CN111398637A - Optical fiber probe of near-field optics and preparation method - Google Patents
Optical fiber probe of near-field optics and preparation method Download PDFInfo
- Publication number
- CN111398637A CN111398637A CN202010287748.XA CN202010287748A CN111398637A CN 111398637 A CN111398637 A CN 111398637A CN 202010287748 A CN202010287748 A CN 202010287748A CN 111398637 A CN111398637 A CN 111398637A
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- optical fiber
- metal layer
- hole
- head
- fiber head
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
Abstract
The invention relates to a near-field optical fiber probe and a preparation method thereof, and mainly relates to the field of optical fiber equipment. The optical fiber head is arranged to be the conical optical fiber head, the metal layer covers the conical optical fiber head, the metal layer is provided with the hole, the through hole penetrates to the fiber core of the conical optical fiber head, since the hole passes through the metal layer and penetrates to the fiber core of the optical fiber head, when the optical fiber probe is used for exciting light, the light transmitted in the optical fiber head is transmitted out through the through hole and transmitted to the tip of the optical fiber head along the surface of the metal layer, because the tip is small, light is reflected by the fiber tip, and the fiber probe is applied to a near-field optical microscope, so that the observation resolution of an observed sample is improved, and due to the hole, light can reach the tip of the fiber-optic probe through the hole, and then solved the less problem of light flux, the fiber probe in this application has solved the low problem of resolution ratio and light flux simultaneously promptly.
Description
Technical Field
The invention relates to the field of optical fiber equipment, in particular to a near-field optical fiber probe and a preparation method thereof.
Background
The near-field optical microscope consists of an optical fiber probe, a signal transmission device, a scanning control system, a signal processing system, a signal feedback system and the like. Near field generation and detection principle: incident light irradiates on an object with a plurality of micro structures on the surface, under the action of an incident light field, the generated reflected waves comprise evanescent waves limited on the surface of the object and propagation waves transmitted to a far distance, an optical fiber probe is used as a scattering center and is placed at a position close enough to the surface of the object, and the evanescent waves are excited to emit light again. The light generated by the excitation also contains undetectable evanescent waves and propagating waves that can propagate to a remote probe, and the process completes the detection of the near field.
In the optical fiber probe in the prior art, a metal layer is wrapped outside a tapered optical fiber, and the tip of the tapered optical fiber and the tip of the metal layer are removed, so that the head of the tapered optical fiber is directly contacted with air, and when the optical fiber probe is used for exciting light, light exits from a fiber core and irradiates on an observed sample, and when the optical fiber probe is used for collecting light, the light on the observed sample is collected by the fiber core.
However, the optical characteristics of the optical fiber probe in the related art are seriously affected by the size of the optical fiber probe, and when the optical fiber probe is large in size, the amount of light passing through the optical fiber probe is large, and when the optical fiber probe is applied to a near-field optical microscope, the observation resolution of the sample to be observed is low, and when the optical fiber probe is small in size, the observation resolution of the sample to be observed is high, but the amount of light passing through the optical fiber probe is small.
Disclosure of Invention
An object of the present invention is to provide a near-field optical fiber probe and a method for manufacturing the same, which solve the problems that the optical characteristics of the optical fiber probe in the related art are seriously affected by the size of the optical fiber probe, the amount of light passing through the optical fiber probe is large but the observation resolution of the sample to be observed is low when the optical fiber probe is large, and the amount of light passing through the optical fiber probe is small when the optical fiber probe is small.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, the present application provides a near field optical fiber probe, comprising: the optical fiber head is a conical optical fiber head, the metal layer covers the conical optical fiber head, holes are formed in the metal layer, and the through hole penetrates through the metal layer and extends to the fiber core of the conical optical fiber head.
Optionally, the thickness of the metal layer is 10 nm to 1000 nm.
Optionally, the material of the metal layer is a noble metal.
Optionally, the metal layer is made of at least one of gold, silver, ruthenium, rhodium, palladium, osmium, iridium, and platinum.
Optionally, the optical fiber probe further includes a light guide groove, and a path from the hole in the metal layer to the tip of the optical fiber head is provided with the light guide groove.
Optionally, the hole is not perpendicular to the extending direction of the optical fiber head.
In a second aspect, the present application further provides a method for preparing a near-field optical fiber probe, which is applied to the optical fiber probe of any one of the first aspect, and the method for preparing the optical fiber probe includes:
tapering the optical fiber to fuse the optical fiber to form a tapered optical fiber head;
plating a preset metal outside the tapered optical fiber head to form a metal layer;
and (3) using a femtosecond laser to burn the metal layer to form holes extending to the fiber core.
Optionally, the step of plating a predetermined metal on the outside of the tapered optical fiber head to form a metal layer includes:
and plating a preset metal outside the tapered optical fiber head by using any one of the electron beam evaporation coating method and the magnetron sputtering coating method to form a metal layer.
Optionally, the step of forming the hole extending to the core by using a femtosecond laser to burn the metal layer includes:
adjusting the femtosecond laser to the included angle of the tapered optical fiber head to be less than 90 degrees;
burning the metal layer by using a femtosecond laser to form a hole penetrating through the metal on the metal layer;
and burning the optical fiber head by using a femtosecond laser so that the hole extends to the fiber core of the optical fiber head.
Optionally, the preparation method further comprises:
and a light guide groove is formed on a path from the hole on the metal layer to the tip end of the optical fiber head.
The invention has the beneficial effects that:
the optical fiber head is arranged to be the conical optical fiber head, the metal layer covers the conical optical fiber head, the metal layer is provided with the hole, the through hole penetrates to the fiber core of the conical optical fiber head, since the hole passes through the metal layer and penetrates to the fiber core of the optical fiber head, when the optical fiber probe is used for exciting light, the light transmitted in the optical fiber head is transmitted out through the through hole and transmitted to the tip of the optical fiber head along the surface of the metal layer, because the tip is small, light is reflected by the fiber tip, and the fiber probe is applied to a near-field optical microscope, so that the observation resolution of an observed sample is improved, and due to the hole, light can reach the tip of the fiber-optic probe through the hole, and then solved the less problem of light flux, the fiber probe in this application has solved the low problem of resolution ratio and light flux simultaneously promptly.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a near-field optical fiber probe according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another near-field optical fiber probe according to an embodiment of the present invention;
fig. 3 is a schematic flow chart of a near-field optical fiber probe according to an embodiment of the present invention.
Icon: 10-a fiber optic head; 20-a metal layer; 30-holes; 40-light guide groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiment is a metal plate embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In order to make the implementation of the present invention clearer, the following detailed description is made with reference to the accompanying drawings.
The application provides a near field optics's optical fiber probe, optical fiber probe includes: the optical fiber head 10 is a conical optical fiber head 10, the metal layer 20 covers the conical optical fiber head 10, a hole 30 is formed in the metal layer 20, and the through hole 30 penetrates through the metal layer 20 and extends to the fiber core of the conical optical fiber head 10.
The optical fiber head 10 is a tapered structure formed by fusing an optical fiber, so that the optical fiber head 10 is called a tapered structure, that is, the optical fiber head 10 is a tapered optical fiber head 10, generally, the size of the tapered structure of the tapered optical fiber head 10 is set according to actual needs, and is not specifically limited herein, the metal layer 20 is coated on the periphery of the optical fiber head 10, a through hole is opened from the metal layer 20, the through hole 30 penetrates through the metal layer 20 and extends to the fiber core of the tapered optical fiber head 10, the specific size of the through hole is determined according to actual needs, and is not specifically limited herein, the radius of the through hole can be set according to the difference of the light transmission amount of the emergent light, since the hole 30 penetrates through the metal layer 20 and penetrates to the fiber core of the optical fiber head 10, when the optical fiber probe is used for exciting light, the light transmitted in the optical fiber head 10 passes through the through hole and is transmitted to the tip of the optical fiber head 10 along the surface of the metal layer, because the tip is less, light reflects through this fiber tip, uses this fiber probe on near field optical microscope for the observation resolution ratio to the observed sample improves, and because the existence of this hole 30, light can reach this fiber probe's tip through this hole 30, and then has solved the less problem of the light flux volume, and the fiber probe in this application has solved the low problem of resolution ratio and light flux volume simultaneously promptly.
Optionally, the thickness of the metal layer 20 is 10 nm to 1000 nm.
The thickness of the metal layer 20 may be 10 nm, or 1000 nm, or any size between 10 nm and 1000 nm, and it should be noted that the thickness of the metal layer 20 on the optical fiber probe is consistent, that is, if the thickness of the metal layer 20 at the tip of the metal probe is 10 nm, the thickness of the metal layer 20 at the tail end of the metal probe should also be 10 nm.
Optionally, the material of the metal layer 20 is a noble metal.
Optionally, the material of the metal layer 20 is at least one of gold, silver, ruthenium, rhodium, palladium, osmium, iridium, and platinum.
The material of the metal layer 20 is a noble metal, and may be any one of gold, silver, ruthenium, rhodium, palladium, osmium, iridium and platinum, or a mixed metal composed of a plurality of noble metals of gold, silver, ruthenium, rhodium, palladium, osmium, iridium and platinum, and if the material of the metal layer 20 is a mixed metal composed of a plurality of noble metals of gold, silver, ruthenium, rhodium, palladium, osmium, iridium and platinum, the mixing ratio and mixing type of the noble metals are determined according to actual needs, and are not particularly limited herein.
Optionally, the optical fiber probe further comprises a light guide groove 40, and the light guide groove 40 is arranged on the path from the hole 30 on the metal layer 20 to the tip of the optical fiber head 10.
The light guide groove 40 is disposed on a path from the hole 30 on the metal layer 20 to the tip of the optical fiber head 10, and the light guide groove 40 forms a trench waveguide to converge surface plasmons formed on the surface of the metal layer 20, thereby facilitating more energy to propagate to the tip of the optical fiber probe.
Optionally, the hole 30 is not perpendicular to the direction in which the fiber tip 10 extends.
The hole 30 is disposed at a non-perpendicular angle to the extending direction of the optical fiber head 10, so that the hole 30 has more contact area with the optical fiber, and light can be more easily coupled out of the optical fiber.
The optical fiber head 10 is set to be the conical optical fiber head 10, the metal layer 20 covers the conical optical fiber head 10, the metal layer 20 is provided with the hole 30, the through hole 30 penetrates to the fiber core of the conical optical fiber head 10, since the hole 30 passes through the metal layer 20 and penetrates to the core of the optical fiber head 10, when the optical fiber probe is used for exciting light, the light transmitted in the fiber optic head 10 passes out through the through hole, and is transmitted toward the tip of the fiber optic head 10 along the surface of the metal layer 20, because the tip is small, light is reflected by the fiber tip, and the fiber probe is applied to a near-field optical microscope, so that the observation resolution of an observed sample is improved, and, due to the presence of the hole 30, light can pass through the hole 30 to the tip of the fiber optic probe, and then solved the less problem of light flux, the fiber probe in this application has solved the low problem of resolution ratio and light flux simultaneously promptly.
The application also provides a preparation method of the near-field optical fiber probe, which is applied to any one of the optical fiber probes, and the preparation method comprises the following steps:
s101, tapering the optical fiber to fuse the optical fiber to form a tapered optical fiber head.
Fusing the complete optical fiber to enable the optical fiber to reach a molten state, stretching the optical fiber to enable the molten part of the optical fiber to form a tapered structure, then tapering the optical fiber again to enable the optical fiber to be fused at the molten position, and enabling the fracture to be in a sharp shape.
S102, plating a preset metal outside the tapered optical fiber head to form a metal layer.
And evaporating a preset metal outside the optical fiber head to form a metal layer outside the optical fiber head, wherein the preset metal can be one metal or multiple metals, and is not particularly limited herein.
And S103, using femtosecond laser to burn the metal layer to form holes extending to the fiber core.
And (3) burning the corresponding position on the metal layer by using a femtosecond laser, and forming a hole which penetrates through the metal layer and extends to the fiber core of the optical fiber on the optical fiber probe, wherein the hole is generally not perpendicular to the extending direction of the optical fiber head.
Optionally, the step of plating a predetermined metal on the outside of the tapered optical fiber head to form a metal layer includes:
and plating a preset metal outside the tapered optical fiber head by using any one of the electron beam evaporation coating method and the magnetron sputtering coating method to form a metal layer.
The metal layer may be formed by loading a predetermined metal on the outside of the tapered fiber tip using an electron beam evaporation coating method or magnetron sputtering.
Optionally, the step of forming the hole extending to the core by using a femtosecond laser to burn the metal layer includes:
adjusting the femtosecond laser to the included angle of the tapered optical fiber head to be less than 90 degrees;
burning the metal layer by using a femtosecond laser to form a hole penetrating through the metal on the metal layer;
and burning the optical fiber head by using a femtosecond laser so that the hole extends to the fiber core of the optical fiber head.
Optionally, the preparation method further comprises:
and a light guide groove is formed on a path from the hole on the metal layer to the tip end of the optical fiber head.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A near field optical fiber probe, comprising: the optical fiber head is a conical optical fiber head, the metal layer covers the conical optical fiber head, holes are formed in the metal layer, and the through hole penetrates through the metal layer and extends to the fiber core of the conical optical fiber head.
2. A near field optical fiber probe according to claim 1, wherein the metal layer has a thickness of 10 nm to 1000 nm.
3. A near field optical fiber probe according to claim 1, wherein the material of the metal layer is a noble metal.
4. The near-field optical fiber probe according to claim 3, wherein the material of the metal layer is at least one of gold, silver, ruthenium, rhodium, palladium, osmium, iridium, and platinum.
5. A near field optical fiber probe according to claim 1, further comprising a light guiding groove provided on a path from the hole on the metal layer to a tip of the fiber tip.
6. A near field optical fiber probe according to claim 1, wherein the hole is not perpendicular to the direction in which the fiber tip extends.
7. A method for preparing an optical fiber probe for near-field optics, which is applied to the optical fiber probe of any one of claims 1 to 6, the method comprising:
tapering the optical fiber to fuse the optical fiber to form a tapered optical fiber head;
plating a preset metal outside the conical optical fiber head to form a metal layer;
and using a femtosecond laser to burn the metal layer to form holes extending to the fiber cores.
8. The method for manufacturing an optical fiber probe for near-field optics according to claim 7, wherein the step of plating a predetermined metal on the outside of the tapered optical fiber tip to form a metal layer comprises:
and plating a preset metal outside the tapered optical fiber head by using any one of the electron beam evaporation coating method and the magnetron sputtering coating method to form a metal layer.
9. The method for fabricating a near-field optical fiber probe according to claim 7, wherein the step of forming the hole extending to the core by performing the femtosecond laser on the metal layer comprises:
adjusting the femtosecond laser to the included angle of the femtosecond laser and the conical optical fiber head to be less than 90 degrees;
firing the metal layer by using the femtosecond laser to form a hole penetrating through the metal on the metal layer;
and burning the optical fiber head by using the femtosecond laser so that the hole extends to the fiber core of the optical fiber head.
10. The method for fabricating a near-field optical fiber probe according to claim 9, further comprising:
and a light guide groove is formed on a path from the hole on the metal layer to the tip end of the optical fiber head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010287748.XA CN111398637A (en) | 2020-04-13 | 2020-04-13 | Optical fiber probe of near-field optics and preparation method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010287748.XA CN111398637A (en) | 2020-04-13 | 2020-04-13 | Optical fiber probe of near-field optics and preparation method |
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| Publication Number | Publication Date |
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| CN111398637A true CN111398637A (en) | 2020-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010287748.XA Withdrawn CN111398637A (en) | 2020-04-13 | 2020-04-13 | Optical fiber probe of near-field optics and preparation method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111825056A (en) * | 2020-07-17 | 2020-10-27 | 杭州电子科技大学 | Method for forming cantilever probe based on femtosecond laser and high temperature and cantilever probe |
-
2020
- 2020-04-13 CN CN202010287748.XA patent/CN111398637A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111825056A (en) * | 2020-07-17 | 2020-10-27 | 杭州电子科技大学 | Method for forming cantilever probe based on femtosecond laser and high temperature and cantilever probe |
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Application publication date: 20200710 |
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