CN111306902A - 一种槽盖热风循环烘箱 - Google Patents
一种槽盖热风循环烘箱 Download PDFInfo
- Publication number
- CN111306902A CN111306902A CN201911380177.8A CN201911380177A CN111306902A CN 111306902 A CN111306902 A CN 111306902A CN 201911380177 A CN201911380177 A CN 201911380177A CN 111306902 A CN111306902 A CN 111306902A
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- CN
- China
- Prior art keywords
- air
- silicon wafer
- oven
- hot air
- slot cover
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 63
- 239000010703 silicon Substances 0.000 claims abstract description 63
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 61
- 238000001035 drying Methods 0.000 claims abstract description 25
- 238000005192 partition Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims description 22
- 235000012431 wafers Nutrition 0.000 abstract description 45
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 206010024796 Logorrhoea Diseases 0.000 description 2
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/02—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure
- F26B21/04—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure partly outside the drying enclosure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911380177.8A CN111306902A (zh) | 2019-12-27 | 2019-12-27 | 一种槽盖热风循环烘箱 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911380177.8A CN111306902A (zh) | 2019-12-27 | 2019-12-27 | 一种槽盖热风循环烘箱 |
Publications (1)
Publication Number | Publication Date |
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CN111306902A true CN111306902A (zh) | 2020-06-19 |
Family
ID=71150802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911380177.8A Pending CN111306902A (zh) | 2019-12-27 | 2019-12-27 | 一种槽盖热风循环烘箱 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111306902A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113063272A (zh) * | 2021-04-14 | 2021-07-02 | 创微微电子(常州)有限公司 | 晶圆烘干槽、晶圆烘干方法和晶圆烘干装置 |
CN116086162A (zh) * | 2022-11-22 | 2023-05-09 | 珠海格力电器股份有限公司 | 用于制冰机的烘干装置、制冰机及其控制方法、存储介质 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014013114A (ja) * | 2012-07-04 | 2014-01-23 | Hoshizaki Electric Co Ltd | 乾燥装置 |
CN204819225U (zh) * | 2015-05-25 | 2015-12-02 | 歌尔声学股份有限公司 | 万向定位座 |
CN207163110U (zh) * | 2017-09-22 | 2018-03-30 | 张家港市超声电气有限公司 | 硅片烘槽 |
CN207515380U (zh) * | 2017-11-22 | 2018-06-19 | 广东元星工业新材料有限公司 | 一种烘箱 |
CN208419435U (zh) * | 2018-07-10 | 2019-01-22 | 德兴市东东农业科技开发有限公司 | 一种热风循环烘箱 |
CN208504893U (zh) * | 2018-06-20 | 2019-02-15 | 青岛新纪元检测评价有限公司 | 一种鼓风干燥箱 |
CN209744867U (zh) * | 2019-01-18 | 2019-12-06 | 郑州鼎能实业有限公司 | 一种新型热风循环式干燥箱 |
CN211084638U (zh) * | 2019-12-27 | 2020-07-24 | 上海釜川自动化设备有限公司 | 一种槽盖热风循环烘箱 |
-
2019
- 2019-12-27 CN CN201911380177.8A patent/CN111306902A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014013114A (ja) * | 2012-07-04 | 2014-01-23 | Hoshizaki Electric Co Ltd | 乾燥装置 |
CN204819225U (zh) * | 2015-05-25 | 2015-12-02 | 歌尔声学股份有限公司 | 万向定位座 |
CN207163110U (zh) * | 2017-09-22 | 2018-03-30 | 张家港市超声电气有限公司 | 硅片烘槽 |
CN207515380U (zh) * | 2017-11-22 | 2018-06-19 | 广东元星工业新材料有限公司 | 一种烘箱 |
CN208504893U (zh) * | 2018-06-20 | 2019-02-15 | 青岛新纪元检测评价有限公司 | 一种鼓风干燥箱 |
CN208419435U (zh) * | 2018-07-10 | 2019-01-22 | 德兴市东东农业科技开发有限公司 | 一种热风循环烘箱 |
CN209744867U (zh) * | 2019-01-18 | 2019-12-06 | 郑州鼎能实业有限公司 | 一种新型热风循环式干燥箱 |
CN211084638U (zh) * | 2019-12-27 | 2020-07-24 | 上海釜川自动化设备有限公司 | 一种槽盖热风循环烘箱 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113063272A (zh) * | 2021-04-14 | 2021-07-02 | 创微微电子(常州)有限公司 | 晶圆烘干槽、晶圆烘干方法和晶圆烘干装置 |
CN113063272B (zh) * | 2021-04-14 | 2023-11-17 | 创微微电子(常州)有限公司 | 晶圆烘干槽、晶圆烘干方法和晶圆烘干装置 |
CN116086162A (zh) * | 2022-11-22 | 2023-05-09 | 珠海格力电器股份有限公司 | 用于制冰机的烘干装置、制冰机及其控制方法、存储介质 |
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PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant after: Shanghai Fuchuan Intelligent Technology Co.,Ltd. Address before: 201800 Building 1, No. 89, Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant before: SHANGHAI FUCHUAN AUTOMATION EQUIPMENT Co.,Ltd. Address after: No. 209, Zhangjing East Section, Xigang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214194 Applicant after: Wuxi Fuchuan Technology Co.,Ltd. Address before: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant before: Shanghai Fuchuan Intelligent Technology Co.,Ltd. |
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RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200619 |