CN111250481B - Device for adsorbing particle pollutants by utilizing movable electrostatic electric field - Google Patents
Device for adsorbing particle pollutants by utilizing movable electrostatic electric field Download PDFInfo
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- CN111250481B CN111250481B CN202010054196.8A CN202010054196A CN111250481B CN 111250481 B CN111250481 B CN 111250481B CN 202010054196 A CN202010054196 A CN 202010054196A CN 111250481 B CN111250481 B CN 111250481B
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- copper rod
- lead screw
- guide rail
- stepping motor
- shaped electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/02—Plant or installations having external electricity supply
- B03C3/04—Plant or installations having external electricity supply dry type
- B03C3/10—Plant or installations having external electricity supply dry type characterised by presence of electrodes moving during separating action
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Cleaning In General (AREA)
- Non-Mechanical Conveyors (AREA)
- Electrostatic Separation (AREA)
Abstract
A device for adsorbing particle pollutants by utilizing a movable electrostatic electric field belongs to the technical field of clean manufacturing. The invention aims to solve the problem of removing particle pollutants on the surface of an optical element in a high-power laser device. The base unit comprises a device substrate, a support frame and other parts; the moving unit is composed of a lead screw, a supporting bearing and the like to realize the reciprocating motion of the static electrode; the cleaning unit is composed of a copper bar, a power supply and the like, and high-voltage static electricity is conveyed. The control unit is used for controlling the start or stop of the stepping motor of the motion unit. The invention uses the lead screw and the optical axis guide rail to move the copper rod-shaped electrode on the surface of the optical glass, has large coverage area, can be adjusted and has wider application range. The copper rod-shaped electrode is used, the occupied volume on the surface of the optical glass is small, the structure is compact, the space utilization rate is high, and the electric field is more concentrated. The copper rod-shaped electrode is arranged on the nylon groove, so that the shape of the copper rod-shaped electrode can be replaced and changed conveniently.
Description
Technical Field
The invention belongs to the technical field of clean manufacturing, and particularly relates to a device for adsorbing particle pollutants by using a movable electrostatic electric field.
Background
The cleaning of large-area optical elements is a key difficult problem to be solved urgently in the fields of current high-power laser devices, large-scale optical systems, space telescopes and the like. In optical systems, large area optical element surfaces must be kept clean. For example, in high power laser devices, contamination of the surface of the optical element absorbs the energy of the laser light, creating an energy focus region. When high-energy laser is continuously applied to the energy gathering region on the surface of the element, the surface of the element is seriously damaged, and even the optical element is damaged. Even in vacuum systems, the surfaces of optical elements still become contaminated, and the main sources of contamination include: the material is processed or is exposed to an oxide layer generated in the atmosphere and particles adsorbed on the surface; contamination left during processing, pretreatment, installation, and the like; particles and the like brought about during evacuation and desorption in the vacuum chamber.
In order to reduce the surface pollution of the optical element and improve the laser damage resistance of the optical element, the optical element needs to be cleaned in the processing process and before film coating; and after the system has been in operation for a period of time, maintenance and cleaning of the optical elements is required.
The wide use of electrostatic precipitation in industry is to separate contaminants from air, while separation of contaminants from surfaces is still in the laboratory research phase. An electrostatic electric field is produced by the high-voltage electrode, and the adhesion force of the particle pollutants to the surface of the element and the self gravity are overcome by the electric field force, so that the particles adhered to the surface of the object are peeled. Research results show that due to the influence of surface roughness, when the surface roughness of pollutant particles and objects is large, the adhesion force measured in experiments is far larger than the value obtained by theoretical calculation in most cases. In summary, the difficulty is greater when electrostatic precipitation is used to remove surface contaminants.
Disclosure of Invention
The invention aims to solve the problem of removing particle pollutants in the existing large-area optical element and provides a device for adsorbing the particle pollutants by using a movable electrostatic electric field.
The invention generates a movable electric field by moving the two copper rod-shaped electrodes, covers a large-area optical element in a full size, greatly improves the electrostatic contact area, reduces the space volume of the copper rod-shaped electrodes, and has compact structure and high adsorption efficiency. Compared with other types of static electrodes, the static electrode has more concentrated electric field distribution, and the area covered by the electric field depends on the copper rod-shaped electrode and the movable range of the copper rod-shaped electrode on the optical axis guide rail, so that the copper rod-shaped electrode is more freely arranged and has wider application range.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
an apparatus for adsorbing particulate contaminants using a movable electrostatic field, the apparatus comprising a base unit, a moving unit, a cleaning unit, and a control unit;
the base unit comprises a substrate, four lens frames and four lens clamping pieces, the four corners of the upper surface of the substrate are respectively fixed with the lens frames, the top end of each lens frame is horizontally provided with the lens clamping piece, and each lens clamping piece is rotatably connected with the lens frame through a pin shaft;
the motion unit comprises a stepping motor and a transmission system; the transmission system comprises two guide rail sliding blocks, a strip-shaped steel plate, two optical axis guide rails, a screw rod, four supporting seats, two horizontal bearing seats, a coupler and a nut seat; the lead screw is connected to the upper surface of the base plate through two horizontal bearing blocks; each optical axis guide rail is connected to the upper surface of the base plate through two supporting seats, the two optical axis guide rails are respectively arranged on two sides of the lead screw and are arranged in parallel to the lead screw, the lead screw is connected with the stepping motor through a coupler, the stepping motor is fixed on the upper surface of the base plate, two ends of the nylon groove are in sliding connection with the two optical axis guide rails through the two guide rail sliding blocks, the nut seat is in threaded connection with the lead screw, and the nut seat and the two guide rail sliding blocks are both connected with the strip-shaped steel plate; the lead screw drives the nylon groove to move when rotating;
the cleaning unit comprises two copper rod-shaped electrodes and a direct-current power supply, the two copper rod-shaped electrodes are arranged above and below the nylon groove and are arranged in parallel up and down, and the direct-current power supply supplies power to the copper rod-shaped electrodes; the control unit is used for controlling the start or stop of the stepping motor of the motion unit.
Compared with the prior art, the invention has the beneficial effects that:
1. the lead screw and the optical axis guide rail are used for moving the copper rod-shaped electrode on the surface of the optical glass, so that the coverage area is large, the adjustment can be realized, and the application range is wider.
2. The copper rod-shaped electrode is used, the occupied volume on the surface of the optical glass is small, the structure is compact, the space utilization rate is high, and the electric field is more concentrated.
3. The copper rod-shaped electrode is arranged on the nylon groove, so that the shape of the copper rod-shaped electrode can be replaced and changed conveniently.
4. The time and the times of the copper rod-shaped electrode moving on the surface of the optical glass are controlled by the stepping motor, and the setting can be carried out according to the actual situation, so that the automatic operation is realized.
Drawings
FIG. 1 is a schematic structural diagram of the device of the present invention, wherein 1-optical glass, 2-guide rail slide block, 3-base plate, 4-copper rod-shaped electrode, 5-nylon groove, 6-strip steel plate, 7-optical axis guide rail, 8-lead screw, 9-support seat, 10-horizontal bearing seat, 11-coupler, 12-stepping motor, 13-limit switch, 14-lens clamping piece, 15-lens frame, 16-nut seat.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and modifications or equivalent substitutions may be made to the technical solution of the present invention without departing from the spirit of the technical solution of the present invention, and are intended to be covered by the scope of the present invention.
The first embodiment is as follows: the present embodiment describes an apparatus for adsorbing particulate contaminants using a movable electrostatic field, the apparatus including a base unit, a moving unit, a cleaning unit, and a control unit;
the base unit comprises a base plate 3, four lens frames 15 and four lens clamping pieces 14, the four corners of the upper surface of the base plate 3 are respectively fixed with the lens frames 15, the top end of each lens frame 15 is horizontally provided with a lens clamping piece 14, and each lens clamping piece 14 is rotatably connected with the lens frame 15 through a pin shaft;
the motion unit comprises a stepping motor 12 and a transmission system; the transmission system comprises two guide rail sliding blocks 2, a strip-shaped steel plate 6, two optical axis guide rails 7, a lead screw 8, four supporting seats 9, two horizontal bearing seats 10, a coupler 11 and a nut seat 16; the lead screw 8 is connected to the upper surface of the substrate 3 through two horizontal bearing blocks 10; each optical axis guide rail 7 is connected to the upper surface of the base plate 3 through two supporting seats 9, the two optical axis guide rails 7 are respectively arranged on two sides of a lead screw 8 and are arranged in parallel to the lead screw 8, the lead screw 8 is connected with a stepping motor 12 through a coupler 11, the stepping motor 12 is fixed on the upper surface of the base plate 3, two ends of a nylon groove 5 are in sliding connection with the two optical axis guide rails 7 through two guide rail sliders 2, a nut seat 16 is in threaded connection with the lead screw 8, and the nut seat 16 and the two guide rail sliders 2 are both connected with a strip-shaped steel plate 6; the lead screw 8 drives the nylon groove 5 to move when rotating;
the cleaning unit comprises two copper rod-shaped electrodes 4 and a direct current power supply, the two copper rod-shaped electrodes 4 are arranged above and below the nylon groove 5, the two copper rod-shaped electrodes 4 are arranged in parallel up and down, and the direct current power supply supplies power to the copper rod-shaped electrodes 4; the direct current power supply is a low-voltage power supply or a high-voltage power supply; the control unit is used for controlling the start or stop of the stepping motor 12 of the motion unit.
The cleaning unit combines the electrostatic adsorption effect of the copper rod-shaped electrode 4; the moving unit drives a screw 8 through a stepping motor 12 to drive the guide rail slide block 2 and the copper rod-shaped electrode 4 to move.
The movement unit of the device is positioned on the back of the optical glass, the optical glass can be cleaned under the condition that the optical glass is not detached, the cleanable range can be changed by adjusting the lengths of the copper rod-shaped electrode 4 and the lead screw 8, and the device is flexible to apply. The device is specifically installed in an optical system, the optical glass is arranged on a lens frame 15 of the device and is fixed through a lens clamping piece 14, and the device is started when a certain piece of optical glass needs to be cleaned, and the device is used for the horizontally-arranged optical glass.
The second embodiment is as follows: in a first embodiment, the device for adsorbing particulate pollutants by using a movable electrostatic electric field has the following working process parameters: the electrostatic voltage was 7kV, the distance between the two copper rod-like electrodes 4 above and below the optical glass 1 was 30mm, and the speed of the copper rod-like electrode was 10 mm/s.
The third concrete implementation mode: in a device for adsorbing particle pollutants by using a movable electrostatic electric field according to a first specific embodiment, the nylon groove 5 is a rectangular groove, two end plates of the nylon groove 5 are provided with holes at equal intervals, the copper rod-shaped electrodes 4 are installed corresponding to different scales, and the distance between the two copper rod-shaped electrodes can be adjusted according to the thickness of a lens and the required electric field intensity.
The fourth concrete implementation mode: the device for adsorbing particle pollutants by using a movable electrostatic electric field is further provided with two limit switches 13, wherein the two limit switches 13 are arranged on diagonal sides of the substrate 3 and fixed on the side surfaces of the lens frame 15 adjacent to the guide rail sliding block 2, and are used for limiting the movement range of the guide rail sliding block 2.
The fifth concrete implementation mode: in the first embodiment of the present invention, the substrate 3 is made of an acrylic plate.
A specific method of using the device is described below with reference to fig. 1. In the device, the stepping motor 12 controls the copper rod-shaped electrode 4 to scan on the surface of the optical glass 1, so that the device can be used on optical glass 1 with various areas, and has the advantages of small occupied volume and high dust removal efficiency. The copper rod-shaped electrodes 4 are respectively arranged above and below the optical glass 1, the optical glass 1 is fixed by the lens clamping piece 14 and the lens frame 15, the device does not need to assemble and disassemble the lens, but is directly assembled in an optical system together with the lens, namely, the device is equivalent to an optical lens seat with a cleaning function.
The device of the invention comprises a base unit, a motion unit and a control unit. The base unit provides support for the motion unit; because the static electricity removal only has a cleaning effect on the surface of the optical glass 1 between the copper rod-shaped electrodes 4, the cleaning range is determined by the movement range of the copper rod-shaped electrodes 4, a lead screw 8 with the movement stroke of 400mm and the lead of 4mm is selected as a core component of a movement unit, and a stepping motor 12 is directly driven to serve as a power source. In order to control the stepping motor 12, a proper driving and control system needs to be selected, and a limit switch 13 is added in the device for limiting the stepping motor so as to prevent the danger caused by the over-limit of the movement range when the copper rod-shaped electrode 4 uses a high-voltage power supply to supply power for the stepping motor.
Copper rod-like electrode 4 is installed on nylon slot 5, has equidistant round hole and mark the scale on nylon slot 5, and the distance between copper rod-like electrode 4 is controlled through installing it in the different round hole department on nylon slot 5, simultaneously because the nylon material has good insulating ability, so be insulating each other between copper rod-like electrode 4 and other subassemblies. The nylon groove 5 is fixed on the strip-shaped steel plate 6, and the strip-shaped steel plate 6 for fixing the nylon groove 5 is also responsible for connecting the screw rod 8, the screw seat 16 and the guide rail slide block 2 together. Through the design, the pushing force on the screw rod 8 is prevented from acting on the copper rod-shaped electrodes 4, the straightness of the copper rod-shaped electrodes 4 is guaranteed, and the electric field between the copper rod-shaped electrodes 4 can be uniformly distributed only by guaranteeing the straightness of the copper rod-shaped electrodes 4. The whole power is provided by a stepping motor 12, and the stepping motor 12 is connected with the lead screw 8 through an elastic coupling 11. The diameter of the copper rod-like electrode 4 was 12 mm.
The stepper motor 12 is selected to be a 42 stepper motor with a step angle of 1.8 deg. which provides a maximum torque of 0.4Nm and a D-shaft output shaft with a maximum diameter of 5 mm. Compared with a round shaft, the D-shaped shaft has lower requirements on the coupler 11 under the condition of ensuring the output torque. The stepper motor driver is selected to be a TB6600 type driver, which can provide a maximum current of 4A, and can be set to 32 times the subdivision at the highest. The more the subdivision, the more stable the movement of the stepping motor, and the lower the rotation speed when the output clock frequency of the controller is the same. The DKC-1B type controller is selected as a stepping motor controller, and the stepping motor controller can still keep higher reliability and stability under the interference of strong electromagnetism and dust in experiments.
The low-voltage power supply is selected from a Taiwan Ming latitude switch power supply, the model is NES-100-24, the output voltage is 24V, the maximum output current is 4.5A, and the use requirement of the device can be met. In the aspect of stroke control, a proximity switch is selected as the limit switch 13. Compared with the conventional mechanical pressing type sensor, the proximity switch does not need direct physical contact, so that the signal interference caused by the contact of a high-voltage cleaning system and a low-voltage signal system is avoided, and the reliability of the device is enhanced.
The high-voltage power supply is selected from a CX-150A type high-voltage power supply, the voltage output of the high-voltage power supply is adjustable, and when the input voltage is 220V, the highest output voltage of the high-voltage power supply can reach 15kV, so that the voltage requirement of the device is met. In the aspect of safety, the safety protection device has the ignition protection function and the short circuit protection function, and can better ensure the safety of personnel and devices. The copper rod electrode in the device adopts a red copper electrode, and the device has strong conductivity and stable chemical property.
In order to verify the adsorption effect of the device, SiO is adopted2The particle micropowder mimics actual particle contamination and varies in diameter from 5 μm to 100 μm. The verification result shows that: the intensity of the electric field generated on the surface of the optical element by the device increases with the increase of the electrostatic voltage, so that the adsorption efficiency increases with the increase of the voltage. The position of the copper rod-like electrode also has a great influence on the adsorption efficiency, and the closer the copper rod-like electrode is to the optical element, the higher local electric field is easily generated, so that the adsorption efficiency is increased. However, the too small distance between the copper rod-like electrode and the element is likely to cause arc discharge, thereby lowering the adsorption efficiency. Through multiple times of experimental optimization, reasonable process parameters of the experimental device are finally obtained: the electrostatic voltage is 7kV, the distance between the upper copper rod-shaped electrode 4 and the lower copper rod-shaped electrode 4 of the optical glass 1 is 30mm, and the adsorption efficiency of particle pollutants with the particle size of more than 20 mu m can reach 80% when the speed of the copper rod-shaped electrodes is 10 mm/s.
Claims (2)
1. The utility model provides an utilize device of movable electrostatic field adsorption particle pollutant which characterized in that: the device comprises a base unit, a moving unit, a cleaning unit and a control unit;
the base unit comprises a substrate (3), four lens frames (15) and four lens clamping pieces (14), the four corners of the upper surface of the substrate (3) are respectively fixed with the lens frames (15), the top end of each lens frame (15) is horizontally provided with the lens clamping piece (14), and each lens clamping piece (14) is rotatably connected with the lens frame (15) through a pin shaft;
the motion unit comprises a stepping motor (12) and a transmission system; the transmission system comprises two guide rail sliding blocks (2), a strip-shaped steel plate (6), two optical axis guide rails (7), a lead screw (8), four supporting seats (9), two horizontal bearing seats (10), a coupler (11) and a nut seat (16); the lead screw (8) is connected to the upper surface of the base plate (3) through two horizontal bearing blocks (10); each optical axis guide rail (7) is connected to the upper surface of the base plate (3) through two supporting seats (9), the two optical axis guide rails (7) are respectively arranged on two sides of the lead screw (8) and are arranged in parallel to the lead screw (8), the lead screw (8) is connected with the stepping motor (12) through the coupler (11), the stepping motor (12) is fixed to the upper surface of the base plate (3), the two guide rail sliding blocks (2) are respectively provided with a nylon groove (5), the nylon groove (5) is a rectangular groove, and two end plates of the nylon groove (5) are provided with holes at equal intervals; the bottom ends of the two nylon grooves (5) are in sliding connection with the two optical axis guide rails (7) through the two guide rail sliding blocks (2), the nut seat (16) is in threaded connection with the lead screw (8), and the nut seat (16) and the two guide rail sliding blocks (2) are both connected with the strip-shaped steel plate (6); the lead screw (8) drives the nylon groove (5) to move when rotating;
the cleaning unit comprises two copper rod-shaped electrodes (4) and a direct current power supply, the two copper rod-shaped electrodes (4) are arranged above and below the nylon groove (5), the two copper rod-shaped electrodes (4) are arranged in parallel up and down, and the direct current power supply supplies power to the copper rod-shaped electrodes (4); the control unit is used for controlling the start or stop of a stepping motor (12) of the motion unit;
the technological parameters of the device during working are as follows: the electrostatic voltage is 7kV, the distance between two copper rod-shaped electrodes (4) positioned above and below the optical glass (1) is 30mm, and the speed of the copper rod-shaped electrodes is 10 mm/s;
the device is further provided with two limit switches (13), wherein the two limit switches (13) are arranged on the diagonal side of the substrate (3), are fixed on the side face of the lens frame (15) adjacent to the guide rail sliding block (2) and are used for limiting the movement range of the guide rail sliding block (2).
2. The apparatus of claim 1, wherein the apparatus further comprises a movable electrostatic field for attracting particulate contaminants, the movable electrostatic field comprising: the base plate (3) is made of an acrylic plate.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010054196.8A CN111250481B (en) | 2020-01-17 | 2020-01-17 | Device for adsorbing particle pollutants by utilizing movable electrostatic electric field |
| PCT/CN2021/070125 WO2021143557A1 (en) | 2020-01-17 | 2021-01-04 | Device utilizing movable electrostatic electric field to attract particulate pollutants |
| GB2207943.8A GB2605309B (en) | 2020-01-17 | 2021-01-04 | Device utilizing movable electrostatic electric field to attract particulate pollutants |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010054196.8A CN111250481B (en) | 2020-01-17 | 2020-01-17 | Device for adsorbing particle pollutants by utilizing movable electrostatic electric field |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111250481A CN111250481A (en) | 2020-06-09 |
| CN111250481B true CN111250481B (en) | 2021-07-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010054196.8A Active CN111250481B (en) | 2020-01-17 | 2020-01-17 | Device for adsorbing particle pollutants by utilizing movable electrostatic electric field |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN111250481B (en) |
| GB (1) | GB2605309B (en) |
| WO (1) | WO2021143557A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111250481B (en) * | 2020-01-17 | 2021-07-13 | 哈尔滨工业大学 | Device for adsorbing particle pollutants by utilizing movable electrostatic electric field |
| CN112742766B (en) * | 2020-12-17 | 2021-08-20 | 哈尔滨学院 | A dust adsorption equipment that is arranged in shafting part high accuracy assembly face |
| CN114273338B (en) * | 2021-12-16 | 2024-02-27 | 武汉团结点金激光科技有限公司 | Fault management system for diode laser |
| CN115532762A (en) * | 2022-10-09 | 2022-12-30 | 安徽兰迪节能玻璃有限公司 | Glass dust collection device for vacuum glass production |
| CN115921435A (en) * | 2022-12-28 | 2023-04-07 | 浙江大学 | Photovoltaic board intelligence is from cleaning system based on electrostatic interaction |
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| US5906686A (en) * | 1997-11-18 | 1999-05-25 | Lucent Technologies Inc. | Fiber optic connector cleaning process |
| EP1431828A1 (en) * | 2002-12-20 | 2004-06-23 | ASML Netherlands B.V. | Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system |
| CN203470412U (en) * | 2013-08-30 | 2014-03-12 | 厦门瑞屏电子科技有限公司 | Dust prevention and collection device for optical mirrors in rear-projection display systems |
| CN106463385A (en) * | 2014-06-19 | 2017-02-22 | 应用材料公司 | Roll-to-Roll Wafer Backside Particle and Contamination Removal |
| CN206936919U (en) * | 2017-06-01 | 2018-01-30 | 兰州天佑机器人科技有限公司 | Wall-hanging three-axis moving control platform |
| CN109270651A (en) * | 2018-11-06 | 2019-01-25 | 中国工程物理研究院激光聚变研究中心 | A kind of offline precision assembly system of optical elements of large caliber automation |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8405951B2 (en) * | 2010-06-21 | 2013-03-26 | Tessera, Inc. | Cleaning mechanism with tandem movement over emitter and collector surfaces |
| CN208743248U (en) * | 2018-08-30 | 2019-04-16 | 江西华凯丰科技有限公司 | A kind of optical glass electrostatic cleaner |
| CN111250481B (en) * | 2020-01-17 | 2021-07-13 | 哈尔滨工业大学 | Device for adsorbing particle pollutants by utilizing movable electrostatic electric field |
-
2020
- 2020-01-17 CN CN202010054196.8A patent/CN111250481B/en active Active
-
2021
- 2021-01-04 GB GB2207943.8A patent/GB2605309B/en active Active
- 2021-01-04 WO PCT/CN2021/070125 patent/WO2021143557A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5906686A (en) * | 1997-11-18 | 1999-05-25 | Lucent Technologies Inc. | Fiber optic connector cleaning process |
| EP1431828A1 (en) * | 2002-12-20 | 2004-06-23 | ASML Netherlands B.V. | Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system |
| CN203470412U (en) * | 2013-08-30 | 2014-03-12 | 厦门瑞屏电子科技有限公司 | Dust prevention and collection device for optical mirrors in rear-projection display systems |
| CN106463385A (en) * | 2014-06-19 | 2017-02-22 | 应用材料公司 | Roll-to-Roll Wafer Backside Particle and Contamination Removal |
| CN206936919U (en) * | 2017-06-01 | 2018-01-30 | 兰州天佑机器人科技有限公司 | Wall-hanging three-axis moving control platform |
| CN109270651A (en) * | 2018-11-06 | 2019-01-25 | 中国工程物理研究院激光聚变研究中心 | A kind of offline precision assembly system of optical elements of large caliber automation |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021143557A1 (en) | 2021-07-22 |
| GB202207943D0 (en) | 2022-07-13 |
| GB2605309B (en) | 2023-12-27 |
| CN111250481A (en) | 2020-06-09 |
| GB2605309A (en) | 2022-09-28 |
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