CN111081152A - Display module integrated with thin-film solar cell and preparation method thereof - Google Patents
Display module integrated with thin-film solar cell and preparation method thereof Download PDFInfo
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
- G02F1/13324—Circuits comprising solar cells
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Abstract
The invention discloses a display module integrated with thin-film solar cells and a preparation method thereof, wherein the display module comprises a glass substrate, one side of the glass substrate facing the light emitting direction of the display module is provided with a color resin display area and a black matrix area, the black matrix area comprises a thin-film solar cell layer arranged on the glass substrate and a shading layer arranged on the thin-film solar cell layer, thin-film solar cell wiring is arranged in the color resin display area, and front electrodes and back electrodes of the thin-film solar cell layer and the thin-film solar cell wiring are transparent electrodes. According to the invention, the manufacturing process is simpler, the manufacturing cost is lower, the thickness of the display screen is reduced, and the display effect is ensured by adopting the transparent wiring by using the mode of integrally manufacturing the light shielding layer and the thin-film solar cell layer.
Description
Technical Field
The invention relates to the technical field of displays, in particular to a display module integrated with a thin film solar cell and a preparation method thereof.
Background
With the use of electronic products such as computers, displays, wearable devices and the like becoming more and more widespread, one of the problems common to such electronic products is: the display screen consumes most energy in the display process, lead to the battery can't work for a long time, consequently appear using thin-film solar cell on the display screen can effectively improve the battery of display screen and use long time, thin-film solar cell has thickness thin, low cost, advantages such as photoelectric conversion rate height, have among the prior art through setting up thin-film solar cell on the outermost protective cover plate of display screen, also paste fixedly after making thin-film solar cell and display screen respectively, these prior art do not have sufficient advantage in the manufacture craft, the cost of manufacture, guarantee display effect and the thickness reduction of display screen, still accessible further improve and simplify the manufacture craft, and with low costs, guarantee display effect and reach the purpose that reduces display screen thickness.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the display module of the integrated thin-film solar cell and the preparation method thereof, wherein the manufacturing process is simpler, the manufacturing cost is lower, the thickness of the display screen is reduced, and the display effect is ensured by adopting the transparent wiring.
The technical effect to be achieved by the invention is realized by the following scheme: the display module comprises a glass substrate, wherein a color resin display area and a black matrix area are arranged on one side of the glass substrate, which faces the light emitting direction of the display module, the black matrix area comprises a thin film solar cell layer arranged on the glass substrate and a light shielding layer arranged on the thin film solar cell layer, thin film solar cell wiring is arranged in the color resin display area, and front electrodes and back electrodes of the thin film solar cell layer and the thin film solar cell wiring are transparent electrodes.
Preferably, the thin-film solar cell layer comprises a first front electrode layer, a first photovoltaic absorption layer and a first back electrode layer which are sequentially stacked on the glass substrate, and the light shielding layer is arranged on the first back electrode layer; the thin-film solar cell wiring comprises a second front electrode layer, a second photovoltaic absorption layer and a second back electrode layer which are sequentially arranged on the glass substrate in a stacking mode, and a shading layer is not arranged on the thin-film solar cell wiring.
Preferably, in the color resin display area, the thin film solar cell lines can be selectively disconnected.
Preferably, the outermost periphery of the black matrix region is further provided with a first metal auxiliary layer to reduce the resistance of the first front electrode layer and/or the first back electrode layer.
Preferably, a second metal auxiliary layer is further disposed at the intersection of the middle region of the black matrix region to reduce the resistance of the first front electrode layer and/or the first back electrode layer in the region.
Preferably, the black matrix region is provided with a first photovoltaic absorption layer at a part of position, the first photovoltaic absorption layer is not provided at a part of position, the black matrix region which is not provided with the first photovoltaic absorption layer is provided with a first metal layer connected with the first front electrode layer, and the first metal layer is insulated from the first back electrode layer.
Preferably, the display device further comprises a common electrode layer, the common electrode layer is formed on the outer side surfaces of the color resin display area and the black matrix area, a second metal layer which is not connected with the first front electrode layer and the second front electrode layer is further arranged on the wiring of the thin-film solar cell layer and the thin-film solar cell, and the shading layer is further provided with a through hole to enable the common electrode layer to be connected with the second metal layer.
The preparation method of the display module integrated with the thin film solar cell is characterized by comprising the following steps:
step S1: forming a first front electrode layer and a second front electrode layer on a glass substrate;
step S2: carrying out chemical vapor deposition film formation of a first photovoltaic absorption layer on the first front electrode layer, and carrying out chemical vapor deposition film formation of a second photovoltaic absorption layer on the second front electrode layer;
step S3: forming a first back electrode layer on the first photovoltaic absorption layer and forming a second back electrode layer on the second photovoltaic absorption layer; the first back electrode layer and the second back electrode layer are both transparent electrodes;
step S4: after cleaning, firstly carrying out imaging etching on the first back electrode layer and the second back electrode layer, then carrying out imaging etching on the first photovoltaic absorption layer and the second photovoltaic absorption layer, and finally carrying out imaging etching on the first front electrode layer and the second front electrode layer;
step S5: preparing a light shielding layer in the black matrix area in a gluing, exposing and developing mode;
step S6: preparing RGB sub-pixels by gluing, exposing and developing to form a color resin display area, and plating a common electrode layer on the leveling layer outside the color resin display area and the black matrix area by physical vapor deposition.
Preferably, the manufacturing method further comprises the steps of manufacturing a second metal auxiliary layer at the intersection position of the middle area of the black matrix area, wet-etching the first back electrode layer and dry-etching the first photovoltaic absorption layer at one time by presetting a mask at the intersection position of the middle area of the black matrix area, not etching the first front electrode layer, and then leading out the first front electrode layer by forming the second metal auxiliary layer.
Preferably, the manufacturing of a second metal layer is carried out on the first back electrode layer and the second back electrode layer, an insulating layer is further manufactured between the second metal layer and the first back electrode layer and between the second metal layer and the second back electrode layer, the light shielding layer forms a through hole through exposure, and after the coating of the common electrode layer is carried out on the outer sides of the color resin display area and the black matrix area, the common electrode is directly connected with the second metal layer through the through hole.
The invention has the following advantages:
1. the thin film solar cell layer is arranged in the black matrix area, the thin film solar cell routing is arranged in the color resin display area, photoelectric conversion energy of the thin film solar cell can be improved, the use of the display module is met, and the standby or use time of the display module is effectively prolonged. Meanwhile, the manufacturing process is simpler, the manufacturing cost is lower, the thickness of the display screen is reduced, and the display effect is ensured by adopting transparent wiring;
2. the thin-film solar cell wiring can be selectively disconnected, and the influence on the color resin display area can be reduced by selectively disconnecting the thin-film solar cell wiring because the color of the second photovoltaic absorption layer is dark red;
3. the outermost periphery of the black matrix region is also provided with a first metal auxiliary layer so as to reduce the resistance of the first front electrode layer and the first back electrode layer, improve the conversion efficiency of the thin-film solar cell layer under strong light and facilitate the leading-out of the first front electrode layer and the first back electrode layer;
4. a second metal auxiliary layer is further arranged at the crossing position of the middle area of the black matrix area so as to reduce the resistance of the first front electrode layer and the first back electrode layer in the area;
5. the first photovoltaic absorption layer is arranged at part of the black matrix region, the first photovoltaic absorption layer is not arranged at part of the black matrix region, and the first metal layer is arranged in the black matrix region without the first photovoltaic absorption layer and connected with the first front electrode layer, so that the resistance of the first front electrode layer is further reduced;
6. the light shading layer is further provided with a through hole to enable the common electrode layer to be connected with the second metal layer, and the through hole is used for reducing the resistance of the common electrode layer.
Drawings
FIG. 1 is a schematic plane structure diagram of a display module of an integrated thin film solar cell of the present invention showing a color resin display area, a black matrix area and the cell;
FIG. 2 is a schematic side view of a display module of an integrated thin film solar cell according to the present invention showing a color resin display region and a black matrix region;
FIG. 3 is a schematic side view of a thin film solar cell layer and a light shielding layer in a black matrix region of a display module integrated with thin film solar cells according to the present invention;
FIG. 4 is a schematic diagram of a side view structure of a thin film solar cell trace in a color resin display area of a display module integrated with thin film solar cells according to the present invention;
fig. 5 is a schematic side view of a display module of an integrated thin film solar cell according to the present invention, in which a first metal auxiliary layer is disposed at the outermost periphery of a black matrix region;
FIG. 6 is a schematic diagram of a planar structure hollowed out at the intersection of the middle region in the black matrix region of the display module of the integrated thin film solar cell of the present invention;
FIG. 7 is a schematic side view of the structure of FIG. 6 at A-A;
fig. 8 is a schematic side view of a black matrix region without a first photovoltaic absorption layer and with a first metal layer in a display module of an integrated thin film solar cell according to the present invention;
FIG. 9 is a schematic diagram of a side view structure of a common electrode layer connected to a second metal layer in a display module of an integrated thin film solar cell according to the present invention;
fig. 10 is a process flow diagram of a method for manufacturing a display module integrated with a thin film solar cell according to the present invention.
Detailed Description
The invention is described in detail below with reference to the drawings, wherein examples of the embodiments are shown in the drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
Furthermore, the terms "first", "second", "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," "disposed," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the interconnection of two elements or through the interaction of two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Example one
With reference to fig. 1-2, an embodiment of the present invention provides a display module integrated with thin film solar cells, including a glass substrate 10, where one side of the glass substrate 10 facing a light emitting direction of the display module has a color resin display area 100 and a black matrix area 200, where the black matrix area 200 includes a thin film solar cell layer 210 disposed on the glass substrate 10 and a light shielding layer 220 disposed on the thin film solar cell layer 210, and a thin film solar cell trace 110 is disposed in the color resin display area 100, where front electrodes and back electrodes of the thin film solar cell layer 210 and the thin film solar cell trace 110 are transparent electrodes.
Specifically, with reference to fig. 3 to 4, the thin film solar cell layer 210 includes a first front electrode layer 211, a first photovoltaic absorption layer 212, and a first back electrode layer 213, which are sequentially stacked on the glass substrate 10, the light shielding layer 220 is disposed on the first back electrode layer 213, the thin film solar cell line 110 includes a second front electrode layer 111, a second photovoltaic absorption layer 112, and a second back electrode layer 113, which are sequentially stacked on the glass substrate 10, the light shielding layer 220 is not disposed on the thin film solar cell line 110, and the second back electrode layer 113 is made of a transparent material, so that the thin film solar cell line 110 is invisible to naked eyes in the color resin display area 100, thereby effectively reducing the influence on the display effect of the color resin display area 100. The width of the thin-film solar cell wiring 110 is preferably less than 60nm and invisible to naked eyes, moire fringes are not generated between the angle of the thin-film solar cell wiring 110 and the color resin display, the distribution quantity of the thin-film solar cell wiring 110 in the area of the color resin display area 100 can be determined according to the display effect requirement, when the display effect requirement is high, the quantity of the thin-film solar cell wiring 110 can be properly reduced, and conversely, when the display effect requirement is not high, the quantity of the thin-film solar cell wiring 110 can be properly increased. It should be understood that when the display module does not have the black matrix area 200, the display module may form a semitransparent solar cell entirely in the manner of the thin film solar cell line 110, so as to supply power to the display module.
According to the invention, the thin film solar cell layer 210 is arranged in the black matrix area 200 and the thin film solar cell wiring 110 is arranged in the color resin display area 100, so that the photoelectric conversion energy of the thin film solar cell can be improved, the use requirement of a display module is met, and the standby or use time of the display module is effectively prolonged. Meanwhile, the manufacturing process is simpler, the manufacturing cost is lower, the thickness of the display screen is reduced, and the display effect is ensured by adopting transparent wiring by utilizing the mode of integrally manufacturing the light shielding layer 220 and the thin-film solar cell layer 210.
As shown in the figure, the thin film solar cell layer 210 and the light shielding layer 220 in the black matrix area 200 correspond to a light leakage shielding area of a color film substrate, so that the contrast of the display screen is effectively prevented from being reduced due to light leakage. External natural light rays are incident into the display module, and the light rays irradiate the first photovoltaic absorption layer 212 and the second photovoltaic absorption layer 112 through the first front electrode layer 211 and the second front electrode layer 111 to generate photoelectric conversion.
As a further improvement of the embodiment of the present invention, in the color resin display area 100, the thin film solar cell wire 110 may be selectively disconnected according to the brightness requirement of the display screen, because the color of the second photovoltaic absorption layer 112 is dark red, the selective disconnection of the thin film solar cell wire 110 may reduce the influence on the color resin display area 100. It should be understood that each thin film solar cell line 110 should be connected to the thin film solar cell layer 210 for effective cell function. The thin film solar cell routing 110 and the thin film solar cell layer 210 may be a single junction thin film solar cell structure or a multi-junction thin film solar cell structure, and the present invention is not particularly limited.
In an embodiment of the present invention, a side of the first front electrode layer 211 facing the first light absorbing layer may be textured by a chemical texturing process or MOCVD to improve light absorption of the first light absorbing layer, and a side of the second front electrode layer 111 facing the second light absorbing layer may be textured by a chemical texturing process or MOCVD to improve light absorption of the second light absorbing layer. The light-shielding layer 220 is made of a material such as black resin, and is generally similar to a black matrix material used in a conventional color filter substrate. The light-shielding layer 220 may also be made of ferrous metal, which can prevent light generated by the backlight from being reflected back to the array substrate, which may cause the tft to absorb light and affect the display effect.
As shown in fig. 5, as a further improvement of the embodiment of the present invention, a first metal auxiliary layer 214 is further disposed at an outermost periphery of the black matrix region 200 to reduce resistance of the first front electrode layer 211 and/or the first back electrode layer 213, so as to improve conversion efficiency of the thin film solar cell layer 210 under strong light, and facilitate extraction of the first front electrode layer 211 and the first back electrode layer 213. The width of the edge of the black matrix region 200 may be greater than the width of the middle position of the black matrix region 200 in order to improve the conversion efficiency of the thin film solar cell layer 210. It should be understood that the metal auxiliary layer of the first front electrode layer 211 and the metal auxiliary layer of the first back electrode layer 213 should be insulated and separated by the insulating layer 20 to avoid short circuit. The first metal auxiliary layer 214 can be used as a total positive and negative grid bus to lead out the positive and negative poles of the solar cell.
As a further improvement of the embodiments of the present invention, as shown in fig. 6 to fig. 7, for a large-area display module, the resistance of the black matrix region 200 in the middle region is relatively large, and therefore, a second metal auxiliary layer 215 is further disposed at the intersection of the middle region of the black matrix region 200 to reduce the resistance of the first front electrode layer 211 and/or the first back electrode layer 213 in the middle region, and the second metal auxiliary layer 215 can be led out to be connected to the gate bus. In a specific implementation, the second metal auxiliary layer 215 may be connected to the first front electrode layer 211 by partially hollowing out the first light absorbing layer and the first back electrode layer 213 at the crossing position, and/or the second metal auxiliary layer 215 may be connected to the first back electrode layer 213, and the second metal auxiliary layer 215 connected to the first front electrode layer 211 and the second metal auxiliary layer 215 connected to the first back electrode layer 213 may be disposed in an insulating and spaced manner.
As a further improvement of the embodiment of the invention, when the area of the display module is large enough, the resistance of the thin-film solar cell layer 210 greatly affects the efficiency under strong light, in order to reduce the resistance of the thin-film solar cell layer 210, the first photovoltaic absorption layer 212 is disposed at a partial position of the black matrix region 200, the first photovoltaic absorption layer 212 is not disposed at a partial position, and the first metal layer 216 is disposed in the black matrix region 200 without the first photovoltaic absorption layer 212 and connected to the first front electrode layer 211 for further reducing the resistance of the first front electrode layer 211, and the first metal layer 216 is insulated from the first back electrode layer 213 and can extend above the first photovoltaic absorption layer 212. Preferably, the position where the first photovoltaic absorption layer 212 is not arranged is the narrower position of the black matrix region 200, the first photovoltaic absorption layer 212 may not be arranged at intervals of 500um, and the actual distance is selected to increase or decrease according to the actual light intensity of the environment in use.
In the embodiment of the invention, the insulating layer 20 may be made of organic material or inorganic material such as SiNx.
As shown in fig. 9, the display module further includes a common electrode layer 300, the common electrode layer 300 is formed on the outer side surfaces of the color resin display area 100 and the black matrix area 200, a second metal layer 217 that is not connected to the first front electrode layer 211 and the second front electrode layer 111 is further disposed on the thin film solar cell layer 210 and the thin film solar cell wiring 110, and the light shielding layer 220 is further provided with a through hole to connect the common electrode layer 300 to the second metal layer 217, so as to reduce the resistance of the common electrode layer 300. Preferably, the diameter of the through hole is 3 μm to 15 μm, and the performance is the best. The material of the common electrode layer 300 may be ITO or AZO. It should be understood that the display module according to the embodiment of the invention may not be provided with the common electrode layer 300.
In the embodiment of the invention, the materials of the first front electrode layer 211, the first back electrode layer 213, the second front electrode layer 111, and the second back electrode layer 113 may all be AZO, and the transmittance is high.
Example two
As shown in fig. 10, an embodiment of the present invention provides a method for manufacturing a display module integrated with a thin film solar cell, including the following steps:
step S1: forming a first front electrode layer 211 and a second front electrode layer 111 on the glass substrate 10; the film forming temperature is 170-350 ℃, and the film forming thickness is 50-1000 nm; the first front electrode layer 211 and the second front electrode layer 111 may be selectively textured with low-concentration HCl or an alkaline substance on the surface of the side away from the glass substrate 10 to form an uneven plane, so as to improve absorption of solar reflected light. The first front electrode layer 211 and the second front electrode layer 111 both adopt transparent electrodes, so that the transmittance is improved, and the influence on the display effect is reduced. It should be understood that the first front electrode layer 211 and the second front electrode layer 111 may be formed by film formation at the same time, and the process is simpler.
Step S2: the first front electrode layer 211 is subjected to chemical vapor deposition to form a first photovoltaic absorber layer 212, and the second front electrode layer 111 is subjected to chemical vapor deposition to form a second photovoltaic absorber layer 112. Similarly, the first photovoltaic absorber layer 212 and the second photovoltaic absorber layer 112 are also formed by simultaneous film formation.
Specifically, the first photovoltaic absorption layer 212 and the second photovoltaic absorption layer 112 are divided into a P layer, an I layer and an N layer, wherein the thickness of the P layer is 10-90 nm, the film forming temperature is 150-280 ℃, the thickness of the I layer is 200-700 nm, the film forming temperature is 150-280 ℃, the thickness of the N layer is 20-80 nm, and the film forming temperature is 150-230 ℃.
Step S3: forming a first back electrode layer 213 on the first photovoltaic absorption layer 212 and forming a second back electrode layer 113 on the second photovoltaic absorption layer 112; the first back electrode layer 213 and the second back electrode layer 113 both adopt transparent electrodes, so that the effect of double-sided light absorption is achieved, the transmittance is improved, and the influence on the display effect is reduced. Similarly, the first back electrode layer 213 and the second back electrode layer 113 are formed at the same time.
Step S4: after cleaning, firstly, imaging etching is carried out on the first back electrode layer 213 and the second back electrode layer 113, then, imaging etching is carried out on the first photovoltaic absorption layer 212 and the second photovoltaic absorption layer 112, and finally, imaging etching is carried out on the first front electrode layer 211 and the second front electrode layer 111;
the first back electrode layer 213, the second back electrode layer 113, the first front electrode layer 211 and the second front electrode layer 111 may be subjected to chemical etching after glue application, exposure and imaging; the first photovoltaic absorption layer 212 and the second photovoltaic absorption layer 112 are etched in a dry etching manner, wherein dry etching is directly performed without performing demolding treatment on photoresist before dry etching, so that process steps are saved.
Step S5: the light shielding layer 220 is prepared in the black matrix area 200 in a gluing exposure and development mode, black resin is covered on the first back electrode layer 213 in a gluing exposure mode, the black resin plays a role in light shielding, and the light shielding layer 220 enables the light shielding layer 220 to be larger than the thin-film solar cell layer 210 through the width of an exposure control line, so that light leakage is avoided.
Step S6: the RGB sub-pixels are prepared in a glue coating, exposing and developing mode sequentially to form a color resin display area 100, and then a common electrode layer 300 is plated on the leveling layer at the outer sides of the color resin display area 100 and the black matrix area 200 in a physical vapor deposition mode.
As a further improvement of the second embodiment of the present invention, the method further includes performing a manufacturing process of partially disconnecting the trace in the color resin display area 100, where the disconnected portion is formed without using a mask, etching away the second back electrode by a chemical wet etching method, then etching away the second light absorbing layer by a dry etching method, and then etching away the second front electrode by a chemical wet etching method. Since the second photovoltaic absorption layer 112 is dark red in color, selectively disconnecting the thin film solar cell traces 110 can reduce the influence on the color resin display area 100.
As a further improvement of the second embodiment of the present invention, the method further includes fabricating a first metal auxiliary layer 214 on the outermost periphery of the black matrix region 200, and the first metal auxiliary layer 214 is formed by physical vapor deposition. This step also includes the fabrication of an insulating layer 20, which insulating layer 20 insulates and separates the first metal auxiliary layer 214 in contact with the first front electrode layer 211 and the first metal auxiliary layer 214 in contact with the first back electrode layer 213. The first metal auxiliary layer 214 can reduce the resistance of the first front electrode layer 211 and the first back electrode layer 213, improve the conversion efficiency of the thin film solar cell layer 210 under strong light, and facilitate the leading-out of the first front electrode layer 211 and the first back electrode layer 213.
When the insulating layer 20 is made of organic materials, the organic materials can be prepared by gluing, exposing, developing, pad printing or silk printing, and the process is simpler. When the insulating layer 20 is protected by nonmetal such as SiNx and SiO2, the insulating layer may be formed by Chemical Vapor Deposition (CVD) or magnetron sputtering, and then be dry etched into a pattern after being patterned by exposure to yellow light.
As a further improvement of the second embodiment of the present invention, the second metal auxiliary layer 215 is formed at the intersection of the middle region of the black matrix region 200, the first back electrode and the first photovoltaic absorption layer 212 are wet-etched and dry-etched at one time by setting a mask at the intersection of the middle region of the black matrix region 200, the first front electrode is not etched, and then the first front electrode layer 211 is led out by forming the second metal auxiliary layer 215 to reduce the resistance. The second metal auxiliary layer 215 is used to reduce the resistance of the second front electrode layer 111 in this area.
As a further improvement of the second embodiment of the present invention, the manufacturing method further includes removing the first photovoltaic absorption layer 212 in the black matrix region 200, after the first back electrode is etched away, after the exposed first photovoltaic absorption layer 212 is etched by using a dry etching method, the first metal layer 216 is in contact connection with the first front electrode by using a plating method. When the area of the display module is large enough, the resistance of the thin-film solar cell layer 210 greatly affects the efficiency under strong light, and the manufacturing of removing the first photovoltaic absorption layer 212 can reduce the resistance of the thin-film solar cell layer 210.
As a further improvement of the second embodiment of the present invention, a second metal layer 217 is further formed on the first back electrode layer 213 and the second back electrode layer 113, and an insulating layer 20 is further formed between the second metal layer 217 and the first back electrode layer 213 and the second back electrode layer 113. The second metal layer 217 and the first metal auxiliary layer 214 may be formed by forming films at the same time, the light-shielding layer 220 may be formed by exposing through holes, and the common electrode may be directly connected to the second metal layer 217 through the through holes after the common electrode layer 300 is coated on the outer sides of the color resin display area 100 and the black matrix area 200. The second metal layer 217 is formed to reduce the resistance of the common electrode layer 300.
The preparation method of the display module integrated with the thin-film solar cell provided by the embodiment of the invention has the advantages that the manufacturing process of the display module is simpler and more convenient, the manufacturing cost is lower, the display effect is improved, and the resistance of the cell is reduced.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the embodiments of the present invention and not for limiting the same, and although the embodiments of the present invention are described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the embodiments of the present invention, and these modifications or equivalent substitutions cannot make the modified technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The display module integrated with the thin-film solar cell comprises a glass substrate, wherein a color resin display area and a black matrix area are arranged on one side, facing the light emitting direction of the display module, of the glass substrate.
2. The integrated thin-film solar cell display module according to claim 1, wherein the thin-film solar cell layer comprises a first front electrode layer, a first photovoltaic absorption layer and a first back electrode layer which are sequentially stacked and disposed on a glass substrate, and the light shielding layer is disposed on the first back electrode layer; the thin-film solar cell wiring comprises a second front electrode layer, a second photovoltaic absorption layer and a second back electrode layer which are sequentially arranged on the glass substrate in a stacking mode, and a shading layer is not arranged on the thin-film solar cell wiring.
3. The display module of integrated thin film solar cells of claim 1 or 2, wherein the thin film solar cell traces are selectively disconnectable in the color resin display area.
4. The display module of integrated thin film solar cell of claim 1 or 2, wherein the outermost periphery of the black matrix region is further provided with a first metal auxiliary layer to reduce the resistance of the first front electrode layer and/or the first back electrode layer.
5. The display module of integrated thin film solar cells as claimed in claim 1 or 2, wherein a second metal auxiliary layer is further disposed at the crossing position of the middle region of the black matrix region to reduce the resistance of the first front electrode layer and/or the first back electrode layer in the region.
6. The display module of integrated thin film solar cells as claimed in claim 1 or 2, wherein the black matrix region is partially provided with a first photovoltaic absorption layer, partially provided with no first photovoltaic absorption layer, and provided with a first metal layer connected with the first front electrode layer, and the first metal layer is insulated from the first back electrode layer.
7. The display module of integrated thin-film solar cells as claimed in claim 1 or 2, further comprising a common electrode layer formed on the outer side of the color resin display region and the black matrix region, wherein a second metal layer not connected to the first front electrode layer and the second front electrode layer is further provided on the wiring of the thin-film solar cell layer and the thin-film solar cell, and the light-shielding layer is further provided with a through hole to connect the common electrode layer to the second metal layer.
8. The method for preparing the display module integrated with the thin film solar cell according to any one of claims 1 to 7, comprising the following steps:
step S1: forming a first front electrode layer and a second front electrode layer on a glass substrate;
step S2: carrying out chemical vapor deposition film formation of a first photovoltaic absorption layer on the first front electrode layer, and carrying out chemical vapor deposition film formation of a second photovoltaic absorption layer on the second front electrode layer;
step S3: forming a first back electrode layer on the first photovoltaic absorption layer and forming a second back electrode layer on the second photovoltaic absorption layer; the first back electrode layer and the second back electrode layer are both transparent electrodes;
step S4: after cleaning, firstly carrying out imaging etching on the first back electrode layer and the second back electrode layer, then carrying out imaging etching on the first photovoltaic absorption layer and the second photovoltaic absorption layer, and finally carrying out imaging etching on the first front electrode layer and the second front electrode layer;
step S5: preparing a light shielding layer in the black matrix area in a gluing, exposing and developing mode;
step S6: preparing RGB sub-pixels by gluing, exposing and developing to form a color resin display area, and plating a common electrode layer on the leveling layer outside the color resin display area and the black matrix area by physical vapor deposition.
9. The method according to claim 8, further comprising forming a second metal auxiliary layer at the intersection of the middle region of the black matrix region, wet etching the first back electrode layer and dry etching the first photovoltaic absorption layer at one time by presetting a mask at the intersection of the middle region of the black matrix region, wherein the first front electrode layer is not etched, and then leading out the first front electrode layer by forming the second metal auxiliary layer.
10. The method according to claim 9, further comprising forming a second metal layer on the first back electrode layer and the second back electrode layer, wherein an insulating layer is formed between the second metal layer and the first back electrode layer and between the second metal layer and the second back electrode layer, the light-shielding layer is exposed to form a through hole, and the common electrode is directly connected to the second metal layer through the through hole after the common electrode layer is coated on the outer sides of the color resin display region and the black matrix region.
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| CN202010018511.1A CN111081152A (en) | 2020-01-08 | 2020-01-08 | Display module integrated with thin-film solar cell and preparation method thereof |
| PCT/CN2020/124405 WO2021139332A1 (en) | 2020-01-08 | 2020-10-28 | Display module having integrated thin film solar cell, and manufacturing method therefor |
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| CN202010018511.1A CN111081152A (en) | 2020-01-08 | 2020-01-08 | Display module integrated with thin-film solar cell and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021139332A1 (en) * | 2020-01-08 | 2021-07-15 | 信利半导体有限公司 | Display module having integrated thin film solar cell, and manufacturing method therefor |
| CN117475776A (en) * | 2023-12-27 | 2024-01-30 | 江苏天华汽车电子科技有限公司 | Electronic module and electronic equipment |
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| KR100964217B1 (en) * | 2004-02-21 | 2010-06-17 | 삼성에스디아이 주식회사 | A solar cell integrated display device and a method for fabricating the same |
| CN103760707A (en) * | 2014-01-09 | 2014-04-30 | 北京京东方光电科技有限公司 | Array substrate, liquid crystal display panel and display device |
| CN109841662A (en) * | 2019-02-21 | 2019-06-04 | 京东方科技集团股份有限公司 | A kind of display panel and preparation method thereof, display device |
| CN110045536A (en) * | 2019-03-29 | 2019-07-23 | 武汉华星光电技术有限公司 | Color membrane substrates and display panel |
| CN110518079B (en) * | 2019-09-29 | 2024-05-07 | 信利半导体有限公司 | Thin film photovoltaic cell with high photoelectric conversion rate and preparation process thereof |
| CN111081152A (en) * | 2020-01-08 | 2020-04-28 | 信利半导体有限公司 | Display module integrated with thin-film solar cell and preparation method thereof |
| CN210836906U (en) * | 2020-01-08 | 2020-06-23 | 信利半导体有限公司 | Display module integrated with thin-film solar cell |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021139332A1 (en) * | 2020-01-08 | 2021-07-15 | 信利半导体有限公司 | Display module having integrated thin film solar cell, and manufacturing method therefor |
| CN117475776A (en) * | 2023-12-27 | 2024-01-30 | 江苏天华汽车电子科技有限公司 | Electronic module and electronic equipment |
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