CN111272430A - Bearing vibration measuring device based on optical interference principle and measuring method thereof - Google Patents
Bearing vibration measuring device based on optical interference principle and measuring method thereof Download PDFInfo
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- CN111272430A CN111272430A CN202010287574.7A CN202010287574A CN111272430A CN 111272430 A CN111272430 A CN 111272430A CN 202010287574 A CN202010287574 A CN 202010287574A CN 111272430 A CN111272430 A CN 111272430A
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- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
- G01M13/04—Bearings
- G01M13/045—Acoustic or vibration analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
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Abstract
The invention discloses a bearing vibration measuring device based on an optical interference principle and a measuring method thereof. The device comprises a laser, a spectroscope, a first reflecting mirror, a charge coupled device and a signal processing system. The laser is used for emitting laser beams to the bearing to be measured, the spectroscope enables the laser beams to be divided into reflected beams and transmitted beams, and the first reflecting mirror is used for reflecting the reflected beams back to the spectroscope. The spectroscope is arranged between the first reflecting mirror and the charge coupled device, the transmitted light beam changes the optical path length and is reflected back to the spectroscope by the vibration displacement of the bearing to be detected after moving to the bearing to be detected, and the transmitted light beam interferes with the reflected light beam reflected back to the spectroscope to generate interference fringes. The charge coupled device is used for capturing interference fringes and converting the interference fringes into corresponding electronic information. And the signal processing system is used for calculating the displacement of the mechanical vibration of the bearing to be measured. The invention effectively improves the measurement precision and the response sensitivity and provides good data guarantee for the subsequent vibration elimination work.
Description
Technical Field
The invention relates to a bearing vibration measuring device in the technical field of bearing detection, in particular to a bearing vibration measuring device based on an optical interference principle and a bearing vibration measuring method based on the optical interference principle.
Background
The bearing operation is often accompanied by the generation of mechanical vibrations that often have a significant effect on the performance of the system. In addition, the noise level of the machine during operation is often closely related to the vibration of the system during operation. Therefore, mechanical vibration of the system is an essential factor when considering machine performance. The existing technology for eliminating mechanical vibration is based on the premise that the vibration condition of the machine in the working process is well known.
On one hand, the existing bearing detection device and method are used for low-speed detection, the actual working state of the bearing usually runs at a high speed, the existing low-speed detection means cannot meet the requirement of mastering the actual performance of the bearing, and the problem that the detection data cannot meet the requirement of actual working at all exists. Therefore, the bearing vibration measuring device with high precision and high sensitivity has obvious engineering significance. On the other hand, vibration displacement measurement of mechanical parts with small volume, such as bearings, is generally performed by using a vibration meter. However, the mass of the vibrating mass used in the conventional vibrating instrument causes a principle error in the measurement result, and the requirement for high precision cannot be met.
Disclosure of Invention
The invention provides a bearing vibration measuring device based on an optical interference principle and a measuring method thereof, aiming at solving the technical problems that the existing bearing vibration displacement measuring device cannot meet high-speed measurement and is low in measuring precision.
The invention is realized by adopting the following technical scheme: a bearing vibration measuring device based on the optical interference principle is used for measuring the mechanical vibration displacement of a bearing to be measured, and comprises:
the laser is used for emitting laser beams parallel to the axial direction of the bearing to be tested to the bearing to be tested;
the spectroscope is arranged between the bearing to be measured and the laser, and the mirror surface is not perpendicular to the laser beam, so that the laser beam is divided into a reflected beam and a transmitted beam through the mirror surface;
the first reflecting mirror is arranged on the motion path of the reflected light beam and used for reflecting the reflected light beam back to the spectroscope;
the spectroscope is arranged between the first reflecting mirror and the charge coupling device; the transmitted light beam changes the optical path length and is reflected back to the spectroscope by the vibration displacement of the bearing to be detected after moving to the bearing to be detected, and interferes with the reflected light beam reflected back to the spectroscope to generate interference fringes; the charge coupled device is used for capturing the interference fringes and converting the interference fringes into corresponding electronic information; and
the signal processing system is used for firstly taking the constant optical path length of the reflected light beam as a reference optical path according to the electronic information so as to calculate the optical path difference generated by the transmitted light beam on the bearing to be measured, and then calculating the displacement of the mechanical vibration of the bearing to be measured through a preset optical path difference-displacement comparison table or a function relation according to the optical path difference; wherein, the optical path difference and the displacement have a one-to-one corresponding comparison relationship in the optical path difference-displacement comparison table or function relationship.
The invention emits laser beam through the laser, the laser beam is divided into a projection beam and a reflection beam at the spectroscope, the reflection beam is emitted at the reflector and returns back to the spectroscope, the projection beam is reflected at the bearing to be measured and returns to the spectroscope, the optical path length of the reflection beam is changed because the optical path length of the reflection beam is unchanged and the projection beam is vibrated and displaced by the bearing to be measured, so that the two beams interfere at the spectroscope, the CCD can capture interference fringes produced by the interference and convert the interference fringes into electronic information, so that the signal processing system can calculate the optical path difference by taking the constant optical path length of the reflection beam as reference according to the information, and then calculate the displacement of the bearing to be measured according to the optical path difference, so that the displacement can reach the order of magnitude of the wavelength of the laser by using the optical interference measurement, the technical problems that the existing bearing vibration displacement measuring device cannot meet high-speed measurement and is low in measurement precision are solved, and the technical effects that high-speed detection can be realized and the measurement precision is high are achieved.
As a further improvement of the above aspect, the bearing vibration measuring apparatus further includes:
and the optical isolator is arranged between the laser and the spectroscope and is used for allowing the laser beam to pass through and preventing the light beam on one side of the spectroscope from returning to the laser.
Further, the optical isolator includes a polarizer and a wave plate; the polarizer and the wave plate are both positioned on the motion path of the laser beam, and the polarizer is arranged between the laser and the wave plate.
As a further improvement of the above aspect, the bearing vibration measuring apparatus further includes:
and the three front lenses are respectively arranged between the spectroscope and the bearing to be measured, the first reflector and the charge coupled device.
As a further improvement of the above solution, the signal processing system includes a filtering and amplifying module, an AD converter, a threshold comparator, a direction-judging counter, and a processor; the filtering and amplifying module is used for filtering and amplifying the electronic information, and inputting a filtering and amplifying signal into the AD converter for conversion after the filtering and amplifying signal is processed by the threshold comparator and the direction judging counter so as to obtain a digital signal; the processor calculates the displacement according to the digital signal.
As a further improvement of the above aspect, the bearing vibration measuring apparatus includes:
a test platform; the laser, the spectroscope, the first reflecting mirror and the charge coupling device are all arranged on the test platform; and
the bearing driving and positioning mechanism comprises a motor and a mounting frame; the mounting frame is arranged on the test platform and used for positioning the bearing to be tested; the motor is installed on the test platform, and the output shaft cup joints with the inner circle of the bearing that awaits measuring.
Further, the bearing vibration measuring apparatus further includes:
and the second reflecting mirror is arranged on the mounting frame, does not cover the bearing to be detected, and is used for reflecting the transmission light beam to the spectroscope.
Still further, the bearing vibration measuring apparatus includes:
and the display screen is arranged on the test platform and is used for displaying the interference fringes and the displacement.
Further, the laser is a He-Ne laser light source, and the wave plate is an 1/4 wave plate.
The invention also provides a bearing vibration measuring method based on the optical interference principle, which is applied to any bearing vibration measuring device based on the optical interference principle and comprises the following steps:
(a) emitting laser beams to a bearing to be measured;
(b) dividing the laser beam into a reflected beam and a transmitted beam by a retro-spectroscope, and transmitting the transmitted beam to a bearing to be measured;
(c) reflecting the reflected beam back to a beam splitter; after moving to the bearing to be detected, the transmitted light beam changes the optical path length and is reflected back to the spectroscope by the vibration displacement of the bearing to be detected, and interferes with the reflected light beam reflected back to the spectroscope to generate interference fringes;
(d) capturing the interference fringes and converting the interference fringes into corresponding electronic information;
(e) firstly, according to the electronic information, taking the constant optical path length of the reflected light beam as a reference optical path to calculate the optical path difference generated by the transmitted light beam on the bearing to be measured, and then according to the optical path difference, calculating the displacement of the mechanical vibration of the bearing to be measured through a preset optical path difference-displacement comparison table or functional relation; wherein, the optical path difference and the displacement have a one-to-one corresponding comparison relationship in the optical path difference-displacement comparison table or function relationship.
Compared with the existing bearing vibration displacement measuring device, the bearing vibration measuring device based on the optical interference principle and the measuring method thereof have the following beneficial effects:
1. the bearing vibration measuring device based on the optical interference principle emits laser beams through a laser, the laser beams are divided into a projection beam and a reflection beam at a spectroscope, the reflection beam is emitted at a position of a reflector and returns back to the spectroscope, the projection beam is reflected at a position of a bearing to be measured and returns to the spectroscope, the optical path length of the projection beam is changed due to the fact that the optical path length of the reflection beam is unchanged and the projection beam is subjected to vibration displacement by the bearing to be measured, so that the two beams interfere at the spectroscope, a charge-coupled device can capture interference fringes generated by the interference and convert the interference fringes into electronic information, so that a signal processing system can calculate the optical path difference by taking the constant optical path length of the reflection beam as reference according to the information, then calculate the displacement of the bearing to be measured according to the optical path difference, and the displacement can reach the order of magnitude of the wavelength of the laser by utilizing, the traditional vibrating block and the vibration displacement sensor attached to the surface are not used any more, the principle error caused by the vibrating block is reduced, and the artificial counting error is basically eliminated, so that the measurement precision and the response sensitivity are effectively improved, and a good data guarantee is provided for the subsequent vibration elimination work.
2. The bearing vibration measuring device based on the optical interference principle can measure the vibration displacement of the bearing to be measured, and the measurement work of the displacement is realized through the interference of laser when the vibration displacement of the bearing to be measured is measured, so that the bearing to be measured can run at a high speed, namely the measuring device can measure the bearings in various high-speed states, the actual use performance of the bearing can be mastered, and the vibration displacement of the bearing running at a high speed can be accurately measured due to the fact that the magnitude of error involved in the laser interference is very small, so that the measuring device can be used in various measuring environments, and the application field is wider.
3. The bearing vibration measuring device based on the optical interference principle is further provided with an optical isolator, the optical isolator can effectively prevent a measured object and a reference light path from returning to the laser to interfere with the output of the laser, and the stability of laser signals is guaranteed. The optical isolator can be composed of a polarizer and a wave plate, when the laser beam returns to pass through again, the laser beam becomes linearly polarized light with the polarization direction of the initial laser for the next time, and the laser beam cannot penetrate through the polarizer to enter the laser, so that the reverse interference of the laser is discharged.
4. According to the bearing vibration measurement method based on the optical interference principle, the optical path length of a projected light beam is changed through the vibration of the bearing to be measured, so that the change of interference fringes is caused, the vibration displacement of the bearing to be measured is calculated, the radial vibration displacement characteristic of the produced bearing can be effectively analyzed in the actual production design of the bearing, and the accuracy of the bearing vibration measurement is improved. In addition, because the change of the interference fringe generated by the laser interference is in the order of magnitude of the wavelength, namely the change unit reaches the nanometer level, the order of magnitude of the displacement which can be measured is very small, and the measurement sensitivity can be further improved.
Drawings
Fig. 1 is a schematic diagram of a bearing vibration measuring apparatus based on the optical interference principle according to embodiment 1 of the present invention.
Fig. 2 is a top view of the bearing vibration measuring apparatus based on the optical interference principle in fig. 1.
Fig. 3 is a block diagram of a data processing system in the bearing vibration measuring device based on the optical interference principle in fig. 1.
Fig. 4 is a front view of a bearing vibration measuring apparatus based on the optical interference principle according to embodiment 2 of the present invention.
FIG. 5 is a top view of the bearing vibration measuring device of FIG. 4 from another perspective view based on the optical interference principle;
FIG. 6 is a rear view of the bearing vibration measuring apparatus of FIG. 4 based on the optical interference principle;
fig. 7 is a left side view of the bearing vibration measuring apparatus based on the optical interference principle in fig. 4.
Description of the symbols:
1 bearing to be measured 8 front lens
2 laser 9 mirror two
3 spectroscope 10 test platform
4 mirror-11 motor
5 mounting rack for charge coupled device 12
6 polarizer 13 display screen
7 wave plate
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
Referring to fig. 1, fig. 2 and fig. 3, the present embodiment provides a bearing vibration measuring device based on the optical interference principle, which is used for measuring the mechanical vibration displacement of the bearing 1 to be measured. The measuring device can be used as detection equipment in bearing quality measurement, can judge the quality of the bearing by detecting the vibration displacement generated by the bearing in the high-speed movement process, can also be used as experimental equipment for bearing detection tests to be used for carrying out experiments on the performance of the bearing, and can also be used as measuring equipment for maintaining the bearing. The measuring device comprises a laser 2, a spectroscope 3, a first reflecting mirror 4, a charge coupled device 5 and a signal processing system, and also comprises a front lens 8, a second reflecting mirror 9, a test platform 10, a bearing driving and positioning mechanism and a display screen 13.
The laser 2 is used for emitting a laser beam to the bearing 1 to be measured, and the laser beam is parallel to the axial direction of the bearing 1 to be measured. In the present embodiment, the laser 2 is mounted on the test platform 10, which is disposed near the edge of the test platform 10, and is used to emit a laser beam toward the center of the test platform 10. The laser 2 is a He — Ne laser light source, and has very stable frequency characteristics, and can provide a stable laser beam. Of course, in other embodiments, the laser 2 may adopt other laser light sources, and the specific light source type may be selected according to actual needs.
The spectroscope 3 is arranged between the bearing 1 to be measured and the laser 2, and the mirror surface is arranged non-perpendicularly to the laser beam, so that the laser beam is divided into a reflected beam and a transmitted beam through the mirror surface. In this embodiment, the beam splitter 3 is installed on the testing platform 10, and is disposed at the center of the table of the testing platform 10, and the included angle between the beam splitter and the laser beam is not a right angle, so that the laser beam can generate a reflected beam and a projected beam on the lens, and it is ensured that the reflected beam does not return to the laser 2 after being reflected. The spectroscope 3 can be fixed on the test platform 10 by gluing, welding, clamping and the like, the height of the spectroscope 3 is higher than that of the laser 2, and the spectroscope has a larger mirror surface, so that the laser beam can completely strike the mirror surface of the spectroscope 3.
A mirror one 4 is arranged in the path of movement of the reflected beam and is used to reflect the reflected beam back to the beam splitter 3. In this embodiment, the first mirror 4 is mounted on the test platform 10 with its central axis perpendicular to the laser beam. The mirror surface of mirror one 4 should be large enough to reflect the reflected beam back completely to the beam splitter 3. The first reflector 4 may be a circular reflector, and may be fixed on the testing platform 10 by clamping, bonding, or the like.
The charge coupled device 5 is also called a CCD device, which is a partial structure of a CCD camera. The spectroscope 3 is arranged between the first reflecting mirror 4 and the charge coupled device 5. After moving to the bearing 1 to be measured, the transmitted light beam changes the optical path length and is reflected back to the spectroscope 3 by the vibration displacement of the bearing 1 to be measured, and interferes with the reflected light beam reflected back to the spectroscope 3 to generate interference fringes. The charge coupled device 5 is used for capturing the interference fringes and converting the interference fringes into corresponding electronic information. In this embodiment, the ccd 5 is mounted on the testing platform 10, and it, the bearing 1 to be tested, the laser 2 and the first reflector 4 are located on four sides of the rectangle, and the central axes intersect at the same point, and the point is located on the spectroscope 3, and can be preferably concentrated at the center of the spectroscope 3.
The number of the front lenses 8 is three, and the three front lenses 8 are respectively arranged between the spectroscope 3 and the bearing 1 to be measured, the first reflector 4 and the charge coupled device 5. The front lens 8 can enhance the light beam, for example, the front lens 8 disposed between the beam splitter 3 and the ccd 5 can make the generated interference fringes focused on the ccd 5, enhancing the optical effect.
The bearing drive positioning mechanism comprises a motor 11 and a mounting frame 12. The mounting frame 12 is mounted on the test platform 10 and is used for positioning the bearing 1 to be tested. The motor 11 is installed on the test platform 10, and the output shaft is sleeved with the inner ring of the bearing 1 to be tested. The second reflecting mirror 9 is installed on the mounting frame 12, does not cover the bearing 1 to be measured, and is used for reflecting the transmitted light beam to the spectroscope 3. The bearing 2 to be measured is driven by the motor 11 to generate vibration displacement in the horizontal direction, meanwhile, the second reflector 9 attached to the mounting frame 12 is driven to generate displacement in the horizontal direction, and the displacement in the horizontal direction can generate interference fringes for expressing the displacement in the horizontal direction through laser interference. The motor 11 is characterized by long rotation speed adjusting range, constant rotation speed in the working process and high accuracy, and interference fringes generated by laser interference are processed and analyzed by a CCD (charge coupled device) element video signal through a subsequent signal processing circuit to generate final horizontal displacement.
The second reflecting mirror 9 is installed on the mounting frame 12, does not cover the bearing 1 to be measured, and is used for reflecting the transmitted light beam to the spectroscope 3. The second mirror 9 can reflect the projected beam back to the beam splitter 3 sufficiently to cause the reflected beam and the projected beam to intersect at the interference plane. When the bearing 1 to be measured vibrates, the optical path difference of the two laser beams changes, the interference fringes change along with the change, and the changes can be amplified by a subsequent optical microstructure. Since the optical path length of the reflected beam is constant, the optical path length of the projected beam changes with the movement of the object to be measured. Therefore, when the optical path difference of the two beams is even times of the half wavelength of the laser, the beams are mutually overlapped and strengthened, and bright stripes are formed on the charge coupled device 5; when the optical path difference is odd times of the half wavelength of the laser, the two light waves cancel each other out, and a dark fringe is formed on the charge coupled device 5. As a result, the intensity of the two combined lights is increased or decreased, which is determined by the optical path difference between the two lights. The optical path of the reflected light beam is unchanged, and the optical path of the transmitted light beam changes along with the vibration displacement of the measured bearing 1, so that the light and shade change of the interference fringes can directly measure the micro-displacement distance of the measured bearing, and a theoretical basis is provided for the subsequent measurement of the vibration displacement.
The signal processing system is used for firstly taking the constant optical path length of the reflected light beam as a reference optical path according to the electronic information so as to calculate the optical path difference generated by the transmitted light beam on the bearing 1 to be measured, and then calculating the displacement of the mechanical vibration of the bearing 1 to be measured through a preset optical path difference-displacement comparison table or a function relation according to the optical path difference. Wherein, the optical path difference and the displacement have a one-to-one corresponding comparison relationship in the optical path difference-displacement comparison table or function relationship. In this embodiment, the signal processing system includes a filtering and amplifying module, an AD converter, a threshold comparator, a direction-determining counter, and a processor; the filtering and amplifying module is used for filtering and amplifying the electronic information, and inputting a filtering and amplifying signal into the AD converter for conversion after the filtering and amplifying signal is processed by the threshold comparator and the direction judging counter so as to obtain a digital signal. The processor (which may be a single-chip microcomputer) calculates the displacement amount according to the digital signal. The CCD video signal of the interference fringe is sent to a computer for automatic processing and outputting a result through subsequent data acquisition, filtering amplification, a threshold comparator and a direction-judging counter, and the CCD realizes the reading and the output of the charge packet by utilizing the function of a shift register under the control of clock pulse to form a series of clock pulse sequences with different amplitudes. The whole process can be realized by the software part of the embedded microcomputer.
The display 13 is mounted on the test platform 10 and is used for displaying the interference fringes and the displacement. The display screen 13 is the display screen of host computer, and it can in time show after signal processing system calculates the displacement volume, and measuring personnel just can in time master the vibration displacement condition of bearing 1 that awaits measuring like this, also can get off this displacement volume record simultaneously. Of course, the data of the displacement amount can also be automatically stored in the upper computer, and a corresponding change curve is drawn in the upper computer and displayed in real time on the display screen 13. In addition, in some embodiments, the upper computer can remotely transmit the displacement data to the data monitoring platform on the background through the ethernet, and form cloud data of each bearing 1 to be tested, so that data support can be provided when the production condition of the bearing is subsequently checked.
To sum up, compare in current bearing vibrations displacement measurement device, the bearing vibration measurement device based on optical interference principle of this embodiment has following advantage:
1. the bearing vibration measuring device based on the optical interference principle emits a laser beam through a laser 2, the laser beam is divided into a projection beam and a reflection beam at a spectroscope 3, the reflection beam is emitted at a reflector-4 and returns back to the spectroscope 3, the projection beam is reflected at a bearing 1 to be measured and returns to the spectroscope 3, the projection beam is vibrated and displaced by the bearing 1 to be measured due to the unchanged optical path length of the reflection beam, so that the two beams interfere at the spectroscope, and a charge coupled device 5 can capture interference fringes generated by the interference and convert the interference fringes into electronic information, so that a signal processing system can calculate the optical path difference by taking the constant optical path length of the reflection beam as a reference according to the information, and then calculate the displacement of the bearing to be measured according to the optical path difference, the displacement can reach the order of magnitude of the wavelength of the laser by utilizing the optical interference measurement, the traditional vibrating block and the vibration displacement sensor attached to the surface are not used, the principle error caused by the vibrating block is reduced, the artificial counting error is basically eliminated, the measurement precision and the response sensitivity are effectively improved, and good data guarantee is provided for the subsequent vibration elimination work.
2. When the bearing vibration measuring device based on the optical interference principle is used for measuring the vibration displacement of the bearing 1 to be measured, the measurement work of the displacement is realized through the interference of laser, so that the bearing 1 to be measured can run at a high speed, namely, the measuring device can measure the bearings in various high-speed states, the actual use performance of the bearings can be mastered, and the vibration displacement of the bearing running at a high speed can be accurately measured due to the fact that the magnitude of error involved in the laser interference is very small, so that the measuring device can be used in various measuring environments, and the application field is wider.
Example 2
Referring to fig. 4-7, the present embodiment provides a bearing vibration measuring apparatus based on the optical interference principle, which adds an optical isolator on the basis of embodiment 1. The optical isolator is disposed between the laser 2 and the beam splitter 3, and is used for the laser beam to pass through and preventing the beam on the side of the beam splitter 3 from returning to the laser 2. In the present embodiment, the optical isolator includes a polarizer 6 and a wave plate 7. The polarizer 6 and the wave plate 7 are both positioned on the motion path of the laser beam, and the polarizer 6 is arranged between the laser 2 and the wave plate 7. Wherein, the wave plate 7 is an 1/4 wave plate.
According to the bearing vibration measuring device based on the optical interference principle, the optical isolator can effectively prevent the measured object and the reference light path from returning to the laser 2 to interfere the output of the laser 2, and the stability of laser signals is ensured. The optical isolator can be composed of a polarizer 6 and a wave plate 7, when the laser beam returns to pass through again, the laser beam becomes linearly polarized light with the polarization direction of the initial laser for the next time, and the linearly polarized light cannot penetrate through the polarizer 6 to enter the laser, so that the reverse interference of the laser is eliminated.
Example 3
The embodiment provides a bearing production system, which comprises the bearing vibration measuring device based on the optical interference principle in embodiment 1 or embodiment 2, and further comprises an alarm device and a controller. The controller is used for judging whether the displacement measured by the signal processing system is larger than a preset displacement. When the displacement is greater than the preset displacement, the controller can drive the alarm device to send alarm information to remind production personnel that the vibration displacement of the bearing is too large, and the motor 11 is stopped to rotate. When the displacement is not greater than the preset displacement, the controller draws the continuously generated displacement into a measurement curve and displays the measurement curve on the display screen 13, and meanwhile, whether the measurement time reaches a preset time is judged. When the measuring time reaches a preset time, the controller stops the motor 11 from rotating, and simultaneously drives the alarm device to send out test completion information so as to remind a manufacturer to complete the measuring work of the bearing 1 to be measured, namely the bearing 1 to be measured is a qualified product. Like this, this bearing production system just can realize the short-term test to the bearing to detect the precision very high, the process automation degree that detects simultaneously is high, can improve bearing detection efficiency, prevents the produced error of artifical detection.
Example 4
The present embodiment provides a bearing vibration measurement method based on the optical interference principle, which is applied to the bearing vibration measurement device based on the optical interference principle of embodiment 1 or embodiment 2. In this embodiment, the measurement method may be set in the upper computer as an independent program, or may be set as a measurement module for application. Wherein the measuring method comprises the following steps.
(a) A laser beam is emitted to the bearing 1 to be measured. The laser 2 can be controlled in a program-controlled manner, i.e. the laser 2 is switched on when the laser beam needs to be emitted, and the laser 2 is switched off otherwise.
(b) The laser beam is divided into a reflected beam and a transmitted beam by a return spectroscope 3, and the transmitted beam is emitted to the bearing 1 to be measured. The spectroscope 3 can be adjusted in position relative to the measurement platform 10 by other driving components, that is, when the spectroscope 3 needs to be spectroscopically moved to the spectroscopic position, the driving component is driven.
(c) The reflected beam is reflected back to the beam splitter 3. After moving to the bearing 1 to be measured, the transmitted light beam changes the optical path length by the vibration displacement of the bearing 1 to be measured and is reflected back to the spectroscope 3, and interferes with the reflected light beam reflected back to the spectroscope 3 to generate interference fringes. Similarly, the step can also control the first reflector 4 in a program control mode to realize the light reflecting function.
(d) Capturing the interference fringes and converting the interference fringes into corresponding electronic information. This step may be implemented by the charge coupled device 5, which may be an implementation step of a CCD camera.
(e) Firstly, according to the electronic information, the constant optical path length of the reflected light beam is used as a reference optical path to calculate the optical path difference generated by the transmitted light beam on the bearing 1 to be measured, and then according to the optical path difference, the displacement of the mechanical vibration of the bearing 1 to be measured is calculated through a preset optical path difference-displacement comparison table or function relation. Wherein, the optical path difference and the displacement have a one-to-one corresponding comparison relationship in the optical path difference-displacement comparison table or function relationship.
According to the bearing vibration measurement method based on the optical interference principle, the optical path length of a projected light beam is changed through vibration of the bearing 1 to be measured, so that the change of interference fringes is caused, the vibration displacement of the bearing 1 to be measured is calculated, in the actual production design of the bearing, the radial vibration displacement characteristic of the produced bearing can be effectively analyzed, and the accuracy of bearing vibration measurement is improved. In addition, because the change of the interference fringe generated by the laser interference is in the order of magnitude of the wavelength, namely the change unit reaches the nanometer level, the order of magnitude of the displacement which can be measured is very small, and the measurement sensitivity can be further improved.
Example 5
The present embodiments provide a computer terminal comprising a memory, a processor, and a computer program stored on the memory and executable on the processor. The steps of the method for measuring vibration of a bearing based on the optical interference principle of embodiment 4 are implemented when a processor executes a program.
The bearing vibration measurement method based on the optical interference principle in embodiment 4 can be applied in a software form, for example, a program designed to run independently is installed on a computer terminal, and the computer terminal can be a computer, a smart phone, a control system, other internet of things equipment, and the like. The bearing vibration measurement method based on the optical interference principle of embodiment 4 can also be designed as an embedded running program and installed on a computer terminal, such as a single chip microcomputer.
Example 6
The present embodiment provides a computer-readable storage medium having a computer program stored thereon. The program, when executed by a processor, implements the steps of the method for measuring vibration of a bearing based on the optical interference principle of embodiment 4.
The method for measuring vibration of a bearing based on the optical interference principle in embodiment 4 can be applied in the form of software, such as a program designed to be independently run by a computer-readable storage medium, such as a usb flash disk, designed as a usb shield, and a program designed to start the whole method by external triggering through the usb flash disk.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A bearing vibration measuring device based on the optical interference principle is used for measuring the mechanical vibration displacement of a bearing (1) to be measured, and is characterized by comprising:
the laser (2) is used for emitting a laser beam parallel to the axial direction of the bearing (1) to be tested to the bearing (1) to be tested;
the spectroscope (3) is arranged between the bearing (1) to be measured and the laser (2), and the mirror surface and the laser beam are arranged in a non-vertical way, so that the laser beam is divided into a reflected beam and a transmitted beam through the mirror surface;
a first reflecting mirror (4) arranged on the moving path of the reflected light beam and used for reflecting the reflected light beam back to the spectroscope (3);
the charge coupled device (5), the spectroscope (3) is arranged between the first reflector (4) and the charge coupled device (5); the transmitted light beam changes the optical path length and is reflected back to the spectroscope (3) by the vibration displacement of the bearing (1) to be detected after moving to the bearing (1) to be detected, and interferes with the reflected light beam reflected back to the spectroscope (3) to generate interference fringes; the charge coupled device (5) is used for capturing the interference fringes and converting the interference fringes into corresponding electronic information; and
the signal processing system is used for firstly taking the constant optical path length of the reflected light beam as a reference optical path according to the electronic information so as to calculate the optical path difference generated by the transmitted light beam on the bearing (1) to be tested, and then calculating the displacement of the mechanical vibration of the bearing (1) to be tested through a preset optical path difference-displacement comparison table or a function relation according to the optical path difference; wherein, the optical path difference and the displacement have a one-to-one corresponding comparison relationship in the optical path difference-displacement comparison table or function relationship.
2. The optical interferometry principle-based bearing vibration measurement device of claim 1, wherein the bearing vibration measurement device further comprises:
and the optical isolator is arranged between the laser (2) and the spectroscope (3) and is used for allowing the laser beam to pass through and preventing the light beam on one side of the spectroscope (3) from returning to the laser (2).
3. The optical interferometry principle-based bearing vibration measurement device according to claim 2, wherein the optical isolator comprises a polarizer (6) and a wave plate (7); the polarizer (6) and the wave plate (7) are both positioned on the motion path of the laser beam, and the polarizer (6) is arranged between the laser (2) and the wave plate (7).
4. The optical interferometry principle-based bearing vibration measurement device of claim 1, wherein the bearing vibration measurement device further comprises:
and the three front lenses (8) are respectively arranged between the spectroscope (3) and the bearing (1) to be measured, the first reflector (4) and the charge coupled device (5).
5. The optical interference principle-based bearing vibration measuring device according to claim 1, wherein the signal processing system comprises a filter amplifying module, an AD converter, a threshold comparator, a direction-judging counter and a processor; the filtering and amplifying module is used for filtering and amplifying the electronic information, and inputting a filtering and amplifying signal into the AD converter for conversion after the filtering and amplifying signal is processed by the threshold comparator and the direction judging counter so as to obtain a digital signal; the processor calculates the displacement according to the digital signal.
6. The optical interferometry principle-based bearing vibration measurement device of claim 1, wherein the bearing vibration measurement device comprises:
a test platform (10); the laser (2), the spectroscope (3), the first reflector (4) and the charge coupled device (5) are all arranged on the test platform (10); and
the bearing driving and positioning mechanism comprises a motor (11) and a mounting frame (12); the mounting rack (12) is mounted on the test platform (10) and used for positioning the bearing (1) to be tested; the motor (11) is arranged on the test platform (10), and the output shaft is sleeved with the inner ring of the bearing (1) to be tested.
7. The optical interferometry principle-based bearing vibration measurement device of claim 6, wherein the bearing vibration measurement device further comprises:
and the second reflecting mirror (9) is arranged on the mounting frame (12), does not cover the bearing (1) to be measured, and is used for reflecting the transmission light beam to the spectroscope (3).
8. The optical interferometry principle-based bearing vibration measurement device of claim 6, wherein the bearing vibration measurement device comprises:
and the display screen (13) is arranged on the test platform (10) and is used for displaying the interference fringes and the displacement.
9. The optical interference principle-based bearing vibration measuring apparatus according to claim 3, wherein the laser (2) is a He-Ne laser light source, and the wave plate (7) is an 1/4 wave plate.
10. A bearing vibration measuring method based on the optical interference principle, which is applied to the bearing vibration measuring device based on the optical interference principle according to any one of claims 1 to 9, characterized in that the method comprises the following steps:
(a) emitting laser beams to a bearing (1) to be measured;
(b) the laser beam is divided into a reflected beam and a transmitted beam by a retro-spectroscope (3), and the transmitted beam is transmitted to a bearing (1) to be measured;
(c) reflecting the reflected light beam back to a beam splitter (3); after moving to the bearing (1) to be detected, the transmitted light beam changes the optical path length and is reflected back to the spectroscope (3) by the vibration displacement of the bearing (1) to be detected, and interferes with the reflected light beam reflected back to the spectroscope (3) to generate interference fringes;
(d) capturing the interference fringes and converting the interference fringes into corresponding electronic information;
(e) firstly, according to the electronic information, taking the constant optical path length of the reflected light beam as a reference optical path to calculate the optical path difference generated by the transmitted light beam on the bearing (1) to be measured, and then according to the optical path difference, calculating the displacement of the mechanical vibration of the bearing (1) to be measured through a preset optical path difference-displacement comparison table or function relation; wherein, the optical path difference and the displacement have a one-to-one corresponding comparison relationship in the optical path difference-displacement comparison table or function relationship.
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Application publication date: 20200612 |