CN111358446A - Medical temperature and chemical sensor structure and preparation method thereof - Google Patents
Medical temperature and chemical sensor structure and preparation method thereof Download PDFInfo
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- CN111358446A CN111358446A CN202010322896.0A CN202010322896A CN111358446A CN 111358446 A CN111358446 A CN 111358446A CN 202010322896 A CN202010322896 A CN 202010322896A CN 111358446 A CN111358446 A CN 111358446A
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- metal film
- temperature
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- metal
- glass substrate
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- 239000000126 substance Substances 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 74
- 239000002184 metal Substances 0.000 claims abstract description 74
- 239000011521 glass Substances 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000002161 passivation Methods 0.000 claims abstract description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 11
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 11
- 239000004642 Polyimide Substances 0.000 claims abstract description 6
- 229910052741 iridium Inorganic materials 0.000 claims abstract description 6
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 6
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 6
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 6
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims abstract description 6
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 6
- 229920001721 polyimide Polymers 0.000 claims abstract description 6
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 6
- 239000010948 rhodium Substances 0.000 claims abstract description 6
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 206010037660 Pyrexia Diseases 0.000 abstract description 3
- 230000036760 body temperature Effects 0.000 abstract description 3
- 239000003814 drug Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/20—Clinical contact thermometers for use with humans or animals
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/01—Measuring temperature of body parts ; Diagnostic temperature sensing, e.g. for malignant or inflamed tissue
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/16—Details of sensor housings or probes; Details of structural supports for sensors
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- Veterinary Medicine (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Heart & Thoracic Surgery (AREA)
- Biomedical Technology (AREA)
- Public Health (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
A medical temperature and chemical sensor structure and its preparation method, temperature sensor and humidity transducer are made up of metal film, glass substrate, passivating layer; the temperature sensor is provided with a metal film outside, the humidity sensor is provided with a metal film outside, the glass substrate is arranged below the temperature sensor and the humidity sensor, and the passivation layer is arranged on the side surface of the metal film. The metal film can be composed of platinum, nickel, iridium, nickel-chromium alloy, Balco and rhodium metal and is finished by a physical vapor deposition method; and the passivation layer is polyimide or a metal oxide layer. The invention has the advantages that: the sensors are arranged on a hospital bed and a wheelchair to monitor the body temperature of a patient and judge whether the patient has fever or not; humidity on the bed is monitored to change the bed sheet or mattress. The temperature and the humidity are integrated, the sensor can measure wirelessly or remotely, the use is more convenient, the preparation method is simple, and the performance is stable.
Description
Technical Field
The invention relates to the field of medical sensors, in particular to a medical temperature and chemical sensor structure and a preparation method thereof
Background
At present, the demand for automation and multifunction of sensors in medicine is stronger. The prior art cannot automatically monitor the body temperature of a patient and judge whether fever occurs; it is impossible to judge or remind in time whether the bed sheet or the mattress needs to be replaced.
Disclosure of Invention
The invention aims to realize automatic monitoring and prompt reminding, and particularly provides a medical temperature and chemical sensor structure and a preparation method thereof.
The invention provides a medical temperature and chemical sensor structure, which is characterized in that: the medical temperature and chemical sensor structure comprises a temperature sensor 1 and a humidity sensor 5; the temperature sensor 1 and the humidity sensor 5 are both composed of a metal film 2, a glass substrate 3 and a passivation layer 4;
wherein: between the metal film 2 and the glass substrate 3, a metal adhesion layer 6 is arranged, the metal film 2 is arranged outside the temperature sensor 1, the metal film 2 is arranged outside the humidity sensor 5, the glass substrate 3 is arranged below the temperature sensor 1 and the humidity sensor 5, and the passivation layer 4 is arranged on the side surface of the metal film 2.
The glass substrate 3 is a glass wafer and provides support for the metal film 2; the glass substrate 3 is of a 1-10-layer structure; the problem of mismatching of thermal expansion coefficients exists between the glass substrate 3 and the metal film 2, and when a glass wafer is selected, the special glass wafer with different oxide proportions can be adopted to achieve a thermal expansion coefficient matching state.
A method of making a medical temperature and chemical sensor structure according to claim 1, wherein: the metal film 2 can be made of platinum, nickel, iridium, nickel-chromium alloy, Balco and rhodium metal and is completed by a physical vapor deposition method; the passivation layer 4 is made of polyimide or a metal oxide layer, and is made of a material sensitive to humidity or water vapor.
The preparation method of the medical temperature and chemical sensor structure is characterized by comprising the following steps: the metal adhesion layer 6 is arranged between the glass and the metal film, and a layer of metal adhesion layer 6 is deposited by a physical vapor deposition method, so that the functions of adjusting the thermal expansion coefficient and increasing the metal adhesion are achieved.
The invention has the advantages that:
according to the medical temperature and chemical sensor structure and the preparation method, the sensors are arranged on hospital beds and wheelchairs to monitor the body temperature of patients and judge whether fever occurs; humidity on the bed is monitored to change the bed sheet or mattress. The sensor device can integrate temperature and humidity, and the measurement of the sensor can be wireless or remote, so that the use is more convenient.
Drawings
The invention is described in further detail below with reference to the following figures and embodiments:
FIG. 1 is a top view of a temperature sensor and a humidity sensor;
FIG. 2 is a cross-sectional view of a temperature sensor and a humidity sensor
Fig. 3 is a sectional view of the temperature sensor and the humidity sensor.
Detailed Description
Example 1
The invention provides a medical temperature and chemical sensor structure, which is characterized in that: the medical temperature and chemical sensor structure comprises a temperature sensor 1 and a humidity sensor 5; the temperature sensor 1 and the humidity sensor 5 are both composed of a metal film 2, a glass substrate 3 and a passivation layer 4;
wherein: between the metal film 2 and the glass substrate 3, a metal adhesion layer 6 is arranged, the metal film 2 is arranged outside the temperature sensor 1, the metal film 2 is arranged outside the humidity sensor 5, the glass substrate 3 is arranged below the temperature sensor 1 and the humidity sensor 5, and the passivation layer 4 is arranged on the side surface of the metal film 2.
The glass substrate 3 is a glass wafer and provides support for the metal film 2; the glass substrate 3 is of a 1-10-layer structure; the problem of mismatching of thermal expansion coefficients exists between the glass substrate 3 and the metal film 2, and when a glass wafer is selected, the special glass wafer with different oxide proportions can be adopted to achieve a thermal expansion coefficient matching state.
A method of making a medical temperature and chemical sensor structure according to claim 1, wherein: the metal film 2 can be made of platinum, nickel, iridium, nickel-chromium alloy, Balco and rhodium metal and is completed by a physical vapor deposition method; the passivation layer 4 is made of polyimide or a metal oxide layer, and is made of a material sensitive to humidity or water vapor.
The preparation method of the medical temperature and chemical sensor structure is characterized by comprising the following steps: the metal adhesion layer 6 is arranged between the glass and the metal film, and a layer of metal adhesion layer 6 is deposited by a physical vapor deposition method, so that the functions of adjusting the thermal expansion coefficient and increasing the metal adhesion are achieved.
Example 2
The invention provides a medical temperature and chemical sensor structure, which is characterized in that: the medical temperature and chemical sensor structure comprises a temperature sensor 1 and a humidity sensor 5; the temperature sensor 1 and the humidity sensor 5 are both composed of a metal film 2, a glass substrate 3 and a passivation layer 4;
wherein: between the metal film 2 and the glass substrate 3, a metal adhesion layer 6 is arranged, the metal film 2 is arranged outside the temperature sensor 1, the metal film 2 is arranged outside the humidity sensor 5, the glass substrate 3 is arranged below the temperature sensor 1 and the humidity sensor 5, and the passivation layer 4 is arranged on the side surface of the metal film 2.
A method of making a medical temperature and chemical sensor structure according to claim 1, wherein: the metal film 2 can be made of platinum, nickel, iridium, nickel-chromium alloy, Balco and rhodium metal and is completed by a physical vapor deposition method; the passivation layer 4 is made of polyimide or a metal oxide layer, and is made of a material sensitive to humidity or water vapor.
The preparation method of the medical temperature and chemical sensor structure is characterized by comprising the following steps: the metal adhesion layer 6 is arranged between the glass and the metal film, and a layer of metal adhesion layer 6 is deposited by a physical vapor deposition method, so that the functions of adjusting the thermal expansion coefficient and increasing the metal adhesion are achieved.
Example 3
The invention provides a medical temperature and chemical sensor structure, which is characterized in that: the medical temperature and chemical sensor structure comprises a temperature sensor 1 and a humidity sensor 5; the temperature sensor 1 and the humidity sensor 5 are both composed of a metal film 2, a glass substrate 3 and a passivation layer 4;
wherein: between the metal film 2 and the glass substrate 3, a metal adhesion layer 6 is arranged, the metal film 2 is arranged outside the temperature sensor 1, the metal film 2 is arranged outside the humidity sensor 5, the glass substrate 3 is arranged below the temperature sensor 1 and the humidity sensor 5, and the passivation layer 4 is arranged on the side surface of the metal film 2.
The glass substrate 3 is a glass wafer and provides support for the metal film 2; the problem of mismatching of thermal expansion coefficients exists between the glass substrate 3 and the metal film 2, and when a glass wafer is selected, the special glass wafer with different oxide proportions can be adopted to achieve a thermal expansion coefficient matching state.
A method of making a medical temperature and chemical sensor structure according to claim 1, wherein: the metal film 2 can be made of platinum, nickel, iridium, nickel-chromium alloy, Balco and rhodium metal and is completed by a physical vapor deposition method; the passivation layer 4 is made of polyimide or a metal oxide layer, and is made of a material sensitive to humidity or water vapor.
The preparation method of the medical temperature and chemical sensor structure is characterized by comprising the following steps: the metal adhesion layer 6 is arranged between the glass and the metal film, and a layer of metal adhesion layer 6 is deposited by a physical vapor deposition method, so that the functions of adjusting the thermal expansion coefficient and increasing the metal adhesion are achieved.
Claims (4)
1. A medical temperature and chemical sensor structure, characterized by: the medical temperature and chemical sensor structure comprises a temperature sensor (1) and a humidity sensor (5); the temperature sensor (1) and the humidity sensor (5) are both composed of a metal film (2), a glass substrate (3) and a passivation layer (4);
wherein: a metal adhesion layer (6) is arranged between the metal film (2) and the glass substrate (3), the metal film (2) is arranged outside the temperature sensor (1), the metal film (2) is arranged outside the humidity sensor (5), the glass substrate (3) is arranged below the temperature sensor (1) and the humidity sensor (5), and the passivation layer (4) is arranged on the side face of the metal film (2).
2. The medical temperature and chemical sensor structure of claim 1, wherein: the glass substrate (3) is a glass wafer and provides support for the metal film (2); the glass substrate (3) is of a 1-10-layer structure; the problem of mismatching of thermal expansion coefficients exists between the glass substrate (3) and the metal film (2), and when a glass wafer is selected, a special glass wafer with different oxide proportions can be adopted to achieve a thermal expansion coefficient matching state.
3. A method of making a medical temperature and chemical sensor structure according to claim 1, wherein: the metal film (2) can be composed of platinum, nickel, iridium, nickel-chromium alloy, Balco and rhodium metal and is completed by a physical vapor deposition method; the passivation layer (4) is made of polyimide or a metal oxide layer and is made of a material sensitive to humidity or water vapor.
4. The method of making a medical temperature and chemical sensor structure according to claim 3, wherein: the metal adhesion layer (6) is arranged between the glass and the metal film, and a layer of metal adhesion layer (6) is deposited by a physical vapor deposition method to play the functions of adjusting the thermal expansion coefficient and increasing the metal adhesion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010322896.0A CN111358446A (en) | 2020-04-22 | 2020-04-22 | Medical temperature and chemical sensor structure and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010322896.0A CN111358446A (en) | 2020-04-22 | 2020-04-22 | Medical temperature and chemical sensor structure and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111358446A true CN111358446A (en) | 2020-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010322896.0A Pending CN111358446A (en) | 2020-04-22 | 2020-04-22 | Medical temperature and chemical sensor structure and preparation method thereof |
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| Country | Link |
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| CN (1) | CN111358446A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112485298A (en) * | 2020-11-06 | 2021-03-12 | 电子科技大学 | Manufacturing method of polyvinylidene fluoride-based flexible humidity sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202918793U (en) * | 2012-11-16 | 2013-05-08 | 云南农业大学 | Shade canopy for reducing diseases of pseudo-ginseng leaves |
| TW201523695A (en) * | 2013-08-09 | 2015-06-16 | Nippon Electric Glass Co | Method for producing substrate for holding wafer, and substrate for holding wafer |
| CN109392259A (en) * | 2017-08-08 | 2019-02-26 | 苹果公司 | Electronic equipment with glassy layer coating |
| CN208667086U (en) * | 2018-08-10 | 2019-03-29 | 青岛歌尔微电子研究院有限公司 | Integrated sensor MEMS chip and electronic equipment |
| CN212489872U (en) * | 2020-04-22 | 2021-02-09 | 罕王微电子（辽宁）有限公司 | Medical temperature and chemical sensor structure |
-
2020
- 2020-04-22 CN CN202010322896.0A patent/CN111358446A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202918793U (en) * | 2012-11-16 | 2013-05-08 | 云南农业大学 | Shade canopy for reducing diseases of pseudo-ginseng leaves |
| TW201523695A (en) * | 2013-08-09 | 2015-06-16 | Nippon Electric Glass Co | Method for producing substrate for holding wafer, and substrate for holding wafer |
| CN109392259A (en) * | 2017-08-08 | 2019-02-26 | 苹果公司 | Electronic equipment with glassy layer coating |
| CN208667086U (en) * | 2018-08-10 | 2019-03-29 | 青岛歌尔微电子研究院有限公司 | Integrated sensor MEMS chip and electronic equipment |
| CN212489872U (en) * | 2020-04-22 | 2021-02-09 | 罕王微电子（辽宁）有限公司 | Medical temperature and chemical sensor structure |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112485298A (en) * | 2020-11-06 | 2021-03-12 | 电子科技大学 | Manufacturing method of polyvinylidene fluoride-based flexible humidity sensor |
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