens array printing molding of the present application;
FIG. 8 is a schematic diagram of PDMS overmolding for a fibroin microlens array of the present application;
fig. 9 is a schematic diagram of a convex PDMS microlens array obtained by molding PDMS in a reverse mold of the silk fibroin microlens array of the present application.
Detailed Description
Hereinafter, specific embodiments of the present application will be described in detail with reference to the accompanying drawings, and it will be apparent to those skilled in the art from this detailed description that the present application can be practiced. Features from different embodiments may be combined to yield new embodiments, or certain features may be substituted for certain embodiments to yield yet further preferred embodiments, without departing from the principles of the present application.
Other existing microlens array preparation methods:
the hot melt reflux method for making microlens array is to use photoresist as material, and adopts photoetching method to etch the material into independent and separated cylinders, then heats them to dissolve, and under the action of surface tension, the cooled photoresist finally forms spherical microlens. The method has simple process and low cost. However, the photoresist itself has poor optical performance and large optical energy loss, and a large-area microlens array with a high duty ratio cannot be manufactured.
The hot stamping method is a micro-lens array manufacturing scheme with simple process, high efficiency and lower cost. Etching a silicon wafer into cylindrical grooves by a deep dry etching method, placing the grooves on the surface of a heated polymer, applying a certain pressure to the silicon wafer to embed the grooves into the polymer, and standing and cooling for a period of time. Under the action of surface tension, the polymer in the groove will form a convex microlens array.
The ultra-precision machining method, such as diamond micro-milling, single-point diamond turning and other processes, is similar to the traditional turning and milling processes, can manufacture the microlens array with good quality, high consistency and strong curvature controllability, but has lower efficiency and high cost.
The coffee ring effect is a phenomenon that when a drop of coffee or tea is dropped on a table surface, the granular substance leaves a stained stain on the table surface, the color of the stain is uneven, and the edge part is deeper than the middle part, so that a ring-shaped spot is formed. The 1997 pennsylvania university physicist uncovered the "coffee ring" effect, mainly due to the influence of the liquid stain particle shape and the problem of flow direction.
Referring to fig. 1 to 9, the present application provides a method for manufacturing a microlens array, the method including the steps of:
1) injecting a solvent into an ink cartridge of an ink jet printer;
2) placing a substrate covered with a soluble polymer on the inkjet printer stage;
3) drawing the arrangement mode of the ink-jet printing solvent droplets;
4) controlling the volume of the ink-jet printing solvent droplets, adjusting the droplet spacing under the specific droplet volume, and printing to obtain a concave micro-lens array;
5) putting the substrates into a culture dish together by taking the concave micro-lens array as a mould;
6) pouring polydimethylsiloxane into the culture dish; vacuumizing the culture dish to enable the polydimethylsiloxane to be completely attached to the concave micro-lens array;
7) and thermally curing the polydimethylsiloxane film, and then uncovering the polydimethylsiloxane film to separate the polydimethylsiloxane film from the concave micro-lens array, so as to obtain the convex polydimethylsiloxane micro-lens array.
The solvent micro-droplets will locally dissolve the soluble polymer by spraying the solvent micro-droplets to deposit on the surface of the soluble polymer. Subsequently, in the process of rapid evaporation of the solvent, a crater-shaped structure with high circumference and low sides is formed along with the coffee ring effect. Then, patterns are printed by accurately controlling the distance between adjacent liquid drops, namely the arrangement mode of the liquid drops, such as hexagonal arrangement, so that the upper half ridge parts of the adjacent crater structures are overlapped with each other, the ridge parts are eliminated, the circular arcs of the crater structures are finally changed into polygonal structures formed by a plurality of straight line segments, such as hexagonal arrangement, and finally hexagonal structures are formed. The diameter of the bottom circle of the printed and molded micro-lens can be accurately controlled by changing the soluble polymer material and the corresponding solvent material and adjusting the proper printing liquid drop interval. By varying the number of print drops at the same location, the depth of the concave microlenses can be controlled.
The method comprises the steps of setting a liquid drop interval parameter by an ink jet printer, wherein the liquid drop interval parameter is different according to different selected polymer materials and different solvent materials of the polymer materials, taking a fibroin material and a solvent deionized water of the fibroin material as an example, when a spray head of 10p L sprays and prints the deionized water on the surface of a fibroin film, the liquid drop interval should be set between 28um and 32um, and certain partial coincidence of volcano-mouth-shaped structures formed by the reconstructed surface of adjacent liquid drops in the processes of dissolving and evaporating the fibroin surface is ensured.
Further, the substrate is rigid substrate such as glass, metal sheet and the like, PET plastic or polyimide.
Further, the soluble polymer comprises fibroin, gelatin, sodium hyaluronate or polystyrene.
Further, the inkjet printing solvent includes water, a mixture of water and formic acid, toluene or xylene.
Further, the substrate covered with the soluble polymer in the step 2) is prepared by air-drying or spin-coating a polymer film on the substrate, and the thickness of the polymer film is larger than the depth of the micro lens. For example, in a fibroin microlens array prepared by this process, the fibroin film thickness should be greater than 5 um. Commercially available soluble polymer films or sheets, plates, etc. may also be utilized directly herein.
Further, the arrangement in step 3) is drawn by using drawing software, and the arrangement comprises a hexagonal arrangement. The drawing software can be drawing or Photoshop software.
Further, the vacuumizing time in the step 6) is 10min, so that no gap or air bubble exists between the polydimethylsiloxane film and the concave micro-lens array.
Taking the manufactured concave micro-lens array as a mould, putting the substrate into a culture dish with the concave micro-lens array facing upwards, and pouring the mixed polydimethylsiloxane, hereinafter referred to as PDMS, into the required culture dish. And putting the whole culture dish into a vacuum chamber, and vacuumizing for 10min to ensure that the PDMS is completely attached to the concave micro-lens array without gaps or residual bubbles.
Further, the temperature of the thermal curing in the step 7) is 25-100 ℃, and the thermal curing time is 4 hours.
And thermally curing the PDMS film at the curing temperature of between 25 and 100 ℃ for 4 hours to completely cure the PDMS film, uncovering the PDMS film to separate the PDMS film from the concave micro-lens array, and obtaining the convex PDMS micro-lens array with the surface appearance opposite to that of the original concave micro-lens array.
And forming a volcano-mouth-shaped structure on the surface of the soluble polymer by utilizing the coffee ring effect. And then the arrangement mode (such as hexagonal arrangement) of the droplets of the ink-jet printing solvent and the droplet printing interval are reasonably controlled, so that the ridge part of the crater-shaped structure is partially overlapped and the polymer structure is reshaped to be eliminated.
Examples
And printing a hexagonal arrangement liquid drop lattice by taking the fibroin polymer air-dried film as a micro-lens array material and water as an ink-jet printing solvent material.
In the first step, water is injected into the ink supply system of the ink jet printer as a solvent material. As shown in fig. 5, the polymer film 1 is prepared on a substrate by air drying or spin coating, and the thickness should be more than 5 um.
And secondly, directly placing the substrate covered with the fibroin film at a proper position on a workbench of the ink-jet printer.
And thirdly, drawing the hexagonal lattice by drawing software such as drawing and the like to determine the pattern of the solvent droplets for ink-jet printing, namely the arrangement mode of the solvent droplets.
And fourthly, setting a droplet spacing parameter w of 28um by the ink-jet printer, selecting a 10p L spray head to spray and print deionized water on the surface of the fibroin film, printing the same position on the surface of the fibroin for multiple times at the same spacing as shown in fig. 6, so that the solvent droplet 2 can be repeatedly printed at the same position for multiple times, and controlling the depth of the microlens, namely obtaining the fibroin microlens array 3 with the required depth, as shown in fig. 7, printing 10p L droplets 2 at the same position for the fibroin microlens, wherein the obtained depth h of the microlens is between 2.3um and 2.4 um.
And fifthly, the manufacturing of the concave micro-lens array is realized by the steps, and the substrate and the like are put into a culture dish by taking the concave micro-lens array as a mould, so that the micro-lens array faces upwards.
In the sixth step, the mixed PDMS material 4 is poured into the desired petri dish. And putting the whole culture dish into a vacuum chamber, and vacuumizing for 10min to ensure that the PDMS is completely attached to the concave micro-lens array without gaps or residual bubbles. As shown in figure 8 of the drawings,
and seventhly, thermally curing the PDMS film at the curing temperature of between 25 and 100 ℃ for 4 hours to completely cure the PDMS film, uncovering the PDMS film to separate the PDMS film from the concave micro-lens array, and obtaining a convex PDMS micro-lens array 5 with the surface appearance opposite to that of the original concave micro-lens array, as shown in FIG. 9.
The method does not need special processing conditions, processing materials and complex equipment, has the advantages of simple process, extremely low cost, good lens forming quality, strong consistency, extremely high duty ratio, short manufacturing period, high production efficiency, suitability for large-area batch production and the like, and can be applied to the fields of various three-dimensional imaging systems, L ED and O L ED light extraction, light field cameras, bionic compound eyes, optical sensors and the like.
The microlens array preparation method provided by the application utilizes very soluble polymer materials, such as fibroin, gelatin, polystyrene and the like, and corresponding solvent materials with strong volatility, such as water, a mixture of water and formic acid, toluene or xylene and the like. When the solvent drops are sprayed and printed on the surface of the soluble polymer by ink-jet printing, the drops can partially dissolve the surface of the polymer to form solution small drops, because the volume of the solution drops is extremely small, the soluble polymer flows outwards from the center inside the solution drops under the action of the coffee ring effect along with the evaporation of the solvent, when the solvent is completely evaporated, a volcano-mouth-shaped structure with a low center and high periphery is formed, and the upper half ridge part of the volcano-mouth-shaped structure is eliminated by accurately controlling the space between the ink-jet printing drops and the printing pattern, so that a continuous uninterrupted tightly-arranged microlens array on the whole surface of the polymer is formed. The preparation method has the advantages of simple process, extremely low cost, capability of effectively producing the micro-lens array with various curvatures and extremely high duty ratio by controlling the quantity and the volume of liquid drops, and suitability for large-area industrial batch preparation.
Although the present application has been described above with reference to specific embodiments, those skilled in the art will recognize that many changes may be made in the configuration and details of the present application within the principles and scope of the present application. The scope of protection of the application is determined by the appended claims, and all changes that come within the meaning and range of equivalency of the technical features are intended to be embraced therein.

Claims (8)

1. A method for preparing a micro-lens array is characterized by comprising the following steps: the method comprises the following steps:
1) injecting a solvent into an ink cartridge of an ink jet printer;
2) placing a substrate covered with a soluble polymer on the inkjet printer stage;
3) drawing the arrangement mode of the ink-jet printing solvent droplets;
4) controlling the volume of the ink-jet printing solvent droplets, adjusting the droplet spacing under the specific droplet volume, and printing to obtain a concave micro-lens array;
5) putting the substrates into a culture dish together by taking the concave micro-lens array as a mould;
6) pouring polydimethylsiloxane into the culture dish; vacuumizing the culture dish to enable the polydimethylsiloxane to be completely attached to the concave micro-lens array;
7) and thermally curing the polydimethylsiloxane film, and then uncovering the polydimethylsiloxane film to separate the polydimethylsiloxane film from the concave micro-lens array, so as to obtain the convex polydimethylsiloxane micro-lens array.
2. The method of manufacturing a microlens array as set forth in claim 1, wherein: the substrate is rigid substrate such as glass, metal sheet and the like, PET plastic or polyimide.
3. The method of manufacturing a microlens array as set forth in claim 1, wherein: the soluble polymer comprises fibroin, gelatin, sodium hyaluronate or polystyrene.
4. The method of manufacturing a microlens array as set forth in claim 1, wherein: the inkjet printing solvent comprises water, a mixture of water and formic acid, toluene or xylene.
5. The method for producing a microlens array as claimed in any one of claims 1 to 4, wherein: the substrate covered with the soluble polymer in the step 2) is prepared into a polymer film by air drying or spin coating on the substrate, and the thickness of the polymer film is larger than the depth of the micro lens.
6. The method of manufacturing a microlens array as set forth in claim 5, wherein: and 3) drawing the arrangement mode in the step 3) by adopting drawing software, wherein the arrangement mode comprises hexagonal arrangement.
7. The method of manufacturing a microlens array as set forth in claim 5, wherein: the vacuumizing time in the step 6) is 10min, so that no gap or air bubbles exist between the polydimethylsiloxane film and the concave micro-lens array.
8. The method of manufacturing a microlens array as set forth in claim 5, wherein: the temperature of the thermal curing in the step 7) is 25-100 ℃, and the thermal curing time is 4 hours.
CN201910011368.0A 2019-01-07 2019-01-07 Method for preparing micro-lens array Pending CN111413753A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112903102A (en) * 2021-01-21 2021-06-04 华中科技大学 Chip-level spectrometer and preparation method thereof
CN114325894A (en) * 2021-12-23 2022-04-12 中国科学院上海微系统与信息技术研究所 Preparation method of micro lens array, system and equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1880977A (en) * 2005-05-19 2006-12-20 精工爱普生株式会社 Method of manufacturing a microlens, microlens, optical film, screen for projection,
CN102237429A (en) * 2010-04-27 2011-11-09 乐金显示有限公司 Solar cell including microlens and method of fabricating the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1880977A (en) * 2005-05-19 2006-12-20 精工爱普生株式会社 Method of manufacturing a microlens, microlens, optical film, screen for projection,
CN102237429A (en) * 2010-04-27 2011-11-09 乐金显示有限公司 Solar cell including microlens and method of fabricating the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112903102A (en) * 2021-01-21 2021-06-04 华中科技大学 Chip-level spectrometer and preparation method thereof
CN114325894A (en) * 2021-12-23 2022-04-12 中国科学院上海微系统与信息技术研究所 Preparation method of micro lens array, system and equipment
CN114325894B (en) * 2021-12-23 2023-04-28 中国科学院上海微系统与信息技术研究所 Preparation method of micro-lens array, system and equipment

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