CN111254389A

CN111254389A - Calibration device for vacuum sputtering coating mask plate of quartz crystal oscillator

Info

Publication number: CN111254389A
Application number: CN202010284748.4A
Authority: CN
Inventors: 柯学
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-04-13
Filing date: 2020-04-13
Publication date: 2020-06-09

Abstract

The invention discloses a calibrating device of a vacuum sputtering coating mask plate of a quartz crystal oscillator, which comprises a base, wherein four corners at the lower end of the base are fixedly connected with support legs, the front surface of the base is provided with a first sliding groove, the upper end and the lower end of the interior of the first sliding groove are provided with limit grooves, the interior of the first sliding groove is connected with a first sliding block in a sliding manner, the upper end and the lower end of the first sliding block are fixedly connected with limit plates, the limit plates are all connected in the limit grooves at the same side in a sliding manner, and the front surface of the first sliding block is provided with a calibrating mechanism. Simultaneously, the corners of the two mask plates are aligned, so that the mask plate is convenient to use.

Description

Calibration device for vacuum sputtering coating mask plate of quartz crystal oscillator

Technical Field

The invention relates to a calibrating device, in particular to a calibrating device for a vacuum sputtering coating mask plate of a quartz crystal oscillator, and belongs to the technical field of calibrating mechanisms.

Background

The quartz crystal oscillator is an oscillator with high precision and high stability, and is widely applied to remote communication, satellite communication, mobile phone systems, global positioning systems, navigation, remote control, aerospace, high-speed computers, precision measuring instruments and consumer civil electronic products. Because of its high frequency stability, it has always occupied an important position in the field of electronic technology, quartz wafer is one of the important components of quartz crystal oscillator, and when the quartz wafer is vacuum sputtering coated, it needs to align and fix two mask plates used in production.

At present, when aligning the mask plate of production quartz wafer, the staff is mostly direct with two mask plate stacks together, then aligns the corner of two mask plates, aims at the in-process, need constantly push the corner of two mask plates, and this mode leads to other corresponding corners of two mask plates to appear the off normal easily, needs realign, and is comparatively troublesome.

Disclosure of Invention

The invention provides a calibration device for a vacuum sputtering coating mask plate of a quartz crystal oscillator, which effectively solves the problems that at present, when workers aim at the mask plate for producing a quartz crystal wafer, the two mask plates are mostly directly overlapped together, then the corners of the two mask plates are aligned, and the corners of the two mask plates need to be continuously extruded in the alignment process, so that the other corresponding corners of the two mask plates are easy to deviate due to the mode, and the two mask plates need to be realigned, and are troublesome.

In order to solve the technical problems, the invention provides the following technical scheme:

the invention relates to a calibrating device for a vacuum sputtering coating mask plate of a quartz crystal oscillator, which comprises a base, wherein supporting legs are fixedly connected to four corners of the lower end of the base, a first sliding groove is formed in the front surface of the base, limiting grooves are formed in the upper end and the lower end of the interior of the first sliding groove, a first sliding block is connected to the interior of the first sliding groove in a sliding manner, limiting plates are fixedly connected to the upper end and the lower end of the first sliding block, the two limiting plates are respectively connected to the interior of the two limiting grooves in a sliding manner, a calibrating mechanism is installed on the front surface of the first sliding block, an adjusting screw rod is connected to the interior of the first sliding block in a penetrating manner and threaded manner, a clamping mechanism is installed on the rear side of the upper end of the base, guide grooves are formed in the left side and the right side of the upper end, the middle part of diaphragm is run through and is seted up the second and lead to the groove, the internally mounted that the second led to the groove has pushing down the mechanism.

As a preferred technical scheme of the invention, the calibration mechanism comprises two pushing plates, the two pushing plates are both in a U-shaped structure, the upper end and the lower end of the interior of the two pushing plates are respectively contacted with the upper end and the lower end of the base, the front surfaces of the two pushing plates are fixedly connected through a connecting plate, a screw hole is arranged in the middle of the connecting plate in a penetrating way, two positioning holes are symmetrically arranged on the connecting plate at the two sides of the screw hole in a penetrating way, the inner part of the screw hole is penetrated and connected with a first screw rod in a threaded manner, one end of the first screw rod close to the base is rotatably connected with an installation plate, one side fixed connection that the mounting panel is close to the base is in the front of first slider, the first hand wheel of one end fixedly connected with of base, two is kept away from to first screw rod the slurcam is located fixedly connected with calibration plate between the rear end of base top, the lower extreme of calibration plate and the upper end of base contact.

As a preferable technical scheme of the invention, the left end and the right end of one side of the mounting plate, which is far away from the base, are fixedly connected with the positioning rods, and one ends of the two positioning rods, which are far away from the mounting plate, respectively penetrate through and are connected in the two positioning holes in a sliding manner.

As a preferable technical solution of the present invention, the clamping mechanism includes a fixed plate, the fixed plate is fixedly connected to the rear side of the upper end of the base, the left side of the front surface of the fixed plate is fixedly connected with a first clamping plate, the inside of the fixed plate is provided with a second sliding groove, the front surface of the second sliding groove is provided with a first through groove in a penetrating manner, the inside of the second sliding groove is connected with a second sliding block in a sliding manner, the front surface of the second sliding block is fixedly connected with a moving block, the moving block is connected in the first through groove in a sliding manner, the front surface of the moving block is fixedly connected with a second clamping plate, the inside of the second sliding block is connected with a second screw rod in a penetrating and threaded manner, one end of the second screw rod is rotatably connected to the inner wall of the left side of the second sliding groove, the other end of the second screw rod passes through the inner wall of, and one end of the second screw rod, which is positioned outside the fixing plate, is fixedly connected with a second hand wheel.

As a preferable technical solution of the present invention, the first splint and the second splint are both L-shaped and symmetrically disposed.

According to a preferable technical scheme of the invention, the pressing mechanism comprises a sliding plate, the sliding plate is slidably connected inside the second through groove, the middle part of the sliding plate penetrates through the sliding plate and is in threaded connection with a third screw rod, the upper end of the third screw rod is fixedly connected with a third hand wheel, the lower end of the third screw rod is rotatably connected with a hanging plate, the left side and the right side of the lower end of the hanging plate are both fixedly connected with supporting rods, and the lower ends of the two supporting rods are jointly and fixedly connected with a level gauge.

As a preferable technical scheme of the invention, springs are fixedly connected to the upper end of the hanging plate and two sides of the third screw rod, and the upper ends of the springs are fixedly connected to the lower surface of the sliding plate.

As a preferable technical scheme of the invention, one end of the adjusting screw rod is rotatably connected to the left inner wall of the first chute, the other end of the adjusting screw rod penetrates through the right inner wall of the first chute and extends to the outside of the base, the other end of the adjusting screw rod is rotatably connected with the base through a second bearing, and one end of the adjusting screw rod, which is positioned outside the base, is fixedly connected with an adjusting hand wheel.

The invention has the following beneficial effects:

1. the invention relates to a calibrating device, wherein a calibrating mechanism and a clamping mechanism are arranged on a base, when the calibrating device is used, two corresponding corners of two mask plates can be clamped by a first clamping plate and a second clamping plate of the clamping mechanism, then one side of the two mask plates, which is far away from a fixed plate, is extruded by the calibrating plate of the calibrating mechanism, the two mask plates are clamped on the base, and the corners of the two mask plates are aligned, so that the calibrating device is more convenient.

2. The base is provided with the pressing mechanism, so that a level gauge of the pressing mechanism can be pressed on the two mask plates during use, the mask plates above are prevented from tilting, and meanwhile, whether the mask plates above are parallel to the mask plates below can be known by observing the level gauge, so that the two mask plates can be conveniently aligned.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a top view of the present invention;

FIG. 2 is a view of the area at A in FIG. 1;

FIG. 3 is a front view of the present invention;

FIG. 4 is a schematic structural view of a connecting plate of the present invention;

fig. 5 is a schematic structural view of the depressing mechanism of the present invention.

In the figure: 1. a base; 2. a support leg; 3. a first chute; 4. a limiting groove; 5. a first slider; 6. a calibration mechanism; 61. a push plate; 62. a connecting plate; 63. a screw hole; 64. a first screw; 65. mounting a plate; 66. positioning holes; 67. positioning a rod; 68. a first hand wheel; 69. a calibration plate; 7. a clamping mechanism; 71. a fixing plate; 72. a first splint; 73. a second slider; 74. a second screw; 75. a second hand wheel; 76. a first through groove; 77. a moving block; 78. a second splint; 79. a first bearing; 710. a second chute; 8. a pressing mechanism; 81. a slide plate; 82. a third screw; 83. a third hand wheel; 84. a hanger plate; 85. a strut; 86. a level gauge; 87. a spring; 9. a guide groove; 10. a support plate; 11. a transverse plate; 12. a second through groove; 13. adjusting the screw rod; 14. a limiting plate; 15. a second bearing; 16. and adjusting a hand wheel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example (b): as shown in fig. 1-5, the calibration device for a vacuum sputtering coating mask plate of a quartz crystal oscillator of the invention comprises a base 1, wherein four corners of the lower end of the base 1 are fixedly connected with support legs 2, the front surface of the base 1 is provided with a first sliding groove 3, the upper and lower ends of the interior of the first sliding groove 3 are provided with limiting grooves 4, the interior of the first sliding groove 3 is connected with a first sliding block 5 in a sliding manner, the upper and lower ends of the first sliding block 5 are fixedly connected with limiting plates 14, the two limiting plates 14 are respectively connected with the interior of the two limiting grooves 4 in a sliding manner, the front surface of the first sliding block 5 is provided with a calibration mechanism 6, the interior of the first sliding block 5 is connected with an adjusting screw 13 in a penetrating and threaded manner, one end of the adjusting screw 13 is rotatably connected with the left inner wall of the first sliding groove 3, the other end of the adjusting screw 13 penetrates through the right inner wall of, the other end of the adjusting screw 13 is rotatably connected with the base 1 through a second bearing 15, one end of the adjusting screw 13, which is positioned outside the base 1, is fixedly connected with an adjusting hand wheel 16, a clamping mechanism 7 is arranged at the rear side of the upper end of the base 1, guide grooves 9 are arranged at the left side and the right side of the upper end of the base 1, the inner parts of the guide grooves 9 are both connected with support plates 10 in a sliding way, the upper ends of the two support plates 10 are fixedly connected with a transverse plate 11, a second through groove 12 is formed in the middle of the transverse plate 11 in a penetrating manner, a pressing mechanism 8 is arranged inside the second through groove 12, the two mask plates are clamped on the base 1 by utilizing the clamping mechanism 7 and the calibration mechanism 6, simultaneously, the corners of the two mask plates are aligned, and the two mask plates are pressed by the pressing mechanism 8, so that the mask plates above the mask plates are prevented from being tilted to influence the alignment work of the two mask plates.

The clamping mechanism 7 comprises a fixed plate 71, the fixed plate 71 is fixedly connected to the rear side of the upper end of the base 1, a first clamping plate 72 is fixedly connected to the left side of the front face of the fixed plate 71, a second sliding groove 710 is formed in the fixed plate 71, a first through groove 76 is formed in the front face of the second sliding groove 710 in a penetrating manner, a second sliding block 73 is connected to the inside of the second sliding groove 710 in a sliding manner, a moving block 77 is fixedly connected to the front face of the second sliding block 73 in a sliding manner, a second clamping plate 78 is fixedly connected to the front face of the moving block 77, a second screw 74 is connected to the inside of the second sliding block 73 in a penetrating manner and threaded manner, one end of the second screw 74 is rotatably connected to the inner wall of the second sliding groove 710 on the left side, and the other end of the second screw 74 passes through the inner wall of the second sliding groove 710 and, the other end of the second screw 74 is rotatably connected with the fixing plate 71 through a first bearing 79, one end of the second screw 74, which is located outside the fixing plate 71, is fixedly connected with a second hand wheel 75, the back surfaces of the two mask plates are clamped by the first clamping plate 72 and the second clamping plate 78, and meanwhile, the corners of the two sides of the two mask plates are aligned.

Wherein, first splint 72 and second splint 78 all are L type structure and are the symmetry setting, are convenient for press from both sides two mask plates on base 1, make things convenient for the alignment of two mask plates.

Wherein, push down mechanism 8 includes slide 81, slide 81 sliding connection is in the inside that groove 12 is led to the second, slide 81's middle part runs through and threaded connection has third screw rod 82, the upper end fixedly connected with third hand wheel 83 of third screw rod 82, the lower extreme of third screw rod 82 rotates and is connected with hanger plate 84, the upper end of hanger plate 84 and the equal fixedly connected with spring 87 in both sides that is located third screw rod 82, the equal fixed connection in lower surface of slide 81 in the upper end of spring 87, the equal fixedly connected with branch 85 in the lower extreme left and right sides of hanger plate 84, two the common fixed connection of lower extreme of branch 85 has spirit level 86, utilizes spirit level 86 to push down two mask plates, prevents the mask plate perk that is located the top.

Wherein, the calibrating mechanism 6 comprises two pushing plates 61, the two pushing plates 61 are both in a U-shaped structure, the upper and lower ends of the interior of the two pushing plates 61 are respectively contacted with the upper and lower ends of the base 1, the front surfaces of the two pushing plates 61 are fixedly connected through a connecting plate 62, a screw hole 63 is formed in the middle of the connecting plate 62 in a penetrating manner, two positioning holes 66 are symmetrically formed in the connecting plate 62 at the two sides of the screw hole 63 in a penetrating manner, a first screw 64 is connected in the screw hole 63 in a penetrating manner and in a threaded manner, a mounting plate 65 is rotatably connected at one end of the first screw 64 close to the base 1, one side of the mounting plate 65 close to the base 1 is fixedly connected to the front surface of the first sliding block 5, a first hand wheel 68 is fixedly connected at one end of the first screw 64 far away from the base 1, and a calibrating plate, the lower extreme of calibration plate 69 and the upper end of base 1 contact, and usable calibration plate 69 supports two mask plates, fixes two mask plates on base 1.

Wherein, the equal fixedly connected with locating lever 67 in both ends about one side that base 1 was kept away from to mounting panel 65, two the one end that mounting panel 65 was kept away from to locating lever 67 runs through respectively and sliding connection is in the inside of two locating holes 66, utilizes two locating levers 67 to fix the movement track of connecting plate 62, and then fixes the movement track of two slurcams 61, rocks on base 1 when preventing two slurcams 61 from moving.

Specifically, when the invention is used, the invention is placed on a workbench, a level 86 can be observed at the same time, whether the base 1 is in a horizontal state or not is known, then two mask plates are placed on the base 1, one aligned corner of the two mask plates is pressed against the first clamping plate 72, then the second screw 74 is rotated through the second hand wheel 75, the second screw 74 drives the second clamping plate 78 to move towards the direction close to the first clamping plate 72 until the second clamping plate 78 is contacted with the two mask plates, then the adjusting screw 13 is rotated through the adjusting hand wheel 16, the adjusting screw 13 is used for moving the calibrating plate 69 to the middle parts of the front faces of the two mask plates, then the first screw 64 is rotated through the first hand wheel 68, the first screw 64 enables the calibrating plate 69 to move towards the direction close to the fixing plate 71 through the connecting plate 62 and the pushing plate 61 until the calibrating plate 69 is contacted with the two mask plates, the back faces of the two mask plates are pressed against the inner parts of the first clamping plate 72 and the second clamping plate 78, rotate second hand wheel 75 again, utilize second splint 78 to fasten two mask plates, then remove diaphragm 11 to the top of two mask plates through backup pad 10, rethread third hand wheel 83 rotates third screw rod 82, third screw rod 82 passes through hanger plate 84 and branch 85 downstream spirit level 86, support the lower extreme of spirit level 86 in the mask plate upper end that lies in the top, push down two mask plates, the staff can observe spirit level 86 simultaneously, observe whether the mask plate that lies in the top perks, avoid the mask plate perk that lies in the top, influence the alignment of two mask plates, if the perk, can continue to rotate third hand wheel 83, push down the mask plate that lies in the top, then link together two mask plates that aim at, and take off from base 1 can.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The calibrating device for the vacuum sputtering coating mask plate of the quartz crystal oscillator comprises a base (1) and is characterized in that supporting legs (2) are fixedly connected to four corners of the lower end of the base (1), a first sliding groove (3) is formed in the front of the base (1), limiting grooves (4) are formed in the upper end and the lower end of the inner portion of the first sliding groove (3), a first sliding block (5) is connected to the inner portion of the first sliding groove (3) in a sliding mode, limiting plates (14) are fixedly connected to the upper end and the lower end of the first sliding block (5), the two limiting plates (14) are connected to the inner portions of the two limiting grooves (4) in a sliding mode respectively, a calibrating mechanism (6) is installed on the front of the first sliding block (5), the inner portion of the first sliding block (5) is connected with an adjusting screw rod (13) in a penetrating mode and in a threaded mode, a clamping mechanism (7), guide way (9) have all been seted up to the upper end left and right sides of base (1), the equal sliding connection in inside of guide way (9) has backup pad (10), two the common fixedly connected with diaphragm (11) in upper end of backup pad (10), the middle part of diaphragm (11) is run through and has been seted up the second and lead to groove (12), the internally mounted that the second led to groove (12) has pushing down mechanism (8).

2. The calibration device of the quartz crystal oscillator vacuum sputtering coating mask plate according to claim 1, wherein the calibration mechanism (6) comprises two pushing plates (61), the two pushing plates (61) are both in a U-shaped structure, the upper and lower ends of the interior of the two pushing plates (61) are respectively contacted with the upper and lower ends of the base (1), the front surfaces of the two pushing plates (61) are fixedly connected through a connecting plate (62), a screw hole (63) is formed in the middle of the connecting plate (62) in a penetrating manner, two positioning holes (66) are symmetrically formed in the connecting plate (62) on the two sides of the screw hole (63) in a penetrating manner, a first screw rod (64) is connected in a penetrating manner inside the screw hole (63) in a threaded manner, a mounting plate (65) is rotatably connected to one end of the first screw rod (64) close to the base (1), one side of the mounting plate (65) close to the base (1) is fixedly connected to the front surface of the first sliding block (, one end of the first screw rod (64) far away from the base (1) is fixedly connected with a first hand wheel (68), the push plate (61) is positioned between the rear ends above the base (1) and is fixedly connected with a calibration plate (69), and the lower end of the calibration plate (69) is in contact with the upper end of the base (1).

3. The calibration device of the quartz crystal oscillator vacuum sputtering coating mask plate according to claim 2, wherein positioning rods (67) are fixedly connected to the left end and the right end of one side of the mounting plate (65) away from the base (1), and one ends of the two positioning rods (67) away from the mounting plate (65) respectively penetrate through and are slidably connected to the insides of the two positioning holes (66).

4. The calibration device of the quartz crystal oscillator vacuum sputtering coating mask plate according to claim 1, wherein the clamping mechanism (7) comprises a fixed plate (71), the fixed plate (71) is fixedly connected to the rear side of the upper end of the base (1), a first clamping plate (72) is fixedly connected to the left side of the front face of the fixed plate (71), a second sliding groove (710) is formed in the fixed plate (71), a first through groove (76) is formed in the front face of the second sliding groove (710) in a penetrating manner, a second sliding block (73) is slidably connected to the inside of the second sliding groove (710), a moving block (77) is fixedly connected to the front face of the second sliding block (73), the moving block (77) is slidably connected to the inside of the first through groove (76), a second clamping plate (78) is fixedly connected to the front face of the moving block (77), a second screw (74) is formed in the inside of the second sliding block (73) in a penetrating manner and in a threaded connection, the one end of second screw rod (74) is rotated and is connected the left side inner wall at second spout (710), the other end of second screw rod (74) passes the right side inner wall of second spout (710) and extends to the outside of fixed plate (71), the other end of second screw rod (74) is passed through first bearing (79) and is connected with fixed plate (71) rotation, second screw rod (74) are located fixed connection of one end fixedly connected with second hand wheel (75) of fixed plate (71) outside.

5. A calibration device for a quartz crystal oscillator vacuum sputtering coating mask plate according to claim 4, characterized in that the first clamping plate (72) and the second clamping plate (78) are both in an L-shaped structure and are symmetrically arranged.

6. The calibration device of the quartz crystal oscillator vacuum sputtering coating mask plate according to claim 1, wherein the pressing mechanism (8) comprises a sliding plate (81), the sliding plate (81) is slidably connected inside the second through groove (12), a third screw (82) penetrates through the middle of the sliding plate (81) and is in threaded connection with the middle of the sliding plate, a third hand wheel (83) is fixedly connected to the upper end of the third screw (82), a hanging plate (84) is rotatably connected to the lower end of the third screw (82), supporting rods (85) are fixedly connected to the left side and the right side of the lower end of the hanging plate (84), and a level gauge (86) is fixedly connected to the lower ends of the two supporting rods (85).

7. A calibration device for a quartz crystal oscillator vacuum sputtering coating mask plate according to claim 6, characterized in that springs (87) are fixedly connected to the upper ends of the hanging plates (84) and both sides of the third screw (82), and the upper ends of the springs (87) are fixedly connected to the lower surface of the sliding plate (81).

8. The calibration device of the quartz crystal oscillator vacuum sputtering coating mask plate according to claim 1, wherein one end of the adjusting screw (13) is rotatably connected to the inner wall of the left side of the first chute (3), the other end of the adjusting screw (13) penetrates through the inner wall of the right side of the first chute (3) and extends to the outside of the base (1), the other end of the adjusting screw (13) is rotatably connected with the base (1) through a second bearing (15), and one end of the adjusting screw (13) located at the outside of the base (1) is fixedly connected with an adjusting hand wheel (16).