CN111211151B - Functional groove manufacturing method, display panel and manufacturing method of display panel - Google Patents
Functional groove manufacturing method, display panel and manufacturing method of display panel Download PDFInfo
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- CN111211151B CN111211151B CN202010033782.4A CN202010033782A CN111211151B CN 111211151 B CN111211151 B CN 111211151B CN 202010033782 A CN202010033782 A CN 202010033782A CN 111211151 B CN111211151 B CN 111211151B
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
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Abstract
The invention relates to the technical field of display, and provides a method for manufacturing a functional slot, which comprises the following steps: providing a substrate; coating a layer of organic glue on the substrate to form an organic glue layer; patterning the organic adhesive layer to enable the organic adhesive layer to form a first groove; depositing metal in the first groove to form a metal layer; and removing the organic glue layer, wherein the metal layer forms a second groove, the projection of the first bottom edge of the cross section of the second groove, which is far away from the substrate, on the substrate is positioned in the projection of the second bottom edge, which is close to the substrate, on the substrate, the end point of the first bottom edge is not overlapped with the projection of the end point of the second bottom edge on the substrate, and the second groove is a functional groove. The embodiment of the invention also provides a display panel and a manufacturing method thereof.
Description
Technical Field
The invention relates to the technical field of display, in particular to a manufacturing method of a functional groove, a display panel and a manufacturing method of the display panel.
Background
An Organic Light Emitting Diode (OLED) display device has characteristics of self-luminescence, wide viewing angle, high Light Emitting efficiency, low power consumption, fast response time, and good low temperature characteristics, and is widely used in the high performance display field.
After the display area of the OLED display panel is perforated, the OLED device is sensitive to external factors such as moisture and oxygen, the stability of the OLED device contacting the moisture and oxygen may be deteriorated, the reliability of the package may be affected, and the lifetime of the device may be reduced. How to manufacture a display panel with good stability and reliability has been a constant challenge.
Disclosure of Invention
In view of the above, the present invention provides a method for manufacturing a functional slot, a display panel and a method for manufacturing the same, which can simplify the process, improve the quality of the functional slot, and further improve the packaging reliability of the display panel.
In order to solve the technical problems, the invention adopts a technical scheme that: a method for manufacturing a functional slot is provided, which comprises the following steps:
providing a substrate;
coating a layer of organic glue on a substrate to form an organic glue layer;
patterning the organic adhesive layer to enable the organic adhesive layer to form a first groove, wherein the projection of the first edge of the cross section of the first groove, which is far away from the substrate, on the substrate covers the projection of the second edge, which is close to the substrate, on the substrate, and the projection of the end point of the first edge and the projection of the end point of the second edge on the substrate are not overlapped;
depositing metal in the first groove to form a metal layer with the surface flush with the surface of the organic glue layer;
and removing the organic glue layer, wherein the metal layer forms a second groove, the projection of the first bottom edge of the cross section of the second groove, which is far away from the substrate, on the substrate is positioned in the projection of the second bottom edge, which is close to the substrate, on the substrate, the endpoint of the first bottom edge and the projection of the endpoint of the second bottom edge on the substrate are not overlapped, and the second groove is a functional groove.
According to the technical scheme, the metal layer can form the functional groove through patterning treatment on the organic glue layer and a metal deposition process, the manufacturing steps are simple, the metal required for manufacturing the functional groove can be only one layer, the functional groove is not easy to damage, the stability of the functional groove can be improved, and the problem that the functional groove cannot be formed on one metal layer directly through dry etching can be solved. According to the manufacturing method of the technical scheme, the multilayer metal layer is not required to be etched through two steps of dry etching and wet etching, the thickness of the organic glue layer is not required to be larger than that of the metal layer, and the thickness of the organic glue layer is the same as that of the metal layer, so that the adopted organic glue layer is thinner and uniform in thickness, is easy to completely remove, and can reduce the risk of organic glue residue; the functional groove manufactured by the embodiment of the invention can be used for the hole opening area of the organic display panel, so that the display functional layer on the metal layer and the display functional layer in the functional groove can not be connected into a whole, and the display functional layer is disconnected, thereby being used for protecting the display functional layer and avoiding the integral failure of the display functional layer. The manufacturing method of the technical scheme of the invention is suitable for the condition of manufacturing the functional groove on any metal layer, and the structural stability of the functional groove is high.
Wherein, carry out the patterning to organic glue layer through the exposure for still include after the organic glue layer forms first recess: and curing the organic adhesive layer. So that the organic glue layer has stable structure.
Wherein depositing metal in the first recess comprises: depositing a metal layer on one side of the patterned organic glue layer, which is far away from the substrate, so that the metal layer at least fills the first groove; and removing the metal outside the first groove by planarization to form a metal layer with the surface flush with the surface of the organic glue layer. And removing the metal outside the first groove by planarization, so that the surface of the planarized metal layer is smooth, and the process steps of depositing the metal layer are easy to control when the metal layer is deposited.
Wherein the removing of the metal outside the first recess by planarization includes removing the metal outside the first recess by a mechanochemical polishing process or an etch-back process. By the two methods, the metal layer after planarization is smooth.
Wherein, the side in the cross section of second recess is straight line or camber line. According to the technical scheme, an included angle between metal of the functional groove and the substrate can be used for depositing water, the deposition amount of the depositing water can be emptied by adjusting the radian of the side edge in the cross plane to be a straight line or an arc, when the deposition amount is large, the invasion time of water vapor is prolonged for a long time, and when the deposition amount is used for protecting the display functional layer in the display panel, the service life of the display functional layer is prolonged. Meanwhile, when the side edge in the cross section of the second groove is a straight line or an arc line, the manufacturing process is easy to control, and the requirement on the manufacturing process is not strict.
Wherein, the thickness of the organic glue layer is the same as that of the metal layer, and preferably, the thickness of the organic glue layer is 1-2 micrometers. The organic glue layer is thin, no residue is left in the organic glue, and a metal layer functional groove meeting the requirement can be manufactured.
Wherein, carrying out patterning treatment on the organic glue layer comprises: and shielding the organic adhesive layer by using a halftone screen dot photomask, and forming the patterned organic adhesive layer through exposure and development so that the organic adhesive layer forms a first groove. The halftone screen dot photomask is used for shielding the organic glue layer, and a first groove with gradient change on the side edge can be formed.
Wherein the base comprises a flexible substrate or a rigid substrate. So that the functional slot can be used for partition protection and encapsulation around the perforated area of the flexible display; the hard substrate is preferably a glass substrate, and the functional groove can also be used for partition protection and encapsulation around an opening area of the hard screen display.
The invention also comprises a second technical scheme: a manufacturing method of a display panel is provided, wherein a metal layer with functional grooves is manufactured on a substrate by adopting the manufacturing method, and the functional grooves are distributed around a preset opening area;
manufacturing a display function layer on the metal layer far away from the substrate, covering the display function layer on the metal layer and filling the display function layer in the function groove, and disconnecting the display function layer in the function groove from the display function layer above the metal layer;
and manufacturing a packaging layer, wherein the packaging layer continuously covers the display function layer.
According to the manufacturing method of the display panel, the manufacturing method of the functional groove is simple, the structure of the functional groove is stable, and the external force resistance is strong, so that when the hole is formed in the preset hole forming area, the functional groove is not easy to damage, the adjacent display functional layers can be disconnected, the adjacent display functional layers are isolated, the packaging strength is enhanced, the crack resistance is enhanced, the large-area crack caused by stress is reduced, and the packaging effect is improved; even if the crack occurs, because the display functional layer at the functional groove is in a disconnected state, the stress action is weakened, and the width of the lateral expansion of the crack is reduced, wherein the lateral direction refers to the direction parallel to the metal layer or the display functional layer; meanwhile, if one or more functional grooves have cracks, water vapor invades from the cracks, and the display functional layer in the functional groove at the crack is influenced by the invasion of the water vapor. If all function grooves have cracks and extend to the position far away from the preset opening area and the position above the metal layer on the function grooves in the transverse direction, the included angle between the metal of the function grooves and the substrate does not form a display function layer, the included angle is a hollow cavity, and when water vapor invades into the function grooves, the water vapor can be deposited in the hollow cavity, so that the invasion time of the water vapor can be delayed, and the service life of the display panel is prolonged.
The functional grooves are annular grooves or arc-shaped grooves, the number of the functional grooves is at least two, and the functional grooves concentrically surround the preset opening area. Through the protection of two-layer or multilayer function groove for the protective effect reaches the best, improves display panel's life-span.
The invention also comprises a third technical scheme: a display panel is manufactured by the manufacturing method of the display panel, and the display panel comprises a substrate, a metal layer with a functional groove, a display functional layer and a packaging layer, wherein the metal layer is positioned on the substrate, and the functional groove is positioned around a preset opening area of the display panel; the display function layer covers the metal layer and is filled in the function groove, and the display function layer positioned in the function groove is disconnected with the display function layer above the metal layer; the packaging layer continuously covers the display functional layer.
The display panel functional groove provided by the embodiment of the invention has a stable structure, and the capability of resisting external force of the display panel is enhanced, for example, the force for resisting the hole is enhanced; the metal layer where the functional groove is located in the embodiment of the invention can be a layer of metal, and the metal layer where the functional groove is located is not easy to peel off when acting on external force, so that the packaging effect can be improved. The functional grooves are arranged, so that the packaging strength is enhanced, and the packaging effect is improved. When cracks appear around the opening area, because the display function layer positioned at the functional groove is in a disconnected state, the stress action is weakened, and the width of the transverse expansion of the cracks is reduced, wherein the transverse direction is parallel to the direction of the metal layer or the display function layer; meanwhile, if one or more functional grooves have cracks, water vapor invades from the cracks, and the display functional layer in the functional groove at the crack is influenced by the invasion of the water vapor. If all function grooves appear crackles and extend to and keep away from in the transverse direction and predetermine the trompil region and when the metal level top on the function groove, because the contained angle department between the metal in function groove and the basement can not form the demonstration functional layer, this contained angle department is the cavity, when steam invades to the function groove, can deposit in the cavity, can delay the time that the steam invaded, very big improvement display panel life-span.
The invention has the beneficial effects that: according to the manufacturing method of the functional groove, the metal layer can form the functional groove through patterning the organic glue layer and a metal deposition process, the manufacturing steps are simple, the manufactured functional groove can be only one metal layer formed by the same material, the functional groove is not easy to damage, the stability of the functional groove can be improved, and the problem that the functional groove cannot be directly manufactured through one metal layer is solved; the functional groove manufactured by the embodiment of the invention can be suitable for the partition protection of the organic display functional layer around the opening area of the display panel, can also be used for the packaging process, and has high structural stability.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a display panel with openings according to the present invention;
FIG. 2 is a schematic structural diagram of a substrate and an organic glue layer according to an embodiment of the invention;
FIG. 3 is a schematic structural diagram of a first embodiment of an organic glue layer and a substrate with a first groove according to the invention;
FIG. 4 is a schematic structural diagram of a second embodiment of an organic glue layer and a substrate with a first groove according to the invention;
FIG. 5 is a schematic structural diagram of a third embodiment of an organic glue layer and a substrate with a first groove according to the invention;
FIG. 6 is a schematic structural diagram of a substrate, an organic glue layer and a metal layer according to an embodiment of the invention;
FIG. 7 is a schematic structural diagram of a functional tank according to a first embodiment of the present invention;
FIG. 8 is a schematic structural view of a functional tank according to a second embodiment of the present invention;
FIG. 9 is a schematic structural view of a functional tank according to a third embodiment of the present invention;
FIG. 10 is a schematic structural diagram of another embodiment of a substrate and an organic glue layer according to the invention;
FIG. 11 is a schematic structural diagram of a fourth embodiment of an organic glue layer and a substrate with a first groove according to the invention;
FIG. 12 is a schematic structural diagram of another embodiment of a substrate, an organic glue layer and a metal layer according to the invention;
FIG. 13 is a schematic structural diagram of an embodiment of a planarized metal layer, organic glue layer and substrate according to the present invention;
FIG. 14 is a schematic structural view of a functional tank according to a fourth embodiment of the present invention;
FIG. 15 isbase:Sub>A schematic cross-sectional view taken along line A-A of FIG. 1;
fig. 16 is an enlarged structural view of the region B in fig. 15.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
As shown in fig. 1, during an application process of the OLED display panel 10, it is generally necessary to form an opening 20 in a display area of the OLED display panel 10, for example, for the OLED display panel 10 used as a mobile device, a camera, etc. is generally required to be disposed, and the opening 20 needs to be formed in the OLED display panel 10; the OLED display panel 10 in the area adjacent to the opening 20 needs to be encapsulated to prevent the ingress of external elements such as moisture and oxygen to affect the OLED display light emitting cells in the display area. However, in the process of making the opening 20, an external force is required to act on the OLED display panel 10, and the external force easily causes cracks to appear between layers of the OLED display panel 10, and when the cracks spread to the OLED display device area, external factors such as water vapor and oxygen easily enter from the cracks, so that the stability of the OLED device is easily deteriorated, and the service life of the OLED display panel 10 is reduced.
Therefore, in the embodiment of the invention, the functional groove is formed around the region of the opening 20, the OLED device is isolated, and the encapsulation layer 7 is embedded in the functional groove, so that the service life of the OLED display panel 10 is prolonged.
However, when the prior art is used to manufacture a functional slot with an opening width smaller than the bottom width, the prior art generally includes the following steps, step one: two or more metal layers made of different materials are adopted, and a patterned organic adhesive layer is manufactured above the metal layers; bombarding two or more metal layers on one side of the organic adhesive layer by adopting dry etching methods such as atom bombardment, so that grooves with vertical structures are formed on the two or more metal layers in the patterned area, and the grooves penetrate through the two or more metal layers; step three: etching the groove of the vertical structure by wet etching methods such as etching liquid and the like, and reacting two or more metal layers of the groove of the vertical structure with the etching liquid by utilizing different reaction speeds of the metal layers made of different materials and the etching liquid, so that two sides of the groove of the vertical structure form an inclination angle to form a functional groove with gradient, and the opening width of the functional groove is smaller than the width of the bottom of the functional groove; step four: and removing the organic glue layer, namely forming a functional groove on the two or more metal layers made of different materials. For example, an Al/Ti metal layer can be used, and the functional groove can be formed by two steps of dry etching and wet etching by utilizing the difference of the reaction speed of metal Al and Ti to the etching solution. In order to prevent atoms from bombarding the metal layer outside the functional groove, the thickness of the organic glue layer serving as the barrier layer is larger than the thickness of the two or more metal layers, so that the thickness of the organic glue layer is larger; if the organic adhesive layer as the barrier layer is thin, the risk of atom bombardment to puncture the organic adhesive layer is easily caused; when the organic glue layer is subjected to dry etching and wet etching, the thickness of the glue layer of the existing machine is uneven, and when two or more layers of metal form a functional groove to remove the organic glue layer, the residual risk of the organic glue layer is easy to occur. And the functional groove of preparation is located the metal level of two-layer or multilayer different materials, and the risk that the functional groove collapses appears easily, and stability is relatively poor. And the inclination degree or radian of two sides of the formed functional groove is not regulated and controlled.
In order to solve the above technical problem, an embodiment of the present invention provides a method for manufacturing a functional slot, including:
s100: as shown in fig. 2, a substrate 1 is provided.
S200: continuing with FIG. 2, a layer of organic glue is applied to the substrate 1 to form an organic glue layer 2.
S300: as shown in fig. 3, the organic glue layer 2 is patterned, so that the organic glue layer 2 forms a first groove 3, a projection of a first edge 31 of a cross section of the first groove 3, which is far away from the substrate 1, on the substrate 1 covers a projection of a second edge 32, which is close to the substrate 1, on the substrate 1, and an end point of the first edge 31 and a projection of an end point of the second edge 32 on the substrate 1 do not overlap.
Wherein, the organic glue layer 2 may be exposed to light so that the organic glue layer 2 is patterned. The first groove 3 is an inverted trapezoid groove, and the inverted trapezoid groove is a non-inverted right trapezoid, that is, the included angle between the second side 32 and the two side edges 33 is an obtuse angle, and the inverted trapezoid groove is an inverted isosceles trapezoid or an inverted non-isosceles trapezoid. As shown in fig. 4 and 5, in other embodiments, the two side edges 33 of the first groove 3 may also be arc-shaped, for example, the arc-shaped side edges 33 of the first groove 3 may be concave toward the organic glue layer 2 (see fig. 4) or convex toward the first groove 3 (see fig. 5).
S400: as shown in fig. 6, a metal layer 4 is deposited in the first groove 3, and the surface of the metal layer 4 is flush with the surface of the organic glue layer 2, and the metal layer 4 and the patterned organic glue layer 2 are nested with each other.
S500: as shown in fig. 7, the organic glue layer 2 is removed, so that the metal layer 4 forms a second groove 5, a projection of a cross section of the second groove 5, which is far away from the first bottom edge 51 of the substrate 1, on the substrate 1 is located in a projection of a second bottom edge 52, which is close to the substrate 1, on the substrate 1, and an end point of the first bottom edge 51 and an end point of the second bottom edge 52 do not overlap on the substrate 1, and the second groove 5 is a functional groove.
The second groove 5 is a trapezoid groove, wherein the trapezoid is a non-right trapezoid, and the trapezoid can be an isosceles trapezoid or a non-isosceles trapezoid. In other embodiments, as shown in fig. 8 and 9, both side edges 53 of the second groove 5 between the first base 51 and the second base 52 may be curved so as to be recessed toward the second groove 5 side (see fig. 8) or to be protruded toward the metal layer 4 side (see fig. 9).
According to the manufacturing method of the functional groove, the metal layer 4 can form the functional groove through patterning treatment of the organic glue layer and a metal deposition process, the manufacturing steps are simple, the metal layer 4 required for manufacturing the functional groove can be only one layer, the functional groove is not easy to damage, the stability of the functional groove can be improved, and the metal layer 4 for forming the functional groove in the embodiment of the invention is not limited to one layer. The manufacturing method of the embodiment of the invention can solve the problem that the functional groove of the embodiment of the invention can not be formed on the metal layer 4 directly by dry etching; meanwhile, the manufacturing method of the embodiment of the invention does not need to etch the multilayer metal layer 4 through two steps of dry etching and wet etching, and the thickness of the organic glue layer is the same as that of the metal layer, so that the adopted organic glue layer 2 is thinner, the thickness of the organic glue layer 2 is uniform, the organic glue layer 2 is easy to completely remove, and the risk of organic glue residue is avoided.
Specifically, as shown in fig. 10, the substrate 1 of step S100 in the embodiment of the present invention sequentially includes a glass substrate 11, a flexible substrate 12 coated on the glass substrate 11, and SiN located on the flexible substrate 12 X /SiO X An inorganic layer 13 on SiN X /SiO X A Ti metal layer 14 on the inorganic layer 13, wherein the flexible substrate 12 is a Polyimide (PI) substrate. The Polyimide (PI) substrate has water and oxygen resisting performance and high temperature resisting performance, wherein the high temperature resisting performance can at least bear the temperature of metal deposition in the step S400, and the Polyimide (PI) substrate does not deform at high temperature possibly encountered in other steps; in the embodiment of the invention, the Polyimide (PI) substrate can resist the high temperature of 450 ℃. SiN X /SiO X The inorganic layer 13 has water and oxygen barrier properties, and the Ti metal layer 14 can isolate SiN X /SiO X And an inorganic layer 13.
In other embodiments, the flexible substrate 12 may be other polymer substrates, and the polymer substrate has water-proof and oxygen-proof properties; the glass substrate 11 may also be another type of substrate, such as a silicon substrate. The base 1 may also comprise only the flexible substrate 12; or a base plate and a flexible substrate 12 on the base plate; or the base 1 includes a base plate, a flexible substrate 12 on the base plate, and an inorganic layer on the flexible substrate 12, wherein the inorganic layer has water-barrier and oxygen-barrier properties. Or the substrate 1 includes only the glass substrate 11 for application to a hard screen display.
Step S200 is specifically to coat a layer of organic glue on the substrate 1 by using a coater, where the thickness of the organic glue layer 2 is the same as that of the metal layer 4, and the thickness of the organic glue layer 2 in the embodiment of the present invention is preferably 1 to 2 micrometers. Wherein the organic photoresist is organic photoresist, and the part of the organic photoresist irradiated by light can react. Wherein the coated organic glue layer 2 can be subjected to pre-baking so that the solvent in the organic glue layer 2 is evaporated to form a baked organic glue layer 2.
Further, as shown in fig. 11, in step S300, preferably, the organic adhesive layer 2 is shielded by a halftone dot mask (half tone mask), wherein the halftone dot mask has a patterned hollow area, the masks on both sides of the hollow area have a gradual semi-transparency property, and the transparency property of the mask along the vicinity of the hollow area is gradually enhanced; carrying out ultraviolet exposure on the organic adhesive layer 2, and forming the patterned organic adhesive layer 2 through a developing process in a yellow light process; the organic glue layer 2 may be formed with a first groove 3 having a cross section, wherein in the present embodiment, the first groove 3 is an inverted trapezoid groove. An included angle formed by the side edge 33 of the first groove 3 and the substrate 1 is alpha, vacuum drying can be adopted in the process of pre-drying the organic adhesive layer 2, the longer the vacuum drying time is at the same temperature, the more compact the formed organic adhesive layer 2 is, so that the organic adhesive is not easy to develop when the organic adhesive layer 2 is developed, the included angle alpha can be increased, and the size of the included angle alpha can be adjusted and controlled by adjusting and controlling the vacuum drying time of the organic adhesive layer 2; the size of the included angle alpha can also be regulated and controlled by regulating and controlling other parameters such as the temperature of vacuum drying and the like. Preferably, after the first grooves 3 with the inverted trapezoid cross sections are formed by exposing and developing the organic adhesive layer 2, a Hot Plate (HP) process step may be further performed to partially melt the organic adhesive layer 2 to a certain extent, so that the patterned organic adhesive layer 2 changes and the angle α changes, or the side edges 33 (see fig. 4 or 5) of the first grooves 3 form arc-shaped edges, so that the size of the included angle α of the first grooves 3 of the organic adhesive layer 2 and the shape of the first grooves 3 may be adjusted and controlled. In other embodiments, the degree of gradual change of the semi-transparent masks at the two sides of the hollow area and the widths of the semi-transparent masks at the two sides can be controlled to control the size of the α angle or the shape of the side edge 33. In other embodiments, the projection of the first edge 31 of the first groove 3 far from the substrate 1, which is formed after the organic glue layer 2 is exposed by the ultraviolet rays, on the substrate 1 covers the projection of the second edge 32 close to the substrate 1 on the substrate 1, and the end point of the first edge 31 and the end point of the second edge 32 do not overlap on the substrate 1, and the side 33 of the first groove 3 may also be arc-shaped, so as to realize the radian adjustment of the side 33 of the first groove 3 by vacuum drying or controlling the gradual change degree of the semi-translucent masks at the two sides of the hollow area and the widths of the semi-translucent masks at the two sides.
In the first groove 3 of the embodiment of the present invention, two included angles formed by the side edge 33 and the substrate 1 are obtuse angles.
After step S300, step S310 is further included: the organic glue layer 2 having the first groove 3 on the substrate 1 is cured. Specifically, in the present embodiment, curing is performed by heating, and in other embodiments, ultraviolet curing may be employed.
As shown in fig. 12, the step 400 of depositing metal in the first groove 3 in the embodiment of the present invention specifically includes steps S410 and S420. The method comprises the following specific steps:
s410: and depositing a metal layer 4 on the side of the patterned organic glue layer 2 far away from the substrate 1, so that the metal layer 4 at least fills the first groove 3.
Specifically, in the embodiment of the present invention, metal aluminum is deposited on the side of the organic adhesive layer 2 away from the substrate 1 by a Physical Vapor Deposition (PVD) process, wherein the metal aluminum is filled in the first groove 3, and the first groove 3 is filled with the metal aluminum, and meanwhile, in the physical vapor deposition process, the metal aluminum also covers the organic adhesive layer 2. In the embodiment of the invention, when the metal aluminum is deposited on the substrate 1 and the organic adhesive layer 2 by physical vapor deposition, the temperature borne by the substrate 1 and the organic adhesive layer 2 is not higher than 150 ℃, and in the embodiment of the invention, the organic adhesive layer 2 can bear the high temperature of 300 ℃, so that the metal aluminum does not damage the morphological structure of the organic adhesive layer 2 in the physical vapor deposition process. In the embodiment of the present invention, the metal layer 4 is aluminum, and in other implementations, the metal layer 4 may also be silver, molybdenum, or titanium.
S420: as shown in fig. 13, the metal outside the first groove 3 is removed by planarization to form a metal layer 4 with a surface flush with the surface of the organic glue layer 2.
Specifically, in the embodiment of the present invention, the metal aluminum outside the first groove 3 is removed by a mechanical chemical polishing (CMP) process; the organic glue layer 2 is smoothed by a mechanical chemical grinding process, so that the metal aluminum on the organic glue layer is removed, the metal aluminum exposed outside the first groove 3 and over the first groove 3 is also removed at the same time, the metal aluminum is only filled in the first groove 3, and the upper surface of the metal aluminum in the first groove 3 is smooth and has good flatness. In other embodiments, the aluminum metal outside the first groove 3 may be removed by an etching-back process.
In the implementation of the present invention, the step S500 of removing the organic glue layer 2 specifically includes cleaning with an organic glue stripping solution to separate the organic glue layer 2 from the substrate 1, specifically, in this embodiment, cleaning with an organic solvent such as acetone may be performed to remove the organic glue layer 2, so that the metal aluminum on the substrate 1 forms the second groove 5, and the cross section of the second groove 5 is trapezoidal, so that the metal layer 4 forms the functional groove. The included angle formed by the waist of the trapezoid of the cross section of the second groove 5 and the substrate 1 is theta, the theta angle is complementary with the alpha angle of the first groove 3, and the theta angle can be regulated and controlled by regulating and controlling the alpha angle. In the embodiment of the present invention, an included angle formed between the waist of the second groove 5 and the substrate 1 is an acute angle, and more preferably, the cross section of the second groove 5 in the embodiment of the present invention is an isosceles trapezoid, and two included angles formed between the waist and the substrate 1 are equal. In other embodiments, the projection of the first bottom edge 51 far from the substrate 1 on the substrate 1 may be located in the projection of the second bottom edge 52 close to the substrate 1 on the substrate 1, the end point of the first bottom edge 51 and the projection of the end point of the second bottom edge 52 on the substrate 1 do not overlap, the side edge 53 is arc-shaped, and the arc of the side edge 53 of the second groove 5 may also be implemented by adjusting the arc of the side edge 33 of the first groove 31.
The manufacturing method of the functional groove provided by the embodiment of the invention can be used as a metal layer 4 functional groove manufactured in the area of the opening 20 of the display panel, the functional groove can be used for separating a display function layer of the display panel, the display function layer of the display panel is protected, the display function layer of the display panel is prevented from being invaded by water and oxygen, or the invasion speed of water vapor is slowed down, and the service life of the display panel is prolonged; the method of manufacturing the functional trench according to the embodiment of the present invention is not limited to this application, and can be applied to any place where it is necessary to manufacture the functional trench in the metal layer 4.
The embodiment of the present invention further includes a second technical solution, as shown in fig. 15 and 16, a method for manufacturing a display panel, S10: the metal layer 4 with the functional grooves is manufactured on the substrate 1 by adopting the manufacturing method of the functional grooves, and the functional grooves are distributed around the area of the preset opening 20.
S20: and manufacturing a display functional layer 6 on the metal layer 4 far away from the substrate 1, covering the display functional layer 6 on the metal layer 4 and filling the display functional layer 6 in the functional groove, and disconnecting the display functional layer 6 positioned in the functional groove from the display functional layer 6 above the metal layer.
The display function layer 6 may be manufactured by evaporation, the display function layer 6 in the embodiment of the present invention includes a light emitting device, and the light emitting device includes a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer, an electron injection layer, a cathode layer, and the like.
S30: and manufacturing an encapsulation layer 7, wherein the encapsulation layer 7 continuously covers the display function layer 6.
The encapsulation layer 7 may be a thin film encapsulation layer, and may have a one-layer, two-layer or multi-layer structure, for example, an inorganic thin film encapsulation layer may be used; or, an organic encapsulating layer (not shown) is encapsulated to cover the metal layer 4 and to fill the functional groove, and then an inorganic encapsulating layer (not shown) is encapsulated to cover the organic encapsulating layer; or encapsulated with a multilayer encapsulation layer 7 to cover the metal layer 4. In the embodiment of the present invention, the encapsulation layer 7 covers the display functional layer 6 and is filled in the functional grooves, so that the display functional layer 6 in the adjacent functional grooves is not in sealed communication with the display functional layer 6 on the metal layer 4 through the encapsulation layer 7.
According to the manufacturing method of the display panel, the metal layer 4 with the functional groove is manufactured on the substrate 1, the functional groove is located around the area of the preset opening 20, the metal layer 4 can isolate water and oxygen, the metal layer 4 does not contain moisture and can not release oxygen, and the metal layer 4 can not influence the display functional layer 6; the metal layer 4 is high-temperature resistant, is beneficial to an evaporation process adopted in the manufacturing process of the display function layer 6 and the packaging layer 7, and has small limitation on high temperature; in addition, the functional groove prepared by the embodiment of the invention has a stable structure, and when the display panel is provided with the opening 20, the metal layer 4 where the functional groove is located is a layer, so that the functional groove is not easy to break; meanwhile, the thickness of the organic glue layer 2 required in the manufacturing process of the functional groove provided by the embodiment of the invention is smaller and uniform, so that the risk of organic glue residue is reduced. In the embodiment of the invention, the metal layer 4 with the functional groove is adopted around the area of the opening 20, so that the metal layer 4 around the area of the opening 20 is in a separation state, the display functional layer 6 positioned on the metal layer 4 and the display functional layer 6 positioned in the functional groove are in a disconnection state, and when the opening 20 is preset for manufacturing the opening, the large-area crack caused by stress is reduced; even if cracks occur, when the display functional layer 6 at the functional groove is in a disconnected state, the stress action is weakened, the width of the transverse expansion of the cracks is reduced, and the cracks are not easy to occur in the region far away from the opening 20, so that the packaging effect of the display panel can be improved; for example, if one or more functional grooves have cracks in the area close to the opening 20, water vapor invades from the cracks, and the display functional layer 6 in the functional groove in the crack is affected by the invasion of the water vapor, however, because the display functional layer 6 in the functional groove and the display functional layer 6 on the metal layer 4 far away from the area of the preset opening 20 are in a blocking state, the water vapor cannot invade the display functional layer 6 in the adjacent functional groove or the display functional layer 6 on the adjacent metal layer 4, and the purpose of protecting the display functional layer 6 in the display panel from the overall failure of the display functional layer 6 due to the occurrence of a point of cracks is achieved. If all the functional grooves have cracks and extend to the position far away from the preset opening 20 area and above the metal layer 4 on the functional grooves in the transverse direction, the display functional layer 6 cannot be formed at the included angle between the metal of the functional grooves and the substrate, and the hollow cavity 54 is formed at the included angle, so that when water vapor invades into the functional grooves, the water vapor can be deposited in the hollow cavity 54, the invasion time of the water vapor can be delayed, and the service life of the display panel is prolonged.
In the embodiment of the present invention, before the step S20, a metal anode layer 8 is evaporated on a side of the metal layer 4 away from the substrate layer 1, and the metal anode layer 8 in the functional groove is removed, so that the metal anode layer only covers the metal layer 4; step S20 includes evaporating a first display function layer 61 on the metal anode layer 8 far from the substrate 1, where the first display function layer 61 covers the metal anode layer 8 and is filled in the functional groove, and the first display function layer 61 in the functional groove is disconnected from the first display function layer 61 above the metal anode layer 8; evaporating a second display function layer 62 on the first display function layer 61 far away from the substrate 1, wherein the second display function layer 62 covers the first display function layer 61 and is filled in the function groove, and the second display function layer 62 in the function groove is disconnected with the second display function layer 62 above the first display function layer 61; in embodiments of the present invention where the first display function layer 61 is a light emitting element and the second display function layer 62 is a cathode layer, the display function layer 6 may comprise a multi-layer display function layer structure.
Wherein, the number of the functional grooves is at least two, and the functional grooves concentrically surround the area of the preset opening 20. By arranging at least two functional grooves, the display functional layer 6 can be protected by at least two layers, and the service life of the display panel is prolonged. In other embodiments, the functional slot may also be an arcuate slot.
Specifically, in the embodiment of the present invention, the substrate 1 includes a glass substrate 11, a flexible substrate 12 disposed on the glass substrate 11, and SiN disposed on the flexible substrate 12 X /SiO X An inorganic layer 13 on SiN X /SiO X The Ti metal layer 14 on the inorganic layer 13, the display panel according to the embodiment of the present invention may be a hard-screen display panel. Further, after the manufacturing of the encapsulation layer 7, the flexible substrate 12 is separated from the glass substrate 11, so that the base 1 includes the flexible substrate 12, and SiN is located on the flexible substrate 12 X /SiO X An inorganic layer 13 on SiN X /SiO X And a Ti metal layer 14 on the inorganic layer 13 to form a flexible display panel.
The embodiment of the present invention further includes a third technical solution, as shown in fig. 15, a display panel, where the display panel includes a substrate 1, a metal layer 4 with a functional groove, a display functional layer 6, and an encapsulation layer 7, where the metal layer 4 is located on the substrate 1, and the functional groove is located around a preset open hole 20 area of the display panel; the display function layer 6 covers the metal layer 4 and is filled in the function groove, and the display function layer 6 in the function groove is disconnected with the display function layer 6 above the metal layer 4; the encapsulation layer 7 continuously covers the display function layer 6.
According to the display panel of the embodiment of the invention, the holes are punched in the preset holes 20 area through an external force to form the holes 20.
The display panel function groove of the embodiment of the invention has stable structure, and the capability of the display panel for resisting external force is enhanced, for example, the force for resisting the manufacturing of the open hole 20 is enhanced; the metal layer 4 where the functional groove is located in the embodiment of the invention can be a layer of metal, and the metal layer 4 where the functional groove is located is not easy to peel off when an external force is applied, so that the packaging effect can be improved. The functional groove is arranged, so that the packaging strength is enhanced, and the packaging effect is improved. When the opening 20 is formed in the area of the preset opening 20, if cracks occur around the area of the preset opening 20, the display function layer 6 located at the functional groove is in a disconnected state, so that the stress action is weakened, and the width of the lateral expansion of the cracks is reduced, wherein the lateral direction is parallel to the direction of the metal layer 4 or the display function layer 6; meanwhile, if one or more functional grooves have cracks, water vapor invades from the cracks, and the display functional layer 6 in the functional groove at the crack is influenced by the invasion of the water vapor, however, because the display functional layer 6 in the functional groove and the display functional layer 6 on the metal layer 4 far away from the preset opening 20 area are in a separation state, the water vapor cannot invade the display functional layer 6 in the adjacent functional groove or the display functional layer 6 on the adjacent metal layer 4, and the purpose of protecting the display functional layer 6 in the display panel is achieved. If all function grooves have cracks and extend to the position far away from the preset area of the opening 20 and the position above the metal layer 4 on the function grooves in the transverse direction, the display function layer 6 cannot be formed at the included angle between the metal of the function grooves and the substrate 1, the included angle is the hollow cavity 54, and when water vapor invades into the function grooves, the water vapor can be deposited in the hollow cavity 54, so that the invasion time of the water vapor can be delayed, the water vapor is prevented from directly invading the display function layer 6, and the service life of the display panel is greatly prolonged.
In the embodiment of the invention, the packaging layer 7 continuously covers the display function layer 6 and is filled in the function grooves, so that the display function layer 6 in the adjacent function grooves is not communicated with the display function layer 6 on the metal layer 4 in a sealing way through the packaging layer 7.
Specifically, in the embodiment of the present invention, the display functional layer 6 includes a first display functional layer 61 and a second display functional layer 62, the metal layer 4 further includes a metal anode layer 8 on a side away from the substrate, the first display functional layer 61 and the second display functional layer 62 are sequentially included above the metal anode layer 8, and the first display functional layer 61 and the second display functional layer 62 are filled in the functional groove.
In the embodiment of the present invention, the number of the functional grooves is at least two, and the functional grooves concentrically surround the predetermined opening 20 region. By arranging at least two functional grooves, the display functional layer 6 can be protected by at least two layers, and the service life of the display panel is prolonged. In other embodiments, the functional slot may also be an arcuate slot.
Preferably, the display panel in the embodiment of the present invention is a flexible display panel, and referring to fig. 10, the base 1 includes a flexible substrate 12 and SiN located on the flexible substrate 12 X /SiO X An inorganic layer 13 on the SiN layer X /SiO X A Ti metal layer 14 on the inorganic layer 13. In other embodiments, the display panel may also be a hard-screen display panel, and the substrate 1 includes a base plate 11, a flexible substrate 12 on the base plate 11, and SiN on the flexible substrate 12 X /SiO X An inorganic layer 13 on SiN X /SiO X A Ti metal layer 14 on the inorganic layer 13.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (11)
1. A method for manufacturing a functional slot is characterized by comprising the following steps:
providing a substrate;
coating a layer of organic glue on the substrate to form an organic glue layer;
patterning the organic glue layer to enable the organic glue layer to form a first groove, wherein a projection of a first edge of the cross section of the first groove, which is far away from the substrate, on the substrate covers a projection of a second edge, which is close to the substrate, on the substrate, and the end point of the first edge is not overlapped with the projection of the end point of the second edge on the substrate;
depositing metal in the first groove to form a metal layer with the surface flush with the surface of the organic glue layer;
and removing the organic glue layer, wherein the metal layer forms a second groove, the projection of the first bottom edge of the cross section of the second groove, which is far away from the substrate, on the substrate is positioned in the projection of the second bottom edge, which is close to the substrate, on the substrate, the end point of the first bottom edge is not overlapped with the projection of the end point of the second bottom edge on the substrate, the second groove is a functional groove, and the functional groove is used for separating a display functional layer on the metal layer from a display functional layer in the functional groove.
2. The method of claim 1, wherein depositing the metal into the first recess comprises:
depositing a metal layer on one side of the patterned organic glue layer, which is far away from the substrate, so that the metal layer at least fills the first groove;
and removing the metal outside the first groove through planarization to form the metal layer with the surface flush with the surface of the organic glue layer.
3. The method of claim 2, wherein the removing metal outside the first recess by planarization comprises: and removing the metal outside the first groove by a mechanical chemical grinding process or an etching-back process.
4. The method of claim 1, wherein the second groove has a cross section in which the side edges are straight or curved.
5. The method of claim 1, wherein the organic glue layer has a thickness equal to that of the metal layer.
6. The method for manufacturing the functional slot according to claim 5, wherein the thickness of the organic glue layer is 1 to 2 micrometers.
7. The method for manufacturing a functional trench according to claim 1, wherein the patterning the organic glue layer comprises:
and shielding the organic adhesive layer by using a halftone screen dot photomask, and forming a patterned organic adhesive layer through exposure and development so that the organic adhesive layer forms the first groove.
8. The method of claim 1, wherein the base comprises a flexible substrate or a rigid substrate.
9. A method for manufacturing a display panel is characterized in that,
manufacturing a metal layer with functional grooves on a substrate by using the manufacturing method of any one of claims 1 to 8, wherein the functional grooves are distributed around a preset opening area;
manufacturing a display function layer on the metal layer far away from the substrate, wherein the display function layer covers the metal layer and fills the function groove, and the display function layer in the function groove is disconnected with the display function layer above the metal layer;
and manufacturing an encapsulation layer, wherein the encapsulation layer continuously covers the display function layer.
10. The method according to claim 9, wherein the functional grooves are at least two annular grooves or arc-shaped grooves, and concentrically surround the predetermined opening area.
11. A display panel produced by the production method according to any one of claims 9 or 10,
the display panel comprises a substrate, a metal layer with a functional groove, a display functional layer and an encapsulation layer,
the metal layer is positioned on the substrate, and the functional groove is positioned around a preset opening area of the display panel;
the display function layer covers the metal layer and is filled in the function groove, and the display function layer in the function groove is disconnected with the display function layer above the metal layer;
the packaging layer continuously covers the display function layer.
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