CN111347461A - Nano robot manufacturing process - Google Patents
Nano robot manufacturing process Download PDFInfo
- Publication number
- CN111347461A CN111347461A CN201811593005.4A CN201811593005A CN111347461A CN 111347461 A CN111347461 A CN 111347461A CN 201811593005 A CN201811593005 A CN 201811593005A CN 111347461 A CN111347461 A CN 111347461A
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- Prior art keywords
- glass substrate
- robot
- acid
- ferromagnetic material
- glue
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/007—Means or methods for designing or fabricating manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
Abstract
The invention discloses a nano robot manufacturing process, which comprises the following steps: grinding and cleaning the glass substrate; coating low-temperature thawing gel; depositing; coating heat-sensitive acid-resistant glue; heat-sensitive direct writing; acid etching; cleaning; and (6) stripping. According to the manufacturing process of the nano robot provided by the invention, the nano robot with the size less than 500nm is obtained by processing through a thermosensitive direct writing machine, and the aim of smoothly stripping the nano robot from a glass substrate is realized by using methods of acid etching and low-temperature thawing.
Description
Technical Field
The invention relates to the technical field of nano robots, in particular to a manufacturing process of a nano robot.
Background
The nano robot is widely applied to the technical fields of scientific experiments, precision operations, precision machining and manufacturing and the like, and the size of the nano robot is in the nano level, so that in the existing machining and manufacturing process of the nano robot, the nano robot is difficult to be stripped from a machining base body due to the defects of process design and the like, the operation difficulty is high, and the efficiency is extremely low.
Therefore, how to smoothly peel the nano robot from the processing substrate is a technical problem that needs to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a manufacturing process of a nano-robot, which can process and manufacture a nano-robot having a size of less than 500nm and can smoothly peel the nano-robot from a glass substrate.
In order to achieve the purpose, the invention provides the following technical scheme:
a manufacturing process of a nano robot comprises the following steps:
grinding and cleaning the glass substrate to enable the surface roughness of the glass substrate to be smaller than a preset value;
coating low-temperature thawing glue, and uniformly coating the low-temperature thawing glue on the surface of the glass substrate;
depositing, namely depositing a layer of ferromagnetic material with the thickness of less than 50nm on the surface of the low-temperature unfreezing glue;
coating heat-sensitive acid-resistant glue, and uniformly coating the heat-sensitive acid-resistant glue on the surface of the ferromagnetic material;
the method comprises the following steps of (1) performing thermosensitive direct writing, presetting nanometer robot patterns by using a computer, wherein the length and the width of each nanometer robot pattern are respectively less than 500nm, controlling the thermosensitive direct writing machine to operate on the surface of thermosensitive acid-resistant adhesive by using the computer, and reserving the thermosensitive acid-resistant adhesive for covering and protecting the nanometer robot patterns;
acid etching, namely acid etching the exposed ferromagnetic material by using acid liquor;
cleaning, namely cleaning the whole glass substrate and the ferromagnetic material corresponding to the retained nano robot pattern;
and (4) stripping, namely unfreezing the low-temperature unfreezing glue on the surface of the glass substrate, and stripping the ferromagnetic material corresponding to the pattern of the nano robot from the glass substrate to obtain the nano robot.
According to the manufacturing process of the nano robot provided by the invention, the nano robot with the size less than 500nm is obtained by processing through a thermosensitive direct writing machine, and the aim of smoothly stripping the nano robot from a glass substrate is realized by using methods of acid etching and low-temperature thawing.
Preferably, the ferromagnetic material is ferroferric oxide.
Preferably, in the step of coating the low-temperature thawing glue, uniformly coating the low-temperature thawing glue on the surface of the glass substrate by using a plasma electric plasma sprayer; in the step of coating the heat-sensitive acid-resistant glue, a plasma electric paddle sprayer is used for uniformly coating the heat-sensitive acid-resistant glue on the surface of the ferromagnetic material.
Preferably, in the deposition step, a layer of ferromagnetic material with a thickness of less than 50nm is deposited on the surface of the low-temperature defrosted gel using a vacuum evaporator.
Preferably, the acid solution comprises hydrochloric acid, nitric acid and water.
Preferably, between the cleaning step and the peeling step, the following steps are further included:
and drying, namely drying the whole glass substrate and the ferromagnetic material corresponding to the reserved nano robot pattern.
Preferably, in the step of polishing and cleaning the glass substrate, the surface roughness of the glass substrate is made smaller than
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a flowchart of a nano-robot manufacturing process in an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a flowchart illustrating a manufacturing process of a nano-robot according to an embodiment of the present invention in fig. 1. The manufacturing process of the nano robot provided by the scheme comprises the following steps:
s1, preparing a glass substrate, wherein the glass substrate is used as a carrier for processing and manufacturing the nano robot and is preferably in a flat plate structure;
s2, grinding and cleaning the glass substrate, and grinding and cleaning the glass substrate by using a high-precision plane grinding and cleaning integrated machine, wherein the surface roughness of the glass substrate is detected after grinding and is required to be less than a preset value in order to avoid influencing the thickness processing precision of the nano robot; preferably, the requirement of the surface roughness of the glass substrate after grinding in the scheme is less than
Of course, the scheme can also process the surface roughness of the glass substrate to be less than
Etc., considering the processing difficulty, the present scheme defines the preset value as
S3, coating low-temperature thawing glue, and uniformly coating the low-temperature thawing glue on the surface of the glass substrate by using a plasma electric plasma sprayer, wherein a glue coater can be adopted for spraying in the scheme; the function of coating the low-temperature thawing gel is to provide a fixed foundation for the deposition of the ferromagnetic material in the next step so as to facilitate the processing of magnetron sputtering, thermosensitive direct writing and the like in the subsequent steps;
s4, depositing, namely depositing a layer of ferromagnetic material with the thickness of less than 50nm on the surface of the low-temperature unfreezing gel by using a vacuum evaporator, wherein the ferromagnetic material can be ferroferric oxide or ferromagnetic materials such as iron, cobalt, nickel, titanium and the like, and the step can also adopt a magnetron sputtering machine for sputtering;
s5, coating heat-sensitive acid-resistant glue, and uniformly coating the heat-sensitive acid-resistant glue on the surface of the ferromagnetic material by using a plasma electric-plasma spraying machine, wherein a glue coating machine can be adopted for spraying in the scheme; the function of coating the heat-sensitive acid-resistant glue is to provide covering protection for the ferromagnetic material to prevent the ferromagnetic material from being corroded by acid liquor, when the heat-sensitive direct writing is carried out in the next step, part of the heat-sensitive acid-resistant glue can be removed by the heat-sensitive direct writing machine, and the heat-sensitive acid-resistant glue which is not removed can continuously cover the ferromagnetic material so as to keep the nano robot in the acid etching step;
s6, performing thermal direct writing, presetting nanometer robot patterns by using a computer, wherein the length and the width of each nanometer robot pattern are respectively less than 500nm, controlling the thermal direct writing machine to operate on the surface of thermal acid-resistant glue by using the computer, reserving the thermal acid-resistant glue covering and protecting the nanometer robot patterns, wherein the part covered with the thermal acid-resistant glue is the part corresponding to the nanometer robot to be reserved, and the rest parts expose the ferromagnetic material layer;
s7, acid etching, wherein acid liquor is used for acid etching of the exposed ferromagnetic material, wherein the acid liquor preferably comprises hydrochloric acid, nitric acid and water, and of course, acid liquor such as oxalic acid, nitric acid and the like can be selected;
s8, cleaning, namely cleaning the whole glass substrate and the ferromagnetic material corresponding to the reserved nano robot pattern by using an ultrasonic cleaning machine; at the moment, the heat-sensitive acid-resistant glue is cleaned and removed, so that the nano robot of the ferromagnetic material is exposed; other cleaning machine equipment can be used for cleaning in the cleaning step;
drying, namely drying the whole glass substrate and the ferromagnetic material corresponding to the reserved nano robot pattern by using drying equipment;
s9, peeling, namely placing the glass substrate with the nano robot pattern in a tray, unfreezing the low-temperature unfreezing glue on the surface of the glass substrate by using a low-temperature unfreezing machine or other low-temperature unfreezing equipment, and peeling the ferromagnetic material corresponding to the nano robot pattern from the glass substrate to obtain the nano robot;
and S10, sorting and packaging the nanometer robot by using a microscope or other microscopic observation equipment.
According to the manufacturing process of the nano robot provided by the invention, the nano robot with the size less than 500nm is obtained by processing through a thermosensitive direct writing machine, and the aim of smoothly stripping the nano robot from a glass substrate is realized by using methods of acid etching and low-temperature thawing.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. The manufacturing process of the nano robot is characterized by comprising the following steps:
grinding and cleaning the glass substrate to enable the surface roughness of the glass substrate to be smaller than a preset value;
coating low-temperature thawing glue, and uniformly coating the low-temperature thawing glue on the surface of the glass substrate;
depositing, namely depositing a layer of ferromagnetic material with the thickness of less than 50nm on the surface of the low-temperature unfreezing glue;
coating heat-sensitive acid-resistant glue, and uniformly coating the heat-sensitive acid-resistant glue on the surface of the ferromagnetic material;
the method comprises the following steps of (1) performing thermosensitive direct writing, presetting nanometer robot patterns by using a computer, wherein the length and the width of each nanometer robot pattern are respectively less than 500nm, controlling the thermosensitive direct writing machine to operate on the surface of thermosensitive acid-resistant adhesive by using the computer, and reserving the thermosensitive acid-resistant adhesive for covering and protecting the nanometer robot patterns;
acid etching, namely acid etching the exposed ferromagnetic material by using acid liquor;
cleaning, namely cleaning the whole glass substrate and the ferromagnetic material corresponding to the retained nano robot pattern;
and (4) stripping, namely unfreezing the low-temperature unfreezing glue on the surface of the glass substrate, and stripping the ferromagnetic material corresponding to the pattern of the nano robot from the glass substrate to obtain the nano robot.
2. The nanotechnology according to claim 1, wherein the ferromagnetic material is ferroferric oxide.
3. The manufacturing process of a nano robot according to claim 1, wherein in the step of applying the low-temperature thawing glue, the plasma electric plasma sprayer is used to uniformly apply the low-temperature thawing glue on the surface of the glass substrate; in the step of coating the heat-sensitive acid-resistant glue, a plasma electric paddle sprayer is used for uniformly coating the heat-sensitive acid-resistant glue on the surface of the ferromagnetic material.
4. The nano-robot fabrication process of claim 1, wherein in the deposition step, a layer of ferromagnetic material with a thickness of less than 50nm is deposited on the surface of the low-temperature jelly using a vacuum evaporator.
5. The nano-robot fabrication process of claim 1, wherein the acid solution comprises hydrochloric acid, nitric acid, and water.
6. The nanotopography fabrication process of claim 1, further comprising, between the cleaning step and the peeling step, the steps of:
and drying, namely drying the whole glass substrate and the ferromagnetic material corresponding to the reserved nano robot pattern.
7. The manufacturing process of nano robot as claimed in claim 1, wherein in the step of grinding and cleaning the glass substrate, the surface roughness of the glass substrate is made smaller than that of the glass substrate
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811593005.4A CN111347461B (en) | 2018-12-20 | 2018-12-20 | Nano robot manufacturing process |
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| CN201811593005.4A CN111347461B (en) | 2018-12-20 | 2018-12-20 | Nano robot manufacturing process |
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| CN111347461A true CN111347461A (en) | 2020-06-30 |
| CN111347461B CN111347461B (en) | 2022-03-25 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004084195A1 (en) * | 2003-03-18 | 2004-09-30 | Nanomagnetics Ltd | Production of nanoparticulate thin films |
| CN1558868A (en) * | 2001-11-29 | 2004-12-29 | �Ĺ���������ʽ���� | Nano gripper and method of manufacturing thereof |
| CN101950685A (en) * | 2010-08-23 | 2011-01-19 | 清华大学 | Polypyrrole microelectrode with three-dimensional structure and preparation method thereof |
| CN104701253A (en) * | 2013-12-09 | 2015-06-10 | 大连鑫永工业制造有限公司 | TFT substrate production process |
| CN108007617A (en) * | 2017-12-05 | 2018-05-08 | 浙江大学 | Pressure resistance type flexible touch sensation sensor and its manufacture method with micro- frustum of a cone substrate |
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2018
- 2018-12-20 CN CN201811593005.4A patent/CN111347461B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1558868A (en) * | 2001-11-29 | 2004-12-29 | �Ĺ���������ʽ���� | Nano gripper and method of manufacturing thereof |
| WO2004084195A1 (en) * | 2003-03-18 | 2004-09-30 | Nanomagnetics Ltd | Production of nanoparticulate thin films |
| CN101950685A (en) * | 2010-08-23 | 2011-01-19 | 清华大学 | Polypyrrole microelectrode with three-dimensional structure and preparation method thereof |
| CN104701253A (en) * | 2013-12-09 | 2015-06-10 | 大连鑫永工业制造有限公司 | TFT substrate production process |
| CN108007617A (en) * | 2017-12-05 | 2018-05-08 | 浙江大学 | Pressure resistance type flexible touch sensation sensor and its manufacture method with micro- frustum of a cone substrate |
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| CN111347461B (en) | 2022-03-25 |
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