CN111360588A - Large-caliber plane optical element polishing machine and polishing and precision control method - Google Patents
Large-caliber plane optical element polishing machine and polishing and precision control method Download PDFInfo
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- CN111360588A CN111360588A CN202010178060.8A CN202010178060A CN111360588A CN 111360588 A CN111360588 A CN 111360588A CN 202010178060 A CN202010178060 A CN 202010178060A CN 111360588 A CN111360588 A CN 111360588A
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- polishing
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- optical element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Abstract
The invention discloses a large-caliber plane optical element polishing machine and a polishing and precision control method, which realize the free adjustment of the rotating speed of a workpiece and the position of a correcting plate; the condition that the rotating speed of the workpiece is not uniform, even the workpiece does not rotate or rotate reversely is avoided, and meanwhile, the surface shape precision of the polishing disc is detected through a laser displacement sensor; the piezoelectric micro-displacement driver controls the surface shape distribution of the polishing disk and the control of environmental influence factors, and provides an accurate polishing precision control process and route starting from macroscopic and microscopic physical and chemical factors of the polishing process; the novel controllable high-efficiency polishing technology is introduced by controlling the main influence factors of the polishing process, and has the advantages of more controllable influence factors, capability of actively controlling surface shape precision, high efficiency, high precision and the like compared with the traditional ring polishing technology; as a result, the processing efficiency and precision of the large-caliber plane optical element can be greatly improved, and important preparation can be made for researching a machine tool prototype of a new large-caliber plane polishing technology and a large-caliber polishing technology.
Description
Technical Field
The invention relates to the technical field of optical part processing, in particular to a large-caliber plane optical element polishing machine and a polishing and precision control method.
Background
Polishing is an ancient process, and the understanding of the polishing mechanism is gradually deepened from the initial mechanical grinding theory to the chemical action theory and then to the thermal rheological theory. Due to the development of large lasers, extremely high demands are placed on the quality and efficiency of optical components, wherein large aperture planar components are in great demand. The traditional annular polishing method is adopted, the technological process of the method greatly depends on the experience of operators, the controllability is poor, the processing efficiency is unstable, and the existing annular polishing technology has the defects of numerous influencing factors (polishing pressure, polishing temperature, polishing solution characteristics and the like) and uncontrollable influence factors, so that the development requirements of a large-aperture laser are difficult to meet in the aspects of efficiency and polishing precision; in the existing actual polishing process, a workpiece rotates by means of unbalanced moment generated by friction force between the workpiece and the surface of a polishing disc; because the fit between the workpiece and the surface of the polishing disc is not good, the conditions of uneven rotating speed, even no rotation and reversion are easy to occur; and the work in the aspect of the high-efficiency polishing control theory of the large-aperture optical plane element in China is weak, the development of process technology and equipment is restricted to a great extent, and the method becomes the application bottleneck of the current large-scale optical system.
Disclosure of Invention
The invention aims to overcome the defects and provides a large-caliber plane optical element polishing machine and a polishing and precision control method.
In order to achieve the purpose, the technical solution of the invention is as follows: the utility model provides a heavy-calibre plane optical element burnishing machine, includes the workstation, sets up polishing dish on the workstation and sets up work piece ring and the correcting plate on polishing dish, be equipped with first drive arrangement on the workstation, first drive arrangement is connected with the correcting plate, drives correcting plate lateral shifting, work piece ring top is equipped with second drive arrangement, second drive arrangement drives the intra-annular work piece initiative of work piece and rotates.
Preferably, the first driving device is a one-way cylinder or a linear motor.
Preferably, the second driving device comprises a connecting rod, a servo spindle motor and a sucker, one end of the connecting rod is connected with the workbench, the other end of the connecting rod is connected with the servo spindle motor, and the sucker is arranged at the lower end of the servo spindle motor and is located right above the workpiece ring.
Preferably, the workbench is provided with a displacement sensor, and the displacement sensor is used for measuring the precision of the surface of the polishing disc.
Preferably, the displacement sensor is a laser displacement sensor.
Preferably, the bottom surface of the polishing disc is provided with a plurality of micro-displacement control structures, and the micro-displacement control structures control the surface shape distribution of the polishing disc.
Preferably, the micro-displacement control structure is a piezoelectric micro-displacement driver.
A polishing precision control method for a large-caliber plane optical element comprises the following steps:
an active control step: respectively and actively controlling the workpieces in the correction plate and the workpiece ring independently;
and (3) precision detection: detecting the surface shape precision of the polishing disc through a displacement sensor;
and (3) precision control: controlling the surface shape distribution of the polishing disc through a piezoelectric micro-displacement driver;
and (3) environmental control: a constant-temperature workshop is adopted to stably control the temperature and the humidity of the polishing environment;
and flow control: and the flow of the polishing solution is stably controlled by the liquid flow wave sensor.
Preferably, in the active control step, the correction plate is controlled by a one-way cylinder to move laterally, and the workpiece in the workpiece ring is controlled by a servo spindle motor to rotate actively.
A polishing method of the large-caliber plane optical element polishing machine according to the above, comprising:
a workpiece clamping step: putting a workpiece to be processed into the workpiece ring, and sucking the workpiece by a sucking disc;
and (3) influence factor control step: after the precision control is carried out by adopting the method for controlling the polishing precision of the large-caliber planar optical element, the processing is carried out.
By adopting the technical scheme, the invention has the beneficial effects that: the unidirectional cylinder and the servo spindle motor are adopted to respectively and independently and actively control the workpiece and the correcting plate, so that the rotation speed of the workpiece and the position of the correcting plate can be freely adjusted; the condition that the rotating speed of the workpiece is not uniform, even the workpiece does not rotate or rotate reversely is avoided, and meanwhile, the surface shape precision of the polishing disc is detected through a laser displacement sensor; the piezoelectric micro-displacement driver controls the surface shape distribution of the polishing disk and the control of environmental influence factors, and provides an accurate polishing precision control process and route starting from macroscopic and microscopic physical and chemical factors of the polishing process; the novel controllable high-efficiency polishing technology is introduced by controlling the main influence factors of the polishing process, and has the advantages of more controllable influence factors, capability of actively controlling surface shape precision, high efficiency, high precision and the like compared with the traditional ring polishing technology; as a result, the processing efficiency and precision of the large-caliber plane optical element can be greatly improved, and important preparation can be made for researching a machine tool prototype of a new large-caliber plane polishing technology and a large-caliber polishing technology.
Drawings
FIG. 1 is a schematic view of the construction of the polishing machine of the present invention;
FIG. 2 is a structural distribution diagram of the piezoelectric micro-displacement actuator according to the present invention;
FIG. 3 is a schematic flow chart of a polishing precision control method according to the present invention;
FIG. 4 is a schematic view of the surface profile of the polishing pad of the present invention;
FIG. 5 is a schematic diagram of the precision measurement of the laser displacement sensor according to the present invention;
description of the main reference numerals: the polishing machine comprises a workbench 1, a polishing disk 2, a workpiece ring 3, a correction plate 4, a first driving device 5, a second driving device 6, a connecting rod 61, a servo spindle motor 62, a suction cup 63, a laser displacement sensor 7 and a piezoelectric type micro-displacement driver 8.
Detailed Description
The invention is further described below with reference to the figures and the specific embodiments.
Example 1
As shown in fig. 1 and 3, in the ring polishing, a workpiece is placed in a workpiece ring 3, and under the condition that a polishing disk 2 rotates, the workpiece ring 3 is in a relatively fixed state, and the workpiece in the workpiece ring 3 reciprocates in the workpiece ring 3 due to the limitation of the workpiece ring 3, and generates friction with the polishing disk 2. The polishing treatment is carried out by using friction and polishing liquid, the pressure is applied to the polishing disc by moving the correcting plate 4 so as to avoid the condition that a workpiece has a concave-convex surface, the workpiece rotates by means of unbalanced moment generated by friction force between the workpiece and the surface of the polishing disc 2, and in actual operation, because the workpiece is not well matched with the surface of the polishing disc 2, the conditions of uneven rotating speed, even no rotation and reversal are easy to occur, so that the polishing effect is extremely unfavorable; the polishing can be better processed and controlled in a deterministic way only by actively driving and controlling the movement of the workpiece and the correction plate 4, the correction plate 4 is actively controlled to move transversely through a one-way cylinder, the workpiece in the workpiece ring 3 is sucked and extruded by the sucking disc 63, the workpiece is driven to rotate through the servo spindle motor 62, and the workpiece is actively controlled by adopting an independent driving device for installing the workpiece, so that the rotating speed and the positions of the workpiece and the correction plate 4 are freely adjusted; the condition that the rotating speed of the workpiece is not uniform or even does not rotate or reverse is avoided.
The precision of the surface of the polishing disc 2 is detected by the laser displacement sensor 7, and the online measurement of the surface of the polishing disc 2 can be realized by adopting the laser displacement sensor 7; during measurement, the polishing disc 2 rotates at a certain speed, and the sampling frequency of the laser displacement sensor 7 is set to obtain three-dimensional topography data of the surface of the polishing disc 2; using laser displacement transmissionThe sensor 7 measures the three-dimensional topography of the polishing disc 2 to obtain a surface topography model of the polishing disc 2, as shown in fig. 5, the positive x direction is the left direction along the axis of the polishing disc, the positive y direction is the rotation direction of the circumferential tangent of the surface of the polishing disc, and the sampling data point intervals Δ x and Δ y in the x and y directions are respectively: Δ x ═ Ls/M；Δy＝1000·υs/fk(ii) a Measured by laser displacement sensor (X)i,Yj) The actual height value at the coordinates is defined as f (X)i,Yj)(xi＝iΔx，yjJ Δ y; 1, 2,. M; j ═ 1, 2.., N) where: l issTotal length of data points sampled in x-direction, upsilonsIndicating the rotational speed of the grinding wheel, fkThe sampling frequency is expressed, M and N respectively represent the total number of sampling points in the x direction and the y direction, a, b and c respectively represent real coefficients in a reference plane function of a least square method, wherein z (x, y) is ax and by + c, and ξ (xi，yj) Representing the residual surface function, is the difference between the original data and the reference plane, as shown in ξ (x)i，yj)＝f(xi，yj)－z(xi，yj)＝f(xi，yj)－(axi+byj+ c); since z (x, y) is a reference plane function of the least square method, there are a, b, and c values satisfying the condition of the least square method and expressed by the following formula
The value is minimum;
can be respectively paired
The partial derivatives of a, b and c in (1) are calculated, and the 3 partial derivatives are equal to 0, so as to obtain an equation system:
the values of a, b, and c are obtained by solving the equation, and then the values are substituted into the reference plane function z (x, y) and the residual surface data ξ (x) to obtain the least square methodi，yj) Residual surface data ξ (x)i，yj) A data source used for filtering and calculating three-dimensional morphology parameters; and a corresponding filtering mode is adopted according to the characteristics of different polishing disks 2, so that the surface shape of the polishing disk 2 is actively corrected on line to actively control the surface shape of the workpiece.
As shown in fig. 2, a multi-path distributed micro-displacement control structure is installed on the bottom surface of the polishing disk 2, as shown in fig. 4, the surface shape of the polishing disk 2 can be divided into a plurality of areas, the height of each area is different, and a common piezoelectric micro-displacement driver 8 is adopted to generate micro-displacement on the bottom surface of the polishing disk 2, so that the surface shape distribution of the polishing surface of the polishing disk 2 is influenced, and finally the change of the polishing surface shape of the planar optical element is controlled.
In the whole polishing process, a constant temperature workshop is adopted to stabilize the temperature and humidity of the polishing environment; the constant supply of the polishing solution flow is controlled by adopting the feedback of a liquid flow sensor; the concentration of the supplied polishing solution is automatically controlled to be uniform, the distribution of the polishing powder particles is uniform, and the pH value of the polishing solution is fed back on line.
In conclusion, the unidirectional cylinder and the servo spindle motor 62 are adopted to respectively and actively control the workpiece and the correction plate 4, so that the rotation speed of the workpiece and the position of the correction plate 4 can be freely adjusted; the condition that the rotating speed of the workpiece is not uniform, even the workpiece does not rotate or rotate reversely is avoided, and meanwhile, the surface shape precision of the polishing disc 2 is detected through the laser displacement sensor 7; the piezoelectric micro-displacement driver 8 controls the surface shape distribution of the polishing disk 2 and the control of environmental influence factors, and provides an accurate polishing precision control process and route starting from macroscopic and microscopic physical and chemical factors of the polishing process; the novel controllable high-efficiency polishing technology is introduced by controlling the main influence factors of the polishing process, and has the advantages of more controllable influence factors, capability of actively controlling surface shape precision, high efficiency, high precision and the like compared with the traditional ring polishing technology; as a result, the processing efficiency and precision of the large-caliber plane optical element can be greatly improved, and important preparation can be made for researching a machine tool prototype of a new large-caliber plane polishing technology and a large-caliber polishing technology.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, and all equivalent changes and modifications made in the claims of the present invention should be included in the scope of the present invention.
Claims (10)
1. The large-caliber plane optical element polishing machine comprises a workbench, a polishing disc arranged on the workbench, a workpiece ring and a correction plate, wherein the workpiece ring and the correction plate are arranged on the polishing disc.
2. A large-caliber planar optical element polisher according to claim 1 wherein the first drive means is a one-way cylinder or a linear motor.
3. The large-caliber plane optical element polishing machine according to claim 1, wherein the second driving device comprises a connecting rod, a servo spindle motor and a suction cup, the connecting rod is connected with the worktable at one end and the servo spindle motor at the other end, and the suction cup is arranged at the lower end of the servo spindle motor and is positioned right above the workpiece ring.
4. A large-caliber plane optical element polisher according to claim 1 with displacement sensors on the table to measure the precision of the polished disk surface.
5. A large-caliber planar optical element polishing machine according to claim 4, wherein the displacement sensor is a laser displacement sensor.
6. The large-caliber flat optical element polishing machine according to claim 1, wherein the bottom surface of the polishing disk is provided with a plurality of micro-displacement control structures, and the micro-displacement control structures control the surface profile of the polishing disk.
7. A large-caliber planar optical element polisher according to claim 6 with the micro-displacement control structure being a piezoelectric micro-displacement driver.
8. A polishing precision control method for a large-caliber plane optical element is characterized by comprising the following steps:
an active control step: respectively and actively controlling the workpieces in the correction plate and the workpiece ring independently;
and (3) precision detection: detecting the surface shape precision of the polishing disc through a displacement sensor;
and (3) precision control: controlling the surface shape distribution of the polishing disc through a piezoelectric micro-displacement driver;
and (3) environmental control: a constant-temperature workshop is adopted to stably control the temperature and the humidity of the polishing environment;
and flow control: and the flow of the polishing solution is stably controlled by the liquid flow wave sensor.
9. The method as claimed in claim 8, wherein the step of actively controlling comprises controlling lateral movement of the calibration plate by a unidirectional cylinder, and actively controlling rotation of the workpiece in the workpiece ring by a servo spindle motor.
10. A polishing method of a large-caliber plane optical element polisher according to claim 1 comprising:
a workpiece clamping step: putting a workpiece to be processed into the workpiece ring, and sucking the workpiece by a sucking disc;
and (3) influence factor control step: the method for controlling the polishing precision of a large-caliber planar optical element according to claim 8, wherein the method is used for processing after precision control.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114986325A (en) * | 2022-06-10 | 2022-09-02 | 中国工程物理研究院激光聚变研究中心 | Optical element full-aperture polishing local area constant-temperature processing device and polishing machine |
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|---|---|---|---|---|
| JP2007061975A (en) * | 2005-09-01 | 2007-03-15 | Matsushita Electric Ind Co Ltd | Polishing device and polishing method |
| CN103978430A (en) * | 2014-05-21 | 2014-08-13 | 成都精密光学工程研究中心 | Method for detecting polishing disk surface shape during full-caliber plane polishing |
| CN104191370A (en) * | 2014-09-09 | 2014-12-10 | 成都精密光学工程研究中心 | Correction method and device for surface shape of polishing disk in full-caliber polishing |
| CN104589184A (en) * | 2015-02-11 | 2015-05-06 | 程灏波 | Adaptive annular polishing device for large-aperture non-spherical optical element |
| CN204382014U (en) * | 2014-11-27 | 2015-06-10 | 上海中晶企业发展有限公司 | Independent 3 portal structures of large-scale glass polishing machine |
| CN108844488A (en) * | 2018-06-20 | 2018-11-20 | 中国科学院上海光学精密机械研究所 | Annular polishing pitch panel surface face shape on-line monitoring device and monitoring method |
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2020
- 2020-03-14 CN CN202010178060.8A patent/CN111360588A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007061975A (en) * | 2005-09-01 | 2007-03-15 | Matsushita Electric Ind Co Ltd | Polishing device and polishing method |
| CN103978430A (en) * | 2014-05-21 | 2014-08-13 | 成都精密光学工程研究中心 | Method for detecting polishing disk surface shape during full-caliber plane polishing |
| CN104191370A (en) * | 2014-09-09 | 2014-12-10 | 成都精密光学工程研究中心 | Correction method and device for surface shape of polishing disk in full-caliber polishing |
| CN204382014U (en) * | 2014-11-27 | 2015-06-10 | 上海中晶企业发展有限公司 | Independent 3 portal structures of large-scale glass polishing machine |
| CN104589184A (en) * | 2015-02-11 | 2015-05-06 | 程灏波 | Adaptive annular polishing device for large-aperture non-spherical optical element |
| CN108844488A (en) * | 2018-06-20 | 2018-11-20 | 中国科学院上海光学精密机械研究所 | Annular polishing pitch panel surface face shape on-line monitoring device and monitoring method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114986325A (en) * | 2022-06-10 | 2022-09-02 | 中国工程物理研究院激光聚变研究中心 | Optical element full-aperture polishing local area constant-temperature processing device and polishing machine |
| CN114986325B (en) * | 2022-06-10 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | Optical element full-caliber polishing local area constant temperature processing device and polishing machine |
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