CN111295033A - Novel broad width plasma surface treatment device - Google Patents

Novel broad width plasma surface treatment device Download PDF

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Publication number
CN111295033A
CN111295033A CN202010291719.0A CN202010291719A CN111295033A CN 111295033 A CN111295033 A CN 111295033A CN 202010291719 A CN202010291719 A CN 202010291719A CN 111295033 A CN111295033 A CN 111295033A
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CN
China
Prior art keywords
electrode
area
cavity
surface treatment
treatment device
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Pending
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CN202010291719.0A
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Chinese (zh)
Inventor
刘善石
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Kunshan Suncola Mechanical And Electronic Technology Co ltd
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Kunshan Suncola Mechanical And Electronic Technology Co ltd
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Application filed by Kunshan Suncola Mechanical And Electronic Technology Co ltd filed Critical Kunshan Suncola Mechanical And Electronic Technology Co ltd
Priority to CN202010291719.0A priority Critical patent/CN111295033A/en
Publication of CN111295033A publication Critical patent/CN111295033A/en
Priority to CN202010555233.3A priority patent/CN111669886A/en
Priority to CN202011361832.8A priority patent/CN112291915A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

The invention discloses a novel wide-width plasma surface treatment device, which comprises a closed box body and a workbench, the box body is sequentially divided into an air inlet area, an ionization area and an air outlet area from top to bottom, the air inlet area is provided with a working gas inlet hole, the air inlet area is internally provided with a gas mixing cavity, the middle of the ionization zone is provided with an electrode which is arranged in an electrode cavity in the middle of the box body, two ends of the electrode are connected with an external high-voltage power supply device, the electrode is a cylindrical long electrode which is transversely arranged, a ceramic insulating part is coated outside the electrode cavity, a gap for the working gas to pass through is arranged between the electrode cavity and the electrode, the upper end of the electrode cavity is provided with a gas mixing cavity of which the gas inlet channel is connected with the gas inlet area, the lower end of the electrode cavity is provided with a plasma channel connected with the gas outlet area, the gas outlet area is provided with a plasma outlet connected with the plasma channel, and the novel wide-width plasma surface treatment device has the following advantages: the arrangement of the strip electrode increases the processing width of the electrode, so that the problem of low production efficiency of a single nozzle is solved, meanwhile, the technical medium discharge is adopted, the structure is very simple, and in addition, through holes are fully distributed around the electrode, so that the high heat generated during electrode discharge is reduced by ventilation.

Description

Novel broad width plasma surface treatment device
Technical Field
The invention relates to the technical field of plasma treatment, in particular to a novel wide-width plasma surface treatment device.
Background
The plasma surface treatment technology can increase surface tension, finely clean, remove static electricity, activate surface and other functions, is widely applied to the surface modification treatment of glass, metal, cables, rubber, plastics, paste boxes and rubber, and the existing plasma surface treatment devices are generally divided into 2 types: one is a wide plasma surface treatment device which is composed of a single spray head and a plurality of electrode spray heads, the plasma electrodes are distributed too much, the structure is complex, and the operation of the whole plasma surface treatment device can be influenced by the problem of a single electrode.
Disclosure of Invention
In order to overcome the defects, the invention provides a novel wide-width plasma surface treatment device which is very simple in structure while ensuring that the treatment width is increased.
The technical scheme adopted by the invention for solving the technical problem is as follows: the utility model provides a novel broad width plasma surface treatment device, includes confined box and workstation, the box is from last to divide into air intake zone, ionization area and the district of giving vent to anger downwards in proper order, be equipped with the working gas inlet port on the air intake zone, set up the gas mixing chamber in the air intake zone, be equipped with the electrode in the middle of the ionization area, the electrode sets up in the electrode intracavity in the middle of the box, and outside high voltage power supply unit is connected to the one end of electrode, the electrode is a horizontal long electrode of placing, and a ceramic insulator of its outside cladding, be equipped with the clearance that supplies working gas to pass through between electrode chamber and the electrode, electrode chamber upper end is equipped with the gas mixing chamber that air inlet channel connects air intake zone, and electrode chamber lower extreme is equipped with plasma channel and connects air outlet zone, air outlet zone mouth is equipped with the plasma export of being connected.
As a further improvement of the invention, the electrode is formed by combining two long electrodes with semicircular cross sections, a spring is arranged between the two long electrodes, and two ends of the spring tightly support the two long electrodes, so that the long electrodes are tightly matched with the ceramic insulating part, and the electrodes can be ensured to be fully contacted with the ceramic.
As a further improvement of the invention, each long electrode is provided with a plurality of ventilation holes for cooling the electrode.
As a further improvement of the invention, the middle of the electrode is arranged in a hollow way, so that the cooling effect is further improved
As a further improvement of the invention, the lower parts of the box body and the workbench are provided with strip-shaped exhaust holes which are externally connected with an exhaust fan, so that the generated waste gas is directly exhausted, and the purposes of environmental protection, safety and no peculiar smell are achieved.
The invention has the beneficial effects that: the novel wide-width plasma surface treatment device has the following advantages: the arrangement of the strip electrode increases the processing width of the electrode, so that the problem of low production efficiency of a single nozzle is solved, meanwhile, the technical medium discharge is adopted, the structure is very simple, and in addition, through holes are fully distributed around the electrode, so that the high heat generated during electrode discharge is reduced by ventilation.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of an electrode structure according to the present invention;
FIG. 3 is a side view of this FIG. 1;
the following are marked in the figure: 1-a box body; 2-a workbench; 3-a gas inlet zone; 4-an ionization region; 5-a gas outlet zone; 6-working gas inlet hole; 7-a gas mixing cavity; 8-an electrode; 9-an electrode cavity; 10-a ceramic insulator; 11-an intake passage; 12-a plasma outlet; 13-a vent hole; 14-plasma discharge region.
Detailed Description
For the purpose of enhancing the understanding of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, which are only used for explaining the present invention and are not to be construed as limiting the scope of the present invention.
Fig. 1 shows an embodiment of the novel broad width plasma surface treatment apparatus of the present invention, comprising a closed box 1 and a working table 2, the box body 1 is sequentially divided into an air inlet area 3, an ionization area 4 and an air outlet area 5 from top to bottom, a working gas inlet hole 6 is arranged on the air inlet area 3, a gas mixing cavity 7 is arranged in the air inlet area 3, an electrode 8 is arranged in the middle of the ionization region 4, the electrode 8 is arranged in an electrode cavity 9 in the middle of the box body 1, one end of the electrode 8 is connected with an external high-voltage power supply device, the electrode 8 is a cylindrical long electrode which is transversely arranged, the ceramic insulator 10 is coated outside the electrode cavity 9, a gap for working gas to flow is arranged between the electrode cavity 9 and the electrode 8, the upper end of the electrode cavity 9 is provided with an air inlet channel 11 connected with an air mixing cavity 7 of an air inlet area, the lower end of the electrode cavity 9 is provided with a plasma channel connected with an air outlet area 5, and a plasma outlet 12 connected with the plasma channel is arranged at the opening of the air outlet area 5.
As shown in fig. 2, the electrode 8 is formed by combining two long electrodes with semicircular cross sections, a spring is arranged between the two long electrodes, and two ends of the spring tightly support the two long electrodes, so that the long electrodes are tightly matched with the ceramic insulating part 10, and the electrodes can be fully contacted with the ceramic.
And a plurality of vent holes 13 are arranged on each long electrode and used for cooling the electrodes.
The middle of the electrode 8 is arranged in a hollow mode, and the cooling effect is further improved.
The lower part of box 1 and the lower part of workstation 2 set up rectangular exhaust hole, and rectangular exhaust hole external air exhauster makes the waste gas direct discharge of production, accomplishes environmental protection, safety, free from extraneous odour.
The working principle of the embodiment is as follows: the electrode 8 obtains energy after being electrified with high voltage, and generates inelastic collision with gas molecules or atoms in the discharge gap and transfers almost all energy, so that the gas is excited to generate electrode avalanche, a large amount of space charges are generated, the space charges are gathered at an avalanche head to form an electric field and are superposed on an external electric field to act on electrons at the same time, partial high-energy electrons in the avalanche are further accelerated to escape towards the direction of an anode, a breakdown channel formed by the escaping electrons enables the electron charges to have a higher speed than the electron migration, and two electric field waves to and fro between the electrodes are formed, so that one conducting channel can pass through the discharge gap very quickly, a large amount of filament-shaped pulse microdischarges are formed as shown in figure 3, and the whole discharge gap is uniformly and stably filled; the ionized gas forms a wider plasma discharge area 14 through a plasma channel, and low-temperature plasma is sprayed out from a plasma outlet to activate the surface of the product.

Claims (5)

1. A novel broad width plasma surface treatment device is characterized in that: comprises a closed box body (1) and a workbench (2), wherein the box body (1) is sequentially divided into an air inlet area (3), an ionization area (4) and an air outlet area (5) from top to bottom, a working gas inlet hole (6) is formed in the air inlet area (3), an air mixing cavity (7) is arranged in the air inlet area (3), an electrode (8) is arranged in the middle of the ionization area (4), the electrode (8) is arranged in an electrode cavity (9) in the middle of the box body (1), one end of the electrode (8) is connected with an external high-voltage power supply device, the electrode (8) is a transversely arranged long electrode, a ceramic insulating part (10) is coated outside the electrode (8), a gap for working gas to flow is formed between the electrode cavity (9) and the electrode (8), an air inlet channel (11) is arranged at the upper end of the electrode cavity (9) and connected with the air mixing cavity (7) in the air inlet area, a plasma channel is arranged at the lower end of the electrode, and a plasma outlet (12) connected with the plasma channel is arranged at the outlet of the gas outlet area (5).
2. The novel broad width plasma surface treatment device according to claim 1, wherein: the electrode (8) is formed by combining two long electrodes with semicircular cross sections, a spring is arranged between the two long electrodes, and two ends of the spring tightly support the two long electrodes, so that the long electrodes are tightly matched with the ceramic insulating part (10), and the electrodes can be fully contacted with ceramic.
3. The novel broad width plasma surface treatment device according to claim 2, wherein: and a plurality of vent holes (13) are arranged on each long electrode and used for cooling the electrodes.
4. The novel broad width plasma surface treatment device according to claim 1, wherein: the middle of the electrode (8) is arranged in a hollow mode, and the cooling effect is further improved.
5. The novel broad width plasma surface treatment device according to claim 1, wherein: the lower part of box (1) and the lower part of workstation (2) set up rectangular exhaust hole, the external air exhauster of rectangular exhaust hole.
CN202010291719.0A 2020-04-14 2020-04-14 Novel broad width plasma surface treatment device Pending CN111295033A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202010291719.0A CN111295033A (en) 2020-04-14 2020-04-14 Novel broad width plasma surface treatment device
CN202010555233.3A CN111669886A (en) 2020-04-14 2020-06-17 Novel broad width plasma surface treatment device
CN202011361832.8A CN112291915A (en) 2020-04-14 2020-11-28 Novel broad width plasma surface treatment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010291719.0A CN111295033A (en) 2020-04-14 2020-04-14 Novel broad width plasma surface treatment device

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CN111295033A true CN111295033A (en) 2020-06-16

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CN202010291719.0A Pending CN111295033A (en) 2020-04-14 2020-04-14 Novel broad width plasma surface treatment device
CN202010555233.3A Withdrawn CN111669886A (en) 2020-04-14 2020-06-17 Novel broad width plasma surface treatment device
CN202011361832.8A Pending CN112291915A (en) 2020-04-14 2020-11-28 Novel broad width plasma surface treatment device

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CN202011361832.8A Pending CN112291915A (en) 2020-04-14 2020-11-28 Novel broad width plasma surface treatment device

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CN114286488B (en) * 2021-12-30 2023-02-28 南京工业大学 Atmospheric pressure large-scale DBD material modification device based on gas circuit modularization

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CN100420904C (en) * 2002-12-28 2008-09-24 徐宝安 Anti-scaling external shell full glass metal heat pipe vacuum heat collecting tube
KR100520407B1 (en) * 2003-12-26 2005-10-11 위순임 Apparatus for generating plasma at atmospheric pressure
CN1661298A (en) * 2004-02-27 2005-08-31 徐宝安 Vacuum solar transduction heat pipe structured in all glass body case and manufacturing method
JP2006100031A (en) * 2004-09-28 2006-04-13 Nittetsu Mining Co Ltd Gas excitation apparatus with insulator coating layer supported electrode and gas excitation method
KR101349488B1 (en) * 2009-05-28 2014-01-08 다다 덴키 가부시키가이샤 Ozone generator
JP5940239B2 (en) * 2009-11-02 2016-06-29 株式会社イー・スクエア Plasma surface treatment apparatus and manufacturing method thereof
CN102103960B (en) * 2009-12-16 2013-02-20 中国科学院电子学研究所 Outer cylinder side opening type multistage depressed collector component and manufacturing method thereof
KR102124042B1 (en) * 2013-02-18 2020-06-18 삼성디스플레이 주식회사 Vapor deposition apparatus and method for manufacturing organic light emitting display apparatus
CN104709880B (en) * 2013-12-11 2017-02-08 福建新大陆环保科技有限公司 Ozone generation unit and ozone generator applying same
KR20160000709A (en) * 2014-06-25 2016-01-05 (주)트리비스 Wide atmospheric pressure plasma discharge device
CN213522486U (en) * 2020-04-14 2021-06-22 昆山索坤莱机电科技有限公司 Novel broad width plasma surface treatment device

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Publication number Publication date
CN111669886A (en) 2020-09-15
CN112291915A (en) 2021-01-29

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