CN111061055A - MEMS micro-mirror scanning light path system - Google Patents
MEMS micro-mirror scanning light path system Download PDFInfo
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- CN111061055A CN111061055A CN201911411906.1A CN201911411906A CN111061055A CN 111061055 A CN111061055 A CN 111061055A CN 201911411906 A CN201911411906 A CN 201911411906A CN 111061055 A CN111061055 A CN 111061055A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention belongs to the technical field of scanning micro-mirrors, and particularly relates to an MEMS micro-mirror scanning light path system, which comprises: the device comprises a laser, a compensation lens, a diaphragm aperture, an MEMS (micro-electromechanical system) micromirror, a beam expanding lens and an imaging screen; and light rays generated by the laser sequentially pass through the compensation lens, the diaphragm aperture, the MEMS micro-mirror and the beam expanding lens and are displayed on the imaging screen. The scheme has the characteristics of adjustable projection distance and clear imaging at different distances, and the whole optical system has a large scanning angle and large image picture and can realize the imaging of a large picture with a small volume.
Description
Technical Field
The invention belongs to the technical field of scanning micromirrors, and particularly relates to an MEMS micromirror scanning light path system.
Background
In the prior art, the direct scanning of the MEMS micro-mirror is more, because of the limitation of the whole design and processing technology of the MEMS micro-mirror, the scanning angle is generally +/-6 degrees at most at present, the scanning picture is smaller, and a larger picture is obtained by increasing the projection distance, so that the whole volume space is larger. In addition, if the scanning angle of the MEMS micro-mirror is too large, the linearity of the driving voltage is poor, the stability of the scanning repetition is poor, and the image jitter is severe.
Disclosure of Invention
In order to solve the above problems in the prior art, the present invention provides a scanning optical path system of a MEMS micro-mirror. The technical problem to be solved by the invention is realized by the following technical scheme:
the optical path of the optical design solves the problems of small MEMS imaging scanning angle and small picture and solves the problem of large occupied space of projection. The invention is particularly characterized in that a biconcave spherical beam expanding lens and a plano-convex spherical beam expanding compensation lens are used, and a low-cost scheme is used for realizing an excellent amplification scanning angle and simultaneously ensuring the definition of an image.
A MEMS micro-mirror scanning optical path system, comprising: the device comprises a laser, a compensation lens, a diaphragm aperture, an MEMS (micro-electromechanical system) micromirror, a beam expanding lens and an imaging screen; and light rays generated by the laser sequentially pass through the compensation lens, the diaphragm aperture, the MEMS micro-mirror and the beam expanding lens and are displayed on the imaging screen.
Furthermore, the laser and the compensation lens can be communicated with a light path through an entrance mirror.
Furthermore, the aperture of the aperture is matched with the size of the scanning mirror of the MEMS micro-mirror, so that diffraction fringes caused by the fact that edge light irradiates on the comb tooth microstructure on the 5 sides of the MEMS micro-mirror due to overlarge light spots are avoided.
Further, the laser can be laser welded with an aspheric lens.
The invention has the beneficial effects that:
the beam expanding lens can realize the beam expanding and amplifying of the scanning angle and can overcome the problem of image shaking caused by overlarge scanning angle of the scanning micromirror; the beam expanding compensation lens can control the size of a scanning beam spot, and the definition of the center and the edge of a laser scanning picture can be consistent; the interference of laser stray light on a scanned image can be effectively inhibited by the limitation of the small aperture of the diaphragm; the projection distance can be adjusted, and clear imaging can be realized at different distances. The whole optical system has a large scanning angle and can realize the imaging of a large picture with a small volume; the Laser Diode (LD) is used for scanning and imaging, and the laser diode has the characteristics of high image brightness, low power of only 3mw, no need of heat dissipation and the like.
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic view of the principle of direct projection of the optical path system.
Fig. 2 is a schematic diagram of the reflection principle of the optical path system.
In the figure: 1. a laser; 2. a mirror; 3. a compensation lens; 4. a diaphragm aperture; 5. a MEMS micro-mirror; 6. a beam expanding lens; 7. an imaging screen.
Detailed Description
To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.
A MEMS micro-mirror scanning optical path system, comprising: the device comprises a laser 1, a compensating lens 3, a diaphragm aperture 4, an MEMS (micro-electromechanical system) micromirror 5, a beam expanding lens 6 and an imaging screen 7; light generated by the laser 1 passes through the compensating lens 3, the diaphragm aperture 4, the MEMS micro-mirror 5 and the beam expanding lens 6 in sequence and then is displayed on the imaging screen.
The laser 1 and the compensation lens 3 can be communicated with each other through the entrance mirror 2.
The aperture of the aperture 4 is matched with the size of the scanning lens of the MEMS micro-mirror 5, so that diffraction stripes generated when edge light irradiates the comb tooth microstructure on the edge of the MEMS micro-mirror 5 due to overlarge light spots are avoided.
The laser 1 may be laser welded with an aspherical lens.
The laser 1 may be monochromatic or may employ an RGB tristimulus synthesis scheme.
The scheme designs a structure for installing the small hole of the diaphragm and the compensating lens together, and the preferable structure can be used as the diaphragm by blackening the two end surfaces of the compensating lens and can be arranged on the front surface or the rear surface. The cost and the process assembly flow are reduced.
First, the laser 1 is driven by low power consumption to emit a laser beam, where the laser beam may be a collimated beam or a beam with a certain beam divergence angle. The laser beam passes through the reflecting mirror 2 or directly irradiates the compensating lens 3, and two schemes shown in fig. 1 and 2 are adopted, wherein one scheme is laser reflection, and the other scheme is laser direct irradiation, and the reflection scheme is preferentially adopted at present due to the existing volume problem of the laser.
And thirdly, the divergence angle of the laser emergent light is controlled by the compensating lens 3 after the laser is reflected, redundant stray light is shielded through the small diaphragm hole 4, the size of the diaphragm aperture needs to be matched with the size of the MEMS scanning lens, and diffraction fringes are prevented from being generated when the edge light irradiates on the comb tooth microstructure on the edge of the MEMS micromirror 5 because the light spot is too large.
Secondly, the shaped light beam irradiates the fast scanning MEMS micro-mirror 5 to form a pattern according to a certain scanning rule, and the pattern is repeatedly scanned and imaged according to a pattern track by using the human eye vision dwell time difference.
Finally, the image is enlarged by the beam expanding lens 6, and a large pattern is scanned and imaged on the imaging screen 7.
The scheme solves the problems of small MEMS imaging scanning angle and small picture, and solves the problem of large occupied space of projection. The invention is particularly characterized in that a biconcave spherical beam expanding lens and a plano-convex spherical beam expanding compensation lens are used, and a low-cost scheme is used for realizing an excellent amplification scanning angle and simultaneously ensuring the definition of an image.
The system is additionally provided with a compensation lens to ensure that the scanning light spot does not change along with the change of the scanning angle;
the compensating lens of the system can also compensate the concave surface reflection convergence phenomenon caused by stress action in the MEMS micromirror processing;
in the system, the aspheric lens and the straw hat laser are welded by laser welding, so that the volume is reduced. It is further advantageous that a three-color synthesis scheme can be implemented.
The foregoing is a more detailed description of the invention in connection with specific preferred embodiments and it is not intended that the invention be limited to these specific details. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (4)
1. A MEMS micro-mirror scanning optical path system is characterized in that: the method comprises the following steps: the device comprises a laser (1), a compensating lens (3), a diaphragm aperture (4), an MEMS (micro-electromechanical system) micromirror (5), a beam expanding lens (6) and an imaging screen (7); and light rays generated by the laser (1) sequentially pass through the compensation lens (3), the diaphragm aperture (4), the MEMS micro-mirror (5) and the beam expanding lens (6) and then are displayed on an imaging screen.
2. The MEMS micro-mirror scanning optical path system of claim 1, wherein: the laser (1) and the compensation lens (3) can be communicated with a light path through the entrance reflector (2).
3. The MEMS micro-mirror scanning optical path system of claim 1, wherein: the aperture of the diaphragm aperture (4) is matched with the size of the scanning lens of the MEMS micro-mirror (5), so that diffraction fringes caused by the fact that edge light irradiates the comb tooth microstructure on the edge of the MEMS micro-mirror (5) due to overlarge light spots are avoided.
4. The MEMS micro-mirror scanning optical path system of claim 1, wherein: the laser (1) may laser weld aspheric lenses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911411906.1A CN111061055A (en) | 2019-12-31 | 2019-12-31 | MEMS micro-mirror scanning light path system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911411906.1A CN111061055A (en) | 2019-12-31 | 2019-12-31 | MEMS micro-mirror scanning light path system |
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| CN111061055A true CN111061055A (en) | 2020-04-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201911411906.1A Pending CN111061055A (en) | 2019-12-31 | 2019-12-31 | MEMS micro-mirror scanning light path system |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080174844A1 (en) * | 2007-01-22 | 2008-07-24 | Brother Kogyo Kabushiki Kaisha | Light Scanning Device |
| CN107861248A (en) * | 2017-12-25 | 2018-03-30 | 歌尔科技有限公司 | Laser beam flying display device and augmented reality glasses |
| CN109870825A (en) * | 2017-12-01 | 2019-06-11 | 北京万集科技股份有限公司 | A kind of colimated light system and laser radar based on MEMS galvanometer |
| US20190324265A1 (en) * | 2015-07-06 | 2019-10-24 | Mirrorcle Technologies, Inc. | Head up display based on laser mems emissive film projection system |
-
2019
- 2019-12-31 CN CN201911411906.1A patent/CN111061055A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080174844A1 (en) * | 2007-01-22 | 2008-07-24 | Brother Kogyo Kabushiki Kaisha | Light Scanning Device |
| US20190324265A1 (en) * | 2015-07-06 | 2019-10-24 | Mirrorcle Technologies, Inc. | Head up display based on laser mems emissive film projection system |
| CN109870825A (en) * | 2017-12-01 | 2019-06-11 | 北京万集科技股份有限公司 | A kind of colimated light system and laser radar based on MEMS galvanometer |
| CN107861248A (en) * | 2017-12-25 | 2018-03-30 | 歌尔科技有限公司 | Laser beam flying display device and augmented reality glasses |
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Effective date of registration: 20210426 Address after: Room 206, building A1, phase II, software new town, tianguba Road, high tech Zone, Xi'an, Shaanxi 710000 Applicant after: Xi'an Huiju yunchuang Electronic Technology Co.,Ltd. Address before: 710003 room 206, block A1, phase II, software new town, Xi'an high tech Zone, Shaanxi Province Applicant before: Jiangsu Zhiju Automobile Electronics Co.,Ltd. Xi'an Branch |
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Application publication date: 20200424 |