CN111283512B

CN111283512B - Double-station machining detection equipment and method

Info

Publication number: CN111283512B
Application number: CN202010194315.XA
Authority: CN
Inventors: 钟波; 陈贤华; 许乔; 王健; 李海波; 邓文辉; 李洁
Original assignee: Laser Fusion Research Center China Academy of Engineering Physics
Current assignee: Laser Fusion Research Center China Academy of Engineering Physics
Priority date: 2020-03-19
Filing date: 2020-03-19
Publication date: 2021-04-23
Anticipated expiration: 2040-03-19
Also published as: CN111283512A

Abstract

The application provides double-station machining detection equipment and a double-station machining detection method, and belongs to the technical field of optical element manufacturing. The detection equipment comprises a processing robot, a first workbench, a second workbench, a detection device, a programming detection system and a processing control system. The first workbench and the second workbench are respectively positioned at two sides of the processing robot. The detection device is used for detecting a first surface shape error of the workpiece on the first workbench or a second surface shape error of the workpiece on the second workbench. And the processing control system is used for controlling the processing robot to process the workpiece on the first workbench according to the first surface shape error and controlling the processing robot to process the workpiece on the second workbench according to the second surface shape error. The processing and detecting equipment integrates the processing and detecting function requirements of two workpieces on double stations, realizes the integration of double-station processing and detecting, can perform online detection on one workpiece when processing the other workpiece, and obviously improves the processing precision and efficiency.

Description

Double-station machining detection equipment and method

Technical Field

The application relates to the technical field of optical element manufacturing, in particular to double-station machining detection equipment and a double-station machining detection method.

Background

The high-precision large-caliber aspheric optical element plays a very important role in key devices such as aerospace, astronomy and other systems, scientific and technological breakthroughs and national defense construction because the high-precision large-caliber aspheric optical element is beneficial to obtaining high-quality optical characteristics and high-quality image effects. In an optical system, the adoption of a large-caliber aspheric optical element is beneficial to improving the spatial resolution, expanding the view field, increasing the signal collection capacity and the like. With the development of science and technology, the requirements of large advanced optical systems like remote sensing cameras and astronomical telescopes on the index of resolution are gradually increased, and the aperture of a required aspheric optical element is also gradually increased. The demand of large-caliber aspheric optical elements with meter-grade calibers is increasing in the future.

The ultra-precision manufacturing and detecting technology is an important condition for realizing the batch manufacturing and production supply of the large-caliber aspheric optical element. The conventional aspheric surface polishing is mostly finished based on a five-axis linkage numerical control machine tool, and the hardware cost is high, the equipment space volume is large, and the large-caliber aspheric surface element online detection is difficult to realize. The six-joint robot has the advantages of low price, good stability, small occupied area, open space, on-line detection of elements and the like. At present, the detection method of the aspheric optical element is basically off-line detection, after processing, a workpiece is moved to a detection laboratory for stabilization and then is detected, and after detection, the workpiece is moved back to the processing laboratory. The offline detection of the large-size aspheric optical element is time-consuming, labor-consuming and high in risk. Meanwhile, once the workpiece moves, the machining or detection datum is difficult to restore to the original state, the machining and detection repeated precision is influenced, and the machining efficiency and the precision are low.

Disclosure of Invention

The embodiment of the application provides double-station machining detection equipment and method, and aims to solve the problems of low machining efficiency and low machining precision.

In a first aspect, an embodiment of the present application provides a double-station machining detection apparatus, which includes a machining robot, a first workbench, a second workbench, a detection device, a programming detection system, and a machining control system;

the processing robot is provided with a first processing position and a second processing position;

the first workbench and the second workbench are respectively positioned at two sides of the processing robot, the processing robot is positioned at the first processing position and can process the workpiece on the first workbench, and the processing robot is positioned at the second processing position and can process the workpiece on the second workbench;

the detection device is used for selectively detecting a first surface shape error of the workpiece on the first workbench or a second surface shape error of the workpiece on the second workbench;

the programming detection system is used for acquiring first surface shape error data and generating a first numerical control program according to the first surface shape error data, and is used for acquiring second surface shape error data and generating a second numerical control program according to the second surface shape error data;

and the processing control system is used for controlling the processing robot to process the workpiece on the first workbench according to the first numerical control program and controlling the processing robot to process the workpiece on the second workbench according to the second numerical control program.

Among the above-mentioned technical scheme, this kind of processing check out test set fuses the processing of two work pieces on the duplex position with the detection function demand, realizes that duplex position processing detects the integration, adds man-hour to a work piece, can carry out on-line measuring to another work piece, can effectively avoid the component to lead to consuming time and difficultly and the poor condition of clamping repeatability at the repeated clamping between processing equipment and check out test set, is showing improvement machining precision and efficiency.

In addition, the duplex position processing check out test set that this application embodiment provided still has following additional technical characterstic:

in some embodiments of the present application, the detection device comprises a movable support and an interferometer;

an interferometer is mounted to the movable support;

the movable support has a first position and a second position;

the interferometer is configured to detect a first profile error of the workpiece on the first stage when the movable support is in the first position and to detect a second profile error of the workpiece on the second stage when the movable support is in the second position.

Among the above-mentioned technical scheme, then can realize the interferometer to the work piece on the first workstation or the detection of the work piece on the second workstation through changing the position of movable support, this kind of detection device's simple structure, convenient operation. When the movable support is moved to the first position, the interferometer can detect the surface shape error of the workpiece on the first workbench; when the movable support is moved to the second position, the interferometer can detect the surface shape error of the workpiece on the second worktable. The structure improves the repeatability of the detection position and improves the detection efficiency.

In some embodiments of the present application, the double-station machining detection apparatus further comprises a three-dimensional movement adjustment bracket and a mirror;

the reflector is connected to the three-dimensional movement adjusting bracket, and the three-dimensional movement adjusting bracket is used for driving the reflector to move in the transverse direction, the longitudinal direction and the vertical direction;

the reflecting mirror is used for reflecting the light beam emitted by the interferometer to the workpiece on the first workbench when the movable support is located at the first position, and returning the reflected light of the workpiece on the first workbench to the interferometer in the original path; and the interferometer is used for reflecting the light beam emitted by the interferometer to the workpiece on the second workbench when the movable support is positioned at the second position, and returning the reflected light of the workpiece on the second workbench to the interferometer in a primary path.

Among the above-mentioned technical scheme, can adjust the position of speculum on three directions (horizontal, vertical and vertical) through three-dimensional regulation support, and then adjust the speculum to suitable position. By adjusting the transverse position and the longitudinal position of the reflector, the reflector can be aligned with the reflector when the movable support is located at the first position and the second position, and the reflector can reflect light beams emitted by the reflector to a workpiece. The parameters of the workpiece may also vary from workpiece to workpiece, and the distance of the mirror from the workpiece may need to be changed, in which case the distance between the mirror and the workpiece may be changed by adjusting the vertical position of the mirror.

In some embodiments of the present application, the mirror and the three-dimensional movement adjusting bracket are connected by a two-dimensional angle adjusting bracket;

the two-dimensional angle adjusting bracket is used for driving the reflector to swing around a first axis and a second axis;

the first axis and the second axis are both parallel to the plane of the mirror, the first axis is arranged along the transverse direction, and the second axis is perpendicular to the first axis; the two-dimensional angle adjusting support has position recording and positioning functions for adjusting the angle of the reflector.

Among the above-mentioned technical scheme, speculum and three-dimensional removal regulation support pass through two-dimentional angle modulation leg joint, can realize the speculum through two dimension angle modulation supports and swing to adjust the orientation of speculum, guarantee that the light beam that the interferometer sent aligns the center of work piece after the speculum reflects.

In some embodiments of the present application, the three-dimensional movement adjusting bracket includes a base, a first movable rail, a second movable rail, a third movable rail, a first driving device, a second driving device, and a third driving device;

the first movable guide rail is movably arranged on the base body, and the first driving device is used for driving the first movable guide rail to move along the transverse direction relative to the base body;

the second movable guide rail is movably arranged on the first movable guide rail, and the second driving device is used for driving the second movable guide rail to move along the longitudinal direction relative to the first movable guide rail;

the third movable guide rail is movably arranged on the second movable guide rail, the third driving device is used for driving the third movable guide rail to vertically move relative to the second movable guide rail, and the two-dimensional angle adjusting bracket is arranged on the third movable guide rail;

the three-dimensional movable adjusting support has the functions of position recording and positioning for adjusting the two-dimensional angle adjusting support in the transverse direction, the longitudinal direction and the vertical direction.

In the technical scheme, the first movable guide rail is driven by the first driving device to transversely move relative to the base body, so that the transverse adjustment of the reflector can be realized; the second driving device drives the second movable guide rail to move longitudinally relative to the first movable guide rail, so that the longitudinal adjustment of the reflector can be realized; the third driving device drives the third movable guide rail to vertically move relative to the second movable guide rail, so that the vertical adjustment of the reflector can be realized. The three-dimensional moving adjusting bracket with the structure has a simple structure, and can conveniently realize the adjustment of the reflector in three directions.

In some embodiments of the present application, the movable support is a lifting structure, and a plurality of universal wheels are disposed at the bottom of the movable support.

Among the above-mentioned technical scheme, movable support is elevation structure, and when the vertical position of speculum changed, the height position that accessible movable support corresponds the regulation interferometer. The movable support is provided with a plurality of universal wheels at the bottom thereof, and is movable in a plurality of directions in front side regions of the first and second tables. In the actual machining process, the parameters of the workpiece on the first table and the workpiece on the second table may be different, in which case the position of the movable support in the lateral and longitudinal directions needs to be changed when the movable support is switched between the first position and the second position. The position of the movable support can be conveniently changed by arranging the universal wheels at the bottom of the movable support.

In some embodiments of the present application, the movable mount includes a base frame, a movable frame, and a drive mechanism;

the movable frame is movably arranged on the bottom frame, the driving mechanism is used for driving the movable frame to vertically move relative to the bottom frame, and the interferometer is arranged on the movable frame.

Among the above-mentioned technical scheme, through the relative chassis vertical movement of actuating mechanism drive adjustable shelf, then can realize the regulation to interferometer height position, this kind of movable support simple structure easily realizes.

In some embodiments of the present application, the interferometer and the process control system are both connected to the programming detection system, the process robot is connected to the process control system, and the interferometer is configured to detect a first profile error of a workpiece on a first table or a second profile error of a workpiece on a second table.

In the technical scheme, the interferometer is used for detecting the surface shape errors of the workpieces on the first workbench and the second workbench.

In a second aspect, an embodiment of the present application provides a double-station machining detection method, including:

detecting a first profile error of a workpiece on a first worktable by a detection device;

controlling a processing robot to process the workpiece on the first workbench according to a first numerical control program generated by the first surface shape error, and detecting a second surface shape error of the workpiece on the second workbench through a detection device;

and controlling the machining robot to machine the workpiece on the second workbench according to a second numerical control program generated by the second surface shape error.

According to the technical scheme, after the detection device detects the workpiece on the first workbench, the machining control system can control the machining robot to machine the workpiece on the first workbench according to the control program generated by the detected surface shape error, and after the detection device detects the workpiece on the second workbench, the machining control system can control the machining robot to machine the workpiece on the second workbench according to the control program generated by the detected surface shape error, so that the machining precision can be obviously improved. In addition, when the processing robot processes the workpiece on the first workbench, the detection device detects the workpiece on the first workbench, so that the processing efficiency can be obviously improved.

In some embodiments of the present application, the detecting, by the detecting device, a first profile error of the workpiece on the first table and/or the detecting, by the detecting device, a second profile error of the workpiece on the second table includes:

determining the relative positions of the interferometer, the reflector and the element to be detected according to the detection light path;

installing a standard spherical lens at a light outlet of an interferometer in a detection light path, placing a diaphragm at the focus of the standard spherical lens to determine an optical axis, and then detaching the standard spherical lens;

the light emitted by the interferometer passes through the aperture to obtain a thin beam, and the three-dimensional movement adjusting bracket is adjusted to enable the thin beam to be aligned to the center of the mirror surface of the reflector;

the thin light beam is reflected to the surface of the workpiece through the reflector, and the two-dimensional angle adjusting bracket is adjusted to enable the thin light beam reflected by the reflector to be aligned to the center of the surface of the workpiece to be measured;

adjusting the pitching and the inclination of the workpiece to enable the beamlets reflected by the workpiece to return to the center of the reflector and the aperture of the diaphragm in the original way, and then enter the interferometer;

installing a standard spherical lens, and adjusting the pitching and the tilting of the workpiece according to the shape of the interference fringes to minimize the fringes; adjusting the front and back positions of the interferometer, and correcting the relative distance deviation between the interferometer and the element to be measured to minimize the fringes;

and the programming detection system acquires and stores the surface shape error data of the workpiece.

The invention has the advantages that:

(1) the large-caliber optical element is not required to be repeatedly clamped between processing equipment and detection equipment, so that the processing and detection efficiency of workpieces is improved, and the carrying risk is avoided.

(2) According to the invention, the positioning function of the robot and the detection support is utilized to realize the processing and detection position positioning of the large-caliber optical element on the double stations, so that the integrated processing and detection of two large-caliber optical elements are realized, the processing and detection efficiency is improved, the repeatability of the processing and detection positions is improved, and the element processing precision is further improved.

(3) The double-station processing and detection method not only improves the utilization rate of processing and detection equipment, but also enables two large-caliber elements to be processed and detected in parallel, and improves the overall processing efficiency of the large-caliber elements.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

Fig. 1 is a schematic structural diagram of a double-station processing detection apparatus provided in an embodiment of the present application;

FIG. 2 is an enlarged view taken at II in FIG. 1;

FIG. 3 is a schematic view showing the connection of the three-dimensional movement adjusting bracket, the two-dimensional angle adjusting bracket and the reflecting mirror shown in FIG. 1;

FIG. 4 is a schematic structural view of the movable support shown in FIG. 1;

fig. 5 is a flowchart of a double-station machining detection method according to an embodiment of the present application.

Icon: 100-processing detection equipment; 10-a processing robot; 11-a robot body; 12-a polishing tool; 20-a first table; 30-a second work table; 40-a detection device; 41-a movable support; 411-chassis; 412-a movable frame; 413-a drive mechanism; 4131-a drive motor; 4132-a reducer; 4133-rotating the screw; 414-fixed frames; 415-a universal wheel; 42-an interferometer; 50-a process control system; 51-a programmed detection system; 60-three-dimensional movement adjusting bracket; 61-a substrate; 62-a first movable rail; 63-a second movable rail; 64-a third movable rail; 70-a mirror; 80-two-dimensional angle adjusting bracket; 81-a first rotor; 82-a second rotor; 90-polishing solution supply system; 200-a workpiece; x-transverse direction; y-longitudinal direction; z-vertical; a-a first axis; b-second axis.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the embodiments of the present application, it should be noted that the indication of orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship which is usually placed when the product of the application is used, or the orientation or positional relationship which is usually understood by those skilled in the art, or the orientation or positional relationship which is usually placed when the product of the application is used, and is only for the convenience of describing the application and simplifying the description, but does not indicate or imply that the indicated device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the application. Furthermore, the terms "first" and "second" are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

Examples

The embodiment of the application provides a duplex position processing check out test set 100, fuses together the processing and the detection function demand of two work pieces 200 on the duplex position, realizes duplex position processing detection integration, is showing and has improved machining precision and efficiency. The specific structure of the double-station processing detection apparatus 100 will be described in detail below with reference to the accompanying drawings.

As shown in fig. 1, the double-station machining detection apparatus 100 includes a machining robot 10, a first table 20, a second table 30, a detection device 40, a machining control system 50, and a programming detection system 51.

The processing robot 10 has a first processing position and a second processing position. The first table 20 and the second table 30 are respectively located on both sides of the processing robot 10, the processing robot 10 is located at a first processing position and can process a workpiece on the first table 20, and the processing robot 10 is located at a second processing position and can process a workpiece on the second table 30. The detecting device 40 is used to selectively detect a first profile error of the workpiece 200 on the first table 20 or a second profile error of the workpiece 200 on the second table 30. The programming detection system 51 is configured to collect the first profile error data and generate a first numerical control program according to the first profile error data, and is configured to collect the second profile error data and generate a second numerical control program according to the second profile error data. The machining control system 50 is configured to control the machining robot 10 to machine the workpiece 200 on the first table 20 according to a first numerical control program, and to control the machining robot 10 to machine the workpiece 200 on the second table 30 according to a second numerical control program.

The first profile error data is data representing a first profile error of the workpiece on the first table 20; the second surface shape error data is data representing a second surface shape error of the workpiece on the second table 30.

When the workpiece 200 on the first table 20 and the second table 30 is machined, first, a first profile error of the workpiece 200 on the first table 20 can be detected by the detection device 40; subsequently, the machining control system 50 controls the machining robot 10 to machine the workpiece 200 on the first worktable 20 according to the first numerical control program generated by the first profile error; simultaneously detecting a second surface shape error of the workpiece 200 on the second worktable 30 by the detecting device 40; subsequently, the machining control system 50 controls the machining robot 10 to machine the workpiece 200 on the second table 30 based on the second numerical control program generated by the second profile error. The processing and detecting equipment 100 integrates the processing and detecting function requirements of two workpieces 200 on double stations, realizes the integration of double-station processing and detecting, can perform online detection on one workpiece 200 when the other workpiece 200 is processed, can effectively avoid the situations of time consumption, labor consumption and poor clamping repeatability caused by repeated clamping of elements between the processing equipment and the detecting equipment, and obviously improves the processing precision and efficiency.

In this embodiment, the workpiece 200 is an optical element. Illustratively, the workpiece 200 is a large-caliber aspheric optical element.

The processing robot 10 has the capability of switching stations with two station coordinate systems. When the processing robot 10 selects the first station coordinate system, the processing robot 10 may process the workpiece 200 on the first worktable 20; when the processing robot 10 selects the second station coordinate system, the processing robot 10 may process the workpiece 200 on the second table 30.

The processing robot 10 comprises a robot body 11 and a polishing tool 12, the polishing tool 12 is connected to the output end of the processing robot 10, and the robot body 11 drives the polishing tool 12 to move so as to polish the workpiece 200. The machining robot 10 is switched between the first machining position and the second machining position, that is, the robot body 11 drives the polishing tool 12 to switch between the two stations. In this embodiment, the processing robot 10 is a six-joint robot, and the specific structure thereof can be referred to in the related art, which is not described herein again.

The processing robot 10, the first table 20, and the second table 30 may be placed on the ground such that they have a certain relative positional relationship.

Further, the detection device 40 includes a movable bracket 41 and an interferometer 42, and the interferometer 42 is mounted to the movable bracket 41. The movable bracket 41 has a first position and a second position. The interferometer 42 is used for detecting a first profile error of the workpiece 200 on the first table 20 when the movable support 41 is located at the first position, and for detecting a second profile error of the workpiece 200 on the second table 30 when the movable support 41 is located at the second position.

The position of the movable support can be changed by moving the movable support 41, so that the interferometer 42 can detect the workpiece 200 on the first workbench 20 and the workpiece 200 on the second workbench 30, and the detection device 40 has a simple structure and is convenient to operate. When the movable support 41 is moved to the first position, the interferometer 42 may detect the surface shape error of the workpiece 200 on the first table 20; when the movable support 41 is moved to the second position, the interferometer 42 can detect the surface shape error of the workpiece 200 on the second table 30. The structure improves the repeatability of the detection position and improves the detection efficiency.

The interferometer 42 and the processing control system 50 are both connected to the programming detection system 51, and the processing robot 10 is connected to the processing control system 50. The interferometer 42 is used to detect a first profile error of the workpiece on the first stage 20 or a second profile error of the workpiece on the second stage 30.

Further, the programming detection system 51 includes a process programming system and a detection system, the interferometer 42 is connected to the detection system, and the detection system is connected to the process programming system, and the programming system is connected to the process control system 50. The interferometer 42 collects the surface shape error information of the workpiece 200, the detection system processes the surface shape error information to obtain surface shape error data, the surface shape error data is input into the processing programming system to be combined with set process parameters to obtain a numerical control program to be executed, the numerical control program is directly transmitted to the processing control system 50, and the processing control system 50 processes the workpiece 200.

Further, the double-station machining detection device 100 further comprises a three-dimensional movement adjusting bracket 60 and a reflecting mirror 70. The reflecting mirror 70 is connected to the three-dimensional movement adjusting bracket 60, and the three-dimensional movement adjusting bracket 60 is used for driving the reflecting mirror 70 to move in the transverse direction X, the longitudinal direction Y and the vertical direction Z. The first table 20 and the second table 30 are respectively located on both sides of the processing robot 10 in the transverse direction X. The mirror 70 is used for reflecting the light beam emitted from the interferometer 42 onto the workpiece 200 on the first table 20 when the movable support 41 is located at the first position, and for returning the reflected light of the workpiece on the first table 20 to the interferometer 42; and a light source for reflecting the light beam emitted from the interferometer 42 onto the workpiece 200 on the second table 30 when the movable support 41 is at the second position, and for returning the reflected light of the workpiece on the second table 30 to the interferometer 42.

The position of the mirror 70 in three directions (lateral X, longitudinal Y, and vertical Z) can be adjusted by the three-dimensional adjustment bracket, thereby adjusting the mirror 70 to a proper position. By adjusting the transverse X and longitudinal Y positions of the mirror 70, it is ensured that the mirror 70 is aligned with the interferometer 42 when the movable support 41 is in the first position and the second position, and that the mirror 70 can reflect the light beam emitted by the interferometer onto the workpiece 200. The parameters of the workpiece 200 may also vary from workpiece 200 to workpiece 200, and the distance between the mirror 70 and the workpiece 200 may need to be changed, in which case the distance between the mirror 70 and the workpiece 200 may be changed by adjusting the vertical Z position of the mirror 70.

It should be noted that the reflecting mirror 70 and the three-dimensional movement adjusting bracket 60 may be directly connected or indirectly connected.

In this embodiment, as shown in fig. 2, the mirror 70 is indirectly connected to the three-dimensional movement adjustment through the two-dimensional angle adjustment bracket 80. The two-dimensional angle adjustment bracket 80 is used to swing the mirror 70 around the first axis a and the second axis B. First axis a, which is arranged along transverse direction X, and second axis B, which is perpendicular to first axis a, are both parallel to the plane of mirror 70. The two-dimensional angle adjusting bracket 80 has a position recording and positioning function for adjusting the angle of the reflecting mirror 70.

The two-dimensional angle adjusting bracket 80 can realize the swing of the reflector 70 in two dimensions to adjust the orientation of the reflector 70, and ensure that the light beam emitted by the interferometer 42 is aligned to the center of the workpiece 200 after being reflected by the reflector 70.

Optionally, the three-dimensional movement adjusting bracket 60 includes a base 61, a first movable rail 62, a second movable rail 63, a third movable rail 64, a first driving device (not shown in fig. 2), a second driving device (not shown in fig. 2), and a third driving device (not shown in fig. 2). The first movable rail 62 is movably disposed on the base 61, and the first driving device is configured to drive the first movable rail 62 to move in the transverse direction X relative to the base 61. The second movable rail 63 is movably disposed on the first movable rail 62, and the second driving device is configured to drive the second movable rail 63 to move along the longitudinal direction Y relative to the first movable rail 62. The third movable rail 64 is movably arranged on the second movable rail 63, the third driving device is used for driving the third movable rail 64 to move along the vertical direction Z relative to the second movable rail 63, and the two-dimensional angle adjusting bracket 80 is arranged on the third movable rail 64. The three-dimensional movement adjusting bracket 60 has a position recording and positioning function for adjusting the two-dimensional angle adjusting bracket 80 in the transverse direction X, the longitudinal direction Y and the vertical direction Z.

The first driving device drives the first movable guide rail 62 to move transversely X relative to the base body 61, so that transverse X adjustment of the reflecting mirror 70 can be realized; the second driving device drives the second movable guide rail 63 to move longitudinally Y relative to the first movable guide rail 62, so that the longitudinal Y adjustment of the reflector 70 can be realized; the third driving device drives the third movable rail 64 to move vertically Z relative to the second movable rail 63, so that the vertical Z adjustment of the reflecting mirror 70 can be realized. The three-dimensional moving adjusting bracket 60 with the structure has a simple structure, and can conveniently realize the adjustment of the reflector 70 in three directions.

Illustratively, the base 61 is a frame structure, and the first table 20, the second table 30 and the processing robot 10 are all located in the base 61. The first movable rail 62 and the second movable rail 63 are long, and the third movable rail 64 is a block-shaped member. The top of the base body 61 is provided with a guide rail for the first movable guide rail 62 to move transversely X; the first movable rail 62 is arranged longitudinally Y; the second movable rail 63 is arranged vertically Z. The first driving device, the second driving device and the third driving device can adopt a motor screw rod structure, namely, the motor drives the screw rod to rotate so as to realize the movement of the movable guide rail.

Alternatively, as shown in fig. 3, the two-dimensional angle adjusting bracket 80 includes a first rotating body 81, a second rotating body 82, a fourth driving means (not shown in fig. 3) and a fifth driving means (not shown in fig. 3), the first rotating body 81 is rotatably provided to the third movable rail 64, the second rotating body 82 is rotatably provided to the first rotating body 81, the fourth driving means is used for driving the first rotating body 81 to rotate around the second axis B relative to the third movable rail 64, and the fifth driving means is used for driving the second rotating body 82 to rotate around the first axis a relative to the first rotating body 81.

The first rotating body 81 is driven by the fourth driving device to rotate relative to the third movable guide rail 64, so that the reflecting mirror 70 can swing around the second axis B to realize the left-right inclination adjustment of the reflecting mirror 70; when the fifth driving device drives the second rotating body 82 to rotate relative to the first rotating body 81, the mirror 70 can be swung around the second axis B to adjust the vertical pitch of the mirror 70. The fourth driving device and the fifth driving device can be motors, and the rotating body is driven to rotate through the rotation of the motors.

As can be seen from the above, the three-dimensional movement adjusting bracket 60 and the two-dimensional angle adjusting bracket 80 together form a five-dimensional adjusting mechanism, which can perform five-dimensional adjustment on the reflecting mirror 70. The five-dimensional adjustment of the reflector 70 is electric adjustment, and an operation hand wheel (with speed gear shifting) can be configured, so that the reflector has the functions of position recording and positioning. For example, the mirror 70 has a large movement stroke in the transverse direction X, and can cover two stations; the transverse X stroke is 5m, the longitudinal Y stroke is 2m, the vertical Z movement is formed to be 0.5m, and the swing range around the first axis a and the second axis B is 0 to 5 degrees.

It should be noted that the three-dimensional movement adjusting bracket 60 and the two-dimensional angle adjusting bracket 80 are not limited to the above-described structure in order to realize five-dimensional adjustment of the reflecting mirror 70.

Further, the movable bracket 41 is a lifting structure. When the vertical Z position of the reflecting mirror 70 is changed, the height position of the interferometer 42 can be adjusted correspondingly by the movable bracket 41.

As shown in fig. 4, the movable bracket 41 includes a base frame 411, a movable frame 412, and a driving mechanism 413. The movable frame 412 is movably disposed on the bottom frame 411, the driving mechanism 413 is configured to drive the movable frame 412 to move vertically Z relative to the bottom frame 411, and the interferometer 42 is mounted on the movable frame 412.

The movable frame 412 is driven by the driving mechanism 413 to move vertically Z relative to the bottom frame 411, so that the height position of the interferometer 42 can be adjusted, and the movable support 41 is simple in structure and easy to realize.

A plurality of guide rods for the movable frame 412 to move vertically in the Z direction are disposed on the bottom frame 411, a fixed frame 414 is disposed on the top of the movable frame 412, and the interferometer 42 is mounted in the fixed frame 414. The driving mechanism 413 may have various structures, and illustratively, the driving mechanism 413 includes a driving motor 4131, a speed reducer 4132 and a rotating screw 4133, the driving motor 4131 and the speed reducer 4132 are both fixed to the base frame 411, an output shaft of the driving motor 4131 is connected to an input shaft of the speed reducer 4132, the rotating screw 4133 is connected to an output shaft of the speed reducer 4132, and the movable frame 412 is screwed to an outer side of the rotating screw 4133. The driving motor 4131 is operated to drive the rotating screw 4133 to rotate, so as to realize the vertical Z movement of the movable frame 412.

With continued reference to fig. 1, the movable bracket 41 is located on the front side of the first table 20 and the second table 30 in the longitudinal direction Y, and the bottom of the movable bracket 41 is provided with a plurality of universal wheels 415.

The movable bracket 41 is provided at the bottom thereof with a plurality of universal wheels 415, and the movable bracket 41 is movable in a plurality of directions on the ground of the front side regions of the first and second tables 20 and 30. In an actual machining process, the parameters of the workpiece 200 on the first table 20 and the workpiece 200 on the second table 30 may be different, and in this case, the position of the movable bracket 41 in the lateral direction X and the longitudinal direction Y needs to be changed at the time of the two-station detection switching. The position of the movable bracket 41 can be easily changed by the arrangement of the universal wheels 415 on the bottom of the movable bracket 41.

Wherein the universal wheel 415 is arranged at the bottom of the bottom frame 411. Illustratively, the universal wheels 415 are four, and the four universal wheels 415 are respectively located at four corners of the rectangle.

In practice, the first and second positions of the movable bracket 41 may be marked. Because the three-dimensional movable adjusting support 60 and the two-dimensional angle adjusting support 80 jointly form a five-dimensional adjusting mechanism with position recording and positioning functions, when the two stations are detected and switched, the detection positions recorded by the two stations are selected to adjust the reflector 70 in place, and then the movable support 41 is moved to the marked position, so that the switching is quick, and the time for repeatedly clamping and aligning the workpiece 200 is shortened.

When the workpiece 200 on the first table 20 is detected, the movable bracket 41 may be moved to the marked first position, at which time the movable bracket 41 is located at the front side of the first table 20; mirror 70 is adjusted to a detection position recorded by the system, at which time mirror 70 is positioned above workpiece 200 on first stage 20. The light beam emitted by the interferometer 42 is reflected to the surface of the workpiece 200 by the reflector 70, and the light beam is reflected by the workpiece 200 and the reflector 70 in sequence and enters the interferometer 42, so that the reflected test light beam interferes with the standard reference light beam, and the surface shape error (first surface shape error) of the workpiece 200 on the first worktable 20 is detected.

When the workpiece 200 on the second table 30 is detected, the movable bracket 41 may be moved to the marked second position, in which case the movable bracket 41 is located at the front side of the second table 30; the mirror 70 is adjusted to another inspection position recorded by the system, at which time the mirror 70 is positioned above the workpiece 200 on the second table 30. The light beam emitted by the interferometer 42 is reflected to the surface of the workpiece 200 by the reflector 70, and the light beam is reflected by the workpiece 200 and the reflector 70 in sequence and enters the interferometer 42, so that the reflected test light beam interferes with the standard reference light beam, and the surface shape error (first surface shape error) of the workpiece 200 on the first worktable 20 is detected.

In this embodiment, the light beam emitted from the interferometer 42 is reflected by the reflecting mirror 70 onto the workpiece 200, so as to detect the surface shape error of the workpiece 200. In other embodiments, mirror 70 may not be provided and the beam from interferometer 42 may impinge directly on workpiece 200 from the top down.

In this embodiment, the movable bracket 41 is changed in position by providing a universal wheel 415 at the bottom. In other embodiments, the movable support 41 may change position by other movement means. For example, the movable holder 41 is provided on the base 61 of the three-dimensional movement adjusting holder 60 movably in the lateral direction X, and after the detection position of the mirror 70 in the lateral direction X is changed, the interferometer 42 can be adjusted to a position corresponding to the mirror 70 by moving the movable holder 41 in the lateral direction X. Of course, when the two stations are switched, if the longitudinal Y position of the interferometer 42 needs to be adjusted, the movable bracket 41 may be set as a two-dimensional movable adjusting bracket, the two-dimensional movable adjusting bracket may move transversely X relative to the frame body (adjust the transverse X position of the interferometer 42), and the two-dimensional angle adjusting bracket 80 may be used to adjust the longitudinal Y position and the vertical Z position of the interferometer 42.

In addition, in the present embodiment, the double-station processing detection apparatus 100 further includes a polishing liquid supply system 90 for supplying polishing liquid to the processing robot 10 for processing the workpiece 200. The polishing liquid supply system 90 and the movable holder 41 are respectively located on the front and rear sides of the base body 61 of the three-dimensional movement adjusting holder 60 in the longitudinal direction Y.

In addition, as shown in fig. 5, an embodiment of the present application further provides a double-station machining detection method, which is suitable for the double-station machining detection apparatus 100 provided in the foregoing embodiment, and includes the following steps:

step S100: the first profile error of the workpiece 200 on the first table 20 is detected by the detecting device 40.

Step S200: the machining robot 10 is controlled by a first numerical control program generated based on the first profile error to machine the workpiece 200 on the first table 20, and the second profile error of the workpiece 200 on the second table 30 is detected by the detection device 40.

The programmable detection system 51 generates a numerical control program based on the surface shape error of the workpiece 200 on the first table 20 detected by the interferometer 42, and the machining control system 50 controls the machining robot 10 to machine the workpiece 200 on the first table 20 based on the numerical control program.

While the processing robot 10 processes the workpiece 200 on the first table 20, an interference detection optical path of the interferometer 42 is established (the movable support 41 is moved to the second position, and the reflecting mirror 70 is adjusted to the corresponding position), so that the light beam emitted by the interferometer 42 is reflected by the workpiece 200 on the second table 30 and returns to the interferometer 42 in the original path, and surface shape error detection is performed on the workpiece 200 on the second table 30.

Step S300: the second numerical control program generated based on the second surface shape error controls the machining robot 10 to machine the workpiece 200 on the second table 30.

The programmable detection system 51 generates a numerical control program based on the surface shape error of the workpiece 200 on the second table 30 detected by the interferometer 42, and the machining control system 50 controls the machining robot 10 to machine the workpiece 200 on the second table 30 based on the numerical control program.

As can be seen from the above, after the detection device 40 detects the workpiece 200 on the first table 20, the machining control system 50 can control the machining robot 10 to machine the workpiece 200 on the first table 20 according to the control program generated by the detected surface shape error, and after the detection device 40 detects the workpiece 200 on the second table 30, the machining control system 50 can control the machining robot 10 to machine the workpiece 200 on the second table 30 according to the control program generated by the detected surface shape error, so that the machining accuracy can be remarkably improved. Further, while the processing robot 10 processes the workpiece 200 on the first table 20, the detection device 40 detects the workpiece 200 on the first table 20, so that the processing efficiency can be remarkably improved.

Further, step S100 includes the steps of:

a. determining detection light path parameters such as the distance from the focal point of the interferometer 42 to the center of the mirror surface of the reflector 70, the distance between the center of the mirror surface of the reflector 70 and the center of the mirror surface of the workpiece 200 to be detected, a spherical lens (an accessory of the interferometer 42) and the like according to the element parameters;

b. the relative positions of the interferometer 42, the mirror 70, and the workpiece 200 to be measured (the workpiece 200 on the first stage 20, the workpiece 200 on the second stage 30) are determined in accordance with the optical path parameters. If a compensating mirror (located between interferometer 42 and mirror 70) is used in the optical path design, the compensation position is also taken into account;

c. installing a standard spherical lens at a light outlet of an interferometer 42 in a detection light path, placing a diaphragm at the focus of the standard spherical lens to determine an optical axis, and then detaching the standard spherical lens;

d. the interferometer 42 emits light to pass through the aperture to obtain a thin beam, and adjusts the three-dimensional movement adjusting bracket 60 to make the thin beam align to the center of the reflector 70;

e. the beamlets are reflected to the surface of the workpiece 200 by the reflector 70, and the two-dimensional angle adjusting bracket 80 is adjusted to enable the beamlets reflected by the reflector 70 to be aligned with the center of the surface of the workpiece to be measured;

f. adjusting the pitch and the inclination of the workpiece 200 to be measured (realized by adjusting the pitch and the inclination of the workbench), so that the beamlets reflected by the workpiece return to the center of the reflector 70 and the aperture of the diaphragm in the original way, and then enter the interferometer 42;

g. installing a standard spherical lens, and adjusting the pitching and the tilting of the workpiece according to the shape of the interference fringes to minimize the fringes; adjusting the front and back 42 positions of the interferometer, and correcting the relative distance deviation between the interferometer 42 and the workpiece to minimize the fringes;

h. and the programming detection system acquires and stores the surface shape error data of the workpiece.

In some embodiments of the present application, the specific step of detecting the second surface shape error of the workpiece 200 on the second table 30 by the detecting device 40 in step S200 may be the same as step S100 described above.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. The utility model provides a duplex position processing check out test set which characterized in that includes:

a processing robot having a first processing position and a second processing position;

a first table;

the machining control system is used for controlling the machining robot to machine the workpiece on the first workbench at the first machining position according to the first numerical control program and controlling the machining robot to machine the workpiece on the second workbench at the second machining position according to the second numerical control program;

wherein the detection device comprises a movable support and an interferometer; an interferometer is mounted to the movable support; the movable support has a first position and a second position; the interferometer is used for detecting a first surface shape error of the workpiece on the first working table when the movable support is located at the first position and is used for detecting a second surface shape error of the workpiece on the second working table when the movable support is located at the second position;

the double-station processing detection equipment further comprises a three-dimensional movable adjusting bracket and a reflector; the reflector is connected to the three-dimensional movement adjusting bracket, and the three-dimensional movement adjusting bracket is used for driving the reflector to move in the transverse direction, the longitudinal direction and the vertical direction; the reflecting mirror is used for reflecting the light beam emitted by the interferometer to the workpiece on the first workbench when the movable support is located at the first position, and returning the reflected light of the workpiece on the first workbench to the interferometer in an original path; the reflecting mirror is used for reflecting the light beam emitted by the interferometer to the workpiece on the second workbench when the movable support is located at the second position, and returning the reflected light of the workpiece on the second workbench to the interferometer in a primary path;

the reflector is connected with the three-dimensional moving adjusting bracket through a two-dimensional angle adjusting bracket; the two-dimensional angle adjusting bracket is used for driving the reflector to swing around a first axis and a second axis; the first axis and the second axis are both parallel to the plane of the mirror, the first axis is arranged along the transverse direction, and the second axis is perpendicular to the first axis; the two-dimensional angle adjusting support has position recording and positioning functions for adjusting the angle of the reflector.

2. The double-station machining detection device according to claim 1, wherein the three-dimensional movement adjusting support comprises a base body, a first movable guide rail, a second movable guide rail, a third movable guide rail, a first driving device, a second driving device and a third driving device;

3. The double-station machining detection device according to claim 1, wherein the movable support is a lifting structure;

the bottom of the movable support is provided with a plurality of universal wheels.

4. The double-station machining detection device according to claim 3, wherein the movable support comprises a base frame, a movable frame and a driving mechanism;

the movable frame is movably arranged on the bottom frame, the driving mechanism is used for driving the movable frame to move vertically relative to the bottom frame, and the interferometer is arranged on the movable frame.

5. The dual-station machining detection device of claim 1, wherein the interferometer and the machining control system are both connected to the programming detection system, and the machining robot is connected to the machining control system.

6. A double-station machining detection method is suitable for the double-station machining detection equipment of any one of claims 1 to 5, and is characterized by comprising the following steps:

controlling the machining robot to machine the workpiece on the second workbench according to a second numerical control program generated by the second surface shape error;

the detecting a first surface shape error of the workpiece on the first workbench by the detecting device and/or detecting a second surface shape error of the workpiece on the second workbench by the detecting device comprises: