CN104677300A - Online measurement device and method for thickness of thin film - Google Patents
Online measurement device and method for thickness of thin film Download PDFInfo
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- CN104677300A CN104677300A CN201510071717.XA CN201510071717A CN104677300A CN 104677300 A CN104677300 A CN 104677300A CN 201510071717 A CN201510071717 A CN 201510071717A CN 104677300 A CN104677300 A CN 104677300A
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Abstract
The invention provides an online measurement device and measurement method for the thickness of a thin film. The online measurement device comprises a rack fixed on the ground, wherein an upper support and a lower support are arranged above the rack, a clearance is reserved between the upper support and the lower support, and two linear guide rails are respectively mounted on the upper support and the lower support; a slider on one of the guide rails is driven by a servo motor to move, and the two linear guide rails are connected through a synchronizing shaft, so that the synchronizing movement of the sliders on the two linear guide rails is realized; laser shift sensors are respectively arranged on the two sliders, the two laser shift sensors are oppositely arranged, and light beams emitted by the laser shift sensors are coincided; a front film picking mechanism and a rear film picking mechanisms are also arranged. The online measurement device is high in measurement precision and speed. Due to the adoption of a contactless measurement mode, the to-be-tested thin film is prevented from being scratched. The device is arranged before the last rolling link in a thin film production line and does not affect the whole production process. Measurement work is finished in the normal production process, time is greatly saved, and the labor intensity is reduced.
Description
Technical field
The present invention relates to field of measuring technique, particularly a kind of film thickness on-line measurement device and measuring method thereof.
Background technology
Film is as a kind of functional material, be widely used in a lot of fields such as packing, agriculture, industrial, packaging market is the maximum application of plastic sheeting, because the price of paper pulp in the last few years rises, the raising of plastic processing and finished film performance simultaneously, the plastics packed market share increases gradually.Plastic sheeting has light weight as flexible packaging, softness, waste material are few, occupies space little, the advantage that cost is low and cost effectiveness is high.Along with deepening constantly of every profession and trade upgrading and optimization of industrial structure process, China's plastic sheeting industry is just welcoming the flourish stage, in recent years along with the continuous increase of demand, along with the fast development of industry, the competition of thin film fabrication industry constantly aggravates, intelligent without seeming so plastic sheeting manufacturing enterprise of state more and more payes attention to the research to industry market, particularly to the further investigation of industry development environment and buyers.Also Just because of this, large quantities of domestic outstanding plastic sheeting manufactures brand and emerges rapidly, becomes the outstanding figure in China and even world's plastic sheeting manufacturing gradually.
But compared with the film yield huge with the world, the film yield of China also seems very low, is also in backwardness with other developed country's phase specific masses.The film that China produces is all Traditional Packing film mostly, enter bulwark is not high, the severe homogeneity of commodity and over capacity, Additional Value of Commodities is lower, and the film of middle and high end, especially function film production capacity is not enough, because plastic sheeting industry belongs to fund and technology-intensive industry field, along with expanding economy, industry will upgrade to trend with product structure, and low-end product is finally eliminated.There are up to ten thousand film lines in current China, and the uniformity consistency of film controls and the on-line measurement of thickness is the technical bottleneck that our film industry of restriction develops, and addresses these problems and has great significance to raising film production efficiency and quality.
Because film quality is comparatively soft, surface smoothness is good, is very easily scraped off, and has a strong impact on the quality of film, should avoid the generation of this situation when measuring film thickness and homogeneity.
Summary of the invention
For solving the problems of the technologies described above, the invention provides a kind of film thickness on-line measurement device and measuring method thereof, adopting non-contact measurement, scuffing can not be caused to film, and achieve on-line measurement, not affect normal production run.
A kind of film thickness on-line measurement device, comprise and be fixed on ground frame, upper bracket and undersetting is provided with above described frame, space is left in the middle of described upper bracket and undersetting, two line slideways are installed on described upper bracket and undersetting respectively, slide block on one of them guide rail of one driven by servomotor moves, described two line slideways are connected by a synchronizing shaft, the slide block on described two line slideways is made to realize being synchronized with the movement, described two slide blocks are respectively arranged with laser displacement sensor, described two laser displacement sensors are oppositely arranged, the light beam that they are launched overlaps, Tiao Mo mechanism is respectively arranged with in the left and right sides of described upper bracket and undersetting.
Preferably, described Tiao Mo mechanism comprises the roller of any surface finish, the connecting rod of roller both sides and at the described connecting rod other end and the fixing coupling shaft of connecting rod, described coupling shaft is arranged in described frame, and can relative to described gantry rotation, thus drive described roller to move, described coupling shaft is also fixed with a worm gear, described frame is provided with the worm screw engaged with described worm gear, one end of described worm screw is connected with can the handle of manual rotation.
Preferably, described slide block is provided with the grating scale measuring described slide position.
Preferably, described Tiao Mo mechanism is provided with detects it and be subject to the pressure transducer of diaphragm pressure.
Preferably, described film thickness on-line measurement device also comprises warning device.
Present invention also offers a kind of film thickness On-line Measuring Method, use above-mentioned film thickness on-line measurement device, film to be measured to be placed on Liang Getiao film mechanism and to pass in the middle of described two laser displacement sensors, film to be measured according to production procedure with normal speed by described film thickness on-line measurement device, described laser displacement sensor under the driving of described servomotor linearly guide rail do linear reciprocating motion, described two laser displacement sensors according to the numerical value measured separately by calculating the thickness of film to be measured.
The invention provides a kind of film thickness on-line measurement device and measuring method thereof, compared with prior art, there is significant advantage, the present invention adopts pair of opposing laser displacement sensor as thickness measure mechanism, it has high, the fireballing feature of precision, and antijamming capability is strong, and it adopts is non-contacting metering system, can not scratch film to be measured.The present invention has former and later two Tiao Mo mechanisms, and this Tiao Mo mechanism also has worm and gear regulating device, the angle that adjustable is suitable, makes the film on it keep smooth and have suitable tensile force, thus ensures the accurate of measurement.Before film thickness on-line measurement device of the present invention is arranged at last link rolling of film line, it does not affect whole production procedure, completes surveying work, greatly save the time and reduce labour intensity in normal production run.
Accompanying drawing explanation
Fig. 1 is film thickness on-line measurement equipments overall structure schematic diagram of the present invention.
Fig. 2 is that film thickness on-line measurement device of the present invention chooses film mechanism structure schematic diagram.
Fig. 3 is film thickness On-line Measuring Method thickness measurement with laser schematic diagram of the present invention.
Embodiment
Concrete elaboration is done below in conjunction with the technical scheme of the drawings and specific embodiments to film thickness on-line measurement device of the present invention and measuring method thereof.
As shown in Figure 1, the invention provides a kind of film thickness on-line measurement device, comprise and be fixed on ground frame 1, upper bracket 2 and undersetting 3 is provided with above frame 1, certain space is left in the middle of upper bracket 2 and undersetting 3, two line slideways 4 respectively level be installed on upper bracket 2 and undersetting 3, one servomotor 5 drives the slide block 6 on one of them line slideway 4 to move horizontally, two line slideways 4 are connected by a synchronizing shaft 7, the slide block 6 on two line slideways 4 is made to realize being synchronized with the movement, two slide blocks 6 are separately installed with laser displacement sensor 8, these two laser displacement sensors 8 are oppositely arranged, and the light beam that they are launched overlaps, Tiao Mo mechanism 9 is respectively arranged with in the left and right sides of described upper bracket and undersetting.
As shown in Figure 2, Tiao Mo mechanism 9 comprises the cylindrical roller 10 of any surface finish, tested film 17 contacts with roller surfaces, the smooth finish that roller is good can avoid tested film 17 to be scratched, roller 10 both sides are provided with connecting rod 11, the other end of connecting rod 11 is provided with the coupling shaft 12 fixing with connecting rod 11, coupling shaft 12 is arranged in frame 1, and can rotate relative to frame 1, thus drive roller 10 to move up and down, coupling shaft 12 is also fixed with a worm gear 13, frame 1 is provided with the worm screw 14 be meshed with worm gear 13, one end of worm screw 14 is connected with can the handle 15 of manual rotation, by rotary handle 15, worm screw 14 is driven to rotate, worm screw 14 engaging worm wheel 13 rotates, realize swinging up and down of roller 10, complete the adjustment of tested film 17 height and degree of tightness.
In addition, guide rail is provided with grating scale 16, grating scale 16 is made up of scale grating and grating reading head two parts, scale grating is connected with slide block 6, grating reading head is fixed on the side of line slideway 4, and grating scale 16 moves generation pulse signal by scale grating relative to grating reading head, is obtained the distance of movement by the number calculating pulse, utilize this principle, be used for detecting slide block and laser displacement sensor position in the horizontal direction.
Tiao Mo mechanism 9 is also provided with pressure transducer, and it is used for detecting the pressure that is subject to of Tiao Mo mechanism 9, ensures that film has suitable tension force.Overtension due to film is likely broken film or is made it produce plastic yield, and the too small film of tension force may out-of-flatness, affects measuring accuracy, is therefore very necessary to the detection of membrane tension.
Further, film thickness on-line measurement device of the present invention also comprises warning device, and when detecting that the tension force of film thickness, uniformity coefficient or film is undesirable, warning device work reminds operator to process.
Present invention also offers a kind of film thickness On-line Measuring Method, use above-mentioned film thickness on-line measurement device, before this device is positioned over the end winder of film line, directly enters winder after completing measurement and carry out rolling.Tested film passes from the space in the middle of upper bracket 2 and undersetting 3, two ends are carried on the roller 10 of Tiao Mo mechanism 9, the handle 5 rotated in both sides Tiao Mo mechanism 9 regulates the height of Tiao Mo mechanism 9, make the roller 10 of both sides contour, and make the tensioning of tested film 17, film line is produced with the normal mode of production, the winder of production line end carries out rolling, tested film 17 is passed through from film thickness on-line measurement device with certain speed, slide block 6 on the upper line slideway 4 of servomotor 5 driving linearly guide rail 4 does linear reciprocating motion, owing to adopting synchronizing shaft 7 to connect between two guide rails, and then two slide blocks 6 are also synchronized with the movement.Be installed on the thickness that two laser displacement sensors 8 that two slide blocks 6 are oppositely arranged measure tested film 17 between them.
Measuring principle as shown in Figure 3, two laser displacement sensors 8 are mounted opposite on two slide blocks 6, the laser beam that they are launched overlaps, it is A apart from the distance of this laser displacement sensor that laser displacement sensor 8 above measures tested film 17 upper surface, it is B apart from the distance of this laser displacement sensor that laser displacement sensor 8 below measures tested film 17 lower surface, distance between two laser displacement sensors 8 is C, then tested film 17 is D=C-(A+B) at the thickness D of this position, thus measures the thickness of this point.Advantage to eliminate the impact of measured body vibration on measurement result in this way.But there is requirement to sensor installation and performance simultaneously.Ensure that the condition of measurement accuracy is: two laser displacement sensor 8 transmitted beam must be coaxial, and two laser displacement sensor scannings must be synchronous.Be coaxially realize by installing, and synchronously will have the laser sensor 8 of synchronous end by selection.
Distance C between two laser displacement sensors 8 has important impact to measurement result, because two laser displacement sensors 8 can move along with slide block 6, the parallelism error that two line slideways 4 are installed can make the value of the C when moving change, so need first to calibrate before using.Use one has the gauge block of standard thickness, carries out thickness measure, utilizes the position of grating scale record slide block movement, each measuring position is calibrated, guarantees the accurate of measurement result it.
Tested film 17 moves along production line direction, and two laser displacement sensors 8, in the Width to-and-fro movement of tested film 17, can measure the one-tenth-value thickness 1/10 on a similar sinusoidal curve on tested film.When one-tenth-value thickness 1/10 does not meet the thickness requirement of setting, warning system starts reminds operating personnel to process.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (6)
1. a film thickness on-line measurement device, it is characterized in that, comprise and be fixed on ground frame, upper bracket and undersetting is provided with above described frame, space is left in the middle of described upper bracket and undersetting, two line slideways are installed on described upper bracket and undersetting respectively, slide block on one of them guide rail of one driven by servomotor moves, described two line slideways are connected by a synchronizing shaft, the slide block on described two line slideways is made to realize being synchronized with the movement, described two slide blocks are respectively arranged with laser displacement sensor, described two laser displacement sensors are oppositely arranged, the light beam that they are launched overlaps, Tiao Mo mechanism is respectively arranged with in the left and right sides of described upper bracket and undersetting.
2. film thickness on-line measurement device according to claim 1, is characterized in that, described Tiao Mo mechanism
Comprise the roller of any surface finish, the connecting rod of roller both sides and at the described connecting rod other end and the fixing coupling shaft of connecting rod, described coupling shaft is arranged in described frame, and can relative to described gantry rotation, thus drive described roller to move, described coupling shaft is also fixed with a worm gear, described frame is provided with the worm screw engaged with described worm gear, one end of described worm screw is connected with can the handle of manual rotation.
3. film thickness on-line measurement device according to claim 1 and 2, is characterized in that, described slide block is provided with the grating scale measuring described slide position.
4. film thickness on-line measurement device according to claim 3, is characterized in that, described Tiao Mo mechanism is provided with and detects the pressure transducer that it is subject to diaphragm pressure.
5. film thickness on-line measurement device according to claim 4, is characterized in that, described film thickness on-line measurement device also comprises warning device.
6. a film thickness On-line Measuring Method, it is characterized in that, use claim 1, 2, 4, film thickness on-line measurement device according to any one of 5, film to be measured to be placed on Liang Getiao film mechanism and to pass in the middle of described two laser displacement sensors, film to be measured according to production procedure with normal speed by described film thickness on-line measurement device, described laser displacement sensor under the driving of described servomotor linearly guide rail do linear reciprocating motion, described two laser displacement sensors according to the numerical value measured separately by calculating the thickness of film to be measured.
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CN105698690A (en) * | 2016-03-10 | 2016-06-22 | 江苏省交通科学研究院有限公司 | Reticle thickness tester |
CN106225694A (en) * | 2016-08-31 | 2016-12-14 | 成都尽知致远科技有限公司 | A kind of integrated die surface measured film thickness instrument of intelligence |
CN107270824A (en) * | 2017-07-28 | 2017-10-20 | 杭州朝阳橡胶有限公司 | A kind of wirecord fabric on-line measuring device |
CN107421454A (en) * | 2017-04-28 | 2017-12-01 | 东华大学 | A kind of thin material measurer for thickness |
CN108020164A (en) * | 2016-10-31 | 2018-05-11 | 泰科电子(上海)有限公司 | Thickness sensitivity experiment porch |
CN108168442A (en) * | 2018-03-28 | 2018-06-15 | 河北省同创交通工程配套产品产业技术研究院 | A kind of waterstop tongue and groove dynamic measurement device and its measuring method |
CN108248190A (en) * | 2018-03-28 | 2018-07-06 | 河北省同创交通工程配套产品产业技术研究院 | A kind of self-adhering type waterstop gluing overlay film integrated apparatus |
CN108827167A (en) * | 2018-06-08 | 2018-11-16 | 芜湖市亿仑电子有限公司 | A kind of thickness detector of capacitor metalized film |
CN109226345A (en) * | 2018-09-06 | 2019-01-18 | 泰安华鲁锻压机床有限公司 | Plate unit structural member straightening machine |
CN111102953A (en) * | 2019-12-16 | 2020-05-05 | 安徽高德铝业有限公司 | Measuring device for aluminum profile machining |
CN111121609A (en) * | 2018-10-31 | 2020-05-08 | 无锡市帕尔斯仪器有限公司 | Full-automatic online double-sided metal foil or metal coating thickness measuring device |
CN111412847A (en) * | 2015-10-10 | 2020-07-14 | 江苏新思达电子有限公司 | Method for measuring thickness of non-conductive material coating film |
CN111457868A (en) * | 2020-03-19 | 2020-07-28 | 绵阳人众仁科技有限公司 | Film detection method based on microwave resonance |
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CN113008145A (en) * | 2021-02-08 | 2021-06-22 | 厦门特仪科技有限公司 | Multi-probe automatic online thickness measuring device and thickness measuring method thereof |
CN114082667A (en) * | 2021-11-25 | 2022-02-25 | 西安建筑科技大学 | Intelligent high-precision textile flat knitting machine insertion piece detection equipment |
CN114234821A (en) * | 2021-12-20 | 2022-03-25 | 南京大学 | Membrane electrode thickness detection device and detection method |
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CN105698690B (en) * | 2016-03-10 | 2018-03-27 | 苏交科集团检测认证有限公司 | A kind of mark thickness tester |
CN105698690A (en) * | 2016-03-10 | 2016-06-22 | 江苏省交通科学研究院有限公司 | Reticle thickness tester |
CN106225694A (en) * | 2016-08-31 | 2016-12-14 | 成都尽知致远科技有限公司 | A kind of integrated die surface measured film thickness instrument of intelligence |
CN108020164A (en) * | 2016-10-31 | 2018-05-11 | 泰科电子(上海)有限公司 | Thickness sensitivity experiment porch |
CN108020164B (en) * | 2016-10-31 | 2020-10-13 | 泰科电子(上海)有限公司 | Thickness detection experiment platform |
CN107421454A (en) * | 2017-04-28 | 2017-12-01 | 东华大学 | A kind of thin material measurer for thickness |
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