CN111156702B - Gas phase heating method and gas phase heating device - Google Patents
Gas phase heating method and gas phase heating device Download PDFInfo
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- CN111156702B CN111156702B CN201910962234.7A CN201910962234A CN111156702B CN 111156702 B CN111156702 B CN 111156702B CN 201910962234 A CN201910962234 A CN 201910962234A CN 111156702 B CN111156702 B CN 111156702B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H8/00—Fluid heaters characterised by means for extracting latent heat from flue gases by means of condensation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/012—Soldering with the use of hot gas
- B23K1/015—Vapour-condensation soldering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/02—Methods of steam generation characterised by form of heating method by exploitation of the heat content of hot heat carriers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
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- Chemical & Material Sciences (AREA)
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Abstract
The invention provides a vapor phase heating method and a vapor phase heating apparatus capable of reducing the pressure difference of vapor of a thermal conversion liquid between adjacent vapor heating furnaces. The vapor cooling unit (12) has the capability of liquefying and condensing all of the introduced vapor so as to cancel out the volume of the vapor (3) vaporized and expanded in the furnaces (4, 5), and has a pressure adjusting unit (19) for maintaining the inside of the cooling unit at a constant pressure. By coupling the steam cooling unit to the furnace, the steam in the furnace is guided into the steam cooling unit, and the pressure in the furnace is also kept constant.
Description
Technical Field
The present invention relates to a gas phase heating method and a gas phase heating apparatus for heating an object to be heated by using latent heat of condensation of vapor of a heat conversion liquid.
Background
In recent years, in a process of assembling and manufacturing various industrial products and home electric appliances, or in a process of manufacturing devices such as various electronic components as constituent components of these products, various batteries, and a substrate on which electronic components are mounted, shapes of objects to be heated to be processed by various heat treatment apparatuses have become complicated. For example, in a substrate on which electronic components are mounted, heat treatment for melting and joining solder paste is performed in a state of weak holding force, such as disposing the electronic components by applying only the solder paste to not only a planar substrate but also a portion other than a horizontal plane of a three-dimensional substrate. In addition, since the object is three-dimensional, the heat capacity itself of the object tends to increase. Here, the various heat treatment apparatuses are, for example, a drying oven, a curing oven, a reflow oven for soldering in a mounting process of electronic components, or the like.
In these heating processes of the object, when the temperature rise of each portion of the object varies due to uneven heating power, it is necessary to maintain the object for a desired time from a state in which all portions are raised to a desired temperature in order to obtain a desired required time in the heating process, and therefore, in order to maintain the portion where the temperature rise is slow for a desired time, the portion where the temperature rise is fast is exposed to heat more than necessary, and particularly, in the case of the object having a large thermal influence, there is a possibility that the quality of the object is affected. In the case of a heating process using heat transfer by hot air collision, if the heat capacity of the object to be heated is large, the heat transfer rate can be increased by increasing the collision speed of hot air against the object to be heated in order to obtain a desired temperature increase speed.
However, for example, in the case where it is necessary to heat treat a portion other than the horizontal surface of the three-dimensional substrate in a state where the holding force is weak such as disposing the electronic component by applying only solder paste, there is a high possibility that the component is peeled off from the substrate by colliding hot air at a high speed after the solder is melted and before solidification of the solder by cooling is completed.
Therefore, as a method for efficiently heating an object to be heated by utilizing a high heat transfer rate while avoiding peeling of members due to collision with hot air even with a substrate having a large heat capacity, a heating method based on a steam heating furnace that heats the object by utilizing latent heat of condensation of vapor of a heat transfer liquid is known. Since the steam used in such a steam heating furnace has a higher specific gravity than air, the air and the steam are easily separated into 2 phases, but since an entrance is generally provided in the steam heating furnace in order to carry an object to be heated into and out of the steam heating furnace, the steam easily flows out of the furnace, and the steam cannot be recovered and valuable vapor of the heat conversion liquid is lost.
As a countermeasure against this, the following method is generally known.
(1) And a method for carrying the object to be heated into and out of the steam heating furnace from an opening provided above an interface at which air in the steam heating furnace and vapor of the thermal conversion liquid are separated by a difference in specific gravity therebetween.
(2) A method of providing a double-sided gate or the like at an entrance and an exit of a steam heating furnace for carrying in and out an object to be heated, constituting a closed space for temporarily partitioning the steam heating furnace from an external space, and partitioning the steam heating furnace from the external space at the time of carrying in and carrying out the object to be heated.
(3) A method in which a long passage is provided at an entrance and an exit of a steam heating furnace, and a condenser for condensing vapor of a heat conversion liquid by a cooling unit or the like is installed in the middle of the passage, thereby condensing and recovering the vapor flowing out into the passage.
However, in the case of the method (1), in order to heat the object to be heated, it is necessary to move the object to be heated downward to a level at which the object to be heated is immersed in the vapor of the heat conversion liquid with respect to the horizontal plane on which the object to be heated is carried into the vapor heating furnace, and therefore, the mechanism for carrying becomes complicated, and the vapor of the heat conversion liquid in the vapor heating furnace is stirred when the object to be heated is carried into and immersed in the vapor phase, and therefore, air is mixed with the vapor of the heat conversion liquid, and there is a possibility that the heating capacity itself based on the latent heat of condensation of the vapor of the heat conversion liquid is lowered.
In the case of the method (2), particularly in the case where the steam heating furnace side shutter of the closed space is temporarily opened for transferring the object to be heated to the closed space on the outlet side of the steam heating furnace, the steam of the heat conversion liquid is also introduced into the closed space together with the object to be heated, the steam heating furnace side shutter of the closed space is closed, and the external space side shutter of the closed space is temporarily opened for carrying out the object to be heated to the external space, so that it is impossible to prevent a part of the steam of the heat conversion liquid from flowing out to the external space in association with the carrying out of the object to be heated to the external space.
In the case of the method (3), the vapor of the thermal conversion liquid is once cooled and liquefied and then recovered, so that the latent heat of vaporization required for heating for vaporizing the thermal conversion liquid into vapor is directly taken away by cooling, and therefore a large amount of energy is lost, and depending on the cooling temperature of the vapor, the following cannot be completely prevented: under the action of the saturated vapor pressure of the thermal transformation liquid, the vapor of the thermal transformation liquid is not completely gasified, and a part of the vapor flows out to the atmosphere.
For these problems, for example, a method of patent document 1 is known. Fig. 11 is an explanatory diagram of a conventional gas phase welding apparatus of patent document 1. The structure disclosed in patent document 1 is as follows. Fig. 11 is a side view, and the left half of the steam heating furnace 35 is shown in longitudinal section. The liquid 40 is a heat-convertible liquid for generating the vapor 31 by heating. The exhaust port 32 is a nozzle for discharging the gas in the steam heating furnace 35 to the outside of the furnace. The port 33 is a port end that serves as a boundary between the inside and outside of the furnace. The conveyor 34 is a conveyor for carrying the object to be processed into the steam heating furnace 35. The duct 36 is a passage for carrying in and out the object to be processed, and is a passage for an air flow described later. The channel 37 is a channel extending from the channel 36, and is a path into which an object to be heated is carried. The duct 38 is a duct that is branched from the duct 36 at the boundary between the duct 36 and the duct 37, extends obliquely upward from the upper portions of the ducts 36 and 37, and is a passage of the air flow passing through the duct 36. The discharge port 39 is a nozzle that discharges the air flow.
In operation, when the liquid 40 is heated to generate the vapor 31, the vapor 31 rises to a predetermined height in the vapor heating furnace 35, and an air-vapor interface 41 can be formed between the vapor and the upper air phase. On the other hand, a part of the vapor flows out of the furnace through the inlet and outlet 33 and the passage 37. Here, if an air flow having a momentum exceeding the momentum of the steam flowing out is generated in the duct 36, the steam flows through the duct 38 and is discharged from the discharge port 39, so that the steam 31 flowing out into the duct 37 can be pushed back by the air flow, and is prevented from flowing out of the furnace.
In order to generate a uniform flow direction of the air flow in the passage 36, the length of the passage 36 may be 3 times or more the height of the passage. In order to guide the air passing through the duct 36 to the upper portion as smoothly as possible, the duct 38 extends obliquely upward toward the steam heating furnace 35 side. This is because if a vortex is generated at the boundary of the passage 36 and the passage 38, the vapor in the passage 37 is involved. The gas flow is directed upwardly because the vapor 31 has a greater specific gravity to air and therefore collects in the lower portion, i.e., the channel 37.
For sealing the steam in the channel 37, and furtherIt is desirable to make the kinetic energy of the air passing through the passage 36 larger than the kinetic energy of the steam flowing out from the inlet and outlet 33 of the passage 37. That is, when the specific gravity of the vapor to air is α, the average flow velocity of the outflow vapor is V1, and the flow velocity of the air is V2, it is desirable that
This is true.
In the tunnel 37, when the pressure in the upper part of the steam heating furnace 35 is made lower than the pressure in the tunnel 38 so that the pressure is equalized between the air side and the steam side at the inlet and outlet 33 of the tunnel 37, the blowing pressure of the steam becomes lower, and therefore an inclined interface of air and steam is generated in the tunnel 37, and the outflow amount of the steam is greatly reduced.
Note that, if both the duct 36 and the duct 37 are slightly inclined so as to descend toward the steam heating furnace 35, the condensate naturally returns to the steam heating furnace 35, which is convenient.
Prior art documents
Patent document
Patent document 1: japanese laid-open patent publication No. 60-108163
Disclosure of Invention
Problems to be solved by the invention
In the configuration of patent document 1 described above, when the steam heating furnace is a device configured by only 1 zone, the operation of taking in an air flow from the outside and enclosing the vapor of the thermal conversion liquid in the steam heating furnace by air flow control can be realized as described above.
However, when a more complicated temperature profile needs to be formed, not only one region, but a plurality of devices for connecting and using a steam heating furnace, a heating furnace using a heating method other than a heating method using the latent heat of condensation of steam, and the like are required.
The present invention has been made to solve the above-described conventional problems, and an object thereof is to provide a vapor phase heating method and a vapor phase heating apparatus for a continuous furnace in which a plurality of heating furnaces including a vapor heating furnace for heating an object to be heated by utilizing latent heat of condensation of vapor of a heat-transfer liquid are connected, the vapor phase heating method and the apparatus being capable of reducing a pressure difference of vapor of the heat-transfer liquid between the adjacent vapor heating furnace and heating furnace without requiring a special mechanism for preventing outflow of the vapor.
Means for solving the problems
In order to achieve the above object, a gas phase heating method according to one aspect of the present invention is a gas phase heating method for heating an object to be heated by a continuous furnace, the continuous furnace including: at least one steam heating furnace that heats the object to be heated by using the latent heat of condensation of the vapor of the heat-to-liquid conversion fluid; and at least one heating furnace disposed in communication with the vapor heating furnace, wherein, in the vapor phase heating method,
carrying the object into the heating furnace or the steam heating furnace via a communication part communicating the heating furnace adjacent to the steam heating furnace and the steam heating furnace,
the vapor of the thermal conversion liquid in the vapor heating furnace is cooled and liquefied by a vapor cooling unit provided above the communicating portion in the vapor heating furnace, and the pressure in the vapor heating furnace is maintained at the same level as the pressure in the heating furnace by a pressure adjusting unit, whereby the heated object carried in is heated while the pressure in the continuous furnace is equalized.
In order to achieve the above object, a gas phase heating apparatus according to another aspect of the present invention is a gas phase heating apparatus configured to heat an object to be heated, the gas phase heating apparatus including a continuous furnace, the continuous furnace including: at least one steam heating furnace that heats the object to be heated by using the latent heat of condensation of the vapor of the heat-to-liquid conversion fluid; and at least one heating furnace disposed in communication with the vapor heating furnace, wherein,
the steam heating furnace is provided with:
a communicating section for allowing the object to be heated to be carried in and out, and communicating between the steam heating furnace and the adjacent heating furnace;
a vapor cooling unit that is disposed above the communication unit and cools and liquefies the vapor of the thermal conversion liquid in the vapor heating furnace; and
and a pressure adjustment unit that adjusts the internal pressure of the vapor cooling unit so as to be maintained at a pressure equal to the pressure in the heating furnace.
Effects of the invention
As described above, according to the gas-phase heating method and the gas-phase heating apparatus of the above-described aspect of the present invention, even in a continuous furnace in which a plurality of heating furnaces are connected at a narrow interval, the furnace pressure of the steam heating furnace that heats the object to be heated by utilizing the latent heat of condensation of the vapor of the thermal conversion liquid can be kept at a constant pressure by the pressure adjusting portion. As a result, without requiring any special mechanism for preventing the outflow of vapor, the movement of vapor in the communicating portion of the conveying portion of the object to be heated can be reduced between the adjacent steam heating furnace and heating furnace, and the pressure difference of vapor in the thermal conversion liquid can be reduced.
Drawings
Fig. 1 is an explanatory view of a continuous furnace including a gas phase type heating apparatus according to an embodiment of the present invention.
Fig. 2 is an explanatory view of a gas phase heating apparatus according to an embodiment of the present invention.
Fig. 3 is a detailed explanatory view of the gas phase type heating apparatus according to the embodiment of the present invention.
Fig. 4 is a detailed explanatory view of the gas phase type heating apparatus according to the embodiment of the present invention.
Fig. 5 is a detailed explanatory view of the gas phase type heating apparatus according to the embodiment of the present invention.
Fig. 6 is a detailed explanatory view of another gas-phase heating apparatus according to the embodiment of the present invention.
Fig. 7 is an explanatory view of a gas phase type heating apparatus according to an embodiment of the present invention.
Fig. 8 is an explanatory view of a temperature profile and a gas phase type heating device in the configuration of continuous conveyance of an object to be heated.
Fig. 9 is an explanatory view of a temperature profile and a gas phase type heating device in the configuration of divided conveyance of an object to be heated.
Fig. 10 is an explanatory view of a steam heating furnace of a gas phase heating apparatus according to another embodiment of the present invention, as viewed from a direction 90 degrees different from the conveying direction of an object to be heated.
Fig. 11 is an explanatory view showing a conventional gas-phase heating apparatus.
Description of reference numerals:
1 heated object
2 thermal conversion liquid
2A thermal conversion liquid
3 steam
3A steam
4 steam heating furnace
4x bath
4y vapor generation part
4z connecting part
4A steam heating furnace
5 heating furnace
6 communication part
7 entrance part
8 heated object cooling unit
9 conveying part
10 heating source
11 first cooling communication part
12 vapor cooling section
13 second cooling communication part
14A first space
14B second space
15 opening and closing valve
16 pressure adjusting part
17 moving body fixing part
18 moving body
19 pressure adjusting part
19a cylinder body
19b end part
20 communication part for external space
21 recovery part
22 pump
23 pipeline
24 elastomer
25 conveying part
31 vapor of
32 exhaust port
33 entrance and exit
34 conveyer
35 steam heating furnace
36 channel
37 channel
38 channel
39 discharge port
40 liquid
41 air-vapor interface.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(embodiment mode)
Fig. 1 is an explanatory view of a gas phase heating apparatus according to an embodiment of the present invention. The gas phase heating apparatus 50 is a continuous furnace including at least one steam heating furnace 4. The steam heating furnace 4 includes a communication portion 6 and an object-to-be-heated cooling portion 8.
For example, the gas phase heating apparatus 50 is configured by connecting a plurality of heating furnaces 5 in series. The gas phase type heating apparatus 50 includes at least one steam heating furnace 4 for heating the object 1 by imparting latent heat of condensation of the vapor 3 of the heat-transfer liquid 2, and in addition thereto, a heating furnace 5 of a heating system of the object 1 by hot air circulation or the like which does not use the vapor 3 of the heat-transfer liquid 2, and the like are connected. In the case of fig. 1, the gas phase heating apparatus 50 is a continuous furnace including an inlet 7, a steam heating furnace 4A, a heating furnace 5, the steam heating furnace 4, and an outlet-side object-to-be-heated cooling unit 8 in this order in the conveying direction of the object 1. The object 1 is conveyed by the conveying unit 9 through the communicating unit 6. An example of the heat-transfer liquid is an electrically insulating fluorine-based inert liquid.
Fig. 2 is a detailed explanatory diagram of the gas phase type heating apparatus 50 according to the embodiment of the present invention. In the case of fig. 2, a heating furnace 5 of a heating system of the steam 3 without using the thermal conversion liquid 2 by hot air circulation or the like is arranged in front of and behind (left and right in fig. 2) the steam heating furnace 4 in the conveying direction so as to communicate with each other in the front-rear direction.
The vapor heating furnace 4 has a bath 4x for holding a predetermined amount of the thermal conversion liquid 2 near the bottom surface. A heat source 10 such as an electric heater for heating the held thermal conversion liquid 2 to form a vapor 3 is provided in the bath 4 x.
The heat source 10 may be a type of introduction into the bath 4x into which the thermal conversion liquid 2 is introduced, or may be a structure that heats the entire wall surface of the bath 4x or a part of the wall surface of the bath 4 x. It should be noted that the heating power of the heating source 10 needs to be at least a heating power larger than the total of the following two heating powers: a heating capacity necessary for converting more vapor 3 of the liquid 2 into the liquid 2 than the amount of the liquid 3 cooled and liquefied by the inner wall surface of the vapor heating furnace 4, the conveying unit 9, or the like; and heating power for applying heat to the heat conversion liquid 2 in order to form the steam 3 in an amount necessary for heating the object 1 at a desired temperature increase rate. For example, the conveying unit 9 is a belt conveyor that can pass through the continuous furnace and convey the object 1 to be heated.
The steam heating furnace 4 has a communication portion 6 communicating with the heating furnace 5 disposed upstream or downstream thereof. The communicating portion 6 is an opening portion necessary for carrying the object 1 to be heated into the steam heating furnace 4 from the heating furnace 5 on the upstream side, or for carrying the object 1 to be heated out of the heating furnace 5 on the downstream side from the steam heating furnace 4, and functions as an example of a carrying-in/carrying-out portion through which the object 1 to be heated passes by the carrying portion 9 for carrying in and carrying out the object 1.
Here, in the case of such a configuration, normally, when the pressure in the steam heating furnace 4 becomes high due to volume expansion or the like caused by vaporization of the thermal transition liquid 2, if the pressure in the heating furnace 5 before and after the communication through the communication portion 6 is lower than the atmospheric pressure or at least the pressure in the steam heating furnace 4, the steam 3 in the steam heating furnace 4 flows out to the heating furnace 5 side through the communication portion 6. As a result, the vapor 3 of the thermal conversion liquid 2 flows out of the continuous furnace through the heating furnace 5 and the like. In order to avoid this, it is necessary to set the pressure in the heating furnace 5 to be equal to the pressure in the steam heating furnace 4, or conversely, to set the pressure in the steam heating furnace 4 to be equal to the pressure in the heating furnace 5.
Here, a gas phase heating method in which the pressure in the steam heating furnace 4 is set to be equal to the pressure in the adjacent preceding and succeeding heating furnaces 5 will be described.
Fig. 3 is a sectional view taken along the line III-III of the steam heating furnace 4 of fig. 2.
The first cooling communication portion 11 disposed above the conveying portion 9 for conveying the object 1 communicates with one end of the vapor cooling portion 12, and the other end of the vapor cooling portion 12 communicates with the pressure adjustment portion 19 via the second cooling communication portion 13. The steam cooling unit 12 is formed with a passage through which the steam 3 entering from one end advances while being bent toward the other end, and is configured such that the steam 3 is cooled by absorbing heat from the passage wall surface while advancing while being bent. For example, the pressure adjustment portion 19 is constituted by a cylinder and a piston. In this case, the cylinder serves as the outer contour of the pressure adjustment portion 19 or the container 19a, and the piston serves as the movable body 18. The internal space of the pressure adjustment portion 19 is divided into two by the moving body 18. The first space 14A partitioned by the movable body 18 can communicate with the external space via the on-off valve 15 and the pressure adjustment portion 16. In the internal space of the pressure adjustment portion 19, the other second space 14B divided into two by the moving body 18 communicates with the external space via the communication portion for external space 20 of the pressure adjustment portion 19.
The movable body 18 may be fixed to a predetermined position of the cylinder 19a by the movable body fixing portion 17 as necessary.
When the fixing of the moving body fixing portion 17 is released, the moving body 18 can move along the wall surface of the cylinder 19a in the pressure adjustment portion 19 while maintaining the state of separating the first space 14A from the second space 14B.
Here, the vapor cooling unit 12 has a cooling capacity capable of changing all the vapor 3 introduced from the first cooling communication unit 11 in the vapor 3 of the thermal conversion liquid 2 heated by the heating source 10 and vaporized by applying latent heat of vaporization. The thermal conversion liquid 2 cooled and liquefied by the vapor cooling unit 12 is recovered to the recovery unit 21 through a pipe 23 connected to the bottommost surface of the vapor cooling unit 12, and can be reused. The thermal conversion liquid 2 recovered to the recovery section 21 is returned to the bath 4x of the thermal conversion liquid 2 in the vapor heating furnace 4 by the pump 22 as necessary.
Before the object 1 to be heated is carried into the steam heating furnace 4, the heat source 10 heats the heat conversion liquid 2 in the steam heating furnace 4 as preparation for heating, and latent heat of vaporization for converting the heat conversion liquid 2 into the steam 3 is continuously given, thereby continuously forming and increasing the steam phase of the steam 3. At the beginning of the operation of the heat source 10, since the temperature of each part in the vapor heating furnace 4 is equal to or lower than the boiling point of the thermal conversion liquid 2, the vapor 3 of the thermal conversion liquid 2 contacting each part in the vapor heating furnace 4 is liquefied by imparting latent heat of condensation to each part contacting the vapor 3, and the liquefied thermal conversion liquid 2 falls down to the lower part of the vapor heating furnace 4 by its own weight and is recovered in the bath of the thermal conversion liquid 2. By repeating the above-described process, the respective portions in the vapor heating furnace 4 are gradually heated by receiving the latent heat of condensation of the thermal transition liquid 2, thereby sequentially reaching the boiling point temperature of the thermal transition liquid 2. As a result, the interface between the atmospheric phase in the steam heating furnace 4 and the vapor phase of the vapor 3 of the heat-convertible liquid 2 gradually moves upward to reach the height of the communicating portion 6.
Here, although there is no problem if the specific gravity of the vapor 3 of the thermal conversion liquid 2 is smaller than the gas (for example, the atmosphere) in the furnace, when the specific gravity is larger than the atmosphere, the vapor naturally flows out from the communicating portion 6 due to its own weight. Therefore, the pressure in the steam heating furnace 4 is adjusted by the pressure adjusting unit 16 so that the pressure in the adjacent heating furnace 5 becomes equal to the atmospheric pressure with the opening/closing valve 15 opened in advance. Thereby, the vapor 3 of the thermal conversion liquid 2 reaches the height of the first cooling communication portion 11 beyond the conveying portion 9 in the vapor heating furnace 4.
Fig. 4 is a sectional view taken along the line III-III of the steam heating furnace 4 in fig. 2 in the same manner as fig. 3, and shows a state after preparation for carrying the object 1 to be heated into the continuous furnace and the steam heating furnace 4 and starting production is completed.
The vapor 3 of the thermal conversion liquid 2 reaches the first cooling communication portion 11 between the vapor heating furnace 4 and the vapor cooling portion 12, and the pressure adjusting portion 16 causes the vapor cooling portion 12 to have a negative pressure, so that the vapor 3 is introduced into the vapor cooling portion 12 through the first cooling communication portion 11, and the vapor 3 of the thermal conversion liquid 2 is cooled and liquefied by the vapor cooling portion 12. As described above, the vapor cooling unit 12 has the ability to change all the vapor 3 of the thermal conversion liquid 2, which is heated by the heating source 10 and is vaporized by applying latent heat of vaporization, introduced from the first cooling communication unit 11 into a liquid. Therefore, the vapor 3 is entirely liquefied by the vapor cooling portion 12 before reaching the second cooling communication portion 13. Here, preparation for carrying in the object 1 is completed, the on-off valve 15 communicating with the pressure adjustment portion 16 is closed, and the first space 14A of the pressure adjustment portion 19 is in a state where communication with the vapor cooling portion 12 is maintained but is separated from the external space by the on-off valve 15 and the moving body 18.
Next, fig. 5 is a sectional view taken along the line III-III of the steam heating furnace 4 of fig. 2, similarly to fig. 3 and 4. After the preparation for putting the object 1 is completed, the fixing of the moving body 18 by the moving body fixing portion 17 is released in order to cope with the occurrence of the fluctuation in the amount of the steam 3 due to the loading of the object 1 or the like.
The cancellation may be performed manually or automatically.
In the case of manual operation, since the "negative pressure" controlled by the pressure adjustment unit 16 is constant and has a predetermined value, it is difficult to detect a certain change point as a trigger for release of fixation, and thus the user comprehensively determines that the preparation is completed and then manually releases the fixation.
On the other hand, as an example of the case of automatic operation, the following configuration can be exemplified. In the initial stage of the start-up of the apparatus, the pressure adjustment unit 16 continuously releases the atmosphere in the first space 14A through the opening/closing valve 15 so that the inside of the first space 14A becomes a predetermined negative pressure. Here, the state of preparation completion is a state in which the amount of vapor sucked from the inside of the vapor heating furnace 4 and the amount liquefied by the vapor cooling unit 12 are balanced with each other and the volume of the space in which the vapor 3 does not exist does not change, in other words, when the fixing of the moving body fixing unit 17 is released, the moving body 18 needs not to be moved, and at this time, the gas passing through the pressure adjustment unit 16 is zero. If the pressure adjustment portion 16 or the like detects that the flow rate of the gas flowing through the pressure adjustment portion 16 is zero, the fixation can be automatically released using this as a trigger condition.
By releasing the fixation of the moving body 18 fixed by the moving body fixing portion 17, the moving body 18 moves along the wall surface in the cylinder 19a of the pressure adjustment portion 19 while keeping the first space 14A and the second space 14B separated. At this time, in order to prevent the steam 3 of the thermal conversion liquid 2 from flowing out to the adjacent heating furnace 5 and the like through the communicating portion 6 of the conveying portion 9 due to disturbance caused by the conveyance of the object 1 into the steam heating furnace 4 and the like, it is necessary to keep the pressure in the steam heating furnace 4 in a ready state as it is. In order to keep the pressure in the steam heating furnace 4 in a ready state, it is necessary to keep the pressure in the communicating steam cooling unit 12 constant. For this reason, it is further necessary to keep the pressure of the first space 14A communicating with the vapor cooling portion 12 constant. In other words, it is necessary to maintain the pressure in the first space 14A at the time point when the fixation of the movable body 18 is released, that is, the time point when the open/close valve 15 is closed. At this time, the pressure of the second space 14B on the other side in contact with the movable body 18 is constant at the atmospheric pressure of the external space through the external space communication portion 20. Therefore, in order to prevent the pressure in the first space 14A from varying at the time point when the fixation of the movable body 18 is released, it is necessary to prevent the volume of the first space 14A from varying, in other words, to prevent the movable body 18 from moving, that is, to make the force in the direction of gravity generated by the weight of the movable body 18 offset the pressure difference between the atmospheric pressure, which is the pressure in the second space 14B, and the pressure in the first space 14A.
Thus, even if the pressure in the first space 14A is to be changed due to various external disturbance factors of pressure fluctuation, for example, a change in the amount of the steam 3 itself caused by the object 1 to be heated being carried into the steam heating furnace 4, or a change in the amount of the steam 3 liquefied and recovered in the steam cooling unit 12, the pressure is automatically maintained by the volume of the first space 14A being automatically changed by the vertical movement in the gravity direction due to the self weight of the moving body 18. In other words, the pressure in the steam heating furnace 4 is maintained to be equal to the pressure in the heating furnace 5 by sliding the movable body 18 in the cylinder 19a based on the pressure difference between the pressure in the steam heating furnace 4 and the pressure in the heating furnace 5 and the weight of the movable body 18.
At this time, the pressure in the steam heating furnace 4 is also maintained at a desired pressure via the second cooling communication portion 13, the steam cooling portion 12, and the first cooling communication portion 11 which are in communication with each other. Therefore, the outflow of the vapor 3 of the thermal conversion liquid 2 can be prevented without generating a pressure difference between the vapor heating furnace 4 and the heating furnace 5 or the like connected in front of and behind the vapor heating furnace 4 in the continuous furnace.
According to the above embodiment, even in a continuous furnace in which a plurality of heating furnaces 4 and 5 are connected at a narrow interval, the furnace internal pressure of the steam heating furnace 4 for heating the object 1 by utilizing the latent heat of condensation of the vapor 3 of the heat transfer liquid 2 can be kept at a constant pressure. As a result, without requiring any special mechanism for preventing the outflow of the steam, the movement of the steam 3 in the communicating portion 6 of the conveying portion 9 of the object 1 to be heated can be reduced between the adjacent steam heating furnaces 4 and 5, and the pressure difference of the steam 3 in the thermal conversion liquid 2 can be reduced.
The present invention is not limited to the above embodiments, and can be implemented in various other embodiments.
For example, fig. 6 is a detailed explanatory view of another form of the gas-phase heating apparatus according to the embodiment of the present invention. The same effect can be obtained by continuously applying a constant stress to the moving body 18 by the elastic body 24 such as a spring connected to the moving body 18 and the end 19b of the cylinder 19a with respect to the operation of the moving body 18. Since the elastic force of the elastic body 24 changes depending on the degree of extension thereof, the movable range of the movable body 18 in this case is limited to a range in which the change in the elastic force of the elastic body 24 can be ignored. In addition, when the elastic body 24 is used, the weight of the movable body 18 has little influence, and therefore the moving direction of the movable body 18 is not limited to the vertical direction.
Fig. 7 is an explanatory diagram of a case where a vapor heating furnace 4A for heating the heat-converted liquid 2 using the latent heat of condensation is also connected to the upstream side adjacent to the vapor heating furnace 4. The upstream-side steam heating furnace 4A is, for example, a case where a thermal conversion liquid 2A having a different boiling point from that of the steam heating furnace 4 is used, or is, for example, a case where the steam heating furnaces 4A having different concentrations of the vapor 3A of the thermal conversion liquid 2A are adjacently disposed by controlling the amount of thermal energy applied to the thermal conversion liquid 2A although the specifications of the thermal conversion liquid 2A are the same. Since the vapor cooling unit 12 and the pressure adjusting unit 19 having the configuration shown in fig. 3 are communicated with each other for each of the vapor heating furnace 4 and the vapor heating furnace 4A, the furnace pressure can be kept constant, and therefore, the outflow and inflow of the vapor 3A of the heat-transfer liquid 2A having a different boiling point between the adjacent furnace bodies can be reduced without generating a pressure difference, or the pressure difference of the vapor 3A of the heat-transfer liquid 2A can be reduced by reducing the movement of the vapor 3A between the adjacent vapor heating furnace 4A and the vapor heating furnace 4 and at the communicating portion 6 of the conveying unit 9 of the object 1 due to the concentration difference of the vapor 3A.
Fig. 8 is an explanatory diagram of a temperature profile in the case where the gas-phase heating apparatus according to the embodiment of the present invention includes the conveying unit 9 for continuously conveying the object 1 at the same speed from the inlet to the outlet. The heating from the loading of the object 1 is performed by heating the object 1 to a desired temperature in the first steam heating furnace 4A as a preheating step, and then maintaining the preheating temperature in the heating furnace 5 by hot air circulation heating or the like. Thereafter, in the second steam heating furnace 4, the temperature is further raised to a desired temperature as a main heating step, the heating process is completed, and the object 1 is cooled by the object cooling unit 8, whereby the temperature profile is completed. The vapor cooling unit 12 and the pressure adjustment unit 19 having the configuration shown in fig. 3 are not shown.
Fig. 9 is an explanatory view of a temperature profile in the case where the conveying unit 25 of the object 1 from the inlet to the outlet is divided into the steam heating furnace 4 and the heating furnace 5 and conveyed in the gas phase heating apparatus according to the embodiment of the present invention. By providing the conveying unit 25 partitioned for each of the steam heating furnace 4 and the heating furnace 5, the moving speed of the object 1 in each of the steam heating furnace 4 and the heating furnace 5 can be changed and stopped as appropriate, and the object can be held for a desired time in each of the steam heating furnace 4 and the heating furnace 5. Therefore, the length of each heating step can be changed as compared with the temperature profile in the case of fig. 8, and thus, for example, a more complicated temperature profile can be created, such as a case where the temperature holding time in the heating furnace 5 is extended as in the temperature profile shown in fig. 9, or a case where the time after the vapor heating furnace 4 reaches the peak temperature is changed (not shown). Here, the vapor cooling unit 12 and the pressure adjustment unit 19 having the configuration shown in fig. 3 are not shown.
Further, the steam heating furnace 4 is provided with the heat source 10 in the bath 4x at the lower portion inside thereof, but the present invention is not limited to the above configuration, and a steam generating unit 4y may be connected to the outside of the steam heating furnace 4 via a connection unit 4z as shown in fig. 10, the heat source 10 of the steam generating unit 4y may heat the heat-convertible liquid 2 to generate the steam 3, and the generated steam 3 may be supplied to the steam heating furnace 4 via the connection unit 4 z. Fig. 10 is an explanatory view as seen from a direction 90 degrees away from the conveying direction of the object 1 to be heated in the steam heating furnace 4.
In addition, any of the various embodiments or modifications described above can be appropriately combined to provide the respective effects. In addition, combinations of the embodiments or examples or combinations of the embodiments and examples can be made, and combinations of features in different embodiments or examples can also be made.
Industrial applicability
In the gas-phase heating method and the gas-phase heating apparatus according to the above-described aspect of the present invention, the concentration of the vapor of the heat transfer liquid that transfers heat to the object to be heated can be adjusted to be uniform while increasing or decreasing, and the temperature increase rate can be increased or decreased, so that the difference in heating capacity due to the difference in location and time does not occur when the object to be heated is heated, and even an object to be heated in the shape of a solid can be heated by uniform heat transfer. Therefore, the above-described aspect of the present invention can be applied to a heat treatment method and apparatus for performing various heat treatments such as a drying furnace, a curing furnace, or a reflow furnace in a manufacturing process of industrial products or home electric appliances or a manufacturing process of various electronic components as a heating method and apparatus for uniformly heating a three-dimensional object to be heated.
Claims (5)
1. A gas-phase heating method for heating an object to be heated by a continuous furnace, the continuous furnace comprising: at least one steam heating furnace that heats the object to be heated by using the latent heat of condensation of the vapor of the heat-to-liquid conversion fluid; and at least one heating furnace disposed in communication with the vapor heating furnace, wherein, in the vapor phase heating method,
carrying the object into the heating furnace or the steam heating furnace via a communication part communicating the heating furnace adjacent to the steam heating furnace and the steam heating furnace,
cooling and liquefying the vapor of the thermal conversion liquid in the steam heating furnace by a vapor cooling unit provided above the communicating portion in the steam heating furnace, and heating the object to be heated carried in while equalizing the pressure in the continuous furnace by a pressure adjusting unit while keeping the pressure in the steam heating furnace equal to the pressure in the heating furnace,
in the pressure adjustment unit, a space inside a cylinder is a space whose pressure is adjusted by a volume change, the first space communicates with the inside of the steam cooling unit via the steam cooling unit and the second space communicates with an external space in a state where the space is divided into the first space and the second space by a piston slidable in the cylinder by gravity, and the piston slides in the cylinder based on a pressure difference between the pressure inside the steam heating furnace and the pressure inside the heating furnace and the weight of the piston, thereby maintaining the pressure inside the steam heating furnace to be equal to the pressure inside the heating furnace.
2. The gas-phase heating method according to claim 1,
the vapor is generated by heating the thermal conversion liquid in a lower bath in the vapor heating furnace.
3. A gas-phase heating device for heating an object to be heated, the gas-phase heating device being constituted by a continuous furnace, the continuous furnace comprising: at least one steam heating furnace that heats the object to be heated by using the latent heat of condensation of the vapor of the heat-to-liquid conversion fluid; and at least one heating furnace disposed in communication with the vapor heating furnace, wherein,
the steam heating furnace is provided with:
a communicating section for allowing the object to be heated to be carried in and out, and communicating between the steam heating furnace and the adjacent heating furnace;
a vapor cooling unit that is disposed above the communication unit and cools and liquefies the vapor of the thermal conversion liquid in the vapor heating furnace; and
a pressure adjustment unit that adjusts the internal pressure of the vapor cooling unit so as to be maintained at a pressure equal to the pressure in the heating furnace,
the pressure adjustment unit includes a container having a space for adjusting pressure by a volume change,
the space is a space inside a cylinder, and is divided into a first space and a second space by a piston that is slidable within the cylinder by gravity, the first space communicates with the inside of the steam cooling unit via the steam cooling unit, the second space communicates with an external space, and the piston slides within the cylinder based on a pressure difference between a pressure inside the steam heating furnace and a pressure inside the heating furnace and a weight of the piston, thereby maintaining the pressure inside the steam heating furnace to be equal to the pressure inside the heating furnace.
4. A gas-phase heating apparatus according to claim 3,
the steam heating furnace includes a heating source in a lower bath for heating the thermal conversion liquid to generate steam.
5. A gas-phase heating device for heating an object to be heated, the gas-phase heating device being constituted by a continuous furnace, the continuous furnace comprising: at least one steam heating furnace that heats the object to be heated by using the latent heat of condensation of the vapor of the heat-to-liquid conversion fluid; and at least one heating furnace disposed in communication with the vapor heating furnace, wherein,
the steam heating furnace is provided with:
a communicating section for allowing the object to be heated to be carried in and out, and communicating between the steam heating furnace and the adjacent heating furnace;
a vapor cooling unit that is disposed above the communication unit and cools and liquefies the vapor of the thermal conversion liquid in the vapor heating furnace; and
a pressure adjustment unit that adjusts the internal pressure of the vapor cooling unit so as to be maintained at a pressure equal to the pressure in the heating furnace,
the pressure adjustment unit includes a container having a space for adjusting pressure by a volume change,
the space is a space inside a cylinder, and is divided by a piston that can slide within the cylinder by gravity into a first space and a second space, the first space being in communication with the inside of the vapor cooling unit via the vapor cooling unit, and an elastic body being interposed between the cylinder and the piston in the second space.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-209895 | 2018-11-07 | ||
| JP2018209895A JP6909998B2 (en) | 2018-11-07 | 2018-11-07 | Gas phase heating method and vapor phase heating device |
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| CN111156702A CN111156702A (en) | 2020-05-15 |
| CN111156702B true CN111156702B (en) | 2021-08-03 |
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| US4321031A (en) * | 1979-07-09 | 1982-03-23 | Woodgate Ralph W | Method and apparatus for condensation heating |
| JPS62252670A (en) * | 1986-04-25 | 1987-11-04 | Hitachi Techno Eng Co Ltd | Paper reflow type soldering device |
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Also Published As
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|---|---|
| CN111156702A (en) | 2020-05-15 |
| JP2020076540A (en) | 2020-05-21 |
| JP6909998B2 (en) | 2021-07-28 |
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