CN111128684A - 一种多晶湿法黑硅清洗工艺 - Google Patents
一种多晶湿法黑硅清洗工艺 Download PDFInfo
- Publication number
- CN111128684A CN111128684A CN201911398427.0A CN201911398427A CN111128684A CN 111128684 A CN111128684 A CN 111128684A CN 201911398427 A CN201911398427 A CN 201911398427A CN 111128684 A CN111128684 A CN 111128684A
- Authority
- CN
- China
- Prior art keywords
- black silicon
- cleaning process
- washing
- alkali
- polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000004140 cleaning Methods 0.000 title claims abstract description 34
- 229910021418 black silicon Inorganic materials 0.000 title claims abstract description 33
- 239000003513 alkali Substances 0.000 claims abstract description 23
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims abstract description 17
- 235000011114 ammonium hydroxide Nutrition 0.000 claims abstract description 17
- 229910052709 silver Inorganic materials 0.000 claims abstract description 13
- 239000004332 silver Substances 0.000 claims abstract description 13
- 238000005406 washing Methods 0.000 claims description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 19
- 239000010703 silicon Substances 0.000 claims description 19
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical group [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 238000001556 precipitation Methods 0.000 claims description 3
- 238000005266 casting Methods 0.000 claims description 2
- 238000002310 reflectometry Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 16
- 241000270708 Testudinidae Species 0.000 abstract description 7
- 238000006243 chemical reaction Methods 0.000 abstract description 7
- -1 silver ions Chemical class 0.000 abstract description 6
- 238000013386 optimize process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 229910021426 porous silicon Inorganic materials 0.000 abstract description 3
- 230000000536 complexating effect Effects 0.000 abstract description 2
- 239000011148 porous material Substances 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 14
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 229910021645 metal ion Inorganic materials 0.000 description 5
- 229910001385 heavy metal Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000006555 catalytic reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
实列一 | Qty. | Voc | Ics | Rs | FF | Rsh | Eff | "龟壳类"EL |
对比组 | 1600 | 0.6317 | 9.055 | 0.00077 | 81.92 | 916 | 18.919 | 无 |
实验组 | 1600 | 0.6326 | 9.054 | 0.00016 | 82.03 | 814 | 18.968 | 无 |
实列二 | Qty. | Voc | Ics | Rs | FF | Rsh | Eff | 龟壳类EL |
对比组 | 1600 | 0.6321 | 9.055 | 0.00019 | 81.85 | 824 | 18.947 | 无 |
实验组 | 1600 | 0.6333 | 9.038 | 0.00055 | 82.07 | 912 | 18.965 | 无 |
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911398427.0A CN111128684A (zh) | 2019-12-30 | 2019-12-30 | 一种多晶湿法黑硅清洗工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911398427.0A CN111128684A (zh) | 2019-12-30 | 2019-12-30 | 一种多晶湿法黑硅清洗工艺 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111128684A true CN111128684A (zh) | 2020-05-08 |
Family
ID=70505395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911398427.0A Pending CN111128684A (zh) | 2019-12-30 | 2019-12-30 | 一种多晶湿法黑硅清洗工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111128684A (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150044812A1 (en) * | 2012-05-09 | 2015-02-12 | National University Of Singapore | Non-acidic isotropic etch-back for silicon wafer solar cells |
CN105870263A (zh) * | 2016-06-27 | 2016-08-17 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅太阳能电池绒面结构的制备方法 |
CN107742662A (zh) * | 2017-10-25 | 2018-02-27 | 江西瑞晶太阳能科技有限公司 | 一种蜂窝状湿法黑硅绒面结构及其制备方法以及黑硅电池及其制备方法 |
CN109537058A (zh) * | 2018-09-30 | 2019-03-29 | 江苏顺风新能源科技有限公司 | 湿法黑硅制备工艺 |
CN109713078A (zh) * | 2017-10-26 | 2019-05-03 | 上海神舟新能源发展有限公司 | 一种对微纳米结构清洗并修复损伤方法 |
-
2019
- 2019-12-30 CN CN201911398427.0A patent/CN111128684A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150044812A1 (en) * | 2012-05-09 | 2015-02-12 | National University Of Singapore | Non-acidic isotropic etch-back for silicon wafer solar cells |
CN105870263A (zh) * | 2016-06-27 | 2016-08-17 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅太阳能电池绒面结构的制备方法 |
CN107742662A (zh) * | 2017-10-25 | 2018-02-27 | 江西瑞晶太阳能科技有限公司 | 一种蜂窝状湿法黑硅绒面结构及其制备方法以及黑硅电池及其制备方法 |
CN109713078A (zh) * | 2017-10-26 | 2019-05-03 | 上海神舟新能源发展有限公司 | 一种对微纳米结构清洗并修复损伤方法 |
CN109537058A (zh) * | 2018-09-30 | 2019-03-29 | 江苏顺风新能源科技有限公司 | 湿法黑硅制备工艺 |
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PB01 | Publication | ||
PB01 | Publication | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Zao Inventor after: Hou Chengcheng Inventor after: Guan Zisheng Inventor after: Yin Yue Inventor before: Chen Zao Inventor before: Hou Chengcheng Inventor before: Guan Zisheng Inventor before: Yin Yue |
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Zao Inventor after: Hou Chengcheng Inventor after: Guan Zisheng Inventor after: Yin Yue Inventor before: Chen Zao Inventor before: Hou Chengcheng Inventor before: Guan Zisheng Inventor before: Yin Yue |
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CB03 | Change of inventor or designer information | ||
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RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200508 |
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RJ01 | Rejection of invention patent application after publication |