CN111293032A - Magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity - Google Patents
Magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity Download PDFInfo
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- CN111293032A CN111293032A CN202010160324.7A CN202010160324A CN111293032A CN 111293032 A CN111293032 A CN 111293032A CN 202010160324 A CN202010160324 A CN 202010160324A CN 111293032 A CN111293032 A CN 111293032A
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- hollow cathode
- lamp
- lamp tube
- magnetic field
- magnetron sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/067—Main electrodes for low-pressure discharge lamps
- H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/09—Hollow cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
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- Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract
The invention relates to a magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity, which comprises a lamp tube (1), wherein a cylindrical hollow cathode (2), an annular anode (3) and inert gas (4) are arranged in the lamp tube (1), the inner diameter of the annular anode (3) is larger than that of the cylindrical hollow cathode (2), a constant magnetic field (5) of at least 20mT is arranged in the lamp tube (1), and a vertical connecting line of an N pole and an S pole of the constant magnetic field (5) is parallel to the axis of the cylindrical hollow cathode (2). Electrons are controlled to fly to the anode in an approximately spiral track through the constant magnetic field, the flying distance of the electrons between the two electrodes is obviously increased, the probability of collision with gas molecules is increased, more positive ions can be generated to bombard the surface of the cathode, the sputtering rate of the hollow cathode lamp is improved, the intensity of an emission spectral line of the hollow cathode lamp is enhanced, and therefore the detection sensitivity is improved.
Description
Technical Field
The invention relates to a hollow cathode lamp, in particular to a magnetron sputtering hollow cathode lamp capable of enhancing emission lines.
Background
Hollow Cathode Lamps (HCLs) are the most commonly used excitation light sources in atomic fluorescence spectroscopy. The existing hollow cathode lamp has a structure of a lamp tube, a cylindrical hollow cathode, an annular anode and an inert gas are arranged in the lamp tube, the annular anode and the cylindrical hollow cathode are coaxial, the inner diameter of the annular anode is smaller than or equal to that of the cylindrical hollow cathode, and the inert gas is argon or neon of several hundred pascals. The main principle is based on the low-pressure gas glow discharge phenomenon, when a certain voltage is applied to the cathode and the anode, electrons fly to the anode under the action of an electric field and collide with argon or neon atoms filled in a lamp in the process to form positive ions, the positive ions obtain kinetic energy from the electric field and then impact the cathode, so that the atoms are sputtered from the surface of the cathode, and the sputtered atoms collide with the electrons, atoms, ions and the like to be excited to emit characteristic resonance lines absorbed by ground state atoms of elements to be detected. Therefore, the electron quantity influences the cathode sputtering rate, so that the intensity of the emission spectral line of the hollow cathode lamp is determined, and the important index of the sensitivity of the atomic fluorescence spectrometer is further influenced.
Currently, means for increasing the number of electrons mainly focus on two ways of improving the structure and changing the power supply mode. The improved structure is mainly that an auxiliary cathode which is easy to emit electrons is added in the lamp, although the service life of the hollow cathode lamp is not influenced, the processing difficulty is improved; the change of the power supply mode mainly improves the instant power or the average power of the lamp, which easily causes the intensity fluctuation of emission lines, self-absorption and even shortens the service life.
Disclosure of Invention
The invention aims to solve the technical problems in the prior art and provides a magnetron sputtering hollow cathode lamp capable of enhancing an emission line.
The technical solution of the invention is as follows: a magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity comprises a lamp tube, wherein a cylindrical hollow cathode, an annular anode and inert gas are arranged in the lamp tube, the inner diameter of the annular anode is larger than that of the cylindrical hollow cathode, a constant magnetic field of at least 20mT is arranged in the lamp tube, and a vertical connecting line of an N pole and an S pole of the constant magnetic field is parallel to the axis of the cylindrical hollow cathode.
The invention controls electrons to fly to the anode in an approximately spiral track through the constant magnetic field, obviously increases the flight distance of the electrons between the two electrodes, increases the probability of collision with gas molecules, can generate more positive ions to bombard the surface of the cathode, improves the sputtering rate of the hollow cathode lamp, enhances the intensity of the emission spectral line of the hollow cathode lamp, and further improves the detection sensitivity. The invention does not need to arrange an auxiliary cathode in the lamp tube, has simple structure and easy manufacture, and simultaneously does not need to improve the instant power or the average power of the lamp, thereby avoiding the phenomena of emission line intensity fluctuation, self-absorption and service life shortening.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
FIG. 2 is a schematic diagram of a flight path of electrons between electrodes according to an embodiment of the present invention.
Detailed Description
The magnetron sputtering hollow cathode lamp capable of enhancing the intensity of an emission line is as shown in figure 1, the magnetron sputtering hollow cathode lamp is the same as the prior art and is provided with a lamp tube 1, a cylindrical hollow cathode 2, an annular anode 3 and inert gas 4 are arranged in the lamp tube 1, the inert gas 4 is argon or neon with the thickness of less than 10mmHg, the magnetron sputtering hollow cathode lamp is different from the prior art in that the inner diameter of the annular anode 3 is larger than that of the cylindrical hollow cathode 2 and is as large as possible in the lamp tube 1, a constant magnetic field 5 with the thickness of at least 20mT is arranged in the lamp tube 1, and the vertical connecting line of the N pole and the S pole of the constant magnetic. There are various ways to form the constant magnetic field 5, such as uniformly winding the magnetic induction coil 6 outside the lamp tube 1 as shown in fig. 1, and controlling the energizing current to generate the constant magnetic field 5 of at least 20mT inside the lamp tube 1, wherein the vertical connection line of the N pole and the S pole of the constant magnetic field 5 is parallel to the axis of the cylindrical hollow cathode 2. Permanent magnets or electromagnets can be arranged on two sides of the lamp tube 1, and the permanent magnets or electromagnets are arranged on the rear side of a receiving pool such as an atomizer, so that light receiving is prevented from being influenced.
The working principle is as follows:
after the hollow cathode lamp is electrified, an electric field is generated between the two electrodes. Because the inner diameter of the annular anode 3 is larger than that of the cylindrical hollow cathode 2, the electric field between the two electrodes has a component vertical to the longitudinal axis of the cylindrical hollow cathode 2, the component is in direct proportion to the difference between the inner diameter of the annular anode 3 and the inner diameter of the cylindrical hollow cathode, and electrons are acted by the electric field force of the component in the flying process. Meanwhile, because the direction of the magnetic field in the lamp tube 1 is parallel to the longitudinal axis of the cylindrical hollow cathode 2, the electrons will also be subjected to a lorentz force parallel to the plane of the annular anode 3 during flight. Eventually, the electrons will fly toward the ring anode 3 in an approximately spiral trajectory as shown in fig. 2 under two orthogonal forces. Compared with the electrons which fly linearly in the conventional hollow cathode lamp, the flight distance of the electrons between the two electrodes is remarkably increased, the probability of collision with gas molecules is increased, more positive ions can be generated to bombard the surface of the cathode, the sputtering rate of the hollow cathode lamp is improved, and the emission spectral line intensity of the hollow cathode lamp is enhanced.
Claims (1)
1. A magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity comprises a lamp tube (1), wherein a cylindrical hollow cathode (2), an annular anode (3) and inert gas (4) are arranged in the lamp tube (1), and the magnetron sputtering hollow cathode lamp is characterized in that: the inner diameter of the annular anode (3) is larger than that of the cylindrical hollow cathode (2), a constant magnetic field (5) of at least 20mT is arranged in the lamp tube (1), and a vertical connecting line of an N pole and an S pole of the constant magnetic field (5) is parallel to the axis of the cylindrical hollow cathode (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010160324.7A CN111293032B (en) | 2020-03-10 | 2020-03-10 | Magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010160324.7A CN111293032B (en) | 2020-03-10 | 2020-03-10 | Magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111293032A true CN111293032A (en) | 2020-06-16 |
| CN111293032B CN111293032B (en) | 2022-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010160324.7A Active CN111293032B (en) | 2020-03-10 | 2020-03-10 | Magnetron sputtering hollow cathode lamp capable of enhancing emission line intensity |
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| Country | Link |
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| CN (1) | CN111293032B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5526406A (en) * | 1978-08-14 | 1980-02-25 | Hitachi Ltd | Light source part of atomic absorption analyzer |
| CN88202356U (en) * | 1988-04-02 | 1988-12-07 | 北京有色金属研究总院 | High-performance hollow cathode lamp |
| CN103081057A (en) * | 2010-08-24 | 2013-05-01 | 耶合-奥灯具创造有限公司 | Energy efficient lamp |
-
2020
- 2020-03-10 CN CN202010160324.7A patent/CN111293032B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5526406A (en) * | 1978-08-14 | 1980-02-25 | Hitachi Ltd | Light source part of atomic absorption analyzer |
| CN88202356U (en) * | 1988-04-02 | 1988-12-07 | 北京有色金属研究总院 | High-performance hollow cathode lamp |
| CN103081057A (en) * | 2010-08-24 | 2013-05-01 | 耶合-奥灯具创造有限公司 | Energy efficient lamp |
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| Publication number | Publication date |
|---|---|
| CN111293032B (en) | 2022-12-30 |
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