CN111307341A - Flexible capacitive pressure sensor - Google Patents
Flexible capacitive pressure sensor Download PDFInfo
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- CN111307341A CN111307341A CN202010250469.6A CN202010250469A CN111307341A CN 111307341 A CN111307341 A CN 111307341A CN 202010250469 A CN202010250469 A CN 202010250469A CN 111307341 A CN111307341 A CN 111307341A
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- capacitive pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
Abstract
The invention discloses a flexible capacitive pressure sensor, which comprises an electrode layer, a dielectric layer and a thickening layer, wherein the electrode layer is compounded on one side surface of the dielectric layer to form an electrode structure, and the dielectric layers of two groups of electrode structures are compounded to form a flexible capacitive pressure sensor body; the another side of dielectric layer has a plurality of cylinder arch through mould contour machining, and the clearance between every adjacent four cylinder archs is used for the card to go into the cylinder arch that corresponds on another dielectric layer to can realize stable concatenation, still have the space between vertical and horizontal two adjacent cylinder archs simultaneously, the cross recess has been seted up to the bellied tip of cylinder. The basic structure of the flexible capacitive pressure sensor is formed by the electrode layer and the dielectric layer, the cylindrical bulge is formed and processed on one side surface of the dielectric layer, and the electrode structure can realize rapid combination, so that the production efficiency can be greatly improved.
Description
Technical Field
The invention relates to a sensor, in particular to a flexible capacitive pressure sensor.
Background
At present, more and more special signals and special environments require sensors to have the characteristics of transparency, flexibility, extension, free bending and even folding, portability, wearability and the like. Therefore, the development of the flexible pressure sensor with high performance and low cost has very wide application prospect. From the sensitive mechanism, the types of flexible pressure sensors reported at present can be mainly divided into two types, namely a resistance type pressure sensor and a capacitance type pressure sensor. From the structural design point of view, the two types of flexible pressure sensors are very similar in structure, and generally comprise two layers of flexible electrodes and one layer of flexible pressure-sensitive material. The resistive flexible pressure sensor has the advantages of high sensitivity and convenient device preparation and characterization, but the pressure sensor is not suitable for low-power consumption application. For the flexible capacitive sensor, the pressure-sensitive dielectric medium is pressed to deform under the action of pressure, and the capacitance value is changed. The factor of the capacitance change includes two aspects, on one hand, the pressure effect changes the plate distance of the capacitor. On the other hand, the dielectric constant of the dielectric changes due to the action of the pressure. A typical advantage of capacitive flexible pressure sensors is low power consumption compared to resistive flexible pressure sensors, and therefore, is receiving increasing attention.
The conventional manufacturing mode of the capacitive pressure sensor is still multilayer compounding, the fixation of a layer structure is realized during the preparation, and the expansibility is not high.
Disclosure of Invention
The present invention is directed to a flexible capacitive pressure sensor, which solves the above problems of the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
a flexible capacitive pressure sensor comprises an electrode layer, a dielectric layer and a thickening layer, wherein the electrode layer is compounded on one side surface of the dielectric layer to form an electrode structure, and the dielectric layers of two groups of electrode structures are compounded to form a flexible capacitive pressure sensor body; the another side of dielectric layer has a plurality of cylinder arch through mould contour machining, and the clearance between every four adjacent cylinder archs is used for the card to go into the cylinder arch that corresponds on another dielectric layer to can realize stable concatenation, still have the space between two vertical and horizontal adjacent cylinder archs simultaneously, the cross recess has been seted up to the bellied tip of cylinder, and the tip of cross recess is just to vertical and horizontal adjacent cylinder arch.
As a further scheme of the invention: the thickening layer is arranged between the two groups of electrode structures, a plurality of cylindrical protrusions are integrally formed on two side faces of the thickening layer, and the arrangement of the cylindrical protrusions on the two side faces of the thickening layer is the same as that of the cylindrical protrusions on the other side face of the dielectric layer.
As a further scheme of the invention: the surface of an electrode layer of the electrode structure is fixedly connected with one end of a lead by soldering, and the lead is fixedly connected to the surface of the electrode layer by an insulating adhesive tape.
As a further scheme of the invention: the electrode layer comprises the following raw materials in parts by weight: 100-120 parts of nano silver, 10-20 parts of conductive additive, 8-12 parts of binder and 4-6 parts of dispersant.
As a further scheme of the invention: the conductive additive is conductive carbon fiber.
As a further scheme of the invention: the dielectric layer comprises the following raw materials in parts by weight: 100-120 parts of polydimethylsiloxane, 40-60 parts of silica gel, 10-12 parts of foaming agent and 10-12 parts of curing agent.
As a further scheme of the invention: the preparation method of the electrode structure comprises the following steps:
(1) manufacturing a dielectric layer: uniformly mixing the raw materials of the silica gel, the foaming agent and the polydimethylsiloxane by using a high-speed centrifuge; adding a curing agent into the mixture before the mold is formed, and uniformly mixing again;
preparing a mould, preheating the mould to 50-60 ℃, then injecting the mixed solution into the mould, raising the temperature of the mould to 120 ℃ and keeping the temperature for 30-40 minutes, and taking out the dielectric layer after the dielectric layer is completely cured;
(2) preparing an electrode layer: grinding the conductive additive, the binder and the dispersant into powder with the size of 800-1000 meshes, mixing the powder with the nano-silver, and adding water to prepare a dispersion liquid;
(3) coating the dispersion liquid made of the raw materials consisting of the electrode layer on the smooth surface of the dielectric layer, placing the dielectric layer in a vacuum device for keeping vacuum, and forming the electrode structure after the electrode layer materials in the dispersion liquid are attached to the surface of the dielectric layer.
As a further scheme of the invention: the inner cavity of the dielectric layer forming die is complementary with the dielectric layer structure, a groove matched with the cylindrical protrusion is formed in any one side surface of the upper die and the lower die of the die, and an electric heating unit is further mounted on the outer surface of the die.
As a further scheme of the invention: the die also comprises a thickening layer die, the materials of the thickening layer and the dielectric layer are the same as well as the forming method, and grooves matched with the cylindrical protrusions are formed in the inner side surface of the upper die and the inner side surface of the lower die of the thickening layer die.
Compared with the prior art, the invention has the beneficial effects that: the basic structure of the flexible capacitive pressure sensor is formed by the electrode layer and the dielectric layer, the cylindrical bulge is formed and processed on one side surface of the dielectric layer, and the electrode structure can realize rapid combination, so that the production efficiency can be greatly improved.
The invention can also expand the thickening layer, and the thickening layer adopts the same structural design, thereby being capable of carrying out batch production with different sensitivities.
In addition, the invention adopts the material and the manufacturing process of the dielectric layer, and can ensure that the dielectric layer has better elasticity and larger dielectric constant.
Drawings
Fig. 1 is a schematic structural diagram of a flexible capacitive pressure sensor.
Fig. 2 is a schematic structural diagram of an electrode layer surface and a lead in a flexible capacitive pressure sensor.
FIG. 3 is a schematic structural diagram of a side of a dielectric layer in a flexible capacitive pressure sensor.
In the figure: electrode layer 1, dielectric layer 2, thickening layer 3, cylindrical protrusion 21, cross-shaped groove 22, wire 4.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 3, in an embodiment of the present invention, a flexible capacitive pressure sensor includes an electrode layer 1, a dielectric layer 2, and a thickening layer 3, where the electrode layer 1 is combined on one side of the dielectric layer 2 to form an electrode structure, and the dielectric layers 2 of the two sets of electrode structures are combined to form a flexible capacitive pressure sensor body, that is, the distance between the two electrode layers 1 is changed to change capacitance, so as to implement pressure sensing. Another side of dielectric layer 2 has a plurality of cylinder arch 21 through mould contour machining, and the clearance between every adjacent four cylinder arch 21 is used for going into another dielectric layer 2 and goes up corresponding cylinder arch 21 to can realize stable concatenation, still have the space between vertical and horizontal adjacent two cylinder arch 21 simultaneously, cross recess 22 has been seted up to the tip of cylinder arch 21, and cross recess 22's tip is just to vertical and horizontal adjacent cylinder arch 21, and when external force applied to the sensor surface and led to it to take place deformation, the gas pocket total amount reduces in the compound dielectric layer, and the dielectric constant of air/elastomer mixed dielectric layer increases, thereby the capacitance value rising factor of the capacitive sensor that arouses by two reasons: the reduction of the electrode layer spacing and the increase of the dielectric constant further improve the sensitivity. In the actual use process, glue can be adopted to further strengthen the bonding according to the application scene.
Set up thickening layer 3 between two sets of electrode structures and realize the interval adjustment, and then can carry out the production of different sensitivity batchs, and the same integrated into one piece of both sides face of this thickening layer 3 has a plurality of cylinder arch 21, and arranging of 3 both sides face cylinder arch 21 of thickening layer is the same with arranging of 2 another side cylinder arch 21 of dielectric layer to in the quick equipment of multilayer, the mode of its use is also more open simultaneously.
The surface of an electrode layer 1 of the electrode structure is fixedly connected with one end of a lead wire 4 through tin soldering, the lead wire 4 is fixedly connected to the surface of the electrode layer 1 through an insulating adhesive tape 5, and after the two groups of electrode structures form a flexible capacitive pressure sensor body, detection can be achieved by respectively connecting the two lead wires to the positive electrode and the negative electrode of the input end of a detection circuit.
Further, the material of the electrode layer 1 comprises the following components in parts by weight: 100-120 parts of nano silver, 10-20 parts of conductive additive, 8-12 parts of binder and 4-6 parts of dispersant.
Wherein the conductive additive is conductive carbon fiber.
The dielectric layer 2 comprises the following raw materials in parts by weight: 100-120 parts of polydimethylsiloxane, 40-60 parts of silica gel, 10-12 parts of foaming agent and 10-12 parts of curing agent.
The preparation method of the electrode structure comprises the following steps:
(1) manufacturing a dielectric layer: uniformly mixing the raw materials of the silica gel, the foaming agent and the polydimethylsiloxane by using a high-speed centrifuge; adding a curing agent into the mixture before the mold is formed, and uniformly mixing again;
preparing a mould, preheating the mould to 50-60 ℃, then injecting the mixed solution into the mould, raising the temperature of the mould to 120 ℃ and keeping the temperature for 30-40 minutes, and taking out the dielectric layer after the dielectric layer is completely cured;
(2) preparing an electrode layer: grinding the conductive additive, the binder and the dispersant into powder with the size of 800-1000 meshes, mixing the powder with the nano-silver, and adding water to prepare a dispersion liquid;
(3) coating the dispersion liquid made of the raw materials consisting of the electrode layer on the smooth surface of the dielectric layer, placing the dielectric layer in a vacuum device for keeping vacuum, and forming the electrode structure after the electrode layer materials in the dispersion liquid are attached to the surface of the dielectric layer.
The die of the dielectric layer is designed according to the area of an actual product, and can also be uniformly designed into a large-area structure, and then the die is cut according to the requirement. The dielectric layer forming die is characterized in that a cavity in the dielectric layer forming die is complementary with a dielectric layer structure (grooves matched with the cylindrical protrusions 21 are formed in any one side surface of the upper die and the lower die of the die), and an electric heating unit is further mounted on the outer surface of the die, so that the heating is facilitated to promote the decomposition of a foaming device, and a loose and elastic structure is formed in the dielectric layer.
The mould also comprises a thickening layer mould, the material of the thickening layer and the dielectric layer 2 and the forming method are also consistent. The upper die inner side surface and the lower die inner side surface of the thickening layer die are provided with grooves matched with the cylindrical protrusions 21.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.
Claims (9)
1. A flexible capacitive pressure sensor comprises an electrode layer (1), a dielectric layer (2) and a thickening layer (3), and is characterized in that the electrode layer (1) is compounded on one side surface of the dielectric layer (2) to form an electrode structure, and the dielectric layers (2) of two groups of electrode structures are compounded to form a flexible capacitive pressure sensor body; another side of dielectric layer (2) has a plurality of cylinder arch (21) through mould contour machining, and the clearance between every adjacent four cylinder arch (21) is used for going into corresponding cylinder arch (21) on another dielectric layer (2), still has the space simultaneously between vertical and horizontal adjacent two cylinder arch (21), cross recess (22) have been seted up to the tip of cylinder arch (21), and the tip of cross recess (22) is just to vertical and horizontal adjacent cylinder arch (21).
2. The flexible capacitive pressure sensor according to claim 1, wherein a thickening layer (3) is provided between two sets of electrode structures, wherein a plurality of cylindrical protrusions (21) are integrally formed on both sides of the thickening layer (3), and the cylindrical protrusions (21) on both sides of the thickening layer (3) are arranged in the same way as the cylindrical protrusions (21) on the other side of the dielectric layer (2).
3. The flexible capacitive pressure sensor according to claim 1 or 2, wherein the surface of the electrode layer (1) of the electrode structure is fixedly connected with one end of the lead (4) by soldering, and the lead (4) is fixedly connected to the surface of the electrode layer (1) by the insulating tape (5), so that when the two groups of electrode structures form the flexible capacitive pressure sensor body, the detection can be realized by respectively connecting the two leads to the positive and negative electrodes of the input end of the detection circuit.
4. The flexible capacitive pressure sensor according to claim 3, wherein the material of the electrode layer comprises the following components in parts by weight: 100-120 parts of nano silver, 10-20 parts of conductive additive, 8-12 parts of binder and 4-6 parts of dispersant.
5. The flexible capacitive pressure sensor of claim 4, wherein the conductive additive is conductive carbon fiber.
6. The flexible capacitive pressure sensor according to claim 1 or 2, wherein the dielectric layer is made of a material comprising the following components in parts by weight: 100-120 parts of polydimethylsiloxane, 40-60 parts of silica gel, 10-12 parts of foaming agent and 10-12 parts of curing agent.
7. The flexible capacitive pressure sensor according to claim 3, wherein the method of manufacturing the electrode structure comprises the steps of:
(1) manufacturing a dielectric layer: uniformly mixing the raw materials of the silica gel, the foaming agent and the polydimethylsiloxane by using a high-speed centrifuge; adding a curing agent into the mixture before the mold is formed, and uniformly mixing again;
preparing a mould, preheating the mould to 50-60 ℃, then injecting the mixed solution into the mould, raising the temperature of the mould to 120 ℃ and keeping the temperature for 30-40 minutes, and taking out the dielectric layer after the dielectric layer is completely cured;
(2) preparing an electrode layer: grinding the conductive additive, the binder and the dispersant into powder with the size of 800-1000 meshes, mixing the powder with the nano-silver, and adding water to prepare a dispersion liquid;
(3) coating the dispersion liquid made of the raw materials consisting of the electrode layer on the smooth surface of the dielectric layer, placing the dielectric layer in a vacuum device for keeping vacuum, and forming the electrode structure after the electrode layer materials in the dispersion liquid are attached to the surface of the dielectric layer.
8. The flexible capacitive pressure sensor according to claim 7, wherein the cavity inside the dielectric layer forming mold is complementary to the dielectric layer structure, a groove matched with the cylindrical protrusion is formed on any one side surface of the upper mold and the lower mold of the mold, and an electric heating unit is further mounted on the outer surface of the mold.
9. The flexible capacitive pressure transducer of claim 7, wherein the mold further comprises a thickening mold, the material and the forming method of the thickening mold are the same as those of the dielectric layer, and the inner side surface of the upper mold and the inner side surface of the lower mold of the thickening mold are both provided with grooves matched with the cylindrical protrusions.
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| CN202010250469.6A CN111307341B (en) | 2020-04-01 | 2020-04-01 | Flexible capacitive pressure sensor |
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| CN111307341B CN111307341B (en) | 2021-10-08 |
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| CN112798153A (en) * | 2020-12-25 | 2021-05-14 | 苏州大学 | Flexible capacitive pressure sensor and preparation method thereof |
| CN114034416A (en) * | 2021-10-19 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Flexible capacitive sensor and preparation method thereof |
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