CN111121609A - Full-automatic online double-sided metal foil or metal coating thickness measuring device - Google Patents
Full-automatic online double-sided metal foil or metal coating thickness measuring device Download PDFInfo
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- CN111121609A CN111121609A CN201811297742.XA CN201811297742A CN111121609A CN 111121609 A CN111121609 A CN 111121609A CN 201811297742 A CN201811297742 A CN 201811297742A CN 111121609 A CN111121609 A CN 111121609A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
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Abstract
The invention discloses a full-automatic online double-sided metal foil or metal coating thickness measuring device which comprises a base platform, wherein a conveying rail moving in a first direction is arranged above the base platform, and the conveying rail and the base platform are arranged at intervals. The upper portion and the lower portion of the conveying track are respectively provided with a first track and a second track which are parallel to the conveying track, probe assemblies are arranged on the first track and the second track, and the probe assemblies move on the first track and the second track along a second direction perpendicular to the first direction. The probe assembly comprises a cylinder and probes, the cylinder drives the probes to move in the vertical direction, and the upper probe and the lower probe are correspondingly arranged in the vertical direction. The thickness measuring device can realize the measurement of any position on the metal foil or the metal coating; meanwhile, the upper probe and the lower probe correspond to each other in the vertical direction and contact the same position of the metal foil or the metal coating during thickness measurement, so that good support is provided for each other, the metal foil or the metal coating is prevented from deforming, and the accuracy of a detection result is ensured.
Description
Technical Field
The invention relates to the field of thickness measurement of metal foils or metal coatings, in particular to a full-automatic online double-sided metal foil or metal coating thickness measuring device.
Background
In the related art, the thickness of the copper on the surface is generally measured by adopting a single-sided probe type structure, a double-sided platform type structure and a handheld type structure. The single-sided probe type structure and the double-sided platform type structure can only measure the fixed position of surface copper with fixed thickness, and the measurement result is difficult to meet the requirement. Meanwhile, the double-sided platform type structure is easy to scrape the surface of the pattern copper, which affects the quality of the finished product; the handheld thickness measuring structure has high randomness, is not beneficial to realizing a standardized flow, and is inconvenient to arrange data.
Disclosure of Invention
The full-automatic online double-sided metal foil or metal coating thickness measuring device provided by the embodiment of the invention comprises a base platform, a conveying rail moving in a first direction is arranged above the base platform, the conveying rail and the base platform are arranged at intervals,
a first track and a second track which are parallel to the conveying track are respectively arranged above and below the conveying track, probe assemblies are arranged on the first track and the second track, the probe assemblies move on the first track and the second track along a second direction which is vertical to the first direction,
the probe assembly comprises an air cylinder and probes, the air cylinder drives the probes to move in the vertical direction, and the upper probes and the lower probes are correspondingly arranged in the vertical direction.
In the thickness measuring device, the conveying track and the upper track and the lower track can respectively move in the X-axis direction and the Y-axis direction, so that the measurement of any position on the metal foil or the metal coating can be realized; meanwhile, the upper probe and the lower probe correspond to each other in the vertical direction and contact the same position of the metal foil or the metal coating during thickness measurement, so that good support is provided for each other, the metal foil or the metal coating is prevented from deforming, and the accuracy of a detection result is ensured.
In some embodiments, the air pressure of both the air cylinders above and below the transfer rail is the same and constant.
In some embodiments, the probe assembly further comprises a mounting base having a plurality of telescoping bores formed therein,
the probe comprises a plurality of probes which are correspondingly arranged in the telescopic hole,
the flexible pipe is characterized in that an elastic piece is sleeved on the probe, the elastic piece stretches into the telescopic hole, the length of the elastic piece is larger than the depth of the telescopic hole, and the probe is electrically connected with the MES system and sends the measurement data to an enterprise quality database through the MES system.
In certain embodiments, the transport track is comprised of a plurality of transport rollers that are driven by servo motors.
In some embodiments, at the inlet end of the metal foil or metal coating, a static elimination bar is arranged in parallel above the conveying track, and the length of the static elimination bar is larger than the width of the conveying track.
In some embodiments, a video detection structure is arranged at the inlet end of the metal foil or the metal coating and above the conveying track, and the video detection structure is used for photographing the metal foil or the metal coating.
In some embodiments, an upper lamp panel is disposed between the conveying track and the video detection structure, and a lower lamp panel is disposed between the conveying track and the base platform.
In some embodiments, the upper and lower lamp panels are mounted with a stainless steel frame.
In some embodiments, further comprising an outer metal shielding frame, the base, the first rail, the second rail, and the video detection structure are disposed inside the outer metal shielding frame.
In some embodiments, the external metallic shielding frame is provided with a plurality of grounding points, and the grounding lines are arranged in a topological structure.
Additional aspects and advantages of embodiments of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic perspective view of a full-automatic online double-sided metal foil or metal coating thickness measuring device according to an embodiment of the present invention;
FIG. 2 is a schematic partial perspective view of a full-automatic online double-sided metal foil or metal plating thickness measuring device according to an embodiment of the present invention;
FIG. 3 is another schematic partial perspective view of a full-automatic online double-sided metal foil or metal coating thickness measuring device according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of another partial perspective structure of the full-automatic online double-sided metal foil or metal coating thickness measuring device according to the embodiment of the invention;
FIG. 5 is a schematic perspective view of a probe assembly of a fully automatic online double-sided metal foil or metal coating thickness measuring device according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a four-probe method test used by a full-automatic online double-sided metal foil or metal plating thickness measuring device according to an embodiment of the invention;
FIG. 7 is a schematic diagram of the thickness measurement and slicing results of the current import tool;
FIG. 8 is a graph showing a comparison between the measured values and the slicing results of the present patent;
fig. 9 is a schematic working flow diagram of a full-automatic online double-sided metal foil or metal plating layer thickness measuring device according to an embodiment of the invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, unless otherwise expressly specified or limited, the first feature "on" or "under" the second feature may comprise the first and second features being in direct contact, or may comprise the first and second features being in contact, not directly, but via another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.
Referring to fig. 1 to 9, a full-automatic online thickness measuring device for double-sided metal foil or metal coating according to an embodiment of the present invention includes a base 1, a conveying rail 2 disposed above the base 1 and moving in a first direction, the conveying rail 2 and the base 1 being spaced apart from each other. The first track 12 and the second track 14 which are parallel to the conveying track 2 are respectively arranged above and below the conveying track 2, the probe 34 assembly is arranged on the first track 12 and the second track 14, and the probe 34 assembly moves on the first track 12 and the second track 14 along a second direction which is perpendicular to the first direction. The probe 34 assembly comprises an air cylinder 32 and a probe 34, wherein the air cylinder 32 drives the probe 34 to move in the vertical direction, and the upper probe 34 and the lower probe 34 are correspondingly arranged in the vertical direction.
In the thickness measuring device, the conveying track 2 and the upper track and the lower track can respectively move in the X-axis direction and the Y-axis direction, so that the measurement of any position on the metal foil or the metal coating can be realized; meanwhile, the upper probe 34 and the lower probe 34 correspond to each other in the vertical direction, and contact the same position of the metal foil or the metal coating during thickness measurement, so that good support is provided for each other, the metal foil or the metal coating is prevented from deforming, and the accuracy of a detection result is ensured.
Specifically, the full-automatic online double-sided metal foil or metal plating thickness measuring device in the embodiment measures the thickness of the metal foil or the metal plating by a micro-resistance method, and the specific principle is as follows:
the micro-resistance method is used for measuring the thickness of the copper foil, different body resistances can be generated based on different thicknesses of the same metal, and the thickness can be reversely deduced according to the change rule of the body resistances. The method has the advantages of nondestructive measurement, short measurement time, high measurement precision and good reproducibility. In the micro-resistance measuring circuit, a four-probe method is adopted in order to eliminate contact resistance. The typical four-probe method for measuring the bulk resistance is shown in the figure.
As shown in fig. 6, in the four-probe method, the conversion relationship between the resistance and the thickness needs to take the current distribution into consideration. Since the thickness of the copper foil of the PCB is generally less than 100um and the pitch of the probes is greater than 2mm, the difference in the distribution of the current in the thickness direction is negligible for such a sheet resistance. Therefore, only the distribution in the plane of the copper foil is generally considered in the measurement, and the distribution in the thickness of the copper foil is ignored. When the area of the copper foil to be detected is far larger than that of the area between the probes, the current distribution is elliptic; when the area of the copper foil to be detected is close to the area of the area between the probes, the current distribution is irregular oval, and an edge effect is generated. According to the derivation, when t < < s (t is the thickness of the measured copper layer and s is the probe spacing), the bulk resistance R and the metal resistivity ρ have the following correspondence:
r can be calculated from the following formula:
combining the above two formulas, we can get:
from the above formula, it can be known that the thickness t of the metal to be measured can be theoretically calculated by measuring the voltage V at a constant current as long as the resistivity ρ of the metal to be measured is known. However, the above formula has a precondition that the probe pitch is equal and is an ideal state, i.e. the probe pitch s has no manufacturing error; the resistance measurement is also free of other introduced errors, such as errors from non-linear amplification of the measurement circuit; and errors caused by different sample measurement areas are not introduced. In an actual measuring instrument and a measuring environment, the measuring error always exists, so that the simple application of an ideal theoretical formula can cause a large measuring error. In view of the above situation, although the thickness measurement is also performed based on the four-probe method in the current micro-resistance copper thickness measuring instrument, respective algorithm models are established in the thickness calculation method.
Although the final measurement accuracy also depends on the sampling and amplifying accuracy of a hardware circuit, if the final measurement accuracy is not matched with an actual resistance-thickness curve in the algorithm, the final measurement accuracy cannot be guaranteed.
FIG. 7 is a schematic diagram of the comparison between the thickness measurement and slicing results of the current imported equipment. In the figure, the solid line is the actual value of the thickness of the copper layer confirmed by slicing, and the dotted line is the measured value of the thickness obtained after measurement using the micro-resistance copper thickness measuring instrument. The dots in the figure are thickness values marked with a standard plate. For the D equipment, due to the adoption of single-point calibration, although the operation is simpler, when the thickness of the copper layer is larger or smaller than the calibrated thickness, a larger deviation exists between the actual thickness and the measured value; for the C device, with two-point scaling, the deviation between the measured value and the actual value is reduced, but at larger or smaller thicknesses, the deviation is still larger.
Fig. 8 illustrates an algorithm employed in the present embodiment, i.e., a three-point scaling method. After the method is adopted, although 3 standard plates are needed for calibration, the deviation between the measured value and the actual copper thickness can be greatly reduced in the full-scale.
Meanwhile, the full-automatic online double-sided metal foil or metal coating thickness measuring device in the embodiment is a CTI1000 type online coating thickness measuring instrument, a thickness measuring program of various metal materials is built in, the thickness measuring device can measure the thickness of surface copper and other metal products, and the thickness measuring device can be realized by only converting an algorithm.
In some embodiments, the air pressure of the two air cylinders 32 above and below the transfer rail 2 is the same and constant.
Like this, when two upper and lower cylinders 32 contact the same position on metal foil or the metallic coating, exert equal pressure to metal foil or metallic coating, support each other, avoid the too big metal foil or metallic coating that causes of unilateral applied pressure to take place to warp, influence the quality of metal foil or metallic coating.
Specifically, in the present embodiment, the operating pressure of the cylinder 32 is 0.2 to 1 Mpa.
In certain embodiments, the probe 34 assembly further includes a mount 36, with a plurality of telescoping bores formed in the mount 36. The probe 34 includes a plurality of probes, which are correspondingly disposed in the telescoping bore. The probe is sleeved with an elastic piece, the elastic piece stretches into the telescopic hole, the length of the elastic piece is larger than the depth of the telescopic hole, and the probe is electrically connected with the MES system and sends the measurement data to the enterprise quality database through the MES system.
Thus, when the probe 34 assembly moves up and down to drive the probe 34 to contact the surface of the metal foil or the metal coating, the probe compresses the elastic member and contracts into the telescopic hole, so that the probe 34 in the embodiment can test the metal foil or the metal coating with any thickness.
In some embodiments, the transfer track 2 is composed of a plurality of transfer rollers, which are driven by servo motors.
Specifically, the servo motor adopts an anti-EMI motor, so that the noise generated during working is small, and the interference on the thickness measurement result is further reduced.
In some embodiments, at the inlet end of the metal foil or metal coating, a static elimination bar 5 is arranged in parallel above the conveying track 2, the length of the static elimination bar 5 being greater than the width of the conveying track 2.
Therefore, after the metal foil or the metal coating is grabbed and placed on the conveying track 2 by the mechanical arm, the static eliminating rod 5 can eliminate 90% of static attached to the metal foil or the metal coating, and the influence of the static on a thickness measuring result is reduced.
In some embodiments, a video inspection structure 6 is disposed above the conveying track 2 at the inlet end of the metal foil or metal coating, and the video inspection structure 6 is used for taking a picture of the metal foil or metal coating.
In some embodiments, an upper lamp panel 7 is disposed between the conveyor track 2 and the video inspection structure 6, and a lower lamp panel 8 is disposed between the conveyor track 2 and the base platform 1.
Therefore, the upper lamp panel 8 and the lower lamp panel 8 irradiate the metal foil or the metal coating on the conveying track 2, and a clearer imaging condition is provided for the video detection structure 6 to take a picture.
In some embodiments, the upper light panel 7 and the lower light panel 8 are mounted with a stainless steel frame 4.
Therefore, the frame made of other materials of the lamp panel is prevented from being attached with static electricity, and the influence is brought to the accurate measurement of the metal foil or the metal coating.
In some embodiments, an outer metal shielding frame is further included, and the base 1, the first rail 12, the second rail 14, and the video detection structure 6 are disposed inside the outer metal shielding frame.
Therefore, the thickness measuring equipment is integrally positioned in the external metal shielding frame, and the influence of noise in the thickness measuring environment on the accuracy of the thickness measuring result is reduced.
In some embodiments, the external metallic shielding frame is provided with a plurality of grounding points, and the grounding lines are arranged in a topological structure.
Specifically, the grounding wire in this embodiment is connected to a uniform grounding point on the metal frame in a straight line, and then grounded. The grounding wire is prevented from winding or crossing on the metal frame, and bad noise is generated to thickness measurement.
In summary, the work flow of the full-automatic online double-sided metal foil or metal plating layer thickness measuring device in the embodiment of the invention is roughly as follows:
the front section is sent to the board: the manipulator grabs and places the metal foil or the metal coating on the conveying track 2, and the static eliminating rod 5 carries out static eliminating treatment on the metal foil or the metal coating; the metal foil or the metal coating is transported to a preset position by the conveying track 2, and the metal foil or the metal coating is regulated by the clamping plate to be aligned; the upper lamp plate 7 and the lower lamp plate 8 irradiate the metal foil or the metal coating, the video detection structure 6 shoots the metal foil or the metal coating, and a thickness measuring point is confirmed;
and (3) feeding the plate in the middle section: the conveying track 2 conveys the metal foil or the metal coating to a specified measuring position and stops; the position of the metal foil or the metal coating is adjusted on the conveying track 2 along the x axis, the upper probe 34 and the lower probe 34 move along the y axis to realize the thickness measurement at any position, the air cylinder 32 drives the probes 34 to lift, and after the probes 34 contact the metal foil or the metal coating, the probes compress the elastic parts and contract into the telescopic holes to measure the metal foil or the metal coating with any thickness; the data measured by the upper and lower probes 34 are sent to the control end for processing through MES;
and (5) plate folding at the rear section: the conveying track 2 carries the metal foil or the metal coating to continue to run, and the metal foil or the metal coating is conveyed to the next processing station.
In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A full-automatic online double-sided metal foil or metal coating thickness measuring device is characterized by comprising a base platform, a conveying rail moving in a first direction is arranged above the base platform, the conveying rail and the base platform are arranged at intervals,
a first track and a second track which are parallel to the conveying track are respectively arranged above and below the conveying track, probe assemblies are arranged on the first track and the second track, the probe assemblies move on the first track and the second track along a second direction which is vertical to the first direction,
the probe assembly comprises an air cylinder and probes, the air cylinder drives the probes to move in the vertical direction, and the upper probes and the lower probes are correspondingly arranged in the vertical direction.
2. The full-automatic online double-sided metal foil or metal coating thickness measuring device according to claim 1, wherein the air pressure of the two air cylinders above and below the conveying rail is the same and constant.
3. The fully automatic on-line double-sided metallic foil or metallic coating thickness measuring device of claim 1, wherein the probe assembly further comprises a mounting seat, a plurality of telescopic holes are formed in the mounting seat,
the probe comprises a plurality of probes which are correspondingly arranged in the telescopic hole,
the probe is sleeved with an elastic piece, the elastic piece extends into the telescopic hole, the length of the elastic piece is larger than the depth of the telescopic hole,
the probe is electrically connected with the MES system and sends the measured data to the enterprise quality database through the MES system.
4. The full-automatic on-line double-sided metal foil or metal coating thickness measuring device according to claim 1, wherein the conveying track is composed of a plurality of conveying rollers, and the conveying rollers are driven by a servo motor.
5. The full-automatic online double-sided metal foil or metal coating thickness measuring device according to claim 1, wherein an electrostatic elimination bar is arranged above the conveying track in parallel at the inlet end of the metal foil or metal coating, and the length of the electrostatic elimination bar is larger than the width of the conveying track.
6. The full-automatic online double-sided metal foil or metal coating thickness measuring device according to claim 1, wherein a video detection structure is arranged at the inlet end of the metal foil or metal coating above the conveying track, and the video detection structure is used for photographing the metal foil or metal coating.
7. The full-automatic online double-sided metal foil or metal coating thickness measuring device of claim 6, wherein an upper lamp panel is arranged between the conveying track and the video detection structure, and a lower lamp panel is arranged between the conveying track and the base platform.
8. The full-automatic online double-sided metal foil or metal coating thickness measuring device of claim 7, wherein the upper lamp panel and the lower lamp panel are provided with stainless steel frames.
9. The fully automatic online double-sided metal foil or metal coating thickness measuring device of claim 8, further comprising an external metal shielding frame, wherein the base, the first rail, the second rail and the video detection structure are disposed inside the external metal shielding frame.
10. The apparatus of claim 9, wherein the external metal shielding frame has a plurality of grounding points, and the grounding lines are arranged in a topological structure.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811297742.XA CN111121609A (en) | 2018-10-31 | 2018-10-31 | Full-automatic online double-sided metal foil or metal coating thickness measuring device |
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| CN201811297742.XA CN111121609A (en) | 2018-10-31 | 2018-10-31 | Full-automatic online double-sided metal foil or metal coating thickness measuring device |
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| CN113008145A (en) * | 2021-02-08 | 2021-06-22 | 厦门特仪科技有限公司 | Multi-probe automatic online thickness measuring device and thickness measuring method thereof |
| CN115930787A (en) * | 2022-10-06 | 2023-04-07 | 山东申华光学科技有限公司 | Method and system for detecting coating quality of coating machine based on machine vision |
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| CN115930787A (en) * | 2022-10-06 | 2023-04-07 | 山东申华光学科技有限公司 | Method and system for detecting coating quality of coating machine based on machine vision |
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Application publication date: 20200508 |