CN208712420U - A kind of plasma body cleaning device - Google Patents
A kind of plasma body cleaning device Download PDFInfo
- Publication number
- CN208712420U CN208712420U CN201721740536.2U CN201721740536U CN208712420U CN 208712420 U CN208712420 U CN 208712420U CN 201721740536 U CN201721740536 U CN 201721740536U CN 208712420 U CN208712420 U CN 208712420U
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- Prior art keywords
- plasma
- cylinder
- bowl assembly
- occurs
- automatic loading
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Abstract
The utility model relates to a kind of plasma body cleaning devices, cylinder occurs for multiple plasmas including horizontal Tile setting, the both ends that cylinder occurs for the plasma are air inlet, centre setting gas outlet, the plasma occurs cylinder and excites gas on its interior for plasma, and lower part is evenly arranged with multiple nozzles；The air inlet of cylinder occurs for the plasma, gas outlet outside is surrounded with annular electrode, and the annular electrode is connected with excitation power supply；The lower part that cylinder occurs for the plasma, which is also horizontally disposed with, track conveyor structure；It further include automatic loading and unloading mechanism, the automatic loading and unloading mechanism includes raw material bowl assembly, finished product material bowl assembly and automatic loading and unloading manipulator component.The Density Distribution that plasma in cylinder occurs for the utility model gas ions is uniform, and thus the plate body to be cleaned to glass substrate etc. forms all standing, and cleaning effect is very good.
Description
Technical field
The utility model relates to the body surfaces such as a kind of pair of glass substrate pollution and oxide carry out reduction cleaning equipment,
More particularly to a kind of plasma body cleaning device.
Background technique
The techniques such as surface cleaning, pretreatment are carried out to sample, are widely used in the row such as semiconductor, photovoltaic and electronic product
Industry.Sample surfaces are cleaned, organic impurities are removed, it is advantageously ensured that product quality, enhances product performance；Sample surfaces are carried out
Pretreatment, is to be ready for next step production technology, is conducive to improve yield rate, properties of product of next step process etc..Mesh
Before, method clean for product surface has solvent clean, ultraviolet cleaning, ozone clean and plasma cleaning etc..Deng from
The advantages that daughter is cleaned compared with other cleaning modes, fast, convenient for automating due to its cleaning speed, is more suitable for automation and sets
It is standby.Structure is complicated for current plasma body cleaning device, and energy consumption is high, and technical process is discontinuous, and staff labor intensity is big, and consumes
Take place, is unfavorable for intensive, high efficiency production.
Utility model content
The utility model provides the plasma body cleaning device under a kind of normal temperature and pressure conditions, the composition of the device and makes
With can effectively solve above-mentioned problems existing in the prior art, have cleaning effect good, high production efficiency saves manpower
Cost, and the advantages that high degree of automation.
In order to achieve the above objectives, the technical solution adopted in the utility model is: a kind of plasma body cleaning device, including water
It puts down multiple plasmas arranged side by side and cylinder occurs, the both ends that cylinder occurs for the plasma are air inlet, and centre is provided
Port, the plasma occur cylinder and excite gas on its interior for plasma, and lower part be evenly arranged with it is multiple
Nozzle；The plasma occurs the air inlet of cylinder, is surrounded with annular electrode on the outside of gas outlet, the annular electrode with
Excitation power supply is connected；
The lower part that cylinder occurs for the plasma, which is also horizontally disposed with, track conveyor structure, the length of the track conveyor structure
Degree is greater than the length that cylinder occurs for plasma, and both ends are respectively positioned on the outside that cylinder air inlet occurs for the plasma；
Further include automatic loading and unloading mechanism, the automatic loading and unloading mechanism include raw material bowl assembly, finished product material bowl assembly and
Automatic loading and unloading manipulator component；The raw material bowl assembly is used to plate to be cleaned being moved to cleaning point, institute from feeding point
Finished product material bowl assembly is stated for cleaned plate finished product to be moved to plate products storage point, the raw material tank group from cleaning point
Part includes raw material tank, and the finished product bowl assembly includes finished product hopper, and the raw material bowl assembly, finished product bowl assembly include being set to
The pulley of hopper bottom is set to ground and base track compatible with the pulley, the driving pulley in base track
The driving motor inside rolled；The automatic loading and unloading manipulator component includes mechanical arm, vacuum chuck and positioning device, institute
The lower section that vacuum chuck is set to mechanical arm is stated, the mechanical arm is moved left and right along a horizontal slide rail, and the mechanical arm is perpendicular along one
Straight sliding rail moves up and down, and the positioning device is respectively arranged on the horizontal slide rail and upright slide rail, controls the mechanical arm
Displacement in the horizontal and vertical directions；The raw material bowl assembly, finished product material bowl assembly are respectively arranged at track conveyor
The two sides of structure 1, the automatic loading and unloading manipulator component are set to the upside that cylinder occurs for plasma.
Further, positioning baffle is provided on the horizontal slide rail.
Further, weight sensor is provided on the mechanical arm, the weight sensor is to the plate weight drawn
Amount is detected.
Further, a thimble for ejecting the plate is provided in the vacuum chuck.
Further, the excitation power supply is radio-frequency power supply or high-voltage ac power.
Further, the plasma generation cylinder is made of quartz glass.
Further, the gas outlet is connected with waste gas recovery processing unit.
In addition, in technical solution described in the utility model, all do not do is illustrated, can be used normal in this field
Rule means realize the technical program.
It is air inlet that the utility model, which has the advantage that the two sides of cylinder occur for the plasma of the utility model,
Gas outlet is arranged in centre, and annular electrode is provided at air inlet and air outlet, so that plasma occurs in cylinder
Plasma Density Distribution it is uniform, thus the plate body to be cleaned to glass substrate etc. forms all standing, and cleaning effect is very
Well.The utility model is also equipped with automatic loading and unloading mechanism, can be realized automatic charging, the automatic blanking of material, automates journey
Degree is high, can greatly save manpower, and the utility model structure is simple, and reliable performance, space hold is few, is conducive to carry out extensive
It promotes.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
In figure: 1, raw material tank；2, finished product hopper；3, driving motor；4, pulley；5, positioning baffle；6, base track；7, water
Smooth rail；8, upright slide rail；9, mechanical arm；10, vacuum chuck；11, thimble；12, positioning device；13, weight sensor；14,
Track conveyor structure；15, cylinder occurs for plasma；16, nozzle；17, annular electrode；18, glass substrate.
Specific embodiment
The utility model is described further with reference to the accompanying drawing.
Referring to Fig. 1, cylinder 15 occurs for a kind of plasma body cleaning device, multiple plasmas including horizontal Tile setting,
The both ends that cylinder 15 occurs for the plasma are air inlet, and cylinder 15 occurs for centre setting gas outlet, the plasma by position
The gas excitation in portion is plasma in the inner, and lower part is evenly arranged with multiple nozzles 16；Cylinder 15 occurs for the plasma
Air inlet, be surrounded with annular electrode 17 on the outside of gas outlet, the annular electrode 17 is connected with excitation power supply.
The lower part that cylinder 15 occurs for the plasma, which is also horizontally disposed with, track conveyor structure 14, the track conveyor structure
14 length is greater than the length that cylinder 15 occurs for plasma, and both ends are respectively positioned on the plasma and the outer of 15 air inlet of cylinder occurs
Side.
Further include automatic loading and unloading mechanism, the automatic loading and unloading mechanism include raw material bowl assembly, finished product material bowl assembly and
Automatic loading and unloading manipulator component；The raw material bowl assembly is used to plate to be cleaned being moved to cleaning point, institute from feeding point
Finished product material bowl assembly is stated for cleaned plate finished product to be moved to plate products storage point, the raw material tank group from cleaning point
Part includes raw material tank 1, and the finished product bowl assembly includes finished product hopper 2, and the raw material bowl assembly, finished product bowl assembly include setting
In hopper bottom pulley 4, be set to ground and base track 6 compatible with the pulley 4, the driving pulley 4 on ground
The driving motor 3 rolled in face sliding rail 6；The automatic loading and unloading manipulator component includes mechanical arm 9,10 and of vacuum chuck
Positioning device 12, the vacuum chuck 10 are set to the lower section of mechanical arm 9, and the mechanical arm 9 is moved along a horizontal slide rail 7 or so
Dynamic, the mechanical arm 9 is moved up and down along a upright slide rail 8, and the positioning device 12 is respectively arranged in the horizontal slide rail 7 and erects
On straight sliding rail 8, the displacement of the mechanical arm 9 in the horizontal and vertical directions is controlled；The raw material bowl assembly, finished product hopper
Component is respectively arranged at the two sides of track conveyor structure 14, and the automatic loading and unloading manipulator component is set to plasma
The upside of cylinder 15.
Positioning baffle 5 is provided on the horizontal slide rail 7.Weight sensor 13 is provided on the mechanical arm 9, it is described heavy
13 pairs of panel weights drawn of quantity sensor detect.One is provided in the vacuum chuck 10 to be used for the plate
The thimble 11 of ejection.The excitation power supply is radio-frequency power supply or high-voltage ac power.Cylinder 15 occurs for the plasma by quartz
Glass is made.The gas outlet is connected with waste gas recovery processing unit.
The two sides that cylinder occurs for the plasma of the utility model are air inlet, and gas outlet is arranged in centre, and air inlet
It is provided with annular electrode at mouth and gas outlet, so that the Density Distribution that the plasma in cylinder occurs for plasma is equal
Even, thus the plate body to be cleaned to glass substrate etc. forms all standing, and cleaning effect is very good.The utility model is also equipped with certainly
Dynamic charging and discharging mechanism, can be realized automatic charging, the automatic blanking of material, and high degree of automation can greatly save manpower, this
Utility model structure is simple, and reliable performance, space hold is few, is conducive to carry out large-scale promotion.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (5)
1. a kind of plasma body cleaning device, it is characterised in that: cylinder, institute occur for multiple plasmas including horizontal Tile setting
Stating plasma the both ends of cylinder occur is air inlet, centre setting gas outlet, and cylinder occurs for the plasma by position in the inner
The gas excitation in portion is plasma, and lower part is evenly arranged with multiple nozzles；The plasma occurs the air inlet of cylinder, goes out
It is surrounded with annular electrode on the outside of port, the annular electrode is connected with excitation power supply；
The lower part that cylinder occurs for the plasma, which is also horizontally disposed with, track conveyor structure, and the length of the track conveyor structure is big
The length of cylinder occurs in plasma, and both ends are respectively positioned on the outside that cylinder air inlet occurs for the plasma；
It further include automatic loading and unloading mechanism, the automatic loading and unloading mechanism includes raw material bowl assembly, finished product material bowl assembly and automatic
Loading and unloading manipulator component；The raw material bowl assembly is used to plate to be cleaned being moved to cleaning point from feeding point, it is described at
Product hopper component is used to cleaned plate finished product being moved to plate products storage point, the raw material bowl assembly packet from cleaning point
Raw material tank is included, the finished product material bowl assembly includes finished product hopper, and the raw material bowl assembly, finished product bowl assembly include being set to material
The pulley of trench bottom is set to ground and base track compatible with the pulley, the driving pulley in base track
The driving motor rolled；The automatic loading and unloading manipulator component includes mechanical arm, vacuum chuck and positioning device, described
Vacuum chuck is set to the lower section of mechanical arm, and the mechanical arm is moved left and right along a horizontal slide rail, and the mechanical arm is vertical along one
Sliding rail moves up and down, and the positioning device is respectively arranged on the horizontal slide rail and upright slide rail, controls the mechanical arm and exists
Displacement in horizontal direction and vertical direction；The raw material bowl assembly, finished product material bowl assembly are respectively arranged at track conveyor structure
Two sides, the automatic loading and unloading manipulator component be set to plasma occur cylinder upside；
Weight sensor is provided on the mechanical arm, the weight sensor detects the panel weight drawn；
A thimble for ejecting the plate is provided in the vacuum chuck.
2. plasma body cleaning device according to claim 1, it is characterised in that: be provided with positioning on the horizontal slide rail
Baffle.
3. plasma body cleaning device according to claim 1, it is characterised in that: the excitation power supply be radio-frequency power supply or
High-voltage ac power.
4. plasma body cleaning device according to claim 1, it is characterised in that: cylinder occurs for the plasma by quartz
Glass is made.
5. plasma body cleaning device according to claim 1, it is characterised in that: the gas outlet and waste gas recovery are handled
Device is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721740536.2U CN208712420U (en) | 2017-12-14 | 2017-12-14 | A kind of plasma body cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721740536.2U CN208712420U (en) | 2017-12-14 | 2017-12-14 | A kind of plasma body cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208712420U true CN208712420U (en) | 2019-04-09 |
Family
ID=65968068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721740536.2U Expired - Fee Related CN208712420U (en) | 2017-12-14 | 2017-12-14 | A kind of plasma body cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208712420U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348431A (en) * | 2020-03-13 | 2020-06-30 | 苏州市奥普斯等离子体科技有限公司 | Semi-off-line plasma processing equipment and using method thereof |
| CN112489845A (en) * | 2020-09-16 | 2021-03-12 | 中广核研究院有限公司 | Laser decontamination and recovery device for plate type heat exchange fins of PTR (thermal transport resistor) system of nuclear power station |
-
2017
- 2017-12-14 CN CN201721740536.2U patent/CN208712420U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111348431A (en) * | 2020-03-13 | 2020-06-30 | 苏州市奥普斯等离子体科技有限公司 | Semi-off-line plasma processing equipment and using method thereof |
| CN111348431B (en) * | 2020-03-13 | 2022-02-11 | 苏州市奥普斯等离子体科技有限公司 | Semi-off-line plasma processing equipment and using method thereof |
| CN112489845A (en) * | 2020-09-16 | 2021-03-12 | 中广核研究院有限公司 | Laser decontamination and recovery device for plate type heat exchange fins of PTR (thermal transport resistor) system of nuclear power station |
| CN112489845B (en) * | 2020-09-16 | 2024-03-26 | 中广核研究院有限公司 | Laser decontamination and recovery device for plate type heat exchange plates of PTR (Positive temperature coefficient) system of nuclear power station |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190409 |