CN111141800A - Sensor chip - Google Patents

Sensor chip Download PDF

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Publication number
CN111141800A
CN111141800A CN202010103293.1A CN202010103293A CN111141800A CN 111141800 A CN111141800 A CN 111141800A CN 202010103293 A CN202010103293 A CN 202010103293A CN 111141800 A CN111141800 A CN 111141800A
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electrode
type
chamber
content
sensor chip
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蔡丰勇
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Zhejiang Baian Technology Co Ltd
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Zhejiang Baian Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis

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Abstract

The invention relates to a sensor chip, which comprises a detection device and a type representation electrode, wherein the detection device is used for detecting the content of ammonia gas or nitrogen oxide in an object to be detected; the detection device comprises a reference electrode, and the type representation electrode is electrically connected with the reference electrode; wherein the reference electrode and the type representation electrode are used for outputting different voltages when detecting the content of ammonia gas or nitrogen oxide in the object to be detected. The sensor chip and the vehicle exhaust purification system can simultaneously detect the content of ammonia and the content of nitric oxide in the object to be detected, so that the problem of ammonia leakage in waste is avoided.

Description

Sensor chip
Technical Field
The invention relates to the technical field of sensors, in particular to a sensor chip.
Background
The conventional scheme of using a reduction catalyst (SCR) to purify the nitrogen oxides in the waste. The SCR method can selectively adsorb nitrogen oxides in exhaust gas to a catalyst, and decompose the nitrogen oxides into nitrogen and water by a reduction reaction by injecting urea to the catalyst and discharge the nitrogen oxides, and therefore, it is first necessary to detect the content of nitrogen oxides in the exhaust gas by a nitrogen oxide sensor. However, in the process of discharging exhaust gas from a vehicle, the variation range of the exhaust gas temperature is very large, and may be rapidly increased from 100 ℃ to 600 ℃, the amount of the reducing agent to be injected also can be greatly changed under the condition of the rapid temperature change, the adsorption capacity of the catalyst is reduced along with the increase of the temperature, and the problem of ammonia leakage is easily caused, so the monitoring data of ammonia has important significance for reducing the discharge. However, conventional sensor chips are only able to detect the nitrogen oxide content in the exhaust gas.
Disclosure of Invention
In view of the above, it is necessary to provide a sensor chip capable of simultaneously monitoring the contents of nitrogen oxides and ammonia gas in view of the above problems.
A sensor chip comprises a detection device and a type representation electrode, wherein the detection device is used for detecting the content of ammonia gas or the content of nitric oxide in an object to be detected; the detection device comprises a reference electrode, and the type representation electrode is electrically connected with the reference electrode;
wherein the reference electrode and the type representation electrode are used for outputting different voltages when detecting the content of ammonia gas or nitrogen oxide in the object to be detected.
In one embodiment, the type-indicating electrodes include a first type electrode and a second type electrode, and the reference electrode and the first type electrode output a positive voltage when detecting the ammonia gas content in the object to be detected, and the reference electrode and the second type electrode output a negative voltage when detecting the nitrogen oxide content in the object to be detected.
In one embodiment, the material of the first type electrode comprises gold and platinum.
In one embodiment, the material of the second type electrode comprises gold and palladium.
In one embodiment, the detection device further comprises a substrate, a first electrode, a second electrode, a third electrode and a fourth electrode; a first cavity and a second cavity are formed in the substrate, the first electrode is arranged in the first cavity, and the second electrode and the third electrode are arranged in the second cavity;
the fourth electrode is electrically connected with the first electrode, the second electrode and the third electrode, the first electrode and the fourth electrode are used for adjusting the oxygen concentration in the first chamber, the second electrode and the fourth electrode are used for adjusting the oxygen concentration in the second chamber, and the third electrode and the fourth electrode are used for measuring the oxygen concentration in the second chamber;
the reference electrode is electrically connected to the first electrode and the second electrode, the first electrode and the reference electrode are used for measuring the oxygen concentration in the first chamber to control the adjustment amount of the first electrode and the fourth electrode on the oxygen in the first chamber, and the second electrode and the reference electrode are used for measuring the oxygen concentration in the second chamber to control the adjustment amount of the second electrode and the fourth electrode on the oxygen in the second chamber.
In one embodiment, the type-indicating electrode is located on a side of the substrate remote from the fourth electrode.
In one embodiment, the type indicates that a protective material is disposed around the electrode.
In one embodiment, the detection device further comprises a heating electrode disposed inside the substrate.
In one embodiment, the substrate is further provided with an opening communicated with the first cavity, and a buffer barrier is arranged in the opening.
The sensor chip comprises a detection device and a type indicating electrode, wherein the detection device is used for detecting the ammonia content or the nitrogen oxide content of an object to be detected, the detection device comprises a reference electrode, the type indicating electrode is electrically connected with the reference electrode, and the reference electrode and the type indicating electrode output different voltages when detecting the ammonia content or the nitrogen oxide content of the object to be detected so as to distinguish detected gas data, so that the ammonia content and the nitrogen oxide content of the object to be detected can be detected simultaneously, and the problem of ammonia leakage in waste is avoided.
Drawings
FIG. 1 is a cross-sectional view of a sensor chip in one embodiment;
fig. 2 is a cross-sectional view of a first type of electrode and a second type of electrode in an embodiment.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
Referring to fig. 1 and 2, the present application provides a sensor chip capable of simultaneously detecting nitrogen oxide content and nitrogen oxide content so that a problem of ammonia leakage is not easily caused when purifying nitrogen oxide in exhaust gas.
FIG. 1 is a cross-sectional view of a sensor chip in one embodiment. As shown in fig. 1, the sensor chip 100 includes a detection device 110 and a type-indicating electrode 120. The detection device 110 is used for detecting the content of ammonia gas or the content of nitrogen oxide in the object to be detected. The detecting unit 110 includes a reference electrode 111, and a type-indicating electrode 120 is electrically connected to the reference electrode. The reference electrode 111 and the type indicating electrode 120 are used for outputting different voltages when detecting the content of ammonia or nitrogen oxide in the object to be detected so as to distinguish whether the output data of the content of the detected object belongs to the data of the content of ammonia or the data of the content of nitrogen oxide, thereby realizing the simultaneous detection of the content of ammonia and the content of nitrogen oxide in the object to be detected and avoiding the problem of ammonia leakage. For example, the object to be detected is automobile exhaust.
Specifically, still referring to FIG. 1, the detection device 110 includes a substrate 112, a first electrode 113, a second electrode 114, a third electrode 115, a fourth electrode 116, and a reference electrode 111.
The substrate 112 may be formed by laminating a plurality of substrates, and optionally, the material of each substrate includes zirconia. The substrate 112 is formed with a first chamber 1121 and a second chamber 1122, the substrate 112 is further formed with an opening 1123, the first chamber 1121 and the second chamber 1122 are sequentially communicated, and a buffer barrier 1124 may be disposed between the opening 1123 and the first chamber 1121 and between the first chamber 1121 and the second chamber 1122. The object to be detected enters from the opening 1123 and enters the first chamber 1121, and the gas obtained by the reaction in the first chamber 1121 finally enters the second chamber 1122.
The first electrode 113 is disposed in the first chamber 1121, and the second electrode 114 and the third electrode 115 are disposed in the second chamber 1122. Illustratively, the material of the first electrode 113 and the second electrode 114 includes a cermet. The first electrode 113 and the second electrode 114 are non-activated electrodes, which do not have the ability to decompose nitric oxide. For example, noble metals such as platinum, zirconia, and other low catalytic activity cermets may be used. The third electrode 115 is an activated electrode, which is capable of decomposing nitric oxide. For example, cermets using noble metals such as platinum, zirconia, and other strongly active materials.
The fourth electrode 116 cooperates with the first electrode 113, the second electrode 114 and the third electrode 115 through circuit control. The first electrode 113 and the fourth electrode 116, and the substrate assembly therebetween, form a primary oxygen pump for regulating the oxygen concentration within the first chamber 1121. Specifically, when detecting the content of nitrogen oxide, the main oxygen pump pumps out a part of oxygen in the first chamber 1121, so that the nitrogen oxide (e.g., nitrogen dioxide) in the first chamber 1121 is changed into nitric oxide, and the formed nitric oxide enters the second chamber 1122; when detecting the content of the ammonia gas, the main oxygen pump pumps out a portion of the oxygen gas in the first chamber 1121, so that the ammonia gas reacts with the oxygen gas in the first chamber 1121 to generate nitric oxide and water, and the generated nitric oxide enters the second chamber 1122.
The second electrode 114 and the fourth electrode 116, and the substrate combination therebetween, form an auxiliary oxygen pump for regulating the oxygen concentration in the second chamber 1122. Specifically, the auxiliary oxygen pump pumps out all the oxygen in the second chamber 1122, so that the nitric oxide in the second chamber 1122 is changed into nitrogen and oxygen under the catalytic action of the third electrode 115.
The combination of the third electrode 115 and the fourth electrode 116 and the substrate therebetween forms a measurement pump for measuring the concentration of oxygen decomposed from nitrogen oxides in the second chamber 1122, and the measured oxygen concentration is indicative of the concentration of nitrogen oxides entering through the opening 1123 or the concentration of ammonia.
Reference electrode 111 cooperates with first electrode 113 and second electrode 114 via circuit control. The first electrode 113 and the reference electrode 111 are used for measuring the oxygen concentration in the first chamber 1121 to control the adjustment amount of the oxygen in the first chamber 1121 by the first electrode 113 and the fourth electrode 116; the second electrode 114 and the reference electrode 111 are used to measure the oxygen concentration in the second chamber 1122 to control the amount of adjustment of the oxygen in the second chamber 1121 by the second electrode 114 and the fourth electrode 116. Since the oxygen amount pumped out by the main oxygen pump from the first chamber 1121 needs to ensure that the final measured gas concentration is more accurate only when the nitrogen oxide or the ammonia gas in the first chamber 1121 is completely changed into the nitric oxide, the reference electrode 111 and the first electrode 113 need to be arranged to measure the oxygen concentration in the first chamber 1121, so that the oxygen amount pumped out by the main oxygen pump meets the requirement. Similarly, since the amount of oxygen pumped out of the second chamber 1122 by the auxiliary oxygen pump needs to ensure that the nitrogen dioxide in the second chamber 1122 is completely changed into oxygen and nitrogen to make the finally measured gas concentration more accurate, the reference electrode 111 and the second electrode 114 need to be arranged to measure the oxygen concentration in the second chamber 1122, so that the amount of oxygen pumped out by the auxiliary oxygen pump meets the requirement.
Further, the detecting device 110 may further include a heating electrode 117. The heating of the electrodes 117 causes the temperature of the entire sensing device 110 to rise rapidly to reach the optimal operating temperature, so that the light-off time of the sensing device 110 is particularly fast.
It has been described above that the detecting unit 110 can measure the ammonia gas content or the nitrogen oxide content in the object to be detected, and the reference electrode 111 and the type indicating electrode 120 output different voltages when detecting the ammonia gas content or the nitrogen oxide content in the object to be detected, thereby distinguishing the measurement data of the two gas types. Among them, the type-indicating electrode 120 may be disposed on a side of the substrate 112 away from the fourth electrode 116, and a protective material 123, for example, a contamination-preventive material coated around the type-indicating electrode 120, may be disposed to prevent the type-indicating electrode 120 from being contaminated by automobile exhaust.
Illustratively, referring to fig. 2, the type-indicating electrode 120 includes a first type electrode 121 and a second type electrode 122, and the reference electrode 111 and the first type electrode 121 output a positive voltage when detecting the ammonia gas content in the analyte; the reference electrode 111 and the second-type electrode 122 output a negative voltage when detecting the content of nitrogen oxide in the object to be detected.
Specifically, the material of the first type electrode 121 may include gold and platinum, so that the first type electrode 121 is sensitive to ammonia gas, and when the ammonia gas content is measured, a nernst electromotive force is generated between the first type electrode 121 and the reference electrode 111, so that a positive voltage is output between the first type electrode 121 and the reference electrode 111; the material of the second-type electrode 122 may include gold and palladium so that the second-type electrode 122 is sensitive to nitrogen oxides, and when measuring the content of nitrogen oxides, the second-type electrode 122 outputs a positive voltage between the second-type electrode 122 and the reference electrode 111 due to a nernst electromotive force generated between the second-type electrode 122 and the reference electrode 11.
In one embodiment, the sensor chip 100 is used to detect the content of nitrogen oxides or the content of ammonia in the exhaust gas of a vehicle. In this embodiment, the sensor chip 100 may communicate with a vehicle-mounted electronic control system CAN to upload a detection result to the vehicle-mounted electronic control system.
The sensor chip comprises a detection device 110 and a type indicating electrode 120, wherein the detection device 110 is used for detecting the ammonia gas content or the nitrogen oxide content of an object to be detected, the detection device 110 comprises a reference electrode 111, the type indicating electrode 120 is electrically connected with the reference electrode 111, and the reference electrode 111 and the type indicating electrode 120 output different voltages when detecting the ammonia gas content or the nitrogen oxide content of the object to be detected so as to distinguish detected gas data, so that the ammonia gas content and the nitrogen oxide content of the object to be detected can be detected simultaneously, and the problem of ammonia leakage in waste is avoided.

Claims (9)

1. The sensor chip is characterized by comprising a detection device and a type representation electrode, wherein the detection device is used for detecting the content of ammonia gas or the content of nitric oxide in an object to be detected; the detection device comprises a reference electrode, and the type representation electrode is electrically connected with the reference electrode;
wherein the reference electrode and the type representation electrode are used for outputting different voltages when detecting the content of ammonia gas or nitrogen oxide in the object to be detected.
2. The sensor chip according to claim 1, wherein the type-indicating electrodes include a first type electrode and a second type electrode, the reference electrode and the first type electrode outputting a positive voltage when detecting an ammonia gas content in the object to be detected, and the reference electrode and the second type electrode outputting a negative voltage when detecting a nitrogen oxide content in the object to be detected.
3. The sensor chip according to claim 2, wherein the material of the first type electrode comprises gold and platinum.
4. A sensor chip according to claim 2, characterized in that the material of the second type of electrodes comprises gold and palladium.
5. The sensor chip according to claim 1, wherein the detection device further comprises a substrate, a first electrode, a second electrode, a third electrode, and a fourth electrode; a first cavity and a second cavity are formed in the substrate, the first electrode is arranged in the first cavity, and the second electrode and the third electrode are arranged in the second cavity;
the fourth electrode is electrically connected with the first electrode, the second electrode and the third electrode, the first electrode and the fourth electrode are used for adjusting the oxygen concentration in the first chamber, the second electrode and the fourth electrode are used for adjusting the oxygen concentration in the second chamber, and the third electrode and the fourth electrode are used for measuring the oxygen concentration in the second chamber;
the reference electrode is electrically connected to the first electrode and the second electrode, the first electrode and the reference electrode are used for measuring the oxygen concentration in the first chamber to control the adjustment amount of the first electrode and the fourth electrode on the oxygen in the first chamber, and the second electrode and the reference electrode are used for measuring the oxygen concentration in the second chamber to control the adjustment amount of the second electrode and the fourth electrode on the oxygen in the second chamber.
6. The sensor chip according to claim 5, wherein the type-indicating electrode is located on a side of the substrate remote from the fourth electrode.
7. The sensor chip according to claim 6, wherein the type-indicating electrode is provided with a protective material therearound.
8. The sensor chip according to claim 5, wherein the detection device further comprises a heating electrode disposed inside the substrate.
9. The sensor chip of claim 5, wherein the substrate further defines an opening communicating with the first cavity, and the opening defines a buffer barrier therein.
CN202010103293.1A 2020-02-19 2020-02-19 Sensor chip Pending CN111141800A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112697862A (en) * 2020-11-30 2021-04-23 广西玉柴机器股份有限公司 NO measurement without influence of ammoniaXOf (2) a
CN112798667A (en) * 2021-03-15 2021-05-14 浙江百岸科技有限公司 Nitrogen-oxygen sensor chip with shielding layer
CN113552201A (en) * 2021-09-01 2021-10-26 浙江百岸科技有限公司 Nitrogen-oxygen sensor chip with protective cap coating
CN115078503A (en) * 2022-06-21 2022-09-20 武汉科技大学 Sensor chip for simultaneously measuring nitrogen oxide and ammonia gas and manufacturing method thereof
CN115112740A (en) * 2022-01-04 2022-09-27 长城汽车股份有限公司 Sensor for monitoring ammonia content and method for monitoring ammonia content in tail gas

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CN109507262A (en) * 2018-11-21 2019-03-22 温州百岸汽车零部件有限公司 A kind of NOx sensor chip pumping current adjustment
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CN110609074A (en) * 2018-06-15 2019-12-24 日本碍子株式会社 Gas sensor
CN211955300U (en) * 2020-02-19 2020-11-17 浙江百岸科技有限公司 Sensor chip

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GB2079469A (en) * 1980-07-01 1982-01-20 Centre Nat Rech Scient Solid electrolyte gas sensor
JP2003185625A (en) * 2001-10-09 2003-07-03 Riken Corp Gas detecting element and gas detecting apparatus using the same
DE102006034379A1 (en) * 2006-07-25 2008-01-31 Robert Bosch Gmbh Mixture potential sensor i.e. ammonia sensor, for quantitative detection of individual gas species i.e. ammonia, in gas mixture in internal combustion engine, has evaluator calculating concentration of gas components
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112697862A (en) * 2020-11-30 2021-04-23 广西玉柴机器股份有限公司 NO measurement without influence of ammoniaXOf (2) a
CN112798667A (en) * 2021-03-15 2021-05-14 浙江百岸科技有限公司 Nitrogen-oxygen sensor chip with shielding layer
CN113552201A (en) * 2021-09-01 2021-10-26 浙江百岸科技有限公司 Nitrogen-oxygen sensor chip with protective cap coating
CN115112740A (en) * 2022-01-04 2022-09-27 长城汽车股份有限公司 Sensor for monitoring ammonia content and method for monitoring ammonia content in tail gas
CN115112740B (en) * 2022-01-04 2024-05-10 长城汽车股份有限公司 Sensor for monitoring ammonia content and method for monitoring ammonia content in tail gas
CN115078503A (en) * 2022-06-21 2022-09-20 武汉科技大学 Sensor chip for simultaneously measuring nitrogen oxide and ammonia gas and manufacturing method thereof

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