CN111341633B - Safety protection device for high-current negative hydrogen ion source - Google Patents
Safety protection device for high-current negative hydrogen ion source Download PDFInfo
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- CN111341633B CN111341633B CN202010109605.XA CN202010109605A CN111341633B CN 111341633 B CN111341633 B CN 111341633B CN 202010109605 A CN202010109605 A CN 202010109605A CN 111341633 B CN111341633 B CN 111341633B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
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Abstract
The invention discloses a safety protection device for a high-current negative hydrogen ion source, which comprises an ion source for generating negative hydrogen ions, a high-purity gas generator for supplying gas to the negative hydrogen ion source, and a power supply for supplying power to the negative hydrogen ion source, wherein a high-voltage equipotential body is arranged between the power supply and the negative hydrogen ion source, and the power supply supplies power to the negative hydrogen ion source through the high-voltage equipotential body; an anti-load discharge device is arranged between the power supply and the negative hydrogen ion source; a high-potential gas flow regulating valve is also arranged between the high-purity gas generator and the negative hydrogen ion source; the power supply is a single power supply sharing PCB power supply; the high-pressure equipotential body is a drawer type equipotential body; the ground potential of the power supply end and the negative hydrogen ion source end is the same ground potential, and the high potential of the high-voltage equipotential body end and the high potential of the negative hydrogen ion source end are the same high potential above-30 KV. According to the invention, all parts are organically combined, and all parts are mutually supported and mutually dependent after being combined, so that the problem of integral safety protection of the strong-current negative hydrogen ion source is solved.
Description
Technical Field
The invention relates to the field of accelerators, in particular to a safety protection device for a strong-current negative hydrogen ion source
Background
The beam source of any accelerator needs to be provided by an ion source, so that the quality and stability of the beam quality required by the ion source directly influence the working efficiency of the whole accelerator. The working principle of the filament-driven multimodal magnetic field ion source is as follows: the filament is heated to make primary electrons emitted by the filament material collide with hydrogen molecules in a multimodal magnetic field, the hydrogen molecules are constrained by the multimodal magnetic field, the hydrogen molecules undergo a complex dissociation and recombination process to form plasma, the required negative hydrogen ions are increased in specific row after fast electrons are filtered by a cusp magnetic field, then electrons in the hydrogen ions are filtered by a deflection magnetic field, and finally beam optical matching is carried out through a plurality of extraction electrodes, so that negative hydrogen ion beams are extracted.
The ion source comprises an ion source body, a water cooling part, a gas supply part and a power supply part in operation. The electric power supply part adds electric potentials with different voltages for different mechanical structures of the ion source, so that the density and the electron temperature of plasma in the ion source are improved, and the optical matching of negative hydrogen ions is optimized, and finally the negative hydrogen ions with high beam intensity are obtained.
Several problems are found in the actual operation process, which affect the normal operation of the ion source, and these problems are often very fatal problems affecting the safety of the ion source. As shown in fig. 1a, the first problem is that the gas is high-low impedance, because the conventional technology adopts the high-purity gas generator at the ground potential and the ion source at the high-voltage potential, and the gas between the high-purity gas generator and the regulating valve is in the high-impedance state, the gas between the gas flow regulating valve and the ion source is in the low-vacuum state, if the gas flow regulating valve is at the ground potential or the suspension potential, the gas breakdown phenomenon is easy to occur between the gas flow regulating valve and the ion source, which will cause the breakdown and leakage of the gas pipeline between the gas flow regulating valve and the ion source, the ion source discharges, and the vacuum state of normal operation cannot be satisfied in the cavity of the ion source, and the ion source cannot operate at this time. A second problem, the normal operation of the ion source is affected by damage to ground potential: although the ion source and the equipotential body are both 30 kilovolts (or higher), the main insulation downstream of the ion source is the ground potential, and the ground potential of the ion source and the power supply system are the same ground. Since the ion source potential is suspended at the high voltage side of 30kv (or higher), some electrons in the ion source are easily accumulated with potential, and among them, the ion situation is complex, and the low withstand voltage level between the ion source mechanical structures is easily ignited by the ground potential. Because the ground potential of the power supply system and the ground potential of the ion source are the same ground, the power supply is damaged when the ion source discharges and fires, and breakdown and the like of a PCB (printed circuit board) or an equipotential body part circuit (such as a rectifier bridge and the like) of the power supply part are caused; a third problem is that the power supply is compromised by the equipotential of the ion source and the equipotential body. Because the ion source and the equipotential body are both 30 kilovolts (or higher) in the same potential, if the plasma state in the ion source is poor due to factors such as insufficient gas purity and the like caused by unsatisfied water-cooling conductivity, the potential is easy to accumulate, and the accumulated voltage can generate impact on the equipotential body; or the newly assembled ion source is easy to strike fire due to microscopic burrs of mechanical materials in the exercise process, and the power supply part is damaged most directly when the striking fire occurs; and a fourth problem, how to solve the problem of high-voltage electric conduction breakdown low-voltage power supply of the anode of the ion source. The power supply for supplying power to the ion source is provided with four low-voltage power supplies and one high-voltage power supply, wherein one high-voltage power supply is used for generating negative hydrogen beam current under the high-voltage electric field by the ion source. Because one low-voltage power supply and one high-voltage power supply simultaneously supply power to the anode of the ion source (as shown in fig. 3b, the arc voltage power supply and the high-voltage power supply are different in ground potential and different in function), the negative 30KV voltage is applied to one low-voltage power supply due to the effect of anode conduction, so that the low-voltage power supply is broken down, and the fifth problem is that the plasma impedance in the ion source is a dynamic change value, so that the rated voltage current of the ion source changes along with the change of the plasma impedance, and the difficulty of the working stability of the power supply is increased.
Disclosure of Invention
The invention provides a safety protection device for a strong-current negative hydrogen ion source, which aims to solve the problem that high-low potential difference between the ion source and a high-purity gas generator is easy to generate gas breakdown; the problem that the power supply is damaged due to the fact that the ion source and the power supply are at the same ground potential and the accumulated charge of the ion source discharges to strike fire is solved; the problem that the equipotential body is damaged by the fact that the ion source and the equipotential body have the same high potential and when the ion source accumulates charge, the ion source discharges and fires is solved; when high voltage is applied to the ion source, the ion source conducts electricity at high voltage, so that the low voltage power supply breaks down.
The invention adopts the following technical scheme for solving the technical problems:
A safety arrangement for a high current negative hydrogen ion source comprising an ion source for generating negative hydrogen ions, a high purity gas generator for supplying gas to the negative hydrogen ion source, a power supply for supplying power to the negative hydrogen ion source, characterized in that: a high-voltage equipotential body for isolating the high voltage of the power supply is also arranged between the power supply and the negative hydrogen ion source, and the power supply supplies power to the negative hydrogen ion source through the high-voltage equipotential body; an anti-load discharge device is arranged between the power supply and the negative hydrogen ion source; a high-potential gas flow regulating valve for preventing gas breakdown is also arranged between the high-purity gas generator and the negative hydrogen ion source; the power supply is a single power supply sharing PCB power supply; the high-voltage equipotential body is a drawer type equipotential body for avoiding high-voltage ignition; the ground potential of the power supply end and the negative hydrogen ion source end is the same ground potential, and the high potential of the high-voltage equipotential body end and the high potential of the negative hydrogen ion source end are the same high potential above-30 KV.
The power supply comprises four paths of low-voltage power supplies and one path of high-voltage power supply, wherein the four paths of low-voltage power supplies comprise a suction electrode power supply, a plasma power supply, an arc voltage power supply and a filament power supply, the filament, the anode, the suction electrode and the plasma electrode of the negative hydrogen ion source are respectively powered by high-voltage equipotential bodies, and the one path of high-voltage power supply applies high voltage of more than-30 KV to the anode of the negative hydrogen ion source through the high-voltage equipotential bodies.
The single power supply sharing PCB power supply is that a plurality of PCBs of the single power supply are combined on one PCB, and particularly flying leads among the PCBs of the single power supply are improved to be printed circuit lines on the same PCB, so that redundant designs and integrating functions are removed under the condition of meeting technical index requirements, the number of the PCBs is reduced, and the interference to circuits among external leads is reduced.
An anti-load discharge device is arranged between the power supply and the negative hydrogen ion source, and the device is provided with an inductor which is arranged between the output end of the high-voltage power supply and the arc voltage output end of the high-voltage equipotential body and is used for preventing the damage of the high-voltage spike from the equipotential body to the power supply; the device is also provided with clamping circuits which are respectively arranged between the suction electrode power supply and the equipotential body suction electrode output end, between the plasma power supply and the equipotential body plasma output end, between the arc voltage power supply and the equipotential body arc voltage power supply output end and between the filament power supply and the equipotential body filament output 1 and the filament output 2, and the clamping circuits are used for reducing peak voltage brought by inductive load.
The drawer type equipotential body comprises an upper layer of drawer and a lower layer of drawer, and the upper layer of drawer and the lower layer of drawer are arranged on an equipotential body insulating bracket; the upper drawer and the lower drawer are spaced at a certain distance, two areas are arranged in front of and behind each drawer, a certain distance is also formed between the front area and the rear area, and the distance between the upper drawer and the lower drawer and between the front area and the rear area is the distance which meets the requirement that the high-voltage devices in the equipotential body are not ignited.
Each drawer comprises a front panel and a rear panel, the front panels of the upper drawer and the lower drawer are respectively provided with inversion and sampling terminals corresponding to four paths of low-voltage power supply, and the rear panels of the upper drawer and the lower drawer are provided with rated voltage or rated current output ends corresponding to four paths of low-voltage power supply; a path of high-voltage equipotential body device corresponding to each power supply is arranged between the front panel and the rear panel of the upper drawer layer and the lower drawer layer, and comprises an inversion and sampling terminal, a high-frequency power converter, a high-frequency transformer, a high-frequency rectifier, a high-voltage current detector and a rated voltage or current output end according to the execution sequence; the inversion and sampling terminal is used for feeding back rated output and rated output signals at the power supply side, and the high-frequency power converter is used for converting a direct-current signal into a high-frequency pulse signal so as to meet the requirement of a high-frequency transformer; the high-frequency transformer is used for increasing the voltage tolerance value from low voltage to a high voltage range and isolating the primary pole windings of the high-frequency transformer from each other at high voltage; the high-frequency rectifier is used for converting alternating current into direct current so as to meet the requirements of rated voltage or rated current output ends.
The filament power supply, the arc voltage power supply, the plasma power supply, the suction electrode power supply, the high voltage power supply and the drawer type equipotential body are arranged in a19 inch 42U standard cabinet.
And the voltage and current detectors of each path of high-voltage equipotential body device are respectively provided with a device based on a Hall DCCT measurement method, the device is used for measuring rated voltage and rated current received by a negative hydrogen ion source end, and the input is voltage and current output by a power supply to the negative hydrogen ion source.
Each power supply of the four low-voltage power supplies respectively comprises an inversion driving control circuit control unit, a PWM resonance control unit and an output voltage recovery circuit control unit, wherein the inversion driving control circuit control unit, the PWM resonance control unit and the output voltage recovery circuit control unit are used for realizing closed-loop control between a power supply end and a high-voltage equipotential body end, specifically, devices based on a Hall DCCT measurement method in voltage and current detectors corresponding to the high-voltage equipotential bodies and each power supply feed back detection data to the output voltage recovery circuit control unit of the power supply end, the output voltage recovery circuit control unit processes the data through the PWM resonance controller of the power supply end and then sends the processed data to the inversion driving control circuit control unit of the power supply end, the data processed by the inversion driving control circuit control unit of the power supply end controls the high-frequency power converter of the high-voltage equipotential body end, the high-frequency power converter of the high-voltage equipotential body end sends the data to the voltage and current detector through the high-frequency transformer and the high-frequency rectifier bridge, and the voltage and current detector feeds back measurement data to the output voltage recovery circuit control unit of the power supply end, so that closed-loop control of the power supply end and the equipotential body end is completed.
Advantageous effects of the invention
The invention organically combines the parts of the high-potential gas flow regulating valve, the single power supply sharing PCB power supply, the drawer type equipotential body and the anti-load discharging device, and after the combination, all the parts mutually support and mutually depend, thereby solving the problem of integral safety protection of the strong-current negative hydrogen ion source: the high-potential gas flow regulating valve solves the problem that the gas is broken down under low vacuum, so that the ion source can obtain normal gas supply; the single power supply sharing PCB power supply solves the problem that the power supply is damaged due to the impact of the ion source, and further ensures that the ion source obtains the normal power supply of the power supply; the drawer type equipotential body solves the problem that the equipotential body is ignited by the ion source and is impacted by high voltage, thereby blocking the leak that the equipotential body is damaged and the power supply is damaged, and further ensuring that the power supply normally supplies power to the ion source; the load discharge prevention device solves the problem that voltage spikes damage the high-voltage power supply and the low-voltage power supply, so that the safety of the power supply is further improved, and the safety of the ion source is further improved. The invention has the advantages of unavailability, interdependence and mutual support of each part, solves the novel problem of high safety of the negative hydrogen ion source, and fills the domestic blank.
Drawings
FIG. 1a is a schematic diagram of a problem in a negative hydrogen ion source application of the prior art;
FIG. 1b is a schematic diagram of a safety protection device for a high-current negative hydrogen ion source according to the present invention;
FIG. 2 is a schematic diagram of a single power supply shared PCB board of the present invention;
FIG. 3a is a schematic diagram of a high voltage isopotential for powering an ion source in accordance with the present invention;
FIG. 3b is a schematic diagram of the power logic relationship;
FIG. 3c is a schematic diagram of a negative hydrogen ion source mechanical structure;
FIG. 4 is a schematic diagram of a high potential gas flow regulator valve according to the present invention;
FIG. 5 is a schematic diagram of a power supply device for preventing load discharge damage according to the present invention;
FIG. 6a is a front view of a drawer type entity of the present invention;
FIG. 6b is a side view of a drawer-type equivalent entity of the present invention;
FIG. 6c is a top view of a drawer type, etc., entity of the present invention;
FIG. 7 is a schematic diagram of closed loop control between a power supply and an equipotential body according to the present invention;
Detailed Description
Principle of design of the invention
1. Difficulties in designing the invention
The difficulty is that the ion source and the power supply are at the same ground potential and the power supply is easily damaged. Because the main insulation downstream of the ion source is the ground potential, the ground potential and the power supply system are the same ground, and because some electrons in the ion source are easy to accumulate the potential and the ion condition is complex, the low-voltage-resistant level between the mechanical structures of the ion source is easy to strike fire through the ground potential, so that the power supply is damaged.
Difficulty two: the ion source and the equipotential are the same in high potential and the equipotential body is easy to impact. Because the ion source is connected with the equipotential body, and the potential of the ion source and the equipotential body is-30 kilovolts (or higher), and because some electrons in the ion source are easy to accumulate potential and the ion condition is complex, the equipotential body is easy to strike fire through a high-voltage circuit by the low-voltage class between the mechanical structures of the ion source.
And the difficulty is three: the arc voltage source would be damaged if the high voltage power was applied directly to the anode of the ion source. As shown in fig. 3, if an equipotential body is not provided, the arc voltage power supply at the left side of the power supply end of fig. 3 and the high voltage power supply at the right side of the power supply end of fig. 3 supply power to the anode of the ion source, and since the anode is a metal conductor, the high voltage from the right side-30 KV is transmitted to the output end of the arc voltage power supply leftward through the anode cylinder, thereby causing the arc voltage power supply at the left side of fig. 3 to be broken down.
2. Design principle ____ of single power supply shared PCB solves problem of difficulty one
When the accumulated charges of the ion source are impacted to the power supply through the ground potential, if the circuits inside the power supply are too many and the space is crowded, the heat dissipation is slow, and the ignition is further formed. Before the invention is improved, each power supply is provided with 3 PCB boards, the total number of 4 power supplies is 12 PCB boards, and more circuits are arranged among the 3 PCB boards of each power supply. After improvement, 9 modules of 3 PCB boards of each power supply are integrated on one PCB board, and the connecting lines between the 9 modules are improved to be printed circuits on the PCB board, so that space occupation of flying line connection between the 3 PCB boards of each power supply is effectively reduced, and the risk of ignition caused by power supply space crowding is further reduced.
3. The design principle ____ of drawer type equipotential body solves the problem of the second difficulty
The equipotential body has two functions, namely, the first function is to isolate the high voltage of an external high voltage power supply, and the second function is to prevent internal components from being ignited. The purpose of designing the equipotential body structure as a drawer type equipotential body is to solve the problem of ignition among components in the equipotential body caused by impact of accumulated charges of the ion source to the equipotential body. The drawer type equipotential body is divided into upper and lower layers, so that the problem of increasing the upper and lower gaps between components is solved, and the front and rear gaps between the components are increased by the front and rear division of the drawer type equipotential body, so that the purposes of quick heat dissipation and good ventilation are realized; another means for preventing internal components from sparking is to increase the capacity of the components to resist high pressure by expanding the capacity of the components, which necessarily increases the volume of the components, which necessarily requires expanding space. For example, the degree of high voltage resistance after capacitor expansion is increased, and accordingly, the occupied space of the capacitor is increased, so that the gap between the potential components is also increased. The drawer type equipotential body adopted by the invention, as shown in fig. 6a to 6c, has proper distance between components and parts, and achieves the minimum space occupation on the premise of meeting the requirement of no ignition. Filament power supply, arc voltage power supply, plasma power supply, suction power supply, high voltage power supply and drawer type equipotential body are arranged in a standard cabinet of 19 inches 42U.
4. The principle ___ of equipotential body isolation high voltage-30 KV solves the problem of the third difficulty
1. Composition of ion source and where ion source requires power
As shown in fig. 3b, the ion source comprises a filament, an anode surrounding the filament, a first layer of insulating flange at the bottom of the anode, a plasma electrode under the first layer of insulating flange, a second layer of insulating flange under the plasma electrode, a suction electrode under the second layer of insulating flange, and a third layer of insulating flange under the suction electrode from top to bottom. When the ion source works, power needs to be supplied to a filament, an anode barrel, a plasma electrode and a suction electrode, wherein the filament comprises a filament 1 and a filament 2, and therefore, the power supply of fig. 1 needs to be divided into 5 paths to supply power to the ion source.
2. Why the power supply cannot directly supply power to the ion source
First, 5 paths of power outputs are low-voltage power sources. The filament power supply outputs hundreds of ampere rated current, the arc voltage power supply outputs tens of ampere rated current, the suction power supply outputs thousands of volts rated voltage, and the plasma power supply outputs tens of volts rated voltage.
And the second condition for generating strong current negative hydrogen ions is high voltage of more than 30 KV. The existing 5-path low-voltage output can not meet the condition of negative hydrogen ion generation, and the required high-current strong negative hydrogen ion beam can be generated by adding more than 30KV high voltage. Since negative hydrogen ions drift downward, an electric field capable of enabling the negative hydrogen ions to obtain energy along the extraction duct needs to be applied to the extraction direction of the ion source, and the first scheme is as follows: a positive potential is applied to the bottom of the ion source (the bottom of the ion source is grounded to the ground potential), but the negative hydrogen ion beam in the extracted beam has a low duty ratio due to the narrow space at the bottom of the ion source; the second scheme is to apply a suspension-30 KV voltage (-30 KV is generated by a high-voltage power supply), the input end of the high-voltage power supply is 220V, and the output end of the high-voltage power supply is 30KV, wherein the suspension voltage is applied to a position above the ground electrode instead of the ground electrode. The principle of applying the-30 KV voltage is as follows: according to the relative potential principle, if a-30 KV suspension voltage is applied to the ion source, the electrode of the ion source can generate positive potential, so that a higher negative electric field is generated in the direction of negative hydrogen particle extraction, and negative hydrogen ions can be smoothly extracted because of negative charge.
Thirdly, the safety is ensured only when the high voltage above minus 30KV is applied. If the high voltage power supply applies a voltage of-30 KV to the anode of the ion source, and the arc voltage power supply also supplies power to the anode of the ion source (-30 KV is a relative potential with respect to the other power supplies, the arc voltage power supply is a relative potential with respect to the other power supplies), the anode is conductive, and the anode applies the voltage of-30 KV to the arc voltage output end of the power supply end to burn the power supply. Therefore, -30KV of high voltage power supply cannot be directly applied to the output end of arc voltage power supply of ion source, but must be applied in other ways.
3. Principle of isolating high voltage by equipotential body
The solution of the invention is shown in fig. 7, an equipotential body is added between a power supply and an ion source, and the principle of equipotential body isolation high voltage is shown in fig. 6a, 6b, 6c and 7: after the four-way inversion and sampling terminal enters the equipotential body, the primary winding of the high-frequency transformer is isolated at high voltage through the high-frequency transformer of the equipotential body, so that the high voltage of the secondary of the transformer can not influence the low voltage of the primary. And the ultra-microcrystal (also called nanocrystalline) iron core material with high saturation magnetic flux density is adopted, so that the volume of the high-frequency transformer is reduced, and the insulation strength is increased. The method comprises the following specific steps: the dc signal outputted from the power supply needs to be changed into a high-frequency pulse signal before passing through the high-frequency transformer, the high-frequency pulse signal is changed into a high-voltage signal after passing through the transformer, and the high-frequency transformer only increases the tolerable amplitude to-30 KV after changing into a high-voltage signal, but does not increase the actual amplitude, and then becomes a dc signal (rated voltage or current output) after passing through the high-frequency rectifier bridge. When the high-frequency transformer increases the tolerant amplitude to-30 KV, the high-frequency transformer separates low voltage from high voltage, and when the anode of the ion source receives-30 KV voltage and the-30 KV voltage enters an equipotential body along the conductive loop, the-30 KV voltage can only reach the high-voltage end of the high-frequency transformer through the high-frequency rectifier bridge and then is cut off. In a word, as the equipotential body is added with the high-frequency power converter, the high-frequency transformer and the high-frequency rectifier bridge between the inversion and sampling terminals and the rated voltage and current output ends, the equipotential body can isolate the high voltage.
Based on the principle of the invention, the invention designs a safety protection device for a strong-current negative hydrogen ion source.
A safety protection device for a high current negative hydrogen ion source is shown in fig. 1b, comprising an ion source for generating negative hydrogen ions, a high purity gas generator for supplying gas to the negative hydrogen ion source, and a power supply for supplying power to the negative hydrogen ion source, wherein the safety protection device is characterized in that: a high-voltage equipotential body for isolating the high voltage of the power supply is also arranged between the power supply and the negative hydrogen ion source, and the power supply supplies power to the negative hydrogen ion source through the high-voltage equipotential body; a device for preventing the power supply from being damaged by load discharge is also arranged between the power supply and the negative hydrogen ion source; a high-potential gas flow regulating valve for preventing gas breakdown is also arranged between the high-purity gas generator and the negative hydrogen ion source; the power supply is a single power supply sharing PCB power supply; the high-voltage equipotential body is a drawer type equipotential body for avoiding high-voltage ignition; the ground potential of the power supply end and the negative hydrogen ion source end is the same ground potential, and the high potential of the high-voltage equipotential body end and the high potential of the negative hydrogen ion source end are the same high potential above-30 KV.
As shown in fig. 5, the power supply includes four low-voltage power supplies including a voltage-absorbing power supply (rated voltage output), a plasma power supply (rated voltage output), an arc voltage power supply (rated current output), and a filament power supply (rated current output), which respectively supply power to the filament, the anode, the voltage-absorbing electrode, and the plasma electrode of the negative hydrogen ion source through high-voltage equipotential bodies, and one high-voltage power supply which applies a high voltage of more than-30 KV to the arc voltage output end of the negative hydrogen ion source through the high-voltage equipotential bodies.
As shown in fig. 2, the single power source sharing PCB power source is to combine multiple PCBs of the single power source onto one PCB, specifically improve flying leads between the multiple PCBs of the single power source into printed circuit lines on the same PCB, thereby eliminating redundant design and integration functions under the condition of meeting technical index requirements, reducing the number of PCBs, and reducing interference between external leads to circuits.
As shown in fig. 5, an anti-load discharge device is arranged between the power supply and the negative hydrogen ion source, and the device is provided with an inductor which is arranged between the output end of the high-voltage power supply and the output end of the arc voltage of the high-voltage equipotential body and is used for preventing the damage of the high-voltage spike from the equipotential body to the power supply; the device is also provided with clamping circuits which are respectively arranged between the suction electrode power supply and the equipotential body suction electrode output end, between the plasma power supply and the equipotential body plasma output end, between the arc voltage power supply and the equipotential body arc voltage power supply output end and between the filament power supply and the equipotential body filament output 1 and the filament output 2, and the clamping circuits are used for reducing peak voltage brought by inductive load.
As shown in fig. 6a and 6b, the drawer type equipotential body comprises an upper layer of drawer and a lower layer of drawer, and the upper layer of drawer and the lower layer of drawer are arranged on an equipotential body insulating bracket; the upper drawer and the lower drawer are spaced by a certain distance as shown in fig. 6a, two areas are arranged in front of and behind each drawer, a certain distance is also formed between the front area and the rear area as shown in fig. 6b, and the distance between the upper drawer and the lower drawer and the distance between the front area and the rear area are the distances for meeting the requirement that high-voltage devices in the equipotential body are not ignited.
As shown in fig. 6a and 6c, each drawer layer includes a front panel and a rear panel, the front panels of the upper drawer layer and the lower drawer layer are respectively provided with inversion and sampling terminals corresponding to four low-voltage power supplies, and the rear panels of the upper drawer layer and the lower drawer layer are provided with rated voltage or rated current output ends corresponding to the four low-voltage power supplies; a path of high-voltage equipotential body device corresponding to each power supply is arranged between the front panel and the rear panel of the upper drawer layer and the lower drawer layer, and comprises an inversion and sampling terminal, a high-frequency power converter, a high-frequency transformer, a high-frequency rectifier, a high-voltage current detector and a rated voltage or current output end according to the execution sequence; the inversion and sampling terminal is used for feeding back rated output and rated output signals at the power supply side, and the high-frequency power converter is used for converting a direct-current signal into a high-frequency pulse signal so as to meet the requirement of a high-frequency transformer; the high-frequency transformer is used for increasing the voltage tolerance value from low voltage to a high voltage range and isolating the primary pole windings of the high-frequency transformer from each other at high voltage; the high-frequency rectifier is used for converting alternating current into direct current so as to meet the requirements of rated voltage or rated current output ends.
The filament power supply, the arc voltage power supply, the plasma power supply, the suction electrode power supply, the high voltage power supply and the drawer type equipotential body are arranged in a19 inch 42U standard cabinet.
As shown in fig. 6b and fig. 6c, the voltage and current detectors of each path of high-voltage equipotential body device are respectively provided with a device based on a hall DCCT measurement method, and the device is used for measuring rated voltage and rated current received by a negative hydrogen ion source end, and the input is voltage and current output to the negative hydrogen ion source by a power supply.
As shown in fig. 7, each power supply of the four low-voltage power supplies includes an inversion driving control circuit control unit, a PWM resonance control unit, and an output voltage extraction circuit control unit, where the inversion driving control unit and the output voltage extraction circuit control unit are configured to implement closed-loop control between a power supply terminal and a high-voltage equipotential body terminal, specifically, a device based on a hall DCCT measurement method in a voltage-current detector corresponding to each power supply and configured to feed back detection data to the output voltage extraction circuit control unit of the power supply terminal, where the output voltage extraction circuit control unit processes the data by the PWM resonance controller of the power supply terminal, and then sends the processed data to the inversion driving control circuit control unit of the power supply terminal, where the data processed by the inversion driving control circuit control unit of the power supply terminal controls a high-frequency power converter of the high-voltage equipotential body terminal, and where the high-frequency power converter of the high-voltage equipotential body terminal sends the data to a voltage-current detector through a high-frequency transformer and a high-frequency rectifier bridge, and where the voltage-current detector feeds back measurement data to the output voltage extraction circuit control unit of the power supply terminal, thereby completing closed-loop control of the power supply terminal and equipotential body terminal.
Embodiment one: method for installing power supply and equipotential body in cabinet
The mounting positions of the power supply and equipotential body in the cabinet are shown in fig. 5, with 5 power supplies above and equipotential body below. The cabinet adopts a standard cabinet with the height of 19 inches and 42U, and the height of the cabinet is an integral multiple of U. The rear panel of the cabinet is designed to be a hinge side door. The heat dissipation design is considered among the power supplies of the cabinet and the cover plate at the top of the cabinet. The power supply is sequentially a high-voltage power supply, a plasma power supply, a suction power supply, an arc voltage power supply and a filament power supply from bottom to top. The five power supplies are reasonably distributed in space according to requirements. The high-voltage power supply is connected with a 220V alternating current power supply, the plasma power supply, the pole sucking power supply and the arc voltage power supply, and the filament power supply is respectively connected with an alternating current 380V power supply.
The power supply is provided with a high-voltage equipotential body support frame below, a high-voltage equipotential body module insulating support frame below the high-voltage equipotential body support frame, and the equipotential body is arranged on the high-voltage equipotential body support frame. As shown in fig. 6a, the high-voltage equipotential body module insulating support is fixed on a standard case of 19 inches 42U, a high-voltage equipotential body support frame (fig. 6 b) is fixed on the high-voltage equipotential body module insulating support frame (fig. 6 b), two groups of drawer type equipotential bodies are mounted on the high-voltage equipotential body support frame, and after the drawer type equipotential body module insulating support frame is mounted in place, the front side panel shown in fig. 6a is fixed through screws. And then correspondingly connecting the sampling of the equipotential body side power supply with the inversion terminal and the sampling of the power supply side with the inversion terminal respectively. As shown in fig. 5, the output end of the high-voltage power supply and the output end of the arc voltage power supply are connected with an inductance device. The high-voltage equipotential body is connected with a plasma power supply, a suction electrode power supply and an arc voltage power supply through a clamping circuit, and a filament power supply is used for four power supplies. After the circuit connection is completed, the four power output ends of the plasma power output, the anode suction power output and the arc voltage power output can be connected to an ion source, wherein the filament power output 1 and the filament power output 2 are connected to the ion source. Meanwhile, a high-purity gas generator pipeline is connected to one end of a gas flow regulating valve (arranged on a high-voltage potential), and the other end of the gas flow regulating valve is connected to an ion source. During maintenance, each drawer type equipotential body can be respectively moved out of the high-pressure equipotential body supporting frame.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (7)
1. A safety arrangement for a high current negative hydrogen ion source comprising an ion source for generating negative hydrogen ions, a high purity gas generator for supplying gas to the negative hydrogen ion source, a power supply for supplying power to the negative hydrogen ion source, characterized in that: a high-voltage equipotential body for isolating the high voltage of the power supply is also arranged between the power supply and the negative hydrogen ion source, and the power supply supplies power to the negative hydrogen ion source through the high-voltage equipotential body; an anti-load discharge device is arranged between the power supply and the negative hydrogen ion source; a high-potential gas flow regulating valve for preventing gas breakdown is also arranged between the high-purity gas generator and the negative hydrogen ion source; the power supply is a single power supply sharing PCB power supply; the high-voltage equipotential body is a drawer type equipotential body for avoiding high-voltage ignition; the ground potential of the power supply end and the negative hydrogen ion source end is the same ground potential, and the high potential of the high-voltage equipotential body end and the high potential of the negative hydrogen ion source end are the same high potential above-30 KV;
The single power supply sharing PCB power supply is characterized in that a plurality of PCBs of the single power supply are combined on one PCB, and particularly flying leads among the PCBs of the single power supply are improved to be printed circuit lines on the same PCB, so that redundant design and integration functions are removed under the condition of meeting technical index requirements, the number of the PCBs is reduced, and the interference to circuits among external leads is reduced;
The drawer type equipotential body comprises an upper layer of drawer and a lower layer of drawer, and the upper layer of drawer and the lower layer of drawer are arranged on an equipotential body insulating bracket; the upper drawer and the lower drawer are spaced at a certain distance, two areas are arranged in front of and behind each drawer, a certain distance is also formed between the front area and the rear area, and the distance between the upper drawer and the lower drawer and between the front area and the rear area is the distance which meets the requirement that the high-voltage devices in the equipotential body are not ignited.
2. A safety arrangement for a high current negative hydrogen ion source according to claim 1, wherein: the power supply comprises four paths of low-voltage power supplies and one path of high-voltage power supply, wherein the four paths of low-voltage power supplies comprise a suction electrode power supply, a plasma power supply, an arc voltage power supply and a filament power supply, the filament, the anode, the suction electrode and the plasma electrode of the negative hydrogen ion source are respectively powered by high-voltage equipotential bodies, and the one path of high-voltage power supply applies high voltage of more than-30 KV to the anode of the negative hydrogen ion source through the high-voltage equipotential bodies.
3. A safety arrangement for a high current negative hydrogen ion source according to claim 1, wherein: an anti-load discharge device is arranged between the power supply and the negative hydrogen ion source, and the device is provided with an inductor which is arranged between the output end of the high-voltage power supply and the arc voltage output end of the high-voltage equipotential body and is used for preventing the damage of the high-voltage spike from the equipotential body to the power supply; the device is also provided with clamping circuits which are respectively arranged between the suction electrode power supply and the equipotential body suction electrode output end, between the plasma power supply and the equipotential body plasma output end, between the arc voltage power supply and the equipotential body arc voltage power supply output end and between the filament power supply and the equipotential body filament output 1 and the filament output 2, and the clamping circuits are used for reducing peak voltage brought by inductive load.
4. A safety arrangement for a high current negative hydrogen ion source according to claim 1, wherein: each drawer comprises a front panel and a rear panel, the front panels of the upper drawer and the lower drawer are respectively provided with inversion and sampling terminals corresponding to four paths of low-voltage power supply, and the rear panels of the upper drawer and the lower drawer are provided with rated voltage or rated current output ends corresponding to four paths of low-voltage power supply; a path of high-voltage equipotential body device corresponding to each power supply is arranged between the front panel and the rear panel of the upper drawer layer and the lower drawer layer, and comprises an inversion and sampling terminal, a high-frequency power converter, a high-frequency transformer, a high-frequency rectifier, a high-voltage current detector and a rated voltage or current output end according to the execution sequence; the inversion and sampling terminal is used for feeding back rated output and rated output signals at the power supply side, and the high-frequency power converter is used for converting a direct-current signal into a high-frequency pulse signal so as to meet the requirement of a high-frequency transformer; the high-frequency transformer is used for increasing the voltage tolerance value from low voltage to a high voltage range and isolating the primary pole windings of the high-frequency transformer from each other at high voltage; the high-frequency rectifier is used for converting alternating current into direct current so as to meet the requirements of rated voltage or rated current output ends.
5. A safety arrangement for a high current negative hydrogen ion source according to claim 2, wherein: the filament power supply, the arc voltage power supply, the plasma power supply, the suction electrode power supply, the high voltage power supply and the drawer type equipotential body are arranged in a 19 inch 42U standard cabinet.
6. The safety arrangement for a high current negative hydrogen ion source of claim 4, wherein: the voltage and current detectors of the high-voltage equipotential body device are respectively provided with a device based on a Hall DCCT measuring method, the device is used for measuring rated voltage and rated current received by a negative hydrogen ion source end, and the voltage and the current are input into a power supply and output to the negative hydrogen ion source.
7. A safety protection device for a high current negative hydrogen ion source according to claim 2 or 5, wherein: each power supply of the four low-voltage power supplies respectively comprises an inversion driving control circuit control unit, a PWM resonance control unit and an output voltage recovery circuit control unit, wherein the inversion driving control circuit control unit, the PWM resonance control unit and the output voltage recovery circuit control unit are used for realizing closed-loop control between a power supply end and a high-voltage equipotential body end, specifically, devices based on a Hall DCCT measurement method in voltage and current detectors corresponding to the high-voltage equipotential bodies and each power supply feed back detection data to the output voltage recovery circuit control unit of the power supply end, the output voltage recovery circuit control unit processes the data through the PWM resonance controller of the power supply end and then sends the processed data to the inversion driving control circuit control unit of the power supply end, the data processed by the inversion driving control circuit control unit of the power supply end controls the high-frequency power converter of the high-voltage equipotential body end, the high-frequency power converter of the high-voltage equipotential body end sends the data to the voltage and current detector through the high-frequency transformer and the high-frequency rectifier bridge, and the voltage and current detector feeds back measurement data to the output voltage recovery circuit control unit of the power supply end, so that closed-loop control of the power supply end and the equipotential body end is completed.
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