CN111128654A - Working distance measuring and early warning device of scanning electron microscope - Google Patents
Working distance measuring and early warning device of scanning electron microscope Download PDFInfo
- Publication number
- CN111128654A CN111128654A CN202010026167.0A CN202010026167A CN111128654A CN 111128654 A CN111128654 A CN 111128654A CN 202010026167 A CN202010026167 A CN 202010026167A CN 111128654 A CN111128654 A CN 111128654A
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- CN
- China
- Prior art keywords
- electron microscope
- sample
- distance
- pole shoe
- scanning electron
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention relates to a device for measuring and early warning the working distance of a scanning electron microscope. The invention comprises the following steps: an objective pole shoe (1); a sample stage (2); a distance sensor (3); an alarm (4); a camera (5). The invention is suitable for monitoring the working distance of the scanning electron microscope, when the sample platform is too close to the pole shoe of the objective lens, the distance sensor can give an alarm in time and block the current operation, and the fault of the electron microscope caused by the sample touching the pole shoe is avoided.
Description
Technical Field
The invention discloses a device for measuring and early warning the working distance of a scanning electron microscope.
Background
An Electron Microscope (Electron Microscope, abbreviated as EM) is an Electron Microscope, which plays an irreplaceable role in the research field along with the development of scientific technology, is applied more and more widely, and plays an important role in the fields of material science, biological science, medicine and the like. To take a high-definition picture, the operating conditions of the electron microscope need to be set. The working conditions of the electron microscope include a plurality of acceleration voltages, beam spots, working distances, diaphragm sizes, light and dark contrast, detector selection and the like, wherein the working distances have great influence. The working distance refers to the perpendicular distance between the edge of the objective pole piece and the sample plane when the focus is aligned. When an electron microscope experiment is performed, the Z-axis position of a sample can be changed to adjust the working distance, and different working distances may be required to accurately focus for different samples and experiment conditions. However, since the space between the pole piece and the sample stage is very narrow, excessive and rapid adjustment is very likely to cause the sample to hit the pole piece. The invention adopts the working distance sensor and the alarm system, when the sample is close to the set value from the top end of the pole shoe, the alarm gives an alarm and blocks the current operation, thereby avoiding the sample from touching the pole shoe and avoiding the damage of the pole shoe.
Disclosure of Invention
The invention provides a measuring and early warning device for the working distance of a scanning electron microscope, which comprises: an objective pole shoe (1); a sample stage (2); a distance sensor (3); an alarm (4); a camera (5).
The distance sensor (3) is arranged in the lens cone of the electron microscope, monitors the distance between the pole shoe and the sample table in real time, and when the distance between the pole shoe and the sample table is smaller than a set value, the alarm gives an alarm and blocks the current operation to prompt an operator to adjust the distance between the sample and the pole shoe in time; two vacuum-resistant special material cameras (5) with 180-degree scanning are symmetrically arranged inside the lens cone to monitor the internal environment in real time.
The invention has the beneficial effects that: the working distance can be conveniently and rapidly adjusted, the distance between the sample and the pole shoe can be known at any time, the sample is prevented from touching the pole shoe, and the pole shoe is protected.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Detailed Description
The technical solution of the present invention is illustrated by the following specific examples, but the scope of the present invention is not limited thereto:
as shown in the figure, the distance sensor (3) is arranged in the sample chamber, and can monitor the working distance at any time. The position of the sample table (2) in the vertical direction needs to be continuously adjusted to obtain an image with accurate focusing in the electron microscope experiment. In the focusing process, when the distance between the sample platform (2) and the pole shoe (1) is smaller than a preset value (generally 2 mm), the distance sensor (3) can transmit a corresponding signal to trigger the alarm (4) to give an alarm, trigger protection and forcibly stop the current operation. The cameras (5-1) and (5-2) are symmetrically arranged in the lens cone and used for monitoring the distance between the sample and the pole shoe on the sample stage.
Claims (6)
1. A device for measuring and early warning the working distance of a scanning electron microscope comprises: an objective pole shoe (1); a sample stage (2); a distance sensor (3); an alarm (4); a camera (5).
2. Objective pole piece (1) according to claim 1, being a core component of a scanning electron microscope.
3. Sample stage (2) according to claim 1, being a part for placing a sample, which is mounted on the sample stage for observation under an electron microscope, in the vacuum optical path.
4. A distance sensor (3) according to claim 1 for real-time monitoring of the distance between the pole piece and the top of the sample on the sample stage.
5. The alarm (4) according to claim 1, wherein when the distance between the pole shoe (1) and the sample holder (2) is less than a predetermined value, an alarm is issued and the current operation is blocked.
6. The camera (5) according to claim 1, symmetrically mounted inside the lens barrel, clearly presenting the sample position on the sample stage and its distance from the pole shoe on the screen of the controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010026167.0A CN111128654A (en) | 2020-01-10 | 2020-01-10 | Working distance measuring and early warning device of scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010026167.0A CN111128654A (en) | 2020-01-10 | 2020-01-10 | Working distance measuring and early warning device of scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111128654A true CN111128654A (en) | 2020-05-08 |
Family
ID=70487720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010026167.0A Withdrawn CN111128654A (en) | 2020-01-10 | 2020-01-10 | Working distance measuring and early warning device of scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111128654A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113433134A (en) * | 2021-06-24 | 2021-09-24 | 深圳中科飞测科技股份有限公司 | Detection method, detection device and computer-readable storage medium |
| CN116794822A (en) * | 2023-07-05 | 2023-09-22 | 苏州欧米特光电科技有限公司 | Microscope control system and method |
-
2020
- 2020-01-10 CN CN202010026167.0A patent/CN111128654A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113433134A (en) * | 2021-06-24 | 2021-09-24 | 深圳中科飞测科技股份有限公司 | Detection method, detection device and computer-readable storage medium |
| CN116794822A (en) * | 2023-07-05 | 2023-09-22 | 苏州欧米特光电科技有限公司 | Microscope control system and method |
| CN116794822B (en) * | 2023-07-05 | 2024-04-30 | 苏州欧米特光电科技有限公司 | Microscope control system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20200508 |