CN112928001A - Miniaturized penning ion source based on magnetic anode structure - Google Patents
Miniaturized penning ion source based on magnetic anode structure Download PDFInfo
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- CN112928001A CN112928001A CN202110101071.0A CN202110101071A CN112928001A CN 112928001 A CN112928001 A CN 112928001A CN 202110101071 A CN202110101071 A CN 202110101071A CN 112928001 A CN112928001 A CN 112928001A
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- 230000005684 electric field Effects 0.000 claims abstract description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 16
- 239000010959 steel Substances 0.000 claims description 16
- 238000000605 extraction Methods 0.000 claims description 6
- 239000000696 magnetic material Substances 0.000 claims description 6
- 230000009286 beneficial effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 229910000859 α-Fe Inorganic materials 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 83
- 230000001965 increasing effect Effects 0.000 description 18
- 238000010884 ion-beam technique Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/36—Solid anodes; Solid auxiliary anodes for maintaining a discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
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Abstract
The invention discloses a miniaturized penning ion source based on a magnetic anode structure. The miniaturized ion source is a typical penning ion source structure, and in the system, electrons perform spiral motion under the combined action of an electric field and a magnetic field, so that high-density penning plasma is generated. The invention enhances the magnetic field intensity and uniformity of the axial magnetic field of the ion source through the magnetic anode structure, increases the track length of electrons in a discharge area, increases the collision probability of the working gas and the electrons of the ion source, and increases the ionization rate of the working gas of the ion source, thereby realizing the improvement of the atomic-ion ratio of the ion source.
Description
Technical Field
The invention relates to the technical field of ion sources, in particular to an anode with a magnetic structure and a miniaturized penning ion source based on the anode structure.
Background
An ion source is a device that generates a beam of charged particles. It provides the charged particle beam to the accelerator, one of the key components of the accelerator.
The penning ion source can stably work under low air pressure, has the characteristics of relatively simple structure and power supply system, long service life and easiness in miniaturization, and is widely applied to the aspects of petroleum logging, geological exploration and the like. As shown in fig. 1, the penning ion source mainly comprises a magnetic steel and a magnetic ring which are relatively fixed, an anode, a first cathode and a second cathode which are relatively fixed, and the like. After a high voltage with a certain amplitude is applied between the anode and the first cathode and the second cathode, electrons are generated by the cathode due to field emission, the electrons are accelerated under the action of an electric field of the first cathode/the second cathode-the anode, then are decelerated under the action of the electric field of the anode-the second cathode/the first cathode, the speed of the electrons at the boundary of the cathode is zero, then the electrons are accelerated reversely to move towards the anode, the electrons cannot escape from the anticathode axially, and the electrons cannot diffuse towards the wall of the anode longitudinally under the action of an axial magnetic field. In order to increase the chance of impact ionization between electrons and the working gas of the ion source, two methods are generally adopted, namely 1) the anode voltage is increased, so that the electrons obtain higher energy, and the discharge current is increased; 2) the axial magnetic field intensity is increased, so that electrons can be made into a spiral line, the radius of the spiral line is reduced, and the electron density is increased. However, for a miniaturized penning ion source, when the voltage is increased to a certain degree, part of electrons may fall onto the anode directly, so that the collision probability of the electrons and the working gas of the ion source is reduced, and the discharge is not facilitated.
The miniaturized penning ion source has a simple and compact structure, and has a series of requirements on the design of a magnetic circuit structure and the like, such as high magnetic field intensity in the designed ion source, small axial attenuation coefficient of a magnet and the like, in order to better realize the impact ionization of working gas of the ion source. In a word, to a certain extent, magnetic materials with excellent performance are selected, a magnetic circuit structure is reasonably designed, the magnetic field intensity and the uniformity of a magnetic field are increased, the density and the discharge current of plasma after ionization of working gas of the ion source can be effectively improved, the atomic ion ratio of extracted beam of the ion source can also be improved, the divergence degree of the ion beam is improved, and the like.
Disclosure of Invention
The invention aims to provide a magnetic anode structure and a miniaturized penning ion source based on the anode, and solves the problem that the atomic ion ratio of a beam current extracted by the penning ion source is not high under the condition of the prior art.
The invention is realized by the following technical scheme:
the miniature penning ion source based on the magnetic anode structure is characterized by comprising magnetic steel (1), a first cathode (2), an anode (3), a second cathode (4) and a magnetic ring (5), wherein the anode (3) is a cylindrical conductive magnetic ring, an anode hole (32) is formed in the axial direction of the anode (3), the first cathode (2) and the second cathode (4) are respectively located at two ends of the anode (3), the magnetic steel (1) is arranged on the outer side of the first cathode (2), and the magnetic ring (5) is arranged on the outer side of the second cathode (4);
after the voltage between the first cathode (2) and the anode (3) and the voltage between the second cathode (4) and the anode (3) exceed a threshold voltage, self-sustaining discharge is generated between the electrodes filled with low-pressure gas; in this magneto-electric system, electrons make a helical motion under the combined action of an electric field and a magnetic field, thereby generating a penning plasma.
Preferably, the voltage of the anode (3) is 1000-3000V.
Preferably, the section of the anode (3) is annular, the thickness of the pipe wall (31) is 2-5mm, and the section diameter of the anode hole (32) is 5-12 mm.
Preferably, the material of the anode (3) is a conductive magnetic material with higher hardness and melting point.
Preferably, the material of the anode (3) is a ferrite conductive magnetic material.
Preferably, the thickness of the first cathode (2) and the second cathode (4) is 2-10 mm.
Preferably, the thickness of the first cathode (2) and the second cathode (4) is preferably 5 mm.
The magnetizing directions of the magnetic steel (1) and the magnetic ring (5) are the same, and the magnetic steel and the magnetic ring are matched with the equidirectional axial magnetic field generated by the anode (3) simultaneously, so that the magnetic field intensity and the uniformity of the ion source axial magnetic field can be effectively enhanced, and the density of the penning plasma is improved and controlled.
Preferably, the magnetizing directions of the magnetic steel (1) and the magnetic ring (5) are axial, the magnetic field strength is 1000-10000Gs, and the magnetizing directions are the same.
Preferably, the magnetic steel (1) and the magnetic ring (5) are made of magnetic materials with high magnetic energy product, high working temperature and Curie temperature and stable performance.
A miniaturized penning ion source based on a magnetic anode structure is characterized in that: the magnetic anode is of a three-electrode structure and mainly comprises a first cathode (I), a magnetic anode (II) and a second cathode (III), wherein the magnetic anode (II) is a cylindrical conductive temperature-resistant high-magnetic-energy product magnetic ring, and an anode hole is axially arranged on the magnetic anode (II) and is positioned between the first cathode (I) and the second cathode (III);
after the voltage between the first cathode (I) and the magnetic anode (II) exceeds the threshold voltage, self-sustaining discharge is generated between the electrodes filled with low-pressure gas; in the magnetoelectric system, electrons make spiral line motion under the combined action of an electric field and a magnetic field, so that penning plasma is generated; the axial magnetic field with high strength and uniformity generated by the magnetic anode (II) is beneficial to realizing the improvement and control of the density of the penning plasma and the further miniaturization of the penning ion source.
Preferably, the central axis of the central circular hole of the magnetic anode II is consistent with the beam extraction direction; the cross section of the magnetic anode (II) is annular, the diameter of the cross section of the central circular hole is 5-12mm, and the thickness of the tube wall of the magnetic anode (II) is 2-5 mm;
the ion source generates a target ion beam by the penning discharge principle, and due to the size limitation of the penning ion source, the axial magnetic field intensity and uniformity generated by the penning ion source cannot be ensured, so that a large amount of electrons are lost on the magnetic anode (II). The magnetic anode (II) is made of magnetic conductive materials and has a cylindrical structure, electrons are well constrained in a discharge area between the cathode and the anode by generating an axial magnetic field with high magnetic field strength and uniformity, so that the running track of the electrons is increased, the collision frequency between the electrons and the working gas of the ion source and the ionization rate of the gas are improved, and the higher atomic ion ratio of the extracted beam is obtained. In the magnetic anode with the improved atomic ion ratio, the central axis of the anode hole is parallel to the beam extraction direction. In a miniaturized penning ion source, the density of plasma in the ion source mainly depends on the squeezing action generated by a magnetic field, the magnetic field intensity is increased, the ion density can be increased, the track length of electrons in a discharge area can be increased, the ionization opportunities of gas molecules and gas ions are increased, and the purpose of improving the atomic-ion ratio is achieved. The invention finds that the influence process of the electromagnetic field in the penning ion source on the ionization of the working gas of the ion source has the characteristics, and particularly designs the magnetic anode structure in the scheme. Therefore, the magnetic field intensity and the uniformity of the axial magnetic field of the ion source are enhanced, the track length of electrons in a discharge area is increased, the collision probability of the working gas and the electrons of the ion source is increased, the ionization rate of the working gas of the ion source is enhanced, and the atomic ion ratio of the ion source is improved. Meanwhile, the central hole area of the anode is basically a uniform axial magnetic field, and the electromagnetic field has stronger constraint capacity on electrons in the penning ion source, thereby being beneficial to increasing the ionization opportunity between gas molecules and electrons. Therefore, the magnetic anode structure has a positive effect on improving the atomic-ion ratio of the penning ion source.
The magnetic steel (1) and the magnetic ring (5) are arranged on the outer sides of the two cathodes of the penning ion source, so that the compensation of an axial magnetic field generated by the magnetic anode (3) is facilitated, and the magnetic field intensity and the uniformity of the axial magnetic field in the miniaturized penning ion source are further enhanced;
electrons are generated among the first cathode, the second cathode and the anode in a field emission mode, and the electrons perform acceleration, deceleration and spiral line motion among the cathode and the anode under the action of an electromagnetic field with higher strength and uniformity to generate high-density penning plasma. And the high-density penning plasma is extracted through the cathode hole of the second cathode, and the plane of the cathode hole of the second cathode is vertical to the extraction direction of the ions.
Compared with the prior art, the invention has the following advantages and beneficial effects:
according to the invention, the atomic ion ratio of the miniaturized penning ion source is improved through the magnetic anode structure, and meanwhile, the magnetic steel and the magnetic ring are arranged on the outer sides of the first cathode and the second cathode, so that the axial magnetic field generated by the anode is effectively compensated, and the magnetic field intensity and the uniformity of the axial magnetic field are further improved. The invention has simple and compact structure, simple ion beam optical design, low processing cost and easy realization of miniaturization.
The invention enhances the magnetic field intensity and uniformity of the axial magnetic field of the ion source through the magnetic anode structure, increases the track length of electrons in a discharge area, increases the collision probability of the working gas and the electrons of the ion source, and increases the ionization rate of the working gas of the ion source, thereby realizing the improvement of the atomic-ion ratio of the ion source.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the present drawings:
FIG. 1 is a geometric model of a miniaturized penning ion source established in example 1 of the present invention;
fig. 2 shows a geometric model of the penning ion source established in example 2 of the present invention.
Detailed Description
In order to solve the problems that the atomic ion ratio of the beam current led out by the miniaturized penning ion source in the prior art is not high, the invention provides a method for improving the magnetic field strength and the uniformity of an axial magnetic field of the ion source by arranging an anode of the miniaturized penning ion source into a magnetic conductive material and a cylindrical structure under the condition of not increasing the transverse size of the miniaturized penning ion source, thereby better restraining electrons, increasing the collision frequency between the electrons and the working gas of the ion source and the ionization rate of the working gas, and further improving the atomic ion ratio of the beam current led out by the ion source.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the following examples and accompanying drawings, wherein the schematic embodiments and descriptions of the present invention are provided for illustration only, but the scope of the present invention is not limited to the following examples.
Example 1
As shown in figure 1 of the drawings, in which,
a miniaturized penning ion source based on a magnetic anode structure comprises magnetic steel 1, a first cathode 2, an anode 3, a second cathode 4 and a magnetic ring 5, wherein the anode 3 is a cylindrical conductive electromagnetic ring, an anode hole 32 is axially arranged on the anode 3, the first cathode 2 and the second cathode 4 are respectively positioned at two ends of the anode 3, the magnetic steel 1 is arranged at the outer side of the first cathode 2, and the magnetic ring 5 is arranged at the outer side of the second cathode 4;
after the voltage between the first cathode 2 and the second cathode 4 and the anode 3 exceeds the threshold voltage, self-sustaining discharge is generated between the electrodes filled with low-pressure gas; in the magnetoelectric system, electrons make spiral line motion under the combined action of an electric field and a magnetic field, so that penning plasma is generated; the anode 3 can generate an axial magnetic field and is matched with the original magnetic steel and magnetic ring of the ion source to enhance the magnetic field intensity and uniformity of the axial magnetic field of the ion source, so that the penning plasma density is improved and controlled.
The invention relates to a magnetic anode 3, wherein the central axis of the central round hole (anode hole 32) is consistent with the beam extraction direction; the section of the anode 3 is annular, the diameter of the section of the central circular hole (anode hole 32) is 5mm-12mm, and the thickness of the pipe wall 31 of the anode 3 is 2mm-5 mm;
in a miniaturized penning ion source, the ion source generates a target ion beam by the penning discharge principle, and due to the size limitation of the miniaturized penning ion source, the strength and uniformity of the generated axial magnetic field cannot be ensured, so that a large amount of electrons are lost on an anode. In the anode structure in the embodiment, the anode 3 is made of a magnetic conductive material and has a cylindrical structure, electrons can be well constrained in a discharge area between the cathode and the anode by enhancing the axial magnetic field intensity and uniformity in the ion source, the running track of the electrons is increased, the collision frequency between the electrons and the working gas of the ion source and the ionization rate of the gas are improved, and the atomic ion ratio of the beam current led out by the miniaturized penning ion source is effectively improved.
When the anode structure in the embodiment is adopted to enhance the atomic ion ratio of the ion source, the existing miniaturized penning ion source anode can be directly replaced by the anode 3 in the embodiment, so that the high-density plasma is restrained and generated without adding extra parts, other physical structures are not required to be added, the advantages of simple structure are achieved, meanwhile, the beam optical design is simple, the cost is low, and the miniaturization is easy to realize.
Example 2
As shown in figure 2 of the drawings, in which,
the present embodiment is further improved on the basis of embodiment 1: the penning ion source is of a three-electrode structure and mainly comprises a first cathode I, a magnetic anode II and a second cathode III, wherein the magnetic anode II is a cylindrical conductive temperature-resistant high-magnetic-energy magnetic ring, and an anode hole is axially formed in the anode II and is positioned between the first cathode I and the second cathode III.
After the voltage between the first cathode I and the magnetic anode II exceeds the threshold voltage, self-sustaining discharge is generated between the electrodes filled with low-pressure gas; in the magnetoelectric system, electrons make spiral line motion under the combined action of an electric field and a magnetic field, so that penning plasma is generated; the axial magnetic field with high strength and uniformity generated by the magnetic anode II is beneficial to realizing the improvement and control of the penning plasma density and the further miniaturization of the penning ion source.
The central axis of the central circular hole of the magnetic anode II is consistent with the beam extraction direction; the cross section of the magnetic anode II is annular, the diameter of the cross section of the central circular hole is 5mm-12mm, and the thickness of the tube wall of the magnetic anode II is 2mm-5 mm;
in this embodiment, the ion source generates the target ion beam by the penning discharge principle, and due to the size limitation of the penning ion source, the axial magnetic field strength and uniformity generated by the penning ion source cannot be guaranteed, so that a large amount of electrons are lost on the magnetic anode II. In the anode structure in this embodiment, the magnetic anode II is made of a magnetic conductive material and has a cylindrical structure, and electrons are well confined in a discharge region between the cathode and the anode by generating an axial magnetic field with high magnetic field strength and uniformity, so that the movement trajectory of electrons is increased, the collision frequency between electrons and the working gas of the ion source and the ionization rate of the gas are improved, and a higher atomic-ion ratio of the extracted beam current is obtained.
When the anode structure in the embodiment is adopted to enhance the atomic ion ratio of the ion source, the existing miniaturized penning ion source anode can be directly replaced by the magnetic anode II in the embodiment, and the magnetic steel and the magnetic ring of the original penning ion source are removed, so that no additional part is needed to restrict and generate high-density plasma, the advantages of simple structure are achieved, meanwhile, the beam optical design is simple, the cost is low, and the miniaturization is easier to realize.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and the preferred embodiments of the present invention are described in the above embodiments and the description, and are not intended to limit the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
1. The miniature penning ion source based on the magnetic anode structure is characterized by comprising magnetic steel (1), a first cathode (2), an anode (3), a second cathode (4) and a magnetic ring (5), wherein the anode (3) is a cylindrical conductive magnetic ring, an anode hole (32) is formed in the axial direction of the anode (3), the first cathode (2) and the second cathode (4) are respectively located at two ends of the anode (3), the magnetic steel (1) is arranged on the outer side of the first cathode (2), and the magnetic ring (5) is arranged on the outer side of the second cathode (4);
after the voltage between the first cathode (2) and the anode (3) and the voltage between the second cathode (4) and the anode (3) exceed a threshold voltage, self-sustaining discharge is generated between the electrodes filled with low-pressure gas; in the magnetoelectric system, electrons make spiral line motion under the combined action of an electric field and a magnetic field, so that penning plasma is generated; the anode (3) can generate an axial magnetic field and is matched with the original magnetic steel and magnetic ring of the ion source to enhance the magnetic field intensity and uniformity of the axial magnetic field of the ion source, so that the density of the penning plasma is improved and controlled.
2. The miniaturized penning ion source according to claim 1, characterized in that the voltage of the anode (3) is 1000-3000V.
3. The miniaturized penning ion source according to claim 1, characterized in that the cross section of the anode (3) is ring-shaped, the thickness of the tube wall (31) is 2-5mm, and the cross section diameter of the anode hole (32) is 5-12 mm.
4. The miniaturized penning ion source according to claim 1, characterized in that the material of the anode (3) is a conductive magnetic material with high hardness and melting point.
5. The miniaturized penning ion source according to claim 1, characterized in that the material of the anode (3) is a conductive magnetic material such as ferrite.
6. The miniaturized penning ion source according to claim 1, characterized in that the thickness of the first cathode (2) and the second cathode (4) is 2-10 mm.
7. A miniaturized penning ion source according to claim 7, characterized in that the thickness of the first cathode (2) and the second cathode (4) is preferably 5 mm.
8. A miniaturized penning ion source based on a magnetic anode structure is characterized in that: the magnetic anode is of a three-electrode structure and mainly comprises a first cathode (I), a magnetic anode (II) and a second cathode (III), wherein the magnetic anode (II) is a cylindrical conductive temperature-resistant high-magnetic-energy product magnetic ring, and an anode hole is axially arranged on the magnetic anode (II) and is positioned between the first cathode (I) and the second cathode (III);
after the voltage between the first cathode (I) and the magnetic anode (II) exceeds the threshold voltage, self-sustaining discharge is generated between the electrodes filled with low-pressure gas; in the magnetoelectric system, electrons make spiral line motion under the combined action of an electric field and a magnetic field, so that penning plasma is generated; the axial magnetic field with high strength and uniformity generated by the magnetic anode (II) is beneficial to realizing the improvement and control of the density of the penning plasma and the further miniaturization of the penning ion source.
9. The miniaturized penning ion source of claim 9, wherein: the central axis of the central round hole of the magnetic anode II is consistent with the beam extraction direction; the cross section of the magnetic anode (II) is annular, the diameter of the cross section of the central circular hole is 5mm-12mm, and the thickness of the tube wall of the magnetic anode (II) is 2mm-5 mm.
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| CN202110101071.0A CN112928001A (en) | 2021-01-26 | 2021-01-26 | Miniaturized penning ion source based on magnetic anode structure |
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| CN202110101071.0A CN112928001A (en) | 2021-01-26 | 2021-01-26 | Miniaturized penning ion source based on magnetic anode structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114007322A (en) * | 2021-11-02 | 2022-02-01 | 西京学院 | Neutron tube structure with magnetic anode tube penning ion source led out in two directions |
| CN114007323A (en) * | 2021-11-02 | 2022-02-01 | 西京学院 | Neutron tube structure of cone-shaped penning ion source |
| CN114286491A (en) * | 2021-12-21 | 2022-04-05 | 中国科学技术大学 | Neutral atomic beam generating device and neutral atomic beam calibrating device |
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| CN114007322A (en) * | 2021-11-02 | 2022-02-01 | 西京学院 | Neutron tube structure with magnetic anode tube penning ion source led out in two directions |
| CN114007323A (en) * | 2021-11-02 | 2022-02-01 | 西京学院 | Neutron tube structure of cone-shaped penning ion source |
| CN114286491A (en) * | 2021-12-21 | 2022-04-05 | 中国科学技术大学 | Neutral atomic beam generating device and neutral atomic beam calibrating device |
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