CN109809174A - Plasma cleaner loading and unloading system and full-automatic microwave plasma cleaning equipment - Google Patents
Plasma cleaner loading and unloading system and full-automatic microwave plasma cleaning equipment Download PDFInfo
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- CN109809174A CN109809174A CN201910167120.3A CN201910167120A CN109809174A CN 109809174 A CN109809174 A CN 109809174A CN 201910167120 A CN201910167120 A CN 201910167120A CN 109809174 A CN109809174 A CN 109809174A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 58
- 210000002381 Plasma Anatomy 0.000 title claims abstract description 42
- 239000000463 material Substances 0.000 claims abstract description 49
- 238000005520 cutting process Methods 0.000 claims abstract description 17
- 230000001105 regulatory Effects 0.000 claims abstract description 10
- 239000000047 product Substances 0.000 claims description 112
- 210000001847 Jaw Anatomy 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000006227 byproduct Substances 0.000 claims description 5
- 230000000875 corresponding Effects 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 2
- 230000000414 obstructive Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000004429 atoms Chemical group 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Abstract
A kind of plasma cleaner loading and unloading system disclosed by the invention, is related to plasma cleaning technical field.The loading and unloading system includes the feed mechanism positioned at cleaning machine input terminal and the cutting agency positioned at cleaning machine output end, feed mechanism includes material loading platform, feeding drive system and feeding manipulator, cutting agency includes platform of blanking, blanking drive system and blanking mechanical hand, and the conveying for conveying products is correspondingly arranged on material loading platform and platform of blanking.A kind of plasma cleaner loading and unloading system disclosed by the invention is connected cooperation with the effective of cleaning machine by loading and unloading system, so that product line handoff procedure is more efficient, the degree of automation is higher, reduces labor intensity of workers, and production efficiency greatly improves；In addition, being additionally provided with the distance regulating mechanism for adjusting spacing between adjacent two conveying in the loading and unloading system, the width of conveying can be adjusted according to the developed width of product, reduce artificial participation, and applied widely.
Description
Technical field
The present invention relates to plasma cleaning technical fields, and in particular to a kind of plasma cleaner loading and unloading system.
Background technique
Plasma cleaner (plasma cleaner) be also plasma cleans machine or Surface Treatment with Plasma instrument, is
A kind of completely new high-tech technology, achievees the effect that Conventional cleaning method is unable to reach using plasma.Plasma is
A kind of state of substance, also referred to as the 4th state of substance, and it is not belonging to common solid-liquid-gas tri-state.Enough energy are applied to gas
Amount is allowed to ionization and becomes as plasmoid." activity " component of plasma include: ion, electronics, atom, active group,
The nucleic (metastable state) of excitation state, photon etc..Plasma cleans machine is exactly to be handled by the property using these active components
Sample surfaces, thus the purpose of realizing cleaning, coating.
There are many plasma cleaning industry product loading and unloading system mode at present, but the degree of automation is not high, and exist each
Kind problem is not high so as to cause plasma cleaning equipment utilization rate.Simultaneously in product transmission process, it is only capable of conveying single specification
Product, the scope of application is small, and is conveyed by single track, and transfer efficiency is low, obstruction damage that whens product loading and unloading easily causes, shake
The problems such as bad, safe early warning ability is inadequate is moved, but also damage of product is larger in plasma cleaning process.
Therefore, in view of problem above, it is necessary to the loading and unloading system for proposing a kind of plasma cleaning, make its improve etc. from
Guarantee that cleaning process product safety is lossless while sub- cleaning efficiency, and energy quick-replaceable product line, to meet current plasma
The production requirement of cleaning industry.
Summary of the invention
In view of this, the present invention discloses a kind of plasma cleaner loading and unloading system, pass through loading and unloading system and cleaning
Effective linking of machine cooperates, so that product line handoff procedure is more efficient, the degree of automation is higher, reduces labor intensity of workers, raw
Efficiency is produced to greatly improve.The spacing for adjusting spacing between adjacent two conveying is additionally provided in the loading and unloading system simultaneously
Regulating mechanism can adjust the width of conveying according to the developed width of product, reduce artificial participation, and applied widely.
A kind of plasma cleaner loading and unloading system that purpose proposes according to the present invention, including it is located at cleaning machine input terminal
Feed mechanism be located at cleaning machine output end cutting agency；
The feed mechanism includes material loading platform and feeding drive system, and the cutting agency includes platform of blanking and blanking
The conveying for being provided with several for conveying products is respectively corresponded on drive system, the material loading platform and platform of blanking,
The conveying is arranged in parallel, and product between adjacent two conveying through conveying；
The loading and unloading system further includes one for adjusting spacing between adjacent two conveying, making adjacent two conveying
Between the distance regulating mechanism that matches of spacing and product width；
The feed mechanism further includes the corresponding feeding for being set to material loading platform Yu platform of blanking side with cutting agency
Manipulator and blanking mechanical hand, the feeding manipulator and blanking mechanical hand respectively with the material loading platform and platform of blanking pair
It connects.
Preferably, the distance regulating mechanism is motor lead-screw drive mechanism, and at least one of adjacent two conveying is defeated
It send configured with the nut with lead screw transmission on guide rail, the starting of motor lead-screw drive mechanism drives conveying translation engaged therewith
To adjust the width between conveying；Be correspondingly arranged on the conveying to testing product whether there is or not first sensor.
Preferably, the feeding manipulator and blanking mechanical hand are Three Degree Of Freedom mobile manipulator, the feeding manipulator
The upper side far from material loading platform is provided with product delivery device, and the feeding manipulator is moved down in the driving of feeding drive system
It moves to when being aligned with the material loading platform, the movement of product delivery device pushes to product in magazine on material loading platform one by one.
Preferably, the Three Degree Of Freedom mobile manipulator includes Three Degree Of Freedom mobile mechanism and clamping jaw, and the clamping jaw includes
Upper gripper jaw and lower clamping jaw, the magazine equipped with product to be cleaned are held between upper gripper jaw and lower clamping jaw, are provided on the clamping jaw
For detecting the second sensor of magazine to be grabbed.
Preferably, the thrust pickup for detecting thrust size is provided on the product delivery device.
Preferably, the material loading platform, platform of blanking can be defeated along vertical product with respect to feeding manipulator, blanking mechanical hand
The Y direction in direction is sent to move horizontally.
Preferably, the input terminal of the material loading platform, cleaning machine and platform of blanking, which respectively corresponds, is provided with to release
First driving means, second driving means and third driving means of the product to next station, first driving means, second
Driving means can move horizontally along the x axis with third driving means, when product conveys, feeding manipulator and material loading platform
It is moved to the aligned in position far from the first driving means along the y axis, product delivery device will produce in magazine at feeding manipulator
Product push to material loading platform one by one, and material loading platform resets along the y axis to be aligned with cleaning machine, the first driving means, the second push
Product on material loading platform is pushed to cleaning machine by device synchronization action, the product on cleaning machine pushes to platform of blanking, third
Driving means pushes on platform of blanking in magazine clamped by product blanking to blanking mechanical hand.
Preferably, the third driving means is Three Degree Of Freedom driving means, including driving mechanism, is moved along the x axis
Push bracket be slideably positioned in along the y axis push bracket on lifting cylinder and be connected on the lifting cylinder
Push rod, the push bracket are set up in driving mechanism, are higher by product setting, and when pushing product, lifting cylinder drives push
Bar is moved down to be aligned with product, and driving mechanism drives push bracket overall movement to push to product clamped by blanking mechanical hand one by one
Magazine in.
Preferably, several shelf are provided in the magazine, product is sequentially stacked in magazine, when feeding, in magazine
Top level product or bottom product are concordant with material loading platform, and every one product of push feeding, feeding manipulator moves up or move down one
The height of shelf, multiple stacked products successively feeding.
The invention also discloses a kind of full-automatic microwave plasma cleaning equipment, including loading and unloading system and it is located at feeding
Cleaning machine between mechanism and cutting agency is provided with the placement track for placing product on the cleaning machine, places the input of track
End chamfer setting.
Compared with prior art, a kind of the advantages of plasma cleaner loading and unloading system disclosed by the invention, is:
It is connected cooperation with the effective of cleaning machine by loading and unloading system, so that product line handoff procedure is more efficient, automation
Degree is higher, reduces labor intensity of workers, and production efficiency greatly improves.
In addition, the spacing being additionally provided in the loading and unloading system for adjusting spacing between adjacent two conveying adjusts machine
Structure can adjust the width of conveying according to the developed width of product, reduce artificial participation, and applied widely.
Product is stacked and placed in magazine, avoids damaging product when manipulator loading and unloading, guarantees product yield.
Detailed description of the invention
It, below will be to embodiment or existing for the clearer technical solution for illustrating the embodiment of the present invention or the prior art
Attached drawing needed in technical description does simple introduction, it is clear that, the accompanying drawings in the following description is only this hair
Bright some embodiments, it will be clear to the skilled person that without creative efforts, may be used also
Other accompanying drawings can also be obtained according to these attached drawings.
Fig. 1 is a kind of structure chart of plasma cleaner loading and unloading system disclosed by the invention.
Fig. 2 is distance regulating mechanism schematic diagram.
Fig. 3 is material loading platform structure chart.
Fig. 4 is the first driving means and the second driving means structure chart.
Fig. 5 is third driving means structure chart.
Fig. 6 is feeding manipulator structure chart.
Parts title representated by number or letter in figure are as follows:
1- cleaning machine；2- material loading platform；21- motor lead-screw drive mechanism；22- first sensor；23- conveying；3-
Platform of blanking；4- feeding manipulator；41- Three Degree Of Freedom mobile mechanism；42- clamping jaw；43- second sensor；44- product pusher
Structure；45- thrust pickup；5- blanking mechanical hand；The first driving means of 6-；The second driving means of 7-；8- third driving means；
81- pushes bracket；82- lifting cylinder；83- push rod；9- magazine.
Specific embodiment
A specific embodiment of the invention is described briefly with reference to the accompanying drawing.Obviously, described embodiment is only
It is a part of the embodiments of the present invention, rather than whole embodiments, based on the embodiments of the present invention, ordinary skill people
Member's every other embodiment obtained without making creative work, belongs to the scope of protection of the invention.
Fig. 1-Fig. 6 shows preferred embodiments of the present invention, has carried out from different angles to its structure respectively detailed
It dissects.
A kind of plasma cleaner loading and unloading system as shown in figures 1 to 6, the feeding including being located at 1 input terminal of cleaning machine
Mechanism and the cutting agency for being located at 1 output end of cleaning machine.Wherein, feed mechanism include material loading platform 2 and feeding drive system (not
Show), cutting agency includes platform of blanking 3 and blanking drive system (not shown), is distinguished on material loading platform 2 and platform of blanking 3
Several conveyings 23 for conveying products are correspondingly arranged on, conveying 23 is arranged in parallel, and product is conveyed through adjacent two
It is conveyed between guide rail 23.
Loading and unloading system further includes one for adjusting 23 spacing of adjacent two conveying, making adjacent two conveying 23
Between the distance regulating mechanism that matches of spacing and product width.Specifically, distance regulating mechanism is motor lead-screw drive mechanism 21,
Configured with the nut with lead screw transmission at least one conveying 23 of adjacent two conveying 23.According to product to be cleaned
Of different size, the starting of motor lead-screw drive mechanism 21 drives conveying 23 engaged therewith translation to adjust between conveying 23
Width.Be correspondingly arranged on conveying to testing product whether there is or not first sensor 22.
Feed mechanism side corresponding with cutting agency is respectively arranged with feeding manipulator 4 and blanking mechanical hand 5, feeder
Tool hand 4 is docked with material loading platform 2 with platform of blanking 3 respectively with blanking mechanical hand 5.Specifically, feeding manipulator 4 and blanking mechanical
Hand 5 is Three Degree Of Freedom mobile manipulator, and Three Degree Of Freedom mobile manipulator includes Three Degree Of Freedom mobile mechanism 41 and clamping jaw 42, folder
Pawl 42 includes upper gripper jaw and lower clamping jaw, and the magazine 9 equipped with product to be cleaned is held between upper gripper jaw and lower clamping jaw, on clamping jaw 42
It is provided with the second sensor 43 for detecting magazine 9 to be grabbed.Wherein, the folding of clamping jaw 42 can by motor lead screw transmission or
It is pneumatic to realize, specifically with no restrictions.
Feeding manipulator 4 is provided with product delivery device 44 far from the side of material loading platform 2, and feeding manipulator 4 is in feeding
It is moved under the driving of drive system when being aligned with material loading platform 2, the movement of product delivery device 44 pushes away product in magazine 9 one by one
It send to material loading platform 2.Specifically, being provided with the thrust pickup 45 for detecting thrust size on product delivery device 44.
Thrust magnitude is preset according to the quality of product and size in feeding drive system, during product push, when thrust pickup institute
When the thrust magnitude of detection is greater than default thrust magnitude, product delivery device 44 stops working and alarms, so that product be avoided to push
Obstruction encountered in journey.
Material loading platform 2, platform of blanking 3 can be with respect to feeding manipulator 4, blanking mechanical hands 5 along vertical product conveying direction
Y direction move horizontally.The input terminal of material loading platform 2, cleaning machine 1 and platform of blanking 3, which respectively corresponds, to be provided with to push away
First driving means 6, second driving means 7 and third driving means 8 of the product to next station out, the first driving means 6, the
Two driving means 7 can move horizontally along the x axis with third driving means 8.Product convey when, feeding manipulator 4 with it is upper
Material platform 2 is moved to the aligned in position far from the first driving means 6 along the y axis, starts product delivery device 44 for feeder
Product pushes to material loading platform 2 one by one in magazine 9 at tool hand 4, and material loading platform 2 resets along the y axis to be aligned with cleaning machine 1, the
7 common drive system of one driving means 6 and the second driving means, the two synchronization action push to the product on material loading platform 2
Product on cleaning machine 1, cleaning machine 1 pushes to platform of blanking 3.Third driving means 8 push platform of blanking 3 on product blanking extremely
In magazine 9 clamped by blanking mechanical hand 5.The first driving means can also drive respectively with the second driving means in other embodiments
It is dynamic, specifically with no restrictions.
Further, third driving means 8 is Three Degree Of Freedom driving means, is moved including driving mechanism, along the x axis
It pushes bracket 81 and is slideably positioned in the lifting cylinder 82 pushed on bracket 81 along the y axis and is connected on lifting cylinder 82
Push rod 83, push bracket 81 be set up in driving mechanism, be higher by product setting, push product when, lifting cylinder 82 drive
Push rod 83 is moved down to be aligned with product, and driving mechanism drives push bracket 81 to move integrally and product is pushed to blanking mechanical one by one
In magazine 9 clamped by hand 5.
Further, several shelf are provided in magazine 9, product is sequentially stacked in magazine 9, when feeding, in magazine 9
Top level product or bottom product are concordant with material loading platform 2, and every one product of push feeding, feeding manipulator 4 moves up or move down one
The height of a shelf, multiple stacked products successively feeding.
The invention also discloses a kind of full-automatic microwave plasma cleaning equipment, including loading and unloading system and it is located at feeding
Cleaning machine 1 between mechanism and cutting agency is provided with the placement track for placing product on the cleaning machine 1, places the defeated of track
Enter end chamfer setting.
Workflow: opening plasma cleaning equipment, and product is sequentially stacked in magazine 9, and feeding manipulator 4 passes through second
Sensor 43 detect magazine 9 whether there is or not rear crawl magazine 9 and be moved at material loading platform 2 along the y axis, material loading platform 2 it is initial
Far from the first driving means 6, the product delivery device 44 on feeding manipulator 4 pushes to product in magazine 9 one by one for position
To expect in the corresponding conveying 23 of platform 2, one product of every feeding, feeding manipulator 4 is mobile with Z-direction along the y axis,
Guarantee that next product in magazine 9 is aligned with next delivery track, after material loading platform 2 is fully loaded with product, is reset to along the y axis
At first driving means 6, product thereon is pushed to progress microwave plasma cleaning on cleaning machine 1 by the first driving means 6,
Product after cleaning on cleaning machine 1 simultaneously is delivered on platform of blanking 3 by the second driving means 7, and lifting cylinder 82 drives push
Bar 83 is moved down to be aligned with product, and driving mechanism drives the push overall movement of bracket 81 that product is pushed to blanking mechanical hand 5 one by one
In clamped magazine 9, then blanking mechanical hand 5 along the y axis exports the magazine 9 after cleaning.
In conclusion the present invention discloses a kind of plasma cleaner loading and unloading system, including it is located at cleaning machine input terminal
Feed mechanism be located at cleaning machine output end cutting agency, the feed mechanism includes material loading platform, feeding drive system
And feeding manipulator, the cutting agency include platform of blanking, blanking drive system and blanking mechanical hand, the feeding is flat
The conveying for conveying products is correspondingly arranged on platform and platform of blanking.Feed mechanism in the loading and unloading system, cleaning machine,
It is connected between cutting agency three by conveying, product line handoff procedure is more efficient, and the degree of automation is higher, reduces worker
Labor intensity, production efficiency greatly improve.Be additionally provided in the loading and unloading system simultaneously for adjust adjacent two conveying it
Between spacing distance regulating mechanism, the width of conveying can be adjusted according to the developed width of product, reduce it is artificial participate in, and
It is applied widely.
In addition, product is stacked and placed in magazine, avoid damaging product when manipulator loading and unloading, guarantees product yield.
The foregoing description of the disclosed embodiments makes professional and technical personnel in the field can be realized and use the present invention.
Various modifications to these embodiments mode will be readily apparent to those skilled in the art, and determine herein
The General Principle of justice can be realized in other embodiments without departing from the spirit and scope of the present invention.Therefore, originally
Invention is not intended to be limited to the embodiments shown herein, and is to fit to the principles and novel features disclosed herein phase
Consistent widest scope.
Claims (10)
1. a kind of plasma cleaner loading and unloading system, which is characterized in that the feed mechanism including being located at cleaning machine input terminal
With the cutting agency for being located at cleaning machine output end；
The feed mechanism includes material loading platform and feeding drive system, and the cutting agency includes that platform of blanking and blanking drive
The conveying for being provided with several for conveying products is respectively corresponded on system, the material loading platform and platform of blanking, it is described
Conveying is arranged in parallel, and product between adjacent two conveying through conveying；
The loading and unloading system further include one for adjusting spacing between adjacent two conveying, making between adjacent two conveying between
Away from the distance regulating mechanism to match with product width；
The feed mechanism further includes that the corresponding feeding for being set to material loading platform and platform of blanking side is mechanical with cutting agency
Hand and blanking mechanical hand, the feeding manipulator are docked with the material loading platform with platform of blanking respectively with blanking mechanical hand.
2. plasma cleaner loading and unloading system according to claim 1, which is characterized in that the distance regulating mechanism
For motor lead-screw drive mechanism, configured with the nut with lead screw transmission at least one conveying of adjacent two conveying,
The starting of motor lead-screw drive mechanism drives conveying translation engaged therewith to adjust the width between conveying；The conveying
Be correspondingly arranged on guide rail to testing product whether there is or not first sensor.
3. plasma cleaner loading and unloading system according to claim 1, which is characterized in that the feeding manipulator with
Blanking mechanical hand is Three Degree Of Freedom mobile manipulator, and the side far from material loading platform is provided with product and pushes away on the feeding manipulator
Mechanism is sent, the feeding manipulator is moved under the driving of feeding drive system when being aligned with the material loading platform, and product pushes away
Mechanism action is sent to push to product in magazine on material loading platform one by one.
4. plasma cleaner loading and unloading system according to claim 3, which is characterized in that the Three Degree Of Freedom is mobile
Manipulator includes Three Degree Of Freedom mobile mechanism and clamping jaw, and the clamping jaw includes upper gripper jaw and lower clamping jaw, equipped with product to be cleaned
Magazine is held between upper gripper jaw and lower clamping jaw, and the second sensor for detecting magazine to be grabbed is provided on the clamping jaw.
5. plasma cleaner loading and unloading system according to claim 3, which is characterized in that the product delivery device
On be provided with thrust pickup for detecting thrust size.
6. plasma cleaner loading and unloading system according to claim 3, which is characterized in that the material loading platform, under
Material platform can be moved horizontally with respect to feeding manipulator, blanking mechanical hand along the Y direction of vertical product conveying direction.
7. plasma cleaner loading and unloading system according to claim 6, which is characterized in that the material loading platform, clear
The input terminal of washing machine and platform of blanking respectively correspond be provided with to release product to next station the first driving means,
Two driving means and third driving means, first driving means, the second driving means and third driving means can be along X
Axis direction moves horizontally, and when product conveys, feeding manipulator and material loading platform are moved to along the y axis far from the first driving means
Aligned in position, product in magazine at feeding manipulator pushes to material loading platform by product delivery device one by one, and material loading platform is along Y
Axis direction reset is aligned with cleaning machine, and the first driving means, the second driving means synchronization action push away the product on material loading platform
It send to the product on cleaning machine, cleaning machine and pushes to platform of blanking, third driving means pushes on platform of blanking product blanking extremely
In magazine clamped by blanking mechanical hand.
8. plasma cleaner loading and unloading system according to claim 7, which is characterized in that the third driving means
For Three Degree Of Freedom driving means, the push bracket moved including driving mechanism, along the x axis be slideably positioned in along the y axis
The push rod for pushing the lifting cylinder on bracket and being connected on the lifting cylinder, the push bracket are set up in driving machine
On structure, it is higher by product setting, when pushing product, lifting cylinder drives push rod to move down and is aligned with product, and driving mechanism drive pushes away
Bracket overall movement is sent to push to product in magazine clamped by blanking mechanical hand one by one.
9. according to the described in any item plasma cleaner loading and unloading systems of claim 3-8, which is characterized in that the magazine
Inside it is provided with several shelf, product is sequentially stacked in magazine, the top level product or bottom product and feeding when feeding, in magazine
Platform is concordant, and every one product of push feeding, feeding manipulator moves up or move down the height of a shelf, multiple stacked products
Successively feeding.
10. a kind of full-automatic microwave plasma cleaning equipment, which is characterized in that including claim 1-9 it is described in any item on
Blanking system and the cleaning machine between feed mechanism and cutting agency are provided with the placement for placing product on the cleaning machine
Track places the input end chamfer setting of track.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910167120.3A CN109809174A (en) | 2019-03-06 | 2019-03-06 | Plasma cleaner loading and unloading system and full-automatic microwave plasma cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910167120.3A CN109809174A (en) | 2019-03-06 | 2019-03-06 | Plasma cleaner loading and unloading system and full-automatic microwave plasma cleaning equipment |
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| Publication Number | Publication Date |
|---|---|
| CN109809174A true CN109809174A (en) | 2019-05-28 |
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ID=66608261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910167120.3A Pending CN109809174A (en) | 2019-03-06 | 2019-03-06 | Plasma cleaner loading and unloading system and full-automatic microwave plasma cleaning equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348431A (en) * | 2020-03-13 | 2020-06-30 | 苏州市奥普斯等离子体科技有限公司 | Semi-off-line plasma processing equipment and using method thereof |
| CN111689157A (en) * | 2020-06-01 | 2020-09-22 | 深圳市海铭德科技有限公司 | Loading and unloading device of plasma cleaning equipment |
-
2019
- 2019-03-06 CN CN201910167120.3A patent/CN109809174A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348431A (en) * | 2020-03-13 | 2020-06-30 | 苏州市奥普斯等离子体科技有限公司 | Semi-off-line plasma processing equipment and using method thereof |
| CN111348431B (en) * | 2020-03-13 | 2022-02-11 | 苏州市奥普斯等离子体科技有限公司 | Semi-off-line plasma processing equipment and using method thereof |
| CN111689157A (en) * | 2020-06-01 | 2020-09-22 | 深圳市海铭德科技有限公司 | Loading and unloading device of plasma cleaning equipment |
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