CN111398636A - Ultrahigh vacuum multifunctional sample transfer device and method - Google Patents
Ultrahigh vacuum multifunctional sample transfer device and method Download PDFInfo
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- CN111398636A CN111398636A CN202010224826.1A CN202010224826A CN111398636A CN 111398636 A CN111398636 A CN 111398636A CN 202010224826 A CN202010224826 A CN 202010224826A CN 111398636 A CN111398636 A CN 111398636A
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- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
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- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The invention discloses an ultrahigh vacuum multifunctional sample transfer device and a transfer method, wherein the device comprises a main cavity of a T-shaped pipe structure, a sample storage magnetic rod is communicated above the main cavity, a hand valve is communicated on the front wall of the main cavity, a sample transmission magnetic rod and an air suction pump are communicated on the rear wall of the main cavity, and observation windows are arranged on the left side wall and the right side wall of the main cavity; the wafer sample storage cavity is in butt joint with the hand valve, the wafer sample storage cavity is communicated with a gate valve, and the side wall of the wafer sample storage cavity is provided with an observation window; the magnetic rod is communicated with a sample support sampling head and a wafer sampling head; the sample storage magnetic rod is connected with a sample storage rack, and a wafer sample storage rack is arranged in the inner cavity of the wafer sample storage cavity; the sample transfer device is characterized in that the sample transfer device is sequentially communicated with target ultrahigh vacuum equipment through a hand valve and a gate valve respectively, a target sample is clamped through a sampling head in a sample transfer magnetic rod, and the target sample is transferred to a main cavity and a wafer sample storage cavity in a vacuum environment. On the premise of ensuring that the ultrahigh vacuum standard is achieved, the rapid transfer and storage functions of the wafer and the standard flag-shaped sample holder in the laboratory are integrated by using one cavity.
Description
Technical Field
The invention belongs to the technical field of ultrahigh vacuum equipment, and particularly relates to a multifunctional sample transfer device and a transfer method between ultrahigh vacuum coating equipment.
Background
The ultra-high vacuum equipment system consists of a vacuum pump, a vacuum gauge, a vacuum cavity and elements with various functions, thereby ensuring that a certain process, a physical process or a detection technology is in an ultra-high vacuum environment (the pressure is less than 10)-8Pa), and is widely applied in laboratories and enterprises in various research fields of machinery, semiconductor processing, physics, chemistry, biology and the like. Generally, in order to shorten the working time and improve the working efficiency, for the material with higher precision requirement, further characterization, test and processing are required in the environment without destroying the ultrahigh vacuum so as to ensure the stable properties of the sample.
In the laboratory, one conventional method is to take the sample out of one ultrahigh vacuum system, transfer the sample to another ultrahigh vacuum system, and heat-anneal the sample after bombarding surface atoms with argon ions. However, this method is cumbersome and has certain limitations for application to samples. Another solution is to perform vacuum interconnection among various ultra-high vacuum devices, and integrate the devices into an ultra-high vacuum system. However, the method is high in cost and has great technical difficulty, ultrahigh vacuum characterization equipment such as a Scanning Tunneling Microscope (STM) and an angle-resolved photoelectron spectroscopy (ARPES) is sensitive to the measurement environment, and vibration noise generated by the operation of other equipment influences the experiment.
In the enterprise production, the semiconductor manufacturer usually uses the wafer box and the gas transmission device to carry the wafers in the various processes. However, the existing wafer box has unreasonable structural design and poor ultimate vacuum degree, and particles always appear on the back of the wafer, which affects the yield of the wafer.
Disclosure of Invention
In order to solve the above-mentioned defects in the prior art, the present invention aims to provide an ultrahigh vacuum multifunctional sample transfer device and a transfer method. On the premise of ensuring that the ultrahigh vacuum standard is achieved, a cavity is integrated with the functions of quickly transferring and storing a 4-inch wafer (about 100mm) and a standard flag-shaped sample holder (20mm) in a laboratory, so that the sample is always in the ultrahigh vacuum environment in the transferring process.
The invention is realized by the following technical scheme.
The invention provides an ultrahigh vacuum multifunctional sample transfer device, which comprises a main cavity of a T-shaped pipe structure supported by a bracket, wherein a sample transmission magnetic rod is communicated above the main cavity, a hand valve is communicated on the front wall of the main cavity, the sample transmission magnetic rod and an air suction pump are communicated on the rear wall of the main cavity, and glass observation windows are arranged on the left side wall and the right side wall of the main cavity;
the wafer sample storage cavity is supported by the bracket and is in butt joint with the hand valve, the wafer sample storage cavity is communicated with the gate valve, and the side wall of the wafer sample storage cavity is provided with a glass observation window;
the sample transmission magnetic rod is communicated with a sample support sampling head and a wafer sampling head which extend into the main cavity; the sample transmission magnetic rod is connected with a sample storage rack extending into the main cavity;
a wafer sample storage rack is arranged in the inner cavity of the wafer sample storage cavity;
the sample transfer device is communicated with target ultrahigh vacuum equipment through a hand valve and a gate valve respectively, a target sample is clamped through a sampling head in a sample transfer magnetic rod, and the target sample is transferred to a main cavity and a wafer sample storage cavity in a vacuum environment.
With respect to the above technical solutions, the present invention has a further preferable solution:
preferably, one end of the sample transmission magnetic rod is communicated with the main cavity body, and the other end of the sample transmission magnetic rod is erected on the fixing support; the sample support sampling head and the wafer sampling head are respectively communicated with the end part of the sample transmission magnetic rod from top to bottom.
Preferably, the sample storage rack is provided with five layers for placing the flag-shaped sample support deposited with the sample, and the flag-shaped sample support handle is butted with the sample support sampling head.
Preferably, the wafer sample storage rack is placed in the inner cavity of the wafer sample storage cavity, a wafer sample table is arranged on the wafer sample storage rack, and the wafer sample is deposited on the wafer sample table.
Preferably, the sample holder sampling head and the wafer sampling head are respectively provided with a clamping handle for clamping the flag-shaped sample holder and the wafer sample stage.
Preferably, the wafer sampling head clamping handle is provided with a limiting groove for clamping a wafer sample table.
Correspondingly, the invention also provides an ultrahigh vacuum multifunctional sample transfer method, which comprises the following steps:
A. transfer and storage for flag sample holders:
a1) the hand valve is communicated with the vacuumizing device, so that the main cavity reaches an ultrahigh vacuum level, and the suction pump is started to work;
a2) the sampling support connected with the fixed support is removed, and a hand valve of a main cavity of the T-shaped pipe structure supported by the fixed support is hermetically connected with ultrahigh vacuum equipment in a laboratory;
a3) lifting the sample storage magnetic rod, and lifting the sample storage rack above the sample transmission magnetic rod;
a4) pushing a sample support sampling head of the sample transmission magnetic force rod to extend into the laboratory ultrahigh vacuum equipment, clamping a flag-shaped sample support deposited with a target sample, and retracting the sample support sampling head to the initial position of the sample transmission magnetic force rod; descending the sample storage magnetic rod, and placing the clamped flag-shaped sample support on the sample storage rack by the sample support sampling head;
a5) by analogy, after clamping of the flag-shaped sample holders of all target samples is completed, closing the hand valve, disconnecting the hand valve from the laboratory ultrahigh vacuum equipment, and entering the next step;
B. transferring and storing a wafer sample table:
b1) the hand valve is communicated with the vacuumizing device, so that the main cavity and the wafer sample storage cavity reach the ultrahigh vacuum level, and the suction pump is started to work;
b2) connecting the sampling support with the fixed support, communicating the hand valve with the wafer sample storage cavity, and hermetically connecting the gate valve with ultrahigh vacuum equipment for enterprise production;
b3) pushing a wafer sampling head of the sample transmission magnetic rod to extend into the ultrahigh vacuum equipment for enterprise production, clamping a wafer sample table deposited with a wafer sample, retracting the wafer sampling head into a wafer sample storage cavity, and placing the clamped wafer sample table on a wafer sample storage rack by the wafer sampling head;
b3) by analogy, after clamping of the wafer sample tables of all target samples is completed, the gate valve is closed, the gate valve is separated from the enterprise production ultrahigh vacuum equipment, and the flag-shaped sample support and the wafer sample tables are transferred and stored.
Preferably, vacuum maintenance at 10 is achieved by a getter pump-8Of the order of Pa.
Due to the adoption of the technical scheme, the invention has the following beneficial effects:
1. the invention transfers and stores the flag-shaped sample holder and the wafer sample stage: the hand valve is used for communicating the main cavity body to be connected with laboratory ultrahigh vacuum equipment and is connected with enterprise production ultrahigh vacuum equipment through a gate valve, so that transfer of ultrahigh vacuum multifunctional samples is realized.
2. The invention adopts the vacuum cavity and the air suction pump, ensures that the sample is always in an ultrahigh vacuum environment in the transferring process, and avoids the sample from being polluted and the ultrahigh vacuum equipment from being interfered.
3. The glass observation window, the fixing support and the air suction pump are adopted, the structure is simple, the assembly and disassembly are simple, convenience is brought to an operator, and the practicability of the glass observation window is greatly improved.
4. The invention adopts the detachable wafer sample storage cavity and the gate valve, is compatible with the functions of quickly transferring and storing the small flag-shaped sample holder and the larger wafer, and has high utilization rate of each part.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention:
FIG. 1 is an overall perspective view of the ultra-high vacuum multi-functional sample transfer device of the present invention;
FIG. 2 is a partial cross-sectional view of a flag-shaped sample holder being transferred by the ultra-high vacuum multi-functional sample transfer device of the present invention;
FIG. 3 is a partial perspective view of a flag-shaped sample holder transferred by the ultra-high vacuum multifunctional sample transfer device of the present invention;
fig. 4 is a partial cross-sectional view of an ultra-high vacuum multi-functional sample transfer device of the present invention transferring a wafer.
Reference numerals:
1-hand valve; 2-storing the sample magnetic rod; 3-a first viewing window; 4-a main cavity; 5, a sample transmission magnetic rod; 6, fixing a bracket; 7-a getter pump; 8-a second viewing window; 9-wafer sample storage chamber; 10-a sampling support; 11-a third viewing window; 12-a gate valve; 21-a sample storage rack; 22-flag shaped sample holder; 23-the sample holds the sampling head; 24-a wafer sampling head; 41-wafer sample storage rack; 42-wafer sample stage; 44-limiting groove.
Detailed Description
The present invention will now be described in detail with reference to the drawings and specific embodiments, wherein the exemplary embodiments and descriptions of the present invention are provided to explain the present invention without limiting the invention thereto.
Referring to fig. 1, the ultra-high vacuum multifunctional sample transfer device comprises a main cavity 4, a wafer sample storage cavity 9, a sample transmission magnetic rod 5, a sample storage magnetic rod 2, a suction pump 7, glass observation windows 3, 8 and 11, a hand valve 1, a gate valve 12, a fixed support 6 and a sampling support 10.
The fixed bolster 6 supports the main cavity 4 that has T venturi tube structure, and 4 top intercommunications in the main cavity have a kind magnetic force pole 2 of depositing, and the antetheca intercommunication has hand valve 1, and the back wall intercommunication has biography kind magnetic force pole 5 and aspirator pump 7, controls the lateral wall and is equipped with first observation window 3 and second observation window 8. The sampling support 10 supports a wafer sample storage cavity 9 butted with the hand valve 1, the wafer sample storage cavity 9 is communicated with a gate valve 12, and the side wall of the wafer sample storage cavity 9 is provided with a third observation window 11.
One end of the sample transmission magnetic rod 5 is communicated with the main cavity 4, and the other end is erected on the fixed bracket 6; pass a appearance magnetic force pole 5 intercommunication and have the sample that stretches into in the main cavity 4 to hold in the palm sampling head 23 and wafer sampling head 24, the sample holds in the palm sampling head 23 and wafer sampling head 24 and communicates from top to bottom respectively at the 5 tip of magnetic force pole, and the sample holds in the palm the clamping handle that is equipped with centre gripping flag shape sample holder 22 and wafer sample platform 42 on sampling head 23 and the wafer sampling head 24 respectively, is equipped with the spacing groove 44 that is used for centre gripping wafer sample platform 42 on the wafer sampling head 24 centre gripping handle. The sample storage magnetic rod 2 is connected with a sample storage rack 21 extending into the main cavity 4, in one embodiment, the sample storage rack 21 is provided with five layers for placing a flag-shaped sample holder 22 deposited with a sample, and a holder handle of the flag-shaped sample holder 22 is butted with a sample holder sampling head 23. The inner cavity of the wafer sample storage cavity 9 is provided with a wafer sample storage rack 41, a wafer sample table 42 is arranged on the wafer sample storage rack 41, and a wafer sample is deposited on the wafer sample table 42.
Referring to fig. 2, the ultra-high vacuum multifunctional sample transfer device of the present invention transfers a partial cross-sectional view of a flag-shaped sample holder. In the main cavity 4, the lower end of the sample storage magnetic rod 2 is connected with a sample storage rack 21. About 60mm of sample storage rack 21 height adopts multilayer structure, can deposit 5 flag shape sample simultaneously and hold in the palm 22, realizes the simultaneous transfer of a plurality of samples, improves work efficiency. The sample storage rack 21 is driven by the magnetic force of the sample storage magnetic rod 2 to lift and rotate. The sample transmission magnetic rod 5 is provided with two types of sample support sampling heads 23 and wafer sampling heads 24 which respectively correspond to two application conditions of the ultrahigh vacuum multifunctional sample transfer device.
The flag-shaped sample holder 22 is transferred and stored through the hand valve 1, the sample storage magnetic rod 2, the sample transmission magnetic rod 5 and the sample storage rack 21. The wafer sample stage is transferred and stored through the gate valve 12, the wafer sample storage cavity 9, the wafer sample storage rack 41 and the sample transmission magnetic rod 5. Vacuum degree is maintained at 10 by the getter pump 7-8Of the order of Pa. The first glass observation window 3, the second glass observation window 8 and the third glass observation window 11 are used for realizing the real-time observation of the sample transfer process, and the smooth proceeding of the transfer process is ensured.
In the invention, a main pipe and a branch pipe of a main cavity 4 of the T-shaped pipe structure are communicated cylindrical cavities, and are formed by welding vacuum pipelines, the main pipe is vertically arranged, and the main cavity 4 is provided with 7 vacuum sealing flanges which can be hermetically connected with other devices. In one embodiment, the main chamber may be defined by a flange with a diameter of about 70mm, a length of about 260mm, and a weight of about 2.4kg using CF35, and there are 7 vacuum sealing flanges capable of metal sealing connection with other devices. The main cavity 4 is installed in the top of fixed bolster 6, and fixed bolster 6 still is equipped with portable handle for this device can conveniently carry, docks with other equipment.
In the invention, the main body of the wafer sample storage cavity 9 is a square cavity body, is formed by welding stainless steel plates, and is provided with 3 vacuum sealing flanges capable of being in sealing connection with other devices.
The sample transferring and storing function is realized by the hand valve 1, the sample storing magnetic rod 2 (the driving distance is 100mm) and the sample transmitting magnetic rod 5 (the driving distance is 500mm), the sample transmitting magnetic rod 5 can swing at a small angle and is mainly used for transferring a processed sample into the main cavity 4 (the wafer sample storing cavity 9) or transferring the sample from the main cavity 4 (the wafer sample storing cavity 9) to an external ultrahigh vacuum device for further processing.
The wafer transfer and storage functions of the invention are realized by a gate valve 12, a wafer sample storage cavity 9 and a sample transmission magnetic rod 5, wherein in one embodiment, the opening size of the gate valve 12 is 51mm × 160mm, the wafer sample storage cavity 9 is a square cavity and is formed by welding stainless steel plates, the size is 200mm × 200mm, the height is 100mm, and 3 vacuum sealing flanges capable of being in metal sealing connection with other devices are arranged in total, the wafer sample storage cavity 9 and the gate valve 12 are arranged above a sampling support 10, and the sampling support 10 is in bolted connection with a fixed support 6.
The ultra-high vacuum condition of the invention is realized by the getter pump 7, so that the vacuum degree is maintained at 10-8Pa magnitude, the main component of the air suction pump 7 is zirconium vanadium iron alloy, the air suction pump can work in a vacuum environment for a long time, and meanwhile, power supply is not needed, so that the portability of the air suction pump is greatly improved.
The combination of the first glass observation window 3, the second glass observation window 8 and the third glass observation window 11 realizes the real-time observation of the sample transfer process of the invention. The first glass observation window 3 and the second glass observation window 8 are arranged on the side wall of the main cavity 4, and the third glass observation window 11 is arranged on the side wall of the wafer sample storage cavity 9, so that an operator can observe from different angles, and the smooth proceeding of the transfer process of the flag-shaped sample holder and the wafer is ensured.
The components ensure the core function of fast transferring and storing a larger wafer and a smaller flag-shaped sample holder under the condition of ultrahigh vacuum.
The following describes in detail the specific operation flow of the ultra-high vacuum multifunctional sample transfer device for transferring the flag-shaped sample holder and the wafer according to the present invention with reference to fig. 2, fig. 3 and fig. 4.
Referring to fig. 3 and 4, schematic diagrams of a flag-shaped sample holder and a wafer sample stage transferred by the ultra-high vacuum multifunctional sample transfer device are shown, and the method comprises the steps of flag-shaped sample holder transfer and storage and wafer sample stage transfer and storage.
As shown in fig. 2 and 3, the transfer and storage process for the flag-shaped sample holder is as follows:
a1) the hand valve 1 is communicated with a vacuum extractor to enable the main cavity 4 to reach 10-5Pa ultrahigh vacuum level, starting the air suction pump 7 to work; followed by further degassing with a baking device (not shown). When the pressure in the main chamber 4 reaches 10-8When Pa, the baking is finished, the vacuumizing device is closed, and the main cavity 4 is maintained in an ultrahigh vacuum environment by the air suction pump 7.
a2) The sampling support 10 connected with the fixed support 6 is removed, the hand valve 1 of the main cavity 4 of the T-shaped pipe structure supported by the fixed support 6 is aligned to a vacuum flange on the laboratory ultrahigh vacuum equipment for sealing connection, and the main cavity 4 is communicated with the laboratory ultrahigh vacuum equipment cavity.
a3) Controlling the sample storage magnetic rod 2 to rise, so that the sample storage rack 21 rises above the magnetic rod 5; the sample storage rack 21 is prevented from blocking the stroke of the sample transmission magnetic rod 5; the sample transfer magnetic rod 5 is then pushed through the hand valve 1 into the target cavity.
a4) The sample holder and sampling head 23 of the sample transmission magnetic rod 5 is pushed to extend into the laboratory ultrahigh vacuum equipment, and the flag-shaped sample holder 22 deposited with the target sample is clamped.
When the flag-shaped sample holder 22 is stored, the sample transfer magnetic rod 5 for clamping the sample is firstly retracted to the side wall of the main cavity 4, the first glass observation window 3 and the second glass observation window 8 are used for assisting observation, the sample storage rack 21 is controlled to descend to the same horizontal plane with the flag-shaped sample holder 22, and the flag-shaped sample holder 22 is placed into the sample storage rack 21 by means of the sample transfer magnetic rod 5. Finally, the sample storage rack 21 is controlled to ascend, and the sample transmission magnetic rod 5 can clamp other samples again.
a5) By analogy, after clamping of the flag-shaped sample holders 22 of all target samples is completed, the hand valve 1 is closed, the hand valve 1 is separated from the laboratory ultrahigh vacuum equipment, and the next step is carried out.
In one embodiment, if there are a plurality of laboratory ultra high vacuum apparatuses, after the above steps are completed, the process returns to step a2), the hand valve 1 is aligned with the vacuum flange on the laboratory ultra high vacuum apparatus 2 to be connected in a sealing manner, the main cavity 4 and the cavity of the laboratory ultra high vacuum apparatus 2 are communicated, and the steps a3) -a5) are repeated until all n flag-shaped sample holders of the laboratory ultra high vacuum apparatuses are transferred and stored.
Referring to fig. 4, which is a partial cross-sectional view of a wafer transferred by the ultra-high vacuum multifunctional sample transfer device of the present invention, the steps of transferring and storing the wafer sample stage are as follows:
b1) the hand valve 1 is communicated with a vacuumizing device, so that the main cavity 4 and the wafer sample storage cavity 9 both reach an ultrahigh vacuum level, and the air suction pump 7 is started to work; followed by further degassing with a baking device. When the pressure in the main chamber 4 reaches 10-8When Pa is needed, baking is finished, the vacuumizing device is closed, and the main cavity 4, the wafer sample storage cavity 9 and the ultrahigh vacuum equipment for enterprise production are maintained by the air suction pump 7 at 10-5And (5) Pa ultrahigh vacuum environment.
b2) The sampling support 10 is connected with the fixed support 6, the hand valve 1 is communicated with the wafer sample storage cavity 9, the gate valve 12 is aligned to a vacuum flange on the ultrahigh vacuum equipment for enterprise production to be in sealing connection, and the main cavity 4 is communicated with the ultrahigh vacuum equipment cavity for enterprise production.
b3) Keeping the hand valve 1 open, pushing the wafer sampling head 24 of the sample transmission magnetic rod 5 to extend into the ultrahigh vacuum equipment for enterprise production, clamping the wafer sample table 42 deposited with the wafer sample, retracting the wafer sampling head 24 into the wafer sample storage cavity 9, transferring the clamped wafer sample table 42 into the wafer sample storage cavity 9 by the wafer sampling head 24, and placing the wafer sample table on the wafer sample storage rack 41; the wafer sample storage rack 41 and the wafer sampling head 24 are provided with limiting grooves, so that the wafer sample table 42 is ensured to be stably transferred, and the wafer sample table 42 is prevented from being shifted. When the wafer sample stage 42 is stored, the wafer sample stage 42 is placed in the wafer sample storage rack 41 through the third glass observation window 11 for auxiliary observation by means of the sample transmission magnetic rod 5.
b3) By analogy, after clamping of the wafer sample stages 42 of all target samples is completed, the gate valve 12 is closed, the gate valve 12 is separated from the enterprise production ultrahigh vacuum equipment, and the flag-shaped sample holder and the wafer sample stages are transferred and stored.
Through the operation, the ultrahigh vacuum multifunctional sample transfer device can quickly transfer and store the flag-shaped sample holder and the wafer in the ultrahigh vacuum environment.
In summary, the invention designs an ultrahigh vacuum multifunctional sample transfer device and a transfer method, which realize multifunctional rapid transfer and storage of wafers and flag-shaped sample holders in an ultrahigh vacuum environment and ensure the cleanness of sample surfaces. Meanwhile, all the ultrahigh vacuum equipment are not mechanically connected, so that mutual interference among the ultrahigh vacuum equipment is effectively avoided, and the ultrahigh vacuum equipment has high use and popularization values.
The present invention is not limited to the above-mentioned embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some technical features without creative efforts according to the disclosed technical contents, and these substitutions and modifications are all within the protection scope of the present invention.
Claims (8)
1. The ultrahigh vacuum multifunctional sample transfer device is characterized by comprising a main cavity (4) of a T-shaped pipe structure supported by a support, wherein a sample storage magnetic rod (2) is communicated above the main cavity (4), the front wall of the main cavity is communicated with a hand valve (1), the rear wall of the main cavity is communicated with a sample transmission magnetic rod (5) and an air suction pump (7), and the left side wall and the right side wall of the main cavity are provided with observation windows;
the wafer sample storage cavity (9) is supported by the support and is in butt joint with the hand valve (1), the wafer sample storage cavity (9) is communicated with a gate valve (12), and an observation window is arranged on the side wall of the wafer sample storage cavity (9);
the magnetic rod (5) is communicated with a sample support sampling head (23) and a wafer sampling head (24) which extend into the main cavity (4); the sample storage magnetic rod (2) is connected with a sample storage rack (21) extending into the main cavity body (4);
a wafer sample storage rack (41) is arranged in the inner cavity of the wafer sample storage cavity (9);
the hand valve (1) and the gate valve (12) are respectively communicated with target ultrahigh vacuum equipment, a target sample is clamped through a sampling head in the sample transmission magnetic rod (5), and the target sample is transferred into the main cavity (4) and the wafer sample storage cavity (9) in an ultrahigh vacuum environment.
2. The ultra-high vacuum multifunctional sample transfer device according to claim 1, wherein one end of the sample transmission magnetic rod (5) is communicated with the main cavity (4), and the other end is erected on the fixed bracket (6); the sample support sampling head (23) and the wafer sampling head (24) are respectively communicated with the end part of the magnetic rod (5) from top to bottom.
3. The ultra-high vacuum multifunctional sample transfer device as claimed in claim 1, wherein the sample storage rack (21) is provided with five layers for placing flag-shaped sample holders (22) deposited with samples, and the holder handles of the flag-shaped sample holders (22) are butted with the sample holder sampling heads (23).
4. The ultra-high vacuum multifunctional sample transfer device as claimed in claim 1, wherein the wafer sample storage rack (41) is placed in the inner cavity of the wafer sample storage chamber (9), a wafer sample stage (42) is arranged on the wafer sample storage rack (41), and the wafer sample is deposited on the wafer sample stage (42).
5. The ultra-high vacuum multifunctional sample transfer device as claimed in claim 1, wherein the sample holder sampling head (23) and the wafer sampling head (24) are respectively provided with a clamping handle for clamping the flag-shaped sample holder (22) and the sample stage (42).
6. The ultra-high vacuum multifunctional sample transfer device as claimed in claim 5, wherein the wafer sampling head (24) is provided with a limiting groove (44) on the holding handle for holding the wafer sample stage (42).
7. The ultra-high vacuum multifunctional sample transfer method of any one of claims 1 to 6, comprising the steps of:
A. transfer and storage for flag sample holders:
a1) the hand valve (1) is communicated with a vacuumizing device, so that the main cavity (4) reaches an ultrahigh vacuum level, and the air suction pump (7) is started to work;
a2) the sampling support (10) connected with the fixed support (6) is removed, and the hand valve (1) of the main cavity body (4) of the T-shaped pipe structure supported by the fixed support (6) is hermetically connected with the ultrahigh vacuum equipment in the laboratory;
a3) the sample storage magnetic rod (2) is lifted, and the sample storage rack (21) is lifted to be above the sample transmission magnetic rod (5);
a4) pushing a sample support and sampling head (23) of the sample transmission magnetic rod (5) to extend into the laboratory ultrahigh vacuum equipment, clamping a flag-shaped sample support (22) deposited with a target sample, and retracting the sample support and sampling head (23) to the initial position of the sample transmission magnetic rod (5); a sample storage magnetic rod (2) descends, and a sample support sampling head (23) places the clamped flag-shaped sample support (22) on a sample storage rack (21);
a5) by parity of reasoning, after clamping of the flag-shaped sample holders (22) of all target samples is completed, the hand valve (1) is closed, the main cavity (4) is separated from the laboratory ultrahigh vacuum equipment, and the next step is carried out;
B. transferring and storing a wafer sample table:
b1) the hand valve (1) is communicated with the vacuumizing device, so that the main cavity (4) and the wafer sample storage cavity (9) reach the ultrahigh vacuum level, and the air suction pump (7) is started to work;
b2) connecting a sampling support (10) with a fixed support (6), communicating a hand valve (1) with a wafer sample storage cavity (9), and hermetically connecting a gate valve (12) with ultrahigh vacuum equipment produced by enterprises;
b3) pushing a wafer sampling head (24) of a sample transmission magnetic rod (5) to extend into the ultrahigh vacuum equipment for enterprise production, clamping a wafer sample table (42) deposited with a wafer sample, retracting the wafer sampling head (24) into a wafer sample storage cavity (9), and placing the clamped wafer sample table (42) on a wafer sample storage rack (41) by the wafer sampling head (24);
b3) by parity of reasoning, after clamping of the wafer sample stages (42) of all target samples is completed, the gate valve (12) is closed, the gate valve (12) is separated from the ultrahigh vacuum equipment for enterprise production, and the flag-shaped sample support and the wafer sample stages are transferred and stored.
8. Ultra-high vacuum multifunctional sample transfer method according to claim 7, characterized in that the vacuum degree is maintained at 10 by the getter pump (7)-8Of the order of Pa.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111912688A (en) * | 2020-08-18 | 2020-11-10 | 费勉仪器科技（上海）有限公司 | Multifunctional in-situ sample processing device under ultrahigh vacuum |
| CN112245814A (en) * | 2020-10-21 | 2021-01-22 | 浙江大学 | Animal sample conveying device for accurate radiotherapy research |
| CN113109376A (en) * | 2021-06-15 | 2021-07-13 | 中国科学院地质与地球物理研究所 | System and method for transferring sample of cryoelectron microscope and electronic equipment |
| CN113291724A (en) * | 2021-05-12 | 2021-08-24 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Electronic sample pass appearance pole of super high vacuum |
| CN113340813A (en) * | 2021-05-12 | 2021-09-03 | 西安交通大学 | Portable ultrahigh vacuum low-temperature observation cavity with micro-area characterization function and operation method |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103348462A (en) * | 2011-01-05 | 2013-10-09 | 伊雷克托科学工业股份有限公司 | Apparatus and method for transferring substrate |
| CN205826675U (en) * | 2016-05-31 | 2016-12-21 | 南京大学 | A kind of ultrahigh vacuum sample memory transfer platform |
| CN108068118A (en) * | 2016-11-14 | 2018-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveyance system applied to vacuum interacted system |
| US10153282B1 (en) * | 2017-08-11 | 2018-12-11 | Lam Research Corporation | Ultra-high vacuum transport and storage |
| CN208432627U (en) * | 2018-07-17 | 2019-01-25 | 苏州华杨赛斯真空设备有限公司 | Portable ultrahigh vacuum sample transfer device |
| CN210084431U (en) * | 2019-05-06 | 2020-02-18 | 中国人民解放军军事科学院国防科技创新研究院 | Portable ultrahigh vacuum sample storage and transfer device |
| WO2020008295A4 (en) * | 2018-06-22 | 2020-02-27 | G-Ray Industries Sa | Covalently bonded semiconductor interfaces |
-
2020
- 2020-03-26 CN CN202010224826.1A patent/CN111398636B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103348462A (en) * | 2011-01-05 | 2013-10-09 | 伊雷克托科学工业股份有限公司 | Apparatus and method for transferring substrate |
| CN205826675U (en) * | 2016-05-31 | 2016-12-21 | 南京大学 | A kind of ultrahigh vacuum sample memory transfer platform |
| CN108068118A (en) * | 2016-11-14 | 2018-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of sample conveyance system applied to vacuum interacted system |
| US10153282B1 (en) * | 2017-08-11 | 2018-12-11 | Lam Research Corporation | Ultra-high vacuum transport and storage |
| WO2020008295A4 (en) * | 2018-06-22 | 2020-02-27 | G-Ray Industries Sa | Covalently bonded semiconductor interfaces |
| CN208432627U (en) * | 2018-07-17 | 2019-01-25 | 苏州华杨赛斯真空设备有限公司 | Portable ultrahigh vacuum sample transfer device |
| CN210084431U (en) * | 2019-05-06 | 2020-02-18 | 中国人民解放军军事科学院国防科技创新研究院 | Portable ultrahigh vacuum sample storage and transfer device |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111912688A (en) * | 2020-08-18 | 2020-11-10 | 费勉仪器科技（上海）有限公司 | Multifunctional in-situ sample processing device under ultrahigh vacuum |
| CN111912688B (en) * | 2020-08-18 | 2023-10-10 | 费勉仪器科技（上海）有限公司 | In-situ multifunctional sample processing device under ultrahigh vacuum |
| CN112245814A (en) * | 2020-10-21 | 2021-01-22 | 浙江大学 | Animal sample conveying device for accurate radiotherapy research |
| CN113291724A (en) * | 2021-05-12 | 2021-08-24 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Electronic sample pass appearance pole of super high vacuum |
| CN113340813A (en) * | 2021-05-12 | 2021-09-03 | 西安交通大学 | Portable ultrahigh vacuum low-temperature observation cavity with micro-area characterization function and operation method |
| CN113109376A (en) * | 2021-06-15 | 2021-07-13 | 中国科学院地质与地球物理研究所 | System and method for transferring sample of cryoelectron microscope and electronic equipment |
| CN113109376B (en) * | 2021-06-15 | 2021-09-24 | 中国科学院地质与地球物理研究所 | System and method for transferring sample of cryoelectron microscope and electronic equipment |
| CN113655241A (en) * | 2021-08-19 | 2021-11-16 | 中国科学院苏州纳米技术与纳米仿生研究所 | Butt joint sample transfer device and optical system |
| CN114171362A (en) * | 2022-02-09 | 2022-03-11 | 之江实验室 | Particle transfer device and application |
| CN114171362B (en) * | 2022-02-09 | 2022-05-24 | 之江实验室 | Particle transfer device and application |
| CN114686817A (en) * | 2022-03-29 | 2022-07-01 | 西安交通大学 | Ultrahigh vacuum in-situ film multi-patterning device and method |
| CN114686817B (en) * | 2022-03-29 | 2022-12-09 | 西安交通大学 | Ultrahigh vacuum in-situ film multi-patterning device and method |
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