CN111121616A - Wavelength tuning phase shift interference test device and test method - Google Patents

Wavelength tuning phase shift interference test device and test method Download PDF

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CN111121616A
CN111121616A CN202010052207.9A CN202010052207A CN111121616A CN 111121616 A CN111121616 A CN 111121616A CN 202010052207 A CN202010052207 A CN 202010052207A CN 111121616 A CN111121616 A CN 111121616A
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wavelength
laser
interference
phase
standard
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赵智亮
陈立华
刘敏
张志华
龚小康
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Chengdu Techo Photoelectricity Co ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration

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Abstract

本发明公开了一种波长调谐相移干涉测试装置及测试方法，包括波长调谐激光器、干涉测试系统、干涉图样采集系统三部分。本发明克服了常规干涉仪机械相移器安装繁琐、结构复杂等问题，通过采用自修正相位测试原理，可计算得到干涉腔腔长值，并修正相移误差，从而实现整体干涉仪系统的高精度、高效率检测。实验表明，本发明系统装置相位修正误差值为±π/50，系统重复性精度为λ/1000～λ/2000。

Figure 202010052207

The invention discloses a wavelength tuning phase shift interference testing device and a testing method, comprising three parts: a wavelength tuning laser, an interference testing system and an interference pattern acquisition system. The invention overcomes the problems of complicated installation and complex structure of the conventional interferometer mechanical phase shifter. By adopting the principle of self-correction phase test, the length of the interferometric cavity can be calculated and the phase shift error can be corrected, thereby realizing the high performance of the overall interferometer system. Accurate and efficient detection. Experiments show that the phase correction error value of the system device of the present invention is ±π/50, and the system repeatability accuracy is λ/1000～λ/2000.

Figure 202010052207

Description

Wavelength tuning phase shift interference testing device and testing method
Technical Field
The invention relates to optical element and system testing, in particular to a wavelength tuning phase-shifting interference testing device and a testing method.
Background
With the increasing requirements on the surface finish of optical elements, materials and other various parts, the application range of the phase-shift interference test technology is expanded, but in the test process, a plurality of unavoidable factors can cause the generation of phase-shift errors, including the influence factors such as the vibration of the surrounding test environment, the precision of a reference mirror, nonlinear orthogonal coupling, the distortion of an imaging system and the like, so that the quality of interference images is reduced, and accurate phase-shift interference image results cannot be obtained.
At present, the research on the phase-shift interference test technology at home and abroad mainly comprises three types of sensor detection phase shift, space synchronous phase shift and algorithm processing, wherein the algorithm processing is widely applied, and the wave surface phase solving by utilizing minimum iteration double multiplication occupies a main position in the phase-shift interference test technology research. The parameters influencing the phase shift calculation include the cavity length of the interference cavity and the wavelength variation, and the determination of the high-precision cavity length value of the interference cavity has been the focus of attention of experts and scholars in the optical testing field for a long time. In view of the above problems, a wavelength tuning phase shift interference test device and a test method are provided, which adopt a wavelength tuning phase shift mode to replace the traditional mechanical phase shift mode, automatically calculate the cavity length value of the interference cavity, reduce the complex assembly difficulty of the interference test system to a certain extent, and meet the market application requirements.
Disclosure of Invention
The invention aims to realize high-precision and high-efficiency detection of an interferometer system, and provides a wavelength tuning phase-shifting interference testing device and a testing method.
In order to achieve the purpose, the invention adopts the following technical scheme:
a wavelength tuning phase shift interference test device is characterized by comprising a wavelength tuning laser, an interference test system and an interference pattern acquisition system, wherein the wavelength change of the wavelength tuning laser is changed by the change of current caused by the change of wavelength driving voltage, and the interference test system comprises: the interference pattern acquisition system sequentially comprises a concave lens, a convex lens and a CCD (charge coupled device).
The wavelength tuning range of the wavelength tuning laser is 0.5nm, the wavelength resolution is 0.2pm, and the output wavelength is a random value;
the standard mirror is a standard plane wedge mirror, the wedge angle of the wedge angle surface is 30', the front surface in the advancing direction of the light path is a wedge angle surface, the wedge angle is 30', and the rear surface is a standard reference surface;
the method for measuring the element to be measured by using the wavelength tuning phase-shifting interference testing device comprises the following steps:
1) placing the element to be tested on the standard mirror, starting the wavelength tuning laser, adjusting the optical path, so that the laser output by the wavelength tuning laser sequentially passes through the 45-degree reflector, the focusing lens, the beam splitter prism, the collimating objective lens and the standard mirror and then enters the element to be tested, the standard light beam and the test light beam formed by the reflection of the light beam by the element to be tested reflected and output by the rear surface of the standard mirror return to the interference test fringe formed by the beam splitter prism along the original optical path, and the interference test fringe passes through the beam splitter prism and sequentially passes through the concave lens and the convex lens to be imaged at the central position of the CCD;
2) let i equal to 1;
3) the voltage input into the wavelength tuning laser is changed for the ith time by using a wavelength change driver to adjust the laser wavelength output by the wavelength tuning laser to be lambdaiThe laser output by the wavelength tuning laser sequentially passes through the 45-degree reflector, the focusing lens, the beam splitter prism, the collimating objective lens and the standard mirror and then enters the element to be tested, the standard light beam output by the reflection of the rear surface of the standard mirror and the test light beam formed by the reflection of the element to be tested return along the original light path, and the interference test fringe formed by the beam splitter prism is used as the interference test fringeThe interference test fringe penetrates through the light splitting prism and sequentially passes through the concave lens and the convex lens to be imaged at the center of the CCD; the CCD collects interference signals including wavelength value lambda for the ith timeiSum phase value
Figure BDA0002371574900000022
And inputting the wavelength variation △ lambda and the phase variation into the computer for calculation
Figure BDA0002371574900000023
The cavity length of the interference cavity of the interference testing device is determined by the following formula 1-1:
Figure BDA0002371574900000021
wherein λ is0Is the center wavelength of the wavelength tuning laser, △ λ ≠ 0;
4) when the phase value obtained by testing is in the range of pi i/4 +/-pi/50, making i equal to i +1, and returning to the step 3); when the wavelength lambda of the output light is presentiHold and last output light wavelength lambdai-1If the two are consistent, or if i is 13, then the next step is carried out;
5) after the computer calculates, the computer outputs the surface PV of the element to be measured, the repeatability precision of the system, the wavelength variation △ lambda and the phase variation
Figure BDA0002371574900000031
And (6) data results.
The length of the interference cavity is determined by the phase change value and the wavelength change value;
the phase correction error value is +/-pi/50;
the system repeatability precision of the interference testing device is lambda/1000-lambda/2000.
The invention uses the wavelength tuning phase shift mode to replace the mechanical phase shift mode, overcomes the problems of complicated installation, complex structure and the like of the conventional interferometer mechanical phase shifter, can calculate the length value of the interference cavity by adopting the self-correction phase test principle, and corrects the phase shift error, thereby realizing the high-precision and high-efficiency detection of the integral interferometer system. Experiments show that the phase correction error value of the system device is +/-pi/50, and the repeatability precision of the system is lambda/1000-lambda/2000.
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FIG. 1 is a schematic diagram of the optical path test of the wavelength tuning phase-shifting interference test device of the present invention
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings, but the scope of the present invention should not be limited thereto.
Referring to fig. 1, fig. 1 is a light path diagram of a wavelength tuning phase-shifting interference testing device of the present invention, in which a computer is not shown, and it can be seen from the figure that the wavelength tuning phase-shifting interference testing device of the present invention is composed of a wavelength tuning laser 1, an interference testing system 2 and an interference pattern collecting system 3, the wavelength variation of the wavelength tuning laser 1 is changed by the current variation caused by the wavelength variation driving voltage, and the interference testing system 2 is composed of: the interference pattern acquisition system 3 sequentially comprises a concave lens 301, a convex lens 302 and a CCD303, and the concave lens 301 and the convex lens 302 form a primary imaging component.
The wavelength tuning range of the wavelength tuning laser is 0.5nm, the wavelength resolution is 0.2pm, and the output wavelength is a random value;
the standard mirror 205 is a standard plane wedge mirror, the front surface in the advancing direction of the optical path is a wedge angle surface, the wedge angle is 30', the rear surface is a standard reference surface, and the precision of the PV surface shape is better than lambda/10.
The method for measuring the element to be measured by using the wavelength tuning phase-shifting interference testing device comprises the following steps:
1) placing the element to be tested 206 behind the standard mirror 205, starting the wavelength tuning laser 1, adjusting the optical path, so that the laser output by the wavelength tuning laser 1 sequentially passes through the 45 ° reflector 201, the focusing lens 202, the beam splitter prism 203, the collimating objective lens 204 and the standard mirror 205 and then enters the element to be tested 206, the standard light beam output by reflection of the rear surface of the standard mirror 205 and the test light beam formed by reflection of the element to be tested 206 return to the interference test fringe formed by the beam splitter prism 203 along the original optical path, and the interference test fringe passes through the beam splitter prism 203 and sequentially passes through the concave lens 301 and the convex lens 302 to be imaged at the central position of the CCD 303;
2) let i equal to 1;
3) the voltage input into the wavelength tuning laser 1 is changed for the ith time by using a wavelength change driver 6 to adjust the laser wavelength output by the wavelength tuning laser 1 to be lambdaiThe laser output by the wavelength tuning laser 1 sequentially passes through the 45 ° reflecting mirror 201, the focusing lens 202, the beam splitter prism 203, the collimating objective lens 204, and the standard mirror 205, enters the device to be tested 206, the standard beam reflected and output by the rear surface of the standard mirror 205 and the test beam reflected and formed by the device to be tested 206 return along the original optical path, and the interference test fringe formed on the beam splitter prism 203 passes through the beam splitter prism 203, sequentially passes through the concave lens 301 and the convex lens 302, and is imaged at the center of the CCD 303; the CCD303 collects interference signals including the wavelength value lambda for the ith timeiSum phase value
Figure BDA0002371574900000041
And inputting the wavelength variation △ lambda and the phase variation into the computer for calculation
Figure BDA0002371574900000042
The cavity length of the interference cavity of the interference testing device is determined by the following formula 1-1:
Figure BDA0002371574900000043
wherein λ is0Is the center wavelength of the wavelength tunable laser 1, △ λ ≠ 0;
4) when testedIf the phase value is within pi i/4 +/-pi/50, making i equal to i +1, and returning to the step 3); when the wavelength lambda of the output light is presentiHold and last output light wavelength lambdai-1If the two are consistent, or if i is 13, then the next step is carried out;
5) the computer calculates and outputs the surface PV, the system repeatability precision, the wavelength variation △ lambda and the phase variation of the element 206 to be measured
Figure BDA0002371574900000044
Data results (see Zhi-Liang ZHao, Min Liu, Li-HuaChen, et al. research on adaptive interactive measurement of collaborative information proceedings of SPIE,2019,10839(12): p3-p 9.).
The wavelength tuning phase-shifting interference testing device is suitable for testing various optical elements and systems with different calibers, the caliber testing range is phi 100 mm-phi 800mm, and the device has the advantages of high detection rate, high testing precision, high stability and reliability of the system height and the like.

Claims (4)

1.一种波长调谐相移干涉测试装置，其特征在于由波长调谐激光器(1)、干涉测试系统(2)和干涉图样采集系统(3)三部分构成，所述的波长调谐激光器(1)的波长变化由波长变化驱动电压引起电流改变而改变，所述的干涉测试系统(2)的构成是：沿所述的波长调谐激光器(1)的输出光方向依次包括45°反射镜(201)、聚焦透镜(202)、分光棱镜(203)、准直物镜(204)、标准镜(205)和待测元件(206)，所述的干涉图样采集系统(3)依次包括凹透镜(301)、凸透镜(302)和CCD(303)，所述的待测元件(205)的前表面与标准镜(204)的参考面之间形成干涉测试腔。1. a wavelength-tuning phase-shift interference test device, characterized in that it is composed of three parts: a wavelength-tuning laser (1), an interference test system (2) and an interference pattern acquisition system (3), and the wavelength-tuning laser (1) The wavelength change is changed by the current change caused by the wavelength change driving voltage, and the interference test system (2) is composed of: a 45° mirror (201) is sequentially included along the output light direction of the wavelength-tuning laser (1) , a focusing lens (202), a beam splitting prism (203), a collimating objective lens (204), a standard mirror (205) and a component to be measured (206), the interference pattern acquisition system (3) sequentially comprises a concave lens (301), The convex lens (302) and the CCD (303) form an interference test cavity between the front surface of the component to be tested (205) and the reference surface of the standard mirror (204). 2.根据权利要求1所述的波长调谐相移干涉测试装置，其特征在于所述的波长调谐激光器(1)的波长调谐范围为0.5nm，波长分辨率为0.2pm，输出波长为随机值。2. The wavelength tuning phase shift interference test device according to claim 1, wherein the wavelength tuning range of the wavelength tuning laser (1) is 0.5nm, the wavelength resolution is 0.2pm, and the output wavelength is a random value. 3.根据权利要求1所述的波长调谐相移干涉测试装置，其特征在于所述的标准镜(205)为标准平面楔镜，在光路前进方向前表面为楔角面，楔角为30'，后表面为标准参考面。3. The wavelength tuning phase shift interference test device according to claim 1, wherein the standard mirror (205) is a standard plane wedge mirror, and the front surface in the light path advancing direction is a wedge angle surface, and the wedge angle is 30' , the rear surface is the standard reference surface. 4.利用权利要求1所述的波长调谐相移干涉测试装置对待测元件的测量方法，其特征在于该方法包括下列步骤：4. utilize the measuring method of the component to be tested of the wavelength tuning phase shift interference test device according to claim 1, it is characterized in that the method comprises the following steps: 1)将待测元件(206)置于所述的标准镜(205)之后，启动所述的波长调谐激光器(1)，对光路进行调整，使所述的波长调谐激光器(1)输出的激光依次经所述的45°反射镜(201)、聚焦透镜(202)、分光棱镜(203)、准直物镜(204)、标准镜(205)后进入所述的待测元件(206)，经所述的标准镜(205)的后表面反射输出的标准光束和光束经所述的待测元件(206)反射形成的测试光束沿原光路返回在所述的分光棱镜(203)形成的干涉测试条纹，该干涉测试条纹透过所述的分光棱镜(203)并依次经所述的凹透镜(301)、凸透镜(302)后成像在所述的CCD(303)的中心位置；1) After placing the element to be measured (206) on the standard mirror (205), start the wavelength-tuning laser (1), and adjust the optical path so that the laser output from the wavelength-tuning laser (1) After passing through the 45° reflective mirror (201), focusing lens (202), beam splitting prism (203), collimating objective lens (204), and standard mirror (205) in turn, it enters the component to be tested (206), and passes through the The standard beam reflected from the back surface of the standard mirror (205) and the test beam formed by the beam reflected by the element to be tested (206) are returned to the beam splitting prism (203) along the original optical path to form an interference test fringes, the interference test fringes are imaged at the center of the CCD (303) after passing through the beam splitting prism (203) and sequentially passing through the concave lens (301) and the convex lens (302); 2)令i＝1；2) Let i=1; 3)利用波长变化驱动器进行第i次改变输入所述的波长调谐激光器(1)的电压调整所述的波长调谐激光器(1)输出的激光波长为λi，所述的波长调谐激光器(1)输出的激光依次经所述的45°反射镜(201)、聚焦透镜(202)、分光棱镜(203)、准直物镜(204)、标准镜(205)后进入所述的待测元件(206)，经所述的标准镜(205)的后表面反射输出的标准光束和光束经所述的待测元件(206)反射形成的测试光束沿原光路返回，在所述的分光棱镜(203)形成的干涉测试条纹，该干涉测试条纹透过所述的分光棱镜(203)并依次经所述的凹透镜(301)、凸透镜(302)后成像在所述的CCD(303)的中心；所述的CCD(303)实施第i次采集干涉信号，包括波长数值λi和相位值
Figure FDA0002371574890000022
并输入所述的计算机，所述的计算机计算得到波长变化量△λ和相位变化量
Figure FDA0002371574890000023
通过下式1-1确定干涉测试装置的干涉腔的腔长：3) utilize wavelength change driver to carry out the i-th change to input the voltage of described wavelength tunable laser (1) to adjust the laser wavelength that described wavelength tune laser (1) output is λ i , described wavelength tune laser (1) The output laser passes through the 45° reflector (201), the focusing lens (202), the beam splitting prism (203), the collimating objective lens (204), and the standard mirror (205) in sequence and then enters the element to be tested (206). ), the standard beam reflected by the back surface of the standard mirror (205) and the test beam formed by the beam reflected by the element to be tested (206) return along the original optical path, and the beam splitting prism (203) Formed interference test fringes, the interference test fringes are imaged in the center of the CCD (303) after passing through the beam splitting prism (203) and sequentially passing through the concave lens (301) and the convex lens (302); The CCD (303) implements the i-th acquisition of the interference signal, including the wavelength value λ i and the phase value
Figure FDA0002371574890000022
And input into the computer, the computer calculates the wavelength change Δλ and the phase change
Figure FDA0002371574890000023
Determine the cavity length of the interference cavity of the interference test device by the following formula 1-1:
Figure FDA0002371574890000021
Figure FDA0002371574890000021
 其中，λ0是波长调谐激光器(1)的中心波长，△λ≠0；Among them, λ 0 is the center wavelength of the wavelength-tunable laser (1), Δλ≠0; 4)当测试得到的相位值位于πi/4±π/50范围之内，则令i＝i+1，返回步骤3)；当本次输出光的波长λi保持与上次输出光波长λi-1一致，或i＝13时，则进入下一步；4) When the phase value obtained by the test is within the range of πi/4±π/50, set i=i+1, and return to step 3); when the wavelength λ i of the output light this time remains the same as the wavelength λ of the last output light If i-1 is the same, or i=13, go to the next step; 5)所述的计算机计算并输出所述的待测元件(206)的面形PV、系统重复性精度、波长变化量△λ和相位变化量
Figure FDA0002371574890000024
数据结果。5) The computer calculates and outputs the surface PV, system repeatability accuracy, wavelength change Δλ and phase change of the element to be tested (206)
Figure FDA0002371574890000024
data results.
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CN104764593A (en) * 2015-04-20 2015-07-08 成都太科光电技术有限责任公司 Horizontal two-port planar Fizeau interference test device
CN109253707A (en) * 2018-10-19 2019-01-22 成都太科光电技术有限责任公司 Hundred microns of range transmission-type interference testing devices
CN110112652A (en) * 2019-05-16 2019-08-09 中国科学院半导体研究所 Extenal cavity tunable laser device and wavelength tuning method
CN211373498U (en) * 2020-01-17 2020-08-28 成都太科光电技术有限责任公司 Wavelength tuning phase shift interference testing device

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CN108168470A (en) * 2018-03-21 2018-06-15 中国工程物理研究院激光聚变研究中心 A kind of measuring device and method of the frequency-doubling crystal characteristic angle based on divergent beams
CN111664800A (en) * 2020-05-19 2020-09-15 上海大学 Parallel flat plate multi-surface detection method and clamp based on optimal iteration of target information
CN111664800B (en) * 2020-05-19 2022-01-07 上海大学 Parallel flat plate multi-surface detection method and clamp

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