CN111088475B - Mask plate mounting frame, mask plate assembly and assembling method - Google Patents

Mask plate mounting frame, mask plate assembly and assembling method Download PDF

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Publication number
CN111088475B
CN111088475B CN202010020932.8A CN202010020932A CN111088475B CN 111088475 B CN111088475 B CN 111088475B CN 202010020932 A CN202010020932 A CN 202010020932A CN 111088475 B CN111088475 B CN 111088475B
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China
Prior art keywords
mask plate
mounting
force
frame
mask
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CN202010020932.8A
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Chinese (zh)
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CN111088475A (en
Inventor
徐倩
吴建鹏
梁少端
杜森
嵇凤丽
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN202010020932.8A priority Critical patent/CN111088475B/en
Publication of CN111088475A publication Critical patent/CN111088475A/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Abstract

The invention provides a mask plate mounting frame, a mask plate assembly and an assembling method. This mask plate installing frame includes: the frame body of cavity space is formed, the frame body is including the installation face that is used for installing the mask plate, with the installation face back of the body face mutually and be located the installation face with side between the back of the body face, be provided with effort application portion on the side, effort application portion has the application of force axle center, and the application of force axle center is on a parallel with the installation face, just the application of force axle center arrives the vertical distance of installation face is less than to the vertical distance of back of the body face. The mask plate mounting frame has the advantages that the acting force applying part is arranged at the position, close to the mounting surface, of the frame body, so that when the mask plate is subjected to stretching welding, the height difference between the anti-deformation force applied by the acting force applying part and the stretching force generated by the mask plate on the frame body is reduced, the condition of applying the shearing force on the frame body is avoided, and the torsional deformation of the frame during the stretching welding of the mask plate is avoided.

Description

Mask plate mounting frame, mask plate assembly and assembling method
Technical Field
The invention relates to the technical field of display manufacturing, in particular to a mask plate mounting frame, a mask plate assembly and an assembling method.
Background
An Organic Light-Emitting Diode (OLED) device is generally manufactured by evaporating a Light-Emitting material through a metal Mask plate, and an MFA for evaporation is assembled by bonding the Mask plate (Mask) on the upper surface of a metal Frame (Frame) through a mesh.
When the mask plate is stretched and welded on the metal frame, in order to balance the deformation of the mask plate to the metal frame caused by the stretching Force, and to ensure the mounting precision of the mask plate in the stretched and welded state, it is usually necessary to apply a Counter Force (CF) to the metal frame in advance. However, under the action of two kinds of applied forces, namely the anti-deformation force of the metal frame and the tension force of the mask plate, the metal frame is subjected to torsional deformation, so that the tension precision of the mask plate for installation is reduced, and the product yield cannot meet the requirement.
Disclosure of Invention
The technical scheme of the invention aims to provide a mask plate mounting frame, a mask plate assembly and an assembling method, which are used for solving the problem that the frame is twisted and deformed when the mask plate is subjected to mesh-stretching welding on the frame in the prior art, so that the mesh-stretching precision is not satisfactory.
The embodiment of the invention provides a mask plate mounting frame, which comprises a frame body forming a hollow space, wherein the frame body comprises a mounting surface for mounting a mask plate, a back plate surface opposite to the mounting surface and a side surface positioned between the mounting surface and the back plate surface, an acting force applying part is arranged on the side surface, the acting force applying part is provided with a force application axis, the force application axis is parallel to the mounting surface, and the vertical distance from the force application axis to the mounting surface is smaller than the vertical distance to the back plate surface.
Optionally, the mask plate mounting frame, wherein the acting force applying portion includes a mounting hole and/or a protrusion with a circular or regular polygonal cross section, and the axis of the mounting hole and the axis of the protrusion are the axis of the acting force respectively.
Optionally, the mask plate mounting frame, wherein when the acting force applying portion includes a mounting hole, the mounting hole is a blind hole or a through hole disposed on the side surface.
Optionally, the mask plate mounting frame, wherein when the acting force applying portion includes a mounting hole, the mask plate mounting frame further includes a butting piece inserted into the mounting hole.
Optionally, the mask plate mounting frame, wherein the side surface includes a first side surface and a second side surface opposite to each other, and the hollow space is located between the first side surface and the second side surface; the opposite positions of the first side surface and the second side surface are respectively provided with the acting force applying parts, and the acting force applying axes of the two acting force applying parts are positioned on the same straight line.
Optionally, the mask plate mounting frame, wherein the mask plate mounting frame further comprises a stretching piece, the stretching piece is arranged in the hollow space, and the two opposite ends are respectively connected with the two opposite acting force applying portions.
Optionally, the mask plate mounting frame, wherein the stretching member includes a reverse screw rod.
Optionally, the mask plate mounting frame, wherein the frame body further includes a step surface located between the mounting surface and the back plate surface, the step surface is parallel to the mounting surface, and the side surface is disposed on the step surface and connected to the mounting surface and the step surface respectively.
Optionally, the mask plate mounting frame, wherein the side surface is an inclined surface inclined with respect to the step surface.
Optionally, the mask plate mounting frame is provided with a plurality of separated side surfaces along one edge of the frame body, and each side surface is provided with the acting force applying portion.
The embodiment of the invention also provides a mask plate assembly, which comprises a mask plate and further comprises the mask plate mounting frame, wherein the mask plate is fixed on the mounting surface.
The embodiment of the invention also provides an assembling method of the mask plate assembly, wherein the method comprises the following steps:
providing the mask plate mounting frame;
placing a mask plate to be assembled on the mounting surface and covering the hollow space;
applying an outward expanding pulling force to the mask plate, and applying a reversible deformation force along the force application axis and towards the interior of the hollow space to the frame body through the acting force applying part;
fixing the edge of the mask plate to the mounting surface while maintaining the tensile force and the anti-deformation force;
and withdrawing the pulling force and the anti-deformation force.
Optionally, when the mask plate mounting frame includes a stretching member having opposite ends respectively connected to two opposite force applying portions of the frame body, the method of applying a reversible deformation force along the force applying axis toward the inside of the hollow space to the frame body by the force applying portions includes:
and adjusting the stretching piece to enable the stretching piece to apply a pulling force along the force application axis to the acting force application part.
Optionally, the assembling method, wherein the acting force applying portion includes a mounting hole, and when the mask mounting frame further includes a propping member inserted into the mounting hole, the acting force applying portion applies a reversible deformation force to the frame body along the axis of the force applying axis and toward the inside of the hollow space, includes:
and applying thrust towards the interior of the hollow space and along the force application axis to the propping piece through an additional force application piece.
At least one of the above technical solutions of the specific embodiment of the present invention has the following beneficial effects:
the mask plate mounting frame provided by the embodiment of the invention is arranged at the position of the acting force applying part on the frame body, and is closer to the mounting surface than the back plate surface opposite to the mounting surface for mounting the mask plate, so that when the mask plate is subjected to tension welding in the frame body, the height difference between the reversible deformation force applied by the acting force applying part and the tension force of the mask plate on the frame body is reduced, the condition of applying a shearing force on the frame body is avoided, and the torsional deformation of the frame during the tension welding of the mask plate is avoided.
Drawings
Fig. 1 is a schematic structural view of a mask mounting frame according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a partially enlarged structure of the mask mounting frame in the embodiment of FIG. 1;
fig. 3 is a schematic structural view of a mask plate assembly using the mask plate mounting frame according to the embodiment of the present invention;
FIG. 4 is a schematic view of a mask mounting frame in a stressed state during mask tensioning and welding;
fig. 5 is a schematic view of a partial structure of a mask mounting frame according to another embodiment of the present invention;
fig. 6 is a schematic structural view of a mask mounting frame according to still another embodiment of the present invention;
FIG. 7 is a schematic diagram illustrating a partially enlarged structure of the mask mounting frame in the embodiment of FIG. 6;
fig. 8 is a flowchart illustrating an assembly method of a mask plate assembly according to an embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
In order to solve the problem that the screen stretching precision is not satisfactory due to torsional deformation of a frame when the screen stretching welding of the mask plate is performed on the frame in the prior art, the embodiment of the invention provides the mask plate mounting frame.
Referring to fig. 1 and 2, in the mask plate mounting frame according to an embodiment of the present invention, the mask plate mounting frame 1 includes a frame body 100 forming a hollow space 101, where the frame body 100 includes a mounting surface 110 for mounting a mask plate, a back plate surface 120 opposite to the mounting surface 110, and a side surface 130 located between the mounting surface 110 and the back plate surface 120, the side surface 130 is provided with an acting force applying portion 200, the acting force applying portion 200 has a force applying axis, the force applying axis is parallel to the mounting surface 110, and a vertical distance from the force applying axis to the mounting surface 110 is smaller than a vertical distance to the back plate surface 120.
In the embodiment of the invention, as shown in fig. 3, the mask plate mounting frame 1 is used for mounting the mask plate 2 to form the mask plate assembly 10, and the mask plate assembly 10 can be used for evaporation of luminescent materials in an OLED display device. The edge of the mask 2 is fixed to the frame body 100 of the mask mounting frame 1, and the mask 2 covers the hollow space of the frame body 100. And the mask plate 2 is used for passing through the through holes with preset patterns for the luminous material in the evaporation process so as to manufacture the luminous material layer with the corresponding pattern on the substrate to be evaporated.
As shown in fig. 1, 2, 3, and 4, when the mask 2 is mounted on the mask mounting frame 1, in order to ensure the dimensional accuracy of the through holes in the mask 2, it is necessary to weld the mask 2 to the frame 100, and in order to balance the deformation of the mask to the frame 100, so as to ensure the mounting accuracy of the mask in the post-welding state, when the mask 2 is welded to the frame 100, CF needs to be applied to the frame 100 in advance for balancing the tension of the mask 2, as shown in steps a to c of fig. 4.
Specifically, as shown in fig. 4, when the stretch welding (step c) is performed, the CF direction received by the frame body 100 is a direction toward the mask plate 2, and the stretch force F applied by the mask plate 2 to the frame body 100 is a direction away from the mask plate 2, and the two directions are opposite to each other. Optionally, the direction of CF is parallel to the direction of F. After welding (step d), the reaction force CF1 of CF and the reaction force F1 of the stretching force F borne by the frame body 100 are changed in direction, and although the two forces are still opposite in direction, the direction of the force is changed compared with that in step c, so that in step c and step d, the deformation states of the frame body 100 and the mask plate 2 are different, which results in the required mounting accuracy measured in step c, and the displacement occurs after welding, thereby affecting the stretching accuracy.
In the embodiment of the present invention, the force application axis of the acting force applying portion 200 disposed on the side surface 130 of the frame body 100 is closer to the mounting surface 110 than the back plate surface 120 of the frame body 100, so that when the acting force applying portion 200 applies the reverse deformation force CF to the frame body 100, the reverse deformation force CF is closer to the tension force F1 of the mask plate, so as to reduce the shearing force generated to the frame body 100 under the action of the reverse deformation force CF and the tension force F, thereby reducing the torsional deformation of the frame during the tension welding of the mask plate, and achieving the effect of improving the tension precision.
In the mask plate mounting frame according to an embodiment of the present invention, as shown in fig. 1 and 2, the acting force applying portion 200 includes a mounting hole 210, a cross section of the mounting hole 210 is a circular or regular polygon, an axis is perpendicular to the cross section and passes through a center of the cross section, and in this embodiment, the axis of the mounting hole 210 is an axis of the acting force.
Alternatively, the mounting holes 210 may be blind holes or through holes provided on the side 130.
Further, when the acting force applying portion 200 includes the mounting hole 210, the mask plate mounting frame 1 further includes a butting member 300 inserted into the mounting hole 210.
Optionally, as shown in fig. 1 and 2, the abutting member 300 includes a first portion 310 matching the mounting hole 210 and a second portion 320 connected to the first portion 310, wherein the cross-section of the first portion 310 has the same shape and diameter as those of the mounting hole 210, so as to ensure that the first portion 310 can be inserted into the mounting hole 210. The cross-sectional area of the second portion 320 is greater than the cross-sectional area of the first portion 310, and the shape of the cross-section of the second portion 320 is the same as or different from the shape of the cross-section of the first portion 310.
In the embodiment of the present invention, the side surface 130 is located on a side of the frame body 100 away from the hollow space 101, the abutting member 300 is located on a side of the side surface 130 away from the hollow space 101, and is inserted into the mounting hole 210 through the first portion 310, and the second portion 320 is exposed out of the mounting hole 210. Optionally, the second portion 320 protrudes from the side 130 to serve as a force application point for the counter-deformation force CF.
Before the frame body 100 is welded with the mask 2 by stretching, the first portion 310 of the abutting member 300 needs to be inserted into the mounting hole, and then an additional force applying member is used to act on one end of the second portion 320 far away from the first portion 310, so as to apply CF to the second portion 320 through the force applying member, and conduct CF to the frame body 100 through the abutting member 300.
In the embodiment of the present invention, the installation hole 210 on the side surface 130 is disposed at a position where CF is applied to the frame body 100. Wherein the vertical distance from the axis of the mounting hole 210 to the mounting surface 110 is smaller than the vertical distance to the back plate surface 120. Optionally, the vertical distance between the axis of the mounting hole 210 and the mounting surface 110 may be minimized as much as possible when the manufacturing process allows, so that the acting position of the CF on the frame body 100 and the acting position of the tension generated by the mask plate 2 on the frame body 100 are substantially on the same plane, so as to reduce the height difference between the CF and the tension, avoid or reduce the situation of applying the shearing force to the frame body 100, and avoid the torsional deformation of the frame when the tension welding of the mask plate is performed.
In the embodiment of the present invention, as shown in fig. 1 and fig. 2, the frame body 100 further includes a step surface 140 located between the mounting surface 110 and the back plate surface 120. The step surface 140 is parallel to the mounting surface 110, and the side surface 130 is disposed on the step surface 140 and connected to the mounting surface 110 and the step surface 140. Optionally, the side surface 130 is a sloped surface that is inclined relative to the step surface 140.
Further, optionally, in the embodiment of the present invention, when the acting force applying portion 200 includes the mounting hole 210, the side surface 130 is provided with a groove 131, the mounting hole 210 is disposed in the groove 131, and the groove 131 and the mounting hole 210 are coaxial. When the supporting member 300 is inserted into the mounting hole 210, the first portion 310 is located in the mounting hole 210, at least a part of the second portion 320 is located in the groove 131, and the groove 131 is used for accommodating and positioning the second portion 320, so that the stability of the supporting member 300 is ensured when CF is applied through the second portion 320.
In the embodiment of the present invention, as shown in fig. 1 and fig. 2, a plurality of separated side surfaces 130 are optionally disposed along one edge of the frame body 100, and each side surface 130 is respectively disposed with an acting force applying portion 200. In this embodiment, when the force applying part 200 includes the mounting holes 210, one mounting hole 210 is formed on each of the separated side surfaces 130.
Further, optionally, in this embodiment, the side 130 on the frame 100 includes a first side 132 and a second side 133 opposite to each other, and the hollow space 101 is located between the first side 132 and the second side 133. The first side surface 132 and the second side surface 133 are provided with acting force applying parts 200 at opposite positions, and the force applying axes of the two acting force applying parts 200 are located on the same straight line. In this embodiment, the acting force applying part 200 includes a mounting hole 210, the mounting holes 210 are respectively disposed on the first side surface 132 and the second side surface 133, and the axes of the mounting holes 210 on the first side surface 132 and the axes of the mounting holes 210 on the second side surface 133 are located on the same straight line.
As shown in fig. 1 and 2, along two opposite edges of the frame body 100, each edge is respectively provided with a plurality of side surfaces 130, each side surface 130 is respectively provided with a mounting hole 210, the mounting holes 210 on the two opposite edges are respectively arranged in a one-to-one correspondence manner, that is, each mounting hole 210 on a first edge is provided with a corresponding mounting hole 210 on a second opposite edge, and the axes of the two mounting holes 210 are located on the same straight line.
Alternatively, the two opposite edges of the frame body 100 are two edges in the long side direction.
Further, when the frame body 100 is subjected to the mesh welding of the mask plate 2, an abutting member 300 may be respectively inserted at each of the mounting holes 210 on the frame body 100, for applying CF to the frame body 100 through the abutting member 300 at the position of the mounting hole 210. By using the mounting holes 210 respectively disposed on the first side 132 and the second side 133, the CF can be oppositely applied to the frame 100, so as to ensure the stress balance of the frame 100.
In the mask plate mounting frame of the embodiment of the invention, the mounting hole is formed in the position, close to the mounting surface, of the frame body, the abutting piece is inserted in the mounting hole, the CF can be applied to the frame body, and the position for applying the CF is closer to the mounting surface than the surface of the back plate, so that the action position of the CF on the frame body and the action position of the mask plate on the tension generated by the frame body are basically in the same plane, the height difference between the CF and the tension is reduced, the condition of applying the shear force on the frame body is avoided or reduced, and the torsional deformation of the frame during the tension welding of the mask plate is avoided.
In another embodiment of the present invention, as shown in fig. 5 and in conjunction with fig. 3 and 4, the acting force applying part 200 may include a protrusion 220, the protrusion 220 is disposed on the side surface 130 of the frame 100, the cross section is a circle or a regular polygon, the axis is perpendicular to the cross section and passes through the center of the cross section, and in this embodiment, the axis of the protrusion 220 is the axis of the acting force.
By providing the projection 220 on the frame body 100, when the mask plate 2 is tension-welded to the frame body 100, CF can be applied to the frame body 100 by applying an additional biasing member to the projection 220.
In this embodiment, the position where the projection 220 is provided is a position where CF is applied to the frame body 100. Wherein the axis of the protrusion 220 is at a smaller vertical distance from the mounting surface 110 than from the back-plate surface 120. Optionally, the vertical distance between the axis of the protrusion 220 and the mounting surface 110 may be minimized as much as possible when the manufacturing process allows, so that the acting position of the CF on the frame body 100 and the acting position of the tension generated by the mask plate 2 on the frame body 100 are substantially on the same plane, the height difference between the CF and the tension is reduced, and the situation of applying a shearing force to the frame body 100 is avoided or reduced, thereby avoiding the torsional deformation of the frame when the tension welding of the mask plate is performed.
When the force applying part 200 includes the protrusion 220, as shown in fig. 1 and 2, as with the embodiment including the mounting hole 210, a plurality of separated side surfaces 130 are disposed along one edge of the frame body 100, and the protrusion 220 may be disposed on each side surface 130. Furthermore, the first side surface 132 and the second side surface 133 of the frame 100 are respectively provided with a protrusion 220, and the axis of the protrusion 220 on the first side surface 132 and the axis of the protrusion 220 on the second side surface 133 are located on the same straight line.
It should be further noted that, according to fig. 1, fig. 2 and fig. 5, in the mask plate mounting frame according to the embodiment of the present invention, a plurality of force applying portions 200 are provided on the side surface 130 of the frame body 100, all of the force applying portions 200 may be mounting holes 210, or all of the protrusions 220, or a part of the force applying portions 200 may be mounting holes 210, and another part of the force applying portions 200 may be protrusions 220, as long as it is ensured that each of the mounting holes 210 or each of the protrusions 220 formed as the force applying portions 200 has a vertical distance from the axis to the mounting surface 110 smaller than a vertical distance to the back plate surface 120, so that when CF is applied to the frame body 100 through the mounting holes 210 and the protrusions 220, the CF is disposed on the frame body 100 at a position closer to the mounting surface 110, thereby avoiding torsional deformation of the frame during the stretch welding of the mask plate.
In addition, the number of the acting force applying parts 200 provided on the housing 100 is not limited in the embodiment of the present invention, and the specific number is determined according to the number of the acting position points to which the CF needs to be applied, wherein the number of the acting force applying parts 200 should be at least equal to or greater than the number of the acting position points to which the CF needs to be applied. Theoretically, the more the number of the action position points of the CF is, the better the mesh welding effect is.
In another embodiment of the mask mounting frame of the present invention, as shown in fig. 6 and 7, in this embodiment, the side surface 130 on the frame body 100 includes a first side surface 132 and a second side surface 133 which are opposite to each other, and the hollow space 101 is located between the first side surface 132 and the second side surface 133. The first side surface 132 and the second side surface 133 are provided with an acting force applying part 200 at a relative position, the acting force applying part 200 has a force applying axis, the force applying axis is parallel to the mounting surface 110, the vertical distance from the force applying axis to the mounting surface 110 is smaller than the vertical distance to the backboard surface 120, and the force applying axes relative to the two acting force applying parts 200 are located on the same straight line.
In this embodiment, compared to the above embodiment, the mask mounting frame 1 further includes a stretching member 400, the stretching member 400 is disposed in the hollow space 101, and two opposite ends of the stretching member 400 are respectively connected to two opposite acting force applying portions 200. In the embodiment of the present invention, the stretching member 400 may have a stretching force adjusting function, and the stretching member 400 may connect the two acting force applying parts 200 provided to the frame body 100 in a facing manner, so as to adjust the stretching force of the stretching member 400, thereby adjusting the magnitude of the stretching force applied to the opposite sides of the frame body 100 by the stretching member 400, and applying the acting force toward the inside of the hollow space 101 to the frame body 100. When the frame body 100 is subjected to the tension welding of the mask 2, the biasing force may be CF applied to the frame body 100.
In the embodiment of the present invention, the stretching member 400 includes, but is not limited to, a reverse screw rod, and may further include, for example, a force application device driven hydraulically or electrically.
In an embodiment of the present invention, as shown in fig. 6 and 7, when the acting force applying portions 200 disposed on the first side surface 132 and the second side surface 133 opposite to the frame body 100 respectively include the mounting holes 210, the stretching members 400 may be fixed on the frame body 100 by respectively penetrating the mounting holes 210. Of course, the force applying part 200 is not limited to include only the mounting hole 210, and may also include a protrusion 220 as shown in fig. 5, and when the force applying part 200 includes the protrusion 220, the stretching member 400 may be fixed at the protrusion 220 by screwing or the like, so as to achieve the fixed connection of the stretching member 400 on the frame body 100.
It should be noted that, in the mask plate mounting frame according to the embodiment of the present invention, the specific structure of the stretching member 400 and the matching connection manner between the stretching member 400 and the acting force applying portion 200 are not particularly limited, as long as the two ends of the stretching member 400 can be respectively connected to the two opposite acting force applying portions 200 by the manner that the stretching member 400 is disposed inside the hollow space 101, so as to apply CF to the frame body 100.
In the embodiment of the present invention, optionally, as shown in fig. 6 and 7, the frame body 100 includes four frames, the four frames are enclosed to form the hollow space 101, wherein the frames in two opposite longitudinal directions of the frame body 100 are respectively provided with the acting force applying parts 200, and the stretching member 400 is arranged perpendicular to the frames in the longitudinal direction.
Further, in the mask mounting frame according to the embodiment of the present invention, optionally, the number of the tension members 400 is multiple, for example, three, but is not limited thereto, and the number is specifically determined according to the number of the action position points to which the CF is required to be applied.
According to the mask plate mounting frame, the acting force applying part is arranged at the position, close to the mounting surface, of the frame body, the two ends of the stretching piece in the hollow space are respectively connected with the opposite acting force applying parts, and the CF is applied to the frame body when the mask plate is subjected to expanded mesh welding by applying a pulling force to the frame body in the hollow space; because the position of the acting force applying part is closer to the mounting surface than the back plate surface, the acting position of the CF on the frame body and the acting position of the tension generated by the mask plate on the frame body are basically in the same plane, so that the height difference between the CF and the tension is reduced, the condition of applying the shearing force on the frame body is avoided or reduced, and the torsional deformation of the frame during the tension welding of the mask plate is avoided.
The mask plate assembly comprises a mask plate and the mask plate mounting frame, wherein the mask plate is fixed on the mounting surface.
A person skilled in the art can understand the specific structure of the mask plate assembly using the mask plate mounting frame according to the embodiments of the present invention from the above detailed descriptions of fig. 1 to 7, and will not be described in detail herein.
Another embodiment of the present invention further provides an assembling method of the mask plate assembly, wherein, according to fig. 8 and referring to fig. 1 to 7, the method includes:
s810, providing the mask plate mounting frame 1;
s820, placing the mask plate 2 to be assembled on the mounting surface 110 and covering the hollow space 101;
s830, applying an outward expanding tensile force to the mask 2, and applying a reverse deformation force along the force application axis and toward the inside of the hollow space 101 to the frame 100 through the force application unit 200;
s840, fixing the edge of the mask plate 2 to the mounting surface 110 while maintaining the tension and the anti-deformation force;
and S850, removing the tensile force and the anti-deformation force.
Alternatively, in one aspect of the assembling method, when the mask plate mounting frame 1 includes the tension member 400 having opposite ends respectively connected to the two opposite force applying portions 200 of the frame body 100, in step S830, the applying portion 200 applies a reverse deformation force to the frame body 100 along the axis of the application force and toward the inside of the hollow space 101, including:
the tension member 400 is adjusted so that the tension member 400 applies a tensile force along the urging axis to the urging force applying portion 200.
In this embodiment, when the tension of the mask 2 is applied to the frame 100 by the tension tool 400 in the hollow space 101, CF is applied to the frame 100.
By adopting the embodiment, after the screen welding of the mask plate 2 on the frame body 100 is completed, the stretching member 400 is removed, and the subsequent evaporation process by using the mask plate assembly is not affected.
Optionally, in another embodiment, when the acting force applying portion 200 includes the mounting hole 210, and the mask plate mounting frame 1 further includes the abutting member 300 inserted into the mounting hole 210, in step S830, the acting force applying portion 200 applies a reverse deformation force to the frame body 100 along the axis of the applied force and toward the inside of the hollow space 101, including:
by the additional urging member, the urging member 300 is urged toward the inside of the hollow space 101 along the urging axis.
In this embodiment, before the mask plate 2 is subjected to the mesh welding on the housing 100, CF can be applied to the housing 100 through the abutting member 300 on the outer side of the housing 100 by the additional applying member. After the mesh welding of the mask plate 2 on the frame body 100 is completed, the abutting piece 300 is removed, and the abutting piece 300 can be repeatedly used without affecting the subsequent evaporation process by using the mask plate assembly.
While the preferred embodiments of the present invention have been described, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention.

Claims (11)

1. A mask plate installation frame comprises a frame body forming a hollow space, and is characterized in that the frame body comprises an installation surface used for installing a mask plate, a back plate surface opposite to the installation surface and a side surface located between the installation surface and the back plate surface, wherein an acting force applying part is arranged on the side surface, the acting force applying part is provided with a force application axis, the force application axis is parallel to the installation surface, and the vertical distance from the force application axis to the installation surface is smaller than the vertical distance to the back plate surface; the acting force applying part comprises a mounting hole and/or a bulge with a circular or regular polygon cross section, and the axes of the mounting hole and the bulge are the axes of the acting force respectively;
the mask plate mounting frame further comprises a stretching piece, the stretching piece is arranged in the hollow space, and two opposite ends of the stretching piece are respectively connected with two opposite acting force applying parts;
the tension member includes a reverse lead screw.
2. A mask mounting frame according to claim 1, wherein when the force applying portion includes a mounting hole, the mounting hole is a blind hole or a through hole provided on the side surface.
3. A mask installation frame according to claim 1, wherein when the force application portion includes an installation hole, the mask installation frame further includes a butting member inserted into the installation hole.
4. A mask mounting frame according to claim 1, wherein the side surface includes a first side surface and a second side surface which are opposite to each other, and the hollow space is located between the first side surface and the second side surface; the opposite positions of the first side surface and the second side surface are respectively provided with the acting force applying parts, and the acting force applying axes of the two acting force applying parts are positioned on the same straight line.
5. The mask mounting frame according to claim 1, wherein the frame body further comprises a step surface located between the mounting surface and the back plate surface, the step surface is parallel to the mounting surface, and the side surface is arranged on the step surface and is respectively connected with the mounting surface and the step surface.
6. A mask mounting frame according to claim 5, wherein the side surface is a slope inclined with respect to the step surface.
7. A mask installation frame according to claim 1 or 5, wherein a plurality of spaced apart side surfaces are provided along one edge of the frame body, and the force applying portion is provided on each of the side surfaces.
8. A mask plate assembly, which comprises a mask plate and is characterized by further comprising a mask plate mounting frame according to any one of claims 1 to 7, wherein the mask plate is fixed on the mounting surface.
9. A method of assembling the mask plate assembly of claim 8, the method comprising:
providing the mask plate mounting frame;
placing a mask plate to be assembled on the mounting surface and covering the hollow space;
applying an outward expanding pulling force to the mask plate, and applying a reversible deformation force along the force application axis and towards the interior of the hollow space to the frame body through the acting force applying part;
fixing the edge of the mask plate to the mounting surface while maintaining the tensile force and the anti-deformation force;
and withdrawing the pulling force and the anti-deformation force.
10. The assembling method according to claim 9, wherein when the mask plate attaching frame includes a tension member having opposite ends respectively connected to the opposite two force applying portions of the frame, the applying portion applies a reverse deformation force to the frame along the force applying axis and toward the inside of the hollow space, and the assembling method includes:
and adjusting the stretching piece to enable the stretching piece to apply a pulling force along the force application axis to the acting force application part.
11. The assembling method according to claim 9, wherein the acting force applying portion includes a mounting hole, and when the mask mounting frame further includes a butting member inserted into the mounting hole, a reverse deformation force along the axis of the acting force and toward the inside of the hollow space is applied to the frame body by the acting force applying portion, including:
and applying thrust towards the interior of the hollow space and along the force application axis to the propping piece through an additional force application piece.
CN202010020932.8A 2020-01-09 2020-01-09 Mask plate mounting frame, mask plate assembly and assembling method Active CN111088475B (en)

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CN112626452B (en) * 2020-12-14 2023-05-23 昆山国显光电有限公司 Mask structure
CN113088872A (en) * 2021-02-19 2021-07-09 福建华佳彩有限公司 Processing method of mask plate
CN113478131A (en) * 2021-07-27 2021-10-08 福建华佳彩有限公司 Net tensioning device and net tensioning method thereof

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KR20070055827A (en) * 2005-11-28 2007-05-31 엘지전자 주식회사 Masking apparatus, apparatus for fabricating organic electro luminescence device using the same and method for fabricating thereof
KR102126515B1 (en) * 2013-07-25 2020-06-25 삼성디스플레이 주식회사 Manufacturing apparatus and method of mask assembly
KR101834194B1 (en) * 2016-07-13 2018-03-05 주식회사 케이피에스 A Apparatus And Method For Manufacturing The Tension Mask Frame Assembly
KR102618351B1 (en) * 2016-07-19 2023-12-28 삼성디스플레이 주식회사 Mask frame assembly providing pattern position adjusting mechanism and the adjusting method using the same
WO2019038833A1 (en) * 2017-08-22 2019-02-28 シャープ株式会社 Method for producing vapor deposition mask and apparatus for producing vapor deposition mask
CN110055497B (en) * 2019-05-23 2022-05-13 京东方科技集团股份有限公司 Mask plate, screen stretching device and screen stretching method thereof

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