CN111208715A - Waste liquid collecting system for gluing developing equipment - Google Patents
Waste liquid collecting system for gluing developing equipment Download PDFInfo
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- CN111208715A CN111208715A CN202010158378.XA CN202010158378A CN111208715A CN 111208715 A CN111208715 A CN 111208715A CN 202010158378 A CN202010158378 A CN 202010158378A CN 111208715 A CN111208715 A CN 111208715A
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- liquid
- waste liquid
- liquid storage
- interlayer
- liquid collecting
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/3092—Recovery of material; Waste processing
Abstract
The invention discloses a waste liquid collecting system for a gluing developing device, which comprises: a waste liquid collecting box and a liquid storage cabinet; the top of the waste liquid collecting box is provided with a first liquid inlet, the lower part of the waste liquid collecting box is provided with a first liquid outlet, and the outer wall of the waste liquid collecting box is provided with a first liquid level meter; a horizontal partition plate is fixedly connected in the liquid storage cabinet and divides the liquid storage cabinet into a first interlayer and a second interlayer; a liquid storage tank is arranged in the second interlayer, and a second liquid level meter is arranged on the outer wall of the liquid storage tank; a second liquid outlet is arranged at the lower part of the liquid storage tank, and a valve is arranged at the second liquid outlet; a second liquid inlet is formed in the top of the liquid storage tank and is communicated with a pneumatic pump through a first pipeline, and the pneumatic pump is communicated with the first liquid outlet through a second pipeline; the first interlayer is internally provided with a control device which is respectively and electrically connected with the first liquid level meter, the second liquid level meter and the pneumatic pump, and the control device is also electrically connected with a liquid level alarm device. The invention can prompt staff to treat the waste liquid in time.
Description
Technical Field
The invention relates to the field of waste liquid collecting devices, in particular to a waste liquid collecting system for a gluing and developing device.
Background
At present, the collection and discharge of waste liquid of semiconductor equipment are divided into manual collection and automatic collection of systems. When the manual collection is carried out, the waste liquid generated when the equipment operates is not concentrated, the treatment is complicated, the waste liquid has strong corrosivity and adhesiveness, and the manual collection is very difficult. On the other hand, the existing equipment is provided with an automatic collection system, but only collects the waste liquid in a general way, and cannot prompt staff to process the waste liquid when the waste liquid is stored to a certain degree.
Disclosure of Invention
In order to solve the problems mentioned in the background art, the invention provides a waste liquid collecting system for a gluing developing device, which can collect waste liquid of the gluing developing device and prompt a worker to treat the waste liquid in time.
A waste liquid collecting system for a paste coating developing apparatus, comprising: a waste liquid collecting box and a liquid storage cabinet;
the top of the waste liquid collecting box is provided with a first liquid inlet, the lower part of the waste liquid collecting box is provided with a first liquid outlet, and the outer wall of the waste liquid collecting box is provided with a first liquid level meter;
a horizontal partition plate is fixedly connected in the liquid storage cabinet, the horizontal partition plate divides the liquid storage cabinet into a first interlayer and a second interlayer, and the second interlayer is positioned below the first interlayer;
a liquid storage tank is arranged in the second interlayer, and a second liquid level meter is arranged on the outer wall of the liquid storage tank; a second liquid outlet is formed in the lower portion of the liquid storage tank, and a valve is arranged at the second liquid outlet; a second liquid inlet is formed in the top of the liquid storage tank and is communicated with a pneumatic pump through a first pipeline, and the pneumatic pump is communicated with the first liquid outlet through a second pipeline;
the liquid level alarm device is characterized in that a control device is arranged in the first interlayer, the control device is respectively electrically connected with the first liquid level meter, the second liquid level meter and the pneumatic pump, and the control device is further electrically connected with a liquid level alarm device which is arranged on the outer wall of the liquid storage cabinet.
Furthermore, slide rails are arranged on the inner walls of two sides of the second interlayer, and first sliding grooves matched with the slide rails are arranged on the outer walls of two sides of the liquid storage tank.
Furthermore, the bottom of the second interlayer is provided with an opening, and the bottom of the liquid storage tank is provided with a plurality of rollers.
Further, the bottom of the waste liquid collecting box is fixedly connected with a tray with an upward opening, a liquid leakage sensor is fixedly connected to the inner wall of the bottom of the tray, the liquid leakage sensor is electrically connected with a control device, the control device is electrically connected with a liquid leakage alarm device, and the liquid leakage alarm device is arranged on the outer wall of the liquid storage cabinet.
Further, the liquid level alarm device and the liquid leakage alarm device are alarm lamps.
Further, an air cylinder is fixedly connected to the horizontal partition plate, the air cylinder is electrically connected with a control device, the control device is electrically connected with an adjusting button, and the adjusting button is arranged on the outer wall of the liquid storage cabinet;
the first pipeline comprises a hard pipe and a hose, two ends of the hose are respectively communicated with the pneumatic pump and the hard pipe, a fixing ring is fixedly sleeved outside the hard pipe, and the fixing ring is connected with the top of a telescopic rod of the cylinder through a first connecting rod; the outlet end activity of hard tube runs through inside horizontal baffle stretches into the second interlayer, the hard tube passes the second inlet under the drive of cylinder and stretches into in the liquid reserve tank or rise to the top of liquid reserve tank.
Further, one side of the fixing ring, which is far away from the air cylinder, is provided with a limiting plate, the limiting plate is fixedly connected to the horizontal partition plate, one side of the limiting plate, which is opposite to the fixing ring, is provided with a second chute, the fixing ring is connected with a sliding block through a second connecting rod, and the sliding block is in sliding fit with the second chute.
Further, the control device is a PLC controller.
Furthermore, a handle is fixedly connected to the outer wall of the front side of the liquid storage tank.
Furthermore, a first through hole is formed in the horizontal partition plate and used for penetrating through the hose, a second through hole is formed in the side wall of the liquid storage cabinet and used for penetrating through the second pipeline.
The invention has the beneficial effects that:
1. the liquid level meter is provided with the second liquid level meter and the liquid level alarm device, and can prompt a worker to discharge the waste liquid in the liquid storage tank in time when the waste liquid is collected to a certain degree.
2. The liquid leakage warning device is provided with the tray, the liquid leakage sensor and the liquid leakage warning device, and when liquid leakage occurs in the waste liquid collecting box, workers can be prompted to carry out treatment in time.
Drawings
Fig. 1 is a schematic structural view of a waste liquid collecting tank.
Fig. 2 is a schematic structural diagram of the liquid storage cabinet.
Fig. 3 is another schematic structural diagram of the liquid storage cabinet.
FIG. 4 is a schematic view of the liquid storage cabinet and the liquid storage tank.
Fig. 5 is a schematic diagram of the internal structure of the liquid storage cabinet.
Fig. 6 is an enlarged view of fig. 5 at a.
The liquid level alarm device comprises a waste liquid collecting box 1, a waste liquid collecting box 101, a first liquid inlet 101, a first liquid outlet 102, a liquid storage cabinet 2, a first interlayer 201, a second interlayer 202, a sliding rail 203, a second through hole 204, a cabinet door 205, a first liquid level meter 3, a horizontal partition plate 4, a first through hole 401, a liquid storage tank 5, a second liquid inlet 501, a second liquid level meter 6, a hard pipe 701, a hose 702, a pneumatic pump 8, a second pipeline 9, a control device 10, a liquid level alarm device 11, a roller 12, a tray 13, a liquid leakage sensor 14, a liquid leakage alarm device 15, an air cylinder 16, an upward adjusting button 1701, a downward adjusting button 1702, a fixing ring 18, a first connecting rod 19, a limiting plate 20, a second sliding groove 2001, a second connecting rod 21, a sliding block 22 and a handle 23.
Detailed Description
The present invention will be described in further detail below with reference to specific embodiments thereof, with reference to the accompanying drawings.
A waste liquid collection system for a paste dispensing developing apparatus as shown in the accompanying drawings, comprising: a waste liquid collecting box 1 and a liquid storage cabinet 2;
a first liquid inlet 101 is formed in the top of the waste liquid collecting box 1, a first liquid outlet 102 is formed in the lower portion of the waste liquid collecting box 1, and a first liquid level meter 3 is arranged on the outer wall of the waste liquid collecting box 1; wherein, two first liquid inlets 101 are provided.
A horizontal partition plate 4 is fixedly connected in the liquid storage cabinet 2, the liquid storage cabinet 2 is divided into a first interlayer 201 and a second interlayer 202 by the horizontal partition plate 4, and the second interlayer 202 is positioned below the first interlayer 201;
a liquid storage tank 5 is arranged in the second interlayer 202, and a second liquid level meter 6 is arranged on the outer wall of the liquid storage tank 5; a second liquid outlet (not shown in the drawing) is arranged at the lower part of the liquid storage tank 5, and a valve (not shown in the drawing) is arranged at the second liquid outlet; a second liquid inlet 501 is formed in the top of the liquid storage tank 5, the second liquid inlet 501 is communicated with a pneumatic pump 8 through a first pipeline, and the pneumatic pump 8 is communicated with the first liquid outlet 102 through a second pipeline 9; the front end of the second partition 202 is open, and the front end opening of the second partition 202 is rotatably connected to the cabinet door 205 through a rotating shaft.
Be equipped with controlling means 10 in first interlayer 201, controlling means 10 is connected with first level gauge 3, second level gauge 6, pneumatic pump 8 electricity respectively, and controlling means 10 still electricity is connected with liquid level alarm device 11, and liquid level alarm device 11 establishes on the outer wall of stock solution cabinet 2.
Wherein, all be equipped with slide rail 203 on the inner wall of second interlayer 202 both sides, be equipped with the first spout with slide rail 203 matched with on the outer wall of 5 both sides of liquid reserve tank.
The bottom of the second interlayer 202 is open, and the bottom of the liquid storage box 5 is provided with a plurality of rollers 12. Four rollers 12 are arranged at four corners of the bottom of the liquid storage tank 5.
1 bottom fixedly connected with opening tray 13 up of waste liquid collecting box, the tray is used for collecting the weeping, fixedly connected with weeping sensor 14 on the bottom inner wall of tray 13, and weeping sensor 14 is connected with controlling means 10 electricity, and controlling means 10 electricity is connected with weeping alarm device 15, and weeping alarm device 15 establishes on the outer wall of stock solution cabinet 2.
The liquid level alarm device 11 and the liquid leakage alarm device 15 are alarm lamps.
Wherein, the horizontal partition plate 4 is fixedly connected with an air cylinder 16, the air cylinder 16 is electrically connected with a control device 10, the control device 10 is electrically connected with an adjusting button, and the adjusting button is arranged on the outer wall of the liquid storage cabinet 2; the adjustment buttons include an up adjustment button 1701, a down adjustment button 1702; the up-adjustment button 1701 is used to move the extension rod of the air cylinder 16 upward, and the down-adjustment button 1702 is used to move the extension rod of the air cylinder 16 downward.
First pipeline 7 includes hard tube 701, hose 702, the both ends of hose 702 respectively with pneumatic pump 8, hard tube 701 communicates, hard tube 701 external fixation has cup jointed solid fixed ring 18, gu fixed ring 18 is connected through the telescopic link top of head rod 19 with cylinder 16, the exit end activity of hard tube 701 runs through horizontal partition plate 4 and stretches into inside the second interlayer 202, hard tube 701 can pass the inside that second inlet 501 stretched into liquid reserve tank 5 or rise to the top of liquid reserve tank 5 under the drive of cylinder 16.
One side of the fixing ring 18, which is far away from the air cylinder 16, is provided with a limiting plate 20, the limiting plate 20 is fixedly connected to the horizontal partition plate 4, one side of the limiting plate 20, which is opposite to the fixing ring 18, is provided with a second sliding groove 2001, the fixing ring 18 is connected with a sliding block 22 through a second connecting rod 21, and the sliding block 22 is in sliding fit with the second sliding groove 2001.
The control device 10 is a PLC controller. A handle 23 is fixedly connected to the front outer wall of the liquid storage tank 5. The handle 23 can conveniently pull out the liquid storage tank 5 from the liquid storage cabinet 2.
In addition, a first through hole 401 is formed in the horizontal partition plate 4, the first through hole 401 is used for allowing the hose 702 to pass through, a second through hole 204 is formed in the side wall of the liquid storage cabinet 2, and the second through hole 204 is used for allowing the second pipeline 9 to pass through.
Wherein, the liquid level alarm device 11, the liquid leakage alarm device 15, the upward adjusting button 1701 and the downward adjusting button 1702 are all arranged on the front outer wall of the first partition 201 of the liquid storage cabinet 2.
The invention is implemented as follows: the first liquid inlet 101 of the waste liquid collecting box 1 is communicated with a waste liquid outlet of the gluing and developing device through a pipeline. Through controlling means 10 preset waste liquid collecting box 1, the liquid level threshold value of liquid reserve tank 5, the waste liquid of rubber coating development equipment enters into in the waste liquid collecting box 1 through first inlet 101, when the waste liquid in the waste liquid collecting box 1 reaches the liquid level threshold value, first level gauge 3 is with signal transmission to controlling means 10, controlling means 10 control pneumatic pump 8 starts, carry the waste liquid in the waste liquid collecting box 1 to the liquid reserve tank 5 in, when the waste liquid of storing in the liquid reserve tank 5 reaches the liquid level threshold value, second level gauge 6 is with signal transmission to controlling means 10, close pneumatic pump 8, and with signal transmission to liquid level alarm device 11, indicate. Then, the telescopic rod of the cylinder 6 is moved upwards by the upward adjusting button 1701, so that the hard pipe 701 is separated from the second liquid inlet 501, the cabinet door 205 is opened, the handle 23 is pulled, the liquid storage tank 5 is pulled out from the liquid storage cabinet 2, the valve is opened, and the waste liquid is discharged from the second liquid outlet. When the waste liquid collecting box 1 has leakage, the leakage falls into the tray 13, the leakage sensor 14 detects the leakage and transmits a signal to the control device 10, and the control device 10 transmits the signal to the leakage alarm device 15 for prompting.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A waste liquid collecting system for a gumming developing apparatus, comprising: a waste liquid collecting box and a liquid storage cabinet;
the top of the waste liquid collecting box is provided with a first liquid inlet, the lower part of the waste liquid collecting box is provided with a first liquid outlet, and the outer wall of the waste liquid collecting box is provided with a first liquid level meter;
a horizontal partition plate is fixedly connected in the liquid storage cabinet, the horizontal partition plate divides the liquid storage cabinet into a first interlayer and a second interlayer, and the second interlayer is positioned below the first interlayer;
a liquid storage tank is arranged in the second interlayer, and a second liquid level meter is arranged on the outer wall of the liquid storage tank; a second liquid outlet is formed in the lower portion of the liquid storage tank, and a valve is arranged at the second liquid outlet; a second liquid inlet is formed in the top of the liquid storage tank and is communicated with a pneumatic pump through a first pipeline, and the pneumatic pump is communicated with the first liquid outlet through a second pipeline;
the liquid level alarm device is characterized in that a control device is arranged in the first interlayer, the control device is respectively electrically connected with the first liquid level meter, the second liquid level meter and the pneumatic pump, and the control device is further electrically connected with a liquid level alarm device which is arranged on the outer wall of the liquid storage cabinet.
2. The waste liquid collecting system for the gluing and developing device according to claim 1, wherein sliding rails are arranged on the inner walls of the two sides of the second interlayer, and first sliding grooves matched with the sliding rails are arranged on the outer walls of the two sides of the liquid storage tank.
3. The waste liquid collecting system for the gumming developing device as claimed in claim 2, wherein the bottom of the second interlayer is open, and the bottom of the liquid storage tank is provided with a plurality of rollers.
4. The waste liquid collecting system for the gluing developing device as claimed in claim 1, wherein the bottom of the waste liquid collecting box is fixedly connected with a tray with an upward opening, a liquid leakage sensor is fixedly connected to the inner wall of the bottom of the tray, the liquid leakage sensor is electrically connected with a control device, the control device is electrically connected with a liquid leakage alarm device, and the liquid leakage alarm device is arranged on the outer wall of the liquid storage cabinet.
5. The waste liquid collecting system for a glue spreading developing apparatus according to claim 4, wherein said liquid level alarm device and said liquid leakage alarm device are alarm lamps.
6. The waste liquid collecting system for the gluing developing device as claimed in claim 1, wherein the horizontal partition plate is fixedly connected with an air cylinder, the air cylinder is electrically connected with a control device, the control device is electrically connected with an adjusting button, and the adjusting button is arranged on the outer wall of the liquid storage cabinet;
the first pipeline comprises a hard pipe and a hose, two ends of the hose are respectively communicated with the pneumatic pump and the hard pipe, a fixing ring is fixedly sleeved outside the hard pipe, and the fixing ring is connected with the top of a telescopic rod of the cylinder through a first connecting rod; the outlet end activity of hard tube runs through inside horizontal baffle stretches into the second interlayer, the hard tube passes the second inlet under the drive of cylinder and stretches into in the liquid reserve tank or rise to the top of liquid reserve tank.
7. The waste liquid collecting system for the gluing and developing device according to claim 6, wherein a limiting plate is arranged on one side of the fixing ring away from the cylinder, the limiting plate is fixedly connected to the horizontal partition plate, a second chute is arranged on one side of the limiting plate opposite to the fixing ring, the fixing ring is connected with a sliding block through a second connecting rod, and the sliding block is in sliding fit with the second chute.
8. The waste liquid collecting system for a gumming developing device as in any one of claims 1 to 7, wherein said control means is a PLC controller.
9. The waste liquid collecting system for a gumming developing device as in any one of claims 1 to 7, wherein a handle is fixedly connected to an outer wall of a front side of the liquid storage tank.
10. The waste liquid collecting system for the gumming developing device as in claim 6, wherein a first through hole is arranged on the horizontal partition plate, the first through hole is used for passing through a hose, a second through hole is arranged on the side wall of the liquid storage cabinet, and the second through hole is used for passing through a second pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010158378.XA CN111208715A (en) | 2020-03-09 | 2020-03-09 | Waste liquid collecting system for gluing developing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010158378.XA CN111208715A (en) | 2020-03-09 | 2020-03-09 | Waste liquid collecting system for gluing developing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN111208715A true CN111208715A (en) | 2020-05-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010158378.XA Pending CN111208715A (en) | 2020-03-09 | 2020-03-09 | Waste liquid collecting system for gluing developing equipment |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080210607A1 (en) * | 2006-11-07 | 2008-09-04 | Jonathan Owen | Filter trap for waste water |
| CN105416911A (en) * | 2015-10-23 | 2016-03-23 | 四川久环环境技术有限责任公司 | Intelligent storage device for waste liquid generated by water quality online monitor |
| CN106007083A (en) * | 2016-07-06 | 2016-10-12 | 崔金星 | Treatment device and method for waste liquid generated from COD value determination |
| CN206823809U (en) * | 2017-05-02 | 2018-01-02 | 北京格林博瑞科技有限公司 | A kind of laboratory waste liquid collection device |
| CN207823547U (en) * | 2017-12-04 | 2018-09-07 | 苏州特福佳实验室系统工程有限公司 | A kind of automatic waste liquid alarm vent cabinet |
| CN208287578U (en) * | 2018-03-27 | 2018-12-28 | 东莞锐鼎电子科技有限公司 | A kind of intermetallic composite coating waste collecting device |
| CN212135142U (en) * | 2020-03-09 | 2020-12-11 | 上海图双精密装备有限公司 | Waste liquid collecting system for gluing developing equipment |
-
2020
- 2020-03-09 CN CN202010158378.XA patent/CN111208715A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080210607A1 (en) * | 2006-11-07 | 2008-09-04 | Jonathan Owen | Filter trap for waste water |
| CN105416911A (en) * | 2015-10-23 | 2016-03-23 | 四川久环环境技术有限责任公司 | Intelligent storage device for waste liquid generated by water quality online monitor |
| CN106007083A (en) * | 2016-07-06 | 2016-10-12 | 崔金星 | Treatment device and method for waste liquid generated from COD value determination |
| CN206823809U (en) * | 2017-05-02 | 2018-01-02 | 北京格林博瑞科技有限公司 | A kind of laboratory waste liquid collection device |
| CN207823547U (en) * | 2017-12-04 | 2018-09-07 | 苏州特福佳实验室系统工程有限公司 | A kind of automatic waste liquid alarm vent cabinet |
| CN208287578U (en) * | 2018-03-27 | 2018-12-28 | 东莞锐鼎电子科技有限公司 | A kind of intermetallic composite coating waste collecting device |
| CN212135142U (en) * | 2020-03-09 | 2020-12-11 | 上海图双精密装备有限公司 | Waste liquid collecting system for gluing developing equipment |
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