CN111256959A - Method for measuring focal length of lens based on calculation holography - Google Patents
Method for measuring focal length of lens based on calculation holography Download PDFInfo
- Publication number
- CN111256959A CN111256959A CN202010172017.0A CN202010172017A CN111256959A CN 111256959 A CN111256959 A CN 111256959A CN 202010172017 A CN202010172017 A CN 202010172017A CN 111256959 A CN111256959 A CN 111256959A
- Authority
- CN
- China
- Prior art keywords
- lens
- cgh
- focal length
- measuring
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
Abstract
The invention discloses a method for measuring the focal length of a lens based on calculation of holography, which comprises the following steps: the design of the CGH is that the radius parameters of all ring belts of the CGH are obtained according to the curvature radius and the center thickness of the front surface and the rear surface of the lens, the material of the lens and the distance between the lens and the CGH, and the CGH is manufactured; acquiring background wave front, measuring the 0-level wave front of the CGH for multiple times by adopting a plane interferometer, and averaging to obtain the background wave front; acquiring the distance between the lens and the CGH, measuring the wave front of the lens for multiple times by adopting a plane interferometer, measuring the distance between the lens and the CGH at the same time, subtracting the background wave front from each transmitted wave front, and calculating the defocusing amount-distance relation to obtain the optimal distance; and obtaining the focal length of the lens, measuring the 1-grade curvature radius of the CGH, and obtaining the focal length of the lens according to the 1-grade curvature radius of the CGH and the distance between the lens and the CGH. The invention realizes the high-precision detection of the focal length of the telephoto lens, shortens the length of the whole detection light path and improves the environmental interference resistance.
Description
Technical Field
The invention belongs to the technical field of lens focal length detection, and particularly relates to a method for measuring a lens focal length based on calculation holography.
Background
With the development of the fields of aviation, aerospace, astronomy and the like, the requirements on the quality and precision of an optical system are increased, and the accurate measurement of the focal length of an optical lens is more and more important for ensuring the imaging quality of the optical system. The large-caliber long-focus lens is widely applied to inertial confinement fusion, astronomical detection systems and other national large-scale optical devices. The focal length is an important index of the element, and the mismatch of the focal length and the design directly influences the beam quality and the imaging quality.
The existing optical lens focal length testing method mainly comprises a knife edge method, a Hartmann method, a Mohr deflection method, a combined lens method and a laser differential confocal method. The knife edge method and the Hartmann method require longer space, and the result is greatly influenced by the subjectivity of a detector; the moire deflection method adopts a moire fringe interpretation mode, is obviously influenced by the environment and is difficult to trace to the source; although the combined lens method greatly shortens the length of a detection light path, the problem of poor inherent anti-interference capability of the interference method still cannot be solved, and the distance between the measured mirror and the standard mirror as a key parameter cannot be accurately measured.
Therefore, how to provide a method for measuring the focal length of a lens with high precision is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides a method for measuring the focal length of a lens based on a computer-generated hologram, which realizes high-precision detection of the focal length of a telephoto lens, shortens the length of an overall detection optical path, and improves the environmental interference resistance.
In order to achieve the purpose, the invention adopts the following technical scheme:
a method for measuring the focal length of a lens based on calculation holography comprises the following steps:
1) the design of the CGH is that each ring belt radius parameter of the CGH is obtained according to the curvature radius of the front surface and the rear surface of the tested lens, the center thickness, the material of the lens and the distance between the tested lens and the CGH, so that the CGH is manufactured;
2) acquiring background wave front, measuring the 0-level wave front of the CGH for multiple times by adopting a plane interferometer, and averaging to obtain the background wave front;
3) obtaining the distance between the lens to be measured and the CGH, adopting a plane interferometer, placing the lens to be measured between a standard plane mirror of the plane interferometer and the CGH, measuring the wave front of the lens for multiple times, simultaneously measuring the distance between the lens and the CGH, subtracting the background wave front from each transmitted wave front, calculating the relation between defocus and the distance, and obtaining the optimal distance by using least square fitting;
4) and obtaining the focal length of the lens, namely measuring the 1-level curvature radius of the CGH by adopting a spherical interferometer, and then obtaining the focal length of the measured lens according to the curvature radius of the CGH and the distance between the measured lens and the CGH.
Preferably, the curvature radius of the first order diffraction is designed according to the focal length of the lens to be detected; the phase distribution of the CGH is calculated according to the fermat aplanatic principle.
Preferably, the specific method for producing the CGH includes:
the optical paths of the parallel light emitted from the plane interferometer passing through the lens to be detected and all the light rays of the CGH are equal, namely that
n0|PQ|+n1|QM|+n0|MN|+φ(r)＝n0d1+n1d2+n0d3＝C (1)
Where C is a constant, φ (r) is the optical path difference represented by the CGH compensated phase, | PQ | is the optical path between P and Q points, | QM | is the optical path between Q and M points, | MN | is the optical path between M and N points, N0Is the refractive index of air, n1Is the refractive index of the lens, d1Distance of standard flat mirror to lens of plane interferometer, d2Is the thickness of the lens, d3Distance to the CGH for the lens back surface; thus, can obtain
φ(r)＝n0d1+n1d2+n0d3-(n0|PQ|+n1|QM|+n0|MN|) (2)
And calculating the radius parameters of all ring bands of the CGH according to the curvature radius of the front surface and the rear surface of the lens to be measured, the center thickness, the material of the lens and the distance between the lens to be measured and the CGH, so that the CGH is manufactured by using a laser direct writing or ion beam etching method.
Preferably, when the collimated parallel light output by the CGH and the plane interferometer passes through a standard plane mirror at the end part of the plane interferometer, part of the collimated parallel light is reflected by the standard plane mirror to form a standard reference beam, the other part of the collimated parallel light sequentially passes through the standard plane mirror and a measured lens, is reflected by the CGH and returns along the original path to form a test beam, and the test beam and the standard reference beam generate interference fringes; and adjusting the relative position and posture between the measured lens and the CGH to obtain a group of transmission wavefront images with different defocusing amounts, thereby obtaining the transmission wavefront.
Preferably, the lens to be measured is placed on the five-dimensional adjusting frame, the CGH is placed on the two-dimensional adjusting frame, and the relative position and posture between the lens to be measured and the CGH are adjusted.
Preferably, the positions of the cat eye and the confocal point are accurately determined through interference fringe interpretation of the spherical interferometer, and the distance between the two points is measured to obtain the curvature radius.
Preferably, the CGH designed for detecting transmitted wavefronts uses high diffraction order light when the radius of curvature is calibrated.
Preferably, the measured distance between the cat eye and the common-focus point is the curvature radius Rn of the n-order diffraction order of the CGH; a 1-order radius of curvature R of nRn; the focal length f of the measured long-focus lens and the 1-order curvature radius R of the CGH satisfy the relation: r + τ, where τ is the spacing between the CGH and the lens.
The invention has the beneficial effects that:
in the detection device, the plane interferometer, the measured lens and the CGH are all arranged on the same vibration isolation platform to form a common optical axis detection system, and the CGH can compensate the aberration of the measured lens, so that other auxiliary elements such as a compensating mirror and the like do not need to be introduced into the detection device, a simple, convenient and accurate method is provided for the measurement of the transmission wavefront of the lens, the detection method is simple and easy to operate, and the detection precision of the transmission wavefront detection of the long-focus lens by adopting the detection method is higher.
CGH is equivalent to convex surface speculum, its centre of curvature with by range finding lens focus coincidence, curvature radius R satisfies relation f for R + tau with focus f, make no matter how big is the focus f of measured lens, can make the interval detect the light path be less than 1 meter through rational design CGH, the at utmost reduces the air current, the influence of environmental disturbance such as vibration, improve and detect the precision, can realize the high accuracy detection of telephoto lens focus, whole detection light path length has been shortened, the ability of anti-environmental interference has been promoted.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram of the CGH of the present invention.
FIG. 2 is a diagram of a background wavefront optical path for measuring CGH according to the present invention.
FIG. 3 is a schematic diagram illustrating the principle of measuring the transmission focal length of a lens according to the present invention.
FIG. 4 is a schematic diagram of an error detection optical path of a CGH substrate according to the present invention.
Wherein, in the figure,
1-CGH; 2-a lens; 3-a planar interferometer; 4-spherical interferometer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a method for measuring the focal length of a lens based on calculation holography, which comprises the following steps:
1) design of CGH1
Designing a first-order diffraction curvature radius (equivalent to the focal length) according to the focal length of the lens 2 to be detected, wherein the lens 2 to be detected adopts a long-focus lens, so that the length of an interference cavity is shortened to be suitable for detection operation; next, the phase distribution of CGH1 was calculated according to the fermat aplanatic principle. As shown in FIG. 1, the optical paths of all the parallel light rays which are emitted from the plane interferometer 3 and pass through the lens 2 to be measured and the CGH1 are equal, namely, the optical paths are
n0|PQ|+n1|QM|+n0|MN|+φ(r)＝n0d1+n1d2+n0d3＝C (1)
Where C is a constant, φ (r) is the optical path difference represented by the phase compensated by CGH1, | PQ | is the optical path between P and Q points, | QM | is the optical path between Q and M points, | MN | is the optical path between M and N points, N0Is the refractive index of air, n1Is the refractive index of the lens 2, d1Distance d from standard plane mirror of plane interferometer 3 to lens 22Thickness of the lens 2, d3Distance from the rear surface of lens 2 to CGH 1; thus, can obtain
φ(r)＝n0d1+n1d2+n0d3-(n0|PQ|+n1|QM|+n0|MN|) (2)
According to the curvature radius of the front surface and the rear surface of the lens 2 to be measured, the center thickness, the material of the lens and the distance between the lens 2 to be measured and the CGH1, the radius parameters of all ring zones of the CGH1 are calculated by using optical design software, and therefore the CGH1 is manufactured by using methods such as laser direct writing or ion beam etching. The principle of determination of the spacing of the rear surface of the lens 2 from the CGH1 is: the length of the interference cavity is suitable for operation, the element safety can be ensured, and the optical path aberration can be optimally compensated.
2) Background wavefront acquisition
As shown in fig. 2, the 0-order wavefront of the CGH was measured multiple times using a planar interferometer, and this wavefront was indicative of the flatness of the substrate of CGH1, and the average was taken as the background wavefront.
3) Acquisition of distance between lens 2 to be measured and CGH1
Referring to fig. 3, when the collimated parallel light output by the CGH1 and the planar interferometer 3 passes through the standard plane mirror at the end of the interferometer, a part of the collimated parallel light is reflected by the standard plane mirror to form a standard reference beam, and the other part of the collimated parallel light passes through the standard plane mirror and the measured long-focus lens in sequence, is reflected by the CGH1 and returns along the original path to form a test beam, and the test beam and the standard reference beam generate interference fringes. And adjusting the relative position and posture between the measured lens 2 and the CGH1 to obtain a group of transmission wavefront images with different defocusing amounts, thereby obtaining the transmission wavefront.
The measured long focal length lens is placed on the five-dimensional adjusting frame, the CGH1 is placed on the two-dimensional adjusting frame, and the relative position and posture between the measured lens and the CGH1 are adjusted.
And subtracting the difference of background wave fronts from each transmission wave front measured for multiple times, calculating the defocusing amount-distance relation, and fitting by using a least square method to obtain the optimal distance.
4) Lens 2 focal length acquisition
As shown in fig. 4, using the spherical interferometer 4, the positions of the cat eye and the confocal two points (i.e. the 0-stripe position) are accurately determined by interference fringe interpretation, and the distance between the two points is measured to obtain the radius of curvature of the CGH 1. The CGH1 designed for detecting the long-focus transmission wavefront adopts high-diffraction-order secondary light when the curvature radius is calibrated, so that the optical path can be effectively shortened, the detection difficulty is reduced, and the detection precision is improved.
The choice of the high diffraction order n should follow two principles: (1) the measuring light path is as short as possible: (2) diffraction efficiency is sufficient and effective interference can occur. The distance between the cat eye position and the 0-stripe position measured at this time is the curvature radius Rn of the n-th diffraction order of CGH1, and the 1-th order curvature radius R is nRn.
The focal length f of the measured long-focus lens and the 1-order curvature radius R of the CGH1 satisfy the relation: r + τ where τ is the separation between CGH1 and lens 2.
Wherein, the measurement of each distance can adopt high-precision measurement equipment such as a grating ruler or a mirror surface locator.
In the detection device, the plane interferometer, the measured lens and the CGH are all arranged on the same vibration isolation platform to form a common-optical-axis detection system, and the CGH can compensate the aberration of the measured lens, so that other auxiliary elements such as a compensating mirror and the like do not need to be introduced into the detection device, a simple, convenient and accurate method is provided for measuring the transmitted wavefront from the lens, the detection method is simple and easy to operate, and the detection precision of the transmitted wavefront detection of the long-focus lens by adopting the detection method is higher; according to the parameters such as the focal length and the aberration of the lens to be measured, the aberration designed by the theory of compensation is reasonably designed, so that the reference beam is accurately matched with the wavefront of the lens to be measured, and the accuracy of focal length measurement is further improved; by deducting the background wave front, the precision and the repeatability of the focal length measurement are further improved.
CGH is equivalent to convex surface reflector, its centre of curvature with by range finding lens focus coincidence, curvature radius R satisfies relation f for R + tau with focus f, make no matter how big the focus f of measured lens is, can make the interval detection light path be less than 1 meter through rational design CGH, furthest reduces the influence of environmental disturbance such as air current, vibration, improve and detect the precision, can realize the high accuracy detection of telephoto lens focus, whole detection optical path length has been shortened, environmental disturbance resistance has been promoted, to long focus lens focus detection, can avoid measuring the optical path length, environmental vibration leads to the difficult point that transmission wavefront measurement accuracy is low.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. A method for measuring the focal length of a lens based on calculation holography is characterized by comprising the following steps:
1) the design of the CGH is that each ring belt radius parameter of the CGH is obtained according to the curvature radius of the front surface and the rear surface of the tested lens, the center thickness, the material of the lens and the distance between the tested lens and the CGH, so that the CGH is manufactured;
2) acquiring background wave front, measuring the 0-level wave front of the CGH for multiple times by adopting a plane interferometer, and averaging to obtain the background wave front;
3) obtaining the distance between the lens to be measured and the CGH, adopting a plane interferometer, placing the lens to be measured between a standard plane mirror of the plane interferometer and the CGH, measuring the wave front of the lens for multiple times, simultaneously measuring the distance between the lens and the CGH, subtracting the background wave front from each transmitted wave front, calculating the relation between defocus and the distance, and obtaining the optimal distance by using least square fitting;
4) and obtaining the focal length of the lens, namely measuring the 1-level curvature radius of the CGH by adopting a spherical interferometer, and then obtaining the focal length of the measured lens according to the curvature radius of the CGH and the distance between the measured lens and the CGH.
2. The method for measuring the focal length of the lens based on the computer generated hologram according to claim 1, wherein the radius of curvature of the first order diffraction is designed according to the focal length of the lens to be measured; the phase distribution of the CGH is calculated according to the fermat aplanatic principle.
3. The method for measuring the focal length of a lens based on computer generated holography according to claim 2, wherein the specific method for making the CGH comprises:
the optical paths of the parallel light emitted from the plane interferometer passing through the lens to be detected and all the light rays of the CGH are equal, namely that
n0|PQ|+n1|QM|+n0|MN|+φ(r)＝n0d1+n1d2+n0d3＝C (1)
Wherein C is normalNumber phi (r) is the optical path difference represented by the CGH compensated phase, | PQ | is the optical path between P point and Q point, | QM | is the optical path between Q point and M point, | MN | is the optical path between M point and N point, N0Is the refractive index of air, n1Is the refractive index of the lens, d1Distance of standard flat mirror to lens of plane interferometer, d2Is the thickness of the lens, d3Distance to the CGH for the lens back surface; thus, can obtain
φ(r)＝n0d1+n1d2+n0d3-(n0|PQ|+n1|QM|+n0|MN|) (2)
And calculating the radius parameters of all ring bands of the CGH according to the curvature radius of the front surface and the rear surface of the lens to be measured, the center thickness, the material of the lens and the distance between the lens to be measured and the CGH, so that the CGH is manufactured by using a laser direct writing or ion beam etching method.
4. The method for measuring the focal length of the lens based on the computer generated hologram according to claim 1, wherein when the collimated parallel light outputted from the CGH and the plane interferometer passes through the standard plane mirror at the end of the plane interferometer, a part of the collimated parallel light is reflected by the standard plane mirror to form a standard reference beam, and another part of the collimated parallel light passes through the standard plane mirror and the lens to be measured in sequence, is reflected by the CGH and returns along the original path to form a test beam, and the test beam and the standard reference beam generate interference fringes; and adjusting the relative position and posture between the measured lens and the CGH to obtain a group of transmission wavefront images with different defocusing amounts, thereby obtaining the transmission wavefront.
5. The method for holographically measuring the focal length of the lens based on the calculation as claimed in claim 4, wherein the lens to be measured is placed on a five-dimensional adjusting frame, the CGH is placed on a two-dimensional adjusting frame, and the relative position and the posture between the lens to be measured and the CGH are adjusted.
6. The method for measuring the focal length of the lens based on the computer generated hologram as claimed in claim 1 or 5, wherein the positions of the cat eye and the confocal point are precisely determined by the interference fringe interpretation of the spherical interferometer, and the distance between the two points is measured to obtain the radius of curvature of the CGH.
7. The method for holographically measuring lens focal length based on calculation of claim 6, wherein the CGH designed for detecting transmitted wavefront, when the curvature radius is calibrated, the high diffraction order secondary light is used.
8. The method for measuring the focal length of the lens based on the computer generated hologram according to claim 7, wherein the measured distance between the cat eye and the confocal point is the curvature radius Rn of the n-th diffraction order of the CGH; a 1-order radius of curvature R of nRn; the focal length f of the measured long-focus lens and the 1-order rate radius R of the CGH satisfy the relation: r + τ, where τ is the spacing between the CGH and the lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010172017.0A CN111256959B (en) | 2020-03-12 | 2020-03-12 | Method for measuring focal length of lens based on calculation holography |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010172017.0A CN111256959B (en) | 2020-03-12 | 2020-03-12 | Method for measuring focal length of lens based on calculation holography |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111256959A true CN111256959A (en) | 2020-06-09 |
| CN111256959B CN111256959B (en) | 2022-02-11 |
Family
ID=70954789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010172017.0A Active CN111256959B (en) | 2020-03-12 | 2020-03-12 | Method for measuring focal length of lens based on calculation holography |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111256959B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6195159B1 (en) * | 1998-12-30 | 2001-02-27 | Agfa Corporation | Lens testing system |
| CN101852676A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Method and device for multifocal holographic differential confocal super-long focus measurement |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
| CN104298103A (en) * | 2014-10-28 | 2015-01-21 | 四川大学 | Color computational holography aberration compensation system and method based on varifocus lens |
| CN106441816A (en) * | 2016-10-27 | 2017-02-22 | 中国工程物理研究院激光聚变研究中心 | Detection device and detection method for measuring long-focal-length lens transmission wavefront by computer-generated holography |
| CN107024849A (en) * | 2017-05-02 | 2017-08-08 | 四川大学 | A kind of colored holography veiling glare that calculates based on digital lens eliminates system and method |
| CN109297683A (en) * | 2018-10-11 | 2019-02-01 | 广州博冠光电科技股份有限公司 | It is a kind of quickly to detect the inclined device and method in lens centre based on Digital Laser Hologram |
-
2020
- 2020-03-12 CN CN202010172017.0A patent/CN111256959B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6195159B1 (en) * | 1998-12-30 | 2001-02-27 | Agfa Corporation | Lens testing system |
| CN101852676A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Method and device for multifocal holographic differential confocal super-long focus measurement |
| CN102374851A (en) * | 2011-09-22 | 2012-03-14 | 西安工业大学 | Real-time partial zero compensation optical aspheric surface profile detection method |
| CN104298103A (en) * | 2014-10-28 | 2015-01-21 | 四川大学 | Color computational holography aberration compensation system and method based on varifocus lens |
| CN106441816A (en) * | 2016-10-27 | 2017-02-22 | 中国工程物理研究院激光聚变研究中心 | Detection device and detection method for measuring long-focal-length lens transmission wavefront by computer-generated holography |
| CN107024849A (en) * | 2017-05-02 | 2017-08-08 | 四川大学 | A kind of colored holography veiling glare that calculates based on digital lens eliminates system and method |
| CN109297683A (en) * | 2018-10-11 | 2019-02-01 | 广州博冠光电科技股份有限公司 | It is a kind of quickly to detect the inclined device and method in lens centre based on Digital Laser Hologram |
Non-Patent Citations (3)
| Title |
|---|
| 严杰文: "光学球面曲率半径测量方法比较", 《计量与测试技术》 * |
| 岳巾英等: "计算全息法测量长焦透镜面形和焦距", 《中国光学与应用光学》 * |
| 魏小红等: "用计算全息法测量长焦透镜的透射波前", 《光学 精密工程》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111256959B (en) | 2022-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108061639B (en) | A kind of Larger Dynamic range of combining adaptive optical technology, high-precision phase position difference method wavefront measurement instrument | |
| US20030184762A1 (en) | Apparatus for and method of measurement of aspheric surfaces using hologram and concave surface | |
| CN107782254B (en) | A kind of mixed compensating mode sub-aperture stitching surface testing method | |
| CN105806479B (en) | Laser far field focal spot Dynamic High-accuracy diagnostic device and diagnostic method | |
| CN106441816B (en) | Calculate detection device and detection method that holography method measures long-focus lens transmission wavefront | |
| US10627222B2 (en) | Method and apparatus for detecting cylinder and cylindrical converging lens | |
| CN104142129A (en) | Off-axis three-mirror aspheric system convex aspheric secondary mirror surface shape splicing detection method | |
| CN103471521B (en) | The real-time detection method of optical aspherical surface fast and accurately | |
| CN111999042B (en) | Method for detecting any wavelength transmission wavefront of optical system | |
| CN110057543A (en) | Based on the wavefront measurement device coaxially interfered | |
| CN103528539A (en) | Nonzero-digit interference system based on point source array | |
| EP0549516B1 (en) | Method and apparatus for measuring optical properties of optical devices | |
| CN105784129A (en) | Low-frequency heterodyne ineterferometer used for laser wavefront detection | |
| CN215416129U (en) | Assembly and debugging test system for CGH compensator and off-axis three-lens reflex camera | |
| CN115166932A (en) | Optical axis adjusting method of large-caliber long-focus-distance axial optical system | |
| CN102393565B (en) | Reflecting type inverse compensator | |
| CN112902875B (en) | Aspheric reflector curvature radius detection device and method | |
| CN111256959B (en) | Method for measuring focal length of lens based on calculation holography | |
| CN102073122B (en) | Concentric assembly method for concentric optical element in off-axis concentric optical system | |
| CN110631510B (en) | High-precision angle measuring device and method based on Michelson structure | |
| CN103278105A (en) | Axicon surface shape and cone angle detection method | |
| CN111256956A (en) | Wavefront measuring apparatus and wavefront measuring method | |
| CN102927930A (en) | Method for detecting ultra-large-diameter reflector surface errors in splicing mode by adopting collimator | |
| CN113702002B (en) | Off-axis three-lens camera debugging test method and system based on CGH compensator | |
| CN206161284U (en) | Detection apparatus for it measures before long focus lens penetrated wave to calculate holography method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |