CN111218217A - High-stability silicon oil-based polishing solution - Google Patents

High-stability silicon oil-based polishing solution Download PDF

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CN111218217A
CN111218217A CN202010221256.0A CN202010221256A CN111218217A CN 111218217 A CN111218217 A CN 111218217A CN 202010221256 A CN202010221256 A CN 202010221256A CN 111218217 A CN111218217 A CN 111218217A
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particles
thixotropic agent
magnetorheological fluid
water
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不公告发明人
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Dalian Shengduo Education Consulting Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents

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  • Organic Chemistry (AREA)
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
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Abstract

The invention relates to a high-stability silicon oil-based polishing solution, and belongs to the field of polishing. The high-stability silicon oil-based polishing solution is characterized by comprising magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 20-75% of silicone oil, 3-8% of thixotropic agent, 0-2% of antioxidant, 0-3% of lubricant and 40-70% of carbonyl iron powder, wherein the proportion of the abrasive to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1-2: 10. The invention provides a polishing agent, which consists of a magnetorheological fluid base fluid and an abrasive, wherein a thixotropic agent used for the magnetorheological fluid is provided by the method of the invention, and the SiO prepared by the method of the invention2Magnetic SiO of nano particle thixotropic agent in core-shell structure2The nano particles are used as main raw materials, the thixotropic agent has certain magnetism, and the corresponding magnetism is weaker because the magnetic core is smaller.

Description

High-stability silicon oil-based polishing solution
Technical Field
The invention relates to a high-stability silicon oil-based polishing solution, and belongs to the field of polishing.
Background
With the rapid development of various industries, the requirements for smooth surfaces of chip processing, precision device processing, special-shaped part processing and the like are higher and higher, the main mode for obtaining the smooth surfaces is polishing, and currently, polishing methods widely used include mechanical polishing, chemical mechanical polishing and the like. Some of these polishing methods are suitable only for planar planarization polishing, but not for polishing curved workpieces. The polishing mode that can be used to the curved surface also respectively has its problem, for example the used liquid of chemical polishing is mostly corrosive liquid, has certain damage etc. to equipment.
The magnetorheological fluid is a novel artificial intelligent material, the rheological property of the material can be controllably, reversibly and continuously and rapidly changed under the condition of a magnetic field, and the magnetorheological fluid can be widely applied to various fields of civil engineering, machining, automobile engineering, aerospace engineering and the like. Magnetorheological fluids are a suspension system formed by magnetic particles dispersed in a liquid matrix. Under the action of an external magnetic field, magnetic particles in the magnetorheological fluid are arranged into long chains, so that liquid is instantly converted into solid with certain yield strength, and after the magnetic field is removed, the magnetorheological fluid is recovered into liquid.
The particle size of the suspension phase (magnetic particles) in the magnetorheological fluid suspension system is larger, the density is higher, and the density is generally more than 5 times of that of the medium, so that the suspended particles are easy to settle, agglomerate and deteriorate in the suspension system. To solve the above problems, various methods have been provided in the prior art, one of which is directed to the processing of the magnetic particles themselves, such as loading the particles on a nanosheet to reduce the density of the overall magnetic particles; or the magnetic particles are made into a hollow structure to reduce the density of the magnetic particles, so as to achieve the effect of anti-sedimentation. Another method is to add wetting agents, thixotropic agents, and other external agents to the whole suspension system to prevent the magnetic particles from settling and agglomerating, wherein the wetting agents prevent agglomeration and flocculation of the particles by increasing steric hindrance between the particles, and such materials have weak anti-settling effects although they can prevent flocculation of the particles.
Disclosure of Invention
The invention aims to provide a high-stability silicon oil-based polishing solution, which consists of magnetorheological fluid and an abrasive, and simultaneously provides SiO2Preparation method of nano particle thixotropic agent and SiO prepared by using method2The nano particle thixotropic agent can effectively improve the sedimentation problem of the magnetic particles in the magnetorheological fluid, and does not hinder the chain formation of the magnetic particles.
The high-stability silicon oil-based polishing solution comprises magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 20-75% of silicone oil, 3-8% of thixotropic agent, 0-2% of antioxidant, 0-3% of lubricant, 40-70% of carbonyl iron powder,
the thixotropic agent is prepared by the following method, and comprises the following process steps:
s1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1:1 to 5 are uniformly dispersed in toluene, and react for 1 to 3 days at 50 to 90 ℃,separating solid, washing and drying to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 5-20; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 50-200 mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing for 2-24 h at 80-100 ℃, separating and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nanoparticles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is (1-10): 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 0.5 to 2, stirring and reacting for 0.5 to 12 hours at the temperature of between 20 and 70 ℃, washing and drying to obtain SiO2A thixotropic agent of nano-particles,
in the steps S1 and S2, the magnetic SiO2The nanoparticles being of Fe3O4The nano particles are used as cores, and a layer of SiO is coated on the cores2Layer, magnetic SiO2The particle diameter of the nano particles is 20-25 nm, and Fe3O4The particle size of the nanoparticle core is 6-8 nm.
Preferably, the magnetorheological fluid consists of the following components in percentage by mass: 20-75% of silicone oil, 3-8% of thixotropic agent, 0.1-2% of antioxidant, 1-3% of lubricant and 40-70% of carbonyl iron powder.
Preferably, the lubricant is graphite; the antioxidant is sodium benzoate; the silicone oil is dimethyl silicone oil or diethyl silicone oil.
Preferably, the abrasive is at least one of diamond particles, diamond-like particles, cubic boron nitride particles, and zirconia particles.
Preferably, the particle size of the abrasive particles is 0.5-10 microns.
The modified SiO prepared by the method of the invention2The particle size of the nanoparticle thixotropic agent is 40-150 nm.
Preferably, the magnetic SiO2The nano particles are prepared by the following method:
FeCl is added2With FeCl3Dissolving in water, adding polyethylene glycol, adding 25% ammonia water into the solution under the nitrogen atmosphere until the pH value of the solution is 10-12, stirring and reacting for 1-24 h at the temperature of 60-80 ℃, washing and drying to obtain Fe3O4Nanoparticles of which FeCl2With FeCl3The molar ratio is 1: 1.6-2, FeCl2The proportion of FeCl to water is 0.004mol:100mL2The mass ratio of the polyethylene glycol to the polyethylene glycol is 1: 1-10;
mixing Fe3O4Uniformly dispersing the nano particles in 75% ethanol water solution, sequentially adding 25% ammonia water and tetraethyl silicate, stirring at room temperature for reaction for 12-24 h, separating a product, washing and drying to obtain magnetic SiO2Nanoparticles of, wherein Fe3O4The ratio of the nano particles to the 75% ethanol aqueous solution is 0.1-0.4 g:100mL, and the volume ratio of the 25% ammonia water to the 75% ethanol aqueous solution is 1-5: 100; the volume ratio of the tetraethyl silicate to the 75% ethanol aqueous solution is 2-4: 100.
Preferably, in the step S1, the magnetic SiO is coated2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2, uniformly dispersing in toluene; the magnetic SiO2The mass ratio of the nanoparticles to the toluene is 1: 50-200, preferably 1: 100.
Preferably, the step S1, reflux reaction 2d at 75 ℃.
Preferably, in the step S2, the magnetic SiO is coated21-2 g of nano particles: 100mL was uniformly dispersed in water.
Preferably, in the step S2, the hydrolysate solution is mixed with the dispersion, and then heated and refluxed at 90 ℃ for 12 hours.
Preferably, the step S3, SiO2The mass ratio of the total amount of the nanoparticles to the toluene is 1: 50-200, preferably 1: 100.
The invention has the beneficial effects that: the invention provides a polishing agent, which consists of a magnetorheological fluid base fluid and an abrasive, wherein a thixotropic agent used for the magnetorheological fluid is provided by the method of the invention, and the SiO prepared by the method of the invention2Nano particleMagnetic SiO with core-shell structure for sub-thixotropic agent2The nano particles are used as main raw materials, the thixotropic agent has certain magnetism, and the corresponding magnetism is weaker because the magnetic core is smaller. Therefore, under the condition of no external magnetic field, the SiO of the outer layer of the thixotropic agent of the invention2A network structure is formed in a suspension system to prevent the agglomeration and sedimentation of magnetic particles; under the action of an external magnetic field, SiO with certain magnetism2The nanoparticle thixotropic agent does not interfere with the chaining of the magnetic particles. Meanwhile, the invention is used for preparing magnetic SiO with a core-shell structure2The nanoparticles are modified and connected, on the one hand, to obtain SiO2The nanoparticle thixotropic agent has an amphiphilic property and can be used in various media; on the other hand, SiO alone2After the nano particles are connected, a space network structure is easier to form in the magnetorheological fluid, and a better anti-sedimentation effect is exerted.
Detailed Description
In the following examples 1 to 4, the magnetic SiO2The nano particles are prepared by the following method: FeCl is added2With FeCl3Dissolving in water, adding polyethylene glycol, adding 25% ammonia water into the solution under the atmosphere of nitrogen till the pH of the solution is 10, stirring and reacting for 10 hours at the temperature of 60-80 ℃, washing and drying to obtain Fe3O4Nanoparticles of which FeCl2With FeCl3FeCl at a molar ratio of 1:1.82The proportion of FeCl to water is 0.004mol:100mL2The mass ratio of the polyethylene glycol to the polyethylene glycol is 1: 5;
mixing Fe3O4Uniformly dispersing the nano particles in 75% ethanol water solution, sequentially adding 25% ammonia water and tetraethyl silicate, stirring at room temperature for reaction for 12h, separating the product, washing and drying to obtain magnetic SiO2Nanoparticles of, wherein Fe3O4The ratio of the nano particles to the 75% ethanol aqueous solution is 0.25g:100mL, and the volume ratio of 25% ammonia water to 75% ethanol aqueous solution is 4: 100; the volume ratio of tetraethyl silicate to 75% aqueous ethanol was 3.3: 100.
The magnetic SiO obtained2The nanoparticles being of Fe3O4The nano particles are used as cores, and a layer of SiO is coated on the cores2Layer, magnetic SiO2The particle diameter of the nano particles is about 21.7nm, Fe3O4The particle size of the nanoparticle core is about 7 nm.
In the examples described below, the abrasive is diamond particles with an average particle size of 5 microns; the lubricant is graphite; the antioxidant is sodium benzoate.
Example 1
S1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2 is evenly dispersed in toluene, reacts for 2d at the temperature of 75 ℃, is separated into solid, is washed and dried to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 10; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 100mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing at 90 ℃ for 12h, separating, and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nano particles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is 2.5: 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1:1 is evenly dispersed in toluene, stirred and reacted for 2 hours at the temperature of 40 ℃, washed and dried to obtain SiO2A nanoparticle thixotropic agent, the thixotropic agent having an average particle size of about 91 nm.
Adding the thixotropic agent and the carbonyl iron powder into the base liquid, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 4.0%. Compared with a system (a comparison system, 60% of dimethyl silicone oil and 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns)) which does not contain the thixotropic agent, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 2.1% under the action of the same magnetic field strength in a system (55% of dimethyl silicone oil, 5% of thixotropic agent and 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns)) containing the thixotropic agent.
The high-stability silicon oil-based polishing solution comprises magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 55% of dimethyl silicone oil, 5% of thixotropic agent, 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), and the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
Uniformly dispersing abrasive particles in magnetorheological fluid to form polishing solution, applying the polishing solution to polishing of a curved surface workpiece, and performing the polishing in a magnetorheological polishing machine, wherein the polishing is specifically as follows: immersing a 316L stainless steel curved surface workpiece to be processed into polishing liquid, controlling the workpiece to rotate at the speed of 400r/min by using a control device, applying a magnetic field with the strength of 0.8T to the polishing liquid, and polishing for 30min, wherein the surface roughness Ra of the workpiece before the polishing liquid is processed is 4.35nm, and the surface roughness Ra of the workpiece after the polishing liquid is 1.03 nm.
Comparative example 1
The magnetorheological fluid consists of the following components in percentage by mass: 55% of dimethyl silicone oil and a thixotropic agent (common SiO with the average particle size of 90-100 nm)2Nano particles) 5 percent, and carbonyl iron powder (spherical particles with the average particle size of 3-5 microns) 40 percent. Adding the thixotropic agent and the carbonyl iron powder into the dimethyl silicone oil, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 10.3%. Compared with a system (a comparison system, 50% of water and 50% of carbonyl iron powder) which does not contain the thixotropic agent, the system containing the thixotropic agent has the advantages that under the action of the same magnetic field intensity, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 12.8% compared with that of a target system.
Example 2
S1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2 is evenly dispersed in toluene, reacts for 2d at the temperature of 75 ℃, is separated into solid, is washed and dried to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 10; magnetic SiO2Nano meterThe ratio of particles to particles is 1 g: uniformly dispersing 100mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing at 90 ℃ for 12h, separating, and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nano particles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is 2.5: 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 0.5 is evenly dispersed in toluene, stirred and reacted for 2 hours at the temperature of 65 ℃, washed and dried to obtain SiO2A nanoparticle thixotropic agent, the thixotropic agent having an average particle size of about 123 nm.
Adding the thixotropic agent and the carbonyl iron powder into the base liquid, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 5.4%. Compared with a system (a comparison system, 60% of dimethyl silicone oil and 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns)) which does not contain the thixotropic agent, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 1.8% under the action of the same magnetic field strength in a system (55% of dimethyl silicone oil, 5% of thixotropic agent and 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns)) containing the thixotropic agent.
The high-stability silicon oil-based polishing solution comprises magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 55% of dimethyl silicone oil, 5% of thixotropic agent, 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), and the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
The polishing solution is used for polishing a curved surface workpiece, and the polishing is carried out in a magnetorheological polishing machine, and specifically comprises the following steps: immersing a 316L stainless steel curved surface workpiece to be processed into polishing liquid, controlling the workpiece to rotate at the speed of 400r/min by using a control device, applying a magnetic field with the strength of 0.8T to the polishing liquid, and polishing for 30min, wherein the surface roughness Ra of the workpiece before the polishing liquid is processed is 4.35nm, and the surface roughness Ra of the workpiece after the polishing liquid is 1.16 nm.
Example 3
S1, mixing the magnetic SiO2Nanoparticles andthe mass ratio of the benzyl trichlorosilane is 1: 2 is evenly dispersed in toluene, reacts for 2d at the temperature of 75 ℃, is separated into solid, is washed and dried to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 10; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 100mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing at 90 ℃ for 12h, separating, and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nano particles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is 2.5: 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 2 is evenly dispersed in toluene, stirred and reacted for 2 hours at the temperature of 25 ℃, washed and dried to obtain SiO2A nanoparticle thixotropic agent, the thixotropic agent having an average particle size of about 56 nm.
Adding the thixotropic agent and the carbonyl iron powder into the base solution, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 2.8%. Compared with a system (a comparison system, 60% of dimethyl silicone oil and 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns)) which does not contain the thixotropic agent, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 2.5% under the action of the same magnetic field strength in a system (55% of dimethyl silicone oil, 5% of thixotropic agent and 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns)) containing the thixotropic agent.
The high-stability silicon oil-based polishing solution comprises magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 55% of dimethyl silicone oil, 5% of thixotropic agent, 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), and the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
The polishing solution is used for polishing a curved surface workpiece, and the polishing is carried out in a magnetorheological polishing machine, and specifically comprises the following steps: immersing a 316L stainless steel curved surface workpiece to be processed into polishing liquid, controlling the workpiece to rotate at the speed of 400r/min by using a control device, applying a magnetic field with the strength of 0.8T to the polishing liquid, and polishing for 30min, wherein the surface roughness Ra of the workpiece before the polishing liquid is processed is 4.35nm, and the surface roughness Ra of the workpiece after the polishing liquid is 1.44 nm.
Example 4
The other points are the same as in example 1, except that,
adding a thixotropic agent and carbonyl iron powder into a base solution, stirring, adding an antioxidant and a lubricant, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 3.6%. Compared with a system (a comparison system, the dimethicone 58%, the carbonyl iron powder (spherical particles with the average particle size of 3-5 microns) 40%, the antioxidant 1% and the lubricant 1%) which does not contain the thixotropic agent, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 1.5% under the action of the same magnetic field strength in a system (a target system, the dimethicone 53%, the thixotropic agent 5%, the carbonyl iron powder (spherical particles with the average particle size of 3-5 microns) 40%, the antioxidant 1% and the lubricant 1%) containing the thixotropic agent.
The high-stability silicon oil-based polishing solution comprises magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 53% of dimethyl silicone oil, 5% of thixotropic agent, 40% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), 1% of antioxidant and 1% of lubricant, wherein the proportion of the abrasive to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
The polishing solution is used for polishing a curved surface workpiece, and the polishing is carried out in a magnetorheological polishing machine, and specifically comprises the following steps: immersing a 316L stainless steel curved surface workpiece to be processed into polishing liquid, controlling the workpiece to rotate at the speed of 400r/min by using a control device, applying a magnetic field with the strength of 0.8T to the polishing liquid, and polishing for 30min, wherein the surface roughness Ra of the workpiece before the polishing liquid is processed is 4.35nm, and the surface roughness Ra of the workpiece after the polishing liquid is 1.05 nm.

Claims (10)

1. The high-stability silicon oil-based polishing solution is characterized by comprising magnetorheological fluid and an abrasive, wherein the magnetorheological fluid comprises the following components in percentage by mass: 20-75% of silicone oil, 3-8% of thixotropic agent, 0-2% of antioxidant, 0-3% of lubricant, 40-70% of carbonyl iron powder,
the proportion of the abrasive to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1-2: 10,
the thixotropic agent is prepared by the following method, and comprises the following process steps:
s1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 1-5, uniformly dispersing in toluene, reacting at 50-90 ℃ for 1-3 d, separating solid, washing and drying to obtain chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 5-20; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 50-200 mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing for 2-24 h at 80-100 ℃, separating and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nanoparticles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is (1-10): 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 0.5 to 2, stirring and reacting for 0.5 to 12 hours at the temperature of between 20 and 70 ℃, washing and drying to obtain SiO2A thixotropic agent of nano-particles,
in the steps S1 and S2, the magnetic SiO2The nanoparticles being of Fe3O4The nano particles are used as cores, and a layer of SiO is coated on the cores2Layer, magnetic SiO2The particle diameter of the nano particles is 20-25 nm, and Fe3O4The particle size of the nanoparticle core is 6-8 nm.
2. The method according to claim 1, wherein the magnetorheological fluid consists of the following components in percentage by mass: 20-75% of silicone oil, 3-8% of thixotropic agent, 0.1-2% of antioxidant, 1-3% of lubricant and 40-70% of carbonyl iron powder.
3. The method of claim 1, wherein the lubricant is graphite; the antioxidant is sodium benzoate; the silicone oil is dimethyl silicone oil or diethyl silicone oil.
4. The method of claim 1, wherein the abrasive is at least one of diamond particles, diamond-like particles, cubic boron nitride particles, zirconia particles.
5. The method of claim 4, wherein the abrasive particles have a particle size of 0.5 to 10 microns.
6. The method of claim 1, wherein the modified SiO2The particle size of the nanoparticle thixotropic agent is 40-150 nm.
7. The method of claim 1, wherein the magnetic SiO2The nano particles are prepared by the following method:
FeCl is added2With FeCl3Dissolving in water, adding polyethylene glycol, adding 25% ammonia water into the solution under the nitrogen atmosphere until the pH value of the solution is 10-12, stirring and reacting for 1-24 h at the temperature of 60-80 ℃, washing and drying to obtain Fe3O4Nanoparticles of which FeCl2With FeCl3The molar ratio is 1: 1.6-2, FeCl2The proportion of FeCl to water is 0.004mol:100mL2The mass ratio of the polyethylene glycol to the polyethylene glycol is 1: 1-10;
mixing Fe3O4Uniformly dispersing the nano particles in 75% ethanol water solution, sequentially adding 25% ammonia water and tetraethyl silicate, stirring at room temperature for reaction for 12-24 h, separating a product, washing and drying to obtain magnetic SiO2Nanoparticles of, wherein Fe3O4The ratio of the nano particles to 75% ethanol aqueous solution is 0.1-0.4 g:100mL, 25% ammoniaThe volume ratio of the water to the 75% ethanol water solution is 1-5: 100; the volume ratio of the tetraethyl silicate to the 75% ethanol aqueous solution is 2-4: 100.
8. The method as claimed in claim 1, wherein the step S1 is to mix magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2, uniformly dispersing in toluene; the magnetic SiO2The mass ratio of the nanoparticles to the toluene is 1: 50-200, preferably 1: 100.
9. The method of claim 1, wherein the step S1 is performed by refluxing the reaction at 75 ℃ for 2 d.
10. The method as claimed in claim 1, wherein the step S2 is to mix magnetic SiO21-2 g of nano particles: 100mL was uniformly dispersed in water.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112980335A (en) * 2021-03-08 2021-06-18 西北工业大学深圳研究院 Electrorheological polishing solution containing polyion liquid/nano abrasive composite particles and preparation method thereof
CN113150695A (en) * 2020-12-31 2021-07-23 广东电网有限责任公司电力科学研究院 Environment-friendly stainless steel polishing solution

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113150695A (en) * 2020-12-31 2021-07-23 广东电网有限责任公司电力科学研究院 Environment-friendly stainless steel polishing solution
CN112980335A (en) * 2021-03-08 2021-06-18 西北工业大学深圳研究院 Electrorheological polishing solution containing polyion liquid/nano abrasive composite particles and preparation method thereof

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