CN111379030A

CN111379030A - Novel semiconductor crystal bar arrangement forming die

Info

Publication number: CN111379030A
Application number: CN202010368997.1A
Authority: CN
Inventors: 朱雪玉
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-05-03
Filing date: 2020-05-03
Publication date: 2020-07-07

Abstract

The invention discloses a novel semiconductor crystal bar arrangement forming die, which comprises a base, a die box, a crystal seed, a first stepping motor and a second stepping motor, the upper surface of the base is welded with a mould box, the outer surface of the front end of the mould box is connected with a box door through a hinge, the top end of the mould box is fixed with a protective cover through screws, both sides of the protective cover are fixed with air inlet pipes through screws, the upper surface of the die box is fixed with a fixed seat through screws, the inner side of the fixed seat is provided with a screw sleeve in a penetrating way, the inner side of the screw sleeve is connected with the screw sleeve through a bearing, the inner side of the screw sleeve is provided with a screw rod in a penetrating way, and the bottom cover of lead screw is equipped with permanent magnetism ring, the top cover of silk cover has connect with driven bevel gear, the surface meshing of driven bevel gear has initiative bevel gear, the upper surface of fixing base is fixed with the guide arm, the top cover of lead screw has connect the electromagnetism dish. The invention improves the stability of arrangement and improves the yield of crystal bar forming.

Description

Novel semiconductor crystal bar arrangement forming die

Technical Field

The invention relates to the technical field of semiconductor processing, in particular to a novel semiconductor crystal bar arrangement forming die.

Background

The semiconductor crystal bar is a raw material for manufacturing a silicon wafer, and when the crystal bar is formed, blocky high-purity polycrystalline silicon is required to be placed in a quartz crucible firstly, and is heated to the melting point of 1420 ℃ or higher, so that the crystal bar is completely melted.

After the temperature of the silicon melt slurry is stable, the crystal seeds are slowly inserted into the silicon melt slurry, then the crystal seeds are slowly lifted upwards to reduce the diameter to a certain size, the diameter is maintained and elongated by 100-200mm to eliminate the crystal grain arrangement orientation difference in the crystal seeds, after the neck growth is finished, the lifting speed and the temperature are slowly reduced to gradually increase the diameter of the neck to the required size, the lifting speed and the melting temperature are continuously adjusted to maintain the fixed diameter of the crystal bar until the length of the crystal bar reaches a preset value, the lifting speed is gradually increased and the melting temperature is increased after the length of the crystal bar reaches the preset value to gradually reduce the diameter of the crystal bar so as to avoid the phenomena of row difference, slippage and the like caused by thermal stress, and finally the crystal bar is completely separated from the liquid level. Thus obtaining a complete crystal bar.

The crystal bar arrangement forming die is different from a traditional injection die hydraulic die, the crystal bars manufactured by the crystal bar arrangement forming die are completely arranged and formed through monocrystalline silicon, and the factor influencing the forming effect of the crystal bars is the control of temperature and the stability of a lifting mechanism.

When the conventional ingot arrangement forming die lifts an ingot, slight swinging can be generated, and when the length of the ingot is pulled to the maximum, the swinging amplitude is larger, so that the forming stability is influenced.

Disclosure of Invention

The invention aims to provide a novel semiconductor crystal bar arrangement forming die, which aims to solve the problems that when a crystal bar proposed in the background art is lifted, fine swing is generated, and when the length of the crystal bar is pulled to the maximum, the swing amplitude is larger, and the forming stability is influenced.

In order to achieve the purpose, the invention provides the following technical scheme: a novel semiconductor crystal bar arrangement forming die comprises a base, a die box, a crystal seed, a first stepping motor and a second stepping motor, wherein the upper surface of the base is welded with the die box, the front end outer surface of the die box is connected with a box door through a hinge, the top end of the die box is fixedly provided with a protective cover through screws, two sides of the protective cover are fixedly provided with air inlet pipes through screws, the upper surface of the die box is fixedly provided with a fixed seat through screws, the inner side of the fixed seat is provided with a wire sleeve in a penetrating manner, the inner side of the wire sleeve is connected with the wire sleeve through a bearing, the inner side of the wire sleeve is provided with a lead screw in a penetrating manner, the bottom end of the lead screw is sleeved with a permanent magnet ring, the top end of the wire sleeve is sleeved with a driven umbrella tooth, the outer surface of the driven umbrella tooth is meshed with a driving umbrella tooth, the bottom of lead screw is passed through the screw fixation and is had the seed crystal, the upper surface of mould case is embedded to have the air guide case, the embedded wind gap dish of lower surface of air guide case, the even welding of upper surface of wind gap dish has the fin, the welding has the dish of ventilating on the inner wall of air guide case, the upper surface of dish of ventilating is provided with the air guide cylinder, the bottom of base is provided with mechanical seal mechanism.

Preferably, the front end surface of chamber door has the observation window through the bolt fastening, the chamber door passes through the hinge and becomes the structure that opens and shuts with the mould case, the rear end surface of chamber door is embedded to have the second sealing washer, the seal groove has been seted up to the front end surface of mould case, the inner wall shape of seal groove is identical with the rear end appearance of chamber door, the inboard of seal groove is embedded to have first sealing washer, the quantity of first sealing washer is two sets of, and two sets of first sealing washers are "return" font and arrange, the rear end surface of second sealing washer is contradicted with the inner wall of seal groove.

Preferably, mechanical seal mechanism is including sealed dish, cover storehouse and spring, the lower surface of sealed dish is discoid structure, the top of sealed dish is cylindric structure, the bottom of base is seted up in the cover storehouse, and the top of sealed dish sets up in the inboard in cover storehouse, the upper surface of sealed dish has inlayed the spring, and the other end of spring is embedded on the inner wall in cover storehouse, the extending structure is constituteed with the cover storehouse to sealed dish, elastic construction is constituteed with the spring to sealed dish.

Preferably, the one end of intake pipe pierces through the surface of protection casing, and the other end of intake pipe passes through the inner chamber intercommunication of pipe and gas guide cylinder, the surface of gas guide cylinder is dentate structure, and the surface meshing of gas guide cylinder has the gear, the gear passes through the shaft coupling and is connected fixedly with the output of second step motor, it is fixed that second step motor passes through the upper surface connection of screw with the mould case, the bottom surface of gas guide cylinder is coincide with the inner wall of gas guide case, the gas guide cylinder becomes rotating-structure with the gas guide case group.

Preferably, the screw sleeve forms a rotating structure with the fixed sleeve through a bearing, the inner wall of the screw sleeve is in threaded connection with the outer surface of the screw rod, the screw rod and the screw sleeve form a lifting structure, and the outer surface of the screw rod is attached to the inner wall of the permanent magnet ring.

Preferably, the quantity of guide arm is four groups, four groups the guide arm is annular equidistance and arranges, the electromagnetism dish is disc structure, the surface of electromagnetism dish is run through on the top of guide arm, the surface of guide arm is smooth, elevation structure is constituteed with the electromagnetism dish to the guide arm.

Preferably, the driving bevel gear is fixedly connected with the output end of the first stepping motor through a coupler, the lower surface of the first stepping motor is fixedly connected with the upper surface of the fixing seat through a bolt, and the driving bevel gear and the driven bevel gear form a rotating structure.

Preferably, the outer surface of the tuyere disc is uniformly penetrated and provided with air holes, the inner cavity of the die box is communicated with the inner cavity of the air guide box through the air holes, through holes are uniformly formed in the outer surface of the air guide disc and the lower surface of the air guide cylinder, and the through holes in the air guide disc are the same as the through hole in the air guide cylinder in aperture.

Compared with the prior art, the invention has the beneficial effects that: this novel forming die is arranged to semiconductor crystal bar improves the range stability that the crystal bar promoted, improves the fashioned yield of crystal bar.

Is provided with a fixed sleeve, a screw rod, a guide rod, an electromagnetic disc and a permanent magnetic ring, the electromagnetic disc is fixed at the lower end of the screw rod, the screw rod is connected with the screw sleeve through threads, when the screw sleeve rotates in the fixed sleeve, the screw rod can lift in the screw sleeve, the screw rod drives the crystal bar to lift through the crystal seed, and an electromagnetic disc is fixed at the top end of the screw rod, the guide rod is arranged on the electromagnetic disc in a penetrating way, so that the stability of the screw rod during lifting can be improved, the electromagnetic disc provides positive magnetism for the screw rod, the permanent magnetic ring can release the positive magnetism, because like poles repel each other, the screw rod can be always positioned in the middle of the permanent magnetic ring, the problem that the screw rod slightly swings is solved, and then reach the effect that improves the range stability that the crystal bar promoted, solved the swing and lead to the chaotic problem of crystal bar inner structure, reach the effect that improves the fashioned yield of crystal bar.

Drawings

FIG. 1 is a schematic front view of the structure of the present invention;

FIG. 2 is a schematic partial front view of the structure of the present invention;

FIG. 3 is a schematic cross-sectional elevation view of the structure of the present invention;

FIG. 4 is an enlarged view of the structure at A in FIG. 3 according to the present invention;

FIG. 5 is a schematic cross-sectional side view of the retaining sleeve of FIG. 4 in accordance with the present invention;

FIG. 6 is a schematic top view of the structure of the vent disk of FIG. 4 in accordance with the present invention;

fig. 7 is a schematic structural front sectional view of the mechanical seal mechanism of fig. 3 of the present invention.

In the figure: 1. a base; 2. a mold box; 3. a box door; 4. an observation window; 5. a mechanical seal mechanism; 51. sealing the disc; 52. sleeving a bin; 53. a spring; 6. a protective cover; 7. an air inlet pipe; 8. a sealing groove; 9. a first seal ring; 10. a second seal ring; 11. seed crystals; 12. a fixed seat; 13. fixing the sleeve; 14. sleeving the silk; 15. a screw rod; 16. driven bevel gears; 17. driving bevel gears; 18. a first stepper motor; 19. a guide bar; 20. an electromagnetic disk; 21. a second stepping motor; 22. an air guide box; 23. an air guide cylinder; 24. a gear; 25. a tuyere disc; 26. a fin; 27. a ventilation disc; 28. a permanent magnet ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-7, an embodiment of the present invention is shown: the utility model provides a novel forming die is arranged to semiconductor crystal bar, includes base 1, mould case 2, seed crystal 11, first step motor 18 and second step motor 21, and base 1's last surface welding has the front end surface of 2 mould cases of mould case 2 to have chamber door 3 through hinge connection.

An observation window 4 is fixed on the outer surface of the front end of the box door 3 through a bolt, the box door 3 and the die box 2 form an opening and closing structure through a hinge, a second sealing ring 10 is embedded in the outer surface of the rear end of the box door 3, a sealing groove 8 is formed in the outer surface of the front end of the die box 2, the shape of the inner wall of the sealing groove 8 is matched with the shape of the rear end of the box door 3, first sealing rings 9 are embedded in the inner side of the sealing groove 8, the number of the first sealing rings 9 is two, the two groups of the first sealing rings 9 are arranged in a 'return' shape, the outer surface of the rear end of the second sealing ring 10 is abutted against the inner wall of the sealing groove 8, the box door 3 can be embedded in the sealing groove 8 in a closed state, the second sealing rings 10 can be inserted between the two groups of the first sealing rings 9, the staggered sealing effect is achieved, the closing tightness between the box door 3 and, the inner wall structure of the die box 2 is not required to be damaged by arranging a fixed block on the die box 2.

The top of mould case 2 is passed through the screw fixation and is had protection casing 6, the both sides of protection casing 6 all are passed through the screw fixation and are had intake pipe 7, the upper surface of mould case 2 is passed through the screw fixation and is had fixing base 12, the inboard of fixing base 12 is run through and is provided with silk braid 14, the inboard of silk braid 14 is connected with silk braid 14 through the bearing, the inboard of silk braid 14 is run through and is provided with lead screw 15, and the bottom cover of lead screw 15 is equipped with permanent magnetism ring 28, driven bevel gear 16 has been cup jointed on the top of silk braid 14, driven bevel gear 16's surface meshing has initiative bevel gear 17, the upper surface of fixing base 12 is fixed with guide arm 19, electromagnetic disc 20 has been cup jointed on the top of lead screw 15, the.

The screw sleeve 14 and the fixed sleeve 13 form a rotating structure through a bearing, the inner wall of the screw sleeve 14 is in threaded connection with the outer surface of the screw rod 15, the screw rod 15 and the screw sleeve 14 form a lifting structure, the outer surface of the screw rod 15 is attached to the inner wall of the permanent magnetic ring 28, the permanent magnetic ring 28 is an annular structure made of permanent magnetic materials, and as shown in fig. 4, the screw rod 15 is lifted in the screw sleeve 14, so that the screw rod 15 can drive the seed crystal 11 to lift.

The number of the guide rods 19 is four, the four groups of guide rods 19 are arranged in an annular equidistant manner, the electromagnetic disc 20 is in a disc-shaped structure, the top ends of the guide rods 19 penetrate through the outer surface of the electromagnetic disc 20, the outer surface of the guide rods 19 is smooth, the guide rods 19 and the electromagnetic disc 20 form a lifting structure, the driving bevel gear 17 is fixedly connected with the output end of the first stepping motor 18 through a coupler, the lower surface of the first stepping motor 18 is fixedly connected with the upper surface of the fixed seat 12 through bolts, the driving bevel gear 17 and the driven bevel gear 16 form a rotating structure, the driving bevel gear 17 is driven to rotate through the first stepping motor 18, the driving bevel gear 17 can drive the screw sleeve 14 to rotate, the first stepping motor 18 can control the rotating process through a servo motor driver, the rotating process of the driving bevel gear 17 is controlled more accurately, an electromagnet is arranged at the center of the electromagnetic disc 20, a supporting disc is fixed outside, make lead screw 15 more stable when going up and down, and through the circular telegram work of electromagnetism dish 20, can make lead screw 15 have the effect that trace magnetism made lead screw 15 can produce homopolar repulsion with permanent magnetism ring 28, make lead screw 15 can be placed in the middle all the time, reduce the production of slight swing problem, further improve lead screw 15's lift stability.

The upper surface of the mould box 2 is internally embedded with an air guide box 22, the lower surface of the air guide box 22 is embedded with an air port disc 25, fins 26 are uniformly welded on the upper surface of the air port disc 25, an air ventilation disc 27 is welded on the inner wall of the air guide box 22, an air guide cylinder 23 is arranged on the upper surface of the air ventilation disc 27, and a mechanical sealing mechanism 5 is arranged at the bottom end of the base 1.

The mechanical sealing mechanism 5 comprises a sealing disc 51, a sleeve bin 52 and a spring 53, the lower surface of the sealing disc 51 is of a disc-shaped structure, the top end of the sealing disc 51 is of a cylindrical structure, the sleeve bin 52 is arranged at the bottom end of the base 1, the top end of the sealing disc 51 is arranged on the inner side of the sleeve bin 52, the spring 53 is embedded in the upper surface of the sealing disc 51, the other end of the spring 53 is embedded in the inner wall of the sleeve bin 52, the sealing disc 51 and the sleeve bin 52 form a telescopic structure, the sealing disc 51 and the spring 53 form an elastic structure, because the base 1 is connected with the upper surface of the crucible furnace, although the crucible furnace is subjected to heat preservation treatment, the temperature of the outer surface of the crucible furnace is not high, but because the lower end of the base 1 is arranged on the outer surface of the crucible furnace, through rubber sealing, the high temperature can accelerate rubber aging and, the sealing performance between the base 1 and the crucible furnace is guaranteed.

One end of the air inlet pipe 7 penetrates through the outer surface of the protective cover 6, the other end of the air inlet pipe 7 is communicated with the inner cavity of the air guide cylinder 23 through a guide pipe, the outer surface of the air guide cylinder 23 is in a tooth-shaped structure, a gear 24 is meshed with the outer surface of the air guide cylinder 23, the gear 24 is fixedly connected with the output end of the second stepping motor 21 through a coupler, the second stepping motor 21 is fixedly connected with the upper surface of the mold box 2 through screws, the outer surface of the bottom end of the air guide cylinder 23 is matched with the inner wall of the air guide box 22, the air guide cylinder 23 and the air guide box 22 form a rotating structure, the air inlet pipe 7 is communicated with the inner wall of the air guide cylinder 23 through a pipeline, external cold air can be guided into the air guide cylinder 23 through the air inlet pipe 7, and the air guide.

The outer surface of the air port disc 25 is uniformly penetrated and provided with air holes, the inner cavity of the mold box 2 is communicated with the inner cavity of the air guide box 22 through the air holes, through holes are uniformly formed in the outer surface of the air guide disc 27 and the lower surface of the air guide cylinder 23, the through holes in the air guide disc 27 are the same in aperture as the through holes in the air guide cylinder 23, the air guide cylinder 23 is rotated to drive the through holes in the air guide cylinder 23 to coincide with the through holes in the air guide disc 27, air in the air guide cylinder 23 can enter the air guide box 22 through the through holes, the size of an air circulation channel can be adjusted by adjusting the overlapping area of the through holes, and the temperature sensor in the mold box 2 is matched to adjust the temperature in.

The working principle is as follows: firstly, the bolt base 1 is fixedly connected with the upper surface of the quartz crucible, the top of the quartz crucible is positioned in the inner cavity of the die box 2, then the pressure sensor, the temperature sensor and the monitoring probe on the die box 2 are connected with external monitoring equipment through wires, the novel semiconductor crystal bar arrangement forming die is in a power-on state through an external power supply, and the external cold air supply pipe is connected with the air inlet pipe 7.

Then, firstly, heating the high-purity polysilicon in the quartz crucible to a melting point of more than 1420 ℃ to completely melt the high-purity polysilicon, then supplying power to a first stepping motor 18 to enable the first stepping motor 18 to drive a driving bevel gear 17 to rotate anticlockwise, enabling the driving bevel gear 17 to stir a driven bevel gear 16 to rotate clockwise, enabling the driven bevel gear 16 to drive a clockwise screw sleeve 14 to rotate, enabling internal threads on the inner wall of the screw sleeve 14 to stir a screw rod 15 to descend in the screw sleeve 14, enabling the screw rod 15 to drive a seed crystal 11 to be inserted into the quartz crucible, then reversely controlling the rotation of the first stepping motor 18 to enable the first stepping motor 18 to drive the driven bevel gear 16 to rotate anticlockwise through the driving bevel gear 17, and then enabling the screw rod 15 to slowly lift up, enabling the seed crystal 11 to lift up with a high-purity polysilicon solution, enabling the high-purity polysilicon to be cooled and formed, and when the diameter of the formed high-purity polysilicon is reduced to a certain size, and maintaining the diameter and stretching for 100-200mm to eliminate the difference of the crystal grain arrangement orientation in the crystal seed 11, after the neck growth is completed, slowly reducing the lifting speed and temperature to gradually increase the neck diameter to the required size, continuously adjusting the lifting speed and melting temperature during the process, maintaining the fixed diameter of the crystal rod until the length of the crystal rod reaches a preset value, gradually increasing the lifting speed and increasing the melting temperature after the length of the crystal rod reaches the preset value to gradually reduce the diameter of the crystal rod so as to avoid row difference, slippage and the like caused by thermal stress, and finally completely separating the crystal rod from the liquid level, thus obtaining a complete crystal rod.

Only need open the electromagnetic lock of chamber door 3 after that, make chamber door 3 open from base 1, the fixed crystal bar of rethread outside anchor clamps centre gripping, the neck that rethread pliers cut short the crystal bar can take out the crystal bar.

Through being fixed with the electromagnetic disc 20 on the top of lead screw 15 to run through being provided with guide arm 19 on the electromagnetic disc 20, can improve the stability of lead screw 15 when going up and down, and provide positive magnetism for lead screw 15 through the electromagnetic disc 20, permanent magnetism ring 28 also can release positive magnetism, because homopolar repulsion, make lead screw 15 can be in the intermediate position of permanent magnetism ring 28 all the time, has solved lead screw 15 and has produced slight wobbling problem, improves the range stability that the crystal bar promoted.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a novel forming die is arranged to semiconductor crystal bar, includes base (1), mould case (2), seed crystal (11), first step motor (18) and second step motor (21), its characterized in that: the die comprises a base (1), wherein the upper surface of the base is welded with a die box (2), the front end outer surface of the die box (2) is connected with a box door (3) through a hinge, the top end of the die box (2) is fixed with a protective cover (6) through screws, both sides of the protective cover (6) are both fixed with air inlet pipes (7) through screws, the upper surface of the die box (2) is fixed with a fixed seat (12) through screws, the inner side of the fixed seat (12) is provided with a wire sleeve (14) in a penetrating manner, the inner side of the wire sleeve (14) is connected with the wire sleeve (14) through a bearing, the inner side of the wire sleeve (14) is provided with a lead screw (15) in a penetrating manner, the bottom end of the lead screw (15) is sleeved with a permanent magnetic ring (28), the top end of the wire sleeve (14) is sleeved with a driven umbrella tooth (16), the outer surface of the driven umbrella tooth (, the top of lead screw (15) has cup jointed electromagnetism dish (20), the bottom of lead screw (15) has seed crystal (11) through the screw fixation, mould case (2) have air guide box (22) in the upper surface is embedded, air guide box (22)'s the lower surface is embedded to have tuyere dish (25), the even welding of upper surface of tuyere dish (25) has fin (26), the welding has ventilative dish (27) on the inner wall of air guide box (22), the upper surface of ventilative dish (27) is provided with air guide tube (23), the bottom of base (1) is provided with mechanical seal mechanism (5).

2. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: the utility model discloses a refrigerator door, including chamber door (3), front end surface of chamber door (3) has observation window (4) through the bolt fastening, the structure that opens and shuts is constituteed through hinge and mould case (2) in chamber door (3), the rear end surface of chamber door (3) is embedded to have second sealing washer (10), seal groove (8) have been seted up to the front end surface of mould case (2), the inner wall shape of seal groove (8) is coincide with the rear end appearance of chamber door (3), the inboard of seal groove (8) is embedded to have first sealing washer (9), the quantity of first sealing washer (9) is two sets of, and two sets of first sealing washer (9) are "returning" the font and arrange, the rear end surface of second sealing washer (10) is contradicted with the inner wall of seal groove (8).

3. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: mechanical seal mechanism (5) are including sealed dish (51), cover storehouse (52) and spring (53), the lower surface of sealed dish (51) is discoid structure, the top of sealed dish (51) is cylindric structure, the bottom in base (1) is seted up in cover storehouse (52), and the top of sealed dish (51) sets up in the inboard of cover storehouse (52), the upper surface of sealed dish (51) is embedded to have spring (53), and the other end of spring (53) is embedded on the inner wall of cover storehouse (52), the extending structure is constituteed with cover storehouse (52) to sealed dish (51), elastic structure is constituteed with spring (53) to sealed dish (51).

4. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: the surface of protection casing (6) is penetrated to the one end of intake pipe (7), and the other end of intake pipe (7) passes through the inner chamber intercommunication of pipe and air guide cylinder (23), the outward appearance of air guide cylinder (23) is dentate structure, and the surface meshing of air guide cylinder (23) has gear (24), gear (24) are connected fixedly through the output of shaft coupling and second step motor (21), it is fixed that second step motor (21) pass through the upper surface connection of screw and mould case (2), the bottom surface of air guide cylinder (23) coincide with the inner wall of air guide case (22), rotating-structure is constituteed with air guide case (22) in air guide cylinder (23).

5. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: the screw sleeve (14) forms a rotating structure with the fixed sleeve (13) through a bearing, the inner wall of the screw sleeve (14) is in threaded connection with the outer surface of the screw rod (15), the screw rod (15) and the screw sleeve (14) form a lifting structure, and the outer surface of the screw rod (15) is attached to the inner wall of the permanent magnet ring (28).

6. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: the quantity of guide arm (19) is four groups, four groups guide arm (19) are annular equidistance and arrange, electromagnetism dish (20) are disc structure, the surface of electromagnetism dish (20) is run through on the top of guide arm (19), the surface of guide arm (19) is smooth, guide arm (19) and electromagnetism dish (20) constitute elevation structure.

7. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: the driving bevel gear (17) is fixedly connected with the output end of the first stepping motor (18) through a coupler, the lower surface of the first stepping motor (18) is fixedly connected with the upper surface of the fixing seat (12) through a bolt, and the driving bevel gear (17) and the driven bevel gear (16) form a rotating structure.

8. The novel semiconductor crystal bar arrangement forming die as claimed in claim 1, wherein: the outer surface of the tuyere disc (25) is uniformly penetrated and provided with air holes, the inner cavity of the die box (2) is communicated with the inner cavity of the air guide box (22) through the air holes, through holes are uniformly formed in the outer surface of the air guide disc (27) and the lower surface of the air guide cylinder (23), and the through holes in the air guide disc (27) are the same as the through hole in the air guide cylinder (23).