CN111226120A

CN111226120A - Detector

Info

Publication number: CN111226120A
Application number: CN201780096021.XA
Authority: CN
Inventors: 山口政纪; 北原忠
Original assignee: Toyo Corp
Current assignee: Toyo Corp
Priority date: 2017-10-20
Filing date: 2017-10-20
Publication date: 2020-06-02
Anticipated expiration: 2037-10-20
Also published as: WO2019077743A1; JP6324648B1; CN111226120B; JPWO2019077743A1

Abstract

A probe (100) for measuring the electrical impedance of a test sample (10) comprises: a shield conductor (101) as a first electrode, having a hollow structure, and having a closed space (104) for accommodating a sample body (10); and a central conductor (106) as a second electrode extending within the enclosed space (104) and insulated from the shield conductor (101). And a central conductor (106) extending so as to leave a space with the wall of the shield conductor (101), and sandwiching the sample body (10) with the wall, wherein the closed space (104) is either evacuated or filled with an inert gas (110).

Description

Detector

Technical Field

The present invention relates to a probe for measuring electrical impedance.

Background

Probes for measuring the electrical impedance of a sample are known. For example, patent document 1 discloses a physical property measuring apparatus for measuring a physical property of a measurement object placed in a special environment such as a furnace. The physical property measuring apparatus is configured to measure an electrical impedance of a sample of a measurement object in a furnace using a probe. The probe is suspended through a housing frame for housing a sample, and is moved up and down with respect to the sample placed on the upward surface of the housing frame. The probe and the housing frame are electrically connected to one and the other of the two terminals of the impedance measuring device, respectively.

(Prior art document)

(patent document)

Patent document 1 Japanese laid-open patent publication No. 5-240816

In the property measurement device of patent document 1, the probe and the housing frame constitute electrodes that are in contact with the sample. In order to accurately measure the electrical impedance of the sample, the probe and the housing frame need to be electrically insulated from each other regardless of the ambient temperature change.

Disclosure of Invention

The present invention provides a probe for improving electrical insulation between electrodes in contact with a sample.

A probe according to an aspect of the present invention is a probe for measuring an electrical impedance of a sample, the probe including: a first electrode having a hollow structure and a closed space for accommodating a sample body; and a second electrode extending in the closed space and insulated from the first electrode, wherein the second electrode extends with a space from a wall of the first electrode, and the sample body is sandwiched between the second electrode and the wall, and the closed space is vacuum or filled with an inert gas.

The probe according to the present invention can improve the electrical insulation between the electrodes in contact with the sample body.

Drawings

Fig. 1 is a sectional side view showing an example of a mode of a state at the time of measurement of a probe according to an embodiment.

Figure 2 is a cross-sectional side view of a pattern of the detector of figure 1.

Fig. 3 is a sectional view of the pattern along the line III-III of fig. 2.

Fig. 4 is a sectional view schematically showing a probe according to a modification of the embodiment in the same manner as fig. 3.

Detailed Description

As described in the background section, the present inventors have studied a probe for measuring the electrical impedance of a sample body. In the past, the electrical impedance of a material has been localized to one of the basic physical properties of the material. Therefore, when a new material is developed, the electrical impedance is measured by a probe or the like. In this case, the electrical impedance of the material is measured in a temperature environment suitable for the purpose of use of the material. However, it is difficult to accurately measure the electrical insulation properties of a cable of a probe used for measurement, a jig for holding a probe of a sample, and the like, in a temperature environment where the temperature changes with the ambient temperature and a large difference from the room temperature exists. Therefore, the present inventors have studied a probe capable of reducing the influence of the measurement result due to the change in the temperature environment. As a result of intensive studies, the present inventors have proposed a probe capable of improving electrical insulation between electrodes in contact with a sample body as follows.

The probe according to an aspect of the present invention may further include: and an insulating holding member that holds the second electrode with respect to the first electrode, wherein the wall portion includes a first wall portion and a second wall portion, the first wall portion and the second electrode sandwich the sample body therebetween, the second wall portion extends so as to leave a space with the second electrode, and the holding member extends from the second wall portion to the second electrode and holds the second electrode at least in one direction.

In the probe according to one aspect of the present invention, at least two holding members may be disposed radially from the second electrode to the second wall portion.

In the probe according to one aspect of the present invention, the holding member may be configured to be extendable from the second wall portion.

In the probe according to one aspect of the present invention, the second electrode may be provided so as to be slidable in a direction approaching the first wall portion and a direction separating from the first wall portion.

The probe according to an aspect of the present invention may further include: and a biasing member that biases the second electrode toward the first wall portion.

The probe according to an aspect of the present invention may further include: and a probe connector which electrically connects the first electrode and the second electrode to an impedance measuring device, respectively, and which is detachably connected to an electrical connector of the impedance measuring device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiments described below are specific examples of the present disclosure. The numerical values, shapes, materials, constituent elements, arrangement positions of constituent elements, connection forms, steps (processes), and orders of steps, etc., shown in the following embodiments are examples, and do not limit the present disclosure. Among the components in the following embodiments, components that are not described in the technical means illustrating the highest concept will be described as arbitrary components.

In the following description of the embodiments, the expression "substantially" may be used, for example, substantially parallel or substantially orthogonal to each other. For example, the substantial parallelism includes not only a completely parallel meaning but also a substantially parallel meaning, that is, a difference of, for example, about several%. The same applies to other expressions using "approximate". The figures are schematic and not strictly schematic. In the drawings, substantially the same constituent elements are denoted by the same reference numerals, and redundant description thereof will be omitted or simplified.

[ embodiment ]

The structure of the probe 100 according to the embodiment will be described. Fig. 1 is a sectional side view showing an example of a mode of a state of the probe 100 according to the embodiment at the time of measurement. As shown in fig. 1, the probe 100 according to the embodiment stores a sample body of a measurement target inside, and measures the electrical impedance of the sample body in a state of being disposed in a predetermined temperature environment. The predetermined temperature is a temperature at which electrical impedance is required for the measurement object. For example, the predetermined temperature is a temperature within a temperature range that meets the purpose of use of the measurement object.

The probe 100 is disposed in a temperature control device 1, and the temperature control device 1 is a device that forms a predetermined temperature environment. The probe 100 is electrically connected to the impedance measuring apparatus 2 via the cable 3. The temperature control device 1 may be a heating furnace such as an electric furnace or the like in which the inside is brought into a high temperature state, or may be a cooling furnace such as a refrigerator or a cryostat in which the inside is brought into a low temperature state. The probe 100 is partially inserted into the temperature control apparatus 1 through the mounting hole 1a of the temperature control apparatus 1. At this time, the probe 100 is positioned inside the temperature control apparatus 1 at a portion for housing the sample. The connecting portion of the cable 3 in the probe 100 may be located outside the temperature adjustment device 1. The impedance measuring device 2 applies a voltage to 2 electrodes, not shown, of the probe 100, and measures an electrical impedance between the 2 electrodes. The impedance measurement result by the impedance measuring apparatus 2 shows the electrical impedance of the sample body by sandwiching the sample body between the 2 electrodes.

Referring further to FIG. 2, FIG. 2 shows a cross-sectional side view of a pattern of the probe 100 of FIG. 1. The probe 100 includes: the shield conductor 101 has a bottomed cylindrical shape, a center conductor 106 extending inside the shield conductor 101, and a first holding member 109 holding the center conductor 106 with respect to the shield conductor 101. The probe 100 further includes a probe connector 105, and is detachably connected to the electrical connector 4 of the cable 3 of the impedance measuring device 2. Here, the shield conductor 101 is an example of a first electrode, and the center conductor 106 is an example of a second electrode.

The shield conductor 101 has a hollow structure in which both ends of the cylindrical portion are closed. The shield conductor 101 has a closed space 104 therein for accommodating the sample body 10 as an object to be measured. In the present embodiment, the closed space 104 is a sealed space, but is not limited thereto and may not be sealed.

The shield conductor 101 is composed of a first member 102 and a second member 103 which can be coupled to and separated from each other. The first member 102 and the second member 103 each have a bottomed cylindrical shape. The first member 102 and the second member 103 have cylindrical

peripheral walls

102a and 103a, and flat

bottom walls

102b and 103b, respectively. The cross-sectional shapes of the

peripheral walls

102a and 103a are not limited to circular, and may be any shapes such as oval, oblong, and polygonal. Here, the bottom wall 103b is an example of a first wall portion, and the

peripheral walls

102a and 103a are examples of a second wall portion.

The first member 102 and the second member 103 can be coupled to and separated from each other at the end portions of the

peripheral walls

102a and 103 a. The first member 102 and the second member 103 are coupled to each other to form a closed space 104 therein. The coupling structure of the first member 102 and the second member 103 may be any coupling structure, for example, a structure that is coupled by screwing or fitting. The connection structure of the first member 102 and the second member 103 is preferably a structure that maintains airtightness at the connection portion. A sealing member for maintaining airtightness may be disposed at the connecting portion. In the case where the probe 100 is used at a high temperature, it is preferable that the sealing member has heat resistance.

Outside the shield conductor 101, a probe connector 105 is disposed on the bottom wall 102b of the first member 102. And a bottom wall 102b electrically connected to the first terminal 105a of the probe connector 105. In the shield conductor 101, a sample 10 is placed on the bottom wall 103b of the second member 103. The sample body 10 is disposed on the bottom wall 103b in a state where the first member 102 and the second member 103 are separated. Thereafter, the first member 102 and the second member 103 are coupled to each other, whereby the sample 10 is accommodated in the closed space 104.

In the peripheral wall 102a of the first member 102,

communication pipes

102c and 102d are provided. The

communication pipes

102c and 102d may be formed integrally with the peripheral wall 102a using the same material as the first member 102, or may be formed so as to be connected to the peripheral wall 102 a. The

communication pipes

102c and 102d communicate the enclosed space 104 with the outside of the shield conductor 101. When the probe 100 is installed in the temperature control apparatus 1, the

communication pipes

102c and 102d are preferably installed outside the temperature control apparatus 1, for example, in the vicinity of the bottom wall 102 b. Further,

communication pipes

102c and 102d are provided with valves 102ca and 102da, respectively. The valves 102ca and 102da are valves that open or close the

communication pipes

102c and 102d, respectively. For example, the valves 102ca and 102da may be opening and closing valves or check valves.

Air in the closed space 104 is sucked through the communication pipe 102c, and the closed space 104 can be evacuated. Further, the inert gas 110 is injected into the closed space 104 via the communication pipe 102c, and the air in the closed space 104 is discharged via the communication pipe 102d, so that the closed space 104 can be filled with the inert gas 110. The inert gas 110 is preferably a gas whose properties do not change even at high and low temperatures, in other words, a gas having no temperature dependency. The inert gas 110 is preferably a gas having no dielectric property. Examples of inert gas 110 are helium, nitrogen, and argon. Such an inert gas 110 has no capacitance, and its electrical impedance does not vary according to the volume of the inert gas. The vacuum also has the same properties as those of the inert gas.

The vacuum and the inert gas 110 in the closed space 104 are not affected by the temperature change outside the shield conductor 101, and have good and stable electrical insulation properties, particularly better and stable electrical insulation properties than solid materials. In the present embodiment, when the probe 100 measures the electrical impedance of the sample body 10, the closed space 104 is evacuated or filled with an inert gas 110.

The first member 102 and the second member 103 are made of a material having conductivity. When the probe 100 is used at a high temperature, the constituent materials of the first member 102 and the second member 103 preferably have heat resistance. Examples of the constituent material of the first member 102 and the second member 103 are stainless steel (also referred to as "SUS"), aluminum, and aluminum alloy. The first member 102 and the second member 103 electrically connect the sample body 10 and the first terminal 105a of the probe connector 105. The shield conductor 101 formed of the first member 102 and the second member 103 is an example of the first electrode. In the present embodiment, the shield conductor 101 is formed with an inner diameter of about 10 to 15mm, but is not limited thereto.

The central conductor 106 has a rod-like shape and extends from the bottom wall 102b to the bottom wall 103b in the closed space 104. The center conductor 106 is made of a material having electrical conductivity. When the probe 100 is used at a high temperature, the material constituting the central conductor 106 preferably has heat resistance. Examples of the constituent material of the center conductor 106 are stainless steel, platinum, aluminum, and aluminum alloy.

The central conductor 106 extends with a space between the

peripheral walls

102a and 103a, and the central conductor 106 does not contact the shield conductor 101. One end of the central conductor 106 is in contact with the sample body 10 so as to sandwich the sample body 10 with the bottom wall 103 b. The central conductor 106 is provided to be slidable in the axial direction of the shield conductor 101 from the bottom wall 102b to the bottom wall 103b with respect to the shield conductor 101. In other words, the central conductor 106 can slide in a direction in which one end of the central conductor 106 approaches the bottom wall 103b and in a direction away from the bottom wall 103 b.

The other end of the center conductor 106 is connected to a biasing member 107. The biasing member 107 is made of a material having conductivity. The biasing member 107 may be made of the same material as the central conductor 106. Examples of the urging member 107 are springs such as a coil spring, a conical spring, a bamboo spring, a disc spring, and a ring spring. The biasing member 107 is supported by an insulating member 108 fixed to the bottom wall 102b, and biases the center conductor 106 toward the bottom wall 103 b. In other words, the biasing member 107 biases the central conductor 106 so that the central conductor 106 contacts the sample body 10 on the bottom wall 103 b. Further, the urging member 107 causes the center conductor 106 to sandwich the sample 10 between the bottom walls 103 b.

The insulating member 108 is fixed to a through hole formed in the bottom wall 102b, and electrically insulates the bottom wall 102b from the biasing member 107. The insulating member 108 is made of an electrically insulating material. Examples of the constituent material of the insulating member 108 are ceramic, alumina (also referred to as "alumina"), and a fluororesin (also referred to as "fluorocarbon resin", "teflon (registered trademark)", or "polytetrafluoroethylene"). One end of the biasing member 107 is connected to the center conductor 106. The other end of the biasing member 107 is electrically connected to the second terminal 105b of the probe connector 105 through the through hole 108a of the insulating member 108. The through hole 108a of the insulating member 108 and the space between the insulating member 108 and the bottom wall 102b are provided with sealing members for maintaining airtightness.

The center conductor 106 and the biasing member 107 electrically connect the sample body 10 to the second terminal 105b of the probe connector 105. The center conductor 106 and the biasing member 107 are examples of the second electrode. In the present embodiment, the center conductor 106 is formed to have a size of about 5mm in outer diameter, but is not limited thereto. The biasing member 107 may be omitted, and the center conductor 106 may be electrically connected to the second terminal 105 b. The biasing member 107 may be made of an electrically insulating material. In this case, the center conductor 106 may be electrically connected to the second terminal 105b via a flexible conductive member such as a wire.

Further, a second holding member 107a is provided in the closed space 104, and the second holding member 107a holds the positions of the center conductor 106 and the biasing member 107. The second holding member 107a has a bottomed cylindrical shape, and is disposed on the bottom wall 102b of the first member 102 or the insulating member 108. The second holding member 107a is made of an electrically insulating material. Examples of the constituent material of the second holding member 107a are ceramics, alumina, and fluorine resin. The second holding member 107a may be made of a material having conductivity. The second holding member 107a is disposed so that the bottom faces the bottom wall 103 b. The second holding member 107a accommodates the biasing member 107 therein, and holds the position of the biasing member 107 in a direction perpendicular to the axial center of the shield conductor 101. The center conductor 106 penetrates the bottom of the second holding member 107a, and is connected to the biasing member 107 inside the second holding member 107 a. The second holding member 107a holds the position near the end of the center conductor 106 in the direction perpendicular to the axial center of the shield conductor 101.

The first holding member 109 is disposed on the peripheral wall 102a through a female screw hole 102e formed in the peripheral wall 102a of the first member 102. The plurality of female screw holes 102e are arranged along the circumferential direction of the peripheral wall 102a, and each female screw hole 102e is formed to penetrate the peripheral wall 102 a. In the present embodiment, the plurality of female screw holes 102e are arranged radially from the axial center of the peripheral wall 102a, but the present invention is not limited to this. The plurality of first holding members 109 are disposed in each of the plurality of female screw holes 102 e.

Referring to fig. 2 and 3, in the present embodiment, 3 female screw holes 102e are formed, and 3 first holding members 109 are disposed radially from the axis of the peripheral wall 102a, but not limited thereto. Further, the 3 first holding members 109 are arranged on the same cross section substantially perpendicular to the axial center of the peripheral wall 102 a. The 3 first holding members 109 are arranged at equal intervals in the circumferential direction of the circumferential wall 102 a. In addition, the positions of the 3 first holding members 109 in the axial direction of the peripheral wall 102a may be different, and the intervals between the 3 first holding members 109 may also be different.

The first holding member 109 may be made of an electrically insulating material. Examples of the material of the first holding member 109 are ceramic, alumina, and fluorine resin. Each first holding member 109 integrally has a shaft portion 109a formed with a male screw, and an engagement portion 109b for rotating the first holding member 109 with the screw, the engagement portion 109b being formed with a male screw. The shaft portion 109a of each first holding member 109 is screwed into the female screw hole 102e and extends from the outside to the inside of the shield conductor 101. The engaging portion 109b of each first holding member 109 is located outside the shield conductor 101. The engaging portion 109b is configured to engage with a tool, and the shaft portion 109a is rotated by a screw by the engaged tool. For example, the engaging portion 109b has a hexagon nut shape or a groove of "+" or "-", and is engaged and rotated by a hexagon wrench or a screwdriver. The tip of the shaft 109a is pointed so as to be in point contact with the center conductor 106, but is not limited thereto. The tip of the shaft 109a may be in line contact with the central conductor 106 or in surface contact therewith. The smaller the contact area of the first holding member 109 with the center conductor 106, the smaller the influence that the electrical impedance of the center conductor 106 receives from the first holding member 109. Further, a sealing member for maintaining airtightness may be disposed at the coupling portion between the shaft portion 109a of the first holding member 109 and the female screw hole 102 e. In the case where the probe 100 is used at a high temperature, the sealing member preferably has heat resistance.

The first holding member 109 is extended and contracted from the peripheral wall 102a so as to advance or retreat toward the axial center of the peripheral wall 102a by the rotation of the screw. By adjusting the amount of projection of the 3 first holding members 109 projecting from the peripheral wall 102a, the first holding members 109 are brought into contact with the central conductor 106 in 3 directions, and the central conductor 106 can be held at the axial center position of the peripheral wall 102a, in other words, at the center. In addition, the 3 first holding members 109 may not be in contact with the central conductor 106, and in this case, the position of the central conductor 106 is held in the space between the front ends of the 3 first holding members 109. The adjustment of the amount of expansion and contraction of the 3 first holding members 109 can be performed by a method from the outside of the shield conductor 101.

As shown in fig. 2, the first holding member 109 is disposed between the sample body 10 and the bottom wall 102 b. The first holding member 109 is preferably disposed at a position close to the sample body 10 in order to suppress positional deviation of the central conductor 106 with respect to the sample body 10. Therefore, the first holding member 109 can be disposed on the peripheral wall 103a of the second member 103. Further, the first holding member 109 is disposed on the first member 102, and thus, even when the first member 102 and the second member 103 are separated from each other, the position of the central conductor 106 can be continuously held.

The probe connector 105 is detachably connected to the electrical connector 4 of the cable 3 of the impedance measuring apparatus 2. The cable 3 includes 2 conductors for transceiving signals, and the electrical connector 4 includes 2 terminals electrically connected with the 2 conductors. When the probe connector 105 is connected to the electrical connector 4, each of the

terminals

105a and 105b of the probe connector 105 is electrically connected to 2 terminals of the electrical connector 4. Accordingly, a voltage can be applied by the impedance measuring device 2 while sandwiching the shield conductor 101 and the center conductor 106 of the sample 10, and the impedance of the sample 10 can be measured by the impedance measuring device 2. In the present embodiment, the cable 3 is a coaxial cable, and the electrical connector 4 and the probe connector 105 are coaxial connectors, but the present invention is not limited thereto.

Next, an example of the measurement operation using the probe 100 according to the embodiment will be described. Referring to fig. 1 and 2, first, the first member 102 and the second member 103 of the shield conductor 101 are separated. By adjusting the amount of expansion and contraction of the first holding member 109, the position of the center conductor 106 is positioned, for example, at the axial center position of the first member 102. Next, the sample body 10 is disposed on the bottom wall 103b of the second member 103, and the first member 102 is assembled to the second member 103 so that the center conductor 106 is in contact with the sample body 10. During assembly, the central conductor 106 in contact with the sample 10 can slide according to the size of the sample 10, and therefore, breakage of the sample 10 can be suppressed. Further, the center conductor 106 is pressed against the sample body 10 by the biasing force of the biasing member 107, and is held in contact with the sample body 10. Thus, the sample body 10 is in contact with the bottom wall 103b and the central conductor 106.

Further, the communication pipe 102c is connected to a pipe, and sucks air in the closed space 104 of the shield conductor 101 to vacuumize the closed space 104. Or an inert gas is injected into the enclosed space 104 and the enclosed space 104 is filled with the inert gas. Thus, the center conductor 106 is electrically insulated from the shield conductor 101 by a vacuum or an inert gas existing between the center conductor 106 and the shield conductor 101. Further, the valves 102ca and 102da maintain the airtightness of the closed space 104, and maintain the vacuum state or the filling state of the inert gas in the closed space 104.

Next, a part of the shield conductor 101 is inserted into the mounting hole 1a of the temperature adjustment device 1. In this case, the bottom wall 103b and the first holding member 109 are located inside the temperature control apparatus 1, and the bottom wall 102b and the

communication pipes

102c and 102d are located outside the temperature control apparatus 1. The probe connector 105, the insulating member 108, and the valves 102ca and 102da are not affected by heat generated by the temperature adjustment device 1, for example, in an atmosphere at room temperature, and therefore, a heat-resistant design is not required. Such a probe connector 105 and insulating member 108 can suppress a change in impedance regardless of a change in temperature in the temperature adjustment device 1. For example, when the probe connector 105 or the insulating member 108 has a high temperature and the impedance of the probe connector 105 or the insulating member 108 changes, the probe connector 105 or the insulating member 108 may undesirably have conductivity.

After the shield conductor 101 is inserted, the temperature control device 1 is activated, and the temperature in the temperature control device 1 is adjusted to a predetermined temperature for measuring the electrical impedance of the test sample 10. The heat in the temperature control apparatus 1 is transmitted to the closed space 104 and the sample body 10 via the shield conductor 101. Accordingly, the temperature of the sample 10 rises to a predetermined temperature. The impedance measuring device 2 measures the electrical impedance between the shield conductor 101 and the center conductor 106, in other words, the electrical impedance of the test sample 10. In the temperature control device 1, the shield conductor 101 and the center conductor 106 are electrically insulated continuously by a vacuum space or an inert gas space existing therebetween. The electrical insulation of the vacuum space or the space of the inert gas is not changed even when receiving the heat transmitted through the shield conductor 101, and the good insulation can be maintained. The electrical impedance of the vacuum space and the space of the inert gas is maintained regardless of the distance between the shield conductor 101 and the center conductor 106 and the heat transferred via the shield conductor 101, and the value is infinite. Therefore, the electrical insulation between the shield conductor 101 and the center conductor 106 is reliably and stably maintained. Thus, the electrical impedance of the sample body 10 can be accurately measured.

As described above, the probe 100 according to the embodiment is a probe for measuring the electrical impedance of the sample 10. The probe 100 includes: a shield conductor 101 as a first electrode having a hollow structure and a closed space 104 for accommodating the sample body 10; and a center conductor 106 as a second electrode extending in the enclosed space 104 and insulated from the shield conductor 101. The central conductor 106 extends with a space from the wall of the shield conductor 101, and the sample body 10 is sandwiched between the central conductor and the wall, and the closed space 104 is vacuum or filled with an inert gas 110.

With this configuration, the gap between the wall of the shield conductor 101 and the central conductor 106 is a vacuum or a gap filled with the inert gas 110. Therefore, the shield conductor 101 and the center conductor 106 are stably insulated by the vacuum or the inert gas 110 regardless of the ambient temperature of the shield conductor 101. In addition, regardless of the distance between the shield conductor 101 and the center conductor 106, the shield conductor 101 and the center conductor 106 are stably insulated by a vacuum or an inert gas 110. The probe 100 according to the embodiment can improve the electrical insulation between the electrodes in contact with the sample body 10, in other words, between the shield conductor 101 and the center conductor 106.

The probe 100 according to the embodiment includes: the first insulating holding member 109 holds the central conductor 106 with respect to the shield conductor 101. The wall portion of the shield conductor 101 includes a bottom wall 103b as a first wall portion and

peripheral walls

102a and 103a as second wall portions, the bottom wall 103b and the central conductor 106 sandwich the sample body 10 therebetween, and the

peripheral walls

102a and 103a extend with a space from the central conductor 106. The first holding member 109, which extends from the peripheral wall 102a to the center conductor 106, holds the center conductor 106 at least in one direction.

With the above configuration, the central conductor 106 is held by the first holding member 109 in at least 1 direction from the peripheral wall 102a toward the central conductor 106. Therefore, the first insulating holding member 109 can be prevented from having a small contact area with the center conductor 106, and therefore, the influence on the electrical resistance of the center conductor 106 can be prevented. In addition, as in the embodiment, the center conductor 106 may be held at least in 2 directions by at least 2 first holding members 109. Thus, the central conductor 106 can be prevented from being displaced in the radial direction perpendicular to the axial center of the peripheral wall 102a, and therefore, the central conductor 106 can be brought into contact with the sample body 10 more reliably.

In the probe 100 according to the embodiment, at least two first holding members 109 are disposed radially from the center conductor 106 toward the peripheral wall 102a of the shield conductor 101. With this configuration, the central conductor 106 can be held stably and substantially uniformly by at least 2 first holding members 109 from at least 2 radiation directions.

In the probe 100 according to the embodiment, the first holding member 109 is extendable from the peripheral wall 102a of the shield conductor 101. With this configuration, the first holding member 109 can adjust the position of the center conductor 106 to a desired position by extending and contracting.

In the probe 100 according to the embodiment, the central conductor 106 is provided so as to be slidable in a direction approaching the bottom wall 103b of the shield conductor 101 and in a direction separating from the bottom wall 103b of the shield conductor 101. With this configuration, the center conductor 106 can slide in accordance with the size of the sample 10 and can contact the sample 10. Therefore, the center conductor 106 can be brought into contact with the sample bodies 10 of various sizes to measure the electrical impedance.

The probe 100 according to the embodiment includes: the biasing member 107 biases the center conductor 106 toward the bottom wall 103b of the shield conductor 101. With this configuration, the center conductor 106 can be kept in contact with the sample bodies 10 of various sizes by the biasing force of the biasing member 107.

The probe 100 according to the embodiment includes: the probe connector 105 electrically connects the shield conductor 101 and the center conductor 106 to the impedance measuring apparatus 2, respectively, and the probe connector 105 is detachably connected to the electrical connector 4 of the impedance measuring apparatus 2. With the above configuration, the probe 100 is handled as a separate device in a state of being separated from the impedance measuring device 2. Further, as long as the electrical connector 4 and the probe connector 105 are common, even if the size, shape, or the like of the probe 100 differs, the electrical impedance of the sample body can be measured by the same impedance measuring apparatus 2. Further, the probe connector 105 facilitates connection and disconnection of the probe 100 to and from the impedance measuring apparatus 2.

[ others ]

The probe according to the present invention has been described above, but the present invention is not limited to the above-described embodiments. Various modifications that may be devised by those skilled in the art are included in the present embodiment or in a form in which components in different embodiments and modifications are combined and constructed within the scope of one or more aspects of the present invention without departing from the spirit of the present invention. For example, the following cases are also included in the present invention.

For example, in the probe 100 according to the embodiment, the center conductor 106 is held by 3 first holding members 109. However, the number of the first holding members 109 is not limited thereto, and may be at least 1. For example, the center conductor 106 may be held by 1 first holding member. In this case, the front end portion of the shaft portion of the first holding member may be shaped to surround the center conductor 106 from the outside. For example, the distal end portion may have a through hole such as a circular, elliptical, or polygonal shape, and the central conductor 106 may be disposed through the through hole. In this case, the shaft portion and the distal end portion may be configured to be relatively rotatable so that the shaft portion of the first holding member can be screwed. The tip portion may be configured to continuously surround the periphery of the through hole, or may be configured to partially and intermittently surround the through hole. When the through hole at the tip portion has a cross section larger than that of the central conductor 106, the through hole contacts the central conductor 106 in one direction, and supports the central conductor 106 from the one direction. The first holding member may not have a shaft portion shape, but may be a plate-like member extending in a direction intersecting the axial centers of the

peripheral walls

102a and 102b of the shield conductor 101. The plate-like member may be fixed to the

peripheral wall

102a or 103a, and may further include a through hole through which the center conductor 106 passes. For example, the plate-like member may be an annular plate having an edge along the inner peripheral surface of the

peripheral wall

102a or 103 a.

Or, for example, as shown in fig. 4, the center conductor 106 may be held by 2 first holding

members

109 and 209. Fig. 4 is a cross-sectional view schematically showing a probe according to a modification of the embodiment, as in fig. 3. In the example of fig. 4, the first holding

members

109 and 209 are disposed radially about the axial center of the peripheral wall 102a of the shield conductor 101, in other words, about the central conductor 106. Specifically, the first holding

members

109 and 209 are arranged linearly.

The first holding member 109 is the same as that of the embodiment. The first holding member 209 has a shaft portion 109a and an engagement portion 109b, and further has 2 legs 209c integrally at the tip of the shaft portion 109a, as in the first holding member 109. In the example of fig. 4, the 2 legs 209c form a V-shaped cross section spreading out in a fan shape as the distance from the shaft portion 109a increases. Each leg 209c may have a rod-like shape or a plate-like shape. The center conductor 106 is engaged with and held by the respective leg portions 209c between the 2 leg portions 209 c. Thus, the center conductor 106 is held at 3 points by the tip of the shaft portion 109a of the first holding member 109 and the 2 leg portions 209c of the first holding member 209.

For example, in the probe 100 according to the embodiment, the first holding member 109 is screwed to the peripheral wall 102a of the shield conductor 101 and is moved from the peripheral wall 102a in an extensible manner by rotating a screw, but the configuration of moving the first holding member 109 is not limited thereto and may be any configuration. For example, the first holding member 109 may be provided slidably with respect to the peripheral wall 102a, and may be biased toward the axial center of the peripheral wall 102a by a biasing member such as a spring. The biasing member may be disposed inside the shield conductor 101 or may be disposed outside.

For example, in the probe 100 according to the embodiment, the first holding member is not limited to the configuration having the shaft portion 109 a. The first holding member may be configured to extend from the peripheral wall 102a of the shield conductor 101 to the central conductor 106 and hold the central conductor 106 in at least 1 direction. For example, the first holding member may be a plate-like member or a cylindrical member.

The present invention can be used for a device for measuring the electrical impedance of a sample body in various temperature environments.

Description of the symbols

1 temperature adjusting device

2 impedance measuring device

4 electric connector

10 sample body

100 detector

101 shielded conductor (first electrode)

102a peripheral wall (second wall part)

103a peripheral wall (second wall part)

103b bottom wall (first wall)

104 enclosed space

105 detector connector

106 center conductor (second electrode)

107 force application component

109, 209 first holding member

110 inert gas

Claims

1. A probe is used for measuring the electrical impedance of a test sample body,

the probe is provided with:

a first electrode having a hollow structure and a closed space for accommodating a sample body; and

a second electrode extending within the enclosed space and insulated from the first electrode,

the second electrode extending with a space from a wall of the first electrode and sandwiching the sample body with the wall,

the enclosed space is either vacuum or filled with an inert gas.

2. The detector as set forth in claim 1, wherein,

the probe is further provided with:

an insulating holding member for holding the second electrode with respect to the first electrode,

the wall portion includes a first wall portion and a second wall portion, the first wall portion and the second electrode sandwich the sample body therebetween, the second wall portion extends so as to leave a space from the second electrode,

the holding member extends from the second wall portion to the second electrode, and holds the second electrode at least in one direction.

3. The detector as set forth in claim 2, wherein,

at least two of the holding members are disposed radially from the second electrode toward the second wall portion.

4. The detector of claim 2 or 3,

the holding member is capable of extending and contracting from the second wall portion.

5. The detector of any one of claims 1 to 4,

the second electrode is provided so as to be slidable in a direction approaching the first wall portion and a direction separating from the first wall portion.

6. A detector as claimed in claim 5, wherein,

the probe is further provided with:

and a biasing member that biases the second electrode toward the first wall portion.

7. The detector of any one of claims 1 to 6,

the probe is further provided with:

and a probe connector which electrically connects the first electrode and the second electrode to an impedance measuring device, respectively, and which is detachably connected to an electrical connector of the impedance measuring device.