CN110673319B - Microscope laser repair system and device capable of automatically adjusting light source - Google Patents
Microscope laser repair system and device capable of automatically adjusting light source Download PDFInfo
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- CN110673319B CN110673319B CN201910930208.6A CN201910930208A CN110673319B CN 110673319 B CN110673319 B CN 110673319B CN 201910930208 A CN201910930208 A CN 201910930208A CN 110673319 B CN110673319 B CN 110673319B
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- 230000008439 repair process Effects 0.000 title claims abstract description 26
- 238000001514 detection method Methods 0.000 claims abstract description 24
- 238000003384 imaging method Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 2
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000001276 controlling effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Pathology (AREA)
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- Chemical Kinetics & Catalysis (AREA)
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Abstract
The invention discloses a microscope laser repair system capable of automatically adjusting a light source, which comprises: a microscope for magnifying the product; a camera for acquiring an image of the magnified product; a fluorescence generator for providing a light source for imaging by the camera; the laser repairing device is used for repairing a product; the central controller is used for controlling the laser repairing device to repair according to the image of the amplified product; and a light source detection system for adjusting the brightness of a light source for imaging by the camera. The invention has the following beneficial effects: can carry out automatically regulated according to light source luminance, improve the precision and prolong the life-span.
Description
Technical Field
The invention belongs to the technical field of product detection, and particularly relates to a microscope laser repair system and device capable of automatically adjusting a light source.
Background
When the existing product is detected, for example, liquid crystal glass products are detected, a microscope is usually adopted to amplify a detection surface for more comprehensively detecting product flaws, so that bad phenomena such as broken lines, roughness, distribution density and size of conductive particles are effectively detected, timely and effective repair is facilitated, and the product yield is improved. The repairing process is usually completed by adopting a laser device with higher precision, and the system repairs according to the detection result and a corresponding repairing program.
As is well known, the microscope of such a detection system is an optical microscope, and in order to achieve better imaging effect of the camera, a light source must be added, and the brightness of the light source is adjusted during use to achieve the purpose of optimal imaging. However, the brightness of the light source is manually controlled by hardware such as a knob potentiometer and the like in the conventional brightness adjustment of the light source, so that the control precision is not high, the service life is short, and great inconvenience is caused in use.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a microscope laser repair system and a microscope laser repair device capable of automatically adjusting a light source, which can automatically adjust according to the brightness of the light source, improve the precision and prolong the service life.
In order to solve the problems of the prior art, the invention discloses a microscope laser repair system capable of automatically adjusting a light source,
the method comprises the following steps: a microscope for magnifying the product;
a camera for acquiring an image of the magnified product;
a fluorescence generator for providing a light source for imaging by the camera;
the laser repairing device is used for repairing a product;
the central controller is used for controlling the laser repairing device to repair according to the image of the amplified product; and
a light source detection system for adjusting the brightness of a light source for imaging by the camera.
Further, the air conditioner is provided with a fan,
the light source detection system includes:
a brightness detector for detecting brightness of the light source;
a brightness controller for generating a brightness control signal according to brightness; and
and the brightness display is used for displaying the current brightness.
Further, the air conditioner is provided with a fan,
the fluorescent generator provides an upper light source and a lower light source, the brightness detector detects the brightness of the two light sources respectively, the brightness controller outputs control signals for adjusting the corresponding light sources respectively, and the brightness display displays the corresponding light source brightness respectively.
The invention also provides a microscope laser repairing device capable of automatically adjusting the light source, which comprises:
the system comprises a microscope, a camera, a fluorescent generator, a laser restorer and a light source detection system;
the microscope and the laser repairing device can move along a linear direction, and both the axis of an objective lens of the microscope and the axis of an emitting head of the laser repairing device can be parallel to the linear direction;
the microscope objective lens and the camera input end establish a light channel for imaging of the camera imaging chip, the fluorescence generator provides a light source to the light channel, and the light source detection system can detect and adjust the brightness of the light source.
Further, the air conditioner is provided with a fan,
the device also comprises a fixed plate, a movable block, a mounting plate and a linear power device; a linear slide rail is arranged on one side plate surface of the fixed plate, and the movable block is in sliding connection with the fixed plate along the linear direction through the linear slide rail; the mounting plate is mounted on the movable block, the linear power device is mounted on the fixed plate, and the driving part of the linear power device is fixedly connected with the mounting plate; the microscope, the camera and the laser repairing device are all installed on the installation plate.
Further, the air conditioner is provided with a fan,
the linear power device comprises a driving motor, a screw shaft, a screw nut and a coupler, wherein the driving motor is arranged on the fixing plate, and a main shaft of the driving motor is connected with the end part of the screw shaft through the coupler; the other end of the screw shaft is rotatably arranged on the fixing plate, the screw nut is arranged on the mounting plate, and the screw shaft and a center hole of the screw nut form threaded fit.
Further, the air conditioner is provided with a fan,
the movable block is arranged on the fixed plate, and the upper limiting device and the lower limiting device are arranged on the fixed plate and used for limiting the moving stroke of the movable block or the mounting plate.
Further, the air conditioner is provided with a fan,
the upper limiting device and the lower limiting device are provided with triggering parts which can generate control signals under the action of external force.
Further, the air conditioner is provided with a fan,
the microscope is installed on the mounting plate through the microscope fixing seat, and the laser repairing device is installed on the mounting plate through the laser fixing seat.
The invention has the following beneficial effects: the automatic adjustment can be carried out according to the light source brightness, the precision is improved, the service life is prolonged, on the basis, the brightness display function is added, and the user can conveniently record the current brightness.
Drawings
FIG. 1 is a block diagram of a system in an embodiment of the invention;
FIG. 2 is a perspective view of the device of an embodiment of the present invention;
FIG. 3 is a front elevational view of the arrangement of FIG. 2;
fig. 4 is a left side view of the structure of the device shown in fig. 2.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
As shown in fig. 1, an embodiment of the present invention provides a microscope laser repair system capable of automatically adjusting a light source, which includes a microscope 1, a camera, a fluorescent generator 3, a laser repair device 2, a central controller, and a light source detection system. The microscope 1 is used for magnifying a product, the camera is used for obtaining an image of the magnified product, the fluorescent generator 3 is used for providing a light source for imaging of the camera, the laser repair device 2 is used for repairing the product, the central controller is used for controlling the laser repair device 2 to repair according to the image of the magnified product, and the light source detection system is used for adjusting the brightness of the light source for imaging of the camera.
The light source detection system comprises a brightness detector, a brightness controller and a brightness display. The brightness detector is used for detecting the brightness of the light source, the brightness controller is used for generating a brightness control signal according to the brightness, and the brightness display is used for displaying the current brightness.
The fluorescent generator 3 provides an upper light source and a lower light source, the brightness detector detects the brightness of the two light sources respectively, the brightness controller outputs control signals for adjusting the corresponding light sources respectively, and the brightness display displays the corresponding light source brightness respectively.
As shown in fig. 2 to 4, an embodiment of the present invention provides a microscope laser repairing device capable of automatically adjusting a light source, including a fixing plate 6, a movable block 5, a mounting plate 3, a fluorescent generator 3, a microscope 1, a CCD camera, a laser repairing device 2, a light source detecting system, and a linear power device. A linear slide rail 6.1 is arranged on one side of the fixed plate 6, and the movable block 5 is connected with the fixed plate 6 in a sliding mode along a straight line through the linear slide rail 6.1. In use, since the fixed plate 6 is preferably vertically disposed, the movable block 5, the mounting plate 3, and the fixed object are all provided with a degree of freedom in the Z-axis direction by sliding connection, that is, the Z-axis motion among the three-axis motions is configured. The mounting plate 3 is mounted on the movable block 5, the linear power device is mounted on the fixed plate 6, and a driving part of the linear power device is fixedly connected with the mounting plate 3. The microscope 1, the camera and the laser repairing device 2 are all installed on the installation plate 3, and the axis I of the objective lens 1.2 of the microscope 1 and the axis II of the emitting head 2.1 of the laser repairing device 2 can be parallel to the linear direction III of the installation plate 3. The eyepiece 1.1 of the microscope 1 can also acquire an image of the detection surface for a user to observe flaws, the number of the objective lenses 1.2 is multiple, so that the magnification can be adjusted from 5X to 100X, and the switching of the objective lenses 1.2 is realized through the turntable 1.3. The objective lens 1.2 of the microscope 1 and the input end of the camera establish a light channel for imaging by an imaging chip of the camera, the fluorescence generator 3 provides a light source to the light channel, and the light source detection system can detect and adjust the brightness of the light source.
In one embodiment, the linear power device comprises a driving motor 10, a screw shaft, a screw nut and a coupling 7, wherein the driving motor 10 is installed on the top of the fixing plate 6 through a driving motor base 8, and a main shaft of the driving motor is connected with the end part of the screw shaft through the coupling 7. The driving motor base 8 is a hollow frame structure, and the coupler 7 can be accommodated in the driving motor base 8 to be protected. The other end of the screw shaft is rotatably arranged on the fixing plate 6, the screw nut is arranged on the mounting plate 3, and the screw shaft and a center hole of the screw nut form threaded fit.
In one embodiment, the device further comprises upper and lower limiting devices 9 and 11, wherein the upper and lower limiting devices 9 and 11 are mounted on the fixed plate 6 and used for limiting the moving stroke of the movable block 5 or the mounting plate 3.
In one embodiment, the upper and lower limiting means 9, 11 have a trigger portion capable of being acted upon by an external force to generate a signal for controlling the linear power means. Preferably, the upper and lower limiting devices 9, 11 are both limit switches.
In one embodiment, the microscope 1 is mounted on the mounting plate 3 by a microscope mount 4, and the laser repair device 2 is mounted on the mounting plate 3 by a laser mount 12.
The working process and principle of the invention are as follows:
the product is secured to the inspection station.
The objective 1.2 of the mobile microscope 1 is aligned with the product and then adjusted to a suitable magnification, for example 100, and then the fluorescence generator 3 is switched to detect flaws in the product while a corresponding inspection image is generated by the camera. The defects shown in the detection image have some undesirable phenomena such as broken lines, roughness, distribution density and size of conductive particles and the like.
And matching a corresponding program according to the detection result to control the emission head 2.1 of the movable laser repairing device 2 to emit laser to cut and repair the product.
And finally, switching the fluorescence generator, detecting the cut and repaired product through the microscope 1, and judging whether the product is qualified.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (8)
1. The utility model provides a but microscope laser repair system of automatic light source that adjusts which characterized in that:
the method comprises the following steps: a microscope (1) for magnifying a product;
a camera for acquiring an image of the magnified product;
a fluorescence generator (3) for providing a light source for imaging by the camera;
a laser repair device (2) for repairing a product;
the central controller is used for controlling the laser repairing device (2) to repair according to the image of the amplified product; and
a light source detection system for adjusting the brightness of a light source for imaging by the camera; the light source detection system includes: a brightness detector for detecting brightness of the light source; a brightness controller for generating a brightness control signal according to brightness; and a brightness display for displaying the current brightness;
the working process of the system comprises the following steps:
fixing the product to a detection station;
an objective lens (1.2) of the moving microscope (1) is aligned to a product, the magnification is adjusted to be proper, then a fluorescent generator (3) is switched to detect the flaws of the product, and meanwhile, a corresponding detection image is generated through a camera; determining the bad phenomenon presented by the detected image;
matching a corresponding program according to the presented bad phenomenon to control the emitting head (2.1) of the movable laser repairing device (2) to emit laser to cut and repair the product;
and finally, switching the fluorescence generator (3), detecting the cut and repaired product through the microscope (1), and judging whether the product is qualified.
2. The microscope laser repair system capable of automatically adjusting the light source according to claim 1, wherein:
the fluorescent generator (3) is provided with an upper light source and a lower light source, the brightness detector is used for respectively detecting the brightness of the two light sources, the brightness controller is used for respectively outputting control signals for adjusting the corresponding light sources, and the brightness display is used for respectively displaying the corresponding light source brightness.
3. The utility model provides a but microscope laser prosthetic devices of automatic light source that adjusts which characterized in that: the method comprises the following steps:
the device comprises a microscope (1), a camera, a fluorescent generator (3), a laser restorer (2) and a light source detection system;
the microscope (1) and the laser repair device (2) can move along a linear direction (III), and both an axis (I) of an objective lens (1.2) of the microscope (1) and an axis (II) of an emission head (2.1) of the laser repair device (2) can be parallel to the linear direction (III);
a light channel is established between an objective lens (1.2) of the microscope (1) and the input end of the camera for imaging by an imaging chip of the camera, the fluorescence generator (3) provides a light source into the light channel, and the light source detection system can detect and adjust the brightness of the light source;
the working process of the device comprises the following steps:
fixing the product to a detection station;
an objective lens (1.2) of the moving microscope (1) is aligned to a product, the magnification is adjusted to be proper, then a fluorescent generator (3) is switched to detect the flaws of the product, and meanwhile, a corresponding detection image is generated through a camera; determining the bad phenomenon presented by the detected image;
matching a corresponding program according to the existing bad phenomenon to control the emitting head (2.1) of the movable laser repairing device (2) to emit laser to cut and repair the product;
and finally, switching the fluorescence generator (3), detecting the cut and repaired product through the microscope (1), and judging whether the product is qualified.
4. The apparatus according to claim 3, wherein the apparatus comprises:
the device also comprises a fixed plate (6), a movable block (5), a mounting plate (13) and a linear power device; a linear slide rail (6.1) is arranged on one side plate surface of the fixed plate (6), and the movable block (5) is in sliding connection with the fixed plate (6) along the linear direction (III) through the linear slide rail (6.1); the mounting plate (13) is mounted on the movable block (5), the linear power device is mounted on the fixed plate (6), and a driving part of the linear power device is fixedly connected with the mounting plate (13); the microscope (1), the camera and the laser repairing device (2) are all installed on the installation plate (13).
5. The apparatus according to claim 4, wherein the apparatus further comprises:
the linear power device comprises a driving motor (10), a screw shaft, a screw nut and a coupler (7), wherein the driving motor (10) is installed on the fixing plate (6), and a main shaft of the driving motor is connected with the end part of the screw shaft through the coupler (7); the other end of the screw shaft is rotatably arranged on the fixing plate (6), the screw nut is arranged on the mounting plate (13), and the screw shaft and a center hole of the screw nut form threaded fit.
6. The apparatus according to claim 4, wherein the apparatus further comprises:
the device is characterized by further comprising an upper limiting device (9) and a lower limiting device (11), wherein the upper limiting device (9) and the lower limiting device (11) are installed on the fixing plate (6) and used for limiting the moving stroke of the movable block (5) or the installing plate (13).
7. The apparatus according to claim 6, wherein the apparatus comprises:
the upper and lower limiting devices (9, 11) are provided with triggering parts which can generate control signals under the action of external force.
8. The apparatus according to claim 4, wherein the apparatus further comprises:
the microscope (1) is installed on the installation plate (13) through the microscope fixing seat (4), and the laser repairing device (2) is installed on the installation plate (13) through the laser fixing seat (12).
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| CN201910930208.6A CN110673319B (en) | 2019-09-29 | 2019-09-29 | Microscope laser repair system and device capable of automatically adjusting light source |
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| CN201910930208.6A CN110673319B (en) | 2019-09-29 | 2019-09-29 | Microscope laser repair system and device capable of automatically adjusting light source |
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| CN114264663A (en) * | 2021-12-17 | 2022-04-01 | 苏州科韵激光科技有限公司 | Laser repair method, device and storage medium |
| CN116252046A (en) * | 2022-12-26 | 2023-06-13 | 深圳市东赢激光设备有限公司 | Portable color-changing glass repairing equipment |
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| JP4309752B2 (en) * | 1997-06-27 | 2009-08-05 | 株式会社東芝 | Photomask inspection method, photomask inspection apparatus, and photomask manufacturing method |
| WO2006100780A1 (en) * | 2005-03-24 | 2006-09-28 | Olympus Corporation | Repairing method and apparatus therefor |
| CN1889801A (en) * | 2005-06-28 | 2007-01-03 | 铼宝科技股份有限公司 | Detection repairing system |
| KR100863140B1 (en) * | 2007-04-25 | 2008-10-14 | 에스엔유 프리시젼 주식회사 | Detecting materials on wafer and repair system and method thereof |
| JP2011142297A (en) * | 2009-12-08 | 2011-07-21 | Hitachi Via Mechanics Ltd | Method of manufacturing thin film solar cell and laser scribing apparatus |
| CN205406067U (en) * | 2016-03-11 | 2016-07-27 | 重庆师范大学 | Self -adaptation environment type projecting apparatus |
| CN207502808U (en) * | 2017-08-31 | 2018-06-15 | 宁波舜宇仪器有限公司 | Microscope illumination system |
| CN207198061U (en) * | 2017-09-29 | 2018-04-06 | 南阳南方智能光电有限公司 | A kind of SP251 camera lenses detection device for foreign matter |
| CN108645863A (en) * | 2018-05-09 | 2018-10-12 | 苏州康鸿智能装备股份有限公司 | It is a kind of detection and laser repairing module |
| CN109406533A (en) * | 2018-10-25 | 2019-03-01 | 北京阿丘机器人科技有限公司 | A kind of detection system and method for surface defects of products |
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Application publication date: 20200110 Assignee: Zhongguancun Technology Leasing Co.,Ltd. Assignor: JIANGSU CAIDAO PRECISION INSTRUMENT CO.,LTD. Contract record no.: X2022980029919 Denomination of invention: A laser repair system and device for microscope with automatic light adjustment Granted publication date: 20210409 License type: Exclusive License Record date: 20230103 |
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