CN111308863A - Double-table exposure machine and method for controlling opening and closing of door of double-table exposure machine - Google Patents
Double-table exposure machine and method for controlling opening and closing of door of double-table exposure machine Download PDFInfo
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- CN111308863A CN111308863A CN202010081788.9A CN202010081788A CN111308863A CN 111308863 A CN111308863 A CN 111308863A CN 202010081788 A CN202010081788 A CN 202010081788A CN 111308863 A CN111308863 A CN 111308863A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention provides a double-table exposure machine and a method for controlling the opening and closing of a door of the double-table exposure machine, wherein the double-table exposure machine comprises a machine body, and the machine body comprises a first table and a second table; the first door body is positioned on the first table top and has a gap with the first table top, the second door body is positioned on the second table top and has a gap with the second table top, and the first door body and the second door body are staggered in the direction vertical to the table top; the electric execution device is arranged on the machine body, is mechanically connected with the first door body and the second door body, and is used for controlling the first door body to move in the direction parallel to the table top according to a first door body driving signal; and the control device is electrically connected with the electric execution device and used for outputting a first door body driving signal or a second door body driving signal according to an operation instruction. The double-table exposure machine can prevent external dust from entering the table, and avoid poor exposure.
Description
Technical Field
The invention relates to the technical field of exposure equipment, in particular to a double-table exposure machine and a method for controlling the opening and closing of a door of the double-table exposure machine.
Background
The direct-write exposure of a PCB (Printed Circuit Board) plate has high requirement on the capacity of a machine, so that the double-table exposure machine can be produced at the same time, the double-table laser direct-write exposure machine has two double tables, one table can be pre-aligned in advance while the other table is subjected to direct-write exposure, and the capacity of the machine is improved. And many exposure machines adopt a pneumatic door mode to control the opening and closing of the door, and the movement of the door is pushed by compressed air, so that on one hand, an air source is required on site, and on the other hand, the speed of the door is controlled by the size of the air source.
However, the PCB process has high environmental requirements, and the surface of the PCB is contaminated with dust during exposure, which may cause poor exposure. And, the mode of using pneumatic door control door's switch, the phenomenon that the door can't open when the air supply is not enough can appear, and the too big speed that leads to the air supply causes the striking, and pneumatic door can't carry out high accuracy location in addition, can cause to close the door not in place, causes the pollution to the PCB board of exposure in-process.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, an object of the present invention is to provide a dual-stage exposure machine, which can reduce the width of the machine and prevent external dust from entering the stage, thereby avoiding poor exposure.
The second purpose of the invention is to provide a method for controlling the opening and closing of the door of the double-table exposure machine.
In order to achieve the above object, a first embodiment of the present invention provides a dual-stage exposure machine, including: a body comprising a first table top and a second table top; the first door body is positioned on the first table top, a gap is formed between the first door body and the first table top, the second door body is positioned on the second table top, a gap is formed between the second door body and the second table top, and the first door body and the second door body are staggered in the direction perpendicular to the table top; the electric execution device is arranged on the machine body, is mechanically connected with the first door body and the second door body, and is used for controlling the first door body to move in the direction parallel to the table top according to a first door body driving signal so as to open or cover the first table top, or controlling the second door body to move in the direction parallel to the table top according to a second door body driving signal so as to open or cover the second table top; and the control device is electrically connected with the electric execution device and used for outputting the first door body driving signal or the second door body driving signal according to an operation instruction.
According to the double-table exposure machine provided by the embodiment of the invention, the first door body and the second door body are respectively arranged on the first table top and the second table top, the two door bodies are perpendicular to the table top direction and are arranged in a vertically staggered manner, the first door body and the second door body move in the direction parallel to the table top, and the door body opening or closing operation is executed, so that dust can be prevented from falling onto the table top, the exposure quality is improved, and the two door bodies are arranged in a vertically staggered manner, so that the machine body width can be reduced compared with the case that the two door bodies are arranged side by side, the door body movement is controlled through the electric execution device, the speed is controllable compared with the case that the door body state is controlled in a pneumatic door mode, the door opening and closing position can be accurately set, the control mode is more stable, and the influence on the exposure process caused by insufficient air.
In some embodiments, a first sliding chute and a second sliding chute which extend parallel to the table top direction and are staggered in the direction perpendicular to the table top direction are arranged on the machine body on one side of the first table top and the second table top, one end of the first door body is accommodated in the first sliding chute, one end of the second door body is accommodated in the second sliding chute, and a first sliding rail and a second sliding rail which extend parallel to the table top direction are arranged on the machine body on the other side of the first table top and the second table top; the electric execution device comprises a first encoder, a first motor and a first sliding block, the other end of the first door body is arranged on the first sliding block, the first encoder is electrically connected with the control device and used for controlling the first motor according to the first door body driving signal so as to drive the first sliding block to move along the first sliding rail, and therefore the first door body is driven to move in the direction parallel to the table top; the electric execution device further comprises a second encoder, a second motor and a second sliding block, the second sliding block and the first sliding block are staggered in the direction perpendicular to the table board, the other end of the second door body is arranged on the second sliding block, and the second encoder is electrically connected with the control device and used for controlling the second motor to drive the second sliding block to move along the second sliding rail according to the second door body driving signal so as to drive the second door body to move in the direction parallel to the table board.
In some embodiments, the control device comprises: the central processing unit is used for outputting a first table control signal according to a first door body opening and closing instruction, or outputting a second table control signal according to a second door body opening and closing instruction; the first servo motor controller is respectively electrically connected with the central processor and the first encoder and is used for sending the first door body driving signal to the first encoder according to the first table-board control signal; and the second servo motor controller is respectively electrically connected with the central processing unit and the second encoder and is used for sending a second door body driving signal to the second encoder according to the second table control signal.
In some embodiments, the double-stage exposure machine further comprises: the first switch assembly is electrically connected with the central processing unit and used for outputting a first door body switch instruction when receiving an operation action; and the second switch assembly is electrically connected with the central processing unit and is used for outputting a second door body switch instruction when receiving an operation action.
In some embodiments, the first switch assembly comprises: and the first switch and the second switch are both arranged on the machine body and electrically connected with the central processing unit, and are used for outputting the first door body switch instruction when receiving an operation action.
In some embodiments, the second switch assembly comprises: and the third switch and the fourth switch are both arranged on the machine body, are electrically connected with the central processing unit and are used for outputting a second door body switch instruction when receiving an operation action.
In some embodiments, when the control device outputs the first door body driving signal or the second door body driving signal according to an operation instruction, the control device is configured to output the first door body driving signal when receiving the first door body opening instruction and determining that the second door body is in a closed state, or output the second door body driving signal when receiving the second door body opening instruction and determining that the first door body is in a closing device. Namely, the first door body and the second door body are controlled in an interlocking mode, so that when exposure control is carried out on one table top, the other table top can be preassembled, and the production efficiency is improved.
In some embodiments, the central processing unit is further configured to monitor the first servo motor controller and the second servo motor controller, and perform a fault warning when a fault signal is detected.
In order to achieve the above object, a second aspect of the present invention provides a method for controlling a switch gate of a dual-mesa exposure apparatus, the method comprising: receiving a door opening instruction of one of the first door body and the second door body; judging whether the other one of the first door body and the second door body is in a closed state; and determining that the other one of the first door body and the second door body is in a closed state, and controlling one of the first door body and the second door body to move to an open position according to the door body opening instruction.
According to the method for controlling the opening and closing of the double-table exposure machine, whether the first door body and the second door body are in the closed state or not is judged, and after one door body is determined to be in the closed state, the other door body is controlled to be in the open state according to the door body opening instruction, so that the first door body and the second door body are ensured to be in the interlocking state.
In some embodiments, the method of controlling the opening and closing of the door of the double-mesa exposure machine further comprises: monitoring faults of servo motor controllers of the first door body and the second door body; and detecting a fault signal and carrying out fault warning.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block diagram of a dual stage exposure machine according to one embodiment of the present invention;
FIG. 2 is a schematic view of a dual stage exposure machine according to one embodiment of the present invention;
FIG. 3 is a flow chart of a method of controlling the opening and closing of the doors of the dual-mesa exposure machine according to one embodiment of the present invention;
fig. 4 is a flowchart of a method of controlling the opening and closing of the gate of the double-mesa exposure machine according to one embodiment of the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below, the embodiments described with reference to the drawings being illustrative, and the embodiments of the present invention will be described in detail below.
A double-mesa exposure machine according to an embodiment of the first aspect of the present invention is described below with reference to fig. 1 to 2.
As shown in fig. 1, a double-table exposure machine 1 according to an embodiment of the present invention includes a machine body 2, a first door 3, a second door 4, an electric actuator 5, and a controller 6.
Wherein, can set up the exposure cavity on the organism 2, set up first mesa 7 and second mesa 8 in the exposure cavity, can place the PCB panel that needs exposure processing on the mesa.
The first door body 3 is located on the first table top 7 and has a gap with the first table top 7, the second door body 4 is located on the second table top 8 and has a gap with the second table top 8, so that a PCB (printed circuit board) to be exposed is placed, damage to the board due to movement of the first door body is prevented, and the like, and the first door body 3 and the second door body 4 are staggered in the direction perpendicular to the table top, namely similar to a sliding door. Through adopting two door body settings that stagger from top to bottom, compare in two door body and set up side by side, can reduce organism width.
The electric actuator 6 is arranged on the machine body 2, is mechanically connected with the first door body 3 and the second door body 4, and is used for controlling the first door body 3 to move in the direction parallel to the table top according to the driving signal of the first door body 3 so as to open or cover the first table top 7, or controlling the second door body 4 to move in the direction parallel to the table top according to the driving signal of the second door body 4 so as to open or cover the second table top 8; the control device 6 is electrically connected with the electric execution device 5 and is used for outputting a first door body driving signal or a second door body driving signal according to an operation instruction. Therefore, the electric control of the first door body 3 and the second door body 4 is realized, and when the exposure treatment is carried out on the plate on the first table board 7, the first door body 3 can be controlled to be positioned at the closing position, namely, positioned in front of the first table board 7, so that dust and the like are prevented from falling onto the plate, at the moment, the second table board 8 is not subjected to the exposure treatment, and the second door body 4 can be positioned at the opening position or the closing position. When the second table top 8 is used for pre-installing the plate, the second door body 4 can be located at the opening position, namely, the second door body is moved to the first table top 7, and after the plate is placed on the second table top 8, the second door body 4 can be moved to the closing position, namely, the second door body is moved to the second table top 8 so as to cover the plate on the second table top 8, so that dust and the like are prevented from falling into the plate on the table top, and the influence on exposure is avoided.
Specifically, as shown in fig. 1, the first door 3 and the second door 4 are both arranged in a direction perpendicular to the table top, the first door 3 can perform door opening and closing movement on one side of the second door 4 facing the table top, and the first door 3 and the second door 4 are arranged in a vertically staggered manner, so that the movement between the two doors is not interfered with each other, and the two doors can perform full-range movement on the first table top 7 and the second table top 8. Control device 6 outputs door body drive signal according to operating instruction, electric actuator 5 receives for example first door body drive signal, will be according to first door body drive signal control first door body 3 and remove in the mesa direction of being on a parallel with, for example when placing the PCB panel on first mesa 7, control first door body 3 and remove to the open position for example remove to the top of second mesa 8, with open first mesa 7, and then after placing panel, control first door body 3 and remove to the closed position for example remove to first mesa 7 top in order to cover first mesa 7, avoid PCB panel surface to be infected with the dust, avoid causing the exposure badly.
And, for example, after the exposure of the first table top of the double-table top exposure machine 1 is finished, the first door 3 needs to be opened to take out the plate on the first table top 7, at this time, the second table top 8 is in an exposure state, the second door 4 is in a closed position, the first door 3 is controlled to move to the open position to open the first table top 7, after the plate is changed on the first table top 7, the first door 7 needs to be closed to perform pre-alignment, the second door 4 is opened after the exposure of the second table top 8 is finished to take out the plate on the second table top 8, and through the reciprocating exposure process of the two table tops, the exposure and the pre-assembly can be performed simultaneously, and the manufacturing efficiency is improved.
According to the double-table exposure machine 1 provided by the embodiment of the invention, the first door body 3 and the second door body 4 are respectively arranged on the first table top and the second table top, the two door bodies are both vertical to the table top direction and are arranged in a vertically staggered manner, the first door body 3 and the second door body 4 are respectively driven to move in the direction parallel to the table top by adopting the installation mode, the door bodies are opened or closed, thereby preventing dust from falling onto the table top and improving the exposure quality, the two door bodies are arranged in a vertically staggered manner, the machine body width can be reduced compared with the two door bodies arranged side by side, the door body movement is controlled by the electric execution device 6, compared with the mode of adopting a pneumatic door to control the door body state, the speed is controllable, the door opening and closing position can be accurately set, the control mode is more stable, and the influence of insufficient air source or overlarge air source on the, thereby affecting the exposure quality.
In some embodiments, a first sliding chute and a second sliding chute which extend parallel to the table top direction and are staggered in the direction perpendicular to the table top direction are arranged on the machine body 2 on one side of the first table top 7 and the second table top 8, one end of the first door body 3 is accommodated in the first sliding chute, one end of the second door body 4 is accommodated in the second sliding chute, and a first sliding rail and a second sliding rail which extend parallel to the table top direction are arranged on the machine body 2 on the other side of the first table top 7 and the second table top 8; the electric actuator 5 comprises a first encoder, a first motor and a first sliding block, the other end of the first door body 3 is arranged on the first sliding block, and the first encoder is electrically connected with the control device 6 and used for controlling the first motor according to a first door body driving signal to drive the first sliding block to move along a first sliding rail so as to drive the first door body 3 to move in a direction parallel to the table top; the electric actuator 5 further comprises a second encoder, a second motor and a second sliding block, the second sliding block and the first sliding block are staggered in the direction perpendicular to the table top, the other end of the second door body 4 is arranged on the second sliding block, and the second encoder is electrically connected with the control device 6 and used for controlling the second motor to drive the second sliding block to move along the second sliding rail according to a second door body driving signal so as to drive the second door body 4 to move in the direction parallel to the table top.
Specifically, a first sliding chute and a second sliding chute are arranged in a staggered manner in a direction vertical to the table top, a first sliding block and a second sliding block are also arranged in a staggered manner in a direction vertical to the table top, one end of a first door body 3 is connected with the first sliding chute, the other end of the first door body is connected with the first sliding block, one end of a second door body 4 is connected with the second sliding chute, the other end of the second door body is connected with the second sliding block, an electric actuator 5 such as an A electric actuator or a B electric actuator, taking the A electric actuator as an example, the A electric actuator adopts LEFS25AA-700-R16P1 model such as SMC, adopts a rodless ball screw structure, has the stroke of 700mm, is rigidly connected with the first door body 3 by using machinery, after the first encoder receives the driving signal output by the control device 6, the first encoder controls the first motor to drive the first sliding block to move along the first sliding rail, so that the first door body 3 moves in the direction parallel to the table top. The first door body 3 is made of aluminum materials, so that the load of the first motor can be reduced, and the two door bodies are installed in a vertically staggered mode, so that the width of the machine body can be reduced compared with the case that the two door bodies are arranged side by side.
In some embodiments, as shown in fig. 2, the control device 6 includes a central processing unit 18, where the central processing unit 18 is configured to output a first table control signal according to a first door opening/closing command, or output a second table control signal according to a second door opening/closing command; the first servo motor controller 19 is respectively electrically connected with the central processor 18 and the first encoder and is used for sending a first door body driving signal to the first encoder according to the first table control signal; the second servo motor controller 20 is electrically connected to the central processor 18 and the second encoder, respectively, and is configured to send a second door driving signal to the second encoder according to the second table control signal.
Specifically, the first servo motor controller 19 is connected with a first encoder of an electric actuator 5, such as an a electric actuator, and the second servo motor controller 20 is connected with a second encoder of an electric actuator, such as a B electric actuator, and the first servo motor controller 19 controls the a electric actuator includes: four output points of ASVON, ASETUP, ADRIVER and T0-A and two input points of AREADY and AERROE; the second servo motor controller 20 controls the B electric control actuator to include: BSVON, BSETUP, BDRIVER and T0-B, and BREADY and BERROE. The central processor 18, such as a PLC control module, performs DI/DO signal interaction with the servo motor controller, performs simple programming on the PLC control module, controls a DO point to output a control signal, collects DI points to inquire the state of the servo motor controller in real time, and forms a whole motion control closed loop. The servo motor controller controls the electric actuator 5 to perform positioning movement and detects the movement state of the electric actuator 5, the servo motor controller has a region output function, the servo motor controller can support region positioning of 64 modules at most, and each module can independently set parameters. The servo motor controller controls the electric actuator 5 to perform positioning movement, so that the door opening and closing movement state of the door body is realized.
The central processing unit 18 controls the A electric actuator to be electrified and excited to enable and initialize to search the original point, and controls the B electric actuator to be electrified and excited to enable and initialize to search the original point, after electrification, the central processing unit 18 controls ASVON to be set to a high level to complete electrification and excitation, after excitation, AREADY signals are waited, after the PLC receives the AREADY signals, the PLC marks that electrification and excitation are completed, after excitation is completed, the PLC sends a first door body driving signal to the A electric actuator ASETUP signals, namely, a first door body driving signal is sent to the first encoder according to an output first table board control signal, the A electric actuator starts initialization, positioning and searching the original point, and after the original point is successfully found, the.
And for the second servo motor controller 20, after power-on, the central processing unit 18 controls the BSVON to be set to a high level to complete power-on excitation, a BREADY signal is waited after excitation, the PLC marks that the power-on excitation is completed after receiving the BREADY signal, the PLC sends a BSETUP signal to the B electric actuator after the excitation is completed, namely, a second door body driving signal is sent to the second encoder according to a second table control signal, the B actuator starts initialization positioning to find an original point, and the BSETUP is reset after the original point is successfully found, so that the initialization of the B electric actuator can be completed.
In some embodiments, the double-table exposure machine 1 further includes a first switch assembly 21, where the first switch assembly 21 is electrically connected to the central processing unit 18, and is configured to output a first door opening and closing instruction when receiving an operation action; and the second switch assembly 22, the second switch assembly 22 is electrically connected with the central processing unit 18, and is used for outputting a second door body switch instruction when receiving an operation action.
Specifically, an external operator may output a first door opening and closing instruction or a second door opening and closing instruction by controlling the first switch assembly 21 and the second switch assembly 22. The first switch assembly 21 includes a first switch and a second switch, both of which are disposed on the body 2 and electrically connected to the central processor 18, for outputting a first door opening and closing instruction when receiving an operation action. The second switch assembly 22 includes a third switch and a fourth switch, both of which are disposed on the body 2 and electrically connected to the central processor 18, for outputting a second door body switch command when receiving an operation action.
In some embodiments, when outputting the first door driving signal or the second door driving signal according to the operation instruction, the control device 6 is configured to output the first door driving signal when receiving the first door opening instruction and determining that the second door 4 is in the closed state, or output the second door driving signal when receiving the second door opening instruction and determining that the first door 3 is in the closing device. Namely, the first door body 3 and the second door body 4 are controlled in an interlocking mode, so that when one table board is exposed and controlled, the other table board is pre-installed, the production efficiency can be improved, and external dust can be prevented from entering the table board for exposure control, and further the exposure quality is influenced.
Specifically, the first switch, such as KEY1, the second switch, such as KEY2, KEY1 and KEY2, may control the first door 3, such that the first door 3 is in a closed state when T0-a is low level, and the first door 3 is in an open state when T0-a is high level. When the central processing unit 18, for example, the PLC detects that KEY1 and KEY2 are simultaneously pressed, the first door body 3 starts to be closed, the internal control logic is that the PLC sets T0-a to a low level, and at the same time, the ADRIVER is instantly triggered, the first door body 3 moves to a closing position, when the PLC detects that KEY1 continuously triggers two seconds, the first door body 3 starts to be opened, the state of the second door body 4 is judged while the first door body 3 is opened, and if the second door body 4 is in a closing state, the B electric actuator is not operated. Similarly, the internal control logic that opens first door body 3 sets T0-A as the high level for PLC, simultaneously with ADRIVER instantaneous triggering, first door body 3 moves to the open position, if second door body 4 is in the open mode, then need close second door body 4 earlier and open first door body 3 again, internal control logic is PLC and sets T0-B as the low level, simultaneously with BDRIVER instantaneous triggering, second door body 4 moves to the closed position, PLC is the high level with T0-A simultaneously, with ADRIVER instantaneous triggering, first door body 3 moves to the open position and accomplishes the logic of opening the door.
The third switch, for example, KEY3, and the fourth switch, for example, KEY4, start to close the second door 4 when the central processor 18, for example, PLC, detects that KEY3 and KEY4 are simultaneously pressed, the internal control logic is that PLC sets T0-B to low level, and simultaneously triggers BDRIVER instantaneously, the second door 4 moves to the closed position, when PLC detects that KEY3 continuously triggers for two seconds, the second door 4 starts to open, and when the second door 4 opens, the state of the first door 3 is determined, and if the first door 3 is in the closed state, the electric actuator a is not operated. Similarly, the internal control logic for opening the second door body 4 sets the T0-B to the high level for the PLC, and simultaneously triggers the BDRIVER instantaneously, and the second door body 4 moves to the open position, and if the first door body 3 is in the open state, then the first door body 3 needs to be closed first and then the second door body 4 is opened, and the internal control logic sets the T0-a to the low level for the central processing unit 18, and simultaneously triggers the adrriver instantaneously, and the first door body 3 moves to the closed position, and simultaneously the PLC sets the T0-B to the high level, triggers the BDRIVER instantaneously, and the second door body 4 moves to the open position to complete the door opening logic.
In some embodiments, the central processor 18 is further configured to monitor the first servo motor controller 19 and the second servo motor controller 20 and to perform a fault warning when a fault signal is detected.
Specifically, the central processing unit 18 monitors the AERROR state in the whole control phase, the AERROR state is the working state of the electric actuator a, when the detected states are all at low level, the electric actuator a is in the normal working state, when the detected states are at high level, the electric actuator a is in the abnormal state in the working process, and the reason for the abnormal condition needs to be manually intervened and checked, and similarly, the central processing unit 18 monitors the berry state in the whole control phase, the berry state is the working state of the electric actuator B, when the detected states are all at low level, the electric actuator B is in the normal working state, when the detected states are at high level, the electric actuator B is in the abnormal state in the working process, and the reason for the abnormal condition needs to be manually intervened and checked.
In summary, according to the double-table exposure machine 1 of the embodiment of the invention, the first door body 3 and the second door body 4 are respectively arranged on the first table top 7 and the second table top 8, the two door bodies are both perpendicular to the table top direction and are arranged in a vertically staggered manner, the first door body 3 and the second door body 4 are respectively driven to move in the direction parallel to the table top by adopting the installation mode, the door bodies are opened or closed, thereby preventing dust from falling on the table top and improving the exposure quality, the two door bodies are arranged in a vertically staggered manner, compared with the two door bodies arranged side by side, the machine body width can be reduced, and the first door body 3 and the second door body 4 are mutually locked, thereby when one table top is exposed and controlled, the other table top can be pre-installed, the production efficiency can be improved, external dust can be prevented from entering, the exposure quality is influenced, and the door body movement is controlled by the electric actuator 6, compared with the mode of adopting a pneumatic door to control the state of the door body, the speed is controllable, the control precision is improved, and the influence on the exposure process caused by insufficient air source or overlarge air source is avoided, so that the exposure quality is influenced.
A method of controlling a switching gate of a double-mesa exposure machine according to an embodiment of the second aspect of the present invention will be described below with reference to the accompanying drawings.
Fig. 3 is a flowchart of a method of controlling the opening and closing of the door of the double-mesa exposure apparatus according to an embodiment of the present invention, and as shown in fig. 3, the method of controlling the opening and closing of the door of the double-mesa exposure apparatus according to an embodiment of the present invention includes at least steps S1, S2, and S3.
And step S1, receiving a door opening instruction of one of the first door and the second door.
Specifically, when the PLC detects that, for example, the first switch is continuously triggered for two seconds, the PLC receives a first door opening command.
And step S2, judging whether the other one of the first door body and the second door body is in a closed state.
Specifically, the PLC can judge the state of the second door body while opening the first door body. The COM of the PLC module is connected with the other node of the four keys, servo positioning setting is carried out on the servo motor controller by sampling the states of DI _13, DI _14, DI _15 and DI _16, and the state of the door body is judged by detecting the states of the four switches.
And step S3, determining that the other one of the first door body and the second door body is in a closed state, and controlling the one of the first door body and the second door body to move to an open position according to a door body opening instruction.
Specifically, if the second door is in a closed state, the second door is not operated, and if the second door is in an open state, the second door needs to be closed first and then the first door needs to be opened.
According to the method for controlling the opening and closing of the double-table exposure machine, one of the first door body or the second door body receives the opening instruction, the state of the first door body or the second door body is determined by judging the state of the other of the first door body and the second door body, the two door bodies are in two different states, namely, an interlocking mode control mode is adopted, when one table top is subjected to exposure control, the other table top can be pre-installed, and the exposure quality is ensured while the production efficiency is improved.
In some embodiments, the method of controlling the opening and closing of the door of the double-mesa exposure machine further comprises: fault monitoring is carried out on servo motor controllers of the first door body and the second door body; and detecting a fault signal and carrying out fault warning.
Specifically, the central processing unit monitors the AERROR in the servo motor controller in the whole process, and when the AERROR is detected to be at a high level, the electric actuator is in an abnormal state in the working process, fault early warning needs to be carried out, and the abnormal reason needs to be considered to be checked.
The method for controlling the opening and closing of the dual-mesa exposure machine according to the embodiment of the present invention is described in detail below with reference to fig. 4, and as shown in fig. 4, is a flowchart of the method for controlling the opening and closing of the dual-mesa exposure machine according to the embodiment of the present invention.
In step S21, exposure is started.
Step S22 is ready for opening the first door release.
Step S23, determining whether the second door is closed, if yes, executing step S25; if not, go to step S24.
And step S24, closing the second door body.
And step S25, opening the first door body.
And step S26, closing the first door body after the board is placed, and exposing the first table top.
Step S27 is ready for opening the second door.
Step S28, judging whether the first door body is closed, if yes, executing step S30; if not, go to step S29.
And step S29, closing the first door body.
And step S30, opening the second door body.
And step S31, closing the second door body after the board is placed, and starting to expose the second table top.
Step S32, determining whether the exposure of the first mesa is completed, if yes, performing step S25; if not, go to step S27.
In summary, according to the method for controlling the opening and closing of the double-table exposure machine, one of the first door body or the second door body receives the opening instruction, the state of the other of the first door body and the second door body is judged, the state of the first door body or the second door body is determined, the two door bodies are in two different states, namely, an interlocking control mode is adopted, when one table top is subjected to exposure control, the other table top can be pre-installed, production efficiency is improved, external dust is prevented from entering the control table top for exposure, and exposure quality is guaranteed.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A double-table exposure machine, comprising:
a body comprising a first table top and a second table top;
the first door body is positioned on the first table top, a gap is formed between the first door body and the first table top, the second door body is positioned on the second table top, a gap is formed between the second door body and the second table top, and the first door body and the second door body are staggered in the direction perpendicular to the table top;
the electric execution device is arranged on the machine body, is mechanically connected with the first door body and the second door body, and is used for controlling the first door body to move in the direction parallel to the table top according to a first door body driving signal so as to open or cover the first table top, or controlling the second door body to move in the direction parallel to the table top according to a second door body driving signal so as to open or cover the second table top;
and the control device is electrically connected with the electric execution device and used for outputting the first door body driving signal or the second door body driving signal according to an operation instruction.
2. Double-mesa exposure machine according to claim 1,
the machine body is provided with a first sliding groove and a second sliding groove which extend in parallel to the direction of the table top and are staggered in the direction perpendicular to the direction of the table top on one side of the first table top and the second table top, one end of the first door body is accommodated in the first sliding groove, one end of the second door body is accommodated in the second sliding groove, and a first sliding rail and a second sliding rail which extend in parallel to the direction of the table top are arranged on the machine body on the other side of the first table top and the second table top;
the electric execution device comprises a first encoder, a first motor and a first sliding block, the other end of the first door body is arranged on the first sliding block, the first encoder is electrically connected with the control device and used for controlling the first motor according to the first door body driving signal so as to drive the first sliding block to move along the first sliding rail, and therefore the first door body is driven to move in the direction parallel to the table top;
the electric execution device further comprises a second encoder, a second motor and a second sliding block, the second sliding block and the first sliding block are staggered in the direction perpendicular to the table board, the other end of the second door body is arranged on the second sliding block, and the second encoder is electrically connected with the control device and used for controlling the second motor to drive the second sliding block to move along the second sliding rail according to the second door body driving signal so as to drive the second door body to move in the direction parallel to the table board.
3. The double-mesa exposure machine of claim 2, wherein the control device includes:
the central processing unit is used for outputting a first table control signal according to a first door body opening and closing instruction, or outputting a second table control signal according to a second door body opening and closing instruction;
the first servo motor controller is respectively electrically connected with the central processor and the first encoder and is used for sending the first door body driving signal to the first encoder according to the first table-board control signal;
and the second servo motor controller is respectively electrically connected with the central processing unit and the second encoder and is used for sending a second door body driving signal to the second encoder according to the second table control signal.
4. The double-table exposure machine of claim 1, further comprising:
the first switch assembly is electrically connected with the central processing unit and used for outputting a first door body switch instruction when receiving an operation action;
and the second switch assembly is electrically connected with the central processing unit and is used for outputting a second door body switch instruction when receiving an operation action.
5. The dual stage exposure machine of claim 4, wherein the first switch assembly comprises:
and the first switch and the second switch are both arranged on the machine body and electrically connected with the central processing unit, and are used for outputting the first door body switch instruction when receiving an operation action.
6. The dual stage exposure machine of claim 4, wherein the second switch assembly comprises:
and the third switch and the fourth switch are both arranged on the machine body, are electrically connected with the central processing unit and are used for outputting a second door body switch instruction when receiving an operation action.
7. The double-mesa exposure machine according to claim 6, wherein the control device, when outputting the first door driving signal or the second door driving signal according to an operation instruction, is configured to output the first door driving signal when receiving the first door opening instruction and determining that the second door is in a closed state, or output the second door driving signal when receiving the second door opening instruction and determining that the first door is in a closing device.
8. The dual-stage exposure machine of claim 3, wherein the central processor is further configured to monitor the first servo motor controller and the second servo motor controller and to perform a fault warning when a fault signal is detected.
9. A method for controlling the opening and closing of a door of a double-table exposure machine is characterized by comprising the following steps:
receiving a door opening instruction of one of the first door body and the second door body;
judging whether the other one of the first door body and the second door body is in a closed state;
and determining that the other one of the first door body and the second door body is in a closed state, and controlling one of the first door body and the second door body to move to an open position according to the door body opening instruction.
10. The method for controlling the opening and closing of the door of the double-mesa exposure machine according to claim 9, further comprising:
monitoring faults of servo motor controllers of the first door body and the second door body;
and detecting a fault signal and carrying out fault warning.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010081788.9A CN111308863A (en) | 2020-02-06 | 2020-02-06 | Double-table exposure machine and method for controlling opening and closing of door of double-table exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010081788.9A CN111308863A (en) | 2020-02-06 | 2020-02-06 | Double-table exposure machine and method for controlling opening and closing of door of double-table exposure machine |
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| CN111308863A true CN111308863A (en) | 2020-06-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010081788.9A Pending CN111308863A (en) | 2020-02-06 | 2020-02-06 | Double-table exposure machine and method for controlling opening and closing of door of double-table exposure machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114162450A (en) * | 2020-09-11 | 2022-03-11 | 长鑫存储技术有限公司 | Door plate sealing monitoring system, method, device, medium and equipment of exposure machine platform |
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| CN205028025U (en) * | 2015-07-21 | 2016-02-10 | 合肥芯硕半导体有限公司 | A LDI duplex exposure device |
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| CN114162450A (en) * | 2020-09-11 | 2022-03-11 | 长鑫存储技术有限公司 | Door plate sealing monitoring system, method, device, medium and equipment of exposure machine platform |
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