CN111189539A - Raman spectrum probe - Google Patents
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- CN111189539A CN111189539A CN202010081839.8A CN202010081839A CN111189539A CN 111189539 A CN111189539 A CN 111189539A CN 202010081839 A CN202010081839 A CN 202010081839A CN 111189539 A CN111189539 A CN 111189539A
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/06—Scanning arrangements arrangements for order-selection
- G01J2003/062—Scanning arrangements arrangements for order-selection motor-driven
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
- G01J2003/064—Use of other elements for scan, e.g. mirror, fixed grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention provides a Raman spectrum probe, which comprises a laser light source, a dichroic mirror, a micro-vibration scanning mirror, a micro-lens array, a Raman optical filter and an exit slit, wherein an excitation light beam emitted by the laser light source is reflected by the dichroic mirror and the micro-vibration scanning mirror in sequence and then irradiates an object to be detected through the micro-lens array, and a Raman scattering signal generated by exciting the object to be detected passes through the micro-lens array, the micro-vibration scanning mirror and the dichroic mirror in sequence, is filtered by the Raman optical filter and then is emitted through the exit slit. The invention adopts the micro-lens array to effectively enlarge the area of the detection sample, and greatly reduces the laser power density of the single convergent point; and the micro-vibration scanning mirror realizes the high-efficiency scanning sampling of the full coverage in a large-range detection surface, effectively prevents the heat enrichment caused by long-time irradiation of the light beam, and improves the safety of the detection of sensitive materials and the reliability of results.
Description
Technical Field
The invention relates to the technical field of Raman detection, in particular to a Raman spectrum probe.
Background
The Raman scattering signal is very weak and is 10 of the Rayleigh scattering signal-6~10-9In order to obtain a higher excitation signal, the accuracy of the measurement result of the conventional raman spectrometer is often compromised, and the laser beam is concentrated on a small point, so that although the signal intensity is improved, the captured information is only a small part of the sample, and especially for an uneven sample or a sparse sample, the reliability of the result obtained by the detection mode is greatly reduced. In addition, the extremely small convergent light spot inevitably causes the local laser power density to increase, and as the irradiation time is exceeded, the heat accumulation can cause the sample to be heated to be decomposed, especially for dark substances or substances with strong absorption in a specific wave band, the heat radiation signal submerges the optical signal, and the risk of igniting or detonating some dangerous substances exists.
Aiming at the defects of the detection mode, a light spot scanning technology is proposed, the basic principle is that the highly focused light spot is rapidly scanned on the surface of a sample according to a certain track, the scanning range of the sample is enlarged while the high resolution is kept, the Raman detection result of the heterogeneous sample can be greatly improved, and the component information of the sample can be obtained within a period of time only by scanning in sequence, so that the sensitivity is improved; and due to the rapid scanning of the light spots, the average power of the laser on a unit area is greatly reduced, and the possibility of damaging a sample and igniting an explosive sample can be eliminated.
A special grid surrounding scanning technology (ROS for short) for Raman spectrum, which is provided by ocean optics, greatly improves the Raman detection result of a heterogeneous sample by rapidly scanning highly focused light spots on the surface of the sample according to a certain track, and can improve the sensitivity by 5-10 times without losing resolution; and the average power requirement of ROS is lower, thus eliminating the possibility of damage to the sample and ignition of the explosive sample. The light spot scanning and sampling technology of the Raman spectrometer adopts single-point laser for scanning, the actual sampling time of a single point on a sample surface is compressed to be shorter due to scanning, the integral sampling time of the device is hardly influenced for a pure sample or a sample with higher concentration, but the detection time which is far longer than that of the pure sample is needed for a sparse sample so as to obtain a Raman spectrum signal with high enough.
Disclosure of Invention
The present invention is directed to solving the problems described above. It is an object of the present invention to provide a raman spectroscopy probe that solves any of the above problems. Specifically, the Raman spectrum probe provided by the invention has the advantages that the field detection range can be enlarged, the risk of igniting or detonating dark sensitive substances is reduced, the acquisition efficiency is improved, and the structure is simple.
In order to solve the technical problems, the invention provides a raman spectrum probe, which comprises a laser light source, a dichroic mirror, a micro-vibration scanning mirror, a micro-lens array, a raman filter and an exit slit, wherein the micro-lens array is positioned at a detection inlet of the raman spectrum probe, and the exit slit is positioned at an exit end of the raman spectrum probe; the excitation light beam emitted by the laser light source is reflected by the dichroic mirror and the micro-vibration scanning mirror in sequence and then irradiates an article to be detected on the micro-lens array, and a Raman scattering signal generated by exciting the article to be detected by the excitation light beam passes through the micro-lens array, the micro-vibration scanning mirror and the dichroic mirror in sequence, is filtered by the Raman filter and then is emitted through the exit slit; the micro-vibration scanning mirror comprises a reflecting mirror and a vibration mechanism connected with the reflecting mirror.
The vibration mechanism comprises a flexible mirror frame and a plurality of miniature vibration motors, the reflecting mirror is fixed on the first surface of the flexible mirror frame, and the miniature vibration motors are in transmission connection with the flexible mirror frame.
The miniature vibration motors comprise at least one transverse vibration motor and at least one longitudinal vibration motor, and the transverse vibration motor is perpendicular to the mounting direction or the vibration direction of the longitudinal vibration motor.
The flexible mirror frame is characterized in that the middle parts of two opposite side edges of the flexible mirror frame are respectively provided with a first deflection shaft, two U-shaped grooves which are oppositely arranged are arranged on the flexible mirror frame, a second deflection shaft is formed between two ends of each U-shaped groove, and the extension direction of the second deflection shaft is perpendicular to that of the first deflection shaft.
The vibration mechanism comprises a flexible mirror bracket and a plurality of magnetic vibration assemblies, the reflector is fixed on the first surface of the flexible mirror bracket, and the magnetic vibration assemblies are fixedly connected with the flexible mirror bracket.
The magnetic vibration assembly comprises permanent magnets and magnetic current coils which are arranged in a one-to-one correspondence mode.
Wherein, the magnetic vibration component comprises at least one group of horizontal magnetic vibration components and at least one group of vertical magnetic vibration components.
The Raman spectrum probe further comprises a narrow-band filter and a collimating lens which are sequentially arranged between the laser light source and the dichroic mirror.
The Raman spectrum probe further comprises a coupling lens arranged between the Raman filter and the emergent slit.
The Raman spectrum probe provided by the invention effectively enlarges the area of a detected sample by adopting the micro-lens array, disperses the excitation light beam into a converged laser spot which is dozens of times or hundreds of times, and greatly reduces the laser power density of a single convergent point, thereby being capable of bearing higher total excitation light power and improving the acquisition efficiency; the micro-vibration scanning mirror realizes high-efficiency scanning sampling of full coverage in a large-range detection surface, effectively prevents the heat enrichment caused by long-time irradiation of light beams, improves the signal-to-noise ratio, improves the safety of detection on sensitive materials and the reliability of results, and is particularly suitable for sampling detection of mixtures and sparse samples.
Other characteristic features and advantages of the invention will become apparent from the following description of exemplary embodiments, which is to be read in connection with the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention. In the drawings, like reference numerals are used to indicate like elements. The drawings in the following description are directed to some, but not all embodiments of the invention. For a person skilled in the art, other figures can be derived from these figures without inventive effort.
FIG. 1 schematically illustrates one configuration of a Raman spectroscopy probe of the present invention;
FIG. 2 schematically illustrates a structure of a microlens array;
FIG. 3 schematically illustrates a laser dot matrix scanning scheme for microlens array formation;
FIG. 4 schematically illustrates a schematic of one configuration of a micro-oscillating scan mirror;
FIG. 5 schematically illustrates another configuration of a micro-oscillating scan mirror;
FIG. 6 schematically illustrates a side view of a third configuration of a micro-oscillating scan mirror.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. It should be noted that the embodiments and features of the embodiments in the present application may be arbitrarily combined with each other without conflict.
In order to effectively reduce the single-point power density of a laser beam, prevent explosion caused by detection of sensitive materials by thermal enrichment of laser and improve the detection safety, the inventor adopts a micro-lens array to disperse an excitation beam into dozens of times and hundreds of times of converged laser spots and then detects and feeds back signals of a sample; meanwhile, the irradiation angle of the excitation beam is adjusted by adopting the micro-vibration scanning mirror, so that full coverage and efficient scanning sampling in a large-range detection surface are realized, heat enrichment of laser irradiation on the surface of a sample is further prevented, the reliability of a detection result is improved, and the micro-vibration scanning mirror is particularly suitable for sampling of a mixture and a sparse sample.
The raman spectroscopy probe provided according to the present invention will be described in detail below with reference to the accompanying drawings.
Fig. 1 shows a schematic structural diagram of an embodiment of the raman spectroscopy probe of the present invention, and referring to fig. 1, the raman spectroscopy probe includes a laser light source 1, a dichroic mirror 2, a micro-vibration scanning mirror 3, a micro-lens array 4, a raman filter 5, and an exit slit 6. The micro lens array 4 is positioned at a detection inlet of the Raman spectrum probe, the exit slit 6 is positioned at an exit end of the Raman spectrum probe, an excitation beam emitted by the laser source 1 is dispersed by the micro lens array 4 and then irradiates the surface of the sample for excitation, and a generated Raman signal is transmitted through a light path and then exits from the exit slit 6 to the Raman analyzer for analysis and judgment. Specifically, an excitation light beam emitted by a laser light source 1 is reflected by a dichroic mirror 2 and a micro-vibration scanning mirror 3 in sequence, then passes through a micro-lens array 4 to form a detection laser dot matrix, and irradiates the detection laser dot matrix on the surface of an article to be detected, wherein the micro-vibration scanning mirror 3 makes the light beam generate micro displacement and deflection through vibration, so that the angle of the reflected excitation light beam is changed in a micro manner, and further the laser dot matrix passing through the micro-lens array 6 generates micro position deviation, and the scanning of array light spots is realized; based on the principle that the light path is reversible, Raman scattering signals generated by scanning and excitation of the surface of an object to be detected by a laser array are collimated into parallel light after passing through a micro-lens array 4, and then are filtered by a Raman filter 5 and converged to an emergent slit 6 to be emitted to a Raman spectrometer after sequentially passing through reflection of a micro-vibration scanning mirror 3 and transmission of a dichroic mirror 2, and the Raman spectrometer receives the Raman signals and then analyzes and judges to obtain a detection result of the object to be detected.
The traditional Raman spectrum probe can only keep a higher numerical aperture at the center of a detection surface due to the field of view limitation of a slit of a Raman spectrometer, namely, the energy collection efficiency is higher only at the center of the detection surface; the Raman spectrum probe of the invention has the advantages of enlarged field range and uniform light beams in the field range, so that the high numerical aperture can be kept in the field range of the full detection surface, namely, the high energy collection efficiency is kept. Therefore, compared with the conventional raman probe, the raman spectrometer can obtain the same energy, and the power of a light source (such as the laser power of a laser) required by using the raman probe of the present invention can be greatly reduced. Meanwhile, the traditional Raman probe is used for single-point detection, and the detection area is in the micron order, so that the power density of a detection point is very high, and the risk of igniting and detonating a sample when detecting a dark sensitive substance is caused; the detection area of the Raman probe can reach the centimeter level, is 1-2 orders of magnitude higher than that of the traditional Raman probe, and the power of a light source is lower than that of the light source of the traditional Raman probe, so that the Raman probe has low energy density and a large field range, and can effectively reduce the risk of igniting and detonating a deep color sensitive substance sample in the actual use process.
Compared with the traditional single-point ROS scanning technology, under the condition of keeping the single-convergent-point laser energy density at the same level, the invention can use total excitation light energy with higher power because tens to hundreds of times of sampling points are adopted for scanning and collecting at the same time, so that the Raman spectrum detection of the same sample can greatly shorten the sampling time and improve the sampling efficiency, and the method is more suitable for detecting heterogeneous mixture samples and sparse samples.
Fig. 2 shows a 5 × 5 microlens array 4, fig. 3 is a schematic view of a laser dot matrix scan formed by using the 5 × 5 microlens array 4, and exemplarily, if the full aperture size of the microlens array 4 is 10 × 10mm, the sub-aperture size is 2 × 2mm, the raman spectrum probe of the present scheme can form 25 dots of detection light spots on a 10 × 10mm detection surface, and the micro-vibration scanning mirror 3 realizes the scan within 1-2mm of the single light spot.
Fig. 4 shows a schematic structural diagram of the micro-vibration scanning mirror 3, and as shown in the figure, the micro-vibration scanning mirror 3 comprises a reflecting mirror 31 and a vibration mechanism 32 connected with the reflecting mirror 31. In the detection process, the reflector 31 is driven by the vibration mechanism 32 to vibrate so that light beams generate slight angle deviation and position deviation, the converged laser power is weakened, the vibration scanning homogenization of a laser dot matrix is realized, the field range of detection is expanded, the risk of igniting and detonating a dark sensitive substance sample in detection is further reduced, and the capability of detecting a non-uniform mixture sample and a sparse sample and the reliability of a detection result are improved.
In this embodiment, the vibrating mechanism 32 includes a flexible frame 321 and a plurality of micro-vibrating motors 322, the reflecting mirror 31 is fixed on a first surface of the flexible frame 321, and the micro-vibrating motors 322 are in transmission connection with the flexible frame 321 through a second surface of the flexible frame 321, where the second surface of the flexible frame 321 is an opposite surface of the first surface. Illustratively, the flexible mirror frame 321 can be made of an ABS plastic thin plate with a thickness of 0.5-2 mm, the reflector 31 is fixed in the middle of the first surface of the flexible mirror frame 321, and the micro-vibration motor 322 is fixed at the edge of the second surface of the flexible mirror frame 321. The connection between the reflector 31 and the flexible frame 321 and the connection between the micro vibration motor 322 and the flexible frame 321 may be fixed by bonding or welding, or may be any one of a clamping connection, a threaded connection, and a clamping ring connection.
Specifically, the plurality of micro vibration motors 322 includes at least one transverse vibration motor 322a and at least one longitudinal vibration motor 322b, and the transverse vibration motor 322a is perpendicular to the mounting direction or vibration direction of the longitudinal vibration motor 322 b. In the embodiment shown in fig. 4, the flexible frame 321 is a rectangular structure, and a set of two opposite sides of the second surface of the flexible frame are respectively provided with a transverse vibration motor 322a and a set of two opposite sides of the second surface of the flexible frame are respectively provided with a longitudinal vibration motor 322 b. Four corners of the flexible mirror bracket 321 with the rectangular structure are fixed at preset installation positions in a light path, and the flexible mirror bracket 321 can be reversibly deformed due to the vibration of the transverse vibration motor 322a and the longitudinal vibration motor 322b, so that the reflector 31 is driven to slightly displace and deflect, the excitation light beams are reflected in different directions and at different angles, and the scanning range of the excitation light beams is enlarged. The thinner the thickness of the flexible mirror frame 321, the larger the amplitudes of the transverse vibration motor 322a and the longitudinal vibration motor 322b are, the larger the deformation of the flexible mirror frame 321 is, that is, the larger the optical axis deflection generated by the driving mirror 31 is, so that the scanning range of the excitation beam is larger.
In practical application, the adjustment of the scanning range can be realized by adjusting the amplitude and the vibration frequency of the micro vibration motor 322, and the change of the laser dot matrix scanning mode can be realized by changing the vibration mode of the micro vibration motor 322. Further, different scanning trajectories can be realized by changing the installation position, the installation angle, the number, and the like of the micro vibration motors 322. As shown in fig. 4, the mounting manner and mounting position can obtain the bidirectional light spot scanning tracks in the horizontal and vertical directions; if a micro-vibration motor 322 is installed at the position corresponding to the center of the reflector 31, a symmetrical spot scanning track is obtained; if the micro-vibration motor 322 is installed at another position, the scanning track of the light spot deflected in the corresponding axial direction can be obtained.
Fig. 5 shows a schematic structural diagram of the micro-vibration scanning mirror 3 in another specific embodiment, in this embodiment, two first deflection shafts 321a are respectively disposed in the middle of two opposite sides of the flexible mirror frame 321, two U-shaped grooves 321b are disposed on the flexible mirror frame 321, a second deflection shaft 321c is formed between two ends of the two U-shaped grooves 321b, and an extending direction of the second deflection shaft 321c is perpendicular to an extending direction of the first deflection shaft 321 a. The reflecting mirror 31 is located in the middle formed by the two U-shaped grooves 321b, the two transverse vibration motors are located on the two axial sides of the first yaw axis 321a and on the axis of the second yaw axis 321c outside the two U-shaped grooves 321b, and the two longitudinal vibration motors 322b are located on the axis of the first yaw axis 321a in the two U-shaped grooves 321b and on the two axial sides of the second yaw axis 321c, respectively. In this embodiment, the two transverse vibration motors 322a vibrate to drive the flexible mirror holder 321 to deflect along the first yaw axis 321a, so as to realize the deflection and displacement of the mirror 31 around the first yaw axis 321 a; the two longitudinal vibration motors 322b vibrate to drive the portion between the two U-shaped grooves 321b of the flexible mirror frame 321 to deflect and vibrate along the second yaw axis 321c, so as to realize the deflection and displacement of the reflector 31 around the second yaw axis 321c, and further realize the vibration displacement and the angular deflection of the reflector 32 along the directions of the first yaw axis 321a and the second yaw axis 321 c. The arrangement of the flexible frame 321 in this configuration makes the deflection angle and the displacement amplitude of the mirror 31 larger than those in the embodiment of fig. 4, i.e. further expands the scanning range of the light beam.
Fig. 6 shows a schematic structural diagram of the micro-vibration scanning mirror 3 in the third embodiment, and referring to fig. 6, the micro-vibration scanning mirror 3 still includes a vibration mechanism 32 and a reflecting mirror 31 fixed on the vibration mechanism 32, wherein the vibration principle of the vibration mechanism 32 can be implemented by using a magnetic vibration principle, and includes a flexible mirror frame 321 and a plurality of magnetic vibration assemblies 323, the reflecting mirror 31 is fixed on a first surface of the flexible mirror frame 321, and the magnetic vibration assemblies 323 are fixedly connected with a second surface of the flexible mirror frame 321.
The magnetic vibration assembly 323 comprises a permanent magnet 323-1 and a magnetic current coil 323-2 which are arranged in a one-to-one correspondence manner, wherein the permanent magnet 323-1 is fixed on the second surface of the flexible mirror frame 321, the magnetic current coil 323-2 is arranged below the permanent magnet 323-1, and the permanent magnet 323-1 generates corresponding displacement by controlling the electromagnetic field strength and the opening and closing of the magnetic current coil 323-2, so that the flexible mirror frame 321 drives the reflector 31 to generate deflection in opposite directions to generate displacement and angular deflection, and the scanning range of the laser beam is further expanded.
It should be noted that in this vibration mechanism 32, the flexible frame 321 can be the structure in the embodiment shown in fig. 4, or the flexible frame structure in the embodiment of fig. 5.
Specifically, the magnetic vibration assembly 323 can also include at least one horizontal magnetic vibration assembly 323a and at least one vertical magnetic vibration assembly 323b, where the installation position of the horizontal magnetic vibration assembly 323a and the vertical magnetic vibration assembly 323b is greater than 0 degree and less than 180 degrees relative to the center of the flexible lens holder 321.
In the present invention, the displacement and deflection angle of the mirror 31 can be range-limited: the final purpose of the displacement is to achieve an angular deflection, so that only the deflection angle can be roughly defined: the mechanical angle range of the deflection in the horizontal direction and the vertical direction is less than or equal to +/-10 degrees, the deflection angle and speed can be controlled by electrical parameters when the micro-lens is actually used, and the deflection angle required by practical application needs to be set according to the aperture and the focal length of the micro-lens and the required scanning range. For example, if the sub-aperture is 2 × 2mm, the focal length is set to 5mm, and the required sub-aperture spot coverage is 2 × 2mm, the required beam deflection angle is ± atan (1/5) ═ 11.3 degrees, and the beam deflection angle is half the mechanical deflection angle, so the actually required mechanical deflection angle is ± 5.65 degrees.
In addition, the raman spectrum probe of the present invention further includes a narrowband filter 11 and a collimating lens 12 which are sequentially disposed between the laser light source 1 and the dichroic mirror 2, and a coupling lens 7 which is disposed between the raman filter 5 and the exit slit 6.
In the invention, the micro-lens array 4 is adopted to disperse the excitation light beam, thereby effectively reducing the laser power of a single light spot, reducing the heat enrichment of laser irradiation, improving the detection safety of sensitive materials and enlarging the detection coverage; the micro-vibration scanning mirror 3 is used for realizing the position deviation and the angle deflection of the excitation light beam, further expanding the detection coverage range and the heat enrichment of a detection point, realizing the scanning detection of the light beam, further reducing the ignition and detonation risk of dark dangerous substances and improving the detection safety and the reliability of a detection result. In addition, the large-range and low-heat enrichment rapid scanning detection is particularly suitable for detection of heterogeneous mixtures and sparse samples, the sampling time can be greatly reduced, and the detection efficiency is improved.
The above-described aspects may be implemented individually or in various combinations, and such variations are within the scope of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Finally, it should be noted that: the above examples are only for illustrating the technical solutions of the present invention, and are not limited thereto. Although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A Raman spectrum probe is characterized by comprising a laser light source (1), a dichroic mirror (2), a micro-vibration scanning mirror (3), a micro-lens array (4), a Raman optical filter (5) and an exit slit (6), wherein the micro-lens array (4) is positioned at a detection inlet of the Raman spectrum probe, and the exit slit (6) is positioned at an exit end of the Raman spectrum probe; an excitation light beam emitted by the laser light source (1) is reflected by the dichroic mirror (2) and the micro-vibration scanning mirror (3) in sequence and then irradiates an article to be detected through the micro-lens array (4), and a Raman scattering signal generated by exciting the article to be detected by the excitation light beam passes through the micro-lens array (4), the micro-vibration scanning mirror (3) and the dichroic mirror (2) in sequence, is filtered by the Raman filter (5) and then is emitted through the emergent slit (6);
wherein the micro-vibration scanning mirror (3) comprises a reflecting mirror (31) and a vibration mechanism (32) connected with the reflecting mirror (31).
2. A raman spectroscopy probe according to claim 1, wherein said vibrating mechanism (32) comprises a flexible frame (321) and a plurality of micro-vibrating motors (322), said mirror (31) being fixed to a first face of said flexible frame (321), said micro-vibrating motors (322) being drivingly connected to said flexible frame (321).
3. A raman spectroscopy probe according to claim 2, characterized in that said plurality of micro-vibration motors (322) comprises at least one transversal vibration motor (322a) and at least one longitudinal vibration motor (322b), said transversal vibration motor (322a) being perpendicular to the mounting direction or vibration direction of said longitudinal vibration motor (322 b).
4. A raman spectroscopy probe according to claim 2, wherein a first yaw axis (321a) is respectively disposed at the middle of two opposite sides of the flexible frame (321), two U-shaped grooves (321b) are disposed on the flexible frame (321), a second yaw axis (321c) is formed between two ends of the two U-shaped grooves (321b), and the extending direction of the second yaw axis (321c) is perpendicular to the extending direction of the first yaw axis (321 a).
5. A raman spectroscopy probe according to claim 1, wherein said vibrating mechanism (32) comprises a flexible frame (321) and a plurality of magnetic assemblies (323), said mirror (31) being secured to a first face of said flexible frame (321), said magnetic assemblies (323) being fixedly connected to said flexible frame (321).
6. A Raman spectroscopy probe according to claim 5, wherein the magnetic vibrator assembly (323) comprises a permanent magnet (323-1) and a magnetic flux coil (323-2) arranged in a one-to-one correspondence.
7. A Raman spectroscopy probe according to claim 5 wherein the magnetic assemblies (323) comprise at least one set of horizontal magnetic assemblies (323a) and at least one set of vertical magnetic assemblies (323 b).
8. Raman spectroscopic probe according to claim 1, characterized in that it further comprises a narrow band filter (11) and a collimating lens (12) arranged in sequence between said laser light source (1) and said dichroic mirror (2).
9. Raman spectroscopy probe according to claim 1, characterized in that it further comprises a coupling lens (7) arranged between said raman filter (5) and said exit slit (6).
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CN112326585A (en) * | 2020-10-28 | 2021-02-05 | 南京农业大学 | Infrared spectrum device and detection method for rapidly detecting powdery mildew of strawberries |
CN112421355A (en) * | 2020-11-24 | 2021-02-26 | 山西大学 | Device and method for directly generating stable multi-beam pulse ultraviolet laser |
CN112756801A (en) * | 2020-12-18 | 2021-05-07 | 浙江泰仑电力集团有限责任公司 | Laser foreign matter removing device and method based on lens micro-vibration and steering control |
WO2023097815A1 (en) * | 2021-12-01 | 2023-06-08 | 中国科学院光电技术研究所 | Raman spectrum-based particle detection and analysis system and method |
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CN112326585A (en) * | 2020-10-28 | 2021-02-05 | 南京农业大学 | Infrared spectrum device and detection method for rapidly detecting powdery mildew of strawberries |
CN112326585B (en) * | 2020-10-28 | 2021-10-22 | 南京农业大学 | Infrared spectrum device and detection method for rapidly detecting powdery mildew of strawberries |
CN112421355A (en) * | 2020-11-24 | 2021-02-26 | 山西大学 | Device and method for directly generating stable multi-beam pulse ultraviolet laser |
CN112421355B (en) * | 2020-11-24 | 2021-11-19 | 山西大学 | Device and method for directly generating stable multi-beam pulse ultraviolet laser |
CN112756801A (en) * | 2020-12-18 | 2021-05-07 | 浙江泰仑电力集团有限责任公司 | Laser foreign matter removing device and method based on lens micro-vibration and steering control |
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