CN111121616A - Wavelength tuning phase shift interference testing device and testing method - Google Patents
Wavelength tuning phase shift interference testing device and testing method Download PDFInfo
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- CN111121616A CN111121616A CN202010052207.9A CN202010052207A CN111121616A CN 111121616 A CN111121616 A CN 111121616A CN 202010052207 A CN202010052207 A CN 202010052207A CN 111121616 A CN111121616 A CN 111121616A
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- 230000010363 phase shift Effects 0.000 title claims abstract description 22
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000004364 calculation method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 238000005305 interferometry Methods 0.000 claims 2
- 238000012937 correction Methods 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000002474 experimental method Methods 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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Abstract
The invention discloses a wavelength tuning phase shift interference testing device and a testing method. The invention overcomes the problems of complex installation, complex structure and the like of the conventional interferometer mechanical phase shifter, can calculate the length value of the interference cavity by adopting a self-correction phase test principle, and corrects the phase shift error, thereby realizing the high-precision and high-efficiency detection of the integral interferometer system. Experiments show that the phase correction error value of the system device is +/-pi/50, and the repeatability precision of the system is lambda/1000-lambda/2000.
Description
Technical Field
The invention relates to optical element and system testing, in particular to a wavelength tuning phase-shifting interference testing device and a testing method.
Background
With the increasing requirements on the surface finish of optical elements, materials and other various parts, the application range of the phase-shift interference test technology is expanded, but in the test process, a plurality of unavoidable factors can cause the generation of phase-shift errors, including the influence factors such as the vibration of the surrounding test environment, the precision of a reference mirror, nonlinear orthogonal coupling, the distortion of an imaging system and the like, so that the quality of interference images is reduced, and accurate phase-shift interference image results cannot be obtained.
At present, the research on the phase-shift interference test technology at home and abroad mainly comprises three types of sensor detection phase shift, space synchronous phase shift and algorithm processing, wherein the algorithm processing is widely applied, and the wave surface phase solving by utilizing minimum iteration double multiplication occupies a main position in the phase-shift interference test technology research. The parameters influencing the phase shift calculation include the cavity length of the interference cavity and the wavelength variation, and the determination of the high-precision cavity length value of the interference cavity has been the focus of attention of experts and scholars in the optical testing field for a long time. In view of the above problems, a wavelength tuning phase shift interference test device and a test method are provided, which adopt a wavelength tuning phase shift mode to replace the traditional mechanical phase shift mode, automatically calculate the cavity length value of the interference cavity, reduce the complex assembly difficulty of the interference test system to a certain extent, and meet the market application requirements.
Disclosure of Invention
The invention aims to realize high-precision and high-efficiency detection of an interferometer system, and provides a wavelength tuning phase-shifting interference testing device and a testing method.
In order to achieve the purpose, the invention adopts the following technical scheme:
a wavelength tuning phase shift interference test device is characterized by comprising a wavelength tuning laser, an interference test system and an interference pattern acquisition system, wherein the wavelength change of the wavelength tuning laser is changed by the change of current caused by the change of wavelength driving voltage, and the interference test system comprises: the interference pattern acquisition system sequentially comprises a concave lens, a convex lens and a CCD (charge coupled device).
The wavelength tuning range of the wavelength tuning laser is 0.5nm, the wavelength resolution is 0.2pm, and the output wavelength is a random value;
the standard mirror is a standard plane wedge mirror, the wedge angle of the wedge angle surface is 30', the front surface in the advancing direction of the light path is a wedge angle surface, the wedge angle is 30', and the rear surface is a standard reference surface;
the method for measuring the element to be measured by using the wavelength tuning phase-shifting interference testing device comprises the following steps:
1) placing the element to be tested on the standard mirror, starting the wavelength tuning laser, adjusting the optical path, so that the laser output by the wavelength tuning laser sequentially passes through the 45-degree reflector, the focusing lens, the beam splitter prism, the collimating objective lens and the standard mirror and then enters the element to be tested, the standard light beam and the test light beam formed by the reflection of the light beam by the element to be tested reflected and output by the rear surface of the standard mirror return to the interference test fringe formed by the beam splitter prism along the original optical path, and the interference test fringe passes through the beam splitter prism and sequentially passes through the concave lens and the convex lens to be imaged at the central position of the CCD;
2) let i equal to 1;
3) the voltage input into the wavelength tuning laser is changed for the ith time by using a wavelength change driver to adjust the laser wavelength output by the wavelength tuning laser to be lambdaiThe laser output by the wavelength tuning laser sequentially passes through the 45-degree reflector, the focusing lens, the beam splitter prism, the collimating objective lens and the standard mirror and then enters the element to be tested, the standard light beam output by the reflection of the rear surface of the standard mirror and the test light beam formed by the reflection of the element to be tested return along the original light path, and the interference test fringe formed by the beam splitter prism is used as the interference test fringeThe interference test fringe penetrates through the light splitting prism and sequentially passes through the concave lens and the convex lens to be imaged at the center of the CCD; the CCD collects interference signals including wavelength value lambda for the ith timeiSum phase value
And inputting the wavelength variation △ lambda and the phase variation into the computer for calculation
The cavity length of the interference cavity of the interference testing device is determined by the following formula 1-1:
wherein λ is0Is the center wavelength of the wavelength tuning laser, △ λ ≠ 0;
4) when the phase value obtained by testing is in the range of pi i/4 +/-pi/50, making i equal to i +1, and returning to the step 3); when the wavelength lambda of the output light is presentiHold and last output light wavelength lambdai-1If the two are consistent, or if i is 13, then the next step is carried out;
5) after the computer calculates, the computer outputs the surface PV of the element to be measured, the repeatability precision of the system, the wavelength variation △ lambda and the phase variation
And (6) data results.
The length of the interference cavity is determined by the phase change value and the wavelength change value;
the phase correction error value is +/-pi/50;
the system repeatability precision of the interference testing device is lambda/1000-lambda/2000.
The invention uses the wavelength tuning phase shift mode to replace the mechanical phase shift mode, overcomes the problems of complicated installation, complex structure and the like of the conventional interferometer mechanical phase shifter, can calculate the length value of the interference cavity by adopting the self-correction phase test principle, and corrects the phase shift error, thereby realizing the high-precision and high-efficiency detection of the integral interferometer system. Experiments show that the phase correction error value of the system device is +/-pi/50, and the repeatability precision of the system is lambda/1000-lambda/2000.
Drawings
FIG. 1 is a schematic diagram of the optical path test of the wavelength tuning phase-shifting interference test device of the present invention
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings, but the scope of the present invention should not be limited thereto.
Referring to fig. 1, fig. 1 is a light path diagram of a wavelength tuning phase-shifting interference testing device of the present invention, in which a computer is not shown, and it can be seen from the figure that the wavelength tuning phase-shifting interference testing device of the present invention is composed of a wavelength tuning laser 1, an interference testing system 2 and an interference pattern collecting system 3, the wavelength variation of the wavelength tuning laser 1 is changed by the current variation caused by the wavelength variation driving voltage, and the interference testing system 2 is composed of: the interference pattern acquisition system 3 sequentially comprises a concave lens 301, a convex lens 302 and a CCD303, and the concave lens 301 and the convex lens 302 form a primary imaging component.
The wavelength tuning range of the wavelength tuning laser is 0.5nm, the wavelength resolution is 0.2pm, and the output wavelength is a random value;
the standard mirror 205 is a standard plane wedge mirror, the front surface in the advancing direction of the optical path is a wedge angle surface, the wedge angle is 30', the rear surface is a standard reference surface, and the precision of the PV surface shape is better than lambda/10.
The method for measuring the element to be measured by using the wavelength tuning phase-shifting interference testing device comprises the following steps:
1) placing the element to be tested 206 behind the standard mirror 205, starting the wavelength tuning laser 1, adjusting the optical path, so that the laser output by the wavelength tuning laser 1 sequentially passes through the 45 ° reflector 201, the focusing lens 202, the beam splitter prism 203, the collimating objective lens 204 and the standard mirror 205 and then enters the element to be tested 206, the standard light beam output by reflection of the rear surface of the standard mirror 205 and the test light beam formed by reflection of the element to be tested 206 return to the interference test fringe formed by the beam splitter prism 203 along the original optical path, and the interference test fringe passes through the beam splitter prism 203 and sequentially passes through the concave lens 301 and the convex lens 302 to be imaged at the central position of the CCD 303;
2) let i equal to 1;
3) the voltage input into the wavelength tuning laser 1 is changed for the ith time by using a wavelength change driver 6 to adjust the laser wavelength output by the wavelength tuning laser 1 to be lambdaiThe laser output by the wavelength tuning laser 1 sequentially passes through the 45 ° reflecting mirror 201, the focusing lens 202, the beam splitter prism 203, the collimating objective lens 204, and the standard mirror 205, enters the device to be tested 206, the standard beam reflected and output by the rear surface of the standard mirror 205 and the test beam reflected and formed by the device to be tested 206 return along the original optical path, and the interference test fringe formed on the beam splitter prism 203 passes through the beam splitter prism 203, sequentially passes through the concave lens 301 and the convex lens 302, and is imaged at the center of the CCD 303; the CCD303 collects interference signals including the wavelength value lambda for the ith timeiSum phase value
And inputting the wavelength variation △ lambda and the phase variation into the computer for calculation
The cavity length of the interference cavity of the interference testing device is determined by the following formula 1-1:
wherein λ is0Is the center wavelength of the wavelength tunable laser 1, △ λ ≠ 0;
4) when testedIf the phase value is within pi i/4 +/-pi/50, making i equal to i +1, and returning to the step 3); when the wavelength lambda of the output light is presentiHold and last output light wavelength lambdai-1If the two are consistent, or if i is 13, then the next step is carried out;
5) the computer calculates and outputs the surface PV, the system repeatability precision, the wavelength variation △ lambda and the phase variation of the element 206 to be measured
Data results (see Zhi-Liang ZHao, Min Liu, Li-HuaChen, et al. research on adaptive interactive measurement of collaborative information proceedings of SPIE,2019,10839(12): p3-p 9.).
The wavelength tuning phase-shifting interference testing device is suitable for testing various optical elements and systems with different calibers, the caliber testing range is phi 100 mm-phi 800mm, and the device has the advantages of high detection rate, high testing precision, high stability and reliability of the system height and the like.
Claims (4)
1. A wavelength tuning phase shift interference test device is characterized by comprising a wavelength tuning laser (1), an interference test system (2) and an interference pattern acquisition system (3), wherein the wavelength change of the wavelength tuning laser (1) is changed by the change of current caused by the wavelength change of a driving voltage, and the interference test system (2) is formed by: the interference pattern acquisition system (3) sequentially comprises a concave lens (301), a convex lens (302) and a CCD (303), and an interference test cavity is formed between the front surface of the element to be tested (205) and the reference surface of the standard mirror (204).
2. The wavelength-tuned phase-shift interferometry testing device according to claim 1, wherein said wavelength-tuned laser (1) has a wavelength tuning range of 0.5nm, a wavelength resolution of 0.2pm, and an output wavelength of random value.
3. The apparatus according to claim 1, wherein the standard mirror (205) is a standard plane wedge mirror, the front surface in the forward direction of the optical path is a wedge angle surface, the wedge angle is 30', and the back surface is a standard reference surface.
4. A method for measuring a device under test using the wavelength tuned phase shift interferometry test apparatus of claim 1, comprising the steps of:
1) placing an element to be tested (206) behind the standard mirror (205), starting the wavelength tuning laser (1), adjusting an optical path, enabling laser output by the wavelength tuning laser (1) to enter the element to be tested (206) after sequentially passing through the 45-degree reflector (201), the focusing lens (202), the beam splitter prism (203), the collimating objective lens (204) and the standard mirror (205), enabling a standard light beam output by reflection of the rear surface of the standard mirror (205) and a test light beam formed by reflection of the light beam by the element to be tested (206) to return to an interference test fringe formed by the beam splitter prism (203) along an original optical path, and enabling the interference test fringe to penetrate through the beam splitter prism (203) and sequentially pass through the concave lens (301) and the convex lens (302) to be imaged at the central position of the CCD (303);
2) let i equal to 1;
3) the voltage input into the wavelength tuning laser (1) is changed for the ith time by using a wavelength change driver, and the laser wavelength output by the wavelength tuning laser (1) is adjusted to be lambdaiThe laser output by the wavelength tuning laser (1) sequentially passes through the 45-degree reflector (201), the focusing lens (202), the beam splitter prism (203), the collimating objective (204) and the standard mirror (205) and then enters the element to be tested (206), the standard light beam and the light beam output by reflecting the rear surface of the standard mirror (205) return along the original light path through the test light beam formed by reflecting the element to be tested (206), and the interference test fringe formed by the beam splitter prism (203) penetrates through the beam splitter prism (203) and sequentially passes through the concave lens (301) and the convex lens (302) and then is imaged on the concave lens (301) and the convex lens (302)A center of the CCD (303); the CCD (303) collects interference signals including a wavelength value lambda for the ith timeiSum phase value
And inputting the wavelength variation △ lambda and the phase variation into the computer for calculation
The cavity length of the interference cavity of the interference testing device is determined by the following formula 1-1:
wherein λ is0Is the central wavelength of the wavelength tuning laser (1), △ lambda is not equal to 0;
4) when the phase value obtained by testing is in the range of pi i/4 +/-pi/50, making i equal to i +1, and returning to the step 3); when the wavelength lambda of the output light is presentiHold and last output light wavelength lambdai-1If the two are consistent, or if i is 13, then the next step is carried out;
5) the computer calculates and outputs the surface shape PV, the system repeatability precision, the wavelength variation △ lambda and the phase variation of the element (206) to be measured
And (6) data results.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108168470A (en) * | 2018-03-21 | 2018-06-15 | 中国工程物理研究院激光聚变研究中心 | A kind of measuring device and method of the frequency-doubling crystal characteristic angle based on divergent beams |
| CN111664800A (en) * | 2020-05-19 | 2020-09-15 | 上海大学 | Parallel flat plate multi-surface detection method and clamp based on optimal iteration of target information |
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| CN104713494A (en) * | 2013-12-16 | 2015-06-17 | 南京理工大学 | Testing device and method for dual-wavelength tuning interference marked by Fourier transforming phase shifting |
| CN109253707A (en) * | 2018-10-19 | 2019-01-22 | 成都太科光电技术有限责任公司 | Hundred microns of range transmission-type interference testing devices |
| CN211373498U (en) * | 2020-01-17 | 2020-08-28 | 成都太科光电技术有限责任公司 | Wavelength tuning phase shift interference testing device |
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Patent Citations (5)
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| CN200950056Y (en) * | 2006-04-25 | 2007-09-19 | 成都太科光电技术有限责任公司 | Phase displacement interferometer for detecting surface form through wavelength variation |
| CN104655290A (en) * | 2013-11-20 | 2015-05-27 | 南京理工大学 | Fizeau dual-wavelength laser tuning phase-shifting interference testing device and testing method thereof |
| CN104713494A (en) * | 2013-12-16 | 2015-06-17 | 南京理工大学 | Testing device and method for dual-wavelength tuning interference marked by Fourier transforming phase shifting |
| CN109253707A (en) * | 2018-10-19 | 2019-01-22 | 成都太科光电技术有限责任公司 | Hundred microns of range transmission-type interference testing devices |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108168470A (en) * | 2018-03-21 | 2018-06-15 | 中国工程物理研究院激光聚变研究中心 | A kind of measuring device and method of the frequency-doubling crystal characteristic angle based on divergent beams |
| CN111664800A (en) * | 2020-05-19 | 2020-09-15 | 上海大学 | Parallel flat plate multi-surface detection method and clamp based on optimal iteration of target information |
| CN111664800B (en) * | 2020-05-19 | 2022-01-07 | 上海大学 | Parallel flat plate multi-surface detection method and clamp |
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