CN111327228A - Inchworm type piezoelectric linear driver - Google Patents
Inchworm type piezoelectric linear driver Download PDFInfo
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- CN111327228A CN111327228A CN202010268890.XA CN202010268890A CN111327228A CN 111327228 A CN111327228 A CN 111327228A CN 202010268890 A CN202010268890 A CN 202010268890A CN 111327228 A CN111327228 A CN 111327228A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention provides an inchworm-type piezoelectric linear driver, and relates to the technical field of inchworm-type driving equipment. The device comprises a sliding table, a bearing table, a driving assembly and a clamping assembly. The sliding table is in sliding fit with the bearing table. The clamping assembly is clamped on the sliding table and can be selectively separated from the sliding table. The driving assembly comprises a first driving device, a first bridge type amplification structure and a second bridge type amplification structure, and the first driving device is connected to the first bridge type amplification structure and used for driving the first bridge type amplification structure to deform. The first bridge type amplification structure is connected to the second bridge type amplification structure and is used for driving the second bridge type amplification structure to deform, one end of the second bridge type amplification structure is connected to the bearing table, and the other end of the second bridge type amplification structure is connected to the clamping assembly and can drive the clamping assembly to slide relative to the bearing table when deforming. The inchworm-type piezoelectric linear driver provided by the invention can solve the problem that the inchworm-type piezoelectric linear driver is small in output displacement.
Description
Technical Field
The invention relates to the technical field of inchworm type driving equipment, in particular to an inchworm type piezoelectric linear driver.
Background
In recent years, with the rapid development of information technology and precision testing technology, the demand for large-scale optical devices (such as microlens arrays, micro mirror arrays, gratings) having a micro-structured surface has been increasing. The unit size of the microstructure on the surface of the optical device is generally in the micrometer range, while the surface size of the whole microstructure reaches the millimeter or centimeter range. To obtain these large optical devices, either for their fabrication or for measuring the topography of their fabricated surfaces, large stroke, high resolution precision positioning systems are required, and the actuators for such precision positioning systems must also have large stroke, high resolution.
At present, the driving modes of a large-stroke and high-resolution precision positioning system mainly comprise a linear driver, a combination of the linear driver and a piezoelectric actuator, a novel linear driver and the like. The linear driver has higher positioning accuracy and response speed, but the linear driver is easy to heat due to the existence of friction and elastic deformation, the control is complex, and the resolution ratio is difficult to reach the nanometer level; the macro-micro dual driving mode combining the linear driver and the piezoelectric actuator has the advantages of a large stroke positioning technology and a piezoelectric actuator micro positioning technology, so that the whole system has better performance, but the system is redundant, the system structure and control are complicated, and the design difficulty and complexity of the control system are increased; the novel linear driver mainly comprises a magnetostrictive linear driver, an electrostrictive linear driver, an electrostatic linear driver and a piezoelectric linear driver, wherein the piezoelectric rotary driver has the advantages of small volume, high displacement resolution, large output force, high response speed, neglectable influence of hysteresis nonlinearity of the piezoelectric actuator during rapid motion, no heating and the like, and has more advantages in practical application.
The piezoelectric linear drivers can be classified into ultrasonic resonance type, inertial type and inchworm type according to different driving principles. The ultrasonic resonance type structure is compact, the volume is small, the weight is light, the miniaturization and the light weight are easy to realize, but the friction force for driving is small, so the output force is small, and meanwhile, the efficiency and the motion precision are relatively low because the friction abrasion is serious; the inertia principle and the structure are simple, the multi-degree-of-freedom motion can be realized, but the positioning is difficult to maintain and the output force is small because of no clamping mechanism; the inchworm type overcomes the defects of small ultrasonic resonance type output force, low efficiency and motion precision, small inertia type output force and unstable positioning, and has the advantages of large output force, large power density, stable positioning and the like.
However, the current inchworm type piezoelectric linear actuator has the following defects: the volume is large and the structure is not compact; the clamping displacement or releasing displacement of the clamping mechanism is mostly provided by a piezoelectric actuator, and the output displacement of the piezoelectric actuator is often very small, so that the clamping mechanism can be reliably clamped and released, and the parts of the clamping mechanism are required to have very high processing and assembling precision.
Disclosure of Invention
The problem solved by the invention is how to solve the problem that the inchworm type piezoelectric linear driver is small in output displacement.
In order to solve the above problems, the present invention provides an inchworm-type piezoelectric linear actuator, which includes a sliding table, a bearing table, a driving assembly and a clamping assembly.
The sliding table is in sliding fit with the bearing table.
The clamping assembly is clamped on the sliding table and can be selectively disengaged from the sliding table.
The driving assembly comprises a first driving device, a first bridge type amplification structure and a second bridge type amplification structure, and the first driving device is connected to the first bridge type amplification structure and used for driving the first bridge type amplification structure to deform. The first bridge type amplification structure is connected with the second bridge type amplification structure and used for driving the second bridge type amplification structure to deform, one end of the second bridge type amplification structure is connected with the bearing table, and the other end of the second bridge type amplification structure is connected with the clamping assembly and can drive the clamping assembly to slide relative to the bearing table when deforming.
The inchworm-type piezoelectric linear driver provided in the embodiment can amplify the output displacement of the first driving device through the first bridge type amplification structure arranged in the driving assembly and then transmit the amplified output displacement to the second bridge type amplification structure, the displacement output by the first bridge type amplification structure is further amplified by the second bridge type amplification structure and then output again, the output displacement of the first driving device can be amplified for the second time through the first bridge type amplification structure and the second bridge type amplification structure, and the problem of small output displacement of the inchworm-type piezoelectric linear driver can be solved.
Optionally, the first bridge amplifying structure comprises a first flexible connecting plate, two first connecting portions and two first rigid bodies.
The two first connecting portions and the two first rigid bodies enclose a quadrangle, the two first connecting portions are arranged oppositely, and the first connecting portions are connected with the first rigid bodies through the first flexible connecting plates.
The two ends of the first driving device are respectively connected to the two first rigid bodies, and the two first rigid bodies can be driven to be away from or close to each other.
Two first connecting portions are connected to the second bridge type amplification structure and can drive the deformation of the second bridge type amplification structure.
The first rigid bodies, the first flexible connecting plates and the first connecting parts form a bridge type amplification structure together, so that when the first driving device outputs displacement between the two first rigid bodies, the displacement can be amplified by the bridge type amplification structure and then transmitted to the two first connecting parts, the displacement after the displacement is amplified can be output by the two first connecting parts, and the amplification of the output displacement of the first driving device is realized.
Optionally, the second bridge amplifying structure comprises a second flexible connecting plate, two second connecting portions and two second rigid bodies.
The two second connecting parts and the two second rigid bodies enclose a quadrangle, the two second connecting parts are arranged oppositely, and the second connecting parts are connected with the second rigid bodies through second flexible connecting plates.
One of the second connecting portions is connected to the susceptor, and the other of the second connecting portions is connected to the clamping assembly.
The two first connecting portions are respectively connected to the two second rigid bodies and located between the two second rigid bodies.
The second rigid bodies, the second flexible connecting plates and the second connecting parts form a bridge type amplification structure together, so that when the displacement is output to the two second rigid bodies by the two first connecting parts, the displacement can be amplified and then transmitted to the two second connecting parts by the bridge type amplification structure, and the amplified output of the displacement is realized.
Optionally, the two first connecting portions and the two first rigid bodies form a first plane together, the two second connecting portions and the two second rigid bodies form a second plane together, and the first plane and the second plane are arranged at an included angle.
Through foretell setting mode, can avoid the first flexible link plate in the first bridge type amplification structure to produce the second flexible link plate in the second bridge type amplification structure when producing deformation and influence, and then can guarantee drive assembly's reliability.
Optionally, a straight line where the extending direction of the second flexible connecting plate is located and a connecting line of the two second rigid bodies form an included angle.
When the first bridge type amplification structure outputs displacement and drives the two second rigid bodies to be close to or away from each other, the second flexible connecting plate can be ensured to drive the two second connecting parts to be close to or away from each other, and the situation that the second flexible connecting plate is parallel to the two second rigid bodies to cause the second flexible connecting plate to be incapable of transferring displacement is avoided.
Optionally, a plurality of the first flexible connecting plates are arranged at intervals between the first connecting portion and the first rigid body.
Can guarantee the holistic intensity of first bridge type amplification structure, can guarantee the stability of first bridge type amplification structure output displacement volume simultaneously.
Optionally, a straight line where the extending direction of the first flexible connecting plate is located and a connecting line of the two first rigid bodies form an included angle.
When two first rigid bodies are driven to be close to or far away from each other, the first flexible connecting plate can be guaranteed to drive the two first connecting portions to be close to or far away from each other, and the situation that the first flexible connecting plate is parallel to the two first rigid bodies to cause the fact that the first flexible connecting plate cannot transmit displacement is avoided.
Optionally, the clamping assembly includes a moving stage body and a clamping structure, the moving stage body is slidably connected to the carrier, and one end of the second bridge amplification structure is connected to the moving stage body.
The clamping structure comprises a third connecting part, a second driving device, two third flexible connecting plates and two clamping rods.
The third connecting part is fixedly connected with the moving table body.
The two clamping rods are respectively connected to two opposite sides of the third connecting part through two third flexible connecting plates, and the third flexible connecting plates are connected to the middle parts of the clamping rods.
The both ends of second drive arrangement connect respectively in two the tip of clamping pole, second drive arrangement can extend in order to drive the other end of clamping pole is close to each other and breaks away from the slip table, perhaps second drive arrangement can shorten in order to drive the other end of clamping pole is kept away from each other and is held in the slip table.
Can form lever structure through clamping pole and third flexible connecting plate, and then can amplify second drive arrangement's output displacement through this lever structure, and then make the output displacement stability of the second end of clamping pole good, make the clamp subassembly release or clamp the slip table very easily, thereby reduce the processing and the assembly precision that constitute inchworm formula piezoelectricity linear actuator spare part, reduce the cost of manufacture.
Optionally, the clamping rod includes a connecting rod and a clamping portion, the two ends of the second driving device are respectively connected to the ends of the two connecting rods, the clamping portion is convexly disposed at one end of the connecting rod away from the second driving device, and the two clamping portions are respectively located at the two outer sides of the connecting rod, and the clamping portion can be clamped on the sliding table.
Optionally, the number of the clamping assemblies is two, the number of the driving assemblies is two, the two clamping assemblies are disposed between the two driving assemblies and are respectively connected to the two driving assemblies, and the two clamping assemblies and the two driving assemblies are symmetrically disposed.
The inchworm type piezoelectric linear driver further comprises a flexible hinge, and the two clamping assemblies are connected through the flexible hinge.
Through two clamping assemblies of flexible hinged joint, can make the clamping assembly when the return, can provide certain additional action through flexible hinge, and then guarantee the accuracy of clamping assembly return, improve control accuracy.
Optionally, an installation cavity is formed in the bearing table, the clamping assembly and the driving assembly are arranged in the installation cavity, part of the clamping assembly extends out of the installation cavity and can be clamped on the sliding table, and the sliding table is arranged above the installation cavity.
Drawings
FIG. 1 is a schematic structural diagram of an inchworm-type piezoelectric linear actuator provided in an embodiment of the present invention;
FIG. 2 is a schematic diagram of a partial structure of an inchworm-type piezoelectric linear actuator provided in an embodiment of the present invention;
FIG. 3 is a schematic diagram of a partial structure of an inchworm-type piezoelectric linear actuator provided in an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a driving assembly provided in an embodiment of the present invention;
FIG. 5 is a schematic diagram of a partial structure of a driving assembly provided in an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a second enlarged bridge structure provided in an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a clamping structure provided in an embodiment of the present invention;
fig. 8 is a schematic structural view of a slide table provided in the embodiment of the present invention;
FIG. 9 is a piezoelectric timing diagram for driving the inchworm-type piezoelectric linear actuator.
Description of reference numerals:
10-inchworm type piezoelectric linear driver; 100-a drive assembly; 110-a first drive; 120-a first bridge amplifying structure; 121-a first connection; 122-a first rigid body; 123-a first flexible connecting plate; 130-a second bridge amplifying structure; 131-a second connecting portion; 1311-connecting block; 1312-a push block; 132-a second rigid body; 133-a second flexible connecting plate; 200-a clamping component; 210-a clamping structure; 211-second driving means; 212-a third connection; 213-a third flexible connecting plate; 214-clamping bar; 2141-a connecting rod; 2142-a clamping portion; 220-a motion table body; 300-a carrier table; 310-a guide rail; 320-mounting a cavity; 330-mounting pins; 400-a slide table; 410-a slip fit; 411-a chute; 420-a table main body; 500-flexible hinge.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1, in the present embodiment, an inchworm-type piezoelectric linear actuator 10 is provided, and the inchworm-type piezoelectric linear actuator 10 can solve the problem of small output displacement of the inchworm-type piezoelectric linear actuator 10.
Referring to fig. 1, fig. 2 and fig. 3, the inchworm-type piezoelectric linear actuator 10 includes a sliding stage 400, a carrier stage 300, a driving assembly 100 and a clamping assembly 200. The carrier 300 is configured to be fixedly mounted on a carrying plane, which may be a ground plane, a mounting plane on a table top or other equipment body, etc. Moreover, the slide table 400, the driving assembly 100 and the clamping assembly 200 are all mounted on the carrier table 300, so that the carrier table 300 can provide stable fixing and supporting functions for the slide table 400, the driving assembly 100 and the clamping assembly 200. The sliding table 400 is slidably connected to the carrier 300 and can slide on the carrier 300, wherein in the present embodiment, the sliding table 400 can move linearly on the carrier 300. The clamp assembly 200 is mounted on the carrier table 300 and the clamp assembly 200 can slide relative to the carrier table 300. Further, the clamping assembly 200 is clamped on the sliding table 400, so that the clamping assembly 200 drives the sliding table 400 to slide when sliding relative to the carrier table 300, and the purpose that the sliding table 400 moves linearly relative to the carrier table 300 can be achieved. It should be noted that the clamp assembly 200 can be selectively disengaged from the slide table 400, so that the clamp assembly 200 is separated from the slide table 400, and the clamp assembly 200 does not move relative to the carrier table 300 without moving the slide table 400. The driving assembly 100 is connected to the clamping assembly 200, and the driving assembly 100 can be used to drive the clamping assembly 200 to move relative to the carrier 300. In the embodiment, the driving element 100 can drive the clamping element 200 to reciprocate along a linear direction.
Further, referring to fig. 4, the driving assembly 100 includes a first driving device 110, a first bridge amplifying structure 120 and a second bridge amplifying structure 130, the first driving device 110 is connected to the first bridge amplifying structure 120, and the first driving device 110 can be used for driving the first bridge amplifying structure 120 to deform, the first bridge amplifying structure 120 is connected to the second bridge amplifying structure 130, and when the first bridge amplifying structure 120 deforms, the second bridge amplifying structure 130 can be driven to deform, and the first bridge amplifying structure 120 can amplify the displacement output by the first driving device 110 and output the amplified displacement. The second bridge amplification structure 130 is connected to the clamping assembly 200 and can drive the clamping assembly 200 to slide relative to the carrier 300 when being deformed, wherein the second bridge amplification structure 130 is deformed under the driving of the first bridge amplification structure 120, and the second bridge amplification structure 130 can amplify the displacement output by the first bridge amplification structure 120, so as to output the amplified displacement. In this embodiment, after the first driving device 110 outputs the displacement, the displacement output by the first driving device 110 is amplified twice by the first bridge amplification structure 120 and the second bridge amplification structure 130, and the clamping component 200 is driven by the twice amplified displacement output, so that the purpose of fully amplifying the displacement output by the first driving device 110 can be achieved, and the purpose of solving the problem of small displacement output by the inchworm type piezoelectric linear actuator 10 can be achieved.
In the present embodiment, referring to fig. 4 and fig. 5, the first bridge amplifying structure 120 includes a first flexible connecting plate 123, two first connecting portions 121, and two first rigid bodies 122. The two first connecting portions 121 and the two first rigid bodies 122 form a quadrilateral, and the two first connecting portions 121 are disposed opposite to each other, that is, the two first connecting portions 121 are located at two ends of a diagonal line of the quadrilateral, and the two first rigid bodies 122 are located at two ends of another diagonal line of the quadrilateral. The first connecting portions 121 and the first rigid bodies 122 are connected by first flexible connecting plates 123, that is, the first flexible connecting plates 123 are arranged on four sides of the quadrangle, and two ends of any one first flexible connecting plate 123 are respectively connected to one first connecting portion 121 and one first rigid body 122. The first driving device 110 is installed between the two first rigid bodies 122, and both ends of the first driving device 110 are connected to the two first rigid bodies 122, respectively. The first driving device 110 can extend or contract, so as to drive the two first rigid bodies 122 to approach or depart from each other. When the two first rigid bodies 122 are close to each other, at this time, through the driving action of the first flexible connecting plate 123, the two first connecting portions 121 are far away from each other, which can achieve the purpose that the first driving device 110 drives the first bridge type amplifying structure 120 to deform, and simultaneously, the displacement output by the first driving device 110 to the two first rigid bodies 122 can be transmitted to the two first connecting portions 121 through the first flexible connecting plate 123, at this time, the displacement output by the first driving device 110 can be amplified through the bridge type amplifying structure formed by the first rigid body 122, the first flexible connecting plate 123 and the first connecting portions 121, and the amplified displacement can be output to the second bridge type amplifying structure 130 by the first bridge type amplifying structure 120.
In this embodiment, when the second driving device 211 extends and drives the two first rigid bodies 122 to move away from each other, the two first connecting portions 121 can be driven to move close to each other; when the second driving device 211 shortens and drives the two first rigid bodies 122 to approach each other, the two first connecting portions 121 can be driven to move away from each other. In this way, the output displacement of the first driving device 110 can be amplified by the first amplification bridge 120 and then output to the second amplification bridge 130 through the two first connecting portions 121.
In the present embodiment, the first driving device 110 is a piezoelectric actuator for releasing, that is, the first driving device 110 can be extended by a voltage and retracted to an original length in a power-off condition, so as to selectively drive the two first rigid bodies 122 to move away from or close to each other. It should be understood that in other embodiments, the second driving device 211 may also adopt other driving structures, such as a reciprocating motor or a crank structure.
Further, in this embodiment, the straight line where the first flexible connecting plate 123 extends and the connecting line of the two first rigid bodies 122 form an included angle, so that when the first driving device 110 drives the two first rigid bodies 122 to approach each other or to be away from each other, the first flexible connecting plate 123 can drive the two first connecting portions 121 to approach each other or to be away from each other, and the situation that the first flexible connecting plate 123 cannot transfer displacement due to the fact that the first flexible connecting plate 123 is parallel to the two first rigid bodies 122 is avoided. Optionally, in this embodiment, a small acute angle is formed between a straight line along which the first flexible connecting plate 123 extends and a connecting line of the two first rigid bodies 122, so that the amplification effect of the first bridge amplification structure 120 can be improved, and it is ensured that the displacement output by the first driving device 110 can be effectively amplified.
Alternatively, in the present embodiment, a plurality of first flexible connecting plates 123 are disposed between the first connecting portion 121 and the first rigid body 122 at intervals, that is, in the present embodiment, the number of the first flexible connecting plates 123 between each first connecting portion 121 and each first rigid body 122 is plural, and the plurality of first flexible connecting plates 123 are disposed at intervals, so as to ensure the strength of the whole first bridge amplifying structure 120 and ensure the stability of the output displacement of the first bridge amplifying structure 120. Optionally, in this embodiment, there are two first flexible connecting plates 123 between each first connecting portion 121 and each first rigid body 122, and it should be understood that in other embodiments, the number of first flexible connecting plates 123 between each first connecting portion 121 and each first rigid body 122 may also be three or four, etc.
Referring to fig. 4 and 6, the second enlarged bridge structure 130 includes a second flexible connecting plate 133, two second connecting portions 131 and two second rigid bodies 132. The two second connecting portions 131 and the two second rigid bodies 132 form a quadrilateral, and the two second connecting portions 131 are disposed opposite to each other, that is, the two second connecting portions 131 are located at two ends of a diagonal line of the quadrilateral, and the two second rigid bodies 132 are located at two ends of another diagonal line of the quadrilateral. The second connecting portions 131 and the second rigid bodies 132 are connected by second flexible connecting plates 133, that is, the second flexible connecting plates 133 are arranged at four sides of the quadrangle, and both ends of any one second flexible connecting plate 133 are respectively connected to one second connecting portion 131 and one second rigid body 132. Further, the two first connecting portions 121 are respectively connected to the two second rigid bodies 132 and located between the two second rigid bodies 132, and when the two first connecting portions 121 move under the driving action of the first driving device 110 and output the displacement amount, the two first connecting portions 121 transmit the displacement amount to the two second rigid bodies 132, so that the two second rigid bodies 132 can be driven to move away from or approach to each other. When keeping away from each other or being close to each other, two second rigid bodies 132 can transmit the displacement to two second connecting portions 131 through second flexible connecting plate 133, and are used for driving two second connecting portions 131 to keep away from each other or be close to each other, and then realize that first bridge type amplification structure 120 drives the purpose that second bridge type amplification structure 130 deformed.
It should be noted that, in this embodiment, when the two second rigid bodies 132 are close to each other, the two second rigid bodies 132 drive the two second connecting portions 131 to move away from each other through the second flexible connecting plate 133, that is, when the two first connecting portions 121 are close to each other, the two second connecting portions 131 of the second amplification structure 130 can be driven to move away from each other. When the two second rigid bodies 132 are far away from each other, the two second rigid bodies 132 drive the two second connecting portions 131 to approach each other through the second flexible connecting plate 133, that is, when the two first connecting portions 121 are far away from each other, the two second connecting portions 131 of the second bridge amplification structure 130 can be driven to approach each other. The displacement output by the first bridge amplifying structure 120 is output to the two second rigid bodies 132, and at this time, the displacement output by the first bridge amplifying structure 120 is amplified by the bridge amplifying structure formed by the second rigid bodies 132, the second flexible connecting plate 133 and the second connecting portion 131 and output by the two second connecting portions 131.
Further, in this embodiment, one of the second connection portions 131 is connected to the carrier 300, and the other second connection portion 131 is connected to the clamping assembly 200, so that the second bridge amplification structure 130 can drive the clamping assembly 200 to slide relative to the carrier 300 by mutual displacement between the two second connection portions 131 when being deformed. That is, in the inchworm-type piezoelectric linear actuator 10 provided in this embodiment, the displacement output by the first driving device 110 can be amplified by the first bridge amplification structure 120 and then output to the second bridge amplification structure 130, the second bridge amplification structure 130 can amplify the displacement output by the first bridge amplification structure 120 again and then output to the clamping assembly 200, so as to realize the displacement of the clamping assembly 200 relative to the carrier stage 300, and the amplification of the displacement output by the first driving device 110 can be realized by the secondary amplification effect of the first bridge amplification structure 120 and the second bridge amplification structure 130, thereby solving the problem of small output displacement of the inchworm-type piezoelectric linear actuator 10.
In addition, in this embodiment, the straight line of the extending direction of the second flexible connecting plate 133 forms an included angle with the connecting line of the two second rigid bodies 132, so that when the first bridge amplifying structure 120 outputs the displacement and drives the two second rigid bodies 132 to approach each other or to be away from each other, the second flexible connecting plate 133 can be ensured to drive the two second connecting portions 131 to approach each other or to be away from each other, thereby avoiding the situation that the second flexible connecting plate 133 is parallel to the two second rigid bodies 132 to cause the second flexible connecting plate 133 to be unable to transfer the displacement. Optionally, in this embodiment, a small acute angle is formed between a straight line along which the second flexible connecting plate 133 extends and a connecting line of the two second rigid bodies 132, so as to improve the amplification effect of the second bridge amplification structure 130, and further ensure that the displacement output by the first bridge amplification structure 120 can be effectively amplified.
It should be noted that, in the present embodiment, one second flexible connecting plate 133 is disposed between each second connecting portion 131 and each second rigid body 132, and it should be understood that, in other embodiments, the number of the second flexible connecting plates 133 disposed between each second connecting portion 131 and each second rigid body 132 may be multiple, for example, two or three, etc.
Optionally, in the present embodiment, the two first connecting portions 121 and the two first rigid bodies 122 in the first bridge-type amplifying structure 120 together form a first plane, where the first plane refers to a plane on which a quadrangle enclosed by the two first connecting portions 121 and the two first rigid bodies 122 together is located, where the two first connecting portions 121 and the two first rigid bodies 122 are regarded as one connecting point. The two second connecting portions 131 and the two second rigid bodies 132 in the second bridge amplifying structure 130 form a second plane together, and similarly, the second plane refers to a plane where a quadrangle surrounded by the two second connecting portions 131 and the two second rigid bodies 132 is located by regarding the two second connecting portions 131 and the two second rigid bodies 132 as a connecting point. The first plane and the second plane are arranged at an included angle, wherein two connection points of the two first connection portions 121 are located in the second plane, two connection points of the two first rigid bodies 122 are located outside the second plane, and an included angle is formed between a straight line of the extending direction of the first driving device 110 and the second plane. When the two first rigid bodies 122 in the first amplification bridge structure 120 move under the driving action of the first driving device 110, the two first rigid bodies can avoid contacting the second connecting portion 131 or the second flexible connecting plate 133 in the second amplification bridge structure 130, and damage to the first amplification bridge structure 120 and the second amplification bridge structure 130 can be avoided. Optionally, in this embodiment, the first plane and the second plane are perpendicular to each other.
Referring to fig. 3 and 7, the clamping assembly 200 includes a moving stage 220 and a clamping structure 210. Wherein, the motion platform is slidably connected to the carrier 300 and can slide relative to the carrier 300. In the embodiment, one end of the second bridge amplifying structure 130 is connected to the moving stage 220, that is, one of the second connecting portions 131 is connected to the moving stage 220, so that the output displacement of the driving element 100 can be transmitted to the moving stage 220, and further the moving stage 220 is driven to move relative to the supporting stage 300. The clamping structure 210 is mounted on the moving stage body 220, and the clamping structure 210 can be driven to move by the moving stage body 220. The clamping structure 210 is further configured to be clamped on the sliding table 400, so that when the moving table body 220 drives the clamping structure 210 to move, the clamping structure 210 can drive the clamped sliding table 400 to slide relative to the carrier table 300. In addition, the clamping structure 210 can be separated from the sliding table 400, so that the clamping structure 210 can move relative to the sliding table 400 without affecting the sliding table 400 when the moving table body 220 drives the clamping structure 210.
Further, the clamping structure 210 includes a third connecting portion 212, a second driving device 211, two third flexible connecting plates 213, and two clamping rods 214. Wherein, the third connecting portion 212 is fixedly connected to the moving table body 220. The two clamping rods 214 are respectively connected to two opposite sides of the third connecting portion 212 through two third flexible connecting plates 213, and the third flexible connecting plates 213 are connected to the middle portion of the clamping rods 214, i.e. a fulcrum can be formed at the position connected to the clamping rods 214 through the third flexible connecting plates 213, so that the clamping rods 214 form a lever structure. It should be noted that, the connection of the third flexible connecting plate 213 to the middle of the clamping rod 214 means that the connection of the third flexible connecting plate 213 and the clamping rod 214 has a certain distance from both ends of the clamping rod 214. In this embodiment, the third flexible connecting plate 213 is connected to the center point of the clamping rod 214 with a certain distance therebetween, so that the lever structure formed by the clamping rod 214 and the third flexible connecting plate 213 has an amplifying function, and optionally, one end of the clamping rod 214 closer to the third flexible connecting plate 213 is used as the first end, and the other end is used as the second end. Two ends of the second driving device 211 are respectively connected to the ends of the two clamping rods 214, wherein two ends of the second driving device 211 are connected to the first ends of the clamping rods 214. The second driving device 211 can be selectively extended or shortened, and then the first ends of the clamping rods 214 are driven by the second driving device 211 to be close to or away from each other, and then the two second ends can be far from or close to each other through a lever structure formed by the third flexible connecting plate 213 and the clamping rods 214 together. When the second driving device 211 extends, the two first ends are away from each other, so that the two second ends are close to each other, and the clamping rod 214 can be disengaged from the sliding table 400 to enter a release state, and at this time, the clamping assembly 200 is driven by the driving assembly 100 to move relative to the sliding table 400 without affecting the sliding table 400; when the second driving device 211 is shortened, the two first ends are close to each other at this time, so that the two second ends are far away from each other, and the second end of the clamping rod 214 can be clamped on the sliding table 400 to enter a clamping state, and at this time, the clamping assembly 200 drives the sliding table 400 to slide relative to the carrier table 300 under the driving action of the driving assembly 100.
In the present embodiment, the second driving device 211 is a piezoelectric actuator for release, which can be extended when energized and can be shortened when de-energized. It should be understood that in other embodiments, the second driving device 211 may also adopt other driving structures, such as a motor or a crank structure.
Clamping rod 214 includes a connecting rod 2141 and a clamp 2142. It should be noted that, the third flexible connecting plate 213 is connected to the middle of the connecting rod 2141, and similarly, the end of the connecting rod 2141 closer to the third flexible connecting plate 213 is the first end provided above, and the other end is the second end provided above. Two ends of the second driving device 211 are respectively connected to the ends of the two connecting rods 2141, that is, the second driving device 211 is connected to the first end of the connecting rod 2141, and the clamping portion 2142 is convexly disposed at one end of the connecting rod 2141 far away from the second driving device 211, that is, the clamping portion 2142 is convexly disposed at the second end of the connecting rod 2141. The two clamping portions 2142 are located outside the two connecting rods 2141, respectively, and make the clamping rod 214 in an L-shape. It should be noted that the clamping portions 2142 are respectively located at the outer sides of the two connecting rods 2141, which means that the clamping portions 2142 are disposed at a side of the connecting rods 2141 away from the other connecting rod 2141. Further, the clamping portion 2142 can be used to clamp to the slide table 400. When the second driving device 211 extends, the clamping portion 2142 is disengaged from the slide table 400 at this time, and enters a release state; when the second driving device 211 is shortened, the clamping portion 2142 is clamped to the slide stage 400 at this time, and then enters a clamping state to drive the slide stage 400 to slide relative to the carrier stage 300.
It should be noted that, through the lever amplification structure formed by the clamping rod 214 and the third flexible connecting plate 213, the output displacement of the second driving device 211 can be amplified, at this time, the displacement of the second end of the clamping rod 214 can be increased, and the purpose of good output displacement stability can be achieved, so that the clamping component 200 can very easily release or clamp the sliding table 400, and thus, the machining and assembling precision of the components of the inchworm type driver can be reduced, and the manufacturing cost can be further reduced.
Further, in the present embodiment, the number of the clamping assemblies 200 and the number of the driving assemblies 100 are two, and the two clamping assemblies 200 are disposed between the two driving assemblies 100 and are respectively connected to the two driving assemblies 100, that is, one of the driving assemblies 100 is connected to one of the clamping assemblies 200 for driving the clamping assembly 200 to slide relative to the carrier 300; the other driving assembly 100 is connected to the other clamping assembly 200 for driving the clamping assembly to slide relative to the carrier 300. And in this embodiment, the interconnected drive assembly 100 and clamp assembly 200 are symmetrically arranged with respect to the other set of interconnected drive assembly 100 and clamp assembly 200. When the inchworm-type piezoelectric linear driver 10 is powered off, the two second driving devices 211 are powered off, so that the clamping rods 214 in the two clamping structures 210 are in a clamping state, namely the two clamping rods 214 are clamped on the sliding table 400, and the sliding table 400 is in a locking state, so that the purpose of power-off and self-locking of the inchworm-type piezoelectric linear driver 10 can be achieved.
Optionally, referring to fig. 3, in the present embodiment, the inchworm-type piezoelectric linear actuator 10 further includes a flexible hinge 500, and the two clamping assemblies 200 are connected to each other through the flexible hinge 500. In this embodiment, the two ends of the flexible hinge 500 are connected to the two moving tables 220, respectively. Connect two motion stage bodies 220 through flexible hinge 500, can make motion stage body 220 when the return, can provide certain additional action through flexible hinge 500, and then guarantee the accuracy of motion stage body 220 return, improve control accuracy.
In addition, referring to fig. 2 and fig. 3, an installation cavity 320 is formed on the carrier 300, the clamping assembly 200 and the driving assembly 100 are both disposed inside the installation cavity 320, a portion of the clamping assembly 200 extends out of the installation cavity 320 and can be clamped on the sliding table 400, and the sliding table 400 is disposed above the installation cavity 320. Optionally, in this embodiment, the guide rails 310 are respectively disposed on two sides outside the installation cavity 320, and the sliding table 400 is slidably engaged with the guide rails 310, that is, the sliding table 400 is disposed above the installation cavity 320. The moving stage body 220 is slidably disposed inside the mounting cavity 320, and the clamping structure 210 is disposed above the moving stage body 220 and extends out of the mounting cavity 320 so as to be clamped to the sliding table 400. The driving assembly 100 is installed inside the installation cavity 320 and connected to the moving platform body 220, wherein one of the second connecting portions 131 is connected to an inner peripheral wall of the installation cavity, thereby facilitating the movement of the driving moving platform body 220.
Optionally, in this embodiment, the second connecting portion 131 connected to the moving stage body 220 includes a connecting block 1311 and a pushing block 1312, the pushing block 1312 and the connecting block 1311 are integrally formed, and a gap is formed between the pushing block 1312 and the connecting block 1311. The connecting block 1311 is connected to the upper surface or the lower surface of the moving stage body 220, where the upper surface of the moving stage body 220 refers to a side surface facing the sliding table 400, and the lower surface of the moving stage body 220 refers to a side surface attached to the carrier 300. The pushing block 1312 abuts against the side surface of the moving stage body 220, so that a corner of the moving stage body 220 is accommodated in the notch. Through the arrangement mode, when the driving assembly 100 drives the moving table body 220, the driving assembly can push the moving table body 220 through the pushing block 1312, the situation that the stress at the joint between the connecting block 1311 and the moving table body 220 is increased to cause damage can be avoided, and the connection stability between the second connecting part 131 and the moving table body 220 can be further improved. In this embodiment, the connecting block 1311 and the moving stage 220 are connected by a bolt, and through the above arrangement, the shearing force applied to the bolt when the second connecting portion 131 pushes the moving stage 220 can be reduced, so as to avoid the situation of damage or deformation of the bolt, and further improve the connection stability between the second connecting portion 131 and the moving stage 220. It should be understood that in other embodiments, the second connection portion 131 may be disposed in other shapes and connected to the moving table body 220 in other manners, for example, the second connection portion 131 is a square body and welded to the side surface of the moving table body 220.
Optionally, in this embodiment, a plurality of mounting pins 330 are disposed around the carrier 300, and the mounting pins 330 may be mounted on the carrier plane by means of bolt fastening. In addition, guide 310 is a standard cross roller guide 310.
Further, referring to fig. 8, the sliding table 400 includes a table main body 420 and a sliding matching portion 410, wherein the sliding matching portion 410 is convexly disposed at one side of the table main body and is formed in a sliding groove 411 adapted to the guide rail 310, and the guide rail 310 extends into the sliding groove 411, so as to achieve the sliding matching between the sliding table 400 and the guide rail 310. In addition, a part of the sliding fit portion 410 is disposed between the two rows of guide rails 310, and the part of the sliding fit can be used for being matched with the clamping assembly 200, that is, the clamping assembly 200 can be clamped on the sliding fit portion 410 when the power is off, so as to achieve the purpose that the clamping assembly 200 is clamped on the sliding table 400.
Optionally, in the present embodiment, when the viewing angle of fig. 2 is taken, the two driving assemblies 100 are divided into a left driving assembly 100 and a right driving assembly 100, wherein the left driving assembly 100 is located at the left side of the viewing angle of fig. 2, and the right driving assembly 100 is located at the right side of the viewing angle of fig. 2; similarly, the two clamping assemblies 200 are divided into a left clamping assembly 200 and a right clamping assembly 200, wherein the left clamping assembly 200 is located to the left from the perspective of fig. 2 and the right clamping assembly 200 is located to the right from the perspective of fig. 2. The embodiment also provides a control method of the inchworm type piezoelectric linear actuator 10, which comprises the following steps:
fig. 9 is a piezoelectric timing diagram for driving the inchworm-type piezoelectric linear actuator 10. Fig. 9(a) shows a piezoelectric timing chart for controlling the right clamp assembly 200; fig. 9(b) shows a piezoelectric timing chart for controlling the left drive unit 100 and the right drive unit 100; fig. 9(c) shows a piezoelectric timing chart for controlling the left clamp device 200. That is, when the control is started, the second driving device 211 of the left clamping assembly 200 is controlled to be powered off, and at this time, the left clamping assembly 200 is clamped on the sliding table 400; and meanwhile, the second driving device 211 of the right clamping assembly 200 is controlled to be electrified, and the right clamping assembly 200 is disconnected from the sliding table 400. Then, the first driving device 110 in the driving assembly 100 is controlled to be powered on, at this time, the two driving assemblies 100 respectively drive the two clamping assemblies 200 to move, at this time, the two clamping assemblies 200 approach each other, and since the left clamping assembly 200 is in the clamping state and the right clamping assembly 200 is in the releasing state, the sliding table 400 can be driven by the left clamping assembly 200 to move rightward. After the sliding table 400 is moved to the right, the left clamping assembly 200 is first controlled to be powered on, and the right clamping assembly 200 is controlled to be powered off, so that the left clamping assembly 200 can be separated from the sliding table 400, and meanwhile, the right clamping assembly 200 is clamped on the sliding table 400. After the left clamping assembly 200 is separated from the sliding table 400 and the right clamping assembly 200 is clamped on the sliding table 400, the first driving device 110 is controlled to be powered off, and at this time, the two driving assemblies 100 respectively drive the two clamping assemblies 200 to be away from each other, and since the left clamping assembly 200 is separated from the sliding table 400 and the right clamping assembly 200 is clamped on the sliding table 400 at this time, the right clamping assembly 200 can drive the sliding table 400 to move further to the right. The driving assembly 100 and the clamping assembly 200 are cyclically controlled in the above manner, and then the linear motion of the slide table 400 can be completed. Of course, the sliding table 400 may be moved leftwards or reciprocated by other control methods.
In summary, in the inchworm-type piezoelectric linear actuator 10 provided in this embodiment, the first bridge amplification structure 120 is disposed in the driving assembly 100 to amplify the output displacement of the first driving device 110 and then transmit the amplified output displacement to the second bridge amplification structure 130, the second bridge amplification structure 130 further amplifies the displacement output by the first bridge amplification structure 120 and then outputs the displacement again, the first bridge amplification structure 120 and the second bridge amplification structure 130 can amplify the output displacement of the first driving device 110 for a second time, and the problem of small output displacement of the inchworm-type piezoelectric linear actuator 10 can be solved. In addition, a lever structure can be formed by the clamping rod 214 and the third flexible connecting plate 213, and then the output displacement of the second driving device 211 can be amplified through the lever structure, so that the stability of the output displacement of the second end of the clamping rod 214 is good, and the clamping assembly 200 can very easily release or clamp the sliding table 400, thereby reducing the processing and assembling precision of the components of the inchworm type piezoelectric linear actuator 10 and reducing the manufacturing cost. In addition, when the inchworm-type piezoelectric linear driver 10 is not electrified, the sliding table 400 can be locked by the two clamping assemblies 200, and the purpose of power-off self-locking of the inchworm-type piezoelectric linear driver 10 is achieved. In addition, the inchworm type piezoelectric linear actuator 10 is simple in structure and easy to integrate on a mechanical arm and other equipment to form an operating system.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (11)
1. An inchworm type piezoelectric linear driver is characterized by comprising a sliding table, a bearing table, a driving assembly and a clamping assembly;
the sliding table is in sliding fit with the bearing table;
the clamping assembly is clamped on the sliding table and can be selectively disengaged from the sliding table;
the driving assembly comprises a first driving device, a first bridge type amplification structure and a second bridge type amplification structure, and the first driving device is connected to the first bridge type amplification structure and is used for driving the first bridge type amplification structure to deform; the first bridge type amplification structure is connected with the second bridge type amplification structure and used for driving the second bridge type amplification structure to deform, one end of the second bridge type amplification structure is connected with the bearing table, and the other end of the second bridge type amplification structure is connected with the clamping assembly and can drive the clamping assembly to slide relative to the bearing table when deforming.
2. The inchworm-type piezoelectric linear actuator according to claim 1, wherein the first bridge amplifying structure comprises a first flexible connecting plate, two first connecting portions and two first rigid bodies;
the two first connecting parts and the two first rigid bodies enclose a quadrangle, the two first connecting parts are oppositely arranged, and the first connecting parts and the first rigid bodies are connected through the first flexible connecting plate;
two ends of the first driving device are respectively connected to the two first rigid bodies and can drive the two first rigid bodies to be away from or close to each other;
two first connecting portions are connected to the second bridge type amplification structure and can drive the deformation of the second bridge type amplification structure.
3. The inchworm-type piezoelectric linear actuator according to claim 2, wherein the second bridge amplifying structure comprises a second flexible connecting plate, two second connecting portions and two second rigid bodies;
the two second connecting parts and the two second rigid bodies enclose a quadrangle, the two second connecting parts are oppositely arranged, and the second connecting parts and the second rigid bodies are connected through second flexible connecting plates;
one of the second connecting parts is connected to the bearing table, and the other second connecting part is connected to the clamping assembly;
the two first connecting portions are respectively connected to the two second rigid bodies and located between the two second rigid bodies.
4. The inchworm-type piezoelectric linear actuator according to claim 3, wherein the two first connecting portions and the two first rigid bodies together form a first plane, the two second connecting portions and the two second rigid bodies together form a second plane, and the first plane and the second plane are arranged at an included angle.
5. The inchworm-type piezoelectric linear actuator according to claim 3, wherein the straight line of the extending direction of the second flexible connecting plate forms an included angle with the connecting line of the two second rigid bodies.
6. The inchworm-type piezoelectric linear actuator according to claim 2, wherein a plurality of the first flexible connection plates are arranged at intervals between the first connection portion and the first rigid body.
7. The inchworm-type piezoelectric linear actuator according to claim 2, wherein a straight line in which the first flexible connecting plate extends is arranged at an included angle with a connecting line of the two first rigid bodies.
8. The inchworm-type piezoelectric linear actuator according to any one of claims 1-7, wherein the clamping assembly comprises a moving stage body and a clamping structure, the moving stage body is slidably connected to the bearing stage, and one end of the second bridge type amplification structure is connected to the moving stage body;
the clamping structure comprises a third connecting part, a second driving device, two third flexible connecting plates and two clamping rods;
the third connecting part is fixedly connected to the moving table body;
the two clamping rods are respectively connected to two opposite sides of the third connecting part through two third flexible connecting plates, and the third flexible connecting plates are connected to the middle parts of the clamping rods;
the both ends of second drive arrangement connect respectively in two the tip of clamping pole, second drive arrangement can extend in order to drive the other end of clamping pole is close to each other and breaks away from the slip table, perhaps second drive arrangement can shorten in order to drive the other end of clamping pole is kept away from each other and is held in the slip table.
9. The inchworm-type piezoelectric linear actuator according to claim 8, wherein the clamping rod comprises a connecting rod and clamping parts, two ends of the second driving device are respectively connected to the ends of the two connecting rods, the clamping parts are convexly arranged at one ends of the connecting rods far away from the second driving device, the two clamping parts are respectively positioned at the outer sides of the two connecting rods, and the clamping parts can be clamped on the sliding table.
10. The inchworm-type piezoelectric linear actuator according to any one of claims 1 to 7, wherein the number of the clamping assemblies is two, the number of the driving assemblies is two, the two clamping assemblies are arranged between the two driving assemblies and are respectively connected with the two driving assemblies, and the two clamping assemblies and the two driving assemblies are symmetrically arranged;
the inchworm type piezoelectric linear driver further comprises a flexible hinge, and the two clamping assemblies are connected through the flexible hinge.
11. The inchworm-type piezoelectric linear actuator according to any one of claims 1 to 7, wherein a mounting cavity is formed in the bearing platform, the clamping assembly and the driving assembly are arranged in the mounting cavity, part of the clamping assembly extends out of the mounting cavity and can be clamped on the sliding table, and the sliding table is arranged above the mounting cavity.
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| CN202010268890.XA CN111327228A (en) | 2020-04-08 | 2020-04-08 | Inchworm type piezoelectric linear driver |
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