CN111066165B - 压电能量收集的弯曲结构及其制造方法 - Google Patents

压电能量收集的弯曲结构及其制造方法 Download PDF

Info

Publication number
CN111066165B
CN111066165B CN201880045214.7A CN201880045214A CN111066165B CN 111066165 B CN111066165 B CN 111066165B CN 201880045214 A CN201880045214 A CN 201880045214A CN 111066165 B CN111066165 B CN 111066165B
Authority
CN
China
Prior art keywords
beam reinforcement
anchor
major surface
piezoelectric
reinforcement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880045214.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN111066165A (zh
Inventor
利博尔·鲁费尔
斯坎达·巴萨尔
埃米莉·翠奥斯
圭拉姆·费林
克莱尔·班底格尼斯
洪·勒康
波格丹·洛欣斯基
安·阮-定
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vermon SA
Universite Grenoble Alpes
Original Assignee
Vermon SA
Universite Grenoble Alpes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vermon SA, Universite Grenoble Alpes filed Critical Vermon SA
Publication of CN111066165A publication Critical patent/CN111066165A/zh
Application granted granted Critical
Publication of CN111066165B publication Critical patent/CN111066165B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H10N30/306—Cantilevers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201880045214.7A 2017-07-05 2018-07-05 压电能量收集的弯曲结构及其制造方法 Active CN111066165B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762528886P 2017-07-05 2017-07-05
US62/528,886 2017-07-05
US201762532195P 2017-07-13 2017-07-13
US62/532,195 2017-07-13
PCT/IB2018/000716 WO2019008431A1 (en) 2017-07-05 2018-07-05 PIEZOELECTRIC ENERGY COLLECTION FOLDING STRUCTURE AND METHOD FOR MANUFACTURING SAME

Publications (2)

Publication Number Publication Date
CN111066165A CN111066165A (zh) 2020-04-24
CN111066165B true CN111066165B (zh) 2023-09-26

Family

ID=63080204

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880045214.7A Active CN111066165B (zh) 2017-07-05 2018-07-05 压电能量收集的弯曲结构及其制造方法

Country Status (5)

Country Link
US (1) US11387403B2 (https=)
EP (1) EP3649678B1 (https=)
JP (1) JP7045673B2 (https=)
CN (1) CN111066165B (https=)
WO (1) WO2019008431A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019227014A1 (en) * 2018-05-24 2019-11-28 Baker Hughes, A Ge Company, Llc Transducers including laser etched substrates
EP3892325B1 (fr) 2020-04-09 2022-03-16 Cairdac Implant cardiaque autonome de type capsule leadless, comprenant un récupérateur d'énergie à lame piézoélectrique
JP7379296B2 (ja) * 2020-08-25 2023-11-14 京セラ株式会社 振動発電デバイスおよびセンサモジュール
DE102022200796A1 (de) * 2022-01-25 2023-07-27 Robert Bosch Gesellschaft mit beschränkter Haftung Piezoelektrische Wandlervorrichtung
CN114679086A (zh) * 2022-03-30 2022-06-28 长安大学 一种基于挠曲电效应的风力发电装置及照明系统
US12549906B2 (en) * 2022-03-31 2026-02-10 Skyworks Solutions, Inc. MEMS sensor with two compliances
KR102923337B1 (ko) * 2023-12-27 2026-02-05 국립군산대학교산학협력단 프라잉 하중을 이용한 발전 타워
CN118257364B (zh) * 2024-05-07 2025-03-11 北京工业大学 具有复合减振功能的多翼式悬挑阻尼器

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698883A (en) * 1980-01-10 1981-08-08 Sony Corp Transducer
JPH06203351A (ja) * 1992-10-06 1994-07-22 Matsushita Electric Ind Co Ltd 圧電アクチュエータおよびヘッドアクチュエータ
US5408376A (en) * 1992-10-06 1995-04-18 Matsushita Electric Industrial Co., Ltd. Piezoelectric head actuator
CN1154478A (zh) * 1995-10-09 1997-07-16 松下电器产业株式会社 加速度传感器，其制造方法和用该传感器的冲击检测装置
CN1638507A (zh) * 2003-10-27 2005-07-13 Nec东金株式会社 激励器
JP2009288617A (ja) * 2008-05-30 2009-12-10 Ricoh Co Ltd 圧電バイモルフ素子を用いたベルト加振装置、及びこれを用いた転写装置並びに画像形成装置
FR2971650A1 (fr) * 2011-02-11 2012-08-17 Commissariat Energie Atomique Didspositif de conversion d'energie mecanique en energie electrique optimise
CN104022685A (zh) * 2014-05-23 2014-09-03 厦门大学 可调频阵列式压电悬臂梁俘能器及可调频阵列式压电悬臂梁俘能方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3866258B2 (ja) * 2004-08-24 2007-01-10 太平洋セメント株式会社 圧電デバイスおよびこれを備える圧電スイッチ
JP2007074062A (ja) * 2005-09-05 2007-03-22 Citizen Electronics Co Ltd パネル型スピーカ用エキサイタ及びパネル型スピーカ
US7663295B2 (en) * 2005-12-15 2010-02-16 Imec Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment
GB2447600A (en) * 2006-01-25 2008-09-17 Univ California Energy harvesting by means of thermo-mechanical device utilizing bistable ferromagnets
US20080302024A1 (en) * 2007-06-05 2008-12-11 Gm Global Technology Operations, Inc. Tunable impedance load-bearing structures
WO2013035478A1 (ja) * 2011-09-06 2013-03-14 株式会社村田製作所 圧電アクチュエータ
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US9972763B2 (en) * 2016-02-06 2018-05-15 Sharp Laboratories Of America, Inc. Bi-stable MEMS cantilever heat harvester

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698883A (en) * 1980-01-10 1981-08-08 Sony Corp Transducer
JPH06203351A (ja) * 1992-10-06 1994-07-22 Matsushita Electric Ind Co Ltd 圧電アクチュエータおよびヘッドアクチュエータ
US5408376A (en) * 1992-10-06 1995-04-18 Matsushita Electric Industrial Co., Ltd. Piezoelectric head actuator
CN1154478A (zh) * 1995-10-09 1997-07-16 松下电器产业株式会社 加速度传感器，其制造方法和用该传感器的冲击检测装置
CN1638507A (zh) * 2003-10-27 2005-07-13 Nec东金株式会社 激励器
JP2009288617A (ja) * 2008-05-30 2009-12-10 Ricoh Co Ltd 圧電バイモルフ素子を用いたベルト加振装置、及びこれを用いた転写装置並びに画像形成装置
FR2971650A1 (fr) * 2011-02-11 2012-08-17 Commissariat Energie Atomique Didspositif de conversion d'energie mecanique en energie electrique optimise
CN104022685A (zh) * 2014-05-23 2014-09-03 厦门大学 可调频阵列式压电悬臂梁俘能器及可调频阵列式压电悬臂梁俘能方法

Also Published As

Publication number Publication date
CN111066165A (zh) 2020-04-24
US20200220067A1 (en) 2020-07-09
WO2019008431A1 (en) 2019-01-10
JP2020526168A (ja) 2020-08-27
EP3649678B1 (en) 2022-11-30
EP3649678A1 (en) 2020-05-13
US11387403B2 (en) 2022-07-12
JP7045673B2 (ja) 2022-04-01

Similar Documents

Publication Publication Date Title
CN111066165B (zh) 压电能量收集的弯曲结构及其制造方法
US8446072B2 (en) High-efficiency compact miniaturized energy harvesting and storage device
US20070125176A1 (en) Energy harvesting device and methods
CN112849427A (zh) 用于缺陷修复的方法和补丁
JP2014511664A (ja) 機械的エネルギを電気的エネルギに変換する装置
WO2010147080A1 (ja) 圧電発電装置
Fowler et al. An omnidirectional MEMS ultrasonic energy harvester for implanted devices
US20190110132A1 (en) Plate Spring
Kim et al. Effect of thickness ratio in piezoelectric/elastic cantilever structure on the piezoelectric energy harvesting performance
JP2015050935A (ja) 発電素子
Jeong et al. Electromechanical modeling and power performance analysis of a piezoelectric energy harvester having an attached mass and a segmented piezoelectric layer
EP3424086B1 (en) Piezoelectric energy harvester system with composite shim
Ibrahim et al. Numerical and experimental study of a gauge-shaped beam for improved performance of piezoelectric energy harvester
EP3989299B1 (en) Piezoelectric device comprising flexible single crystalline piezoelectric linbo3 and/or litao3 films integrated on flexible substrate and methods for producing the same
Alrashdan et al. Power density optimization for MEMS piezoelectric micro power generator below 100 Hz applications
US8686613B2 (en) Power generating device and electronic device
JP2011024397A (ja) 圧電発電装置
CN109167531A (zh) 一种基于流致振动的微型能量收集装置及其制备方法
Kang et al. Optimal design of piezoelectric cantilever for a micro power generator with microbubble
WO2019031566A1 (ja) Ｍｅｍｓ振動素子、ｍｅｍｓ振動素子の製造方法および振動発電素子
Li et al. Design and Optimization of a Novel Multimodal Piezoelectric Energy Harvester With Asymmetrically Branched Beams Operating in d 15 Mode
Saxena et al. Design, modeling and parametric analysis of piezoelectric energy scavenger on silicon substrate as a vibration sensor
Emam Finite element analysis of composite piezoelectric beam using comsol
Seemann et al. Influence of bonding on the efficiency of piezoceramic patches as actuators in smart structures
Asadi et al. Variable distance interdigitated electrodes design to improve the performance of cantilever piezoelectric thin films nanogenerators

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant