CN111410027A - Wafer box positioning tool and wafer box fixing bearing platform - Google Patents
Wafer box positioning tool and wafer box fixing bearing platform Download PDFInfo
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- CN111410027A CN111410027A CN202010228601.3A CN202010228601A CN111410027A CN 111410027 A CN111410027 A CN 111410027A CN 202010228601 A CN202010228601 A CN 202010228601A CN 111410027 A CN111410027 A CN 111410027A
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- wafer
- wafer box
- wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a wafer cassette positioning tool and a wafer cassette fixing bearing platform, and belongs to the technical field of wafer production. The wafer box positioning tool comprises a tool main body and a limiting assembly, wherein an embedding groove for placing a wafer box is formed in the tool main body, a clamping groove is preset in the groove wall of the embedding groove and comprises at least two fixed flanges, and each fixed flange is used for limiting the wafer box with the corresponding specification; the limiting assembly is arranged on the tool main body and comprises an adjustable stop block, and the adjustable stop block can be matched with the corresponding fixed flange to be used for positioning the wafer box when extending out. The wafer box fixing bearing platform comprises the wafer box positioning tool. According to the wafer box positioning tool and the wafer box fixing bearing table, the wafer box is limited through the clamping groove; the clamping groove comprises at least two fixed flanges which are used for limiting the wafer boxes with corresponding specifications respectively, so that the clamping groove can be suitable for the wafer boxes with various specifications, the production cost is reduced, and the production efficiency is improved.
Description
Technical Field
The invention relates to the technical field of wafer production, in particular to a wafer box positioning tool and a wafer box fixing bearing table.
Background
In the semiconductor field, semiconductor wafer conveying equipment is generally required in a factory during processing, and at present, wafers are generally loaded in a wafer cassette, and the wafer cassette is conveyed by using a fixed bearing platform so as to realize the conveying of the wafers. The fixed loading platform can only be used for placing a wafer box with one specification, and is not compatible with wafer boxes of various types. When a wafer processing factory produces wafers of various specifications, the wafer processing factory needs to respectively adopt fixed bearing tables of the corresponding wafer specifications to carry the wafers. Multiple devices corresponding to the wafers with various specifications are needed for producing the wafers, so that the equipment fixing investment is high; the semiconductor workshop is a clean room, and the manufacturing, construction and operation and maintenance costs of the clean room are high, so the semiconductor clean room is called 'earth-sized gold', the variety of the conveying equipment is increased, the floor area of the workshop is increased, and the construction, operation and maintenance costs of the clean room are increased.
In the prior art, corresponding tools can be arranged aiming at wafers with different specifications, and when the wafers with corresponding models are produced, the corresponding tools are installed and replaced on a bearing table body, so that one fixed bearing table can carry the wafers with various specifications; however, the corresponding tool is manufactured for each specification of wafer, the tool needs to be replaced in production, a large amount of manpower and material resources need to be input, the input cost is high, and the production efficiency is low.
Disclosure of Invention
The invention aims to provide a wafer box positioning tool which can be suitable for wafer boxes with various specifications and reduce the production cost.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a wafer box location frock for the wafer box of fixed multiple specification, include:
the tool main body is provided with an embedded groove for placing the wafer box, a clamping groove is preset on the groove wall of the embedded groove and comprises at least two fixed flanges, and each fixed flange is used for limiting the wafer box with the corresponding specification;
the limiting assembly is arranged on the tool main body and comprises an adjustable stop block, and the adjustable stop block can be matched with the corresponding fixed flange to be used for positioning the wafer box when extending out.
Optionally, the retaining rib comprises two perpendicular edges.
Optionally, at least two retaining ribs are provided in series.
Optionally, two sets of slots are symmetrically disposed on the slot wall of the embedding groove.
Optionally, the limit stop assembly further comprises a driving member for driving the adjustable stop to move.
Optionally, a guide slide is arranged on the tool main body, and the adjustable stop block can move along the guide slide.
Optionally, the spacing assembly further comprises clamping members connected to both sides of the adjustable stops, the clamping members being configured to clamp the wafer cassette.
Another objective of the present invention is to provide a wafer cassette fixing and supporting table, which can be applied to wafer cassettes of various specifications, thereby reducing the production cost and improving the production efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
a wafer cassette fixing carrier for detecting wafer cassettes of various specifications, comprising the wafer cassette positioning tool of any one of claims 1 to 7 and a carrier body on which the wafer cassette positioning tool is arranged.
Optionally, a wafer is mounted in the wafer box, and the wafer box fixing and bearing table further includes a detection assembly for detecting whether the wafer slides out of the wafer box.
Optionally, the wafer cassette includes an entrance for taking and placing wafers, the susceptor body includes a vertical plate disposed perpendicular to the wafer cassette positioning tool, and the vertical plate is disposed opposite to the entrance;
the detection assembly comprises a correlation sensor arranged on the vertical plate, and the correlation sensor can irradiate the periphery of the embedded groove.
The invention has the beneficial effects that:
according to the wafer box positioning tool, the embedding groove for placing the wafer box is formed in the tool main body, and the clamping groove for limiting the wafer box is preset in the groove wall of the embedding groove, so that the wafer box is limited; the draw-in groove includes two at least fixed flanges, every fixed flange is used for corresponding specification respectively wafer box's spacing, adjustable stop that rethread can stretch out be used for with corresponding fixed flange cooperation is used for wafer box's location has realized that a frock is applicable to the wafer box of multiple specification, reduces frock preparation quantity, has reduced manufacturing cost.
According to the wafer box fixing bearing platform provided by the invention, the wafer box positioning tool is arranged on the bearing platform body, so that one wafer box fixing bearing platform can be suitable for carrying wafer boxes with various specifications, the using specification of carrying equipment is reduced, the using number of the equipment is reduced, the using area of a workshop is reduced, and the investment cost is reduced; in the production process, only the wafer boxes with corresponding specifications are placed on the wafer box positioning tool, equipment or tools do not need to be replaced, the operation is simple, and the production efficiency is improved.
Drawings
FIG. 1 is a schematic view of a wafer cassette mounting stage according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a wafer cassette positioning tool according to an embodiment of the present invention.
In the figure:
100-a bearing table body; 101-a mesa; 102-a vertical plate; 200-correlation sensor; 300-connecting sheet metal;
1-a tool main body; 11-an embedding groove; 12-a card slot; 121-fixed flanges; 122-a first right angle groove; 123-a second right-angle groove;
2-a limiting component; 21-an adjustable stop block; 22-a guide way; 23-clamping member.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the semiconductor field, semiconductor wafer conveying equipment is generally required in a factory during processing, and at present, wafers are generally loaded in a wafer cassette, and the wafer cassette is conveyed by using a fixed bearing platform so as to realize the conveying of the wafers. The fixed loading platform can only be used for placing a wafer box with one specification, and is not compatible with wafer boxes of various types. When a wafer processing factory produces wafers of various specifications, the wafer processing factory needs to respectively adopt fixed bearing tables of the corresponding wafer specifications to carry the wafers. Multiple devices corresponding to the wafers with various specifications are needed for producing the wafers, so that the equipment fixing investment is high; the semiconductor workshop is a clean room, and the manufacturing, construction and operation and maintenance costs of the clean room are high, so the semiconductor clean room is called 'earth-sized gold', the variety of the conveying equipment is increased, the floor area of the workshop is increased, and the construction, operation and maintenance costs of the clean room are increased.
In order to solve the above problem, the embodiment provides a susceptor for fixing wafer cassettes for detecting wafer cassettes of various specifications, as shown in fig. 1, the susceptor includes a wafer cassette positioning tool and a susceptor body 100, and the wafer cassette positioning tool is disposed on the susceptor body 100. Set up wafer box location frock on plummer organism 100, realize the location of different wafer boxes through wafer box location frock, make the fixed plummer of a wafer box can be applicable to the wafer box of carrying multiple specification, thereby reduce the handling equipment use specification and reduce the input use quantity of equipment to reduce the usable floor area in workshop, thereby reduce the input cost.
In the prior art, corresponding tools can be arranged for wafers of different specifications, and when the wafers of corresponding models are produced, the corresponding tools are installed and replaced on the bearing table body 100, so that one fixed bearing table can carry the wafers of various specifications; however, the corresponding tool is manufactured for each specification of wafer, the tool needs to be replaced in production, a large amount of manpower and material resources need to be input, the input cost is high, and the production efficiency is low.
In order to improve the production efficiency and reduce the input cost, the embodiment further provides a wafer cassette positioning tool for fixing wafer cassettes of various specifications, as shown in fig. 2, the tool comprises a tool main body 1 and a limiting component 2, wherein an embedding groove 11 for placing the wafer cassette is formed in the tool main body 1, a clamping groove 12 is preset in the groove wall of the embedding groove 11, the clamping groove 12 comprises at least two fixing flanges 121, and each fixing flange 121 is used for limiting the wafer cassette of a corresponding specification; the limiting assembly 2 is arranged on the tool main body 1, the limiting assembly 2 comprises an adjustable stop block 21, and the adjustable stop block 21 can be matched with the corresponding fixed flange 121 to be used for positioning the wafer box when extending out. The limit of the wafer box is realized by arranging an embedded groove 11 for placing the wafer box on the tool main body 1 and arranging a clamping groove 12 for limiting the wafer box on the groove wall of the embedded groove 11; the clamping groove 12 comprises at least two fixed flanges 121, each fixed flange 121 is used for limiting the wafer box with the corresponding specification, and the adjustable stop 21 capable of extending out is used for being matched with the corresponding fixed flange 121 to position the wafer box, so that a tool is suitable for the wafer boxes with various specifications, the tool manufacturing quantity is reduced, and the production cost is reduced.
In the semiconductor field, 8 cun at present, 12 cun wafers are mainstream products, semiconductor industry 8 cun, 12 cun wafer box satisfies the general standard of SEMIC, be circular shape wafer box and square wafer box respectively, it has the right angle recess to open on the circumferencial direction of circular wafer box, the fixed mode of wafer box of two kinds of specifications is unanimous, as shown in fig. 2, in this embodiment, fixed flange 121 includes two right-angle sides of mutually perpendicular, two right-angle sides of mutually perpendicular can form two kinds of forms of first right-angle groove 122 and evagination second right-angle groove 123 of indent, first right-angle groove 122 of indent is used for spacing of the outer edges and corners of square wafer box, evagination second right-angle groove 123 is used for spacing the right angle recess of circular wafer box.
Alternatively, at least two fixing ribs 121 are arranged in series, so that the structure is compact; in this embodiment, the clamping groove 12 is W-shaped, and can be applied to wafer cassettes of three specifications, and the wafer cassette is simple and compact in structure and convenient to use.
Optionally, two sets of clamping grooves 12 are symmetrically arranged on the groove wall of the embedding groove 11, and the two sets of clamping grooves 12 respectively limit the wafer box from two sides of the wafer box, so that the limiting is more accurate, and the deviation is avoided.
Optionally, the limiting assembly 2 further includes a driving member for driving the adjustable stopper 21 to move, so as to achieve automatic extension and retraction of the adjustable stopper 21, the driving member drives the adjustable stopper 21 to extend for positioning the wafer cassette, and when the wafer cassette is taken down, the driving member drives the adjustable stopper 21 to retract; alternatively, the driving member may be an air cylinder, and an expansion rod of the air cylinder is connected with the adjustable stop block 21 and drives the adjustable stop block 21 to move; alternatively, the driving member may also be a motor and ball screw structure, the adjustable stopper 21 is connected to the screw nut, and the motor drives the ball screw and drives the adjustable stopper 21 to move.
In order to ensure that the adjustable stop block 21 moves along the preset direction, optionally, a guide slideway 22 is arranged on the tool main body 1, and the adjustable stop block 21 can move along the guide slideway 22; optionally, the guide slideway 22 may be provided in the embedding groove 11, and the adjustable stopper 21 and the guide slideway 22 may be slidably connected through a guide slider; alternatively, the guide slide 22 may be a linear guide, and the adjustable stop 21 and the linear guide may be slidably connected by a guide slider, so as to ensure that the adjustable stop 21 moves along the guide slide 22.
Optionally, the limiting assembly 2 further includes a clamping member 23 connected to two sides of the adjustable stopper 21, the clamping member 23 is used for clamping the wafer cassette, so that the wafer cassette is fixed and the position of the wafer cassette is kept unchanged, the clamping member 23 is connected to the adjustable stopper 21 and moves along with the clamping member 23, and the adjustable stopper 21 extends out to position the wafer cassette, and then the clamping member 23 clamps the wafer cassette. Optionally, the clamping member 23 includes air cylinders and clamping plates connected to piston rods of the air cylinders, the two air cylinders are symmetrically connected to two sides of the adjustable stop 21, and after the adjustable stop 21 positions the wafer cassette, the two air cylinders extend out of the piston rods and clamp the wafer cassette through the stiffening plate; optionally, the clamping member 23 may also be a motor, a ball screw structure and a clamping plate, the clamping plate is connected to the screw nut, the motor drives the ball screw to rotate and simultaneously drives the screw nut to move, and the wafer cassette is clamped by the clamping plate.
The existing standard wafer box is in an open type, and when the wafer box is placed, a wafer falling prevention device is not arranged on the wafer box, so that the possibility of wafer sliding out due to inertia exists; meanwhile, when the manipulator takes the wafer, the position of the point is fixed, and if the position of the wafer changes, the change of the position of the manipulator taking the wafer can cause collision damage; in order to avoid the collision of the manipulator caused by the wafer sliding out of the wafer box, optionally, the wafer box fixing bearing table further comprises a detection assembly for detecting whether the wafer slides out of the wafer box, when the wafer slides out of the wafer box, the detection assembly feeds a detection result back to the upper computer, and the upper computer adjusts the operation of the whole equipment to prevent collision.
Specifically, the wafer cassette includes an entrance for taking and placing wafers, the susceptor body 100 includes a vertical plate 102 disposed perpendicular to the wafer cassette positioning tool, and the vertical plate 102 is disposed opposite to the entrance; the detection assembly comprises a correlation sensor 200 arranged on the vertical plate 102, the correlation sensor 200 can irradiate the periphery of the embedding groove 11, when the wafer slides out of the wafer box, the correlation sensor 200 can detect the wafer, and then a feedback signal or an alarm is given. In this embodiment, the susceptor body 100 includes a table top 101, the wafer cassette positioning tool is installed on the table top 101, and the vertical plate 102 is vertically disposed on the table top 101.
Optionally, the both sides of plummer organism 100 are provided with connection panel beating 300, and connection panel beating 300 passes through the bolt to be connected with transfer apparatus, realizes the fixed of plummer organism 100 and transfer apparatus, guarantees the stability of mechanism's operation, avoids appearing the conveying error of wafer box.
In this embodiment, a circular wafer cassette is taken as an example for explanation, and the process steps of fixing the susceptor by the wafer cassette include:
s1: placing the circular wafer box in the embedding groove 11 and placing the circular wafer box at the second right-angle groove 123;
s2: the driving piece drives the adjustable stop block 21 to extend out to position the circular wafer box;
s3: the clamping piece 23 clamps the round wafer box;
s4: the manipulator clamps the wafer until the wafer is completely taken out;
s5: the clamp 23 retracts, releasing the round pod;
s6: the driving piece drives the adjustable stop block 21 to retract;
s6: and taking the round wafer box away and entering the next flow.
When the wafer slides out of the wafer box, before S4, the method further includes:
s100: when the correlation sensor 200 detects that the wafer slides out of the wafer box, the upper computer adjusts the position of the manipulator for taking the wafer or stops the operation of the manipulator.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. The utility model provides a wafer box location frock for the wafer box of fixed multiple specification, its characterized in that includes:
the tool comprises a tool main body (1), a clamping groove (12) is formed in the tool main body, the clamping groove (11) is used for placing a wafer box, a clamping groove (12) is preset in the wall of the clamping groove (11), the clamping groove (12) comprises at least two fixed flanges (121), and each fixed flange (121) is used for limiting the wafer box with a corresponding specification;
the limiting assembly (2) is arranged on the tool main body (1), the limiting assembly (2) comprises an adjustable stop block (21), and the adjustable stop block (21) can be matched with the fixed flange (121) to be used for positioning the wafer box when extending out.
2. The wafer cassette positioning tooling of claim 1 wherein the retaining rib (121) comprises two perpendicular edges.
3. The wafer cassette positioning tooling of claim 1 or 2 wherein at least two retaining ribs (121) are provided in series.
4. The wafer cassette positioning tooling as set forth in claim 1 or 2, wherein two sets of the locking grooves (12) are symmetrically arranged on the groove wall of the embedding groove (11).
5. The wafer cassette positioning tooling as set forth in claim 1 or 2 wherein the spacing assembly (2) further comprises a driving member for driving the adjustable stop (21) to move.
6. The wafer cassette positioning tool according to claim 1 or 2, wherein a guide slide (22) is arranged on the tool body (1), and the adjustable stop (21) can move along the guide slide (22).
7. The wafer cassette positioning tooling as set forth in claim 1 or 2 wherein the spacing assembly (2) further comprises clamping members (23) connected to both sides of the adjustable stops (21), the clamping members (23) being used for clamping the wafer cassette.
8. A wafer cassette fixing carrier table for detecting wafer cassettes of various specifications, comprising the wafer cassette positioning tool of any one of claims 1 to 7, and further comprising a carrier table body (100), wherein the wafer cassette positioning tool is arranged on the carrier table body (100).
9. The apparatus of claim 8, wherein the cassette holds a wafer, and the apparatus further comprises a detecting module for detecting whether the wafer slides out of the cassette.
10. The wafer cassette fixing and carrying table according to claim 9, wherein the wafer cassette includes an entrance for taking and placing the wafer, the carrying table body (100) includes a vertical plate (102) disposed perpendicular to the wafer cassette positioning tool, and the vertical plate (102) is disposed opposite to the entrance;
the detection assembly comprises a correlation sensor (200) installed on the vertical plate (102), and the correlation sensor (200) can irradiate the periphery of the embedding groove (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010228601.3A CN111410027A (en) | 2020-03-27 | 2020-03-27 | Wafer box positioning tool and wafer box fixing bearing platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010228601.3A CN111410027A (en) | 2020-03-27 | 2020-03-27 | Wafer box positioning tool and wafer box fixing bearing platform |
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| Publication Number | Publication Date |
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| CN111410027A true CN111410027A (en) | 2020-07-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010228601.3A Pending CN111410027A (en) | 2020-03-27 | 2020-03-27 | Wafer box positioning tool and wafer box fixing bearing platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117352438A (en) * | 2023-12-04 | 2024-01-05 | 北京锐洁机器人科技有限公司 | Multi-size wafer loading platform |
-
2020
- 2020-03-27 CN CN202010228601.3A patent/CN111410027A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117352438A (en) * | 2023-12-04 | 2024-01-05 | 北京锐洁机器人科技有限公司 | Multi-size wafer loading platform |
| CN117352438B (en) * | 2023-12-04 | 2024-03-22 | 北京锐洁机器人科技有限公司 | Multi-size wafer loading platform |
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Address after: Room 104, 1st floor, building 4, 88 Yuanhe Wanli Road, Xiangcheng District, Suzhou City, Jiangsu Province Applicant after: Honghu (Suzhou) semiconductor technology Co.,Ltd. Address before: 215300 181 huanlou Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Applicant before: Honghu (Kunshan) semiconductor optoelectronic Co.,Ltd. |
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