CN111157393B - Trace mass sensor signal detection circuit - Google Patents
Trace mass sensor signal detection circuit Download PDFInfo
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- CN111157393B CN111157393B CN202010028483.1A CN202010028483A CN111157393B CN 111157393 B CN111157393 B CN 111157393B CN 202010028483 A CN202010028483 A CN 202010028483A CN 111157393 B CN111157393 B CN 111157393B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
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- G—PHYSICS
- G01—MEASURING; TESTING
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- G01G9/00—Methods of, or apparatus for, the determination of weight, not provided for in groups G01G1/00 - G01G7/00
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/30—Against vector-borne diseases, e.g. mosquito-borne, fly-borne, tick-borne or waterborne diseases whose impact is exacerbated by climate change
Abstract
The invention discloses a signal detection circuit of a micro mass sensor, which comprises a sensor, a signal output unit and a signal detection unit, wherein the signal output unit is connected with the signal detection unit; the sensor adopts a sound surface device; the sensor reference channel of the sensor and signal output unit generates an oscillation signal as a reference signal, and the oscillation signal is used as an excitation signal of the sensing channel; the signal detection unit realizes the phase tracking of the oscillation reference signal of the reference channel of the sensor and the output signal of the sensing channel, and the phase tracking result adopts digital output and keeps a proportional relation with the mass change of a sensitive area of the sensing channel. The invention overcomes the phenomena of frequency hopping or vibration stopping and the like easily existing in the traditional oscillation method for realizing the detection of the surface acoustic wave signal, and also avoids the defects of limited measurement range, complex system and the like caused by the measurement of the frequency mixing method.
Description
Technical Field
The invention relates to the field of signal detection, in particular to a signal detection circuit of a trace mass sensor.
Background
Trace mass detection has wide application in many fields, such as gas detection (PM2.5, hydrogen, sulfur, DNT, TNT, CO)2Etc.) it is essentially the mass change deposited on the sensor by the trace amount of gas to be measured in the air that causes the output signal of the sensor to change; in the detection fields of biology, medicine, chemistry and the like, detection of aflatoxin, vancomycin, vibrio cholerae, heavy metals, carbafuran, antibody-antigen, early diagnosis of cancer of an aptamer and the like is realized by selectively capturing a substance to be detected by a sensor, so that the quality of the substance to be detected deposited on the surface of the sensor is changed, and the output signal of the sensor is changed.
Sensors for detecting the above trace mass are common: quartz Crystal Microbalances (QCMs), micro-cantilevers, surface acoustic wave Sensors (SAW), etc. The quartz crystal microbalance is influenced by the size of the quartz crystal microbalance, the resonance frequency of the quartz crystal microbalance cannot be very high, and therefore, the detection sensitivity is difficult to improve. The micro-cantilever has high detection sensitivity, the common micro-cantilever adopts an optical detection method, but a micro-cantilever detection system based on the optical detection is easily interfered, such as bubbles, colors, impurities and the like in a solution. In addition, the micro-cantilever beam for optical reading needs to be subjected to complex alignment adjustment before use, which is time-consuming and labor-consuming. Compared with the fundamental frequency of a quartz crystal microbalance, the fundamental frequency of the surface acoustic wave can reach GHZ level, so that the surface acoustic wave mass sensor is more sensitive than a quartz crystal microbalance sensor, and the lower detection limit can reach fg theoretically, thereby obtaining the principles of the surface acoustic wave mass sensor and the application thereof in field detection [ J ] chemical development, 2005, 17 (5): 876-.
Surface acoustic wave mass sensors commonly use an oscillation signal to realize detection (zhonghong, royal, congpo. applied to the design of surface acoustic wave oscillators of gas sensors [ J ]. instruments and meters, 2007, 28 (4): 9-10, supplement), and the principle is that when a periodic electric signal passes through an interdigital electrode on the surface of the surface acoustic wave mass sensor, a mechanical wave is generated and transmitted along a piezoelectric substrate, and the mechanical wave is converted into the periodic electric signal at the other end, when the mass deposited on the piezoelectric substrate is changed, the mechanical wave is changed, and the finally converted periodic electric signal is changed accordingly, that is, the mass change deposited on the piezoelectric substrate and the finally output frequency signal are in a proportional relationship. However, the oscillator also has a defect in realizing the detection of the surface acoustic wave signal, and when the mass change is large, namely the frequency change range is wide, phenomena such as frequency hopping or vibration stopping are easy to occur, so that unpredictable results are caused. In addition, the oscillation working frequency of the surface acoustic wave is generally high, and exceeds the range of a general frequency tester, measurement needs to be carried out through a mixing method, so that the measurement range is limited, and the system complexity is increased.
Disclosure of Invention
The invention aims to overcome the defect that the surface acoustic wave oscillation method in the background technology is used for measuring the trace mass, and provides a signal detection circuit of a trace mass sensor. The technical scheme of the invention is as follows:
a signal detection circuit of a micro mass sensor comprises a sensor, a signal output unit and a signal detection unit. The sensor is connected with the output end of the signal output unit and the input end of the signal detection unit.
The sensor and signal output unit comprises a first metal interdigital, a second metal interdigital, a third metal interdigital, a fourth metal interdigital, a piezoelectric substrate, an amplifier, a phase-shifting circuit and a sensitive area. The first metal interdigital and the second metal interdigital form a sensor reference channel, the third metal interdigital and the fourth metal interdigital form a sensing channel, the sensor reference channel and the sensing channel are both of a delay structure, and the middle area of the third metal interdigital and the fourth metal interdigital is a sensitive area. Preferably, the piezoelectric substrate material is lithium niobate or lithium tantalate, but is not limited to lithium niobate or lithium tantalate materials.
One end electrode of a second metal interdigital of the sensor reference channel is connected with the ground, the other end electrode of the sensor reference channel is connected with the input end of a phase-shifting circuit, the output end of the phase-shifting circuit is connected with the input end of an amplifier, and the output end of the amplifier is simultaneously connected with one end electrode of a first metal interdigital, one end electrode of a third metal interdigital and the input end of a first amplification shaping circuit in the signal detection unit. The other end electrode of the first metal interdigital is connected with the ground. The other end electrode of the third metal interdigital of the sensor sensing channel is connected with the ground, one end electrode of the fourth metal interdigital is connected with the input end of the second amplification shaping circuit in the signal detection unit, and the other end electrode of the fourth metal interdigital is connected with the ground.
The signal detection unit comprises a first amplification shaping circuit, a second amplification shaping circuit, a frequency divider, a D trigger, a counter, a microcontroller, control switches K1-Kn and signal delay devices D1-Dn, wherein n is a natural number greater than 1.
The first amplifying and shaping circuit and the signal delay devices D1-Dn are connected in series, that is, the output end of the first amplifying and shaping circuit is connected with the input end of the signal delay device D1, the output end of the signal delay device D1 is connected with the input end of the signal delay device D2, the output end of the signal delay device Dn-1 is connected with the input end of the signal delay device Dn, and the output end of the signal delay device Dn is connected with the clock input end of the D flip-flop. The output end of the second amplifying and shaping circuit is simultaneously connected to the data input end of the D trigger and the input end of the frequency divider, the output end of the frequency divider is connected to the clock input end of the counter, and the reverse data output end of the D trigger is connected to the counting end of the counter. The data output ends Q1-Qn of the counter are respectively connected to the control switches K1-Kn, and the data output ends Q1-Qn of the counter are respectively connected to the input/output ports S1-Sn of the microcontroller. One input/output port control pin of the microcontroller is connected with the count zero clearing pin of the counter. Two ends of a control switch K1 are respectively connected to the input end and the output end of a signal delay device D1, two ends of a control switch K2 are respectively connected to the input end and the output end of a signal delay device D2, two ends of a control switch Kn-1 are respectively connected to the input end and the output end of a signal delay device Dn-1, and two ends of the control switch Kn are respectively connected to the input end and the output end of the signal delay device Dn, namely the control switches K1 to Kn respectively control whether input signals of the signal delay devices D1 to Dn pass through the corresponding signal delay devices or not, the corresponding control switches are opened when the signals pass through the corresponding signal delay devices, the corresponding control switches are not closed when the signals pass through the corresponding signal delay devices, and the corresponding signal delay devices are short-circuited.
The signal delay devices D1-Dn are implemented by an inverter, or a nand gate, or a buffer, but are not limited thereto.
The frequency divider, the D trigger, the counter, the microcontroller and the signal delay devices D1-Dn can be realized by discrete devices, and can also be realized by an editable logic device FPGA or CPLD.
The sensor and a sensor reference channel of the signal output unit form an oscillating circuit through the first metal interdigital, the second metal interdigital, the phase shift circuit and the amplifier, a generated oscillating signal is used as a reference signal, the oscillating signal is used as an excitation signal of the sensing channel, and a signal received by the fourth metal interdigital is used as a sensing output signal.
The signal detection unit is used for realizing phase tracking of the oscillation reference signal of the reference channel of the sensor and the fourth metal interdigital output signal of the sensing channel. The mass change of the sensitive area of the sensing channel of the sensor keeps a proportional relation with the value output by the data output end of the counter, and the mass change of the sensitive area of the sensing channel can be obtained by reading the value output by the data output end of the counter through the microcontroller.
Drawings
FIG. 1 is a schematic block diagram of a trace mass sensor signal detection;
fig. 2 is a schematic diagram of a signal detection circuit of a micro mass sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, a micro mass sensor signal detection circuit includes a sensor and signal output unit 1 and a signal detection unit 2. The sensor is connected with the output end of the signal output unit 1 and the input end of the signal detection unit 2.
As shown in fig. 2, the sensor and signal output unit 1 includes a first metal finger IDT1, a second metal finger IDT2, a third metal finger IDT3, a fourth metal finger IDT4, a piezoelectric substrate 12, an amplifier IC1, a phase shift circuit C3, and a sensitive area 11. The first metal interdigital IDT1 and the second metal interdigital IDT2 form a sensor reference channel, the third metal interdigital IDT3 and the fourth metal interdigital IDT4 form a sensing channel, the sensor reference channel and the sensing channel are both in a delay structure, and the middle area of the third metal interdigital IDT3 and the fourth metal interdigital IDT4 is a sensitive area 11. Preferably, the piezoelectric substrate 12 material is lithium niobate or lithium tantalate, but is not limited to lithium niobate or lithium tantalate materials.
One end electrode of the second metal interdigital IDT2 of the sensor reference channel is connected with the ground, the other end electrode is connected with the input end of the phase shift circuit C3, the output end of the phase shift circuit C3 is connected with the input end of the amplifier IC1, and the output end of the amplifier IC1 is simultaneously connected with one end electrode of the first metal interdigital IDT1, one end electrode of the third metal interdigital IDT3 and the input end of the first amplification shaping circuit C1 in the signal detection unit 2. The other end electrode of the first metal interdigital IDT1 is connected to ground. The other end electrode of the third metal interdigital IDT3 of the sensor sensing channel is connected to ground, one end electrode of the fourth metal interdigital IDT4 is connected to the input end of the second amplification and shaping circuit C2 in the signal detection unit 2, and the other end electrode is connected to ground.
The signal detection unit 2 comprises a first amplification shaping circuit C1, a second amplification shaping circuit C2, a frequency divider IC2, a D trigger IC3, a counter IC4, a microcontroller IC5, control switches K1 to Kn and signal delay devices D1 to Dn, wherein n is a natural number greater than 1.
The first amplification shaping circuit C1 and the signal delay devices D1-Dn are connected in series, that is, the output end of the first amplification shaping circuit C1 is connected with the input end of the signal delay device D1, the output end of the signal delay device D1 is connected with the input end of the signal delay device D2, the output end of the signal delay device Dn-1 is connected with the input end of the signal delay device Dn, and the output end of the signal delay device Dn is connected with the clock input end of the D flip-flop. The output terminal of the second amplifying and shaping circuit C2 is connected to the data input terminal D of the D flip-flop IC3 and the input terminal of the frequency divider IC2, the output terminal of the frequency divider IC2 is connected to the clock input terminal cp of the counter IC4, and the inverted data output terminal of the D flip-flop IC3
Is connected to the count terminal CNT of the counter IC 4. The data output terminals Q1 to Qn of the counter IC4 are connected to the control switches K1 to Kn, respectively, and the data output terminals Q1 to Qn of the counter IC4 are connected to the input/output ports S1 to Sn of the microcontroller IC5, respectively. One of the input/output ports of the microcontroller IC5 controls the connection of pin RST to the count clear pin CLR of the counter IC 4. Two ends of a control switch K1 are respectively connected to the input end and the output end of the signal delay device D1, two ends of a control switch K2 are respectively connected to the input end and the output end of the signal delay device D2, two ends of a control switch Kn-1 are respectively connected to the input end and the output end of the signal delay device Dn-1, and two ends of the control switch Kn are respectively connected to the input end and the output end of the signal delay device Dn, namely controlThe control switches K1-Kn respectively control whether the input end signals of the signal delay devices D1-Dn pass through the corresponding signal delay devices, the corresponding control switches are opened when the signals need to pass through, and the corresponding control switches are closed when the signals do not need to pass through, so that the corresponding signal delay devices are short-circuited.
The signal delay devices D1-Dn are implemented by an inverter, or a nand gate, or a buffer, but are not limited thereto.
The frequency divider IC2, the D flip-flop IC3, the counter IC4, the microcontroller IC5 and the signal delay devices D1-Dn can be realized by discrete devices, and can also be realized by an editable logic device FPGA or a CPLD.
The sensor reference channel is formed into an oscillation circuit by a first metal finger IDT1, a second metal finger IDT2, a phase shift circuit C3 and an amplifier IC 1. The oscillating signal is simultaneously fed to the input terminal of the first amplifying and shaping circuit C1 and the third metal interdigital IDT3 of the sensing channel. The oscillating signal passes through the sensitive region 11 of the sensing channel and is received by the fourth metal interdigital IDT 4. The signal received by the fourth metal finger IDT4 is fed to the second amplification and shaping circuit C2. When the mass of the substance to be measured in the sensitive area 11 of the sensing channel changes, the phase of the output signal of the second amplifying and shaping circuit C2 changes, and the phase difference is formed between the output signal of the first amplifying and shaping circuit C1.
The output signal of the first amplifying and shaping circuit C1 is fed back to the clock input end ck of the D flip-flop IC3 through the signals of the signal delay devices D1 Dn. When the output signal of the second amplification and shaping circuit C2 leads the clock input ck of the D flip-flop IC3, the inverted data output end of the D flip-flop IC3
Is 0; when the output signal of the second amplifying and shaping circuit C2 lags behind the clock input ck of the D flip-flop IC3, the inverted data output terminal of the D flip-flop IC3
Is 1. The rising edge of the clock input end cp of the counter IC4 is opposite to the inverted data output end of the D flip-flop IC3
Counting is carried out, the counting result is output by the data output ends Q1-Qn of the counter IC4, and the control switches K1-Kn are controlled to be switched on and switched off, so that the delay time of the signal delay devices D1-Dn is adjusted, the signal phase of the clock input end ck of the D trigger IC3 is further adjusted, and the output signal of the second amplification and shaping circuit C2 and the clock input end ck of the D trigger IC3 are kept stable. One of the input/output port control pins RST of the microcontroller IC5 is connected to the count clear pin CLR of the counter IC4 to clear the count value. Thus, the phase difference between the output signal of the second amplification and shaping circuit C2 and the output signal of the first amplification and shaping circuit C1 is proportional to the values of the data output terminals Q1 to Qn of the counter IC4, i.e., the mass change of the sensor channel sensitive region 11 is proportional to the values of the data output terminals Q1 to Qn of the counter IC 4. The quality change of the sensing channel sensitive area 11 can be obtained by reading the values of the data output ends Q1-Qn of the counter IC4 through the microcontroller IC 5.
The above are only specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that are not thought of through the inventive work should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope defined by the claims.
Claims (4)
1. A trace mass sensor signal detection circuit, characterized by: comprises a sensor, a signal output unit and a signal detection unit; the sensor and signal output unit comprises a first metal interdigital, a second metal interdigital, a third metal interdigital, a fourth metal interdigital, a piezoelectric substrate, an amplifier, a phase-shifting circuit and a sensitive area; the sensor comprises a first metal interdigital, a second metal interdigital, a third metal interdigital, a fourth metal interdigital, a third metal interdigital and a fourth metal interdigital, wherein the first metal interdigital and the second metal interdigital form a sensor reference channel, the third metal interdigital and the fourth metal interdigital form a sensing channel, the sensor reference channel and the sensing channel are both of a delay structure, and the middle area of the third metal interdigital and the fourth metal interdigital is a sensitive area; the signal detection unit comprises a first amplification shaping circuit, a second amplification shaping circuit, a frequency divider, a D trigger, a counter, a microcontroller, control switches K1-Kn and signal delay devices D1-Dn, wherein n is a natural number greater than 1;
one end electrode of a second metal interdigital of the sensor reference channel is connected with the ground, the other end electrode of the sensor reference channel is connected with the input end of a phase-shifting circuit, the output end of the phase-shifting circuit is connected with the input end of an amplifier, and the output end of the amplifier is simultaneously connected with one end electrode of a first metal interdigital, one end electrode of a third metal interdigital and the input end of a first amplification shaping circuit in a signal detection unit; the other end electrode of the first metal interdigital is connected with the ground; the other end electrode of the third metal interdigital of the sensor sensing channel is connected with the ground, one end electrode of the fourth metal interdigital is connected with the input end of the second amplification shaping circuit in the signal detection unit, and the other end electrode is connected with the ground; the first amplifying and shaping circuit and the signal delay devices D1-Dn are connected in series, namely the output end of the first amplifying and shaping circuit is connected with the input end of the signal delay device D1, the output end of the signal delay device D1 is connected with the input end of the signal delay device D2, the output end of the signal delay device Dn-1 is connected with the input end of the signal delay device Dn, and the output end of the signal delay device Dn is connected with the clock input end of the D trigger; the output end of the second amplifying and shaping circuit is simultaneously connected to the data input end of the D trigger and the input end of the frequency divider, the output end of the frequency divider is connected to the clock input end of the counter, and the reverse data output end of the D trigger is connected to the counting end of the counter; the data output ends Q1-Qn of the counter are respectively connected to the control switches K1-Kn, and the data output ends Q1-Qn of the counter are respectively connected to the input/output ports S1-Sn of the microcontroller; one input/output port control pin of the microcontroller is connected with the counting zero clearing pin of the counter; two ends of a control switch K1 are respectively connected to the input end and the output end of a signal delay device D1, two ends of a control switch K2 are respectively connected to the input end and the output end of a signal delay device D2, two ends of a control switch Kn-1 are respectively connected to the input end and the output end of a signal delay device Dn-1, and two ends of the control switch Kn are respectively connected to the input end and the output end of the signal delay device Dn, namely the control switches K1 to Kn respectively control whether input signals of the signal delay devices D1 to Dn pass through the corresponding signal delay devices or not, the corresponding control switches are opened when the signals pass through the corresponding signal delay devices, the corresponding control switches are not closed when the signals pass through the corresponding signal delay devices, and the corresponding signal delay devices are short-circuited.
2. The trace mass sensor signal detection circuit of claim 1, wherein: the piezoelectric substrate material is lithium niobate or lithium tantalate.
3. The trace mass sensor signal detection circuit of claim 1, wherein: the signal delay devices D1-Dn are implemented by an inverter, or a nand gate, or a buffer, but are not limited thereto.
4. The trace mass sensor signal detection circuit of claim 1, wherein: the frequency divider, the D trigger, the counter, the microcontroller and the signal delay devices D1-Dn can be realized by discrete devices, and can also be realized by an editable logic device FPGA or CPLD.
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| US6945090B2 (en) * | 2002-06-24 | 2005-09-20 | Particle Measuring Systems, Inc. | Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS |
| TWI240072B (en) * | 2003-07-14 | 2005-09-21 | Ftech Corp | Surface acoustic wave sensor circuit system architecture |
| CN101458230A (en) * | 2008-12-29 | 2009-06-17 | 南开大学 | Multichannel surface acoustic wave chemical sensing system |
| CN102419417B (en) * | 2011-08-17 | 2014-02-26 | 北京时代民芯科技有限公司 | Test circuit for propagation delay of triggers in FPGA (Field Programmable Gate Array) |
| CN103575315A (en) * | 2013-11-05 | 2014-02-12 | 南京航空航天大学 | Method using delay line type surface acoustic wave sensor to test characteristic parameters of article |
| CN105116051A (en) * | 2015-09-06 | 2015-12-02 | 北京中讯四方科技股份有限公司 | Sound surface chemical sensor |
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| US6029324A (en) * | 1996-05-31 | 2000-02-29 | Siemens Aktiengesellschaft | Acoustical-electronic component operating with acoustical surface waves as well as a tunable delay line, a resonator and a semiconductor sensor using the component |
| CN101135670A (en) * | 2007-10-12 | 2008-03-05 | 电子科技大学 | Two-channel sonic surface wave gas sensors having humidity compensate function |
| CN101726538A (en) * | 2008-10-24 | 2010-06-09 | 中国科学院微电子研究所 | Acoustic surface wave gas sensor and manufacturing method thereof |
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