CN111272703A - Array type multi-channel optical fiber sensor and preparation method thereof - Google Patents
Array type multi-channel optical fiber sensor and preparation method thereof Download PDFInfo
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- CN111272703A CN111272703A CN202010194494.7A CN202010194494A CN111272703A CN 111272703 A CN111272703 A CN 111272703A CN 202010194494 A CN202010194494 A CN 202010194494A CN 111272703 A CN111272703 A CN 111272703A
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Abstract
The invention discloses an array type multichannel optical fiber sensor and a preparation method thereof, wherein the sensor comprises a silver film, an indium tin oxide-silver composite film, an indium tin oxide-gold composite film, a titanium dioxide-silver composite film, a titanium dioxide-gold composite film and five polished single-mode optical fibers, wherein the five polished single-mode optical fibers are respectively plated with the silver film, the indium tin oxide-silver composite film, the indium tin oxide-gold composite film, the titanium dioxide-silver composite film and the titanium dioxide-gold composite film, the five polished single-mode optical fibers are welded in pairs, and the preparation method of the sensor is provided.
Description
Technical Field
The invention relates to an optical fiber sensor and a preparation method thereof, in particular to an array type multi-channel optical fiber sensor and a preparation method thereof, and belongs to the field of optical fiber sensing.
Background
In 1902 wood discovered a phenomenon called Surface Plasmon Resonance (SPR) in optical experiments, which also entered the human eye. Fano in 1941 explained the SPR phenomenon, which is a physical optical phenomenon consisting of resonance of free electrons generated under certain conditions, occurring on the interface between light and a medium. In 1968, Otto indicated that SPR effects would occur under specific conditions, and given corresponding conditions immediately after Krestchman in 1971 modified the structure of an Otto-type prism SPR sensor by using a prism and a metal film to excite the surface plasmon resonance phenomenon. In 1992, the Plasmon Resonance sensor realized a new breakthrough, and r.c. jorgenson researched to replace the prism Plasmon Resonance sensor with an optical fiber, so that the Surface Plasmon Resonance (SPR) technology was born. The optical fiber SPR technique is a technique for effectively combining an SPR technique and an optical fiber, and the SPR technique is used for detecting micro-changes on the surface of a medium by using an optical principle. Light is transmitted in the optical fiber and is totally reflected, and evanescent waves are generated in the process of total reflection, so that free electrons on the metal Surface are excited, and Surface plasma Wave (Surface plasma Wave SPW) is generated. When a certain condition is met, the surface plasmon and the evanescent wave resonate, and the energy of the incident light is coupled into the surface plasmon, resulting in a change in the amplitude, phase and other information of the reflected light, and the magnitude of the change is generally related to the optical characteristics of the surrounding medium. Based on this characteristic, fiber SPR sensors have thus begun to find wide application.
Currently, optical fiber SPR sensing technology is mainly focused on studying optical fiber SPR sensors with novel structural modes, and diversified applications such as higher precision, higher simplicity, and multiple channels are expected.
A two-channel fiber SPR biosensor is disclosed in application publication No. CN 208705230U, which includes a reference channel and a sensing channel as a blank control reference channel, and detects the amount of wavelength shift caused by nonspecific adsorption; the sensing channel utilizes the coupling effect between the gold film and the gold nanoparticles to enhance the local electric field intensity and improve the detection sensitivity, and utilizes the graphene oxide film to improve the fixation efficiency of the antibody. Two channels in the dual-channel optical fiber SPR sensor respectively use different metal films, so that two resonance valleys are generated, dual-channel sensing is realized, and the dual-channel optical fiber SPR sensor has the unique advantages of eliminating measurement errors caused by non-specific adsorption and being insensitive to temperature; meanwhile, two SPR valleys of the two channels are separated from each other, so that the two SPR valleys can not generate adverse effects mutually in the detection process, and the biosensor is more favorable for biosensing. The utility model discloses effectively solved sensor sensitivity among the prior art low, easily receive the problem that liquid refracting index changes and the temperature fluctuation influences.
The application publication No. CN1106289340B discloses a TFBG SPR-based multichannel optical fiber sensor, which comprises a broadband light source, a polarization controller, a first sensor, a first chromium-gold film, a first TFBG, a second sensor, a second chromium-gold film, a second TFBG, a third sensor, a third chromium-gold film, a third TFBG and a spectrometer. The broadband light source emits light with the wavelength of 1500 nm-1570 nm, and the polarization state of the light is adjusted by the polarization controller and then the light is incident to the first sensor along the transmission optical fiber. When the incident light is transmitted to the first sensor, a large number of cladding modes which are transmitted along the reverse direction are excited, when the incident light is transmitted to the second sensor, a large number of cladding modes which are transmitted along the reverse direction are excited, when the incident light is transmitted to the third sensor, a large number of cladding modes which are transmitted along the reverse direction are excited, and the spectrometer detects the information of the total transmission spectrum.
Disclosure of Invention
The purpose of the invention is as follows: the first purpose of the invention is to provide an array type multi-channel optical fiber sensor which has small volume, long service life, high sensitivity, good reusability and high accuracy; a second object of the present invention is to provide a method for manufacturing the sensor.
The technical scheme is as follows: the array type multichannel optical fiber sensor comprises a silver film, an indium tin oxide-silver composite film, an indium tin oxide-gold composite film, a titanium dioxide-silver composite film, a titanium dioxide-gold composite film and five polished single-mode optical fibers, wherein the five polished single-mode optical fibers are respectively plated with the silver film, the indium tin oxide-silver composite film, the indium tin oxide-gold composite film, the titanium dioxide-silver composite film and the titanium dioxide-gold composite film, and the five polished single-mode optical fibers are welded in pairs.
The optical fiber sensor firstly utilizes the principle of surface plasma resonance to plate a metal film and a composite film on the polished and ground surface of the optical fiber, when evanescent waves generated by a light source through the optical fiber can excite free electrons on the surfaces of the metal film and the composite film and generate plasma resonance, five different plasma resonance wavelengths different from that of the traditional sensor are generated, and the optical fiber sensor can play a special multi-channel role in a specific environment.
Secondly, in a large-range measurement range and a small-range measurement range or under the condition of high sensitivity, the sensor utilizes the advantages of the array channels in different sensing channels, so that the optimal sensing channel can be selected for measurement in different sensing environments, and the accuracy of the sensor is improved.
Further, the thickness of the silver film, the silver in the composite film and the gold in the composite film is 30-50nm, the thickness of the titanium dioxide in the composite film is 10-20nm, and the thickness of the indium tin oxide in the composite film is 10-15 nm.
The preparation method of the array type multi-channel optical fiber sensor comprises the following steps:
(1) removing coating layers of five single mode fibers, exposing bare fibers with the length of 100mm-120mm, cleaning, and polishing and grinding two sides of the five single mode fibers;
(2) preparing a silver film, an indium tin oxide-silver composite film, an indium tin oxide-gold composite film, a titanium dioxide-silver composite film and a titanium dioxide-gold composite film by adopting a direct current magnetron sputtering method, and respectively sputtering a first silver film on two sides of a first polished single-mode optical fiber; respectively sputtering a second silver film on two sides of the second polished single-mode fiber, and sputtering a layer of indium tin oxide on the second silver film to prepare an indium tin oxide-silver composite film; the preparation method of the indium tin oxide-gold composite membrane, the titanium dioxide-silver composite membrane and the titanium dioxide-gold composite membrane is the same as that of the indium tin oxide-silver composite membrane, wherein a layer of metal membrane is sputtered on two sides of a single-mode optical fiber which is polished and ground in different ways, and a layer of metal oxide membrane is sputtered on the metal membrane;
(3) and welding the five sputtered single-mode fibers in pairs to obtain the array type multi-channel fiber sensor.
Further, the length of a groove generated by polishing and grinding the single-mode optical fiber in the step (1) is 8-10 mm, the distance between a cladding and a fiber core of the single-mode optical fiber in the step (1) is 300-500 nm, and the polishing and grinding in the step (1) are carried out through a polishing and grinding wheel.
Further, the fusion splicing in the step (3) is carried out in an optical fiber fusion splicer.
Has the advantages that: compared with the prior art, the invention has the following remarkable advantages: the sensor has the advantages that the multi-channel measurement can be realized in the same measurement environment, so that the measured data is more accurate; by adopting an array type multi-channel structure of various metal films and composite films, various characteristics of an original single-channel sensor are maintained, an optimal channel in each refractive index range can be selected according to the linear fitting degree of a relation curve of a resonance wave trough and refractive indexes through the characteristics of the array type multi-channel in a small-range measurement range, an AG film is selected to form a channel I in the refractive index range of 1.33-1.35, an ITO-AU composite film is selected to form a channel III in the refractive index range of 1.35-1.37, and a TIO2-AG composite film is selected to form a channel IV in the refractive index range of 1.37-1.40, so that the sensor can achieve the accuracy far exceeding that of other sensors in the small-range measurement range; secondly, in a wide-range measurement range of 1.33-1.40, an ITO-AG composite film can be used for forming a channel II due to good overall linear fitting degree, a channel V formed by a TIO2-AU composite film can be used under the sensing condition of high sensitivity, and finally five resonance wave troughs generated by the sensor have obvious differences so that the sensor can be more intuitive and more vivid when being used and observed; the sensor of the invention has very beneficial effects in various detection fields due to convenience, effectiveness, detection accuracy and multiple utilization.
Drawings
FIG. 1 is a diagram of a model of an array type multi-channel fiber sensor according to the present invention;
FIG. 2 is a longitudinal sectional view of the array type multi-channel optical fiber sensor of the present invention;
FIG. 3 is a sensor system test chart of the array type multi-channel optical fiber sensor of the present invention;
FIG. 4 is a graph showing the relationship between the refractive index and five resonance troughs of the arrayed multi-channel optical fiber sensor of the invention.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in fig. 1-2, in the array type multichannel optical fiber sensor of the present invention, 1 is a channel i formed by an AG film, 2 is a channel ii formed by an ITO-AG composite film, 3 is a channel iii formed by an ITO-AU composite film, 4 is a channel iv formed by a TIO2-AG composite film, 5 is a channel v formed by a TIO2-AU composite film, 6 is a single-mode optical fiber core, and 7 is a single-mode optical fiber cladding, and the preparation steps of the array type multichannel optical fiber sensor are as follows:
(1) firstly, preparing a 9-125 mu m type single mode optical fiber, then removing a protective layer by using a wire stripper, then removing a coating layer at the position of two sides of the single mode optical fiber needing polishing by using the wire stripper, exposing a bare optical fiber with the length of about 100mm, cleaning the bare optical fiber, and then fixing the bare optical fiber on a clamp of a platform;
(2) the height and tension of the polishing wheel are adjusted, the polishing parameters of the polishing machine are firstly set on the optical fiber, and the optical fiber is polished to enable the distance between the fiber core and the cladding to be about 500 nm. Repeating the same operation for 4 times to finish polishing of five array channels, finally cleaning the polished optical fiber by deionized water, placing the optical fiber in a dryer for 10 minutes to dry the optical fiber, fixing the optical fiber on a glass slide by using a copper foil adhesive tape, and sealing each polished groove by using the copper foil adhesive tape;
(3) fixing a glass slide for fixing an optical fiber on a sample disc, taking down a copper foil adhesive tape on a groove needing a silver plating film, vacuumizing a magnetron sputtering film plating machine to 5pa, vacuumizing to 8 x 10-4 pa by a molecular pump, adjusting power until the magnetron sputtering film plating machine is started, sputtering a layer of silver film with the thickness of 50nm on a film thickness monitor, closing a baffle valve, taking out and continuously sealing the copper foil adhesive tape, sputtering a layer of gold film with the thickness of 50nm on the groove needing the gold plating film by the same method, closing the baffle valve, taking out and continuously sealing the copper foil adhesive tape;
(4) taking out the optical fiber plated with the gold film and the silver film, taking down the copper foil glue of the channel to be plated with the ITO film by the same method as the third step, plating the ITO with the thickness of 10nm by a film thickness monitor, taking down the copper foil glue of the channel to be plated with the TIO2 film in the same way, and plating the TIO with the thickness of 15nm by the film thickness monitor;
(5) and packaging the manufactured sensor to protect the structure of the sensor.
The design structure of the invention is simple, the array type multi-channel optical fiber sensor obtained by the processing steps is connected for refractive index test according to the mode of figure 3, and the specific steps are as follows:
(1) firstly, a broadband light source is connected into the sensor through a single-mode optical fiber and a flange plate, so that the light source can enter the sensor designed by the invention;
(2) preparing a glycerol solution with the refractive index of 1.33-1.40 by an Abbe refractometer to be used as a sensing area;
(3) the other end of the sensor is connected with the sensor through a flange plate, so that optical signals can be output to a spectrometer;
(4) then the USB interface is used for connecting the spectrometer with a computer, and the multichannel SPR resonance curve is obtained by receiving the signals from the computer;
(5) and finally, processing the obtained data through matlab to finally obtain a relation curve graph of the five resonance wave troughs and the refractive index of the sensor SPR.
As shown in fig. 3, a broadband light source 8 enters a sensor and a sensing area 10 of the invention through a single-mode fiber 9, then an array type multi-channel fiber SPR sensor based on various metal films and composite films transmits a detected optical signal to a spectrometer 11 through an output end of the sensor via a single-mode fiber 12, so as to obtain five different SPR resonance spectra, wherein the SPR resonance wavelengths are subjected to corresponding red shift and blue shift due to the change of the refractive index in the measuring area 10, and finally a required resonance curve is obtained through the display of a computer pc end 13 and analyzed to obtain parameters to be measured.
As shown in fig. 4, in the refractive index of 1.33-1.40, five different sensing wavelengths can be obtained from the array type multi-channel fiber SPR sensor based on various metal films and composite films, which can meet the requirement of accurately measuring the refractive index in a small range, the refractive index in a large range and the high sensitivity, and the highest sensitivity can reach about 5457 nm/RIU.
Claims (10)
1. An array type multi-channel optical fiber sensor, which is characterized in that: the optical fiber polishing device comprises a silver film, an indium tin oxide-silver composite film, an indium tin oxide-gold composite film, a titanium dioxide-silver composite film, a titanium dioxide-gold composite film and five polished single-mode optical fibers, wherein the five polished single-mode optical fibers are respectively plated with the silver film, the indium tin oxide-silver composite film, the indium tin oxide-gold composite film, the titanium dioxide-silver composite film and the titanium dioxide-gold composite film, and the five polished single-mode optical fibers are welded in pairs.
2. The array multichannel optical fiber sensor as claimed in claim 1, wherein: the thickness of the silver film, the silver in the composite film and the gold in the composite film is 30-50 nm.
3. The array multichannel optical fiber sensor as claimed in claim 1, wherein: the thickness of the titanium dioxide in the composite film is 10-20 nm.
4. The array multichannel optical fiber sensor as claimed in claim 1, wherein: the thickness of the indium tin oxide in the composite film is 10-15 nm.
5. A method for preparing the array type multichannel optical fiber sensor in claim 1, which is characterized by comprising the following steps:
(1) removing coating layers of five single mode fibers, exposing bare fibers with the length of 100mm-120mm, cleaning, and polishing and grinding two sides of the five single mode fibers;
(2) preparing a silver film, an indium tin oxide-silver composite film, an indium tin oxide-gold composite film, a titanium dioxide-silver composite film and a titanium dioxide-gold composite film by adopting a direct current magnetron sputtering method, and respectively sputtering a first silver film on two sides of a first polished single-mode optical fiber; respectively sputtering a second silver film on two sides of a second polished single-mode optical fiber, and sputtering a layer of indium tin oxide on the second silver film to prepare an indium tin oxide-silver composite film; the preparation method of the indium tin oxide-gold composite membrane, the titanium dioxide-silver composite membrane and the titanium dioxide-gold composite membrane is the same as that of the indium tin oxide-silver composite membrane, wherein a layer of metal membrane is sputtered on two sides of a single-mode optical fiber which is polished and ground in different ways, and a layer of metal oxide membrane is sputtered on the metal membrane;
(3) and welding the five sputtered single-mode fibers in pairs to obtain the array type multi-channel fiber sensor.
6. The method for preparing the array type multi-channel optical fiber sensor according to claim 5, wherein: the length of the groove generated by polishing and grinding the single-mode optical fiber in the step (1) is 8-10 mm.
7. The method for preparing the array type multi-channel optical fiber sensor according to claim 5, wherein: the distance between the cladding and the fiber core of the single-mode optical fiber in the step (1) is 300nm-500 nm.
8. The method for preparing the array type multi-channel optical fiber sensor according to claim 5, wherein: and (2) polishing and grinding are carried out through a polishing and grinding wheel in the step (1).
9. The method for preparing the array type multi-channel optical fiber sensor according to claim 5, wherein: the sputtering in the step (2) is performed by a film thickness monitor.
10. The method for preparing the array type multi-channel optical fiber sensor according to claim 5, wherein: and (4) performing fusion in the optical fiber fusion splicer in the step (3).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111929763A (en) * | 2020-08-05 | 2020-11-13 | 电子科技大学 | quasi-D type photonic crystal fiber sensor based on surface plasma |
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| CN208705230U (en) * | 2018-08-22 | 2019-04-05 | 东北大学 | A kind of double channel optical fiber surface plasmon resonance biosensor |
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| WO2013052932A1 (en) * | 2011-10-06 | 2013-04-11 | Ofs Fitel, Llc | Broadband fiber sensor array |
| EP3264110A1 (en) * | 2015-02-24 | 2018-01-03 | Hitachi, Ltd. | Optical fiber sensor and measurement device using same |
| CN106896084A (en) * | 2017-03-08 | 2017-06-27 | 暨南大学 | A kind of light fibre humidity transducer for being based on two selenizing molybdenums and preparation method thereof |
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