CN111348431A

CN111348431A - Semi-off-line plasma processing equipment and using method thereof

Info

Publication number: CN111348431A
Application number: CN202010175882.0A
Authority: CN
Inventors: 沈文凯; 檀靓; 刘鑫培; 王红卫
Original assignee: Suzhou De Ruiyuan Plasma Research Institute Co ltd; SUZHOU OPS PLASMA TECHNOLOGY CO LTD
Current assignee: Suzhou De Ruiyuan Plasma Research Institute Co ltd; SUZHOU OPS PLASMA TECHNOLOGY CO LTD
Priority date: 2020-03-13
Filing date: 2020-03-13
Publication date: 2020-06-30
Anticipated expiration: 2040-03-13
Also published as: CN111348431B

Abstract

The invention relates to a semi-off-line plasma processing device and a using method thereof, wherein the processing device comprises a conveyor line rack, a transmission assembly, a vacuum cavity, a motion assembly, a vacuum chuck assembly and a support frame; the conveying assembly is arranged above the conveying line rack and used for conveying the workpiece trays; the power assembly is arranged above the support frame and is used for driving the vacuum sucker assembly to move up, down, left and right; the vacuum chuck assembly is used for grabbing and placing a workpiece tray; the using method is simple to operate, convenient to use and high in applicability; the invention overcomes the defects that the existing plasma processing equipment is mostly of a fixed chassis structure, has poor flexibility and can not adapt to the production line type operation and production of products, realizes the production line plasma processing, simultaneously meets the requirement of the product processing production line equipment modification, improves the plasma processing efficiency and improves the applicability and the flexibility of the equipment.

Description

Semi-off-line plasma processing equipment and using method thereof

Technical Field

The invention relates to the technical field of plasma processing equipment, in particular to semi-off-line plasma processing equipment and a using method thereof.

Background

The plasma is a fourth state of existence of substances, different from solid, liquid and gas, and is called plasma, which is an ionized gaseous substance consisting of positive and negative ions generated after atoms and atomic groups are ionized after part of electrons are deprived.

The plasma technology has very obvious advantages in various fields, and has the advantages of low cost, no waste, no pollution and the like in the aspect of modifying the surface of a material; the sterilization and disinfection has the advantages of high safety, no drug residue, short sterilization time, no environmental pollution and the like; the method has the advantages of low energy consumption, high efficiency, short treatment flow, wide application range and the like in the aspect of treating various pollutants (waste gas and waste water).

The existing production and processing equipment is mostly production line type online processing, if plasma processing is needed to be carried out on products processed by the existing production line, the production line needs to be modified, on one hand, the equipment modification cost is high, and on the other hand, an extra equipment placing field is needed. Aiming at a product processing assembly line, enterprises need more plasma processing equipment capable of flexibly adjusting stations, the existing assembly line is prevented from being transformed, most of the existing plasma processing equipment is of a fixed cabinet structure, the flexibility is poor, and the assembly line type operation production cannot be adapted.

For example, chinese patent CN206225317U discloses a plasma processing apparatus, comprising: a first plasma source; a first planar electrode; a gas distribution device; a plasma blocking screen; and a workpiece chuck. The first plasma source generates first plasma products that exit the first plasma source through a first aperture in the first planar electrode. The first plasma product continues through a second aperture in the gas distribution apparatus. The plasma blocking screen includes a third plate having fourth apertures and faces the gas distribution apparatus such that the first plasma products pass through the plurality of fourth apertures. The workpiece chuck faces a second side of the plasma blocking screen, thereby defining a process chamber between the plasma blocking screen and the workpiece chuck. Chinese patent CN206140648U discloses a plasma processing apparatus, including low temperature plasma electrode base station, low temperature plasma power and organism, the organism is assembled by section bar frame and is constituteed, low temperature plasma electrode base station is installed between belt conveying platform and roll-type conveying platform, belt conveying platform installs and is fixed in section bar frame at the organism front end, roll-type conveying platform installs and is fixed in section bar frame at the organism tail end, micro-sizing device installs on section bar frame, the position is in low temperature plasma electrode base station rear end, in roll-type conveying platform top, still be equipped with cooling blower and be located the organism inside, be located low temperature plasma base station below, still be equipped with collection wind metallic cover and lower collection wind metallic cover outside the organism, still be equipped with power device, be used for driving the motion of drive belt on belt conveying platform and the roll-type conveying platform. The plasma processing apparatus described above is not suitable for the demand of plasma processing of a production line-type processed product, and the flexibility of installation and use of the apparatus is limited.

Therefore, how to provide a semi-offline plasma processing device to realize pipeline plasma processing, and at the same time, satisfy the requirement for product processing pipeline device modification, improve plasma processing efficiency, and improve device applicability and flexibility is a technical problem to be solved urgently by those skilled in the art.

Disclosure of Invention

In view of the above, an object of the present application is to provide a semi-offline plasma processing apparatus and a method for using the same, which can achieve pipeline plasma processing, and at the same time, meet the requirement for modifying product processing pipeline apparatus, improve plasma processing efficiency, and improve apparatus applicability and flexibility.

In order to achieve the above object, the present application provides the following technical solutions.

The first technical scheme is as follows: a semi-off-line plasma processing device comprises a conveyor line rack, a transmission assembly, a vacuum cavity, a motion assembly, a vacuum sucker assembly and a support frame;

the conveying assembly is arranged above the conveying line rack and used for conveying the workpiece trays;

the power assembly is arranged above the supporting frame and used for driving the vacuum sucker assembly to move up, down, left and right.

Preferably, the vacuum chuck assembly comprises a bracket, a horizontal sucker bracket and vacuum suction nozzles, the horizontal sucker bracket is uniformly distributed at the lower end of the bracket at certain intervals, and the vacuum suction nozzles are fixed on the horizontal sucker bracket.

Preferably, the vacuum cavity comprises a cavity body and an upper cover, and the cavity body and the upper cover are fixedly connected through a connecting rod;

an insulating flat plate is arranged at the bottom of the cavity, and a positive plate is arranged above the insulating flat plate; insulating strips are arranged around the cavity.

Preferably, the positive plate is provided with uniformly distributed tray parting beads, and the tray parting beads are used for placing a workpiece tray.

Preferably, the transmission assembly comprises a transmission frame, a transmission belt, a driving shaft, a driven shaft and a transmission motor, a groove is formed in the transmission frame, the driving shaft and the driven shaft are arranged at two ends of the groove respectively, the transmission belt is arranged in the groove, and the transmission motor drives the driving shaft to rotate.

Preferably, the conveyor line frame includes a first conveyor line frame and a second conveyor line frame, which are respectively disposed at both sides of the vacuum chamber;

the transmission assembly comprises a first transmission assembly and a second transmission assembly, and the first transmission assembly and the second transmission assembly correspond to the first transmission line rack and the second transmission line rack respectively.

Preferably, the motion assembly comprises an X-axis power assembly and a Z-axis power assembly, and the X-axis power assembly is used for realizing the left-right movement of the vacuum chuck assembly; and the Z-axis power assembly is used for realizing the up-and-down movement of the vacuum chuck assembly.

Preferably, the X-axis power assembly comprises a first driving motor, an X-axis guide rail frame, an X-axis lead screw and an X-axis lead screw nut, the X-axis lead screw is arranged in the X-axis guide rail frame, and the X-axis lead screw is matched with the X-axis lead screw nut.

Preferably, the Z-axis power assembly comprises a second driving motor, a Z-axis guide rail bracket, a Z-axis lead screw and a Z-axis lead screw nut;

one side of the Z-axis guide rail frame is provided with a first positioning block corresponding to the X-axis guide rail frame, the other side of the Z-axis guide rail frame is provided with a moving frame, the vacuum sucker component is fixed below the moving frame, and one side of the moving frame is provided with a second positioning block corresponding to the Z-axis guide rail frame.

The use method of the semi-off-line plasma processing equipment comprises the following steps: the method comprises the following steps:

s1, starting a transmission motor, and transmitting the workpiece tray on a transmission belt through a first transmission assembly;

s2, opening the vacuum cavity, driving the vacuum chuck assembly to move up and down and left and right by the power assembly, simultaneously sucking the workpiece tray by the vacuum chuck assembly and placing the workpiece tray in the cavity, returning the vacuum chuck assembly, closing the upper cover, and vacuumizing to perform plasma treatment;

s3, after the processing is finished, opening the vacuum cavity, driving the vacuum chuck assembly to move by the power assembly, sucking the workpiece tray in the cavity by the vacuum chuck assembly, placing the workpiece tray on the second transmission assembly for transmission, and entering the next procedure;

s4, repeating the steps S2-S3.

The beneficial technical effects obtained by the invention are as follows:

1) the invention overcomes the defects that the existing plasma processing equipment is mostly of a fixed chassis structure, has poor flexibility and can not adapt to the production of the product in production line type operation, realizes the production line plasma processing, simultaneously meets the requirement of the product processing production line equipment modification, improves the plasma processing efficiency and improves the applicability and the flexibility of the equipment;

2) according to the invention, the first transmission assembly and the second transmission assembly are used for realizing the front and back transmission of the vacuum chamber processing workpiece tray, so that the requirement of plasma processing on products in a production line manner is met, and the improvement of the product processing efficiency is facilitated;

3) according to the invention, the automatic operation of the workpiece tray is realized through the vacuum chuck assembly, so that the labor cost can be reduced, and the processing efficiency is greatly improved;

4) the invention is suitable for reforming the existing assembly line equipment through the simple structure arrangement of the conveyor line rack and the vacuum cavity rack, does not need larger floor area, and has low reforming cost and high equipment installation and use flexibility.

The foregoing description is only an overview of the technical solutions of the present application, so that the technical means of the present application can be more clearly understood and the present application can be implemented according to the content of the description, and in order to make the above and other objects, features and advantages of the present application more clearly understood, the following detailed description is made with reference to the preferred embodiments of the present application and the accompanying drawings.

The above and other objects, advantages and features of the present application will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.

FIG. 1 is a schematic diagram of a semi-offline plasma processing apparatus in one embodiment of the present disclosure;

FIG. 2 is a schematic view of a vacuum chamber according to an embodiment of the present disclosure;

FIG. 3 is a schematic diagram of a transmission assembly according to an embodiment of the present disclosure;

FIG. 4 is a schematic diagram of a kinematic assembly in one embodiment of the present disclosure;

FIG. 5 is a schematic diagram of a vacuum chuck assembly according to an embodiment of the present disclosure.

In the above drawings: 1. a conveyor line frame; 101. a first conveyor line frame; 102. a second conveyor line frame; 2. a transmission assembly; 201. a transmission rack; 202. a transfer belt; 203. a transmission motor; 204. a barrier strip; 3. a vacuum chamber; 301. a cavity; 311. a positive plate; 312. an insulating strip; 313. a tray division bar; 302. an upper cover; 303. a long connecting rod; 304. a short connecting rod; 4. a motion assembly; 401. an X-axis power assembly; 411. a first drive motor; 412. an X-axis guide rail bracket; 413. a first positioning block; 402. a Z-axis power assembly; 421. a second drive motor; 422. a Z-axis guide rail bracket; 423. a movable frame; 424. a second positioning block; 5. a vacuum chuck assembly; 501. a bracket; 502. a sucker transverse bracket; 503. a vacuum nozzle; 6. a support frame; 7. a support leg; 8. a work pallet.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. In the following description, specific details such as specific configurations and components are provided only to help the embodiments of the present application be fully understood. Accordingly, it will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present application. In addition, descriptions of well-known functions and constructions are omitted in the embodiments for clarity and conciseness.

Further, the present application may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.

The term "and/or" herein is merely an association describing an associated object, meaning that three relationships may exist, e.g., a and/or B, may mean: a exists alone, B exists alone, and A and B exist at the same time, and the term "/and" is used herein to describe another association object relationship, which means that two relationships may exist, for example, A/and B, may mean: a alone, and both a and B alone, and further, the character "/" in this document generally means that the former and latter associated objects are in an "or" relationship.

The term "at least one" herein is merely an association relationship describing an associated object, and means that there may be three relationships, for example, at least one of a and B, may mean: a exists alone, A and B exist simultaneously, and B exists alone.

It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion.

Example 1

As shown in fig. 1, a semi-off-line plasma processing apparatus includes a conveyor line frame 1, a conveying assembly 2, a vacuum chamber 3, a moving assembly 4, a vacuum chuck assembly 5 and a support frame 6.

The transmission assembly 2 is arranged above the conveyor line rack 1, and the transmission assembly 2 is used for transmitting the workpiece tray 8.

The power assembly is arranged above the supporting frame 6 and is used for driving the vacuum chuck assembly 5 to move up, down, left and right.

As shown in fig. 2, the vacuum chamber 3 includes a chamber 301 and an upper cover 302, and the chamber 301 and the upper cover 302 are fixedly connected by a connecting rod.

Further, the connecting rod comprises a long connecting rod 303 and a short connecting rod 304, and two ends of the long connecting rod 303 and the short connecting rod 304 are respectively fixed on one side of the cavity 301 and one side of the upper cover 302.

An insulating flat plate is arranged at the bottom of the cavity 301, and a positive plate 311 is arranged above the insulating flat plate; insulating strips 312 are arranged around the cavity 301.

The upper cover 302 is equivalent to a negative electrode, i.e. the bottom of the cavity 301 discharges to the upper cover 302.

Be provided with the observation window on the upper cover 302, conveniently observe the interior processing product of cavity 301.

The positive plate 311 is provided with uniformly distributed tray parting beads 313, and the tray parting beads 313 are used for placing the workpiece tray 8.

The lower end of the vacuum cavity 3 is provided with a vacuum cavity frame, and the bottom of the vacuum cavity frame is provided with a support leg 7.

As shown in fig. 3, the transmission assembly 2 includes a transmission frame 201, a transmission belt 202, a driving shaft, a driven shaft, and a transmission motor 203, the transmission frame 201 is provided with a groove, the driving shaft and the driven shaft are respectively disposed at two ends of the groove, and the transmission belt 202 is disposed in the groove.

The driving shaft and the driven shaft drive the transmission belt 202 to transmit, and the transmission motor 203 drives the driving shaft to rotate.

The drive of transmission motor 203 is fixed on the transfer chain frame 1, and is located the transmission frame 201 below, be provided with first transmission gear on the motor shaft of transmission motor 203, the one end of driving shaft is connected with second drive gear, first transmission gear and second drive gear pass through belt transmission and connect, so that transmission motor 203 drives the driving shaft rotates, and then realizes the transmission of transmission belt 202.

Further, one end of the conveying belt 202 is provided with a stop strip 204, the stop strip 204 is close to the edge of the groove, and the stop strip 204 is used for limiting the conveying position of the workpiece tray 8.

Further, the conveyor line frame 1 comprises a first conveyor line frame 101 and a second conveyor line frame 102, the first conveyor line frame 101 and the second conveyor line frame 102 are respectively arranged on two sides of the vacuum chamber 3, and support legs 7 are arranged at the bottoms of the first conveyor line frame 101 and the second conveyor line frame 102.

Further, the transmission assembly 2 includes a first transmission assembly and a second transmission assembly, the first transmission assembly and the second transmission assembly correspond to the first conveyor line rack 101 and the second conveyor line rack 102, the first transmission assembly is a feeding end of the workpiece tray 8, and the second transmission assembly is a discharging end of the workpiece tray 8.

As shown in fig. 4, the motion assembly 4 comprises an X-axis power assembly 401 and a Z-axis power assembly 402, wherein the X-axis power assembly 401 is used for realizing the left and right movement of the vacuum chuck assembly 5; the Z-axis power assembly 402 is used to achieve up and down movement of the vacuum chuck assembly 5.

X axle power component 401 includes first driving motor 411, X axle guide rail frame 412, X axle lead screw nut, X axle lead screw sets up in X axle guide rail frame 412, first driving motor 411 is connected with X axle lead screw transmission, X axle lead screw and X axle lead screw nut cooperate, realize that X axle lead screw rotation drives X axle lead screw nut and removes about along X axle lead screw.

Z axle power component 402 includes second driving motor 421, Z axle guide rail frame 422, Z axle lead screw nut, Z axle lead screw sets up in the Z axle guide rail frame 422, second driving motor 421 is connected with Z axle lead screw transmission, Z axle lead screw and Z axle lead screw nut cooperate, realize that the rotation of Z axle lead screw drives Z axle lead screw nut and reciprocates along Z axle lead screw.

One side of the Z-axis rail bracket 422 is provided with a first positioning block 413 corresponding to the X-axis rail bracket 412, and the first positioning block 413 is fixedly connected with the X-axis screw nut, so that the first positioning block 413 can move left and right along with the X-axis screw nut.

The other side of Z axle guide rail frame 422 is provided with removes frame 423, remove the frame 423 below and fix vacuum chuck subassembly 5, one side of removing frame 423 is provided with the second locating piece 424 that corresponds with Z axle guide rail frame 422.

The second positioning block 424 is fixedly connected to the Z-axis screw nut, so that the second positioning block 424 can move up and down along the Z-axis screw along with the Z-axis screw nut.

As shown in fig. 5, the vacuum chuck assembly 5 includes a bracket 501, a horizontal chuck bracket 502 and a vacuum suction nozzle 503, the horizontal chuck bracket 502 is uniformly distributed at the lower end of the bracket 501 at a certain interval, and the vacuum suction nozzle 503 is fixed on the horizontal chuck bracket 502 to realize the chuck gripping.

Further, the two ends of the suction cup transverse support 502 are provided with the vacuum suction nozzles 503, and each workpiece tray 8 corresponds to the four vacuum suction nozzles 503, so that the stability of material grabbing by the suction cups is improved.

Example 2

Based on the above embodiment 1, a method for using a semi-offline plasma processing apparatus, comprising the steps of:

s1, starting the transmission motor 203, and transmitting the workpiece tray 8 on the transmission belt 202 through the first transmission component, namely the feeding end;

s2, opening the vacuum cavity 3, driving the vacuum chuck component 5 to move up and down and left and right by the power component, simultaneously sucking the workpiece tray 8 by the vacuum chuck component 5 and placing the workpiece tray in the cavity 301, returning the vacuum chuck component 5, closing the upper cover 302, and vacuumizing to perform plasma treatment;

specifically, the X-axis power assembly 401 drives the vacuum chuck assembly 5 to move left and right by driving the moving frame 423 to move left and right; the Z-axis power assembly 402 drives the vacuum chuck assembly 5 to move up and down by driving the moving frame 423 to move up and down.

The vacuum suction nozzle 503 in the vacuum chuck assembly 5 finishes grabbing and discharging the workpiece tray 8.

S3, after the processing is finished, the vacuum cavity 3 is opened, the power assembly drives the vacuum chuck assembly 5 to move, the vacuum chuck assembly 5 sucks the workpiece tray 8 in the cavity 301, the workpiece tray is placed on the second transmission assembly to be transmitted, namely, a discharge end, and the next procedure is carried out;

s4, repeating the steps S2-S3.

Note that the workpiece tray 8 is a product for shipping plasma to be processed.

The semi-off-line plasma processing equipment realizes the front and back transmission of the workpiece tray 8 processed by the vacuum chamber 3 through the first transmission assembly and the second transmission assembly, meets the requirement of plasma processing on products in a production line mode, and is beneficial to improving the processing efficiency of the products; the automatic operation of the workpiece tray 8 is realized through the vacuum chuck assembly 5, so that the labor cost can be reduced, and the processing efficiency is greatly improved; through the simple structure setting of transfer chain frame 1 and vacuum cavity frame, be applicable to and reform transform current assembly line equipment, need not great area, reform transform with low costsly, equipment fixing and use flexibility are high.

The semi-off-line plasma processing equipment overcomes the defects that the existing plasma processing equipment is mostly of a fixed chassis structure, is poor in flexibility and cannot adapt to production line type operation production of products.

The above description is only a preferred embodiment of the present invention, and it is not intended to limit the scope of the present invention, and various modifications and changes may be made by those skilled in the art. Variations, modifications, substitutions, integrations and parameter changes of the embodiments may be made without departing from the principle and spirit of the invention, which may be within the spirit and principle of the invention, by conventional substitution or may realize the same function.

Claims

1. A semi-off-line plasma processing device is characterized by comprising a conveyor line rack (1), a conveying assembly (2), a vacuum cavity (3), a moving assembly (4), a vacuum chuck assembly (5) and a support frame (6);

the conveying assembly (2) is arranged above the conveying line rack (1), and the conveying assembly (2) is used for conveying the workpiece tray (8);

the power assembly is arranged above the support frame (6) and is used for driving the vacuum chuck assembly (5) to move up and down and left and right.

2. The semi-offline plasma processing apparatus according to claim 1, wherein said vacuum chuck assembly (5) comprises a bracket (501), a horizontal chuck support (502) and vacuum nozzles (503), said horizontal chuck support (502) being uniformly distributed at a lower end of said bracket (501) at a certain interval, said vacuum nozzles (503) being fixed on said horizontal chuck support (502).

3. The semi-offline plasma processing apparatus according to claim 1, wherein the vacuum chamber (3) comprises a chamber body (301) and an upper cover (302), the chamber body (301) and the upper cover (302) being fixedly connected by a link;

an insulating flat plate is arranged at the bottom of the cavity (301), and a positive plate (311) is arranged above the insulating flat plate; insulating strips (312) are arranged around the cavity (301).

4. A semi-offline plasma processing apparatus according to claim 3, characterized in that said positive plate (311) is provided with uniformly distributed tray spacers (313), said tray spacers (313) being used for placing work piece trays (8).

5. The plasma processing apparatus according to any one of claims 1 to 4, wherein the transmission assembly (2) comprises a transmission frame (201), a transmission belt (202), a driving shaft, a driven shaft and a transmission motor (203), the transmission frame (201) is provided with a groove, the driving shaft and the driven shaft are respectively arranged at two ends of the groove, the transmission belt (202) is arranged in the groove, and the transmission motor (203) drives the driving shaft to rotate.

6. The semi-offline plasma processing apparatus according to any one of claims 1 to 4, wherein the conveyor line rack (1) comprises a first conveyor line rack (101) and a second conveyor line rack (102), the first conveyor line rack (101) and the second conveyor line rack (102) being respectively disposed on both sides of the vacuum chamber (3);

the conveying assembly (2) comprises a first conveying assembly (2) and a second conveying assembly (2), and the first conveying assembly (2) and the second conveying assembly (2) correspond to the first conveying line rack (101) and the second conveying line rack (102) respectively.

7. The semi-offline plasma processing apparatus according to any of claims 1 to 4, wherein said motion assembly (4) comprises an X-axis power assembly (401) and a Z-axis power assembly (402), said X-axis power assembly (401) being adapted to enable left-right movement of said vacuum chuck assembly (5); the Z-axis power assembly (402) is used for realizing the up-and-down movement of the vacuum chuck assembly (5).

8. The plasma processing apparatus according to claim 7, wherein the X-axis power assembly (401) comprises a first driving motor (411), an X-axis guide rail bracket (412), an X-axis lead screw disposed within the X-axis guide rail bracket (412), and an X-axis lead screw nut engaged with the X-axis lead screw.

9. The semi-offline plasma processing apparatus according to claim 8, wherein the Z-axis power assembly (402) comprises a second drive motor (421), a Z-axis rail mount (422), a Z-axis lead screw nut;

one side of Z axle guide rail frame (422) be provided with X axle guide rail frame (412) corresponding first locating piece (413), the opposite side is provided with removes frame (423), it is fixed to remove frame (423) below vacuum chuck subassembly (5), one side of removing frame (423) be provided with Z axle guide rail frame (422) corresponding second locating piece (424).

10. Use of a semi-offline plasma processing apparatus according to any of claims 1-9, comprising the steps of:

s1, starting a transmission motor (203), transmitting the workpiece tray (8) by the first transmission component (2) and transmitting the workpiece tray on the transmission belt (202);

s2, opening the vacuum cavity (3), driving the vacuum chuck assembly (5) to move up and down and left and right by the power assembly, simultaneously sucking the workpiece tray (8) by the vacuum chuck assembly (5) and placing the workpiece tray in the cavity (301), returning the vacuum chuck assembly (5), closing the upper cover (302), and vacuumizing to perform plasma treatment;

s3, after the processing is finished, opening the vacuum cavity (3), driving the vacuum chuck component (5) to move by the power component, sucking the workpiece tray (8) in the cavity (301) by the vacuum chuck component (5), placing the workpiece tray on the second transmission component (2) for transmission, and entering the next procedure;

s4, repeating the steps S2-S3.