CN111288903A - Measuring head and device capable of carrying out online measurement on various parameters of composite film - Google Patents
Measuring head and device capable of carrying out online measurement on various parameters of composite film Download PDFInfo
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- CN111288903A CN111288903A CN202010152710.1A CN202010152710A CN111288903A CN 111288903 A CN111288903 A CN 111288903A CN 202010152710 A CN202010152710 A CN 202010152710A CN 111288903 A CN111288903 A CN 111288903A
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- light beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
Abstract
The invention relates to a measuring head and a device capable of measuring multiple parameters of a composite film on line, which can be widely applied to the production and test processes of special films and complex component film materials. A measuring head capable of carrying out on-line measurement on various parameters of a composite film comprises a spatial information detection module and a spectral information detection module; the spatial information detection module comprises a first light source, a first light beam collection device and a first detector; the spectrum information detection module comprises an infrared light source, a light beam adjusting device, a wavelength screening device, a beam splitting device, a second light beam collecting device, a second detector, a third light beam collecting device and a third detector; the light beam emitted by the first light source is reflected after being obliquely irradiated on the coating, and the reflected light beam is collected by the first light beam collecting device and is projected on the first detector. The invention can acquire various parameter information of the same detection area in real time and high precision aiming at the composite membrane with complex components.
Description
Technical Field
The invention belongs to the field of industrial measurement, relates to a measuring head and a device capable of carrying out on-line measurement on various parameters of a composite film, and can be widely applied to the production and test processes of special films and complex component film materials.
Background
The conventional measuring instrument generally adopts a ray type measuring mode of X-ray β rays or a vortex or ultrasonic measuring mode when measuring the film type product, and in the optical field, a laser triangulation method is utilized to measure the thickness of the film, and an infrared absorption principle instrument is utilized to measure the thickness.
The manufacturing technology of film products is continuously improved, the parameter measurement problem of the composite film with simpler components can be solved by the traditional measuring instrument, but the satisfactory measurement result cannot be obtained for the measurement objects with complicated components, such as some special films with organic and inorganic combination.
Disclosure of Invention
The invention provides a measuring head capable of measuring multiple parameters of a composite film on line, which can acquire multiple parameter information of the same detection area in real time and high precision aiming at the composite film with complex components.
The invention adopts the following technical scheme:
a measuring head capable of carrying out on-line measurement on various parameters of a composite film is characterized in that:
the system comprises a spatial information detection module and a spectral information detection module;
the spatial information detection module comprises a first light source, a first light beam collection device and a first detector;
the spectrum information detection module comprises an infrared light source, a light beam adjusting device, a wavelength screening device, a beam splitting device, a second light beam collecting device, a second detector, a third light beam collecting device and a third detector;
the light beam emitted by the first light source is obliquely reflected after being incident on the coating, and the first light beam collecting device collects the reflected light beam and projects the reflected light beam on the first detector;
the light beam emitted by the infrared light source is collimated by the light beam adjusting device, enters the beam splitting device after passing through the wavelength screening device, is split into a reference light beam and a measuring light beam by the beam splitting device, passes through the second light beam collecting device and then enters the second detector, and the measuring light beam penetrates through the coating, then encounters the opaque substrate to be reflected, is reflected to the beam splitting device and then is gathered to the third detector by the third light beam collecting device.
Preferably, the first light source is a laser diode.
Preferably, the first detector is a CCD.
Preferably, the light beam adjusting device is a parabolic mirror; the wavelength screening device is an optical filter.
Preferably, the beam splitting device is a mirror.
Preferably, the first, second and third light beam collecting devices are lenses.
Based on the measuring head capable of carrying out online measurement on various parameters of the composite film, the invention also provides a device capable of carrying out online measurement on various parameters of the composite film, which is characterized in that:
the measuring head capable of measuring multiple parameters of the composite film on line is symmetrically arranged on the inner sides of two wings of the U-shaped base.
Another kind can carry out on-line measuring device to complex film multiple parameter, its characterized in that:
the measuring head capable of measuring multiple parameters of the composite film on line is symmetrically arranged on the inner sides of two wings of the O-shaped base.
Another kind can carry out on-line measuring device to complex film multiple parameter, its characterized in that:
the filter wheel is arranged symmetrically to the measuring head capable of measuring multiple parameters of the composite membrane on line.
Another kind can carry out on-line measuring device to complex film multiple parameter, its characterized in that:
still include laser triangle range finding head, laser triangle range finding head carries out the symmetry with the above-mentioned measuring head that can carry out on-line measuring to complex film multiple parameter and sets up.
Preferably, the laser triangulation ranging head comprises a second light source, a fourth light beam collecting device and a fourth detector.
The invention has the advantages that:
1) the invention realizes the high-precision online parameter measurement of the composite film containing the transparent layer and the opaque layer; according to the invention, the measurement of the spatial position information of the opaque layer is realized through a triangular distance measurement scheme, the measurement of the discrete information parameters of the transparent layer is obtained through an infrared absorption spectrum measurement scheme, and the two measurement modules are reasonably arranged in space, so that the simultaneous, high-precision and online measurement of each group of composition parameters of the compound is realized.
Drawings
FIG. 1 is a schematic diagram of a dual probe measurement scheme for a composite membrane of a coating-substrate-coating structure;
FIG. 2 is a schematic diagram of a one-sided measurement scheme for a composite film of a coating-substrate structure incorporating a filter wheel;
FIG. 3 is a schematic diagram of two side heads of a composite film with a coating-substrate structure, wherein one side employs a laser displacement probe with a simpler structural function;
FIG. 4 shows a U-shaped mounting scheme for the measurement instrument;
FIG. 5 shows an O-type mounting scheme for the measurement instrument;
FIG. 6 is a schematic view of a trigonometric thickness parameter measurement;
FIG. 7 is a schematic representation of a spectroscopic measurement of thickness parameters.
10, an infrared light source; 11. a light beam adjusting device; 12. a wavelength screening device; 131. a second light beam collection device; 141. a second detector; 132. a third light beam collection device; 142. a third detector; 15. a beam splitting device; 16. a first light source; 17. a first beam collection device; 18. a first detector; 51. a second light source; 52. a fourth light beam collection device; 53, a fourth detector; 30. a reference beam; 31. measuring a beam reflected beam; 32. a measuring beam; 33. collimating the probe light; 34. the light is detected.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the tables and drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
Referring to fig. 1, a measuring head capable of measuring multiple parameters of a composite film on line includes a spatial information detecting module and a spectral information detecting module.
The spatial information detection module comprises a first light source 16, a first light beam collection device 17 and a first detector 18; the light beam emitted by the first light source 16 is reflected after being obliquely incident on the coating, and the reflected light beam is collected by the first light beam collecting device 17 and projected onto the first detector 18.
The spectrum information detection module comprises an infrared light source 10, a light beam adjusting device 11, a wavelength screening device 12, a beam splitting device 15, a second light beam collecting device 131, a second detector 141, a third light beam collecting device 132 and a third detector 142. The light beam emitted by the infrared light source 10 is collimated by the light beam adjusting device 11, passes through the wavelength screening device 12 and then enters the beam splitting device 15, the beam splitting device 15 splits the light beam into a reference light beam 30 and a measuring light beam 32, the reference light beam 30 enters the second detector 141 after passing through the second light beam collecting device 131, the measuring light beam 32 penetrates through the coating, then encounters the opaque substrate to be reflected, and is collected on the third detector 142 by the third light beam collecting device 132 after being reflected onto the beam splitting device 15.
The first light source 16 may employ a laser diode to emit collimated detection light 33, and the wavelength band of the collimated detection light may be a visible light wavelength band, such as 300 and 800nm, or an infrared wavelength band, such as 850 nm. The collimated detection beams 33 are projected on the upper and lower surfaces of the transparent coating respectively, and simultaneously projected on a first detector (such as a CCD)18 with spatial resolution through a first beam collecting device 17, and the thickness parameter information of the transparent coating can be obtained through subsequent circuit processing and combination of the position information and the triangle distance measuring algorithm which are input before.
In fig. 1, the spectrum absorption detection module uses an infrared light source 10 (e.g., a kanel filament) to emit a broad-band infrared light, usually 1-15um, through a light beam adjusting device 11, such as a parabolic mirror, to obtain a collimated light beam, and then uses a wavelength screening device 12, such as a filter, to obtain a measuring light beam in an absorption band and a reference band of a transparent substrate layer, for example, a filter wheel + filter configuration can be used to adjust the light intensity at the same time, and then uses a beam splitting device 15, such as a transflective mirror, to obtain a light intensity reference light beam 30 and a measuring light beam 32, and the reference light beam 30 enters a second light beam collecting device 131, such as a lens, to project the reference light beam 30 onto a second detector 141. The measuring beam 32 penetrates through the transparent coating, encounters the opaque substrate, is reflected, passes through the beam splitting device 15 (a transflective mirror) again, is collected on the third detector 142 by the third beam collecting device 132, and obtains parameters of the transparent coating, such as thickness and grammage, through a subsequent amplifying circuit and a processing algorithm. For multi-component transparent coatings, a targeted detection band can be selected for each component by the wavelength screening device 12 to achieve simultaneous measurement of the multiple components.
The obtained spectral information or spatial position information can be converted into desired parameters through corresponding information processing procedures and algorithms, for example, thickness information of the composite film, and can be obtained through the following processing procedures:
thickness t of opaque base layer1The measurement principle is as follows: by the distance L between two measuring heads0Subtracting the distance L from two probes to two sides of the transparent coating1And L2As shown in fig. 6:
t1＝L0-L1-L2
the principle of measuring the thickness of the transparent coating is that after the probe light passes through the transparent film with the thickness of t2 twice, the relation between the light intensity I before and after transmission and the thickness of t2 meets the absorption theorem, as shown in fig. 7:
in the real process, however, the ideal absorption curve law needs to be corrected by increasing the coefficient, so that the ideal absorption curve law is closer to the actual absorption law. The preferred rule curves are as follows:
the measured parameters are converted into the required thickness values by the above data processing means.
At this point, the measurement and processing of the parameters of the composite film is complete.
The measuring object of the measuring head and the measuring device of the present invention can be a simple single-layer film, or a composite film comprising an opaque substrate and a transparent coating, wherein the opaque substrate can be an inorganic substance, such as an inorganic oxide or a metal. The transparent coating may be an organic layer, such as PE or PP. The composite film may be a coating-substrate combination or a coating-substrate-coating combination.
A device capable of carrying out on-line measurement on various parameters of a composite film can be provided, measuring heads capable of carrying out on-line measurement on various parameters of the composite film can be arranged on the upper side and the lower side of a U-shaped base, as shown in figures 1 and 4; for the coating-substrate type composite film, a simpler configuration can be adopted, for example, a measuring head capable of measuring various parameters of the composite film on line is arranged on one side, and a filter wheel is arranged on the other side, wherein the filter wheel mainly plays roles in modulating and screening wavelengths, as shown in fig. 2; more complicated, the measuring head that can carry out on-line measuring to the multiple parameter of complex film is arranged to one side, arranges simple laser triangle range finding head on the other side, as shown in fig. 3. The installation scheme of the measuring instrument can be flexibly configured according to the requirement.
For the coating-substrate-coating composite film, a scheme of simultaneous measurement from top to bottom is adopted. The parameter information of the opaque coating is obtained by the upper and lower triangular measuring modules, and the parameters of the transparent substrate layer are respectively obtained by the infrared modules at the two sides.
The upper and lower measuring heads can be fixedly installed by adopting a classic U-shaped base, as shown in fig. 4, the installation method firstly fixes the positions of the upper and lower modules, then moves the whole body, and is fixedly installed in advance to ensure the positioning accuracy between the upper and lower modules; the upper and lower measuring heads can be installed in an O-shaped mode in which the upper and lower measuring heads are separated and movable, and the measuring heads capable of measuring various parameters of the composite film on line are symmetrically arranged on the inner sides of two wings of the O-shaped base, as shown in FIG. 5, the positioning can be roughly corrected through the movement of the upper and lower measuring heads, and then the positioning error is minimized through a data processing algorithm. Before measurement, a standard thickness calibration sheet can be used for respectively correcting the measurement errors of the two measurement heads so as to eliminate errors accumulated due to factors such as aging of devices after long-time operation.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent structures or equivalent flow transformations made by using the contents of the specification and the drawings, or applied directly or indirectly to other related systems, are included in the scope of the present invention.
Claims (10)
1. The utility model provides a can carry out on-line measuring's measuring head to complex film multiple parameter which characterized in that:
the system comprises a spatial information detection module and a spectral information detection module;
the spatial information detection module comprises a first light source (16), a first light beam collection device (17) and a first detector (18);
the spectrum information detection module comprises an infrared light source (10), a light beam adjusting device (11), a wavelength screening device (12), a beam splitting device (15), a second light beam collecting device (131), a second detector (141), a third light beam collecting device (132) and a third detector (142);
the light beam emitted by the first light source (16) is reflected after being obliquely irradiated on the coating, and the reflected light beam is collected by a first light beam collecting device (17) and projected on a first detector (18);
the light beam emitted by the infrared light source (10) is collimated through the light beam adjusting device (11), enters the beam splitting device (15) after passing through the wavelength screening device (12), the beam splitting device (15) divides the light beam into a reference light beam (30) and a measuring light beam (32), the reference light beam (30) enters the second detector (141) after passing through the second light beam collecting device (131), the measuring light beam (32) penetrates through the coating, encounters the opaque substrate and is reflected, and is collected to the third detector (142) by the third light beam collecting device (132) after being reflected to the beam splitting device (15).
2. The measuring head of claim 1, wherein the measuring head is capable of measuring a plurality of parameters of the composite membrane on line, and comprises:
the first light source (16) is a laser diode and the first detector (18) is a CCD.
3. The measuring head of claim 1, wherein the measuring head is capable of measuring a plurality of parameters of the composite membrane on line, and comprises:
the light beam adjusting device (11) is a parabolic reflector; the wavelength screening device (12) is an optical filter.
4. A measuring head for on-line measurement of a plurality of parameters of a composite membrane according to any one of claims 1 to 3, wherein:
the beam splitting device (15) is a transflective mirror.
5. The measuring head of claim 4, wherein the measuring head is capable of measuring a plurality of parameters of the composite membrane on line, and comprises:
the first light beam collecting device (17), the second light beam collecting device (131) and the third light beam collecting device (132) are lenses.
6. The utility model provides a can carry out on-line measuring's device to complex film multiple parameter which characterized in that:
also comprises a U-shaped base which is provided with a U-shaped base,
the measuring heads which can carry out on-line measurement on various parameters of the composite membrane are set symmetrically on the inner sides of the two wings of the U-shaped base according to any one of claims 1 to 5.
7. The utility model provides a can carry out on-line measuring's device to complex film multiple parameter which characterized in that:
the measuring head comprises an O-shaped base, wherein the inner sides of two wings of the O-shaped base are symmetrically provided with the measuring head which can carry out online measurement on various parameters of the composite membrane according to any one of claims 1 to 5.
8. The utility model provides a can carry out on-line measuring's device to complex film multiple parameter which characterized in that:
comprising a measuring head according to any of claims 1 to 5 for on-line measurement of a plurality of parameters of a composite membrane,
the filter wheel is arranged symmetrically to the measuring head capable of measuring multiple parameters of the composite membrane on line.
9. The utility model provides a can carry out on-line measuring's device to complex film multiple parameter which characterized in that:
comprising a measuring head according to any of claims 1 to 5 for on-line measurement of a plurality of parameters of a composite membrane,
still include laser triangle range finding head, laser triangle range finding head carries out the symmetry with the above-mentioned measuring head that can carry out on-line measuring to complex film multiple parameter and sets up.
10. The device for on-line measurement of multiple parameters of a composite membrane according to claim 9, wherein:
the laser triangulation ranging head comprises a second light source (51), a fourth light beam collecting device (52) and a fourth detector (53).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010152710.1A CN111288903A (en) | 2020-03-06 | 2020-03-06 | Measuring head and device capable of carrying out online measurement on various parameters of composite film |
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| CN202010152710.1A CN111288903A (en) | 2020-03-06 | 2020-03-06 | Measuring head and device capable of carrying out online measurement on various parameters of composite film |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1144906A (en) * | 1995-09-06 | 1997-03-12 | 东南大学 | Imaging detecting method and its equipment for film thickness and refractive index |
| CN202915889U (en) * | 2012-11-06 | 2013-05-01 | 南通百正电子新材料有限公司 | Device for measuring the thickness of plastic film |
| CN108426531A (en) * | 2018-04-13 | 2018-08-21 | 清华大学深圳研究生院 | A kind of composite film thickness on-line measurement system |
-
2020
- 2020-03-06 CN CN202010152710.1A patent/CN111288903A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1144906A (en) * | 1995-09-06 | 1997-03-12 | 东南大学 | Imaging detecting method and its equipment for film thickness and refractive index |
| CN202915889U (en) * | 2012-11-06 | 2013-05-01 | 南通百正电子新材料有限公司 | Device for measuring the thickness of plastic film |
| CN108426531A (en) * | 2018-04-13 | 2018-08-21 | 清华大学深圳研究生院 | A kind of composite film thickness on-line measurement system |
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Application publication date: 20200616 |
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