CN111123418B - Graphene plasmon cavity-perfect absorber coupling nano resonance device - Google Patents
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Abstract
The invention discloses a graphene plasmon cavity-perfect absorber coupling nano resonance device, belongs to the technical field of nano photonics and photoelectrons, and relates to a novel nano optical device applied to middle and far infrared wave bands. According to the invention, a new hybrid mode is formed by coupling a magnetic resonance mode and a graphene-metal cavity mode, the designed nano optical resonance device can show a plurality of resonance modes in middle and far infrared wave bands, and has the advantages of breaking through diffraction limit, ultra-thin and ultra-compact device size smaller than 100nm thickness, super-strong light field local characteristics, capability of compressing a space mode to be below 10nm, strong spectrum regulation and control capability, and capacity of realizing more than 300% of spectrum absorption rate regulation and control specific energy at a hybrid mode resonance peak. The nano optical resonance device designed by the invention can be applied to various fields such as optical excitation, modulation, sensing, detection and the like, and plays an important role in the development of novel photoelectric technology.
Description
Technical Field
The invention belongs to the technical field of nanophotonics and photoelectrons, and particularly relates to a graphene plasmon cavity-perfect absorber coupling nano resonance device.
Background
The surface plasmon has sub-wavelength space local capacity, is sensitive to the change of surrounding media, and can realize label-free, high-sensitivity, real-time detection, no-damage and non-contact detection and sensing. Most of the traditional surface plasmon materials are precious metals such as gold and silver. In recent years, graphene has attracted more and more attention as a novel surface plasmon material in mid-far infrared and terahertz wave bands. The graphene surface plasmon has relatively low loss and extremely high spatial light field local capacity. Meanwhile, the concentration and Fermi level of carriers of the graphene can be changed by adding a grid piezoelectric doping or chemical doping mode, and the surface plasmon characteristics of the graphene can be further changed. The unique adjustable characteristic has important significance for the development of novel middle and far infrared and terahertz devices.
Because the plasmon mode has a larger wave vector of the optical field and has larger momentum mismatch with the wave vector of the free space excitation light, the plasmon mode can be effectively excited still with a challenge, especially for graphene surface plasmons. The coupling between the plasmon mode and the free light is realized mainly through prism coupling, grating coupling (pages 7806 and 7813 of volume 6 of ACS Nano 2012), cavity coupling (pages 1611 and 1618 of volume 11 of volume 2 of ACS Photon 2015), near-field coupling and the like. The grating coupling can realize high-efficiency coupling at the time of vertical incidence, and is an effective coupling mode widely adopted.
A surface plasmon perfect absorber is an important optical device. The device utilizes the phenomenon of light absorption or capture caused by plasmon resonance and the like, can realize complete absorption of incident light at specific resonance wavelength, and plays a role in regulating spectral lines. Conventional perfect absorbers operate mostly in a single band or wavelength region. For many applications such as spectral analysis and nonlinear optics, the generation of multiple resonances is of great importance [ Chen, Kai, Ronen Adato, and waveguide Altuf. "Dual-band transistor absorber for multiplex plasma-enhanced induced spectroscopy." Acs Nano 6: 7998-. To form new multi-resonant modes, it is often necessary to integrate different sizes of absorbing structures [ Xianliang Liu et al, "terminating the blackberry with associated methodology as selective thermal entities," phys. rev. lett.107(4),045901(2011) ], or to take advantage of coupling between the different modes.
The invention designs a novel graphene integrated surface plasmon perfect absorber structure, adopts a method of compensating momentum mismatch by using a grating, excites a new hybrid mode by means of coupling of a magnetic plasmon resonance mode of a metal perfect absorber and a graphene cavity mode, and generates a series of resonances in the resonance range of middle and far infrared wave bands. The optical field space local area of the mode can be restricted to the scale of 1nm to 10nm, the wavelength compression ratio can realize 1/1000 of the excitation wavelength, and the optical field space local area has the characteristics of breaking through the diffraction limit, and having super-strong optical field space local area and spectrum compression local area. In addition, the device designed by the invention has ultrathin characteristics by using the magnetic plasmon resonance structure, and the size in the vertical direction can be reduced to be less than 100 nm. This is much smaller than the graphene integrated perfect absorber structure designed by the F-p resonance principle to excite this mode, as adopted by Lee et al, Nature Nanotechnology, volume 14, 313-. And finally, perfect absorption and spectrum line regulation can be realized by adjusting the grating structure parameters, the thickness of the dielectric layer and the Fermi level of the graphene. The invention can be used for multi-photon nonlinear optical nano devices, photonic chips or ultra-compact photonic integrated circuits, super-resolution and surface-enhanced Raman spectrums, optical frequency comb optical modulators, multi-bandwidth multi-mode optical sensors, detectors and the like.
Disclosure of Invention
In order to solve the technical problems, the method comprises the steps of realizing an ultrathin and ultra-compact space scale nanometer device, an ultra-local optical field mode, a larger wavelength compression ratio, stronger regulation spectral line intensity near a specific wavelength and excellent regulation sensitivity. The technical scheme adopted by the invention is as follows:
a graphene plasmon cavity-perfect absorber coupling nanometer resonance device is composed of a metal film grating, a wrapped optical medium layer, a tiled single-layer or multi-layer graphene and a metal film substrate which are uniformly distributed from top to bottom; the optical medium layers are wrapped on two sides of the single-layer or multi-layer graphene, the graphene is flatly laid on the lower-layer optical medium, the uniformly distributed metal film grating and the optical medium layers are in direct physical contact, and the metal film substrate is used as a reflector and is in direct physical contact with the optical medium layers.
Preferably, the external environment working wave band range of the nano resonance device is 5-20 μm.
Preferably, the material of the metal thin film grating and the metal thin film substrate is a metal material such as gold, silver, aluminum, and the like.
Preferably, the metal thin film grating is a grating formed by parallelly arranging metal nanowires with the same thickness, width and length, and is a one-dimensional grating or a two-dimensional grating; the length range of the metal nanowire is more than 50nm, the width range is 50 nm-10000 nm, and the thickness range is 10 nm-300 nm; the slit distance between the two metal nanowires of the metal film grating ranges from 3nm to 1000 nm.
Preferably, the structural size of the metal thin film grating is smaller than the wavelength of light wave in a working waveband; the period range of the metal film grating is 200-10000 nm.
Preferably, the optical dielectric layer material between the metal film grating and the metal film substrate can be a common dielectric material or a two-dimensional material such as BN; the refractive index range of an optical medium layer between the metal film grating and the metal film substrate is 1-6; the thickness range of the two optical medium layers between the metal film grating and the metal film substrate is 0.3 nm-500 nm.
Preferably, the Fermi level range of the tiled single-layer graphene is 0-1.2 eV.
Preferably, the thickness of the metal film substrate is more than 20 nm.
Preferably, the period of the metal film grating is 1710nm, a one-dimensional grating with infinite length of metal nanowires is adopted, the width of the metal nanowires is 1690nm, the distance between two metal nanowires is 20nm, and the thickness of the metal nanowires is 30 nm; the optical medium layers between the metal film grating and the metal film substrate and wrapping the two sides of the graphene are CaF2Refractive index of 1.4, upper CaF2Material and underlying CaF2The thickness of the material is the same, the thickness is 30nm, the thickness of the metal film substrate is 30nm, the Fermi level of the single-layer graphene is set to be 0.64eV。
Preferably, the period of the metal film grating is 1710nm, a one-dimensional grating with infinite length of metal nanowires is adopted, the width of the metal nanowires is 1680nm, the distance between two metal nanowires is 30nm, and the thickness of the metal nanowires is 30 nm; the optical medium layers between the metal film grating and the metal film substrate and wrapping the two sides of the graphene are CaF2Refractive index of 1.4, upper CaF2Material and underlying CaF2The thickness of the material is the same, the thickness of the material is 15nm, the thickness of the metal film substrate is 30nm, and the Fermi level of the single-layer graphene is set to be 0.34-0.64 eV.
The invention has the technical effects that:
1. the invention overcomes the defects and the deficiency of the thickness of the traditional excited graphene cavity plasmon mode device, the thickness can be restricted to be below 100nm or even thinner, and the ultra-compact ultra-local optical field mode nanometer device structure is realized.
2. The optical field spatial locality can be constrained to the nanometer to 10nm scale, and wavelength compression can achieve 1/1000 even larger excitation wavelengths.
3. The intensity ratio of the spectral line of the regulation spectrum can reach 300%, and meanwhile, the regulation sensitivity is high.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional structure of a graphene plasmon cavity-perfect absorption coupling nano-resonator device;
fig. 2 is a schematic diagram of graphene plasmon cavity-perfect absorption coupled nano-resonator device without graphene absorption spectrum and reflection spectrum in embodiment 1;
fig. 3 is a schematic diagram of graphene plasmon cavity-perfect absorption coupling nano-resonator device containing graphene absorption spectrum and reflection spectrum in embodiment 1;
fig. 4 is a schematic diagram of the distribution characteristics of the graphene plasmon cavity-perfect absorption coupling nano-resonator device in the embodiment 1 at an electric field mode with a wavelength λ of 8.965 μm;
fig. 5 is a schematic diagram of the distribution characteristics of the graphene plasmon cavity-perfect absorption coupling nano-resonator device in the embodiment 1 at an electric field mode with a wavelength λ of 7.085 μm;
fig. 6 is a schematic diagram of electric field component mode distribution characteristics of the graphene plasmon cavity-perfect absorption coupling nano-resonator device in embodiment 1;
fig. 7 is a schematic diagram of tunable fermi level frequency shift characteristics of a spectral line of a graphene plasmon cavity-perfect absorption coupling nano resonator device in embodiment 2.
The reference numbers illustrate:
1, an optical medium layer 3 wrapped by uniformly distributed metal film gratings 2, and a single-layer or multi-layer graphene 4 metal film substrate which is tiled.
Detailed Description
The invention will be explained and explained in further detail below with reference to the drawings. The following figures are merely schematic illustrations of idealized embodiments of the present invention, wherein the physical structure of the devices of the present invention is not to be understood as a schematic illustration of the geometric relationships in scale which should be strictly reflected. Of course, the illustrated embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated in the drawings. In short, the drawings are schematic and should not be considered as limiting the scope of the invention.
A graphene plasmon cavity-perfect absorber coupling nanometer resonance device is composed of a metal film grating, a wrapped optical medium layer, a tiled single-layer or multi-layer graphene and a metal film substrate which are uniformly distributed from top to bottom; the optical medium layers are wrapped on two sides of the single-layer or multi-layer graphene, the graphene is flatly laid on the lower-layer optical medium, the uniformly distributed metal film grating and the optical medium layers are in direct physical contact, and the metal film substrate is used as a reflector and is in direct physical contact with the optical medium layers.
Preferably, the external environment working wave band range of the nano resonance device is 5-20 μm.
Preferably, the material of the metal thin film grating and the metal thin film substrate is a metal material such as gold, silver, aluminum, and the like.
Preferably, the metal thin film grating is a grating formed by parallelly arranging metal nanowires with the same thickness, width and length, and is a one-dimensional grating or a two-dimensional grating; the length range of the metal nanowire is more than 50nm, the width range is 50 nm-10000 nm, and the thickness range is 10 nm-300 nm; the slit distance between the two metal nanowires of the metal film grating ranges from 3nm to 1000 nm.
Preferably, the structural size of the metal thin film grating is smaller than the wavelength of light wave in a working waveband; the period range of the metal film grating is 200-10000 nm.
Preferably, the optical dielectric layer material between the metal film grating and the metal film substrate can be a common dielectric material or a two-dimensional material such as BN; the refractive index range of an optical medium layer between the metal film grating and the metal film substrate is 1-6; the thickness range of the two optical medium layers between the metal film grating and the metal film substrate is 0.3 nm-500 nm.
Preferably, the Fermi level range of the tiled single-layer graphene is 0-1.2 eV.
Preferably, the thickness of the metal film substrate is more than 20 nm.
The technical solution of the present invention is described in detail below with reference to several preferred embodiments and the accompanying drawings:
fig. 1 is a schematic diagram of a three-dimensional structure of a graphene plasmon cavity-perfect absorption coupling nano resonance device of the invention, wherein the nano device is composed of a metal film grating, a wrapped optical medium layer, single-layer or multi-layer graphene and a metal film substrate which are uniformly distributed from top to bottom; the metal film grating and the metal film substrate are made of metal materials such as gold, silver, aluminum and the like, and the metal film grating is a one-dimensional grating or a two-dimensional grating formed by parallelly arranging metal nanowires with the same thickness, width and length; the thickness of the metal nano-wire is h0The widths are w, P is the period length of the metal film grating, P is smaller than the wavelength of the light wave in the working waveband, d is the slit distance between the gold nanowires, s0Is the thickness of the optical medium layer wrapping the graphene or the distance from the metal film grating to the metal film substrate, H0Is the thickness of the substrate.
In example 1 goldThe thin film grating and the metal thin film substrate are made of gold, the period P of the metal thin film grating is 1710nm, a one-dimensional grating with infinite length of metal nano wires is adopted, the width w of the metal nano wires is 1690nm, the distance between the two metal nano wires is d is 20nm, and the thickness of the metal nano wires is h030 nm; the optical medium layers between the metal film grating and the metal film substrate and wrapping the two sides of the graphene are CaF2Refractive index of 1.4, thickness s of two layers of optical medium between the metal thin film grating and the metal thin film substrate060nm, upper CaF2Material and underlying CaF2The thickness of the material is the same, the thickness is 30nm, and the thickness of the metal film substrate is H030nm, the single layer graphene fermi level is set to 0.64 eV.
In embodiment 2, the metal thin film grating and the metal thin film substrate are made of gold, the period P of the metal thin film grating is 1710nm, a one-dimensional grating with an infinite length of metal nanowires is adopted, the width of the metal nanowires is w 1680nm, the distance between two metal nanowires is d 30nm, and the thickness of the metal nanowires is h030 nm; the optical medium layers between the metal film grating and the metal film substrate and wrapping the two sides of the graphene are CaF2Refractive index of 1.4, thickness s of two layers of optical medium between the metal thin film grating and the metal thin film substrate030nm, upper CaF2Material and underlying CaF2The thickness of the material is the same, the thickness is 15nm, and the thickness of the metal film substrate is H0The single-layer graphene Fermi level is set to be 0.34-0.64 eV & lt 30 nm.
The polarization direction of the electric field is parallel to the length direction of the grating gold nanowire, and the incident direction is vertical to the plane of the device. The broad spectrum plane wave irradiates on the sensor, part of light is reflected, transmitted and absorbed, and the wavelength, the reflectivity and the transmittance can be measured by using a spectrometer so as to calculate the absorptivity.
Fig. 2 is a schematic diagram of a graphene plasmon cavity-perfect absorption coupled nano-resonator device in embodiment 1 of the present invention, which does not contain a graphene absorption spectrum and a reflection spectrum, and a resonance peak corresponding to a maximum value of the absorption spectrum and a minimum value of the reflection spectrum is generated near a wavelength of 8 μm. The position and intensity of the resonance peak are determined by the structural parameters of the grating and the thickness of the dielectric layer between the metal film grating and the metal film substrate. The resonance peak of the magnetic plasmon can be made to fall just around 8 μm by adjusting the above-mentioned structural parameters.
Fig. 3 is a schematic diagram of a graphene plasmon cavity-perfect absorption coupling nano-resonator device including a graphene absorption spectrum and a reflection spectrum in embodiment 1 of the present invention, and graphene plasmon resonance is excited on an original magnetic plasmon resonance peak after adding graphene, so that the magnetic plasmon resonance is controlled and explained as a coupling between a magnetic plasmon resonance mode and a cavity mode formed by metal-dielectric-graphene-dielectric-metal. Considering from another aspect, the grating acts to provide momentum or wavevector matching to the coupling action of the spatial free light and the plasmonic mode, providing a wavevector exactly equal in magnitude to the plasmonic wavevector at normal incidence. Compared with fig. 2, the regulation and control ratio of the graphene plasmon mode excited near the graphene cavity resonance peak to the spectrum can reach more than 300%.
Fig. 4 is a schematic diagram of the distribution characteristics of the graphene plasmon cavity-perfect absorption coupled nano-resonator device in embodiment 1 at an electric field mode with a wavelength λ of 8.965 μm. Firstly, in a distribution mode characteristic diagram of an electric field mode, a strong spatial local mode can be excited around graphene between a metal film grating and a metal film substrate. The number of the local fields in the electric field mode diagram under a single period is 2 m-16, m-8 represents the order of the excited new mode, and the length of a single local field represents the half lambda of the wavelength of the plasmonspp/2. So that the plasmon wavelength λsppP/m equals approximately 210 nm. Meaning that the spatial longitudinal mode is compressed into a 60nm cavity, the mode effective index achieves lambda0/λspp≈43。
Fig. 5 is a schematic diagram of the distribution characteristics of the graphene plasmon cavity-perfect absorption coupled nano-resonator device in embodiment 1 at an electric field mode with a wavelength λ of 7.085 μm. Firstly, in the distribution mode characteristic diagram of electric field mode, the metal film grating and metal film baseBetween the bases, strong spatial local modes can be excited around the graphene. The number of the local fields in the diagram of the electric field mode under the single period is 2 m-22, m-11 represents the order of the excited new mode, and the length of the single local field represents the half lambda of the wavelength of the plasmonspp/2. So that the plasmon wavelength λsppP/m equals to about 150 nm. Meaning that the spatial longitudinal mode is compressed into a 60nm cavity, the mode effective index achieves lambda0/λsppAnd ≈ 47. The distance between the metal film grating and the metal film substrate or the thickness of the optical medium layer is reduced, the mode effective refractive index can be effectively improved, for example, the optical medium material is selected to be a two-dimensional material such as BN, a plasmon optical field space mode can be localized to the thickness scale of an atomic layer, and the localization capability and the wavelength compression ratio of the plasmon optical field space mode are larger.
Fig. 6 is a schematic diagram of electric field component mode distribution characteristics of a graphene plasmon cavity-perfect absorption coupling nano-resonator device in embodiment 1, and electric field components of a hybrid plasmon mode generated by coupling between a magnetic resonance mode and a cavity mode formed by metal-medium-graphene have distribution of symmetry and asymmetry.
FIG. 7 is a schematic diagram of tunable Fermi level frequency shift and regulation capability characteristics of a spectral line of a graphene plasmon cavity-perfect absorption coupling nano-resonator device in embodiment 2, wherein changing the Fermi level of graphene actually changes the mode effective refractive index, and the mode effective refractive index is changed according to neffp＝mλ0When m is 0, 1, 2 …, the position of the graphene cavity plasmon mode or the excitation wavelength λ can be obtained0Movement may also occur. As shown in the figure, the Fermi level of the graphene is shown to be EFAbsorption lines for nanodevices at 0eV, 0.54eV, and 0.64 eV. The Fermi level of the graphene is improved, the position of the same level is determined through an electric field mode distribution diagram, and the situation that the Fermi level of the graphene is reduced by 0.1eV is found, so that the same level can move towards the long wave direction. On the other hand, the device has strong regulation capability, for example, in the vicinity of the wavelength λ of 9.1 μm, the absorption rate is 0.19 when the graphene fermi level is 0, and the absorption rate is 0.32 when the graphene fermi level is 0.64eV, and the regulation intensity is about 70%. This only exemplifiesIn one example, in the vicinity of a stronger magnetic resonance intensity, for example, as shown in fig. 3 after optimization in embodiment 1, when the fermi level of graphene with a fermi level of 0.64eV is compared with that of graphene with a fermi level of 0eV, the position absorption rate modulation specific energy of the graphene cavity resonance peak reaches 300% or more.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (10)
1. The utility model provides a graphite alkene plasmon cavity-perfect absorber coupling nanometer resonance device which characterized in that: the nano-resonance device is composed of a metal film grating, a wrapped optical medium layer, a tiled single-layer or multi-layer graphene and a metal film substrate which are uniformly distributed from top to bottom; the optical medium layer is wrapped on two sides of the single-layer or multi-layer graphene, the graphene is flatly laid on the lower-layer optical medium, the uniformly distributed metal film grating and the optical medium layer form direct physical contact, and the metal film substrate is used as a reflector and forms direct physical contact with the optical medium layer; the refractive index range of an optical medium layer between the metal film grating and the metal film substrate is 1-6; the thickness range of the two optical medium layers between the metal film grating and the metal film substrate is 0.3 nm-500 nm.
2. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the optical medium layer material between the metal film grating and the metal film substrate is a BN two-dimensional material.
3. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the working waveband range of the external environment of the nano resonance device is 5-20 mu m.
4. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the metal film grating and the metal film substrate are made of metal materials.
5. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the metal film grating is formed by parallelly arranging metal nanowires with the same thickness, width and length, and is a one-dimensional grating or a two-dimensional grating; the length range of the metal nanowire is more than 50nm, the width range is 50 nm-10000 nm, and the thickness range is 10 nm-300 nm; the slit distance between the two metal nanowires of the metal film grating ranges from 3nm to 1000 nm.
6. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the structural size of the metal film grating is smaller than the wavelength of light wave in a working waveband; the period range of the metal film grating is 200-10000 nm.
7. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the Fermi level range of the tiled single-layer graphene is 0-1.2 eV.
8. The graphene plasmon cavity-perfect absorber coupled nano-resonator device of claim 1, wherein: the thickness of the metal film substrate is more than 20 nm.
9. The graphene plasmon cavity-perfect absorber coupled nanoresonator device of any of claims 1-7, wherein: the period of the metal film grating is 1710nm, the one-dimensional grating with the metal nanowire length of 2000 nm-100 um and the metal nanoThe width of the rice noodles is 1690nm, the distance between two metal nano-wires is 20nm, and the thickness of the metal nano-wires is 30 nm; the refractive index of the optical medium layer between the metal film grating and the metal film substrate and wrapping the two sides of the graphene is set to be 1.4, and the upper layer CaF2Material and underlying CaF2The thickness of the material is the same, the thickness of the material is 30nm, the thickness of the metal film substrate is 30nm, and the Fermi level of the single-layer graphene is set to be 0.64 eV.
10. The graphene plasmon cavity-perfect absorber coupled nanoresonator device of any of claims 1-7, wherein: the period of the metal film grating is 1710nm, a one-dimensional grating with the length of a metal nanowire of 2000 nm-100 um is adopted, the width of the metal nanowire is 1680nm, the distance between two metal nanowires is 30nm, and the thickness of the metal nanowire is 30 nm; the optical medium layers between the metal film grating and the metal film substrate and wrapping the two sides of the graphene are CaF2Refractive index of 1.4, upper CaF2Material and underlying CaF2The thickness of the material is the same, the thickness of the material is 15nm, the thickness of the metal film substrate is 30nm, and the Fermi level of the single-layer graphene is set to be 0.34-0.64 eV.
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