CN111266938B - Workpiece polishing method - Google Patents

Workpiece polishing method Download PDF

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Publication number
CN111266938B
CN111266938B CN202010221248.6A CN202010221248A CN111266938B CN 111266938 B CN111266938 B CN 111266938B CN 202010221248 A CN202010221248 A CN 202010221248A CN 111266938 B CN111266938 B CN 111266938B
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water
sio
polishing
workpiece
particles
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CN111266938A (en
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不公告发明人
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Pinghu Dingtian Machinery Co.,Ltd.
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Pinghu Dingtian Machinery Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G49/00—Compounds of iron
    • C01G49/02—Oxides; Hydroxides
    • C01G49/08—Ferroso-ferric oxide (Fe3O4)
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/80—Particles consisting of a mixture of two or more inorganic phases
    • C01P2004/82—Particles consisting of a mixture of two or more inorganic phases two phases having the same anion, e.g. both oxidic phases

Abstract

The invention relates to a workpiece polishing method, and belongs to the field of polishing. A workpiece polishing method is characterized in that a workpiece to be processed is immersed into water-based polishing liquid, the workpiece is controlled to rotate at the rotating speed of 300-800 r/min, meanwhile, a magnetic field with the strength of 0.2-2T is applied to the water-based polishing liquid for polishing, the water-based polishing liquid comprises magnetorheological fluid and an abrasive, and the magnetorheological fluid comprises the following components in percentage by mass: 30-80% of water, 3-8% of thixotropic agent, 0-5% of dispersing agent, 0-5% of wetting agent and 20-70% of carbonyl iron powder, wherein the proportion of the grinding material to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1-2: 10. The invention provides a water-based polishing agent and a polishing method by using the polishing agent, and the method is high in polishing efficiency and suitable for processing special-shaped pieces.

Description

Workpiece polishing method
Technical Field
The invention relates to a workpiece polishing method, and belongs to the field of polishing.
Background
With the rapid development of various industries, the requirements for smooth surfaces of chip processing, precision device processing, special-shaped part processing and the like are higher and higher, the main mode for obtaining the smooth surfaces is polishing, and currently, polishing methods widely used include mechanical polishing, chemical mechanical polishing and the like. Some of these polishing methods are suitable only for planar planarization polishing, but not for polishing curved workpieces. The polishing mode that can be used to the curved surface also respectively has its problem, for example the used liquid of chemical polishing is mostly corrosive liquid, has certain damage etc. to equipment.
The magnetorheological fluid is a novel artificial intelligent material, the rheological property of the material can be controllably, reversibly and continuously and rapidly changed under the condition of a magnetic field, and the magnetorheological fluid can be widely applied to various fields of civil engineering, machining, automobile engineering, aerospace engineering and the like. Magnetorheological fluids are a suspension system formed by magnetic particles dispersed in a liquid matrix. Under the action of an external magnetic field, magnetic particles in the magnetorheological fluid are arranged into long chains, so that liquid is instantly converted into solid with certain yield strength, and after the magnetic field is removed, the magnetorheological fluid is recovered into liquid.
The particle size of the suspension phase (magnetic particles) in the magnetorheological fluid suspension system is larger, the density is higher, and the density is generally more than 5 times of that of the medium, so that the suspended particles are easy to settle, agglomerate and deteriorate in the suspension system. To solve the above problems, various methods have been provided in the prior art, one of which is directed to the processing of the magnetic particles themselves, such as loading the particles on a nanosheet to reduce the density of the overall magnetic particles; or the magnetic particles are made into a hollow structure to reduce the density of the magnetic particles, so as to achieve the effect of anti-sedimentation. Another method is to add wetting agents, thixotropic agents, and other external agents to the whole suspension system to prevent the magnetic particles from settling and agglomerating, wherein the wetting agents prevent agglomeration and flocculation of the particles by increasing steric hindrance between the particles, and such materials have weak anti-settling effects although they can prevent flocculation of the particles.
Disclosure of Invention
The invention aims to provide a water-based polishing agent and a polishing method by using the polishing solution, wherein the polishing agent consists of magnetorheological fluid and an abrasive, and simultaneously provides SiO2Preparation method of nano particle thixotropic agent and SiO prepared by using method2The nano particle thixotropic agent can effectively improve the sedimentation problem of the magnetic particles in the magnetorheological fluid, and does not hinder the chain formation of the magnetic particles.
A workpiece polishing method comprises immersing a workpiece to be processed in a water-based polishing solution, rotating the workpiece at a rotation speed of 300-800 r/min while applying a magnetic field having a strength of 0.2-2T to the water-based polishing solution to polish the workpiece,
the water-based polishing solution consists of magnetorheological fluid and an abrasive, wherein the magnetorheological fluid consists of the following components in percentage by mass: 30-80% of water, 3-8% of thixotropic agent, 0-5% of dispersing agent, 0-5% of wetting agent, 20-70% of carbonyl iron powder,
the proportion of the abrasive to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1-2: 10,
the thixotropic agent is prepared by the following method, and comprises the following process steps:
s1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 1-5, uniformly dispersing in toluene, reacting at 50-90 ℃ for 1-3 d, separating solid, washing and drying to obtain chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 5-20; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 50-200 mL of the mixture in water to obtain a dispersion liquid; will hydrolyzeMixing the solution and the dispersion liquid, heating and refluxing for 2-24 h at 80-100 ℃, separating and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nanoparticles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is (1-10): 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 0.5 to 2, stirring and reacting for 0.5 to 12 hours at the temperature of between 20 and 70 ℃, washing and drying to obtain SiO2A thixotropic agent of nano-particles,
in the steps S1 and S2, the magnetic SiO2The nanoparticles being of Fe3O4The nano particles are used as cores, and a layer of SiO is coated on the cores2Layer, magnetic SiO2The particle diameter of the nano particles is 20-25 nm, and Fe3O4The particle size of the nanoparticle core is 6-8 nm.
The polishing is carried out in a magnetorheological polishing machine, which is commercially available or prepared according to methods disclosed in the prior art.
Preferably, a workpiece to be processed is immersed in the water-based polishing solution, the workpiece is controlled to rotate at a rotation speed of 400r/min, and a magnetic field with the strength of 0.5T is applied to the water-based polishing solution to polish for 30 min.
Preferably, the workpiece is made of stainless steel, an inorganic ceramic material and a carbon fiber composite material.
Preferably, the workpiece is in a shape of a flat plate, a curved surface or a special shape.
Preferably, the magnetorheological fluid consists of the following components in percentage by mass: 30-80% of water, 3-8% of thixotropic agent, 1-5% of dispersing agent, 1-5% of wetting agent and 20-70% of carbonyl iron powder.
Preferably, the wetting agent is glycerol, polyethylene glycol; the dispersant is sodium hexametaphosphate.
Preferably, the abrasive is at least one of diamond particles, diamond-like particles, cubic boron nitride particles, and zirconia particles.
Preferably, the particle size of the abrasive particles is 0.5-10 microns.
Hair brushModified SiO prepared by the method2The particle size of the nanoparticle thixotropic agent is 40-150 nm.
Preferably, the magnetic SiO2The nano particles are prepared by the following method:
FeCl is added2With FeCl3Dissolving in water, adding polyethylene glycol, adding 25% ammonia water into the solution under the nitrogen atmosphere until the pH value of the solution is 10-12, stirring and reacting for 1-24 h at the temperature of 60-80 ℃, washing and drying to obtain Fe3O4Nanoparticles of which FeCl2With FeCl3The molar ratio is 1: 1.6-2, FeCl2The proportion of FeCl to water is 0.004mol:100mL2The mass ratio of the polyethylene glycol to the polyethylene glycol is 1: 1-10;
mixing Fe3O4Uniformly dispersing the nano particles in 75% ethanol water solution, sequentially adding 25% ammonia water and tetraethyl silicate, stirring at room temperature for reaction for 12-24 h, separating a product, washing and drying to obtain magnetic SiO2Nanoparticles of, wherein Fe3O4The ratio of the nano particles to the 75% ethanol aqueous solution is 0.1-0.4 g:100mL, and the volume ratio of the 25% ammonia water to the 75% ethanol aqueous solution is 1-5: 100; the volume ratio of the tetraethyl silicate to the 75% ethanol aqueous solution is 2-4: 100.
Preferably, in the step S1, the magnetic SiO is coated2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2, uniformly dispersing in toluene; the magnetic SiO2The mass ratio of the nanoparticles to the toluene is 1: 50-200, preferably 1: 100.
Preferably, the step S1, reflux reaction 2d at 75 ℃.
Preferably, in the step S2, the magnetic SiO is coated21-2 g of nano particles: 100mL was uniformly dispersed in water.
Preferably, in the step S2, the hydrolysate solution is mixed with the dispersion, and then heated and refluxed at 90 ℃ for 12 hours.
Preferably, the step S3, SiO2The mass ratio of the total amount of the nanoparticles to the toluene is 1: 50-200, preferably 1: 100.
The invention has the beneficial effects that: the invention provides a water-based polishing agent and a polishing method using the same, wherein the polishing effect of the method is highHigh efficiency and is suitable for processing special-shaped parts. The polishing agent consists of a magnetorheological fluid base fluid and an abrasive, wherein a thixotropic agent used for the magnetorheological fluid is provided by the method, and the SiO prepared by the method2Magnetic SiO of nano particle thixotropic agent in core-shell structure2The nano particles are used as main raw materials, the thixotropic agent has certain magnetism, and the corresponding magnetism is weaker because the magnetic core is smaller. Therefore, under the condition of no external magnetic field, the SiO of the outer layer of the thixotropic agent of the invention2A network structure is formed in a suspension system to prevent the agglomeration and sedimentation of magnetic particles; under the action of an external magnetic field, SiO with certain magnetism2The nanoparticle thixotropic agent does not interfere with the chaining of the magnetic particles. Meanwhile, the invention is used for preparing magnetic SiO with a core-shell structure2The nanoparticles are modified and connected, on the one hand, to obtain SiO2The nanoparticle thixotropic agent has an amphiphilic property and can be used in various media; on the other hand, SiO alone2After the nano particles are connected, a space network structure is easier to form in the magnetorheological fluid, and a better anti-sedimentation effect is exerted.
Detailed Description
In the following examples 1 to 4, the magnetic SiO2The nano particles are prepared by the following method: FeCl is added2With FeCl3Dissolving in water, adding polyethylene glycol, adding 25% ammonia water into the solution under the atmosphere of nitrogen till the pH of the solution is 10, stirring and reacting for 10 hours at the temperature of 60-80 ℃, washing and drying to obtain Fe3O4Nanoparticles of which FeCl2With FeCl3FeCl at a molar ratio of 1:1.82The proportion of FeCl to water is 0.004mol:100mL2The mass ratio of the polyethylene glycol to the polyethylene glycol is 1: 5;
mixing Fe3O4Uniformly dispersing the nano particles in 75% ethanol water solution, sequentially adding 25% ammonia water and tetraethyl silicate, stirring at room temperature for reaction for 12h, separating the product, washing and drying to obtain magnetic SiO2Nanoparticles of, wherein Fe3O4The ratio of the nano particles to the 75% ethanol aqueous solution is 0.25g:100mL, and the volume ratio of 25% ammonia water to 75% ethanol aqueous solution is 4: 100; tetraethyl silicate and 75% ethanol waterThe volume ratio of the solutions was 3.3: 100.
The magnetic SiO obtained2The nanoparticles being of Fe3O4The nano particles are used as cores, and a layer of SiO is coated on the cores2Layer, magnetic SiO2The particle diameter of the nano particles is about 21.7nm, Fe3O4The particle size of the nanoparticle core is about 7 nm.
In the examples described below, the abrasive is diamond particles with an average particle size of 5 microns; the wetting agent is polyethylene glycol; the dispersant is sodium hexametaphosphate.
Example 1
S1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2 is evenly dispersed in toluene, reacts for 2d at the temperature of 75 ℃, is separated into solid, is washed and dried to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 10; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 100mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing at 90 ℃ for 12h, separating, and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nano particles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is 2.5: 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1:1 is evenly dispersed in toluene, stirred and reacted for 2 hours at the temperature of 40 ℃, washed and dried to obtain SiO2A nanoparticle thixotropic agent, the thixotropic agent having an average particle size of about 91 nm.
Adding the thixotropic agent and the carbonyl iron powder into the base liquid, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 5.1%. Compared with a system (a comparison system, 50% of water and 50% of carbonyl iron powder) which does not contain the thixotropic agent, the system containing the thixotropic agent (a target system, 45% of water, 5% of thixotropic agent and 50% of carbonyl iron powder) has the advantages that under the action of the same magnetic field strength, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 2.3% compared with that of the target system.
Adding a thixotropic agent and carbonyl iron powder into a base solution, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain magnetorheological fluid, wherein the magnetorheological fluid comprises the following components: 45% of water, 5% of thixotropic agent and 50% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns).
The water-based polishing solution consists of magnetorheological fluid and an abrasive, wherein the magnetorheological fluid consists of the following components in percentage by mass: 45% of water, 5% of thixotropic agent, 50% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), and the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
Uniformly dispersing abrasive particles in magnetorheological fluid to form polishing solution, applying the polishing solution to polishing of a curved surface workpiece, and performing the polishing in a magnetorheological polishing machine, wherein the polishing is specifically as follows: the 316L stainless steel curved surface workpiece to be processed is immersed into the polishing solution, the control device is utilized to control the workpiece to rotate at the speed of 400r/min, meanwhile, a magnetic field with the strength of 0.5T is applied to the magnetorheological fluid, the polishing is carried out for 30min, the surface roughness Ra of the workpiece before the polishing solution treatment is 4.35nm, and the surface roughness Ra of the workpiece after the polishing treatment is 1.29 nm.
Comparative example 1
The magnetorheological fluid consists of the following components in percentage by mass: 45% of water and a thixotropic agent (common SiO with the average particle size of 90-100 nm)2Nano particles) 5% and carbonyl iron powder 50%. Adding the thixotropic agent and the carbonyl iron powder into water, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 12.9%. Compared with a system (a comparison system, 50% of water and 50% of carbonyl iron powder) which does not contain the thixotropic agent, the system containing the thixotropic agent has the advantages that under the action of the same magnetic field intensity, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 14.6% compared with that of a target system.
Example 2
S1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2 is evenly dispersed in toluene, reacts for 2 days at the temperature of 75 ℃, separates solid, washes, dries,to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 10; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 100mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing at 90 ℃ for 12h, separating, and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nano particles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is 2.5: 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 0.5 is evenly dispersed in toluene, stirred and reacted for 2 hours at the temperature of 65 ℃, washed and dried to obtain SiO2A nanoparticle thixotropic agent, the thixotropic agent having an average particle size of about 123 nm.
Adding the thixotropic agent and the carbonyl iron powder into the base solution, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 7.2%. Compared with a system (a comparison system, 50% of water and 50% of carbonyl iron powder) which does not contain the thixotropic agent, the system containing the thixotropic agent (a target system, 45% of water, 5% of thixotropic agent and 50% of carbonyl iron powder) has the advantages that under the action of the same magnetic field strength, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 1.8% compared with that of the target system.
The water-based polishing solution consists of magnetorheological fluid and an abrasive, wherein the magnetorheological fluid consists of the following components in percentage by mass: 45% of water, 5% of thixotropic agent, 50% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), and the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
The polishing solution is used for polishing a curved surface workpiece, and the polishing is carried out in a magnetorheological polishing machine, and specifically comprises the following steps: the 316L stainless steel curved surface workpiece to be processed is immersed into the polishing solution, the control device is utilized to control the workpiece to rotate at the speed of 400r/min, meanwhile, a magnetic field with the strength of 0.5T is applied to the magnetorheological fluid, the polishing is carried out for 30min, the surface roughness Ra of the workpiece before the polishing solution treatment is 4.35nm, and the surface roughness Ra of the workpiece after the polishing treatment is 1.22 nm.
Example 3
S1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 2 is evenly dispersed in toluene, reacts for 2d at the temperature of 75 ℃, is separated into solid, is washed and dried to obtain the chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 10; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 100mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing at 90 ℃ for 12h, separating, and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nano particles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is 2.5: 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 2 is evenly dispersed in toluene, stirred and reacted for 2 hours at the temperature of 25 ℃, washed and dried to obtain SiO2A nanoparticle thixotropic agent, the thixotropic agent having an average particle size of about 56 nm.
Adding the thixotropic agent and the carbonyl iron powder into the base liquid, stirring, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 3.9%. Compared with a system (a comparison system, 50% of water and 50% of carbonyl iron powder) which does not contain the thixotropic agent, the system containing the thixotropic agent (a target system, 45% of water, 5% of thixotropic agent and 50% of carbonyl iron powder) has the advantages that under the action of the same magnetic field strength, the yield stress of the magnetorheological fluid under a magnetic field is reduced by 2.7% compared with that of the target system.
The water-based polishing solution consists of magnetorheological fluid and an abrasive, wherein the magnetorheological fluid consists of the following components in percentage by mass: 45% of water, 5% of thixotropic agent, 50% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), and the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
The polishing solution is used for polishing a curved surface workpiece, and the polishing is carried out in a magnetorheological polishing machine, and specifically comprises the following steps: the 316L stainless steel curved surface workpiece to be processed is immersed into the polishing solution, the control device is utilized to control the workpiece to rotate at the speed of 400r/min, meanwhile, a magnetic field with the strength of 0.5T is applied to the magnetorheological fluid, the polishing is carried out for 30min, the surface roughness Ra of the workpiece before the polishing solution is processed is 4.35nm, and the surface roughness Ra of the workpiece after the polishing is 1.36 nm.
Example 4
The other points are the same as in example 1, except that,
adding a thixotropic agent and carbonyl iron powder into a base solution, stirring, adding a dispersing agent and a wetting agent, and performing ultrasonic dispersion until a uniform suspension system is obtained to obtain the magnetorheological fluid, wherein the 7d settlement rate of the magnetorheological fluid is 3.3%. Compared with a system (a comparison system, 46 percent of water, 50 percent of carbonyl iron powder, 2 percent of dispersing agent and 2 percent of wetting agent) which does not contain the thixotropic agent, the yield stress of the magnetorheological fluid under the magnetic field is reduced by 1.7 percent under the same magnetic field intensity action in a system (a target system, 41 percent of water, 5 percent of thixotropic agent, 50 percent of carbonyl iron powder, 2 percent of dispersing agent and 2 percent of wetting agent) containing the thixotropic agent.
The water-based polishing solution consists of magnetorheological fluid and an abrasive, wherein the magnetorheological fluid consists of the following components in percentage by mass: 41% of water, 5% of thixotropic agent, 50% of carbonyl iron powder (spherical particles with the average particle size of 3-5 microns), 2% of dispersing agent and 2% of wetting agent, wherein the proportion of the grinding material to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1: 10.
The polishing solution is used for polishing a curved surface workpiece, and the polishing is carried out in a magnetorheological polishing machine, and specifically comprises the following steps: the 316L stainless steel curved surface workpiece to be processed is immersed into the polishing solution, the control device is utilized to control the workpiece to rotate at the speed of 400r/min, meanwhile, a magnetic field with the strength of 0.5T is applied to the magnetorheological fluid, the polishing is carried out for 30min, the surface roughness Ra of the workpiece before the polishing solution treatment is 4.35nm, and the surface roughness Ra of the workpiece after the polishing treatment is 1.27 nm.

Claims (8)

1. A workpiece polishing method is characterized in that a workpiece to be processed is immersed in a water-based polishing solution, the workpiece is controlled to rotate at a rotating speed of 300-800 r/min, a magnetic field with the strength of 0.2-2T is applied to the water-based polishing solution for polishing,
the water-based polishing solution consists of magnetorheological fluid and an abrasive, wherein the magnetorheological fluid consists of the following components in percentage by mass: 41-45% of water, 3-8% of thixotropic agent, 0-5% of dispersing agent, 0-5% of wetting agent and 50% of carbonyl iron powder, wherein the sum of the mass percentages of the components is 100%, and the proportion of the grinding material to the magnetorheological fluid is as follows: the mass ratio of the grinding material to the carbonyl iron powder is 1-2: 10,
the thixotropic agent is prepared by the following method, and comprises the following process steps:
s1, mixing the magnetic SiO2The mass ratio of the nano particles to the benzyl trichlorosilane is 1: 1-5, uniformly dispersing in toluene, reacting at 50-90 ℃ for 1-3 d, separating solid, washing and drying to obtain chlorobenzyl grafted SiO2Nanoparticles;
s2, adding N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane into water, and hydrolyzing at pH = 10-11 to obtain a hydrolysate solution, wherein the mass ratio of N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane to water is 1: 5-20; magnetic SiO2The ratio of the nano particles to the total weight of 1 g: uniformly dispersing 50-200 mL of the mixture in water to obtain a dispersion liquid; mixing the hydrolysate solution and the dispersion liquid, heating and refluxing for 2-24 h at 80-100 ℃, separating and drying to obtain amino modified SiO2Nanoparticles of, among others, magnetic SiO2The mass ratio of the nanoparticles to the N- (2-aminoethyl) -3-aminopropylmethyldiethoxysilane is (1-10): 1;
s3, chloro-benzyl grafted SiO2Nanoparticle and amino modified SiO2The mass ratio of the nano particles is 1: 0.5 to 2, stirring and reacting for 0.5 to 12 hours at the temperature of between 20 and 70 ℃, washing and drying to obtain SiO2A thixotropic agent of nano-particles,
in the steps S1 and S2, the magnetic SiO2The nanoparticles being of Fe3O4The nano particles are used as cores, and a layer of SiO is coated on the cores2Layer, magnetic SiO2The particle diameter of the nano particles is 20-25 nm, and Fe3O4Nano particleThe particle size of the sub-cores is 6-8 nm.
2. The method as set forth in claim 1, wherein the workpiece to be processed is immersed in the water-based polishing liquid, and the workpiece is polished for 30min while being rotated at a rotation speed of 400r/min while applying a magnetic field having a strength of 0.5T to the water-based polishing liquid.
3. The method of claim 1, wherein the workpiece is made of stainless steel, an inorganic ceramic material, or a carbon fiber composite material.
4. The method of claim 1, wherein the workpiece is shaped as a flat plate or a curved surface.
5. The method of claim 1, wherein the wetting agent is polyethylene glycol; the dispersant is sodium hexametaphosphate.
6. The method of claim 1, wherein the abrasive is at least one of diamond particles, diamond-like particles, cubic boron nitride particles, zirconia particles.
7. The method of claim 6, wherein the abrasive has a particle size of 0.5 to 10 microns.
8. The method of claim 1, wherein the magnetic SiO2The nano particles are prepared by the following method:
FeCl is added2With FeCl3Dissolving in water, adding polyethylene glycol, adding 25% ammonia water into the solution under the nitrogen atmosphere until the pH value of the solution is 10-12, stirring and reacting for 1-24 h at the temperature of 60-80 ℃, washing and drying to obtain Fe3O4Nanoparticles of which FeCl2With FeCl3The molar ratio is 1: 1.6-2, FeCl2The proportion of FeCl to water is 0.004mol:100mL2The mass ratio of the polyethylene glycol to the polyethylene glycol is 1: 1-10;
mixing Fe3O4Uniformly dispersing the nano particles in 75% ethanol water solution, sequentially adding 25% ammonia water and tetraethyl silicate, stirring at room temperature for reaction for 12-24 h, separating a product, washing and drying to obtain magnetic SiO2Nanoparticles of, wherein Fe3O4The ratio of the nano particles to the 75% ethanol aqueous solution is 0.1-0.4 g:100mL, and the volume ratio of the 25% ammonia water to the 75% ethanol aqueous solution is 1-5: 100; the volume ratio of the tetraethyl silicate to the 75% ethanol aqueous solution is 2-4: 100.
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US8271120B2 (en) * 2009-08-03 2012-09-18 Lawrence Livermore National Security, Llc Method and system for processing optical elements using magnetorheological finishing
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